Vacuum crystallization furnace

Abstract

The utility model belongs to the technical field of vacuum crystallization furnace equipment, and particularly relates to a vacuum crystallization furnace which comprises a furnace body, a cover plate is arranged at the top of the furnace body, and a bottom plate of the furnace body and the cover plate are both communicated with a vacuum pipe and a plurality of backfilling pipes; the heating part is arranged between the bearing part and the bottom plate of the furnace body, and the heating part is suitable for emitting heat to heat and crystallize the battery piece; the vacuum pipes are arranged to vacuumize the cavity from the top and the bottom of the furnace body at the same time, the vacuumizing effect is uniform, and the efficiency is high; nitrogen is introduced through the backfilling pipe to supplement gas to the cavity from the top and the bottom of the furnace body at the same time, so that the air pressure of the cavity is stable, and the drying progress is accelerated; by arranging the heating part, the heating mode of the heating part can be infrared heating, the crystallization of the battery piece coated with liquid medicine can be efficiently realized by heating the surface of the battery, a special crystallization cavity does not need to be additionally arranged, the use volume of the cavity is reduced, and the cost is reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum crystallization furnace equipment, and in particular relates to a vacuum crystallization furnace. Background Art

[0002] Perovskite solar cells are solar cells that use perovskite structural materials as light-absorbing materials. They are representatives of the third generation of high-efficiency thin-film cells and have the advantages of high efficiency, low cost, and high flexibility. Vacuum drying and crystallization is one of the important processes in the production of perovskite cells. The cells are carried by a carrier plate and driven by a conveyor roller to enter and exit a vacuum crystallization furnace for drying and crystallization. Existing vacuum crystallization furnaces are only connected to vacuum tubes at the bottom of the furnace body, and can only be evacuated from the bottom of the furnace body. The vacuuming efficiency is low and uneven, resulting in poor drying and crystallization effects for the cells. Existing vacuum crystallization furnaces require another chamber for heating and crystallizing the cells, which increases the size of the equipment and increases costs.

[0003] Therefore, it is necessary to provide a vacuum crystallization furnace which can evacuate the upper and lower parts of the vacuum crystallization furnace and has a heating function. Utility Model Content

[0004] The utility model aims to provide a vacuum crystallization furnace.

[0005] In order to solve the above technical problems, the utility model provides a vacuum crystallization furnace, comprising: a furnace body, a cover plate is arranged on the top of the furnace body, and the bottom plate of the furnace body and the cover plate are both connected with a vacuum tube and a plurality of backfilling tubes; wherein the top and bottom of the furnace body are suitable for evacuating the chamber of the furnace body through the vacuum tube, and the top and bottom of the furnace body are suitable for backfilling the cavity of the furnace body with gas through the backfilling tube; a bearing part, the bearing part is arranged in the cavity of the furnace body, wherein the bearing part is suitable for bearing and conveying battery cells; a heating part, the heating part is arranged between the bearing part and the bottom plate of the furnace body, wherein the heating part is suitable for emitting heat to heat and crystallize the battery cells.

[0006] Furthermore, the heating part includes a lamp tube mounting plate and a plurality of heating lamp tubes, wherein the heating lamp tubes are arranged on the inner wall of the lamp tube mounting plate, and a plurality of lamp tube mounting holes compatible with infrared lamps are arranged on the horizontal plate on one side of the furnace body, wherein the heating lamp tubes pass through the lamp tube mounting holes, and the lamp tube mounting plate is connected to the horizontal plate by bolts.

[0007] Furthermore, the heating lamp tube passes through the outer wall of the lamp tube mounting plate and a magnetic fluid is provided at the protruding end.

[0008] Furthermore, a vacuum hole is provided on the top of the cover plate, and the vacuum hole is suitable for connecting to the vacuum tube.

[0009] Furthermore, a plurality of backfill holes are arranged around the vacuum hole, and the backfill holes are suitable for connecting to the backfill pipe.

[0010] Furthermore, a vacuum gauge mounting hole is provided on the cover plate, and the vacuum gauge mounting hole is suitable for mounting a vacuum gauge.

[0011] Furthermore, a pair of reinforcing ribs are provided on the cover plate, and the reinforcing ribs are provided on the outer sides of the backfill holes.

[0012] Furthermore, a plurality of temperature measuring holes are provided on the outer side of the reinforcing rib, wherein the temperature measuring holes are suitable for installing thermocouples.

[0013] Furthermore, a sensing port is provided between the reinforcing ribs, and the sensing port is suitable for installing a sensor.

