Multistage film residue filtering and collecting device

Abstract

The invention relates to the technical field of PCB and wafer manufacturing, and discloses a multi-stage film residue filtering and collecting device which comprises a first-stage spraying device, a second-stage spraying device, a soaking device and a filtering device, the filtering device can filter impurities in film stripping liquid medicine, the first-stage spraying device and the second-stage spraying device are in linkage, and the soaking device is used for soaking the impurities in the film stripping liquid medicine. Graded spraying can be achieved according to the film stripping requirement of the surface of a PCB or a wafer and the purity of film stripping liquid medicine, the arranged soaking device can conduct soaking and film stripping on the PCB or the wafer, and the arranged first-stage spraying device, the arranged second-stage spraying device, the arranged soaking device and the arranged filtering device are in linkage. The recycling defects of the first-stage spraying device and the second-stage spraying device can be complemented with the recycling defects of the soaking device, so that the film stripping liquid medicine used in a spraying manner can be repeatedly used by the soaking device after impurities are filtered; meanwhile, after impurities in the film stripping liquid used in the soaking mode are filtered, the film stripping liquid can be reused by the device in the spraying mode.

Description

Technical Field

[0001] The invention relates to the technical field of PCB board and wafer manufacturing, in particular to a multi-stage membrane slag filtering and collecting device. Background Art

[0002] During the manufacturing process of PCB boards or wafers, a protective film is usually coated on the surface to prevent contamination or damage during processing or transportation. The stripping solution can effectively dissolve this protective film and peel it off from the surface of the PCB board or wafer, preparing a clean surface for subsequent photolithography, etching and other processes. This is crucial for subsequent photolithography, etching and other processes. The surface quality after cleaning directly affects the performance and reliability of the integrated circuit. Therefore, the use of stripping solution is a key step to ensure product quality.

[0003] Therefore, based on the existing film residue filtering and collecting device, there are two ways to strip the surface of PCB board or wafer in actual use, one is immersion and the other is spraying, and the stripping solution is usually circulated in one stripping method, but when the stripping solution is circulated in the spraying method, impurities still exist in the filtered stripping solution and are mixed in the stripping solution. At the same time, the spraying method has a certain pressure, which makes it easy to damage the PCB board or wafer when stripping the dry film on the surface of the PCB board or wafer, and the consistency of the stripping on the spraying surface cannot be guaranteed. At the same time, when the stripping solution is circulated in the immersion method, impurities still exist in the filtered stripping solution, but some impurities exist in the stripping solution filtered by the immersion method, resulting in the soaked PCB board or wafer. The consistency of stripping cannot be guaranteed. For this reason, we propose a multi-stage film residue filtering and collecting device. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides a multi-stage film residue filtering and collecting device, which has the advantages of high film stripping consistency, and solves a series of problems such as the inability to ensure the consistency of film stripping on the surface of PCB boards or wafers due to the recycling of film stripping solution.

[0005] To achieve the above object, the present invention provides the following technical solution: a multi-stage membrane residue filtration and collection device, comprising:

[0006] A film stripping device, the film stripping device is used to remove dry film on the surface of a PCB board or a wafer, the film stripping device includes a filtering device placed on the ground, the filtering device is used to filter impurities in the film stripping solution after circulation, the filtering device includes a liquid replenishing tank placed on the ground, a two-stage filtering sub-tank is arranged on one side of the liquid replenishing tank, the two-stage filtering sub-tank is connected to the liquid replenishing tank, and the top of the two-stage filtering sub-tank is connected to a filtering drum;

[0007] A primary spray device, the primary spray device is used to spray the surface of a PCB board or a wafer, the primary spray device comprises a primary spray shell placed on the ground, one side of the two-stage filter auxiliary tank is connected to a primary coarse filter cartridge, the output end of the primary coarse filter cartridge is connected to a primary fine filter cartridge, the primary fine filter cartridge is connected to the primary spray shell, the bottom of the primary spray shell is connected to a primary recovery shell, and the primary recovery shell is connected to a filter drum;

[0008] A secondary spray device, the secondary spray device is used to spray the surface of a PCB board or a wafer, the secondary spray device comprises a secondary spray shell placed on the ground, the bottom of the secondary spray shell is connected to a secondary recovery shell, the secondary recovery shell is connected to a two-stage filter auxiliary tank, the top of the secondary recovery shell is connected to a secondary filter cartridge, the output end of the secondary filter cartridge is connected to the secondary spray shell, and the primary recovery shell is connected to the secondary recovery shell;

[0009] A soaking device is used to soak PCB boards or wafers. The soaking device includes a soaking shell placed on the ground. The bottom of the soaking shell is connected to a sedimentation shell. The soaking shell is connected to a two-stage filtering sub-tank, and the sedimentation shell is connected to a primary recovery shell.

