Wafer cleaning and recycling machine

Abstract

The present invention relates to the technical field of semiconductor manufacturing auxiliary devices, and in particular to a wafer cleaning and recycling machine, which reduces equipment failure rate and has a small load; improves stirring efficiency; and has a simple process of adding recycled wafers and cleaning liquid; comprises a cylinder, a group of first stirring blades, a first baffle cover, a second baffle cover and a first transmission shaft, wherein the first baffle cover and the second baffle cover are respectively arranged at the entrance and the discharge port, a motor is arranged above the cylinder, and a group of first stirring blades are arranged in the lower half area of ​​the first transmission shaft; further comprises a working box, a first gear, a second gear and a second transmission shaft, and the second transmission shaft is arranged at the output end of the motor; further comprises an upper gear, a lower gear, an upper chain, a lower chain, a left gear, a right gear, a left installation box, a right installation box, a left connecting rod, a right connecting rod and a group of second stirring blades; further comprises a hook, a support block, a fixing pin, a lower pressure rod, a force ring, a group of fixing plates, a central rotating shaft, a lower connecting rod and a group of positioning baffles.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing auxiliary devices, and in particular to a wafer cleaning and recycling machine. Background Art

[0002] As is known to all, a wafer cleaning and recycling machine is a device for cleaning recycled wafers during the wafer recycling process, and has been widely used in the field of semiconductor manufacturing; the existing wafer cleaning and recycling machine comprises a cylinder, a group of first stirring blades, a first baffle, a second baffle and a first transmission shaft, a cleaning chamber is arranged inside the cylinder, a rotating port, an inlet and a discharge port are arranged in the upper half area of ​​the left side wall and the lower half area of ​​the right side wall of the cylinder respectively, a first baffle and a second baffle are arranged at the inlet and the discharge port respectively, the first baffle and the second baffle are both screwed to the cylinder, the rotating port, the inlet and the discharge port are all connected to the cleaning chamber, a motor is arranged above the cylinder, a first transmission shaft is arranged at the output end of the motor, the first transmission shaft passes through the rotating port and enters the cylinder, and the lower half area of ​​the first transmission shaft A group of first stirring blades are arranged in the area; when the existing wafer cleaning and recycling machine is used, the first baffle is screwed onto the entrance, and the user adds the recovered wafers and cleaning liquid into the cylinder through the entrance, and then energizes the motor to convert the electrical energy into the kinetic energy of the motor, thereby driving the first transmission shaft to rotate, and then driving a group of first stirring blades to rotate, and the cleaning liquid and the recovered wafers are mixed and contacted, and the cleaning liquid cleans the impurities on the surface of the recovered wafers. After cleaning, the user opens the second baffle, and the cleaned material is discharged through the discharge port; it is found in the use of the existing wafer cleaning and recycling machine that the equipment has a high failure rate, a large load, and a low reliability of use; the stirring efficiency is low, and a long time of stirring is required, and the work efficiency is low; the process of adding recovered wafers and cleaning liquid is complicated, and the use limitations are high. Summary of the invention

[0003] In order to solve the above technical problems, the present invention provides a wafer cleaning and recycling machine which reduces equipment failure rate, has a small load, and improves reliability of use; improves stirring efficiency, shortens stirring time, and improves work efficiency; and has a simple process for adding recycled wafers and cleaning liquid, reducing usage limitations.

