MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator

a technology of oscillator and vibrator, which is applied in the direction of oscillator, microelectromechanical system, electrical apparatus, etc., can solve the problems of large affecting the operating characteristics of the manufacturing process, and achieve the effect of stable resonation characteristics

Inactive Publication Date: 2013-11-19
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patent discusses a MEMS resonator that can have stable resonation characteristics even if the length of its beam portion varies slightly during manufacturing. This is achieved by reducing the variation in frequency of the beam portion compared to a beam portion with a rectangular shape. The manufacturing method described in the patent can provide a stable MEMS resonator.

Problems solved by technology

However, since the MEMS resonator has a micro structure, variations in manufacturing process greatly affect operating characteristics.

Method used

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  • MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator
  • MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator
  • MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator

Examples

Experimental program
Comparison scheme
Effect test

first modified example

3.1. MEMS Resonator

[0065]FIG. 6 is a plan view schematically showing a MEMS resonator 200 according to a first modified example of the embodiment, corresponding to FIG. 1.

[0066]In the example of the MEMS resonator 100 as shown in FIG. 1, the planar shape of the beam portion 34 is an isosceles triangle where the sides 34b and 34c are equal in length.

[0067]On the other hand, the MEMS resonator 200 has, in plan view as shown in FIG. 6, a first arc 34d and a second arc 34e. The first arc 34d and the second arc 34e are arranged symmetrically with respect to the first straight line V1. The first arc 34d and the second arc 34e are connected at an intersection point R. The intersection point R can form the tip 34a of the beam portion 34. In the example shown in the drawing, the planar shape of the beam portion 34 of the MEMS resonator 200 is composed of the boundary line B between the supporting portion 32 and the beam portion 34, the first arc 34d connected to the boundary line B, and the ...

second modified example

3.2. MEMS Resonator

[0071]FIG. 7 is a plan view schematically showing a MEMS resonator 300 according to a second modified example of the embodiment, corresponding to FIG. 1.

[0072]The planar shape of the MEMS resonator 300 is trapezoidal as shown in FIG. 7. In the MEMS resonator 300, the tip 34a is a side which connects the side 34b with the side 34c.

[0073]According to the MEMS resonator 300, compared to the MEMS resonator 100 for example, the area of the beam portion 34 can be increased when the length of the beam portion 34 is made constant. Therefore, a large electrostatic force can be generated between the electrodes 20 and 30, making it possible to easily resonate the beam portion 34.

4. Oscillator

[0074]Next, an oscillator according to the embodiment will be described with reference to the drawing. FIG. 8 schematically shows the oscillator 400 according to the embodiment.

[0075]As shown in FIG. 8, the oscillator 400 includes any of the MEMS resonators (for example, the MEMS resona...

experimental examples

5. Experimental Examples

[0080]Next, experimental examples of the MEMS resonators according to the embodiment will be described with reference to the drawings. Specifically, simulations in which the MEMS resonators according to the embodiment are modeled will be described. The simulations were performed using I-DEAS (manufactured by Siemens PLM Software).

5.1. Configuration of Model

[0081]FIG. 9A is a plan view schematically showing a model used in a simulation as Example 1. Example 1 corresponds to the second electrode 30 of the MEMS resonator 100 (refer to FIG. 1). In FIG. 9A, portions corresponding to those of the second electrode 30 of the MEMS resonator 100 are denoted by the same reference numerals and signs in Example 1.

[0082]The beam portion 34 of Example 1 is symmetrical with respect to the first straight line V1 as shown in FIG. 9A and is an isosceles triangle where the side 34b and the side 34c are equal in length. The length L of the beam portion 34 is a distance between th...

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Abstract

A MEMS resonator according to the invention includes: a substrate; a first electrode formed above the substrate; and a second electrode having a supporting portion which is formed above the substrate and a beam portion which is supported by the supporting portion and arranged above the first electrode, wherein the beam portion has, in plan view, a shape in which the width monotonically decreases in a direction from the supporting portion toward a tip of the beam portion in a region overlapping the first electrode.

Description

BACKGROUND[0001]1. Technical Field[0002]The present invention relates to a MEMS resonator, an oscillator, and a method for manufacturing the MEMS resonator.[0003]2. Related Art[0004]MEMS (micro electro mechanical systems), which are one of techniques for forming a minute structure, mean a technique for making, for example, a micro electro mechanical system in micron order, or the product thereof.[0005]JP-A-2010-162629 discloses a MEMS resonator having a fixed electrode and a movable electrode, in which the movable electrode is driven with an electrostatic force generated between both the electrodes.[0006]However, since the MEMS resonator has a micro structure, variations in manufacturing process greatly affect operating characteristics. For example, the MEMS resonator resonates at a predetermined frequency by the driving of the movable electrode, and the shape (length) of the movable electrode varies according to the variations in manufacturing process, whereby the MEMS resonator so...

Claims

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Application Information

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Patent Type & AuthorityPatents(United States)
IPC IPC(8): H03H9/24H01L21/00
CPCB81B3/00B81C1/00H03H3/007H03H9/24B81C1/0015H03H7/00H03H3/0076H03H9/2457B81B2201/0271B81B2203/019H03H2009/02291H03H2009/02511
InventorKIHARA, RYUJI
OwnerSEIKO EPSON CORP