NANO particle synthesis apparatus and NANO particle synthesis method using same

Abstract

The present invention provides a nano particle synthesis apparatus capable of improving productivity of nano particles by increasing the laser pyrolysis reaction region of a source gas.

Description

technical field [0001] This application claims priority and benefit from Korean Patent Application No. 10-2018-0085185 filed with the Korean Intellectual Property Office on July 23, 2018, the entire contents of which are incorporated herein by reference. The present invention relates to a nanoparticle synthesis device capable of improving the productivity of nanoparticles, and a nanoparticle synthesis method using the nanoparticle synthesis device. Background technique [0002] Laser pyrolysis is a method for synthesizing nanoparticles by irradiating a source gas with a laser beam to decompose the source gas within a very short reaction time. As an example, when using carbon dioxide (CO 2 ) laser beam irradiation to decompose silane (SiH 4 ) gas, silicon (Si) nanoparticles can be formed. In laser pyrolysis, in order to increase productivity, it is especially important to increase the reaction area where nanoparticles are produced. [0003] A general laser pyrolysis react...

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Problems solved by technology

In addition, there is a limitation that the pyrolysis reaction needs to be performed within a short period of a few microseconds (ms) to generate nanoparticles with the designed size in the reaction region

However, these methods are limited in that the reaction efficiency has not been greatly improved, making it necessary to further require a gas-phase photocatalyst or to increase the output of the laser beam, which leads to an increase in the process cost.

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