[0010] Preferably, the filter drum is rotatably connected to the inside thereof, the bottom of the filter drum is connected to a membrane residue weight reducing machine, the right end of the drum filter is matched with the input end of the membrane residue weight reducing machine, a collecting shell is provided at the bottom of the output end of the membrane residue weight reducing machine, and a front-end pH meter is fixedly installed at the bottom of the inner wall of the two-stage filter sub-tank.

[0011] Preferably, a partition plate is fixedly installed on the bottom of the inner wall of the two-stage filter sub-tank, a through groove is opened on one side of the partition plate, and blocks are fixedly connected on both sides of the partition plate, the first filter screen is slidably connected to the inside of the left block, and the second filter screen is slidably connected to the inside of the right block, a replacement groove is opened on the top of the two-stage filter sub-tank, and the top of the replacement groove is covered with a dust cover, a distribution pump is fixedly installed on the top of the two-stage filter sub-tank, and the input end of the distribution pump is connected to the interior of the two-stage filter sub-tank.

[0012] Preferably, the first-level spray device also includes a first-level delivery pipe connected to the output end of the distribution pump, the output end of the first-level delivery pipe is connected to the input end of the first-level coarse filter cartridge, the output end of the first-level fine filter cartridge is connected to a first-level spray pipe, the first-level spray pipe is connected to a first-level spray shell, a recovery pump is fixedly installed on the top of the first-level recovery shell, the input end of the recovery pump is connected to the first-level recovery shell, the output end of the recovery pump is connected to a recovery pipe, the recovery pipe is connected to the filter drum, and a terminal pH meter is fixedly installed inside the recovery pipe.

[0013] Preferably, the secondary spray device also includes a secondary delivery pipe connected to the output end of the distribution pump, and the secondary recovery shell has two cavities inside. The secondary spray shell is connected to the front end cavity of the secondary recovery shell, and the front end cavity of the secondary recovery shell is connected to the primary recovery shell, and the output end of the secondary delivery pipe is connected to the rear end cavity of the secondary recovery shell.

[0014] Preferably, a secondary liquid pump is fixedly installed on the top of the rear cavity of the secondary recovery shell, the input end of the secondary liquid pump is connected to the rear cavity of the secondary recovery shell, the output end of the secondary liquid pump is connected to a secondary pump pipe, the output end of the secondary pump pipe is connected to a secondary filter cartridge, the output end of the secondary filter cartridge is connected to a secondary spray pipe, and the output end of the secondary spray pipe is connected to the secondary spray shell.

[0015] Preferably, the soaking device also includes a first soaking tube connected to one side of the two-stage filtering sub-tank, a soaking pump is fixedly installed on the output end of the first soaking tube, the output end of the first soaking tube is connected to the input end of the soaking pump, the output end of the soaking pump is connected to a second soaking tube, the output end of the second soaking tube is connected to a soaking shell, the front end of the sedimentation shell is connected to a bent pipe, and the output end of the bent pipe is connected to a primary recovery shell.

[0016] Preferably, a rehydration pump is fixedly installed on one side of the liquid medicine rehydration tank, the input end of the rehydration pump is connected to the liquid medicine rehydration tank, and the output end of the rehydration pump is connected to the two-stage filtering sub-tank.

[0017] Preferably, the tops of the two-stage filtering sub-tank, the secondary recovery shell and the primary recovery shell are all provided with liquid replenishment ports, and the tops of the liquid replenishment ports are covered with liquid replenishment covers.

[0018] Preferably, a support plate is fixedly connected to one side of the secondary recovery shell, and the secondary filter cartridge, the primary coarse filter cartridge and the primary fine filter cartridge are all fixedly mounted on the top of the support plate.

[0019] Compared with the prior art, the present invention provides a multi-stage membrane residue filtration and collection device having the following features:

[0020] Beneficial effects:

[0021] 1. The invention can filter impurities in the stripping solution through the filter device, and can realize graded spraying according to the stripping requirements of the PCB board or wafer surface and the purity of the stripping solution through the linkage of the first-level spray device and the second-level spray device, and can realize immersion stripping of the PCB board or wafer through the immersion device.