[0014] Furthermore, the bearing part includes a plurality of conveying rollers; the conveying rollers are rotatably arranged on the horizontal plates on both sides of the furnace body and are in the same horizontal plane, and the conveying rollers are suitable for bearing and conveying battery cells, wherein the outer ring of the conveying roller is provided with a plurality of rubber rings.

[0015] Furthermore, a valve port is opened and closed on a vertical plate on one side of the furnace body, wherein the valve port is flush with the height of the conveying roller.

[0016] Furthermore, an air uniforming component is also provided in the furnace body, and the air uniforming component includes an upper air uniforming portion and a lower air uniforming portion; the upper air uniforming portion is arranged at the bottom of the cover plate, and the lower air uniforming portion is arranged at the top of the base plate; the upper air uniforming portion and the lower air uniforming portion each include a plurality of layers of air uniforming plates, and a plurality of air uniforming holes are arranged on the top of the air uniforming plates, wherein the number of the air uniforming holes on the air uniforming plates close to the bearing portion tends to increase and the diameter tends to decrease.

[0017] Furthermore, a support groove is provided on the top of the air uniforming plate on the lower air uniforming part close to the heating part, and the top of the support groove is suitable for installing a heating tube support plate, and the heating tube support plate is provided with a plurality of support holes corresponding to the lamp tube mounting holes, wherein the support holes have the same height and diameter as the lamp tube mounting holes, and the heating lamp tube is suitable for passing through the support holes.

[0018] Furthermore, the vertical plates, horizontal plates and bottom plate of the furnace body, the cover plate, and the air-evening plate on the lower air-evening part close to the heating part are all connected with water pipes; wherein the water pipes are electrically connected to the thermocouples.

[0019] Furthermore, an observation window is provided on the side wall of the furnace body transverse plate.

[0020] Beneficial effects of the utility model:

[0021] 1. The furnace body and the cover plate are arranged. The furnace body is a rectangular box body. The cover plate is adapted to the furnace body and installed on the top of the furnace body. The cover plate and the bottom plate of the furnace body are connected with a vacuum tube and a plurality of backfill tubes. The vacuum tube is connected with a vacuum pump. The backfill tube is suitable for introducing nitrogen. The battery cell coated with battery liquid needs to be dried. The battery cell enters the cavity. The vacuum pump is started. The cavity is evacuated at the top and bottom of the furnace body through the vacuum tube. The vacuum effect is uniform and efficient, so that the battery cell can be dried smoothly. After drying for a period of time, the air pressure in the cavity rises, and nitrogen is introduced into the backfill hole. It enters the furnace body from the top and bottom of the furnace body at the same time, and the cavity is evenly backfilled with gas, so that the air pressure in the cavity is stable, which speeds up the drying progress.

[0022] 2. By setting up a carrying part, the carrying part can stably carry and transport the battery cells and transport the battery cells to the processing location;

[0023] 3. By setting up a heating part, the crystallization process begins after the battery cell is dried. At this time, the heating part can be infrared heating, and the heating effect is stable. By heating the battery surface, the crystallization of the battery surface can be efficiently achieved. There is no need to add a special crystallization cavity, which speeds up the crystallization speed, reduces the volume of the cavity required for the crystallization substrate, and reduces the cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0025] Figure 1 It is a schematic diagram of the overall structure of the vacuum crystallization furnace of the utility model;

[0026] Figure 2 It is a schematic diagram of the cross-sectional structure of the furnace body of the utility model;

[0027] Figure 3 This is a schematic diagram of the cover structure of the utility model;

[0028] Figure 4 This is a schematic diagram of the structure of the furnace body of the utility model from a top view perspective;

[0029] Figure 5 It is a structural schematic diagram of the furnace body and the heating lamp tube of the utility model;

[0030] Figure 6 It is a structural schematic diagram of the lower air-leveling part of the utility model.

