Wafer carrying device with anti-collision structure

Abstract

The invention relates to the technical field of wafer carrying, and particularly discloses a wafer carrying device with an anti-collision structure, which comprises a cubic frame, and four cross rods are arranged among four stand columns of the cubic frame; the supporting plate is fixedly installed among the four transverse rods, and a pushing and holding device is arranged at the bottom end of the supporting plate; the four damping air bags are distributed in an array mode, and the damping air bags are installed at the top end of the supporting plate; the bearing table is installed at the top end of the damping air bag, and the bearing table is used for placing a wafer boat box; the anti-rollover transverse frame is mounted on the inner wall of the top frame of the cubic frame; the lifting arm device comprises a tension spring, and a plurality of first supporting rings are arranged at the top end of the bearing table. The anti-collision performance of the carrying device is improved, the damping effect on wafers with different weights is improved, and the carrying device is provided with an automatic leveling structure for the wafers.

Description

Technical Field

[0001] The present invention relates to the technical field of wafer transport, and in particular to a wafer transport device with an anti-collision structure. Background Art

[0002] The product handling process is essential in the semiconductor chip manufacturing process. Currently, most of the product handling tools are carts. During the process of transporting products by carts, wafers and chips are often damaged due to collisions and vibrations, which increases production costs. Although some companies have adopted advanced automated handling equipment such as overhead cranes and AGVs, they cannot be used in the entire chip manufacturing process due to their high requirements for investment costs and infrastructure such as space.

[0003] Currently, wafer handling devices generally use stainless steel carts, in which shock absorption is mainly achieved by purchasing softer rollers or adding hard shock-absorbing facilities such as springs and elastic steel sheets above the rollers. However, the wafers themselves are relatively light, resulting in the stainless steel carts having no obvious overall shock-absorbing effect on the wafers during transportation. As the wafer processing size becomes larger and thinner, the risk of loss caused by wafer and chip transportation is getting higher and higher. Summary of the invention

[0004] In order to solve the above problems existing in the prior art, the present invention provides a wafer transport device with an anti-collision structure, which can solve the problems raised in the above background technology.

[0005] The purpose of the present invention can be achieved by the following technical solutions: A wafer handling device with an anti-collision structure, comprising: A cubic frame, wherein four crossbars are arranged between four upright posts of the cubic frame; A support plate, the support plate is fixedly installed between the four cross bars, and a push-grip device is provided at the bottom end of the support plate; Shock-absorbing airbags, four of which are distributed in an array and are installed on the top of the support plate; A carrying platform, which is installed on the top of the shock-absorbing airbag and is used to place the wafer boat box; An anti-rollover transverse frame, which is installed on the inner wall of the top frame of the cubic frame; A suspension arm device, the suspension arm device comprises a tension spring, a top end of the bearing platform is provided with a plurality of first support rings, and a bottom end of the anti-rollover cross frame is provided with a plurality of second support rings; A pressure regulating structure, the pressure regulating structure is used to adjust the air pressure in the shock absorbing airbag; A pressure detection device, wherein the pressure sensing device is installed on the top of the carrier platform, and the pressure sensing device is used to detect the weight of the wafer.

[0006] Preferably, pulleys are provided at the bottom ends of the four columns of the cubic frame, and a self-locking structure is provided inside the pulleys.

[0007] Preferably, a bottom guard plate is provided on the inner wall of the bottom frame of the cubic frame, and side guard plates are respectively provided between the cross bar and the top frame and the bottom frame of the cubic frame.

[0008] Preferably, the pushing and holding device includes a handle, which is located outside the cubic frame, and both ends of the handle are fixedly connected to L-shaped blocks, and the top of the vertical section of the L-shaped block is fixedly connected to the bottom end of the support plate through a fastener.

[0009] Preferably, the side wall of the handle is provided with an anti-slip cover, and the anti-slip cover of the handle has a rubber support.

[0010] Preferably, the crossbar near the push-grip device cooperates with the cubic frame to form a window for taking and placing objects.

[0011] Preferably, the pressure regulating structure includes a five-way pipe fitting, which passes through and is fixedly installed on the top middle part of the support plate, and two sections of air supply pipes are arranged between the side wall interfaces of the five-way pipe fitting and the adjacent shock-absorbing airbag ventilation ports, respectively, and an air circuit solenoid valve is arranged between the two sections of the air supply pipes, and the bottom interface of the five-way pipe fitting is connected to an air supply device.

[0012] Preferably, the air supply device includes an air pump, a bracket is installed at the bottom end of the air pump, the top end of the bracket is fixedly connected to the bottom end of the support plate, and an air supply pipe is arranged between the air port of the air pump and the bottom interface of the five-way pipe fitting.