[0022] 2. The invention can complement the shortcomings of the recycling of the primary spray device and the secondary spray device with the shortcomings of the recycling of the soaking device by linking the primary spray device, the secondary spray device, the soaking device and the filtering device:

[0023] After impurities are filtered out, the stripping solution used in the spraying method is reused in the soaking device, so that the stripping of the PCB board or wafer surface is consistent, and there will be no problem of inconsistent stripping efficiency on the surface of the PCB board or wafer due to different impurity deposition in the stripping solution, which may cause damage to the PCB board or wafer;

[0024] At the same time, the stripping solution used in the immersion method is reused in the spraying device after the impurities are filtered out, which can effectively avoid the damage caused by impurities being sprayed on the surface of the PCB board or wafer due to the impact force of the spray, and at the same time improve the consistency of the spray stripping. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0026] Figure 2 It is a three-dimensional structural schematic diagram of the filter drum part of the present invention;

[0027] Figure 3 It is a partial three-dimensional structural schematic diagram of the secondary spray device of the present invention;

[0028] Figure 4 It is a partial three-dimensional structural schematic diagram of the primary spray device of the present invention;

[0029] Figure 5 It is a partial three-dimensional structural schematic diagram of the soaking device of the present invention;

[0030] Figure 6 It is a schematic diagram of the three-dimensional structure inside the filter drum of the present invention;

[0031] Figure 7 It is a schematic diagram of the three-dimensional structure of the two-stage filtering auxiliary tank of the present invention;

[0032] Figure 8 for Figure 7 Schematic diagram of the enlarged structure of part A.

[0033] In the figure: 1, film stripping device; 2, secondary spray device; 3, primary spray device; 4, soaking device; 5, filtering device; 6, secondary spray shell; 7, primary spray shell; 8, soaking shell; 9, filter drum; 10, two-stage filter auxiliary tank; 11, secondary delivery pipe; 12, secondary recovery shell; 13, secondary liquid pump; 14, secondary pump pipe; 15, secondary filter cartridge; 16, secondary spray pipe; 17, support plate; 18, distribution pump; 19, primary delivery pipe; 20, primary coarse filter cartridge; 21, primary fine filter cartridge; 22, 1. First-stage spray pipe; 23. First-stage recovery shell; 24. Recovery pump; 25. Recovery pipe; 26. Terminal pH meter; 27. First immersion tube; 28. Immersion pump; 29. ​​Second immersion tube; 30. Replenishment pump; 31. Bend pipe; 32. Drum filter; 33. Membrane residue weight reduction machine; 34. Liquid replenishment tank; 35. Front-end pH meter; 36. Collection shell; 37. Replenishment cover; 38. Dust cover; 39. Replenishment port; 40. Replacement tank; 41. Partition plate; 42. Block; 43. First filter screen; 44. Second filter screen; 45. Sedimentation shell. DETAILED DESCRIPTION

[0034] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] As introduced in the background technology, there are deficiencies in the prior art. In order to solve the above technical problems, the present application proposes a multi-stage membrane residue filtration and collection device.

[0036] In a typical implementation of the present application, Figure 1-8 As shown, a multi-stage membrane residue filtering and collecting device comprises:

[0037] The film stripping device 1 is used to remove the dry film on the surface of the PCB board or the wafer. The film stripping device 1 includes a filter device 5 placed on the ground. The filter device 5 is used to filter the impurities in the film stripping solution after circulation. The filter device 5 includes a liquid replenishing tank 34 placed on the ground. A two-stage filter sub-tank 10 is arranged on one side of the liquid replenishing tank 34. The two-stage filter sub-tank 10 is connected to the liquid replenishing tank 34. The top of the two-stage filter sub-tank 10 is connected to the filter drum 9;

[0038] The inside of the filter drum 9 is rotatably connected with a drum filter screen 32, and the bottom of the filter drum 9 is connected with a membrane residue weight reducing machine 33. The right end of the drum filter screen 32 is adapted to the input end of the membrane residue weight reducing machine 33, and a collecting shell 36 is provided at the bottom of the output end of the membrane residue weight reducing machine 33. A front end pH meter 35 is fixedly installed at the bottom of the inner wall of the two-stage filtering auxiliary tank 10;

[0039] A rehydration pump 30 is fixedly installed on one side of the liquid rehydration tank 34, the input end of the rehydration pump 30 is connected to the liquid rehydration tank 34, and the output end of the rehydration pump 30 is connected to the two-stage filtering auxiliary tank 10;

[0040] By setting the above-mentioned structure, impurities in the stripping solution can be filtered. Specifically, after the stripping solution with impurities enters the interior of the filter drum 9, the stripping solution flows into the interior of the two-stage filter sub-tank 10 through the drum filter 32, and the front-end pH meter 35 in the two-stage filter sub-tank 10 is started to detect the quality of the stripping solution circulating for filtration. When it is detected that the quality of the stripping solution is too low, the stripping solution in the solution replenishment tank 34 is pumped into the interior of the two-stage filter sub-tank 10 through the replenishment pump 30 to replenish the solution to maintain the concentration of the stripping solution. At the same time, the impurities in the stripping solution will be retained in the drum filter 32. Since the drum filter 32 is arranged at an angle, the impurities in the drum filter 32 enter the interior of the film residue weight reducer 33, and the impurities are processed and discharged, and fall into the interior of the collection shell 36 for collection, thereby completing the stripping solution and film residue filtration and collection. At the same time, the drum filter 32 and the film residue weight reducer 33 are both existing technologies and equipment, which will not be described in detail here.