[0004] The wafer cleaning and recycling machine of the present invention comprises a cylinder, a group of first stirring blades, a first blocking cover, a second blocking cover and a first transmission shaft, a cleaning chamber is arranged inside the cylinder, a rotating port, an entrance port and a discharge port are respectively arranged in the upper half area of ​​the left side wall and the lower half area of ​​the right side wall of the cylinder, a first blocking cover and a second blocking cover are respectively arranged at the entrance port and the discharge port, the second blocking cover is screwed to the cylinder, the rotating port, the entrance port and the discharge port are all connected with the cleaning chamber, a motor is arranged above the cylinder, the first transmission shaft passes through the rotating port to enter the cylinder, a group of first stirring blades are arranged in the lower half area of ​​the first transmission shaft; it also comprises a working box, a first gear, a second gear and a second transmission shaft, a working chamber is arranged inside the working box, a first connecting port and a second connecting port are respectively arranged in the left half area of ​​the top side wall and the central area of ​​the lower side wall of the working box, the first connecting port and the second connecting port are both connected with the working chamber, the motor is located above the working box, a second transmission shaft is arranged at the output end of the motor, and the bottom of the working box A left containing groove and a right containing groove are respectively provided in the left half area and the central area of ​​the side wall, and a left ball bearing and a right ball bearing are respectively provided inside the left containing groove and the right containing groove, the first gear and the second gear are both located inside the working box, the bottom of the second transmission shaft passes through the first connecting port, the first gear and the upper half area of ​​the left ball bearing, the inner side wall of the first gear is connected to the outer side wall of the second transmission shaft, the bottom of the second transmission shaft is inserted into the left ball bearing, the second transmission shaft is key-connected with the left ball bearing, the bottom of the second transmission shaft is separated from the working box, the second connecting port is communicated with the right containing groove, an upper containing groove is provided on the top side wall of the working box, an upper ball bearing is provided inside the upper containing groove, the top of the first transmission shaft passes through the rotating port, the second connecting port, the right ball bearing and the lower half area of ​​the upper ball bearing, the first transmission shaft is key-connected with the right ball bearing and the upper ball bearing, the top of the first transmission shaft is separated from the top of the working box, and the first gear and the second gear are meshingly connected;The first transmission shaft is provided with an upper gear and a lower gear, the upper gear is located above the lower gear, the inner side walls of the upper gear and the lower gear are connected to the outer side wall of the first transmission shaft, and a group of placement grooves are respectively provided in the left and right half areas of the top side wall of the cylinder, and a group of lower ball bearings are respectively provided in a group of placement grooves, and a group of placement ports are provided on the top side wall of the cylinder, and a group of placement ports are connected to the cleaning chamber. The left and right connecting rods are connected, a group of placement ports are connected with a group of placement grooves respectively, the bottoms of the left connecting rod and the right connecting rod respectively pass through a group of lower ball bearings and a group of placement ports to enter the cylinder, the left connecting rod and the right connecting rod are respectively connected with a group of lower ball bearing keys, a group of installation cavities are respectively arranged inside the left installation box and the right installation box, the bottom side walls of the left installation box and the right installation box are respectively connected with the left half area and the right half area of ​​the top side wall of the cylinder, the top side walls of the left installation box and the right installation box are respectively provided with a group of transition grooves, and a group of upper ball bearings are respectively arranged in the group of transition grooves, The top side walls of the left installation box and the right installation box are respectively provided with a group of first transition ports, and the group of first transition ports are respectively communicated with a group of installation cavities, and the group of first transition ports are respectively communicated with a group of transition grooves. The bottom side walls of the left installation box and the right installation box are respectively provided with a group of second transition ports. The upper half areas of the left connecting rod and the right connecting rod respectively pass through a group of first transition ports and a group of upper ball bearings. The left connecting rod and the right connecting rod are respectively connected with a group of upper ball bearing keys. The lower gear and the left gear are provided with a lower chain, and the lower chain is meshed and connected with the lower gear and the left gear. An upper chain is provided on the upper gear and the right gear, and the upper chain is meshed and connected with the upper gear and the right gear. The left side wall and the right side wall of the group of second stirring blades are respectively connected to the lower half area of ​​the right side wall of the right connecting rod and the lower half area of ​​the left side wall of the left connecting rod. The inner side wall of the left gear is connected to the outer side wall of the left connecting rod, and the inner side wall of the right gear is connected to the outer side wall of the right connecting rod. The right side wall of the left installation box and the left side wall of the right installation box are respectively provided with a group of chain inlets and outlets, and a group of chain inlets and outlets are respectively communicated with a group of installation cavities, and the upper chain and the lower chain pass through a group of chain inlets and outlets respectively;It also includes a hook, a support block, a fixing pin, a lower pressure rod, a force ring, a set of fixing plates, a central shaft, a lower connecting rod and a set of positioning baffles, wherein the top side wall of the lower connecting rod is connected to the bottom end of the first stop cover, a first rotation hole is arranged in the central area of ​​the lower connecting rod, the right side walls of the set of fixing plates are connected to the left side wall of the cylinder, a set of second rotation holes are arranged in the central area of ​​the set of fixing plates, the central shaft passes through the first rotation hole and the set of second rotation holes, the front side wall and the rear side wall of the set of positioning baffles are connected to the rear side wall and the front side wall of the central shaft respectively, the hook and the right side wall of the support block are connected to the left side wall of the cylinder, the left half area of ​​the hook passes through the top of the force ring, the lower half area and the upper half area of ​​the lower pressure rod are respectively provided with the first connection hole and the second connection hole, the central area of ​​the support block is provided with a third connection hole, the fixing pin passes through the third connection hole and the second connection hole, and the bottom of the force ring passes through the first connection hole. ;

[0005] The wafer cleaning and recycling machine of the present invention also includes an extension rod, an inner limit baffle and a group of outer limit baffles. An extension cavity is arranged inside the lower pressure rod, and an extension opening is arranged on the bottom side wall of the lower pressure rod. The extension opening is connected with the extension cavity. The upper half area of ​​the extension rod is inserted into the extension cavity, and the top side wall of the extension rod is connected with the central area of ​​the bottom side wall of the inner limit baffle. The group of outer limit baffles are respectively installed on the bottom of the inner side wall of the lower pressure rod.

[0006] The wafer cleaning and recycling machine of the present invention further comprises a group of scrapers, and the group of scrapers are all installed at the bottom of the outer side wall of the first transmission shaft.

[0007] The wafer cleaning and recycling machine of the present invention also includes a group of chain protection trays, and the left and right walls of the group of chain protection trays are respectively connected to the lower half area of ​​the right wall of the left installation box and the upper half area of ​​the left wall of the right installation box.

[0008] The wafer cleaning and recycling machine of the present invention has a refueling port disposed on the left half of the top side wall of the working box.

