The invention belongs to the field of
carbon product production, and particularly relates to special
graphite for
ion implantation and a preparation method thereof, and the special
graphite is composed of aggregate
coke, an additive and a binder; the aggregate
coke comprises at least one of low-ash
petroleum coke,
pitch coke,
pitch coke green coke, needle coke and artificial high-purity
graphite, the ash content is not higher than 0.2%, the
water content is not higher than 0.02%, and the prepared special graphite for
ion implantation has excellent comprehensive performance indexes. The
volume density is 1.85-1.92 g / cm < 3 >, the
porosity is smaller than or equal to 7%, the resistivity is 12-14 mu
omega m, the
breaking strength is larger than or equal to 85 MPa, the
compressive strength is larger than or equal to 180 MPa, the Young modulus is 13-15 GPa, the
thermal expansion coefficient is smaller than or equal to 5.0 * 10 <-6 > / DEG C, the total
impurity content is smaller than or equal to 50 ppm, the key
metal element content is smaller than or equal to 5 ppm, and all the properties reach the industry leading level. The harsh requirements of the
ion implantation technology on the special graphite material in the aspects of
electric heating performance, mechanical performance,
thermal stability and purity can be fully met, and stable operation and efficient work of
ion implantation equipment are effectively guaranteed.