[0041] A partition plate 41 is fixedly installed at the bottom of the inner wall of the two-stage filtering auxiliary tank 10, a through slot is provided on one side of the partition plate 41, and a clamping block 42 is fixedly connected to both sides of the partition plate 41, a first filter screen 43 is slidably clamped inside the clamping block 42 on the left side, and a second filter screen 44 is slidably clamped inside the clamping block 42 on the right side, a replacement slot 40 is provided on the top of the two-stage filtering auxiliary tank 10, and a dust cover 38 is provided on the top of the replacement slot 40, and a distribution pump 18 is fixedly installed on the top of the two-stage filtering auxiliary tank 10, and the input end of the distribution pump 18 is connected to the inside of the two-stage filtering auxiliary tank 10;

[0042] By means of the above-mentioned structure, the film stripping liquid after the film residue is filtered can be filtered again. Specifically, the film stripping liquid after the film residue is filtered enters the left side of the two-stage filtering sub-tank 10 and flows to the right side. During this process, the film stripping liquid will first pass through the first filter screen 43 and then the second filter screen 44 before flowing into the right side of the two-stage filtering sub-tank 10 for extraction and film stripping. The staff can visually observe the amount of impurities in the film stripping liquid after the film residue is filtered by the naked eye by pulling out the first filter screen 43 and the second filter screen 44, and make corresponding responses.

[0043] It is worth mentioning that the first filter screen 43 is a 40-mesh filter screen for preliminary filtration to remove larger particles and impurities, and the second filter screen 44 is a 400-mesh filter screen, which can further remove tiny film residues and other suspended matter, thereby ensuring the cleanliness and reusability of the film stripping solution.

[0044] A primary spray device 3 is used to spray the surface of a PCB board or a wafer. The primary spray device 3 includes a primary spray shell 7 placed on the ground. A primary coarse filter cartridge 20 is connected to one side of the two-stage filter auxiliary tank 10. The output end of the primary coarse filter cartridge 20 is connected to a primary fine filter cartridge 21. The primary fine filter cartridge 21 is connected to the primary spray shell 7. The bottom of the primary spray shell 7 is connected to a primary recovery shell 23. The primary recovery shell 23 is connected to the filter drum 9.

[0045] The primary spray device 3 also includes a primary delivery pipe 19 connected to the output end of the distribution pump 18, the output end of the primary delivery pipe 19 is connected to the input end of the primary coarse filter cartridge 20, the output end of the primary fine filter cartridge 21 is connected to a primary spray pipe 22, the primary spray pipe 22 is connected to the primary spray shell 7, a recovery pump 24 is fixedly installed on the top of the primary recovery shell 23, the input end of the recovery pump 24 is connected to the primary recovery shell 23, the output end of the recovery pump 24 is connected to a recovery pipe 25, the recovery pipe 25 is connected to the filter drum 9, and a terminal pH meter 26 is fixedly installed inside the recovery pipe 25.

[0046] By setting the above-mentioned structure, the surface of the PCB board or the wafer can be sprayed and stripped. Specifically, when the first-level spray shell 7 is needed to spray and strip the surface of the PCB board or the wafer, the distribution pump 18 is started to pump the stripping liquid inside the two-stage filtering sub-tank 10 into the first-level delivery pipe 19, and then enter the first-level coarse filter cartridge 20 from the first-level delivery pipe 19 for primary filtration, and then enter the first-level fine filter cartridge 21 from the first-level coarse filter cartridge 20 for secondary filtration, and then pumped into the first-level spray shell 7 through the first-level spray pipe 22. The PCB board or wafer surface inside the first-level spray shell 7 is sprayed and stripped. At this time, the sprayed stripping solution mixed with the film falls into the first-level recovery shell 23, and then the recovery pump 24 is started to pump the stripping solution with impurities inside the first-level recovery shell 23 into the recovery pipe 25. In this process, the pH value of the stripping solution inside the recovery pipe 25 can be detected through the recovery pipe 25, and the stripping amount can be indirectly known by detecting this value. At the same time, the stripping solution with impurities flows into the interior of the filter drum 9 through the recovery pipe 25 for impurity filtering.