[0031] In the figure:

[0032] 100, furnace body, 110, bearing part, 111, conveying roller, 112, rubber ring, 120, heating part, 121, lamp tube mounting plate, 122, heating lamp, 123, magnetic fluid, 130, horizontal plate, 131, lamp tube mounting hole, 140, vertical plate, 141, valve port, 150, water pipe, 160, observation window, 170, upper gas uniforming part, 180, lower gas uniforming part, 190, gas uniforming plate, 191, gas uniforming hole, 192, supporting groove, 193, heating tube supporting plate, 194, supporting hole;

[0033] 200, cover plate, 210, vacuum hole, 220, backfill hole, 221, backfill pipe, 230, vacuum gauge installation hole, 231, vacuum gauge, 240, reinforcing rib, 250, temperature measuring hole, 251, thermocouple, 260, sensing port, 261, sensor; DETAILED DESCRIPTION

[0034] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] Embodiment 1, as Figure 1-6As shown, the utility model provides a vacuum crystallization furnace, comprising: a furnace body 100, a cover plate 200 is arranged on the top of the furnace body 100, and the bottom plate of the furnace body 100 and the cover plate 200 are both connected with a vacuum tube (not shown in the figure) and a plurality of backfilling tubes 221; wherein, the top and bottom of the furnace body 100 are suitable for evacuating the chamber of the furnace body 100 through the vacuum tube, and the top and bottom of the furnace body 100 are suitable for backfilling the chamber of the furnace body 100 with gas through the backfilling tube 221; by arranging the furnace body 100 and the cover plate 200, the furnace The furnace body 100 is a rectangular box body, and the cover plate 200 is adapted to the furnace body 100 and installed on the top of the furnace body 100; a vacuum tube and a plurality of backfilling tubes 221 are connected through the cover plate 200 and the bottom plate of the furnace body 100, and the vacuum tube is connected to the vacuum pump, and the backfilling tube 221 is suitable for passing nitrogen or other inert gas; the battery cell needs to be dried, the battery cell enters the cavity, the vacuum pump is started, and the cavity is evacuated at the top and bottom of the furnace body 100 through the vacuum tube at the same time, and the vacuuming effect is uniform and efficient, so that the substrate on the surface of the battery cell can be dried steadily; after drying for a period of time , the air pressure in the cavity rises, and nitrogen or other inert gas is introduced into the backfill pipe 221, which enters the furnace body 100 from the top and bottom of the furnace body 100 at the same time, and the gas is evenly backfilled into the cavity, so that the air pressure in the cavity is stable, and the drying progress is accelerated; the carrying part 110, the carrying part 110 is arranged in the cavity of the furnace body 100, wherein the carrying part 110 is suitable for carrying and conveying battery cells; by setting the carrying part 110, the carrying part 110 can stably carry and convey the battery cells, and convey the battery cells to the processing position; the heating part 120, the heating part 12 0 is arranged between the carrying part 110 and the bottom plate of the furnace body 100, wherein the heating part 120 is suitable for emitting heat to heat and crystallize the battery cell; by arranging the heating part 120, the battery cell enters the crystallization process after drying. At this time, by arranging the heating part 120, the heating mode of the heating part 120 can be infrared heating, and the heating effect is stable. By heating the battery cell, the crystallization of the battery cell can be efficiently realized, and there is no need to add a special crystallization cavity, which accelerates the crystallization speed, reduces the use volume of the cavity required for the crystallized battery cell, and reduces the cost.

[0036] The battery cell can be made of a glass substrate or a silicon wafer as a base material.

[0037] The heating part 120 includes a lamp tube mounting plate 121 and a plurality of heating lamp tubes 122, wherein the heating lamp tubes 122 are arranged on the inner wall of the lamp tube mounting plate 121, and a plurality of lamp tube mounting holes 131 adapted to infrared lamps are arranged on the horizontal plate 130 on one side of the furnace body 100, wherein the heating lamp tubes 122 pass through the lamp tube mounting holes 131, and the lamp tube mounting plate 121 is connected to the horizontal plate 130 by bolts; the horizontal plate 130 of the furnace body 100 is provided with a mounting groove (not shown in the figure) adapted to the lamp tube mounting plate 121, and the heating lamp tubes 122 on the lamp tube mounting plate 121 pass through the lamp tube mounting holes 131. After the lamp tube mounting hole 131 is formed, the lamp tube mounting plate 121 is clamped in the mounting groove, and the lamp tube mounting plate 121 is fixedly connected to the cross plate 130 by bolts, so that the heating lamp tube 122 can be stably installed; by setting the heating lamp tube 122, the heating lamp tube 122 is heated by infrared, and when the battery cell enters the crystallization process, the heating lamp tube 122 starts infrared heating to heat the battery cell, so that the battery cell can be crystallized in the cavity of the furnace body 100, and there is no need to add a special crystallization cavity, which speeds up the crystallization speed, reduces the volume of the cavity required for the crystallized battery cell, and reduces the cost.