[0009] The wafer cleaning and recycling machine of the present invention further comprises a group of anti-slip plates, wherein the front side walls and the rear side walls of the group of anti-slip plates are respectively connected to the rear side walls and the front side walls of the fixing pins.

[0010] The wafer cleaning and recycling machine of the present invention also includes a group of protective covers, and a group of protective holes are longitudinally arranged in the central area of ​​the group of protective covers, and the left connecting rod and the right connecting rod pass through the group of protective holes respectively, and a group of bottom side walls of the protective covers are in contact with the top side walls of the left installation box and the right installation box respectively.

[0011] The wafer cleaning and recycling machine of the present invention further comprises a soft pad, which is adhesively mounted on the lower half of the left side wall of the cylinder.

[0012] Compared with the prior art, the beneficial effects of the present invention are as follows: the motor needs to be fixed externally, the outer diameter of the first gear is smaller than the outer diameter of the second gear, the top end of the second transmission shaft is connected to the output end of the motor, the bottom end of the second transmission shaft is connected to the inner side wall of the left ball bearing, and the bottom end of the second transmission shaft does not contact the inner bottom side wall of the working box, the second transmission shaft is keyed to the left ball bearing, so that the second transmission shaft rotates under the drive of the motor, and then drives the first gear to rotate, the second gear is installed in the upper half area of ​​the first transmission shaft, and the second gear is connected to the second transmission shaft, the top of the first transmission shaft is connected to the upper ball bearing, and the upper half area of ​​the first transmission shaft is keyed to the right ball bearing, the upper ball bearing and the right ball bearing reduce the friction force when the first transmission shaft rotates, the user powers on the motor, and the electrical energy is converted into the kinetic energy of the motor, thereby driving the second transmission shaft to rotate, and then driving the first gear and the second gear to rotate, because the outer diameter of the second gear is larger than the outer diameter of the first gear, the number of teeth of the second gear is more than that of the first gear, and the rotation speed of the second gear is higher than that of the first gear The upper and lower gears are connected to the first transmission shaft, so that the rotation of the first transmission shaft will drive the upper and lower gears to rotate, and the upper gear drives the right gear to rotate through the upper chain, and the lower gear drives the left gear to rotate through the lower chain, and the left mounting box and the right mounting box fix a group of upper ball bearings and a group of lower ball bearings respectively, and the left connecting rod and the right connecting rod are supported by a group of upper ball bearings and a group of lower ball bearings, and the left connecting rod and the right connecting rod can rotate with their own center lines as axes, and a group of upper ball bearings and a group of lower ball bearings reduce the friction force of the rotation of the left connecting rod and the right connecting rod, and driven by the left gear and the right gear, the left connecting rod and the right connecting rod rotate with their own center lines as axes, thereby driving a group of second stirring blades to rotate, and a group of second stirring blades are staggered with a group of first stirring blades, respectively, to improve stirring efficiency, shorten stirring time, and improve work efficiency;The central rotating shaft passes through a group of fixed plates and a lower connecting rod, and a group of positioning baffles are respectively installed at the front end and the rear end of the central rotating shaft to prevent the central rotating shaft from disengaging, so that the lower connecting rod can rotate around the central rotating shaft as the central axis, and the lower connecting rod is connected to the first blocking cover, so that the first blocking cover can rotate around the central rotating shaft as the central axis. When the first blocking cover needs to be closed, the user contacts the right side wall of the blocking cover with the left side wall of the cylinder body, and the user rotates the lower pressure rod upward. Under the support of the support block and the fixed pin, the lower pressure rod rotates around the fixed pin as the central axis, thereby driving the force ring to move upward until the hook passes through. After passing the upper half of the stress ring, the user stops rotating upward, and the user rotates the lower pressure rod downward, and makes the hook pass through the upper half of the stress ring until the lower pressure rod contacts the first stop cover, and the first stop cover is in close contact with the cylinder. When the first stop cover needs to be opened, the user rotates the lower pressure rod upward, and under the action of the support block and the fixed pin, the lower pressure rod rotates with the fixed pin as the central axis until the hook is separated from the upper half of the stress ring, the first stop cover is opened, and the user opens the second stop cover. The cleaned material is discharged through the discharge port, and the process of adding recycled wafers and cleaning liquid is relatively simple, reducing the limitations of use. ; BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the structure of the present invention;

[0014] Figure 2 yes Figure 1 A partial enlarged view of the middle A part;

[0015] Figure 3 yes Figure 1 A partial enlarged view of the middle B part;

[0016] Figure 4 It is a schematic left view of a set of fixed plates, a central shaft, a lower connecting rod and a set of positioning baffles;

[0017] Figure 5 is a schematic top view of the connection between the first gear and the second gear;