[0013] Preferably, the pressure detection device comprises a bearing plate, four limiting columns are arranged at the bottom end of the bearing plate, the limiting columns are penetrated and slidably connected to the bearing platform, and four pressure sensors are arranged between the bearing platform and the bearing plate.

[0014] Preferably, the pressure sensors are located on the diagonals of the four shock-absorbing airbags, and the pressure sensors are matched with adjacent shock-absorbing airbags respectively. The pressure sensors are used to detect the pressure at the corners of the supporting plate. The four pressure sensors respectively detect the forces on the four corners of the supporting plate, and the four air circuit solenoid valves open and close the air supply pipes. When the forces on the four corners are different, the corresponding air circuit solenoid valves are opened or closed in conjunction with the controller to level the supporting plate.

[0015] The beneficial effects of the present invention are: 1. By setting up a cubic frame, a shock-absorbing airbag, a bearing platform and a suspension arm device, the beneficial effect that can be obtained is that four cross bars are arranged between the four columns of the cubic frame, a support plate is fixedly installed between the four cross bars, a push-grip device is arranged at the bottom end of the support plate, four shock-absorbing airbags are distributed in an array, the shock-absorbing airbags are installed at the top end of the support plate, the bearing platform is installed at the top end of the shock-absorbing airbags, the bearing platform is used to place the crystal boat box, the anti-rollover cross frame, the anti-rollover cross frame is installed on the inner wall of the top frame of the cubic frame, the suspension arm device includes a tension spring, a plurality of first support rings are arranged at the top end of the bearing platform, and a plurality of second support rings are arranged at the bottom end of the anti-rollover cross frame; Hold the handle and push the cubic frame with the L-shaped block. During the wafer transportation process of the cubic frame, the wafer, the carrier plate and the carrier table vibrate synchronously. The compression and expansion of the gas in the shock-absorbing airbag on the top of the support plate absorbs and releases the impact energy, thereby achieving the shock-absorbing effect. At the same time, the anti-rollover cross frame cooperates with the tension spring, the first support ring and the second support ring to elastically support the carrier table, and cooperates with the four shock-absorbing airbags. When the system is subjected to external vibration or impact, the tension spring first absorbs and stores energy, and cooperates with the shock-absorbing airbag to consume energy, thereby protecting the wafer from damage, improving the shock-absorbing effect, and improving the collision resistance of the handling device.

[0016] 2. By setting the pressure detection device and the pressure regulating device, the beneficial effect that can be obtained is that the pressure detection device includes a bearing plate, four limit columns are arranged at the bottom end of the bearing plate, the limit columns are penetrated and slidably connected with the bearing platform, four pressure sensors are arranged between the bearing platform and the bearing plate, the pressure regulating structure includes a five-way pipe fitting, the five-way pipe fitting penetrates and is fixedly installed at the top of the middle part of the support plate, two sections of air supply pipes are arranged between the side wall interfaces of the five-way pipe fitting and the adjacent shock-absorbing airbag ventilation ports, an air circuit solenoid valve is arranged between the two sections of the air supply pipes, and the bottom interface of the five-way pipe fitting is connected to the air supply device; The wafer boat box is placed on the top of the supporting plate in the cubic frame. The cubic frame is relatively still. Four pressure sensors respectively detect the forces on the four corners of the supporting plate. According to the total force value of the four corners, the air pump delivers matching gas to the four shock-absorbing airbags through the five-way pipe fitting and four air supply pipes, thereby improving the shock-absorbing effect on wafers of different weights.

[0017] 3. By setting the pressure detection device and the pressure regulating device, the beneficial effect that can be obtained is that the pressure detection device includes a bearing plate, four limit columns are arranged at the bottom end of the bearing plate, the limit columns are penetrated and slidably connected with the bearing platform, and four pressure sensors are arranged between the bearing platform and the bearing plate; The wafer boat box is placed on the top of the carrier plate in the cubic frame. The cubic frame is relatively still. Four pressure sensors detect the forces on the four corners of the carrier plate respectively. Four air circuit solenoid valves open and close the air supply pipes. When the forces on the four corners are different, the corresponding air circuit solenoid valves are opened or closed in conjunction with the controller to level the carrier plate, thus forming an automatic leveling structure for the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a diagram of the installation structure of the support plate and the cubic frame in the present invention; Figure 3 It is the installation structure diagram of the boom device in the present invention; Figure 4 is an installation structure diagram of the push-grip device in the present invention; Figure 5 It is a structural diagram of the installation of the bearing plate and the bearing platform in the present invention; Figure 6 It is the installation structure diagram of the voltage regulating structure in the present invention; Figure 7 It is an exploded diagram of the pressure detection device in the present invention.

