Device and method for coating conductive film in tube with large aspect ratio

Abstract

The present invention discloses a device and method for coating a conductive film inside a tube with a large aspect ratio. The round tube and the vapor-deposited wire are cleaned and dried, and the controller controls the mechanical vacuum pump to perform vacuum evacuation on the device. In combination with the vacuum box and the evaporation high-voltage power supply, the device for coating a conductive film inside a tube with a large aspect ratio has better adhesion and firmness when preparing a conductive film, greatly reduces the preparation cost, is simple to operate, and improves the preparation effect and efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of round tube coating devices, and in particular to a device and method for coating a conductive film in a tube with a large aspect ratio. Background Art

[0002] The hollow round tube with a relatively large length-to-diameter ratio has a conductive film structure inside, which is widely used in scientific experiments and actual production life. For example, in the standard precision pressure gauge of scientific experiments, it is necessary to evaporate a conductive film on the inner surface of the round tube to eliminate the height error caused by the electrostatic effect of mercury moving in the round tube; and in production life, the traditional water dispenser heating system with metal tube casting as the core is gradually replaced by a new heating system with a conductive film on the inner wall of the round tube as the core to prevent water from scaling.

[0003] Therefore, the technology of coating conductive film inside hollow circular tubes with a relatively large aspect ratio has received widespread attention. Currently, the commonly used coating methods include chemical immersion coating, chemical vapor deposition coating, pulsed laser deposition coating, etc. However, these methods cannot uniformly coat a layer of conductive film inside a circular tube with a large aspect ratio, because the movement of metal molecules in a vacuum environment is linear motion, and it is impossible for it to penetrate into a circular tube with a relatively large aspect ratio. In addition, the large vacuum equipment required for these conductive film coating methods is high in cost, low in efficiency, and has limitations such as complex installation and debugging, and poor repeatability. Therefore, there is an urgent need for a set of efficient and reliable conductive film coating devices to improve the coating effect. Summary of the invention

[0004] The object of the present invention is to provide a device and method for improving the coating effect and coating a conductive film in a tube with a large aspect ratio.

[0005] To achieve the above-mentioned purpose, the present invention adopts a device for plating a conductive film in a tube with a large aspect ratio, comprising a mechanical vacuum pump, a vacuum conduit, a vacuum box, a vacuum box lifting platform, a round tube, a vapor deposition wire, a lower positioning chuck, a guide platform, a controller, a rack, an evaporation high-voltage power supply and two wire sealing adapters, one end of the vacuum conduit is detachably connected to the mechanical vacuum pump and is located on the side of the mechanical vacuum pump, the other end of the vacuum conduit is detachably connected to the vacuum box and is located on the side of the vacuum box, the vacuum box lifting platform is placed below the vacuum box, one end of the round tube is detachably connected to the vacuum box and is located above the vacuum box, and the other end of the round tube is detachably connected to the vacuum box and is located above the vacuum box. The end is detachably connected to the guide platform and is located below the guide platform, both ends of the round tube have external thread structures, the evaporation wire is located in the round tube, the lower positioning chuck is detachably connected to the evaporation wire and is located at the bottom of the evaporation wire, the controller is electrically connected to the mechanical vacuum pump and the evaporation high-voltage power supply, respectively, and is located below the guide platform, the frame is placed below the controller, the frame is a vertical square structure, the evaporation high-voltage power supply is located on one side of the frame, the two wire sealing adapters are detachably connected to the vacuum box and the guide platform, respectively, and are located above the vacuum box and above the guide platform, respectively.

[0006] Wherein, the vacuum box includes a vacuum box body, a vacuum box sealing cover, a pressure gauge, a temperature gauge, and a vacuum box adapter. The vacuum box body is placed on the upper surface of the vacuum box lifting platform, and the vacuum box sealing cover is located directly above the vacuum box body. The vacuum box sealing cover has a sealing ring groove and a threaded opening, and the threaded opening of the vacuum box sealing cover is threadedly connected to the bottom port of the round tube. The pressure gauge is fixedly connected to the vacuum box body and is located on the upper surface of the vacuum box body. The temperature gauge is fixedly connected to the vacuum box body and is located on the upper surface of the vacuum box body and is symmetrically arranged with the pressure gauge. The vacuum box adapter is detachably connected to the vacuum box body and is located on the side of the vacuum box body.