[0018] Markings in the attached drawings: 1, cylinder; 2, first stirring blade; 3, first stop cover; 4, second stop cover; 5, first transmission shaft; 6, motor; 7, working box; 8, first gear; 9, second gear; 10, second transmission shaft; 11, left ball bearing; 12, right ball bearing; 13, upper ball bearing; 14, upper gear; 15, lower gear; 16, upper chain; 17, lower chain; 18, left gear; 19, right gear; 20, left installation box; 21, right installation box; 22, left Connecting rod; 23, right connecting rod; 24, second stirring blade; 25, lower ball bearing; 26, upper ball bearing; 27, hook; 28, support block; 29, fixing pin; 30, lower pressure rod; 31, force ring; 32, fixing plate; 33, center shaft; 34, lower connecting rod; 35, positioning baffle; 36, extension rod; 37, inner limit baffle; 38, outer limit baffle; 39, scraper; 40, chain protection tray; 41, anti-slip plate; 42, protective cover; 43, cushion. DETAILED DESCRIPTION

[0019] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0020] like Figures 1 to 5As shown, the wafer cleaning and recycling machine of the present invention comprises a cylinder 1, a group of first stirring blades 2, a first blocking cover 3, a second blocking cover 4 and a first transmission shaft 5, a cleaning chamber is arranged inside the cylinder, a rotating port, an entrance port and a discharge port are arranged in the upper half area of ​​the left side wall and the lower half area of ​​the right side wall of the cylinder respectively, a first blocking cover and a second blocking cover are arranged at the entrance port and the discharge port respectively, the second blocking cover is screwed to the cylinder, the rotating port, the entrance port and the discharge port are all connected with the cleaning chamber, a motor 6 is arranged above the cylinder, the first transmission shaft passes through the rotating port to enter the cylinder, and a group of first stirring blades are arranged in the lower half area of ​​the first transmission shaft; it also comprises a working box 7, a first gear 8, a second gear 9 and a second transmission shaft 10, a working chamber is arranged inside the working box, a first connecting port and a second connecting port are arranged in the left half area of ​​the top side wall and the central area of ​​the lower side wall of the working box respectively, the first connecting port and the second connecting port are both connected with the working chamber, the motor is located above the working box, and a second transmission is arranged at the output end of the motor. Axis, a left containing groove and a right containing groove are respectively arranged in the left half area and the central area of ​​the bottom side wall of the working box, and a left ball bearing 11 and a right ball bearing 12 are respectively arranged inside the left containing groove and the right containing groove, the first gear and the second gear are both located inside the working box, the bottom of the second transmission shaft passes through the first connecting port, the first gear and the upper half area of ​​the left ball bearing, the inner side wall of the first gear is connected with the outer side wall of the second transmission shaft, the bottom of the second transmission shaft is inserted into the left ball bearing, the second transmission shaft is key-connected with the left ball bearing, and the bottom of the second transmission shaft is separated from the working box, the second connecting port is connected with the right containing groove, an upper containing groove is arranged on the top side wall of the working box, an upper ball bearing 13 is arranged inside the upper containing groove, the top of the first transmission shaft passes through the rotating port, the second connecting port, the right ball bearing and the lower half area of ​​the upper ball bearing, the first transmission shaft is key-connected with the right ball bearing and the upper ball bearing, and the top of the first transmission shaft is separated from the top of the working box, and the first gear and the second gear are meshed and connected;The first transmission shaft further comprises an upper gear 14, a lower gear 15, an upper chain 16, a lower chain 17, a left gear 18, a right gear 19, a left installation box 20, a right installation box 21, a left connecting rod 22, a right connecting rod 23 and a group of second stirring blades 24. The upper half of the first transmission shaft is provided with an upper gear and a lower gear, and the upper gear is located above the lower gear. The inner side walls of the upper gear and the lower gear are connected to the outer side wall of the first transmission shaft. A group of placement grooves are respectively provided in the left and right half areas of the top side wall of the cylinder. A group of lower ball bearings 25 are respectively provided in a group of placement grooves. The top side wall of the cylinder A group of placement ports are provided, and each group of placement ports is connected to the cleaning chamber, and each group of placement ports is connected to a group of placement grooves respectively. The bottoms of the left connecting rod and the right connecting rod respectively pass through a group of lower ball bearings and a group of placement ports to enter the interior of the cylinder, and the left connecting rod and the right connecting rod are respectively connected to a group of lower ball bearing keys. A group of installation cavities are respectively provided inside the left installation box and the right installation box. The bottom side walls of the left installation box and the right installation box are respectively connected to the left half area and the right half area of ​​the top side wall of the cylinder, and the top side walls of the left installation box and the right installation box are respectively provided with a group of transition grooves. A group of transition grooves are divided into A group of upper ball bearings 26 are respectively provided, a group of first transition ports are respectively provided on the top side walls of the left installation box and the right installation box, a group of first transition ports are respectively communicated with a group of installation cavities, and a group of first transition ports are respectively communicated with a group of transition grooves, a group of second transition ports are respectively provided on the bottom side walls of the left installation box and the right installation box, the upper half areas of the left connecting rod and the right connecting rod respectively pass through a group of first transition ports and a group of upper ball bearings, and the left connecting rod and the right connecting rod are respectively connected with a group of upper ball bearing keys, a lower chain is provided on the lower gear and the left gear, and the lower chain is connected to the lower gear The left gear is meshed with the right gear, an upper chain is arranged on the upper gear and the right gear, and the upper chain is meshed with the upper gear and the right