[0047] A secondary spray device 2 is used to spray the surface of a PCB or a wafer. The secondary spray device 2 includes a secondary spray shell 6 placed on the ground. The bottom of the secondary spray shell 6 is connected to a secondary recovery shell 12. The secondary recovery shell 12 is connected to a two-stage filter auxiliary tank 10. The top of the secondary recovery shell 12 is connected to a secondary filter cartridge 15. The output end of the secondary filter cartridge 15 is connected to the secondary spray shell 6. The primary recovery shell 23 is connected to the secondary recovery shell 12.

[0048] The secondary spray device 2 also includes a secondary delivery pipe 11 connected to the output end of the distribution pump 18, and the secondary recovery shell 12 has two cavities inside. The secondary spray shell 6 is connected to the front end cavity of the secondary recovery shell 12, and the front end cavity of the secondary recovery shell 12 is connected to the primary recovery shell 23. The output end of the secondary delivery pipe 11 is connected to the rear end cavity of the secondary recovery shell 12;

[0049] A secondary liquid pump 13 is fixedly installed on the top of the rear cavity of the secondary recovery shell 12, the input end of the secondary liquid pump 13 is connected to the rear cavity of the secondary recovery shell 12, the output end of the secondary liquid pump 13 is connected to a secondary pump pipe 14, the output end of the secondary pump pipe 14 is connected to a secondary filter cartridge 15, the output end of the secondary filter cartridge 15 is connected to a secondary spray pipe 16, and the output end of the secondary spray pipe 16 is connected to the secondary spray shell 6.

[0050] By setting the above structure, the surface of the PCB board or the wafer can be sprayed and stripped. Specifically, when the secondary spray shell 6 is needed to spray and strip the surface of the PCB board or the wafer, the secondary liquid pump 13 is started at this time to draw the stripping liquid inside the two-stage filtering sub-tank 10 into the secondary delivery pipe 11, and then the secondary delivery pipe 11 is drawn into the rear end cavity of the secondary recovery shell 12, and the stripping liquid inside the rear end cavity of the secondary recovery shell 12 is pumped into the secondary pump pipe 14 through the secondary liquid pump 13, and then enters the secondary pump pipe 14 through the secondary pump pipe 14. The stripping solution is filtered once inside the secondary filter cylinder 15, and then the filtered stripping solution is pumped into the secondary spray shell 6 through the secondary spray pipe 16 to spray and strip the PCB board or wafer surface inside the secondary spray shell 6. At this time, the sprayed stripping solution mixed with the film falls into the front end cavity of the secondary recovery shell 12, and the stripping solution with impurities inside the front end cavity of the secondary recovery shell 12 is pumped into the first recovery shell 23, and enters the interior of the filter drum 9 through the recovery pump 24 and the recovery pipe 25 for circulation filtration.

[0051] It is worth mentioning that in the above scheme, by linking the secondary spray device 2 and the primary spray device 3, graded selective spraying can be achieved according to the stripping requirements of the PCB board or wafer surface and the purity of the stripping solution.

[0052] The soaking device 4 is used to soak the PCB board or the wafer. The soaking device 4 includes a soaking shell 8 placed on the ground. The bottom of the soaking shell 8 is connected to a sedimentation shell 45. The soaking shell 8 is connected to the two-stage filtering auxiliary tank 10. The sedimentation shell 45 is connected to the primary recovery shell 23.

[0053] The soaking device 4 also includes a first soaking tube 27 connected to one side of the two-stage filtering sub-tank 10, and a soaking pump 28 is fixedly installed at the output end of the first soaking tube 27, and the output end of the first soaking tube 27 is connected to the input end of the soaking pump 28, and the output end of the soaking pump 28 is connected to the second soaking tube 29, and the output end of the second soaking tube 29 is connected to the soaking shell 8. The front end of the sedimentation shell 45 is connected to a bent pipe 31, and the output end of the bent pipe 31 is connected to the primary recovery shell 23.

[0054] By setting the above-mentioned structure, the PCB board or wafer can be immersed and stripped. Specifically, when the immersion shell 8 is needed to immerse and strip the surface of the PCB board or wafer, the immersion pump 28 is started at this time to draw the stripping solution inside the two-stage filtering sub-tank 10 into the first immersion tube 27, and then the immersion pump 28 pumps the stripping solution inside the first immersion tube 27 into the second immersion tube 29, and then the second immersion tube 29 pumps it into the immersion shell 8 to immerse and strip the surface of the PCB board or wafer. At the same time, the dry film peeled off the surface of the PCB board or wafer will gradually settle to the bottom of the sedimentation shell 45. In the process of gradual sedimentation of the dry film, the stripping solution inside the sedimentation shell 45 will flow into the first-level recovery shell 23 through the curved pipe 31 for circulation.