[0007] Wherein, the vacuum box transfer interface comprises a vacuum box transfer interface body and a vacuum box transfer interface supporting piece, one end of the vacuum box transfer interface body is threadedly connected to one end of the vacuum duct, one end of the vacuum box transfer interface body has a tapered port, the other end of the vacuum box transfer interface body is threadedly connected to the vacuum box and is located on the side of the vacuum box, the vacuum box transfer interface supporting piece is fixedly connected to the interface body and is sleeved on the vacuum box transfer interface body, and the vacuum box transfer interface supporting piece has a transfer interface sealing groove.

[0008] Among them, the lower positioning clamp includes a four-claw gripper and a tension screw, the four-claw gripper is fixedly connected to the evaporation wire and is located at the bottom of the evaporation wire, and the tension screw is fixedly connected to the four-claw gripper and is located below the four-claw gripper.

[0009] Wherein, the frame includes a frame top platform, four frame rods, a guide platform bottom platform and a frame bottom platform, the four corners of the frame top platform are respectively fixedly connected to one end of the four frame rods and are located below the controller, the frame bottom platform is fixedly connected to the other ends of the four frame rods and is located below the vacuum box lifting platform, the four corners of the guide platform bottom platform are fixedly connected to the four frame rods and are located in the middle and upper part of the frame rods, and the guide platform bottom platform has a T-shaped through hole at the center position.

[0010] Wherein, the guide platform includes a guide platform body, a guide platform sealing cover and an upper positioning chuck, the guide platform body is placed on the T-shaped through hole in the center of the guide platform base, the upper positioning chuck is bolted to the guide platform body, the guide platform sealing cover has a threaded hole at the center position and is located below the guide platform body, the upper positioning chuck is bolted to the guide platform body and is located above the upper positioning chuck.

[0011] Among them, the upper positioning chuck includes an upper four-claw gripper, an upper tensioning nut, and a chuck boss. The upper four-claw gripper is fixedly connected to the upper tensioning nut and is located below the upper tensioning nut. The upper tensioning nut is fixedly connected to the chuck boss and is located below the chuck boss. The chuck boss is bolted to the guide platform body and is located above the upper tensioning nut. The chuck boss has a sealing ring groove near the center.

[0012] Among them, each of the wire sealing adapter interface also includes a wire sealing adapter interface body, a wire sealing adapter interface seal, and a wire sealing adapter interface support member. One end of each of the wire sealing adapter interface bodies has a tapered port, and the other end of each of the wire sealing adapter interface bodies has an external thread structure. Each of the wire sealing adapter interface seal members is sleeved on one side of the tapered port. Each of the wire sealing adapter interface support members is fixedly connected to the wire sealing adapter interface body and is located on one side of the wire sealing adapter interface seal. Each of the wire sealing adapter interface support members has a sealing groove. The other sides of the two wire sealing adapter interface bodies are respectively threadedly connected to the vacuum box and the guide platform, and are respectively located on the top of the vacuum box and the top of the guide platform.

[0013] The present invention also provides a method for coating a conductive film in a tube with a large aspect ratio, comprising the following steps:

[0014] The circular tube is cleaned and dried with distilled pure water to remove impurities on the inner and outer walls of the circular tube, so as to reduce the influence on the later observation of the inner and outer walls of the circular tube;

[0015] The impurities between the evaporation wires are thoroughly cleaned and dried to prevent the impurities between the filaments from affecting the effect of the conductive film coating;

[0016] Install and debug the device for coating the conductive film inside the tube with a large aspect ratio;

[0017] The controller controls the mechanical vacuum pump device to perform vacuum extraction, and when the controller receives information feedback that the vacuum degree measured by the pressure gauge reaches the experimental requirement, the controller controls the mechanical vacuum pump to stop working;

[0018] The controller controls the evaporation high-voltage power supply device to perform high-voltage discharge. When the controller receives information feedback that the temperature measured by the thermometer reaches the experimental requirement, the controller controls the evaporation high-voltage power supply to stop working and prepare to start evaporation deposition on the evaporation wire;

[0019] The controller controls the evaporation high-voltage power supply device to output evaporation high voltage and gradually increase the high-voltage gear;

[0020] Carefully observe the inner and outer walls of the circular tube, and when the circular tube is observed to gradually change from transparent to dark red, it indicates that the conductive film on the inner wall of the circular tube has been basically plated;

[0021] The controller controls the evaporation high-voltage power supply device to stop working. When the value received by the controller from the temperature gauge gradually drops to normal temperature, the round tube coated with the conductive film can be removed for use.