gear, a group of left and right walls of the second stirring blade are respectively connected to the lower half area of ​​the right wall of the right connecting rod and the lower half area of ​​the left wall of the left connecting rod, the inner wall of the left gear is connected to the outer wall of the left connecting rod, the inner wall of the right gear is connected to the outer wall of the right connecting rod, a group of chain inlets and outlets are respectively arranged on the right wall of the left installation box and the left wall of the right installation box, a group of chain inlets and outlets are respectively communicated with a group of installation cavities, and the upper chain and the lower chain pass through a group of chain inlets and outlets respectively;It also includes a hook 27, a support block 28, a fixing pin 29, a lower pressure rod 30, a force ring 31, a group of fixing plates 32, a central shaft 33, a lower connecting rod 34 and a group of positioning baffles 35. The top side wall of the lower connecting rod is connected to the bottom end of the first cover, a first rotation hole is arranged in the central area of ​​the lower connecting rod, a group of right side walls of the fixing plates are connected to the left side wall of the cylinder, a group of second rotation holes are arranged in the central area of ​​a group of fixing plates, the central shaft passes through the first rotation hole and the group of second rotation holes, a group of front side walls and rear side walls of the positioning baffles are connected to the rear side wall and the front side wall of the central shaft respectively, the right side walls of the hook and the support block are connected to the left side wall of the cylinder, the left half area of ​​the hook passes through the top of the force ring, and the lower half area and the upper half area of ​​the lower pressure rod are arranged. A first connecting hole and a second connecting hole are respectively provided, a third connecting hole is provided in the central area of ​​the support block, a fixing pin passes through the third connecting hole and the second connecting hole, and a bottom of the force ring passes through the first connecting hole; the motor needs to be fixed from the outside, an outer diameter of the first gear is smaller than an outer diameter of the second gear, the top end of the second transmission shaft is connected to the output end of the motor, the bottom end of the second transmission shaft is connected to the inner side wall of the left ball bearing, and the bottom end of the second transmission shaft does not contact the inner bottom side wall of the working box, the second transmission shaft is keyed to the left ball bearing, so that the second transmission shaft rotates under the drive of the motor, thereby driving the first gear to rotate, the second gear is installed in the upper half of the first transmission shaft, and the second gear is connected to the second transmission shaft, the top of the first transmission shaft is connected to the upper ball bearing The upper and lower gears are connected to the first transmission shaft, and the upper half area of ​​the first transmission shaft is key-connected to the right ball bearing. The upper and right ball bearings reduce the friction when the first transmission shaft rotates. The user energizes the motor, and the electrical energy is converted into kinetic energy of the motor, thereby driving the second transmission shaft to rotate, and then driving the first gear and the second gear to rotate. Since the outer diameter of the second gear is larger than that of the first gear, the number of teeth of the second gear is more than that of the first gear, and the rotation speed of the second gear is slower than that of the first gear, and then output by the second gear, the speed is reduced, the output torque is increased, the equipment failure rate is reduced, the load is small, and the reliability of use is improved; the upper gear and the lower gear are both connected to the first transmission shaft, so that the rotation of the first transmission shaft will drive the upper and lower gears to rotate, and the upper gear is connected to the upper chain The gear drives the right gear to rotate, and the lower gear drives the left gear to rotate through the lower chain. The left installation box and the right installation box fix a group of upper ball bearings and a group of lower ball bearings respectively. The left connecting rod and the right connecting rod are supported by a group of upper ball bearings and a group of lower ball bearings. The left connecting rod and the right connecting rod can rotate with their own center lines as axes. A group of upper ball bearings and a group of lower ball bearings reduce the friction force of the rotation of the left connecting rod and the right connecting rod. Driven by the left gear and the right gear, the left connecting rod and the right connecting rod rotate with their own center lines as axes, thereby driving a group of second stirring blades to rotate. A group of second stirring blades are respectively staggered with a group of first stirring blades to improve stirring efficiency, shorten stirring time, and improve work efficiency.The central rotating shaft passes through a group of fixed plates and a lower connecting rod, and a group of positioning baffles are respectively installed at the front end and the rear end of the central rotating shaft to prevent the central rotating shaft from disengaging, so that the lower connecting rod can rotate around the central rotating shaft as the central axis, and the lower connecting rod is connected to the first blocking cover, so that the first blocking cover can rotate around the central rotating shaft as the central axis. When the first blocking cover needs to be closed, the user contacts the right side wall of the blocking cover with the left side wall of the cylinder body, and the user rotates the lower pressure rod upward. Under the support of the support block and the fixed pin, the lower pressure rod rotates around the fixed pin as the central axis, thereby driving the force ring to move upward until the hook passes through. After passing the upper half of the stress ring, the user stops rotating upward, and the user rotates the lower pressure rod downward, and makes the hook pass through the upper half of the stress ring until the lower pressure rod contacts the first stop cover, and the first stop cover is in close contact with the cylinder. When the first stop cover needs to be opened, the user rotates the lower pressure rod upward, and under the action of the support block and the fixed pin, the lower pressure rod rotates with the fixed pin as the central axis until the hook is separated from the upper half of the stress ring, the first stop cover is opened, and the user opens the second stop cover. The cleaned material is discharged through the discharge port, and the process of adding recycled wafers and cleaning liquid is relatively simple, reducing the limitations of use. ;