[0055] In the above scheme, the film stripping solution used by the secondary spray device 2 and the primary spray device 3 is filtered by the filter drum 9 and then circulated to the inside of the soaking shell 8 for soaking and film stripping, and the film stripping solution filtered by the filter drum 9 after soaking and film stripping is circulated to the secondary spray device 2 and the primary spray device 3 for use;

[0056] Worth mentioning:

[0057] The spray stripping method will spray the stripping solution evenly on the surface of the PCB board or wafer through high-pressure jets, and quickly strip the dry film by combining mechanical force and chemical action. This method can quickly penetrate into the interface between the dry film and the substrate, causing the dry film to swell, split and finally fall off. Due to the impact force of the spray, the peeled dry film particles are smaller and more numerous, and will be mixed with the stripping solution. These particles will be suspended in the solution instead of being deposited at the bottom, so that even if there are impurities remaining in the filtered stripping solution, it can still be guaranteed to be evenly mixed with the impurities. This liquid is supplied to the soaking shell 8, so that the film stripping of the PCB board or wafer surface is consistent, and there will be no problem of inconsistent film stripping efficiency on the PCB board or wafer surface due to different impurity deposition in the stripping solution, which will cause damage to the PCB board or wafer;

[0058] Immersion stripping is to gradually dissolve the dry film through a long chemical reaction. This method relies on chemical action and treats the dry film relatively gently. Therefore, the dry film particles peeled off may be relatively large. These particles may form a layer of sediment at the bottom of the tank, making it easier to filter the impurities inside the stripping solution. At the same time, the purity of the top stripping solution can be improved through the deposition of particles. This liquid is supplied to the secondary spray device 2 and the primary spray device 3 for use, which can effectively avoid the damage caused by the impurities being sprayed onto the surface of the PCB board or wafer due to the impact force of the spray, while improving the consistency of the spray stripping.

[0059] A liquid replenishment port 39 is provided on the top of the two-stage filtering sub-tank 10, the secondary recovery shell 12 and the primary recovery shell 23, and a liquid replenishment cover 37 is provided on the top of the liquid replenishment port 39. Through the above-mentioned structure, the situation of the stripping liquid inside the two-stage filtering sub-tank 10, the secondary recovery shell 12 and the primary recovery shell 23 can be checked at any time, and the stripping liquid or other chemicals can be added.

[0060] A support plate 17 is fixedly connected to one side of the secondary recovery shell 12, and the secondary filter cartridge 15, the primary coarse filter cartridge 20 and the primary fine filter cartridge 21 are all fixedly installed on the top of the support plate 17. The secondary filter cartridge 15, the primary coarse filter cartridge 20 and the primary fine filter cartridge 21 can be installed and fixed by the set support plate 17.

[0061] Working principle of the present invention: when the film stripping solution is circulated and filtered, after the film stripping solution with impurities enters the interior of the filter drum 9, the film stripping solution flows into the interior of the two-stage filter sub-tank 10 through the drum filter 32, and the front-end pH meter 35 inside the two-stage filter sub-tank 10 is started to detect the quality of the film stripping solution being circulated and filtered. When it is detected that the quality of the film stripping solution is too low, the film stripping solution in the liquid replenishment tank 34 is pumped into the interior of the two-stage filter sub-tank 10 through the replenishment pump 30 for liquid replenishment to maintain the concentration of the film stripping solution. At the same time, the impurities in the film stripping solution will be retained in the drum filter 32. Since the drum filter 32 is arranged at an angle, the impurities in the drum filter 32 enter the interior of the film residue weight reducing machine 33, and the impurities are processed and discharged, and fall into the interior of the collection shell 36 for collection, thereby completing the film stripping solution and film residue filtration and collection;

[0062] When it is necessary to use the first-level spray shell 7 to spray and strip the surface of the PCB board or wafer, start the distribution pump 18 to pump the stripping solution inside the two-stage filtering sub-tank 10 into the first-level delivery pipe 19, and then enter the first-level coarse filter cylinder 20 from the first-level delivery pipe 19 for primary filtration, and then enter the first-level fine filter cylinder 21 from the first-level coarse filter cylinder 20 for secondary filtration, and pump it into the first-level spray shell 7 through the first-level spray pipe 22 to spray and strip the surface of the PCB board or wafer inside the first-level spray shell 7. At this time, the sprayed stripping solution mixed with the film falls into the first-level recovery shell 23, and then the recovery pump 24 is started to pump the stripping solution with impurities in the first-level recovery shell 23 into the recovery pipe 25. In this process, the pH value of the stripping solution inside the recovery pipe 25 can be detected through the recovery pipe 25, and the stripping amount can be indirectly known by detecting this value. At the same time, the stripping solution with impurities flows into the interior of the filter drum 9 through the recovery pipe 25 for impurity filtration.