[0038] The heating lamp tube 122 passes through the outer wall of the lamp tube mounting plate 121 and a magnetic fluid 123 is provided at the protruding end; by providing the magnetic fluid 123, the magnetic fluid 123 can play a sealing role at the connection between the heating lamp tube 122 and the lamp mounting plate.

[0039] A vacuum hole 210 is provided on the top of the cover plate 200, and the vacuum hole 210 is suitable for connecting to the vacuum tube (not shown in the figure); the vacuum tube is connected to a vacuum pump, and when the cavity of the furnace body 100 needs to be evacuated, the vacuum pump is started so that the air pressure in the cavity of the furnace body 100 can be quickly evacuated to a vacuum value.

[0040] A plurality of backfill holes 220 are arranged around the vacuum hole 210, and the backfill holes 220 are suitable for connecting to the backfill pipe 221; the backfill pipe 221 is suitable for connecting to nitrogen or other inert gases. When gas needs to be supplemented in the furnace body 100, nitrogen or other inert gases are introduced into the backfill pipe 221 to supplement the cavity of the furnace body 100, thereby ensuring the stability of the air pressure in the cavity, avoiding the shaking of the battery cell, and achieving good effects on the drying and crystallization of the battery cell.

[0041] The cover plate 200 is provided with a vacuum gauge mounting hole 230, and the vacuum gauge mounting hole 230 is suitable for mounting a vacuum gauge 231. Through the vacuum gauge 231, the staff can quickly obtain the air pressure value in the cavity, understand the vacuum state of the furnace body 100, and adjust the vacuum pumping rate according to the air pressure value, thereby improving the efficiency and quality of drying and crystallization of the battery cells.

[0042] A pair of reinforcing ribs 240 are disposed on the cover plate 200 , and the reinforcing ribs 240 are disposed on the outer sides of the backfill holes 220 ; the reinforcing ribs 240 can increase the structural strength of the cover plate 200 , thereby increasing the service life of the cover plate 200 .

[0043] A plurality of temperature measuring holes 250 are disposed on the outer side of the reinforcing rib 240 , wherein the temperature measuring holes 250 are suitable for installing thermocouples 251 ; the thermocouples 251 are stably installed in the temperature measuring holes 250 , and the thermocouples 251 can detect the cavity temperature of the furnace body 100 .

[0044] A sensing port 260 is provided between the reinforcing ribs 240 , and the sensing port 260 is suitable for installing a sensor 261 ; the sensor 261 can sense whether the battery cell is delivered to the correct position in the cavity.

[0045] The bearing portion 110 includes a plurality of conveying rollers 111; the conveying rollers 111 are rotatably arranged on the horizontal plates 130 on both sides of the furnace body 100 and are in the same horizontal plane, and the conveying rollers 111 are suitable for carrying and conveying battery cells, wherein the outer rings of the conveying rollers 111 are sleeved with a plurality of rubber rings 112; the battery cells are carried by the conveying rollers 111, and when the conveying rollers 111 rotate, they drive the battery cells into the cavity of the furnace body 100, and when the battery cells are crystallized, the conveying rollers 111 can roll back and forth to drive the battery cells to move back and forth, so that the surface of the battery cells is evenly heated and the crystallization effect is better; the rubber rings 112 are made of flexible material and can protect the battery cells while supporting them.

[0046] A valve port 141 is provided on a vertical plate 140 on one side of the furnace body 100, wherein the valve port 141 is flush with the height of the conveying roller 111; a valve (not shown in the figure) is provided on the valve port for lifting and lowering, and the valve is suitable for covering the valve port 141 to form a closed space in the cavity of the furnace body; when it is necessary to convey the battery cell, the valve descends to open the valve port 141, and the carrying part 110 carries and conveys the battery cell into the cavity of the furnace body 100 through the conveying roller 111, and the valve rises to cover the valve port 141 to close the valve port 141, so as to dry and crystallize the battery cell. After the process is completed, the valve port 141 continues to open, and the carrying part 110 conveys the battery cell out, and the staff takes away the battery cell.