[0020] Description of reference numerals: In the figure: 1. cubic frame; 11. pulley; 12. cross bar; 13. bottom guard plate; 14. side guard plate; 2. support plate; 21. handle; 22. L-shaped block; 3. shock-absorbing airbag; 4. bearing platform; 5. anti-rollover cross frame; 61. tension spring; 62. first support ring; 63. second support ring; 71. five-way pipe fitting; 72. air supply pipe; 73. air circuit solenoid valve; 81. air pump; 82. bracket; 83. air supply pipe; 91. bearing plate; 92. limit column; 93. pressure sensor. DETAILED DESCRIPTION

[0021] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation methods, structures, features and effects of the present invention are clearly and completely described below in combination with the accompanying drawings and preferred embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] In the description of the present application, it should be understood that the orientation or position relationship indicated by "inside", "outside", etc. is based on the orientation or position described in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, a specific orientation structure and operation, and therefore cannot be understood as a limitation on the present application.

[0023] Reference Figure 1-Figure 7 , a wafer handling device with an anti-collision structure disclosed in the present invention comprises a cubic frame 1, pulleys 11 are arranged at the bottom ends of the four columns of the cubic frame 1, a self-locking structure is arranged inside the pulley 11, four cross bars 12 are arranged between the four columns of the cubic frame 1, a bottom guard plate 13 is arranged on the inner wall of the bottom frame of the cubic frame 1, and side guard plates 14 are arranged between the cross bars 12 and the top frame and the bottom frame of the cubic frame 1 respectively; A support plate 2, the support plate 2 is fixedly installed between the four cross bars 12, a push-grip device is provided at the bottom end of the support plate 2, the push-grip device includes a handle 21, the handle 21 is located outside the cubic frame 1, both ends of the handle 21 are fixedly connected with an L-shaped block 22, and the top of the vertical section of the L-shaped block 22 is fixedly connected to the bottom end of the support plate 2 through a fastener; Shock-absorbing airbags 3, four shock-absorbing airbags 3 are distributed in an array, and the shock-absorbing airbags 3 are installed on the top of the support plate 2; The bearing platform 4 is installed on the top of the shock-absorbing airbag 3, and the bearing platform 4 is used to place the wafer boat box; The anti-rollover transverse frame 5 is installed on the inner wall of the top frame of the cubic frame 1; A suspension arm device, the suspension arm device includes a tension spring 61, a plurality of first support rings 62 are arranged at the top end of the bearing platform 4, and a plurality of second support rings 63 are arranged at the bottom end of the anti-rollover cross frame 5; A pressure regulating structure, which is used to regulate the air pressure in the shock-absorbing airbag 3. The pressure regulating structure includes a five-way pipe fitting 71, which passes through and is fixedly installed on the middle top of the support plate 2. Two sections of air supply pipes 72 are arranged between the side wall interfaces of the five-way pipe fitting 71 and the ventilation ports of the adjacent shock-absorbing airbags 3, and an air circuit solenoid valve 73 is arranged between the two sections of the air supply pipes 72. The bottom interface of the five-way pipe fitting 71 is connected to an air supply device, which includes an air pump 81. A bracket 82 is installed at the bottom end of the air pump 81. The top end of the bracket 82 is fixedly connected to the bottom end of the support plate 2, and an air supply pipe 83 is arranged between the air port of the air pump 81 and the bottom interface of the five-way pipe fitting 71; A pressure detection device, a pressure sensing device is installed on the top of the support platform 4, the pressure sensing device is used to detect the weight of the wafer, the pressure detection device includes a support plate 91, four limit columns 92 are arranged at the bottom end of the support plate 91, the limit columns 92 are penetrated and slidably connected with the support platform 4, four pressure sensors 93 are arranged between the support platform 4 and the support plate 91, the pressure sensors 93 are located on the diagonals of the four shock-absorbing airbags 3, the pressure sensors 93 are matched with adjacent shock-absorbing airbags 3, and the pressure sensors 93 are used to detect the pressure on the corners of the support plate 91.

[0024] The working principle and use process of the present invention are as follows: the wafer boat box is placed on the top of the supporting plate 91 in the cubic frame 1, the cubic frame 1 is relatively still, and the four pressure sensors 93 respectively detect the forces on the four corners of the supporting plate 91. According to the total force value of the four corners, the air pump 81 delivers matching gas to the four shock-absorbing airbags 3 through the five-way pipe 71 and the four air supply pipes 72, thereby improving the shock-absorbing effect of wafers of different weights. The four air circuit solenoid valves 73 open and close the air supply pipes 72. When the forces on the four corners are different, the corresponding air circuit solenoid valves 73 are opened or closed in cooperation with the controller to level the supporting plate 91. Then hold the handle 21 and cooperate with the L-shaped block 22 to push the cubic frame 1. During the wafer transportation process of the cubic frame 1, the wafer, the carrier plate 91 and the carrier platform 4 vibrate synchronously, and the compression and expansion of the gas in the shock-absorbing airbag 3 at the top of the support plate 2 absorbs and releases the impact energy, thereby achieving a shock-absorbing effect. At the same time, the anti-rollover cross frame 5 cooperates with the tension spring 61, the first support ring 62 and the second support ring 63 to elastically support the carrier platform 4, and cooperates with the four shock-absorbing airbags 3. When the system is subjected to external vibration or impact, the tension spring 61 first absorbs and stores energy, and cooperates with the shock-absorbing airbag 3 to consume energy, thereby protecting the wafer from damage.

