Frequency-shifting micro-mechanical optical modulator
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[0181]In some embodiments, elements comprise reflective tensioned ribbons as described in U.S. Pat. No. 5,311,360 which is hereby incorporated herein by reference. Such elements can be made to have high resonant frequencies. This facilitates allowing the modulator to provide a large frequency shift and good bandwidth. Furthermore, the damping of the motion can be chosen by design to correspond to an oscillator that is under-damped, critically damped, or over-damped as described in Payne et al. Enabling high data-rate imaging applications with grating light valve technology in Haken Urey and David L. Dickensheets editors MOEMS Display and Imaging Systems II, vol. 4348 of Proceedings of the SPIE pp. 76-88, 2004 which is hereby incorporated herein by reference.
[0182]Tensioned ribbons may be made of Si3N4 and SiO2 films and formed by a lithographic process. The surface of the ribbon is typically coated with a metallic film to make the ribbon reflective to light. The ribbons are typicall...
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