Vertical piece-mounting frame for magnetron sputtering coating

A magnetron sputtering coating and chip loading technology, which is used in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problem of cumbersome coating process, inability to adapt to masks or samples, and unsatisfactory effects and other problems to achieve the effect of saving time

Pending Publication Date: 2020-06-26
杭州比凡科电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The film loading racks of existing large-scale coating equipment generally adopt the form of fixed rods, which cannot adapt to masks or samples of different sizes, which makes the coating process more cumbersome, difficult to improve the efficiency of coating work, and the effect of products after coating is not satisfactory

Method used

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  • Vertical piece-mounting frame for magnetron sputtering coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] figure 1 In the shown embodiment, the vertical film loading rack further includes a positioning rod 4 , a counterweight 1 and a guide seat 3 .

[0027] The cross bar and the vertical bar of the main frame 2 can be welded and fixed by square tubes, and the sheet loading cross bar 5 adopts a plate with a certain width to facilitate the setting of a draw-in groove on its surface.

[0028] The positioning rod 4 is parallel to the vertical bars of the main frame 2, and the two ends are connected to the main frame 2 cross bars, and the middle part runs through each sheet-loading cross bar 5 . The positioning rod can locate the horizontal position of the main frame structure and each mounting cross bar, so that the clamping is stable and reliable.

[0029] The positioning rod 4 is fixedly installed at the vertical center position of the main frame 2; the middle part in the length direction of each sheet-loading cross bar 5 is provided with a through hole loosely matched with ...

Embodiment approach

[0037] Different from Embodiment 1, this embodiment does not have a counterweight, and the number of guide seats is two, which are respectively fixed on the outside of the top and bottom cross bars of the main frame, and U-shaped grooves with openings away from the main frame are provided. In this embodiment, the two ends of the bottom cross bar of the main frame are fixedly connected to the lower ends of the two vertical bars. The guide seat can be installed with the coating equipment to suit the coating position.

[0038] In this embodiment, only one card slot can be provided on one side of the film loading cross bar, but this implementation is not suitable for batch coating treatment.

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Abstract

The invention discloses a vertical piece-mounting frame for magnetron sputtering coating. The vertical piece-mounting frame comprises a main framework and at least two groups of transverse rod assemblies; the main framework comprises at least two mutually parallel vertical rods and at least two mutually parallel horizontal rods; the two ends of each transverse rod are fixedly connected with the two vertical rods respectively; each transverse rod assembly comprises a piece-mounting transverse rod parallel to the transverse rods of the main framework, and the two ends of the piece-mounting transverse rod are detachably connected to the two transverse rods of the main framework; and at least one piece-mounting clamping groove is formed in the piece-mounting transverse rod in the length direction. A piece-mounting clamping position is formed between the clamping grooves of the adjacent piece-mounting transverse rods; an opposite end of a mask plate or a sample is clamped between the clamping grooves of the adjacent piece-mounting transverse rods to realize piece-mounting. The piece-mounting transverse rods are detachably connected with the main framework transverse rods, and the heightpositions of the piece-mounting transverse rods are adjustable, so that clamping and coating of mask plates or samples of different heights and sizes can be adapted, and the coating efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of sputtering coating equipment accessories, in particular to a vertical film loading rack suitable for magnetron sputtering coating. Background technique [0002] The film loading racks of existing large-scale coating equipment generally adopt the form of fixed rods, which cannot adapt to masks or samples of different sizes, making the coating process more cumbersome, difficult to improve the efficiency of coating work, and the effect of products after coating is not satisfactory. Contents of the invention [0003] The purpose of the present invention is to provide a vertical film loading rack suitable for magnetron sputtering coating, the space of which is adjustable, which can adapt to the coating of masks or samples of different sizes, and improve the coating efficiency. [0004] The technical solution adopted by the present invention is: a vertical film loading rack suitable for magnetron sputtering c...

Claims

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Application Information

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Patent Type & AuthorityApplications(China)
IPC IPC(8): C23C14/35C23C14/50
CPCC23C14/35C23C14/50
Inventor吴疆冯斌李东滨金浩王德苗
Owner杭州比凡科电子科技有限公司