Mirror finishing method for aluminum material

Abstract

The invention relates to a mirror surface processing method for an aluminum material, in particular to the field of surface processing, and the mirror surface processing method comprises the following steps: sequentially carrying out rough milling and finish milling on an aluminum layer processing surface to obtain a processed surface with the roughness Ra less than 0.04 mu m; the idling time of the milling cutter before the rough milling is not less than 15 minutes; the idling time of the milling cutter is not less than 15 minutes before the finish milling is started; the rotating speed of the main shaft of the rough milling is smaller than that of the main shaft of the finish milling; and the feeding amount of the rough milling is larger than the feeding amount of the finish milling. According to the mirror surface machining method provided by the invention, through the design of the machining process, the machining precision and stability when the surface of the aluminum material is milled are improved, so that the roughness Ra of the machined surface obtained through machining is smaller than 0.04 mu m, the mirror surface reflectivity is larger than or equal to 70%, the mirror surface effect is achieved, and good use performance is achieved.

Description

Technical Field

[0001] The invention relates to the field of surface processing, and in particular to a mirror surface processing method of aluminum material. Background Art

[0002] Aluminum heating plates are becoming a popular choice due to their good thermal conductivity and relatively low cost. As time goes by, the design and manufacturing technology of aluminum heating plates continue to improve, making them more widely used.

[0003] For example, in the semiconductor field, heating plates are used to support, heat and cool semiconductor wafers, so there are high requirements on the roughness and quality of the contact surface with the semiconductor wafers.

[0004] For example, CN117702091A discloses a wafer heating plate assembly, including a heating wire, which is installed between a heating upper plate and a lower support plate; the heating wire is coiled in a circular shape, and is a whole heating wire body, with both ends coiled outward from the middle, and both ends bent outward to form a first annular portion, the left side of the first annular portion has a first spacing, the first annular portion at both ends of the first spacing is bent outward to form a second annular portion, the right side of the second annular portion has a second spacing, the second annular portion at both ends of the second spacing is bent outward to form a third annular portion, the lower side of the third annular portion has a third spacing, the third annular portion at both ends of the third spacing is bent outward to form a fourth annular portion, and the upper side of the fourth annular portion has a fourth spacing. It makes the temperature distribution of the heating upper plate uniform, and the thermal insulation pad reduces the proportion of heat transferred downward from the heating plate, increases the temperature uniformity of the heating plate, and reduces heat loss.

[0005] For example, CN215069890U discloses a heating plate for wafers. The heating plate for wafers of the utility model comprises: a heating plate, a bottom plate, a heating wire and a thermocouple, the bottom surface of the heating plate is provided with a first receiving groove and a second receiving groove, the first receiving groove is arranged in a spiral shape, the heating end of the heating wire is embedded in the first receiving groove, the second receiving groove extends from the center of the heating plate to the outside, the temperature measuring end of the thermocouple is embedded in the second receiving groove, the bottom plate is attached to the bottom of the heating plate, and the cold ends of the heating wire and the thermocouple pass through the connecting sleeve of the bottom plate.

[0006] The existing heating plate needs to be processed on its working surface during the preparation process to ensure that it has a low surface roughness such as achieving a mirror effect, so as to ensure that the surface roughness does not damage the wafer when heating the wafer, thereby causing the wafer to be scrapped. However, the current processing method still has the defect that the surface roughness of the processed heating plate is too large. Summary of the invention

[0007] In view of the problems existing in the prior art, the object of the present invention is to provide a mirror surface processing method for aluminum material to solve the defect that the surface roughness of the heating plate obtained by processing is too large.

[0008] To achieve this object, the present invention adopts the following technical solutions:

[0009] The present invention provides a mirror surface processing method for aluminum material, the mirror surface processing method comprising:

[0010] The aluminum layer processing surface is subjected to rough milling and fine milling in sequence, and the roughness of the obtained processing surface Ra is less than 0.04μm;

[0011] The idle time of the milling cutter before the rough milling starts is ≥15min;

[0012] The idle time of the milling cutter before the start of fine milling is ≥15min;

[0013] The spindle speed of the rough milling is less than the spindle speed of the fine milling;

[0014] The feed rate of the rough milling is greater than the feed rate of the fine milling.