[0022] The beneficial effects of the present invention are embodied in:

[0023] 1. The present invention cleans and dries the round tube and the vapor-deposited wire, and controls the mechanical vacuum pump through the controller to vacuum-evacuate the device, and cooperates with the vacuum box and the high-voltage discharge of the evaporation high-voltage power supply, so that the device for coating a conductive film in a tube with a large aspect ratio prepares a conductive film with better adhesion and firmness, greatly reduces the preparation cost, is simple to operate, and improves the preparation effect and efficiency.

[0024] 2. The guide platform sealing cover, the circular tube and the vacuum box sealing cover of the present invention adopt a split flexible design, which realizes the replaceable design of coating conductive films in circular tubes with different aspect ratios. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0026] Figure 1 It is a schematic diagram of the overall structure of a device for coating a conductive film in a tube with a large aspect ratio according to the present invention.

[0027] Figure 2 It is a schematic diagram of the frame structure of the present invention.

[0028] Figure 3 It is a structural schematic diagram of a mechanical vacuum pump, a vacuum conduit, a vacuum box and a vacuum box lifting platform of the present invention.

[0029] Figure 4 It is a structural schematic diagram of the vacuum box sealing cover of the present invention.

[0030] Figure 5 It is a structural schematic diagram of the vacuum box adapter of the present invention.

[0031] Figure 6 It is a structural schematic diagram of the vacuum box lifting platform of the present invention.

[0032] Figure 7 It is a schematic diagram of the exploded structure of the practical guide platform, the guide platform sealing cover, the upper positioning chuck and the lower positioning chuck;

[0033] Figure 8 It is a structural schematic diagram of the positioning chuck of the present invention.

[0034] Fig. 9 It is a structural schematic diagram of the lower positioning chuck of the present invention.

[0035] Fig.10 It is a structural schematic diagram of the wire sealing cover of the present invention.

[0036] Fig.11 The present invention is a flow chart of the steps of the method for coating a conductive film inside a tube with a large aspect ratio.

[0037] 1-frame, 2-mechanical vacuum pump, 3-controller, 4-guide platform, 5-evaporation high voltage power supply, 6-vacuum conduit, 8-vacuum box, 7-vacuum box lifting platform, 9-round tube, 10-evaporation wire, 11-vacuum box adapter, 12-vacuum box sealing cover, 13-upper positioning chuck, 14-guide platform sealing cover, 15-lower positioning chuck, 16-two wire sealing adapters, 81-pressure gauge, 82-temperature gauge, 83-vacuum box body, 111-four frames Rod, 112-frame top platform, 113-guide platform bottom platform, 114-frame bottom platform, 131-upper four-claw gripper, 132-upper tensioning screw, 133-chuck boss, 141-guide platform body, 151-lower four-claw gripper, 152-lower tensioning screw, 161-wire seal adapter seal, 162-wire seal adapter abutment, 163-wire seal adapter body, 181-vacuum box adapter body, 182-vacuum box adapter abutment. DETAILED DESCRIPTION

