System and method for treating toxic gas by using electrically coupled plasma
A technology for coupling plasma and toxic gases, which is applied in the field of electrochemistry, can solve the problems of large power consumption, large energy consumption, and rapid heat release, and achieve the effect of promoting purification, flexible methods, and promoting adsorption
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Embodiment 1
[0045] In this embodiment one, the toxic gas to be treated is SF 6 , according to SF 6 The chemical composition and properties, in the present embodiment one, adopt the voltage scope in the low voltage Plasma generating device in the range of 0-220V, adjust the Plasma voltage regulator, output the alternating current of 50V, 50Hz to the Plasma generating device, SF 6 In the closed Plasma generating device, sufficient ionization can be obtained. The ionized gas particles contain positive and negative ions and electrons, and the gas as a whole is electrically neutral; the internal pressure of the Plasma generating device is maintained at 0.3MPa; the purification device adopts 4V DC power supply and adopts porous The carbon rod is used as the positive electrode to connect the positive electrode of the DC power supply, and the first main group metal single substance Li is used as the cathode electrode to connect the negative electrode of the DC power supply. The sheet shape is use...
Embodiment 2
[0052] In the second embodiment, the toxic gas to be treated is CF 4 , according to CF 4 The chemical composition and properties, in the present embodiment two, adopt the voltage range in the low voltage plasma generating device in the range of 0-220V, regulate the plasma voltage regulator, output the alternating current of 50V, 50Hz to the plasma generating device, CF 4 In the closed Plasma generating device, sufficient ionization can be obtained. The ionized gas particles contain positive and negative ions and electrons, and the gas as a whole is electrically neutral; the internal pressure of the Plasma generating device is maintained at 0.3MPa; the purification device adopts 4V DC power supply and adopts porous The carbon rod is used as the positive electrode to connect the positive electrode of the DC power supply, and the second main group metal element Mg is used as the cathode electrode to connect the negative electrode of the DC power supply. The sheet shape is used to...
Embodiment 3
[0059] In this embodiment three, the toxic gas to be treated is SF 6 , according to SF 6 The chemical composition and properties, in the present embodiment three, adopt the high voltage plasma generating device that voltage range is greater than 250V, adjust the Plasma voltage regulator, output the alternating current of 350V, 50Hz to the plasma generating device, SF 6 In the closed Plasma generating device, sufficient ionization can be obtained. The ionized gas particles contain positive and negative ions and electrons, and the gas as a whole is electrically neutral; the internal pressure of the Plasma generating device is maintained at 0.3MPa; the purification device uses a 3V DC power supply and adopts porous The carbon rod is used as the positive electrode to connect the positive electrode of the DC power supply, and the first main group metal element Na is used as the cathode electrode to connect the negative electrode of the DC power supply. The sheet shape is used to in...
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