[0015] The mirror processing method provided by the present invention improves the processing accuracy and stability when milling the aluminum surface through the design of the processing process, so that the roughness Ra of the processed surface is less than 0.04μm, and the mirror reflectivity is greater than or equal to 70%, achieving a mirror effect and having good performance.

[0016] As a preferred technical solution of the present invention, the spindle speed of the milling cutter idling before the start of rough milling is 8000-10000r / min.

[0017] As a preferred technical solution of the present invention, the spindle speed of the rough milling is 8000-10000r / min.

[0018] As a preferred technical solution of the present invention, the feed rate of rough milling is 1200-2000mm / r.

[0019] As a preferred technical solution of the present invention, the spindle speed of the milling cutter idling before the start of fine milling is 14000-20000r / min.

[0020] As a preferred technical solution of the present invention, the spindle speed of the fine milling is 14000-20000r / min.

[0021] As a preferred technical solution of the present invention, the feed rate of the fine milling is 300-1200mm / r.

[0022] As a preferred technical solution of the present invention, the milling cutter used in the fine milling includes an MCD single crystal milling cutter.

[0023] As a preferred technical solution of the present invention, the diameter of the milling cutter used in the fine milling is 3-8 mm.

[0024] As a preferred technical solution of the present invention, the mass concentration of the aqueous cutting fluid used in the rough milling and / or fine milling is 5-10%.

[0025] Compared with the prior art solutions, the present invention has the following beneficial effects:

[0026] The processing process provided by the present invention avoids the generation of gradual knife marks during the processing by designing the processing process, preheating the tool and using an aqueous cutting fluid of a specific concentration, thereby improving the mirror effect of the processed surface and ensuring that the surface roughness Ra of the aluminum product obtained after processing is less than 0.004μm and the mirror reflectivity is ≥82%. DETAILED DESCRIPTION

[0027] To better illustrate the present invention and facilitate understanding of the technical solution of the present invention, typical but non-limiting embodiments of the present invention are as follows:

[0028] This embodiment provides a mirror surface processing method for aluminum material, and the mirror surface processing method includes:

[0029] The aluminum layer processing surface is subjected to rough milling and fine milling in sequence, and the roughness of the obtained processing surface Ra is less than 0.04μm;

[0030] The spindle speed of the rough milling is less than the spindle speed of the fine milling;

[0031] The feed rate of the rough milling is greater than the feed rate of the fine milling.

[0032] In the present invention, the aluminum material used includes high-purity aluminum material, and high purity means a purity of ≥99.9%.

[0033] In the present invention, the idle rotation of the milling cutter refers to the rotation of the milling cutter within limited parameters without contacting the workpiece to be processed.

[0034] Among them, the idling time of the milling cutter before the start of rough milling is ≥15min, for example, it can be 15min, 16min, 17min, 18min, 19min, 20min, 21min, 22min, 23min, 24min or 25min, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0035] Among them, the spindle speed of the milling cutter idling before the start of rough milling is 8000-10000r / min, for example, it can be 8000r / min, 8200r / min, 8400r / min, 8600r / min, 8800r / min, 9000r / min, 9200r / min, 9400r / min, 9600r / min, 9800r / min or 10000r / min, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0036] Among them, the spindle speed of the rough milling is 8000-10000r / min, for example, it can be 8000r / min, 8200r / min, 8400r / min, 8600r / min, 8800r / min, 9000r / min, 9200r / min, 9400r / min, 9600r / min, 9800r / min or 10000r / min, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0037] Among them, the feed rate of rough milling is 1200-2000mm / r, for example, it can be 1200mm / r, 1300mm / r, 1400mm / r, 1500mm / r, 1600mm / r, 1700mm / r, 1800mm / r, 1900mm / r or 2000mm / r, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0038] In the present invention, the milling cutter used in rough milling can be selected as a high-speed carbide milling cutter for aluminum processing, and the diameter of the milling cutter is 7-9 mm, for example, it can be 7 mm, 8 mm or 9 mm, etc., but it is not limited to the listed values. Other values ​​not listed in this range also meet the requirements, such as D8*15*C4*SD8*55L high-speed carbide milling cutter for aluminum processing

[0039] Among them, the idling time of the milling cutter before the start of the fine milling is ≥15min, for example, it can be 15min, 16min, 17min, 18min, 19min, 20min, 21min, 22min, 23min, 24min or 25min, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0040] In the present invention, the idling of the milling cutter before fine milling does not mean the idling of the milling cutter before rough milling, but an independent idling, that is, the idling of the milling cutter before rough milling, rough milling is performed, and then fine milling is performed after the idling of the milling cutter with limited parameters.