[0038] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0039] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, in the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0040] See also Figures 1 to 10The present invention provides a device for coating a conductive film in a tube with a relatively large length-to-diameter ratio, comprising a mechanical vacuum pump 2, a vacuum conduit 6, a vacuum box 8, a vacuum box lifting platform 7, a round tube 9, a vapor deposition wire 10, a lower positioning chuck 15, a guide platform 4, a controller 3, a frame 1, an evaporation high-voltage power supply 5 and two wire sealing adapters 16, one end of the vacuum conduit 6 is detachably connected to the mechanical vacuum pump 2 and is located on the side of the mechanical vacuum pump 2, the other end of the vacuum conduit 6 is detachably connected to the vacuum box 8 and is located on the side of the vacuum box 8, the vacuum box lifting platform 7 is placed below the vacuum box 8, one end of the round tube 9 is detachably connected to the vacuum box and is located above the vacuum box 8, and the other end of the round tube 9 is detachably connected to the vacuum box 8 and is located above the vacuum box 8. The guide table 4 is detachably connected and is located below the guide table 4. Both ends of the circular tube 9 have an external thread structure. The evaporation wire 10 is located in the circular tube 9. The lower positioning chuck 15 is detachably connected to the evaporation wire 10 and is located at the bottom of the evaporation wire 10. The controller 3 is electrically connected to the mechanical vacuum pump 2 and the evaporation high-voltage power supply 5, respectively, and is located below the guide table 4. The frame 1 is placed below the controller 3. The frame 1 is a vertical square structure. The evaporation high-voltage power supply 5 is located on one side of the frame 1. The two wire sealing adapters 16 are detachably connected to the vacuum box 8 and the guide table 4, respectively, and are located above the vacuum box 8 and above the guide table 4, respectively.

[0041] In this embodiment, the mechanical vacuum pump 2 is used to evacuate the device, the vacuum conduit 6 connects the mechanical vacuum pump 2 and the vacuum box 8, and the vacuum box 8 is electrically connected to the controller 3 to feedback the temperature and pressure of the device, which is convenient for users to use the controller 3 and the evaporation high-voltage power supply 5, so that evaporation can be carried out under ideal conditions, ensuring that the conductive film has better adhesion and firmness, and ensuring the evaporation efficiency of the evaporation wire 10. The vacuum box lifting platform 7 is placed on the bottom plate of the frame and supports the vacuum box 8. The round tube 9 is an object to be coated. The threaded connection between the round tube 9, the vacuum box 8 and the guide platform 4 plays a role in fixing and positioning the round tube 9, ensuring the stability of the round tube 9 during evaporation and improving the evaporation effect. The lower positioning chuck uses gravity traction to ensure that the evaporation wire 10 is vertically fixed in the center of the round tube 9, so that when the evaporation wire 10 evaporates, a uniform conductive coating can be obtained on the inner surface of the round tube 9. The controller 3 refers to changing the wiring of the main circuit or the control circuit and changing the resistance value in the circuit in a predetermined order to control the start of the motor. The main command device for starting, speed regulation, braking and reversing is composed of a program counter, an instruction register, an instruction decoder, a timing generator and an operation controller. It is a "decision-making body" for issuing commands. The model can be HRVG-08E. The controller 3 is electrically connected to the mechanical vacuum pump 2, the vacuum box 8 and the evaporation high-voltage power supply 5 using wires. The controller 3 receives the temperature and pressure information of the temperature meter 82 and the pressure meter 81 in the vacuum box 8. The mechanical vacuum pump 2 and the evaporation high-voltage power supply 5 can be controlled by the controller 3. The power supply 5 makes the operation simple and intelligent, and improves the work efficiency. The frame 1 is used to support the vacuum box lifting platform 7, the guide platform 4 and the controller 3. The evaporation high-voltage power supply 5 is used to provide the high voltage required for discharge in the round tube 9 and the energy required for evaporation of the evaporation wire 10. The evaporation power supply is connected to the evaporation wire 10 using a wire. The two wire sealing adapters 16 are respectively located on the vacuum box 8 and the guide platform 4. The two wire sealing adapters 16 enable the vacuum box 8 and the guide platform 4 to meet the airtightness requirements of the vacuum environment.

[0042] Further, the vacuum box 8 includes a vacuum box body 83, a vacuum box sealing cover 12, a pressure gauge 81, a temperature gauge 82, and a vacuum box adapter 11. The vacuum box body is placed on the upper surface of the vacuum box lifting platform 7, and the vacuum box sealing cover 12 is located directly above the vacuum box body 83. The vacuum box sealing cover 12 has a sealing ring groove and a threaded opening, and the threaded opening of the vacuum box sealing cover 12 is threadedly connected to the bottom port of the round tube 9. The pressure gauge 81 is fixedly connected to the vacuum box body 83 and is located on the upper surface of the vacuum box body 83. The temperature gauge 82 is fixedly connected to the vacuum box body 83 and is located on the upper surface of the vacuum box body 83, and is symmetrically arranged with the pressure gauge 81. The vacuum box adapter 11 is detachably connected to the vacuum box body 83 and is located on the side of the vacuum box body 83.

