Light path interchange device based on total reflection

A technology of total reflection and optical path, applied in the field of nanometer measurement, to achieve the effect of no energy loss

CN102519356AInactive Publication Date: 2012-06-27UNIV OF SHANGHAI FOR SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2012-06-27
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a light path interchange device based on total reflection, which consists of eight isosceles right-angle prisms with the same specification; a light path structure control system between an incident light beam and an outgoing light beam is formed by the eight prisms; and two parallel incident light beams are totally reflected by the system for four times and are then emitted in parallel, so that position interchange can be realized, but the interval and the optical property of the two light beams are not changed. The light path interchange device is small in volume, simple in structure, stable in control and free from the influence for light beam polarization state.
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Description

technical field

[0001] The invention relates to an optical path structure for laser interferometry, and belongs to the field of nanometer measurement, in particular to an optical path interchange device based on total reflection. Background technique

[0002] One of the most promising sciences of the 21st century. It involves scientific research and industrial fields such as microelectronics, optics, materials science, mechanics, biology and life sciences. Its purpose is to research, develop and process materials, devices and systems with critical dimensions close to or less than 100nm, so as to obtain A product with the required functionality and performance.

[0003] At present, there are two main categories of nanometer measurement methods: non-optical measurement methods represented by scanning probe microscopes and optical measurement methods represented by various laser interferometers. Non-optical nanometer measurement methods represented by scanning probe microscop...

Examples

Embodiment Construction

[0014] see figure 1 , the invention discloses an optical path interchange device based on total reflection. As shown in the picture: it consists of 8 isosceles right-angle prisms with the same specifications. Wherein: each right-angled side of the first prism 1 and the second prism 2 extends on the same vertical straight line, and the hypotenuse of the first prism 1 and the second prism 2 is at an angle of 90 degrees; the other side of the first prism 1 The right angle side completely coincides with the right angle side of the third prism 3, and the hypotenuse of the third prism 3 is parallel to the hypotenuse of the first prism 1, and the right angle side of the fourth prism 4 coincides completely with another right angle side of the third prism 3 , and the hypotenuse of the fourth prism 4 and the hypotenuse of the third prism 3 form an angle of 90 degrees; the other right-angle side of the second prism 2 coincides completely with the right-angle side of the fifth prism 5, a...