[0021] The wafer cleaning and recycling machine of the present invention also includes an extension rod 36, an inner limit baffle 37 and a group of outer limit baffles 38. An extension cavity is arranged inside the lower pressure rod, and an extension opening is arranged on the bottom side wall of the lower pressure rod. The extension opening is connected with the extension cavity. The upper half of the extension rod is inserted into the extension cavity, and the top side wall of the extension rod is connected with the central area of ​​the bottom side wall of the inner limit baffle. A group of outer limit baffles are respectively installed on the bottom of the inner side wall of the lower pressure rod; the extension rod indirectly extends the length of the lower pressure rod, and the user can more conveniently rotate the lower pressure rod. The inner limit baffle and a group of outer limit baffles work together to prevent the extension rod from detaching from the lower pressure rod.

[0022] The wafer cleaning and recycling machine of the present invention also includes a group of scrapers 39, which are installed at the bottom of the outer side wall of the first transmission shaft; when the first transmission shaft rotates, it drives the group of scrapers to move, stirring the material at the bottom of the cylinder to improve the cleaning effect.

[0023] The wafer cleaning and recycling machine of the present invention also includes a group of chain protection trays 40, and the left and right walls of the group of chain protection trays are respectively connected to the lower half of the right wall of the left installation box and the upper half of the left wall of the right installation box; a group of chain protection trays are respectively installed under the upper chain and the lower chain to prevent the upper chain and the lower chain from detaching from the upper gear, the lower gear, the left gear and the right gear, thereby improving the stability of use.

[0024] The wafer cleaning and recycling machine of the present invention has a refueling port disposed in the left half area of ​​the top side wall of the working box; the user can regularly add lubricating oil to the first gear and the second gear through the refueling port to improve the stability of use.

[0025] The wafer cleaning and recycling machine of the present invention also includes a group of anti-slip plates 41, and the front side walls and rear side walls of the group of anti-slip plates are respectively connected to the rear side walls and front side walls of the fixing pins; the group of anti-slip plates prevents the fixing pins from detaching from the group of fixing plates, thereby improving the reliability of use.

[0026] The wafer cleaning and recycling machine of the present invention also includes a group of protective covers 42, a group of protective covers are respectively longitudinally arranged with a group of protective holes in the central area, the left connecting rod and the right connecting rod respectively pass through the group of protective holes, and a group of protective cover bottom side walls are respectively in contact with the left installation box and the right installation box top side walls; a group of protective covers prevent external impurities from entering a group of upper ball bearings, thereby improving the stability of use.

[0027] The wafer cleaning and recycling machine of the present invention further comprises a soft pad 43, which is adhesively mounted on the lower half of the left side wall of the cylinder; the soft pad reduces the collision between the blocking cover and the cylinder.