[0043] In this embodiment, a sealing ring is placed in the sealing ring groove of the vacuum box sealing cover 12, and the vacuum box sealing cover 12 meets the airtightness requirement of the vacuum box by squeezing the sealing ring in the sealing ring groove. The vacuum box sealing cover 12 is connected to the outer wall of the bottom port of the circular tube 9, and plays a role in fixing and positioning the circular tube 9. The pressure gauge 81 and the temperature gauge 82 display the environmental parameters in the device in real time, which is convenient for users to control the temperature and air pressure during preparation. The vacuum box adapter 11 is used to connect the vacuum box 8 with the vacuum duct 6.

[0044] Furthermore, the vacuum box adapter interface 11 includes a vacuum box adapter interface body 181 and a vacuum box adapter interface supporting piece 182, one end of the vacuum box adapter interface body 181 is threadedly connected to one end of the vacuum duct 6, one end of the vacuum box adapter interface body 181 has a tapered port, the other end of the vacuum box adapter interface body 181 is threadedly connected to the vacuum box 8 and is located on the side of the vacuum box 8, the vacuum box adapter interface supporting piece 182 is fixedly connected to the vacuum box adapter interface body 181, and is sleeved on the vacuum box adapter interface body 181, and the vacuum box adapter interface supporting piece 182 has an adapter sealing groove.

[0045] In this embodiment, the air tightness of the vacuum box 8 meets the requirements through the squeezing of the vacuum box 8 and the vacuum box adapter abutment 182 .

[0046] Furthermore, the lower positioning chuck 15 includes a lower four-claw gripper 151 and a lower tensioning screw 152. The lower four-claw gripper 151 is fixedly connected to the evaporation wire 10 and is located at the bottom of the evaporation wire 10. The lower tensioning screw 152 is fixedly connected to the lower four-claw gripper and is located below the lower four-claw gripper 151.

[0047] In this embodiment, the lower four-claw gripper 151 is used to grip the vapor deposition wire 10 , and the lower tension screw 152 is used to control the tension of the four-claw gripper 151 to ensure that the vapor deposition wire 10 is vertically fixed in the round tube 9 .

[0048] Furthermore, the frame 1 includes a frame top platform 112, four frame rods 111, a guide platform bottom platform 113 and a frame bottom platform 114, the four corners of the frame top platform 112 are respectively fixedly connected to one end corner pieces of the four frame rods 111 and are located below the controller 3, the frame bottom platform 114 is fixedly connected to the other end corner pieces of the four frame rods 111 and is located below the vacuum box lifting platform 7, the four corners of the guide platform bottom platform 113 are fixedly connected to the corner pieces of the four frame rods 111 and are located in the middle and upper part of the frame rods, and the guide platform bottom platform 113 has a T-shaped through hole at the center position.

[0049] In this embodiment, the four frame rods 111 are used to support the frame top platform 112, the guide platform bottom platform 113 and the frame bottom platform 114, the frame top platform 112 is used to place the controller 3, the guide platform bottom platform 113 is used to fix the guide platform 4, and the frame bottom platform 114 is used to place the vacuum box lifting platform 7.

[0050] Furthermore, the guide platform 4 includes a guide platform body 141, a guide platform sealing cover 14 and an upper positioning clamp 13, the guide platform body 141 is placed on the central T-shaped through hole of the guide platform base 113, the upper positioning clamp 13 is bolted to the guide platform body 141, the guide platform sealing cover 14 has a threaded hole at the center position and is located below the guide platform body 141, the upper positioning clamp 13 is bolted to the guide platform body 141 and is located above the upper positioning clamp 13.

[0051] In this embodiment, the T-shaped through hole design at the center of the guide platform base 113 facilitates the guide platform 4 to be directly fixed on the guide platform base 113 .