[0041] Among them, the spindle speed of the milling cutter idling before the start of the fine milling is 14000-20000r / min, for example, it can be 14000r / min, 14500r / min, 15000r / min, 15500r / min, 16000r / min, 16500r / min, 17000r / min, 17500r / min, 18000r / min, 18500r / min, 19000r / min, 19500r / min or 20000r / min, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0042] Among them, the spindle speed of the fine milling is 14000-20000 r / min, for example, it can be 14000 r / min, 14500 r / min, 15000 r / min, 15500 r / min, 16000 r / min, 16500 r / min, 17000 r / min, 17500 r / min, 18000 r / min, 18500 r / min, 19000 r / min, 19500 r / min or 20000 r / min, but is not limited to the listed values, and other unlisted values ​​within the range also meet the requirements.

[0043] Wherein, the feed rate of the fine milling is 300-1200mm / r, for example, it can be 300mm / r, 350mm / r, 400mm / r, 450mm / r, 500mm / r, 550mm / r, 600mm / r, 650mm / r, 700mm / r, 750mm / r, 800mm / r, 850mm / r, 900mm / r, 950mm / r, 1000mm / r, 1050mm / r, 1100mm / r, 1150mm / r or 1200mm / r, etc., but is not limited to the listed values, and other values ​​not listed in the range also meet the requirements.

[0044] Wherein, the milling cutter used in the fine milling includes an MCD single crystal milling cutter.

[0045] Among them, the diameter of the milling cutter used in the fine milling is 3-8mm, for example, it can be 3mm, 4mm, 5mm, 6mm, 7mm or 8mm, but is not limited to the listed values. Other values ​​not listed in this range also meet the requirements.

[0046] Among them, the mass concentration of the aqueous cutting fluid used in the rough milling and / or fine milling is 5-10%, for example, it can be 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10%, etc., but is not limited to the listed values, and other values ​​not listed within this range also meet the requirements.

[0047] In the present invention, the mass concentration of the aqueous cutting fluid is the total mass concentration of all solutes except the solvent water.

[0048] In the present invention, the aqueous cutting fluid used can be selected from the commercially available aqueous cutting fluid suitable for aluminum materials in the art, or the aqueous cutting fluid suitable for aluminum materials synthesized according to the prior art, such as the commercially available aqueous cutting fluid FRIGOMET 478OC.

[0049] In the present invention, other related process parameters not specified in the rough milling and fine milling processes are specifically selected according to the conventional requirements in the field, and are reasonably designed and selected according to the spindle speed, feed rate and milling cutter, which are conventional designs in the field.

[0050] Further, in order to illustrate the mirror effect that can be achieved on the surface of the aluminum product obtained by the mirror processing method of aluminum material provided by the present invention, the following actual example is used for illustration, as follows:

[0051] Example 1

[0052] This embodiment provides a mirror surface processing method for aluminum material, and the mirror surface processing method includes:

[0053] The machining surface of the aluminum layer is subjected to rough milling and fine milling in sequence;

[0054] The spindle speed of the rough milling is less than the spindle speed of the fine milling;

[0055] The feed rate of the rough milling is greater than the feed rate of the fine milling.

[0056] Before the rough milling starts, the milling cutter idles for 20 minutes at a spindle speed of 9000 r / min; the spindle speed of the rough milling is 9000 r / min, the feed rate is 1800 mm / r, the milling cutter used can be a high-speed carbide milling cutter for aluminum (D8*15*C4*SD8*55L), the milling cutter diameter is 8 mm, and the mass concentration of the aqueous cutting fluid used is 8%, which is obtained by diluting the commercially available aqueous cutting fluid FRIGOMET478OC;

[0057] Before the fine milling starts, the milling cutter idles for 20 minutes at a spindle speed of 18000 r / min; the spindle speed of the fine milling is 18000 r / min, and the feed rate is 900 mm / r. The milling cutter used is an MCD single crystal milling cutter, the diameter of the milling cutter used is 6 mm, and the mass concentration of the aqueous cutting fluid used is 6%, which is obtained by diluting the commercially available aqueous cutting fluid FRIGOMET 478OC;

[0058] The aluminum material processed in this embodiment is 99.99% pure aluminum.

