Modular injector and exhaust assembly
a module-type, gas-delivering technology, applied in the direction of electrical equipment, chemical vapor deposition coating, coating, etc., can solve the problems of inconvenient manufacturing of prior art multiple-head single-body injector assemblies, and inability to meet the requirements of the application
Inactive Publication Date: 2005-08-25
AVIZA TECHNOLOGY INC
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Benefits of technology
The present invention provides an improved injector for delivering gases. The injector is a modular gas delivery injector and exhaust assembly that allows for individual removal or addition of injector heads. The exhaust assembly includes an upper and lower exhaust plate with tapered exhaust channels and exhaust ports, as well as an outer and inner exhaust manifold assembly for balanced exhaust flow. The technical effects include controlled exhausting of gases even when the system is un-balanced, as well as improved gas delivery and exhaust efficiency.
Problems solved by technology
If the gas flow is uncontrolled, the chemical reaction will not be optimal and the result will likely be a film which is not of uniform composition and / or thickness.
When this occurs, proper functioning of the semiconductor is impaired, and may even fail.
While these injectors have shown to be an advantageous design, the manufacturing of the prior art multiple head single body injector assemblies are costly.
Further, there is increased liability during each successive fabrication step of placing the whole multiplicity of injector heads at risk with a single fabrication error.
As the number of injectors increases, so does the complexity of the exhaust system and problems occur such as balancing of the exhaust gas flow.
Method used
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[0033] In general, the present invention provides a modular chemical or gas injector and exhaust assembly capable of providing gas distribution along a length, in particular the length of the injector, and provides for a plurality of individual injector heads to be cooperated to form the injector and exhaust assembly which addresses the shortcomings of the prior art. The injector assembly of the present invention consists of a plurality of injector heads cooperated to form the assembly to deliver one or more gaseous chemicals to a semiconductor wafer or substrate during processing. The injector heads of the present invention comprise one or more axially aligned passages for delivering one or more gases to a delivery surface through one or more distribution channels. The assembly further includes at least two end injector heads each positioned at opposite ends of the assembly. The end injector heads also include one or more axially aligned passages for delivering one or more gases to...
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Abstract
An injector and exhaust assembly for providing delivery of gas to a substrate is provided. The injector and exhaust assembly comprises at least two injectors positioned adjacent each other and spaced apart to form at least one exhaust channel therebetween, and a mounting plate for securing the at least two injectors, wherein each of the at least two injectors being individually mounted to or removed from the mounting plate, and the mounting plate being provided with at least one exhaust slot in fluid communication with the at least one exhaust channel. An exhaust assembly is coupled to the mounting plate to remove exhaust gases from the injectors.
Description
CROSS REFERENCE TO RELATED APPLICATION [0001] This application is a Continuation Patent Application of U.S. patent application Ser. No. 10 / 194,639, entitled: MODULAR INJECTOR AND EXHAUST ASSEMBLY, filed Jul. 12, 2002, which claims priority to U.S. Provisional Patent Application Ser. No. 60 / 305,406, filed Jul. 13, 2001, and hereby incorporated by reference.FIELD OF THE INVENTION [0002] This invention relates generally to a gas injector for the delivery of gases. More particularly, the invention relates to a modular gas delivery injector and exhaust assembly that promotes substantially uniform distribution of gases. BACKGROUND OF THE INVENTION [0003] The delivery of gases is a significant processing step in the fabrication of semiconductor devices. Gases are delivered to process semiconductors using a variety of semiconductor fabrication equipment. In one such example, chemical vapor deposition (CVD) systems are used to convey certain gases which, via thermal reaction or decomposition...
Claims
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IPC IPC(8): C23C16/44C23C16/455H01L21/205
CPCC23C16/4412C23C16/455C23C16/45514C23C16/45578C23C16/45563C23C16/45572C23C16/45519
InventorDEDONTNEY, JAY BRIANMATTHIESEN, RICHARD H.KURITA, SAMUEL
OwnerAVIZA TECHNOLOGY INC