[0052] Furthermore, the upper positioning chuck 13 includes an upper four-claw gripper 131, an upper tensioning screw 132, and a chuck boss 133. The upper four-claw gripper 131 is fixedly connected to the upper tensioning screw 132 and is located below the upper tensioning screw 132. The upper tensioning screw 132 is fixedly connected to the chuck boss 133 and is located below the chuck boss 133. The chuck boss 133 is bolted to the guide platform body 141 and is located above the upper tensioning screw 132. The chuck boss 133 has a sealing ring groove near the center.

[0053] In this embodiment, the upper four-claw gripper 131 is used to grab the vapor-deposited wire 10, and the upper tightening screw 132 is used to control the tightness of the upper four-claw gripper 131, thereby fixing and positioning the vapor-deposited wire 10. There is a sealing ring in the sealing ring groove at the center position of the chuck boss 133, and the chuck boss 133 and the guide platform 4 meet the airtightness requirement of the guide platform 4 by squeezing the sealing ring in the chuck sealing ring groove.

[0054] Furthermore, each of the wire sealing adapter interface 16 also includes a wire sealing adapter interface body 163, a wire sealing adapter interface seal 161, and a wire sealing adapter interface support 162. One end of each of the wire sealing adapter interface bodies 163 has a tapered port, and the other end of each of the wire sealing adapter interface bodies 163 has an external thread structure. Each of the wire sealing adapter interface seals 161 is sleeved on one side of the tapered port. Each of the wire sealing adapter interface support 162 is fixedly connected to the wire sealing adapter interface body 163 and is located on one side of the wire sealing adapter interface seal 161. Each of the wire sealing adapter interface support 162 has a sealing groove. The other sides of the two wire sealing adapter interface bodies 16 are respectively threadedly connected to the vacuum box 8 and the guide platform 4, and are respectively located on the top of the vacuum box 8 and the top of the guide platform 4.

[0055] In this embodiment, the tapered port of each wire sealing adapter body 163 is a rubber port, which is convenient for the wire sealing adapter seal 161 to clamp and seal it. The tapered design is also conducive to the sealing of the wire outlet. The wire sealing adapter seal 161 is sleeved on one side of the tapered port of the interface body, which is used for clamping and squeezing the rubber tapered port. The wire sealing adapter abutment 162 is fixedly connected to the wire sealing adapter body 163, and is abutted against the vacuum box 8 and the guide platform 4 through a threaded connection. The airtightness requirements of the vacuum environment are achieved by squeezing the two wire sealing adapters 16 with the vacuum box 8 and the guide platform 4. The guide platform sealing cover 14, the round tube 9 and the vacuum box sealing cover 12 of the present invention adopt a split flexible design, which realizes the replaceable design of 9 coating conductive film in round tubes with different aspect ratios.

[0056] See also Fig.11 The present invention also provides a method for coating a conductive film in a tube with a large aspect ratio, comprising the following steps:

[0057] S1: Cleaning and drying the circular tube 9 with distilled pure water to remove impurities on the inner and outer walls of the circular tube 9 to reduce the influence on the later observation of the inner and outer walls of the circular tube;

[0058] S2: thoroughly cleaning and drying the impurities between the evaporation wires 10 to prevent the impurities between the filaments from affecting the effect of the conductive film coating;

[0059] S3: installing and debugging the device for coating the conductive film in the tube with a large aspect ratio;

[0060] S4: the controller 3 controls the mechanical vacuum pump device to perform vacuum extraction. When the controller 3 receives information feedback that the vacuum degree measured by the pressure gauge 81 reaches the experimental requirement, the controller 3 controls the mechanical vacuum pump to stop working;

[0061] S5: The controller 3 controls the evaporation high-voltage power supply 5 to perform high-voltage discharge. When the controller 3 receives information feedback that the temperature measured by the thermometer 82 reaches the experimental requirement, the controller 3 controls the evaporation high-voltage power supply 5 to stop working and prepare to start evaporation deposition on the evaporation wire 10;

[0062] S6: the controller 3 controls the evaporation high voltage power supply 5 to output the evaporation high voltage and gradually increase the high voltage gear;

[0063] S7: Carefully observe the inner and outer wall surfaces of the circular tube 9. When the circular tube 9 is observed to gradually change from transparent to dark red, it indicates that the conductive film on the inner wall of the circular tube 9 has been basically plated.

