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Linear displacement measuring device and method

A technology of linear displacement and measuring devices, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems that incremental displacement measuring equipment cannot meet the needs of manufacturing equipment, and achieve the effect of eliminating cosine error and improving accuracy

Active Publication Date: 2021-06-25
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] With the development of new industrial equipment such as long-axis CNC machine tools, traditional incremental displacement measurement equipment can no longer meet the needs of manufacturing equipment

Method used

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  • Linear displacement measuring device and method
  • Linear displacement measuring device and method

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Embodiment Construction

[0046] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

[0047] The object of the present invention is to provide a linear displacement measuring device and method, which can obtain accurate linear displacement measurement through the synthesis of two-dimensional displacement. A linear displacement measuring device provided by the present invention will be described in detail below through specific embodiments.

[0048] Such as figure 1 As shown in the structure diagram of the device, the reading head 1 is slidably connected to the sliding guide rail 2, the scale grating 3 is fixed on the sliding guide rail 2, parallel to the extension dire...

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Abstract

The invention belongs to the technical field of photoelectric displacement precision measurement, and discloses a high-precision linear displacement measurement device capable of eliminating cosine errors, which comprises a reading head, a scale grating and an output cable. The reading head comprises a transverse sensor, a longitudinal sensor, a parallel light source and a processing circuit. The scale grating comprises a transverse code channel and a longitudinal identification marked line. The light emitted by the parallel light source irradiates the scale grating, and the pattern on the scale grating is mapped to the image sensor on the reading head. The transverse sensor obtains transverse linear displacement by recognizing the transverse code. The longitudinal sensor obtains longitudinal displacement by recognizing the displacement variation of the longitudinal marked line. And the processing circuit synthesizes the transverse displacement and the longitudinal displacement to obtain the real displacement of the reading head. By adopting a two-dimensional displacement synthesis method, a cosine error caused by non-coaxiality of a measuring axis and a grating axis is effectively eliminated, and high-precision linear displacement measurement is realized.

Description

technical field [0001] The invention belongs to the technical field of photoelectric displacement precision measurement, and in particular relates to a high-precision linear displacement measurement device and method capable of eliminating cosine errors. Background technique [0002] Digital displacement measurement is a high-precision measurement technology that integrates optoelectronics and electromechanics. With its advantages of high precision, high resolution, wide measurement range, and easy connection with digital equipment, it has become the key to industrial manufacturing, aerospace, military equipment and other fields. technology. With the increasing development of the manufacturing industry, higher requirements are put forward for digital displacement measurement technology, mainly including: high resolution capability and high measurement accuracy. Therefore, the study of high-resolution and high-precision displacement measurement technology is a hot spot in th...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 于海
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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