[0028] The wafer cleaning and recycling machine of the present invention has a motor that needs to be fixed externally, an outer diameter of the first gear is smaller than an outer diameter of the second gear, a top end of the second transmission shaft is connected to an output end of the motor, a bottom end of the second transmission shaft is connected to an inner side wall of a left ball bearing, and a bottom end of the second transmission shaft does not contact an inner bottom side wall of a working box, and the second transmission shaft is key-connected to the left ball bearing, so that the second transmission shaft rotates driven by the motor, thereby driving the first gear to rotate, the second gear is installed in an upper half area of ​​the first transmission shaft, and the second gear is connected to the second transmission shaft, a top of the first transmission shaft is connected to an upper ball bearing, and an upper half area of ​​the first transmission shaft is key-connected to a right ball bearing, the upper ball bearing and the right ball bearing reduce friction when the first transmission shaft rotates, and a user powers on the motor to convert electrical energy into kinetic energy of the motor. , thereby driving the second transmission shaft to rotate, and then driving the first gear and the second gear to rotate. Since the outer diameter of the second gear is larger than that of the first gear, the number of teeth of the second gear is more than that of the first gear, the speed of the second gear is slower than that of the first gear, and then output by the second gear, the speed is reduced, and the output torque is increased. The user can regularly add lubricating oil to the first gear and the second gear through the oil filling port, thereby reducing the equipment failure rate, reducing the load, and improving the reliability of use. The upper gear and the lower gear are both connected to the first transmission shaft, so that the rotation of the first transmission shaft will drive the upper gear and the lower gear to rotate. The upper gear drives the right gear to rotate through the upper chain, and the lower gear drives the left gear to rotate through the lower chain. A set of chain protection trays are respectively installed under the upper chain and the lower chain to prevent the upper chain and the lower chain from detaching from the upper chain. Gears, lower gears, left gears and right gears, a left mounting box and a right mounting box fix a group of upper ball bearings and a group of lower ball bearings respectively, and the left connecting rod and the right connecting rod are supported by a group of upper ball bearings and a group of lower ball bearings, and the left connecting rod and the right connecting rod can rotate with their own center lines as axes, a group of upper ball bearings and a group of lower ball bearings reduce the friction of the rotation of the left connecting rod and the right connecting rod, and a group of protective covers prevent external impurities from entering a group of upper ball bearings. Driven by the left gear and the right gear, the left connecting rod and the right connecting rod rotate with their own center lines as axes, thereby driving a group of second stirring blades to rotate, and a group of second stirring blades are respectively installed with a group of first stirring blades in a staggered manner. When the first transmission shaft rotates, it drives a group of scrapers to move, so as to The stirring is performed to improve the stirring efficiency, shorten the stirring time, and improve the working efficiency. The central rotating shaft passes through a group of fixed plates and a lower connecting rod, and a group of positioning baffles are respectively installed at the front end and the rear end of the central rotating shaft to prevent the central rotating shaft from being separated, so that the lower connecting rod can rotate with the central rotating shaft as the central axis. The lower connecting rod is connected to the first baffle cover, so that the first baffle cover can rotate with the central rotating shaft as the central axis. When the first baffle cover needs to be closed, the user contacts the right side wall of the baffle cover with the left side wall of the cylinder body, and the user rotates the lower pressure rod upward, and the extension rod indirectly extends the length of the lower pressure rod. The user can rotate the lower pressure rod more conveniently. The inner limit baffle and a group of outer limit baffles work together to prevent the extension rod from being separated from the lower pressure rod. Under the support of the support block and the fixed pin, the lower pressure rod rotates with the fixed pin as the central axis.A set of anti-slip plates prevents the fixing pin from detaching from a set of fixing plates, thereby driving the force ring to move upward until the hook passes through the upper half of the force ring and stops rotating upward. The user rotates the lower pressure rod downward and makes the hook pass through the upper half of the force ring until the lower pressure rod contacts the first stop cover, and the first stop cover is in close contact with the cylinder. When the first stop cover needs to be opened, the user rotates the lower pressure rod upward. Under the action of the support block and the fixing pin, the lower pressure rod rotates with the fixing pin as the central axis until the hook is detached from the upper half of the force ring. The first stop cover is opened, and the soft cushion reduces the collision between the stop cover and the cylinder. The user opens the second stop cover, and the cleaned material is discharged through the discharge port. The process of adding recycled wafers and cleaning liquid is relatively simple, reducing the limitations of use.