[0064] S8: The controller 3 controls the evaporation high-voltage power supply 5 to stop working. When the value received by the controller 3 from the temperature gauge 82 gradually drops to room temperature, the round tube 9 coated with the conductive film can be removed for use.

[0065] Among them, first, the circular tube 9 is cleaned and dried with distilled pure water. In order to remove impurities on the inner and outer walls of the circular tube 9 and reduce the impact on the later observation of the inner and outer walls of the circular tube 9, the circular tube 9 is placed in an ultrasonic cleaning machine with detergent and distilled pure water to carefully clean the inner and outer walls. After cleaning, it is taken out and placed in a vacuum drying oven for vacuum drying of the inner and outer walls; further, the impurities mixed between the evaporation wires 10 are thoroughly cleaned and dried in the same way to prevent the impurities between the filaments from affecting the effect of the conductive film coating; further, the device for coating the conductive film in the circular tube 9 with a large aspect ratio is installed and debugged to ensure that the coating device meets the requirements of safe and stable coating; next, the controller 3 starts to control the mechanical vacuum pump device to perform vacuum extraction. When the controller 3 receives the information feedback that the vacuum degree measured by the pressure gauge 81 reaches the experimental coating requirements, the controller 3 controls the mechanical vacuum pump device to perform vacuum extraction. The air pump 2 stops working; then the controller 3 controls the evaporation high-voltage power supply 5 device to discharge high voltage. When the controller 3 receives the information feedback that the temperature measured by the thermometer 82 reaches the experimental requirements, the controller 3 controls the evaporation high-voltage power supply 5 to stop working and prepares to start evaporation and evaporation on the evaporation wire 10; then the controller 3 controls the evaporation high-voltage power supply 5 device to output evaporation high voltage and gradually increase the high voltage gear; at this time, you only need to carefully observe the inner and outer wall surfaces of the circular tube 9. When it is observed that the circular tube 9 gradually changes from transparent to dark red, it means that the conductive film on the inner wall of the circular tube 9 has been basically coated; at this time, do not immediately disassemble the coating device to take the tube to avoid experimental accidents. The controller 3 should control the evaporation high-voltage power supply 5 device to stop working immediately. When the controller 3 receives the value of the thermometer 82 and gradually drops to room temperature, the circular tube 9 coated with the conductive film can be disassembled for use.

[0066] What is disclosed above is only a preferred embodiment of the present invention, and it certainly cannot be used to limit the scope of rights of the present invention. Ordinary technicians in this field can understand that all or part of the processes of the above embodiment and equivalent changes made according to the claims of the present invention still fall within the scope of the invention.