[0025] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A wafer handling device with an anti-collision structure, characterized in that: include: A cubic frame (1), wherein four cross bars (12) are arranged between four columns of the cubic frame (1); A support plate (2), the support plate (2) being fixedly mounted between the four cross bars (12), and a push-grip device being provided at the bottom end of the support plate (2); Shock-absorbing airbags (3), four of the shock-absorbing airbags (3) are distributed in an array, and the shock-absorbing airbags (3) are installed on the top of the support plate (2); A bearing platform (4), the bearing platform (4) being mounted on the top of the shock-absorbing airbag (3), and the bearing platform (4) being used to place a wafer boat box; An anti-rollover transverse frame (5), wherein the anti-rollover transverse frame (5) is installed on the inner wall of the top frame of the cubic frame (1); A suspension arm device, the suspension arm device comprising a tension spring (61), a top end of the bearing platform (4) being provided with a plurality of first support rings (62), and a bottom end of the anti-rollover cross frame (5) being provided with a plurality of second support rings (63); A pressure regulating structure, the pressure regulating structure being used to regulate the air pressure in the shock absorbing airbag (3); A pressure detection device, wherein the pressure sensing device is installed on the top of the carrier platform (4), and the pressure sensing device is used to detect the weight of the wafer.

2. The wafer handling device with an anti-collision structure according to claim 1, characterized in that: The bottom ends of the four columns of the cubic frame (1) are each provided with a pulley (11), and a self-locking structure is provided inside the pulley (11).

3. The wafer transport device with an anti-collision structure according to claim 1, characterized in that: A bottom guard plate (13) is provided on the inner wall of the bottom frame of the cubic frame (1), and side guard plates (14) are respectively provided between the crossbar (12) and the top frame and the bottom frame of the cubic frame (1).

4. The wafer transport device with an anti-collision structure according to claim 1, characterized in that: The push-grip device comprises a handle (21), the handle (21) being located outside the cubic frame (1), both ends of the handle (21) being fixedly connected to an L-shaped block (22), and the top end of the vertical section of the L-shaped block (22) being fixedly connected to the bottom end of the support plate (2) via a fastener.

5. The wafer transport device with an anti-collision structure according to claim 4, characterized in that: The side wall of the handle (21) is provided with an anti-slip cover, and the anti-slip cover of the handle (21) is supported by rubber.

6. The wafer transport device with an anti-collision structure according to claim 1, characterized in that: The crossbar (12) near the push-grip device cooperates with the cubic frame (1) to form a window for taking in and placing objects.

7. The wafer transport device with an anti-collision structure according to claim 1, characterized in that: The pressure regulating structure comprises a five-way pipe fitting (71), the five-way pipe fitting (71) passing through and fixedly mounted on the top middle portion of the support plate (2), two sections of air supply pipes (72) are arranged between the side wall interfaces of the five-way pipe fitting (71) and the ventilation ports of adjacent shock-absorbing airbags (3), an air circuit solenoid valve (73) is arranged between the two sections of the air supply pipes (72), and the bottom interface of the five-way pipe fitting (71) is connected to an air supply device.

8. The wafer transport device with an anti-collision structure according to claim 7, characterized in that: The air supply device comprises an air pump (81), a bracket (82) is installed at the bottom end of the air pump (81), the top end of the bracket (82) is fixedly connected to the bottom end of the support plate (2), and an air supply pipe (83) is arranged between the air port of the air pump (81) and the bottom interface of the five-way pipe fitting (71).

9. The wafer transport device with an anti-collision structure according to claim 1, characterized in that: The pressure detection device comprises a bearing plate (91), four limiting columns (92) are arranged at the bottom end of the bearing plate (91), the limiting columns (92) are penetrated and slidably connected to the bearing platform (4), and four pressure sensors (93) are arranged between the bearing platform (4) and the bearing plate (91).

10. The wafer transport device with an anti-collision structure according to claim 9, characterized in that: The pressure sensors (93) are located on the diagonals of the four shock-absorbing airbags (3), the pressure sensors (93) are matched with adjacent shock-absorbing airbags (3) respectively, and the pressure sensors (93) are used to detect the pressure exerted on the corners of the bearing plate (91).

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