[0059] Example 2

[0060] This embodiment provides a mirror surface processing method for aluminum material, and the mirror surface processing method includes:

[0061] The machining surface of the aluminum layer is subjected to rough milling and fine milling in sequence;

[0062] The spindle speed of the rough milling is less than the spindle speed of the fine milling;

[0063] The feed rate of the rough milling is greater than the feed rate of the fine milling.

[0064] Before the rough milling starts, the milling cutter idles for 25 minutes at a spindle speed of 9500 r / min; the spindle speed of the rough milling is 9500 r / min, the feed rate is 1500 mm / r, the milling cutter used can be a high-speed carbide milling cutter for aluminum (D8*15*C4*SD8*55L), the milling cutter diameter is 8 mm, and the mass concentration of the aqueous cutting fluid used is 6%, which is obtained by diluting the commercially available aqueous cutting fluid FRIGOMET478OC;

[0065] Before the fine milling starts, the milling cutter idles for 15 minutes at a spindle speed of 16000 r / min; the spindle speed of the fine milling is 16000 r / min, and the feed rate is 600 mm / r. The milling cutter used is an MCD single crystal milling cutter, the diameter of the milling cutter used is 5 mm, and the mass concentration of the aqueous cutting fluid used is 8%, which is obtained by diluting the commercially available aqueous cutting fluid FRIGOMET 478OC;

[0066] The aluminum material processed in this embodiment is 99.99% pure aluminum.

[0067] Example 3

[0068] This embodiment provides a mirror surface processing method for aluminum material, and the mirror surface processing method includes:

[0069] The machining surface of the aluminum layer is subjected to rough milling and fine milling in sequence;

[0070] The spindle speed of the rough milling is less than the spindle speed of the fine milling;

[0071] The feed rate of the rough milling is greater than the feed rate of the fine milling.

[0072] Before the rough milling starts, the milling cutter idles for 15 minutes at a spindle speed of 10000 r / min; the spindle speed of the rough milling is 10000 r / min, the feed rate is 1200 mm / r, the milling cutter used can be a high-speed carbide milling cutter for aluminum (D8*15*C4*SD8*55L), the milling cutter diameter is 8 mm, and the mass concentration of the aqueous cutting fluid used is 10%, which is obtained by diluting the commercially available aqueous cutting fluid FRIGOMET 478OC;

[0073] Before the fine milling begins, the milling cutter idles for 30 minutes at a spindle speed of 20,000 r / min; the spindle speed of the fine milling is 20,000 r / min, and the feed rate is 300 mm / r. The milling cutter used is an MCD single crystal milling cutter, the diameter of the milling cutter used is 3 mm, and the mass concentration of the aqueous cutting fluid used is 10%, which is obtained by diluting the commercially available aqueous cutting fluid FRIGOMET 478OC;

[0074] The aluminum material processed in this embodiment is 99.99% pure aluminum.

[0075] Example 4

[0076] This embodiment provides a mirror surface processing method for aluminum material, and the mirror surface processing method includes:

[0077] The machining surface of the aluminum layer is subjected to rough milling and fine milling in sequence;

[0078] The spindle speed of the rough milling is less than the spindle speed of the fine milling;

[0079] The feed rate of the rough milling is greater than the feed rate of the fine milling.

[0080] Before the rough milling starts, the milling cutter idles for 30 minutes at a spindle speed of 8000 r / min; the spindle speed of the rough milling is 8000 r / min, the feed rate is 2000 mm / r, the milling cutter used can be a high-speed carbide milling cutter for aluminum (D8*15*C4*SD8*55L), the diameter of the milling cutter is 8 mm, and the mass concentration of the aqueous cutting fluid used is 5%, which is obtained by diluting the commercially available aqueous cutting fluid FRIGOMET478OC;

[0081] Before the fine milling starts, the milling cutter idles for 15 minutes at a spindle speed of 14000 r / min; the spindle speed of the fine milling is 14000 r / min, and the feed rate is 1200 mm / r. The milling cutter used is an MCD single crystal milling cutter, the diameter of the milling cutter used is 8 mm, and the mass concentration of the aqueous cutting fluid used is 5%, which is obtained by diluting the commercially available aqueous cutting fluid FRIGOMET 478OC;

[0082] The aluminum material processed in this embodiment is 99.99% pure aluminum.