[0029] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A wafer cleaning and recycling machine, comprising a barrel (1), a group of first stirring blades (2), a first blocking cover (3), a second blocking cover (4) and a first transmission shaft (5); a cleaning chamber is arranged inside the barrel (1); a rotating port, an inlet port and a discharge port are arranged at the upper half area of ​​the left side wall and the lower half area of ​​the right side wall of the barrel (1), respectively; a first blocking cover (3) and a second blocking cover (4) are arranged at the inlet port and the discharge port, respectively; the second blocking cover (4) is screwed to the barrel (1); the rotating port, the inlet port and the discharge port are all connected to the cleaning chamber; a motor (6) is arranged above the barrel (1); the first transmission shaft (5) passes through the rotating port and enters the barrel (1); a group of first stirring blades (2) are arranged at the lower half area of ​​the first transmission shaft (5); characterized in that The invention also comprises a working box (7), a first gear (8), a second gear (9) and a second transmission shaft (10); a working chamber is arranged inside the working box (7); a first connection port and a second connection port are arranged in the left half area of ​​the top side wall and the central area of ​​the lower side wall of the working box (7); the first connection port and the second connection port are both connected to the working chamber; the motor (6) is located above the working box (7); a second transmission shaft (10) is arranged at the output end of the motor (6); a left containing groove and a right containing groove are arranged in the left half area and the central area of ​​the bottom side wall of the working box (7); a left ball bearing (11) and a right ball bearing (12) are arranged in the left containing groove and the right containing groove respectively; the first gear (8) and the second gear (9) are both located in the working chamber; Inside the working box (7), the bottom of the second transmission shaft (10) passes through the first connecting port, the first gear (8) and the upper half of the left ball bearing (11), the inner side wall of the first gear (8) is connected to the outer side wall of the second transmission shaft (10), the bottom of the second transmission shaft (10) is inserted into the left ball bearing (11), the second transmission shaft (10) and the left ball bearing (11) are key-connected, the bottom of the second transmission shaft (10) is separated from the working box (7), the second connecting port is communicated with the right containing groove, the inner top side wall of the working box (7) is provided with an upper containing groove, the upper containing groove is provided with an upper ball bearing (26) (13), the top of the first transmission shaft (5) passes through the rotating port, the second connecting port, the right ball bearing (12) and the upper ball bearing (26) (13) lower half area, the first transmission shaft (5) is key-connected with the right ball bearing (12) and the upper ball bearing (26) (13), the top of the first transmission shaft (5) is separated from the top of the working box (7), and the first gear (8) and the second gear (9) are meshingly connected; it also includes an upper gear (14), a lower gear (15), an upper chain (16), a lower chain (17), a left gear (18), a right gear (19), a left installation box (20), a right installation box (21), a left connecting rod (22), a right connecting rod (23) and a set of second stirring blades (24), the upper half area of ​​the first transmission shaft (5) is provided with an upper gear (14) and a lower gear (15), the upper gear (14) is located above the lower gear (15), and the upper gear (1 4) and the inner side wall of the lower gear (15) are connected to the outer side wall of the first transmission shaft (5); the left half area and the right half area of ​​the top side wall of the cylinder (1) are respectively provided with a group of placement grooves, and a group of lower ball bearings (25) are respectively provided in a group of placement grooves; the top side wall of the cylinder (1) is provided with a group of placement openings, and a group of placement openings are all connected to the cleaning chamber, and a group of placement openings are respectively connected to a group of placement grooves; the bottoms of the left connecting rod (22) and the right connecting rod (23) respectively pass through a group of lower ball bearings (25) and a group of placement openings to enter the cylinder (1); the left connecting rod (22) and the right connecting rod (23) are respectively connected to a group of lower ball bearings (25) by a key; a group of installation cavities are respectively provided inside the left installation box (20) and the right installation box (21);The bottom side walls of the left installation box (20) and the right installation box (21) are respectively connected to the left half area and the right half area of ​​the top side wall of the cylinder (1); the top side walls of the left installation box (20) and the right installation box (21) are respectively provided with a group of transition grooves, and a group of upper ball bearings (26) (13) are respectively provided in the group of transition grooves; the top side walls of the left installation box (20) and the right installation box (21) are respectively provided with a group of first transition ports, and the group of first transition ports are respectively communicated with a group of installation cavities, and the group of first transition ports are respectively communicated with a group of transition grooves; the bottom side walls of the left installation box (20) and the right installation box (21) are respectively provided with a group of second transition ports; the upper half areas of the left connecting rod (22) and the right connecting rod (23) respectively pass through the group of first transition ports and the group of The upper ball bearing (26) (13), the left connecting rod (22) and the right connecting rod (23) are respectively connected to a group of upper ball bearings (26) (13) by a key; the lower gear (15) and the left gear (18) are provided with a lower chain (17), the lower chain (17) is meshedly connected with the lower gear (15) and the left gear (18); the upper gear (14) and the right gear (19) are provided with an upper chain (16), the upper chain (16) is meshedly connected with the upper gear (14) and the right gear (19); the left side wall and the right side wall of the group of second stirring blades (24) are respectively connected to the lower half area of ​​the right side wall of the right connecting rod (23) and the lower half area of ​​the left side wall of the left connecting rod (22); the inner side wall of the left gear (18) is connected to the outer side wall of the left connecting rod (22) The inner side wall of the right gear (19) is connected to the outer side wall of the right connecting rod (23); the right side wall of the left installation box (20) and the left side wall of the right installation box (21) are respectively provided with a group of chain inlets and outlets, and the group of chain inlets and outlets are respectively communicated with a group of installation cavities, and the upper chain (16) and the lower chain (17) respectively pass through the group of chain inlets and outlets; it also includes a hook (27), a support block (28), a fixing pin (29), a lower pressure rod (30), a force ring (31), a group of fixing plates (32), a central shaft (33), a lower connecting rod (34) and a group of positioning baffles (35); the top side wall of the lower connecting rod (34) is connected to the bottom end of the first baffle cover (3); the central area of ​​the lower connecting rod (34) is provided with a first rotating hole; the group of fixing plates The right side walls of the fixing plates (32) are connected to the left side wall of the cylinder (1); a group of second rotation holes are respectively provided in the central area of ​​the fixing plates (32); the central shaft (33) passes through the first rotation hole and the group of second rotation holes; the front side wall and the rear side wall of the positioning baffles (35) are respectively connected to the rear side wall and the front side wall of the central shaft (33); the right side walls of the hook (27) and the support block (28) are both connected to the left side wall of the cylinder (1); the left half area of ​​the hook (27) passes through the top of the force ring (31); the lower half area and the upper half area of ​​the pressing rod (30) are respectively provided with the first connection hole and the second connection hole; the central area of ​​the support block (28) is provided with a third connection hole; the fixing pin (29) passes through the third connection hole and the second connection hole;The bottom of the stress ring (31) passes through the first connection hole. It also includes an extension rod (36), an inner limit baffle (37) and a group of outer limit baffles (38); the lower pressure rod (30) is provided with an extension cavity inside; the lower pressure rod (30) is provided with an extension opening on the bottom side wall; the extension opening is connected to the extension cavity; the upper half of the extension rod (36) is inserted into the extension cavity; the top side wall of the extension rod (36) is connected to the central area of ​​the bottom side wall of the inner limit baffle (37); the group of outer limit baffles (38) are respectively installed at the bottom of the inner side wall of the lower pressure rod (30); It also includes a group of scrapers (39), each of which is mounted on the bottom of the outer side wall of the first transmission shaft. It also includes a group of chain protection trays (40), the left side wall and the right side wall of the group of chain protection trays (40) are respectively connected to the lower half area of ​​the right side wall of the left installation box (20) and the upper half area of ​​the left side wall of the right installation box (21), It also comprises a group of anti-slip plates (41), the front side walls and rear side walls of the group of anti-slip plates (41) being connected to the rear side walls and front side walls of the fixing pins (29) respectively.

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