[0063] When it is necessary to use the secondary spray shell 6 to spray and strip the surface of the PCB board or wafer, the secondary liquid pump 13 is started at this time to draw the stripping liquid inside the two-stage filtering sub-tank 10 into the secondary delivery pipe 11, and then drawn into the rear end cavity of the secondary recovery shell 12 by the secondary delivery pipe 11, and the stripping liquid inside the rear end cavity of the secondary recovery shell 12 is pumped into the secondary pump pipe 14 through the secondary liquid pump 13, and then enters the secondary filter cylinder 15 through the secondary pump pipe 14 to filter the stripping liquid once, and then the filtered stripping liquid is pumped into the secondary spray shell 6 through the secondary spray pipe 16 to spray and strip the surface of the PCB board or wafer inside the secondary spray shell 6. At this time, the sprayed stripping liquid mixed with the film falls into the front end cavity of the secondary recovery shell 12, and the stripping liquid with impurities in the front end cavity of the secondary recovery shell 12 is pumped into the first recovery shell 23, and enters the filter drum 9 through the recovery pump 24 and the recovery pipe 25 for circulation filtration.

[0064] When it is necessary to use the soaking shell 8 to soak and strip the surface of the PCB board or wafer, the soaking pump 28 is started at this time to draw the stripping solution inside the two-stage filtering sub-tank 10 into the first soaking tube 27, and then the soaking pump 28 pumps the stripping solution inside the first soaking tube 27 into the second soaking tube 29, and then the second soaking tube 29 pumps it into the soaking shell 8 to soak and strip the surface of the PCB board or wafer. At the same time, the dry film peeled off the surface of the PCB board or wafer will gradually settle to the bottom of the sedimentation shell 45. In the process of gradual sedimentation of the dry film, the stripping solution inside the sedimentation shell 45 will flow into the first-level recovery shell 23 through the curved pipe 31 for circulation.

[0065] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A multi-stage membrane residue filtering and collecting device, characterized in that: include, A film stripping device (1), the film stripping device (1) is used to remove dry film on the surface of a PCB board or a wafer, the film stripping device (1) comprises a filtering device (5) placed on the ground, the filtering device (5) is used to filter impurities in the film stripping liquid after circulation, the filtering device (5) comprises a liquid replenishing tank (34) placed on the ground, a two-stage filtering sub-tank (10) is arranged on one side of the liquid replenishing tank (34), the two-stage filtering sub-tank (10) is connected to the liquid replenishing tank (34), and a filtering drum (9) is connected to the top of the two-stage filtering sub-tank (10); A primary spray device (3), the primary spray device (3) comprising a primary spray shell (7) placed on the ground, a primary coarse filter cartridge (20) being connected to one side of the two-stage filter auxiliary tank (10), a primary fine filter cartridge (21) being connected to the output end of the primary coarse filter cartridge (20), the primary fine filter cartridge (21) being connected to the primary spray shell (7), a primary recovery shell (23) being connected to the bottom of the primary spray shell (7), and the primary recovery shell (23) being connected to the filter drum (9); A secondary spray device (2), the secondary spray device (2) comprising a secondary spray shell (6) placed on the ground, the bottom of the secondary spray shell (6) being connected to a secondary recovery shell (12), the secondary recovery shell (12) being connected to a two-stage filtering auxiliary tank (10), the top of the secondary recovery shell (12) being connected to a secondary filter cartridge (15), the output end of the secondary filter cartridge (15) being connected to the secondary spray shell (6), and the primary recovery shell (23) being connected to the secondary recovery shell (12); A soaking device (4), the soaking device (4) comprising a soaking shell (8) placed on the ground, the bottom of the soaking shell (8) being connected to a sedimentation shell (45), the soaking shell (8) being connected to a two-stage filtering auxiliary tank (10), and the sedimentation shell (45) being connected to a primary recovery shell (23).

2. A multi-stage membrane residue filtration and collection device according to claim 1, characterized in that: The filter drum (9) is internally rotatably connected with a drum filter screen (32), the bottom of the filter drum (9) is connected with a membrane residue weight reducing machine (33), the right end of the drum filter screen (32) is matched with the input end of the membrane residue weight reducing machine (33), the bottom of the output end of the membrane residue weight reducing machine (33) is provided with a collecting shell (36), and the bottom of the inner wall of the two-stage filtering auxiliary tank (10) is fixedly installed with a front end pH meter (35).

