Film bulk acoustic resonator (FBAR)-based wireless micro quality sensor network node

A thin-film bulk acoustic wave and mass sensor technology, which is applied in the field of mass sensors and wireless micro-mass sensor network nodes, can solve the problems of large structural mutual interference, limited measurement range, and lack of versatility of the three-mixing method, and achieve wide-range real-time Effects of measurement, ensuring measurement sensitivity, and improving measurement sensitivity and accuracy

CN102109374AInactive Publication Date: 2011-06-29ZHEJIANG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2011-06-29
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a film bulk acoustic resonator (FBAR)-based wireless micro quality sensor network node, which comprises an FBAR sensor oscillating circuit to be measured, a reference FBAR sensor oscillating circuit, a coarse channel radio frequency tracking circuit, a fine channel intermediate frequency tracking circuit, a programmable processor circuit, a radio frequency transceiving circuit and an antenna. A double-channel differential measuring method and a double-channel frequency tracking control principle are combined, and the closed loop control of a variable local oscillator is realized by the programmable processor circuit, so that high-accuracy and wide-range micro quality real-time measurement is realized, application flexibility is increased, an application range is expanded, and the measuring error of the circuit in severe environment application is greatly reduced.
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Description

technical field

[0001] The invention relates to a mass sensor in the field of wireless sensor networks, in particular to a wireless micro-mass sensor network node of a film bulk acoustic wave resonator. Background technique

[0002] At present, the measurement circuit of the quality sensor adopts the method of two-way differential measurement, that is, one way for the FBAR sensor to be tested and one way for the reference FBAR sensor.

[0003] The FBAR sensor to be tested changes the frequency of the output signal of the oscillator circuit of the FBAR sensor to be tested as the perceived quality changes, so as to determine the variation of the quality by measuring the signal frequency. However, due to the influence of temperature, pressure, humidity and some environmental factors and uncertain interference in the measurement process, these factors will also cause changes in the output signal frequency of the FBAR sensor oscillation circuit to be tested. Therefore, another r...

Examples

Embodiment Construction

[0070] see figure 1 .

[0071] Thin film bulk acoustic resonator sensor oscillating circuit to be tested: the sensor circuit, used to convert the micro-mass signal to be measured into a radio frequency signal through the thin film bulk acoustic resonator sensor oscillating circuit.

[0072] Reference thin film bulk acoustic resonator sensor oscillation circuit: that is, the sensor circuit, which is used to convert the reference micro-mass signal into a radio frequency signal through the thin film bulk acoustic resonator sensor oscillation circuit.

[0073] Coarse channel RF tracking circuit: used to convert the RF signal into an intermediate frequency signal, and dynamically modify the frequency setting parameters of the oscillation circuit according to the instructions of the programmable processor circuit, and track the frequency of the RF signal to realize wireless based on thin film bulk acoustic resonator Broadband range for tiny mass sensor network nodes.

[0074] Fin...