[0083] Example 5

[0084] The only difference from Example 1 is that the mass concentration of the aqueous cutting fluid used in rough milling is 1%.

[0085] Example 6

[0086] The only difference from Example 1 is that the mass concentration of the aqueous cutting fluid used in rough milling is 15%.

[0087] Example 7

[0088] The only difference from Example 1 is that the mass concentration of the aqueous cutting fluid used in the fine milling is 1%.

[0089] Example 8

[0090] The only difference from Example 1 is that the mass concentration of the aqueous cutting fluid used in the fine milling is 15%.

[0091] Comparative Example 1

[0092] The only difference from Embodiment 1 is that the milling cutter does not idle before rough milling, that is, processing starts directly.

[0093] Comparative Example 2

[0094] The only difference from the first embodiment is that the milling cutter does not idle before the fine milling, that is, the machining starts directly.

[0095] Comparative Example 3

[0096] The only difference from Comparative Example 1 is that the milling cutter does not idle before fine milling, that is, both rough milling and fine milling start processing directly.

[0097] Comparative Example 4

[0098] The only difference from Example 1 is that the idle rotation time of the milling cutter is 5 minutes before the start of rough milling.

[0099] Comparative Example 5

[0100] The only difference from Example 1 is that the idle rotation time of the milling cutter is 5 minutes before the start of fine milling.

[0101] Comparative Example 6

[0102] The only difference from Comparative Example 4 is that the idle rotation time of the milling cutter is 5 minutes before the start of fine milling.

[0103] The results of the surface roughness Ra and mirror reflectivity of the pure aluminum material obtained by the above example are shown in Table 1, where the mirror reflectivity is measured at 20°, 45°, 60°, and 85° angles according to GB / T 20503-2006 Determination of mirror reflectivity and mirror gloss of anodized films of aluminum and aluminum alloys, and the mirror reflectivity at an angle of 45° is tested.

[0104] Table 1

[0105]

[0106]

[0107] As can be seen from Table 1, the mirror processing method provided by the present invention improves the processing accuracy and stability when milling the aluminum surface through the design of the processing process, so that the roughness Ra of the processed surface is less than 0.04μm, and the mirror reflectivity is ≥70%, achieving a mirror effect and having good performance.

[0108] The preferred embodiments of the present invention are described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the technical concept of the present invention, a variety of simple modifications can be made to the technical solution of the present invention, and these simple modifications all belong to the protection scope of the present invention.

[0109] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

[0110] In addition, various embodiments of the present invention may be arbitrarily combined, and as long as they do not violate the concept of the present invention, they should also be regarded as the contents disclosed by the present invention.

Claims

1. A mirror processing method for aluminum material, characterized in that: The mirror surface processing method comprises: The aluminum layer processing surface is subjected to rough milling and fine milling in sequence, and the roughness of the obtained processing surface Ra is less than 0.04μm; The idle time of the milling cutter before the rough milling starts is ≥15min; The idle time of the milling cutter before the start of fine milling is ≥15min; The spindle speed of the rough milling is less than the spindle speed of the fine milling; The feed rate of the rough milling is greater than the feed rate of the fine milling.

2. The mirror processing method according to claim 1, characterized in that: The spindle speed of the milling cutter idling before the rough milling starts is 8000-10000r / min.

3. The mirror processing method according to claim 1, characterized in that: The spindle speed of the rough milling is 8000-10000r / min.

4. The mirror processing method according to claim 1, characterized in that: The feed rate of the rough milling is 1200-2000mm / r.

5. The mirror processing method according to claim 1, characterized in that: The spindle speed of the milling cutter idling before the fine milling starts is 14000-20000r / min.

6. The mirror processing method according to claim 1, characterized in that: The spindle speed of the fine milling is 14000-20000r / min.

7. The mirror processing method according to claim 1, characterized in that: The feed rate of the fine milling is 300-1200 mm / r.

8. The mirror processing method according to claim 1, characterized in that: The milling cutter used in the fine milling comprises an MCD single crystal milling cutter.

9. The mirror processing method according to claim 1, characterized in that: The diameter of the milling cutter used in the fine milling is 3-8 mm.

10. The mirror surface processing method according to claim 1, characterized in that: The mass concentration of the aqueous cutting fluid used in the rough milling and / or fine milling is 5-10%.

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