3. A multi-stage membrane residue filtration and collection device according to claim 1, characterized in that: A partition plate (41) is fixedly mounted on the bottom of the inner wall of the two-stage filtering auxiliary tank (10), a through slot is provided on one side of the partition plate (41), and clamping blocks (42) are fixedly connected to both sides of the partition plate (41), a first filter screen (43) is slidably clamped inside the clamping block (42) on the left side, and a second filter screen (44) is slidably clamped inside the clamping block (42) on the right side, a replacement slot (40) is provided on the top of the two-stage filtering auxiliary tank (10), and a dust cover (38) is provided on the top of the replacement slot (40), and a distribution pump (18) is fixedly mounted on the top of the two-stage filtering auxiliary tank (10), and an input end of the distribution pump (18) is connected to the inside of the two-stage filtering auxiliary tank (10).

4. A multi-stage membrane residue filtration and collection device according to claim 3, characterized in that: The primary spray device (3) further comprises a primary delivery pipe (19) connected to the output end of the distribution pump (18); the output end of the primary delivery pipe (19) is connected to the input end of the primary coarse filter cartridge (20); the output end of the primary fine filter cartridge (21) is connected to a primary spray pipe (22); the primary spray pipe (22) is connected to the primary spray shell (7); a recovery pump (24) is fixedly mounted on the top of the primary recovery shell (23); the input end of the recovery pump (24) is connected to the primary recovery shell (23); the output end of the recovery pump (24) is connected to a recovery pipe (25); the recovery pipe (25) is connected to the filter drum (9); and a terminal pH meter (26) is fixedly mounted inside the recovery pipe (25).

5. A multi-stage membrane residue filtering and collecting device according to claim 4, characterized in that: The secondary spray device (2) further comprises a secondary delivery pipe (11) connected to the output end of the distribution pump (18); the secondary recovery shell (12) has two cavities inside; the secondary spray shell (6) is connected to the front end cavity of the secondary recovery shell (12); the front end cavity of the secondary recovery shell (12) is connected to the primary recovery shell (23); and the output end of the secondary delivery pipe (11) is connected to the rear end cavity of the secondary recovery shell (12).

6. A multi-stage membrane residue filtering and collecting device according to claim 5, characterized in that: A secondary liquid pump (13) is fixedly installed on the top of the rear cavity of the secondary recovery shell (12); the input end of the secondary liquid pump (13) is connected to the rear cavity of the secondary recovery shell (12); the output end of the secondary liquid pump (13) is connected to a secondary pump pipe (14); the output end of the secondary pump pipe (14) is connected to a secondary filter cartridge (15); the output end of the secondary filter cartridge (15) is connected to a secondary spray pipe (16); the output end of the secondary spray pipe (16) is connected to the secondary spray shell (6).

7. The multi-stage membrane residue filtering and collecting device according to claim 1, characterized in that: The soaking device (4) further comprises a first soaking pipe (27) connected to one side of the two-stage filtering auxiliary tank (10); a soaking pump (28) is fixedly installed at the output end of the first soaking pipe (27); the output end of the first soaking pipe (27) is connected to the input end of the soaking pump (28); the output end of the soaking pump (28) is connected to a second soaking pipe (29); the output end of the second soaking pipe (29) is connected to the soaking shell (8); the front end of the sedimentation shell (45) is connected to a bent pipe (31); the output end of the bent pipe (31) is connected to the primary recovery shell (23).

8. The multi-stage membrane residue filtering and collecting device according to claim 1, characterized in that: A rehydration pump (30) is fixedly mounted on one side of the liquid medicine rehydration tank (34); an input end of the rehydration pump (30) is connected to the liquid medicine rehydration tank (34); and an output end of the rehydration pump (30) is connected to the two-stage filtering auxiliary tank (10).

9. The multi-stage membrane residue filtering and collecting device according to claim 1, characterized in that: The tops of the two-stage filtering auxiliary tank (10), the secondary recovery shell (12) and the primary recovery shell (23) are all provided with a liquid replenishment port (39), and the top of the liquid replenishment port (39) is covered with a liquid replenishment cover (37).

10. A multi-stage membrane residue filtering and collecting device according to claim 9, characterized in that: A support plate (17) is fixedly connected to one side of the secondary recovery shell (12), and the secondary filter cartridge (15), the primary coarse filter cartridge (20) and the primary fine filter cartridge (21) are all fixedly mounted on the top of the support plate (17).

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