[0047] The furnace body 100 is also provided with a gas-leveling assembly, which includes an upper gas-leveling portion 170 and a lower gas-leveling portion 180; the upper gas-leveling portion 170 is arranged at the bottom of the cover plate 200, and the lower gas-leveling portion 180 is arranged at the top of the bottom plate; the upper gas-leveling portion 170 and the lower gas-leveling portion 180 each include a plurality of gas-leveling plates 190, and a plurality of gas-leveling holes 191 are arranged on the top of the gas-leveling plates 190, wherein the number of the gas-leveling holes 191 on the gas-leveling plates 190 close to the bearing portion 110 is It shows an increasing trend and the diameter shows a decreasing trend; by setting up a gas equalizing component, the number of the gas equalizing holes 191 on the gas equalizing plate 190 close to the supporting part 110 shows an increasing trend and the diameter shows a decreasing trend. When the gas enters the cavity and approaches the supporting part 110, it can be gradually guided by the gas equalizing holes 191 on each layer of the gas equalizing plate 190, and the gas can be evenly distributed step by step. The gas can eventually be evenly diffused into the supporting part 110, avoiding shaking of the battery cell, achieving good drying and crystallization effects, improving production quality, and reducing costs.

[0048] A support groove 192 is provided on the top of the air uniforming plate 190 on the lower air uniforming portion 180 close to the heating portion 120, and the top of the support groove 192 is suitable for installing a heating tube support plate 193, and a plurality of support holes 194 corresponding to the lamp tube mounting holes 131 are provided on the heating tube support plate 193, wherein the support holes 194 have the same height and diameter as the lamp tube mounting holes 131, and the heating lamp tube 122 is suitable for passing through the support holes 194; the support groove 192 can stably support the heating tube support plate 193, and the support holes 194 are adapted to the heating lamp tube 122, and after the heating lamp tube 122 is installed in the cavity of the furnace body 100, the support holes 194 can stably support the heating lamp tube 122, so that the heating lamp tube 122 can be installed more firmly and stably, thereby improving the crystallization efficiency and quality.

[0049] The vertical plate 140, the horizontal plate 130 and the bottom plate of the furnace body 100, the cover plate 200, and the air-distributing plate 190 on the lower air-distributing portion 180 close to the heating portion 120 are all connected to a water pipe 150; wherein, the water pipe 150 is electrically connected to a thermocouple 251; when the battery cells are dried and crystallized in the cavity of the furnace body 100, the heating lamp 122 heats the cavity to increase the temperature, and the thermocouple 251 detects the temperature of the cavity. When the temperature in the cavity is too high, the thermocouple 251 can transmit a signal to the water pipe 150, and the water pipe 150 can pass a cooling medium to cool down the cavity, surroundings and bottom plate of the furnace body 100 to prevent the furnace body 100 from overheating and affecting the working state.

[0050] The side wall of the horizontal plate 130 of the furnace body 100 is provided with an observation window 160; when the battery cell enters the cavity of the furnace body 100 for drying and crystallization, the staff can observe the status of the battery cell through the observation window 160, and can take out the battery cell in time after the processing is completed, thereby avoiding the increase of processing time.

[0051] The working process of the above-mentioned vacuum crystallization furnace is as follows: the valve port 141 is opened, and the battery cell to be processed passes through the valve port 141 into the furnace body 100, and the conveying roller 111 rotates to carry and convey the battery cell to the cavity of the furnace body 100, and the sensor 261 detects whether the battery cell is in the accurate processing position. When the battery cell is in the processing position, the vacuum pump is started, and the cover plate 200 and the bottom plate of the furnace body 100 start to evacuate the chamber of the furnace body 100 through the vacuum tube, and the air pressure in the cavity drops to a preset value; after drying for a period of time, the air pressure in the cavity rises, and the cover plate 200 and the bottom plate of the furnace body 100 are backfilled with nitrogen through the backfilling pipe 221. Gas is pumped in the cavity to improve the gas atmosphere, and then the vacuum is continued to reduce the air pressure to 10PA, so that the battery cell is dried and then enters the crystallization process; after the battery cell is dried, the heating lamp 122 in the furnace body 100 works, and the infrared heating is turned on to heat the battery cell. In order to achieve a better crystallization effect, the conveying roller 111 in the cavity rotates to drive the battery cell to move back and forth, so that the heating is more uniform; after the crystallization is completed, the cover plate 200 and the bottom plate of the furnace body 100 are backfilled with nitrogen through the backfill pipe 221, so that the vacuum of the cavity is broken, and the air pressure in the cavity is balanced with the air pressure outside the cavity. At this time, the valve port 141 is opened, the battery cell is taken out, and the entire process of drying and crystallization is completed.

[0052] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A vacuum crystallization furnace, characterized in that: include: A furnace body, wherein a cover plate is disposed on the top of the furnace body, a bottom plate is disposed on the bottom of the furnace body, and the bottom plate of the furnace body and the cover plate are both connected with a vacuum tube and a plurality of backfill tubes; wherein, The top and bottom of the furnace body are suitable for evacuating the chamber of the furnace body through the vacuum tube, and the top and bottom of the furnace body are suitable for backfilling the cavity of the furnace body with gas through the backfill tube; The bearing part is arranged in the cavity of the furnace body, wherein: The carrying portion is suitable for carrying and conveying battery cells; A heating part, the heating part is arranged between the bearing part and the bottom plate of the furnace body, wherein The heating part is suitable for emitting heat to heat and crystallize the battery cell.

2. A vacuum crystallization furnace as claimed in claim 1, characterized in that: The heating part includes a lamp tube mounting plate and a plurality of heating lamp tubes, wherein the heating lamp tubes are arranged on the inner wall of the lamp tube mounting plate, and a plurality of lamp tube mounting holes adapted to infrared lamps are arranged on a horizontal plate on one side of the furnace body, wherein: The heating lamp passes through the lamp installation hole, and the lamp installation plate is connected to the transverse plate by bolts.

3. A vacuum crystallization furnace as claimed in claim 2, characterized in that: The heating lamp tube passes through the outer wall of the lamp tube mounting plate and a magnetic fluid is arranged at the protruding end.

4. A vacuum crystallization furnace as claimed in claim 3, characterized in that: A vacuum hole is arranged on the top of the cover plate, and the vacuum hole is suitable for connecting with the vacuum tube.

5. A vacuum crystallization furnace as claimed in claim 4, characterized in that: A plurality of backfill holes are arranged around the vacuum hole, and the backfill holes are suitable for being connected to the backfill pipe.

6. A vacuum crystallization furnace as claimed in claim 5, characterized in that: The cover plate is provided with a vacuum gauge mounting hole, and the vacuum gauge mounting hole is suitable for mounting a vacuum gauge.

7. A vacuum crystallization furnace as claimed in claim 6, characterized in that: The cover plate is provided with a pair of reinforcing ribs, and the reinforcing ribs are arranged on the outside of the backfill hole.

8. A vacuum crystallization furnace as claimed in claim 7, characterized in that: A plurality of temperature measuring holes are arranged on the outer side of the reinforcing rib, wherein the temperature measuring holes are suitable for installing thermocouples.

9. A vacuum crystallization furnace as claimed in claim 8, characterized in that: A sensing port is arranged between the reinforcing ribs, and the sensing port is suitable for installing a sensor.

10. A vacuum crystallization furnace as claimed in claim 2, characterized in that: The bearing part includes a plurality of conveying rollers; the conveying rollers are rotatably arranged on the horizontal plates on both sides of the furnace body and are in the same horizontal plane, and the conveying rollers are suitable for bearing and conveying battery cells, wherein: The outer ring of the conveying roller is sleeved with a plurality of rubber rings.

11. A vacuum crystallization furnace as claimed in claim 10, characterized in that: A valve port is provided on a vertical plate on one side of the furnace body, wherein: The valve port is flush with the height of the conveying roller.

12. A vacuum crystallization furnace as claimed in claim 2, characterized in that: The furnace body is also provided with a gas-uniform component, which includes an upper gas-uniform part and a lower gas-uniform part; the upper gas-uniform part is arranged at the bottom of the cover plate, and the lower gas-uniform part is arranged at the top of the bottom plate; the upper gas-uniform part and the lower gas-uniform part each include a plurality of gas-uniform plates, and a plurality of gas-uniform holes are arranged on the top of the gas-uniform plates, wherein: The number of the air-distributing holes on the air-distributing plate close to the bearing portion tends to increase, and the diameters tend to decrease.

13. A vacuum crystallization furnace as claimed in claim 12, characterized in that: A support groove is provided on the top of the air-distributing plate on the lower air-distributing part close to the heating part, and the top of the support groove is suitable for installing a heating tube support plate, and the heating tube support plate is provided with a plurality of support holes corresponding to the lamp tube installation holes, wherein: The support hole has the same height and diameter as the lamp tube mounting hole, and the heating lamp tube is suitable for passing through the support hole.

14. A vacuum crystallization furnace as claimed in claim 13, characterized in that: The vertical plate, horizontal plate and bottom plate of the furnace body, the cover plate, and the gas-distributing plate on the lower gas-distributing part close to the heating part are all connected with water pipes; wherein, The water pipe is electrically connected to the thermocouple.

15. A vacuum crystallization furnace as claimed in claim 2, characterized in that: The side wall of the furnace body transverse plate is provided with an observation window.

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