Claims

1. A device for coating a conductive film in a tube with a large aspect ratio, characterized in that: The invention comprises a mechanical vacuum pump, a vacuum conduit, a vacuum box, a vacuum box lifting platform, a round tube, a vapor deposition wire, a lower positioning chuck, a guide platform, a controller, a frame, an evaporation high-voltage power supply and two wire sealing adapters, one end of the vacuum conduit is detachably connected to the mechanical vacuum pump and is located on the side of the mechanical vacuum pump, the other end of the vacuum conduit is detachably connected to the vacuum box and is located on the side of the vacuum box, the vacuum box lifting platform is placed below the vacuum box, one end of the round tube is detachably connected to the vacuum box and is located above the vacuum box, the other end of the round tube is detachably connected to the guide platform and is located on the guide platform Below the guide table, both ends of the round tube have external thread structures, the evaporation wire is located in the round tube, the lower positioning chuck is detachably connected to the evaporation wire and is located at the bottom of the evaporation wire, the controller is electrically connected to the mechanical vacuum pump, the vacuum box and the evaporation high-voltage power supply respectively, and is located below the guide table, the frame is placed below the controller, the frame is a vertical square structure, the evaporation high-voltage power supply is located on one side of the frame, the two wire sealing adapters are detachably connected to the vacuum box and the guide table respectively, and are located above the vacuum box and above the guide table respectively; The vacuum box comprises a vacuum box body, a vacuum box sealing cover, a pressure gauge, a temperature gauge and a vacuum box adapter. The vacuum box body is placed on the upper surface of the vacuum box lifting platform, the vacuum box sealing cover is located directly above the vacuum box body, the vacuum box sealing cover has a sealing ring groove and a threaded opening, and the threaded opening of the vacuum box sealing cover is threadedly connected to the bottom port of the round tube, the pressure gauge is fixedly connected to the vacuum box body and is located on the upper surface of the vacuum box body, the temperature gauge is fixedly connected to the vacuum box body and is located on the upper surface of the vacuum box body, and is symmetrically arranged with the pressure gauge, and the vacuum box adapter is detachably connected to the vacuum box body and is located on the side of the vacuum box body; The frame includes a frame top platform, four frame rods, a guide platform bottom platform and a frame bottom platform, the four corners of the frame top platform are respectively fixedly connected to one end of the four frame rods and are located below the controller, the frame bottom platform is fixedly connected to the other ends of the four frame rods and is located below the vacuum box lifting platform, the four corners of the guide platform bottom platform are fixedly connected to the four frame rods and are located in the middle and upper part of the frame rods, and the guide platform bottom platform has a T-shaped through hole at the center position; The method of coating a conductive film in a tube with a large aspect ratio comprises the following steps: The circular tube is cleaned and dried with distilled pure water to remove impurities on the inner and outer walls of the circular tube; Thoroughly cleaning and drying the impurities mixed between the vapor-deposited wires; Installing and debugging the device for coating a conductive film in a tube with a large aspect ratio; The controller controls the mechanical vacuum pump device to perform vacuum extraction, and when the controller receives information feedback that the vacuum degree measured by the pressure gauge reaches the experimental requirement, the controller controls the mechanical vacuum pump to stop working; The controller controls the evaporation high-voltage power supply device to perform high-voltage discharge. When the controller receives information feedback that the temperature measured by the thermometer reaches the experimental requirement, the controller controls the evaporation high-voltage power supply to stop working and prepare to start evaporation deposition on the evaporation wire; The controller controls the evaporation high-voltage power supply device to output evaporation high voltage and gradually increase the high-voltage gear; Carefully observe the inner and outer walls of the circular tube, and when the circular tube is observed to gradually change from transparent to dark red, it indicates that the conductive film on the inner wall of the circular tube has been basically plated; The controller controls the evaporation high-voltage power supply device to stop working. When the value received by the controller from the temperature gauge gradually drops to normal temperature, the round tube coated with the conductive film can be removed for use.

2. A device for coating a conductive film in a tube with a large aspect ratio as claimed in claim 1, characterized in that: The vacuum box transfer interface comprises a vacuum box transfer interface body and a vacuum box transfer interface supporting piece, one end of the vacuum box transfer interface body is threadedly connected to one end of the vacuum duct, one end of the vacuum box transfer interface body has a tapered port, the other end of the vacuum box transfer interface body is threadedly connected to the vacuum box and is located on the side of the vacuum box, the vacuum box transfer interface supporting piece is fixedly connected to the interface body and is sleeved on the vacuum box transfer interface body, and the vacuum box transfer interface supporting piece has a transfer interface sealing groove.

3. A device for coating a conductive film in a tube with a large aspect ratio as claimed in claim 1, characterized in that: The lower positioning clamp includes a lower four-claw gripper and a lower tension screw. The lower four-claw gripper is fixedly connected to the evaporation wire and is located at the bottom of the evaporation wire. The lower tension screw is fixedly connected to the lower four-claw gripper and is located below the lower four-claw gripper.

4. A device for coating a conductive film in a tube with a large aspect ratio as claimed in claim 1, characterized in that: The guide platform includes a guide platform body, a guide platform sealing cover and an upper positioning chuck. The guide platform body is placed on the T-shaped through hole in the center of the guide platform base. The guide platform sealing cover has a threaded hole at the center and is located below the guide platform body. The upper positioning chuck is bolted to the guide platform body and is located above the upper positioning chuck.

5. A device for coating a conductive film in a tube with a large aspect ratio as claimed in claim 4, characterized in that: The upper positioning chuck includes an upper four-claw gripper, an upper tensioning nut, and a chuck boss. The upper four-claw gripper is fixedly connected to the upper tensioning nut and is located below the upper tensioning nut. The upper tensioning nut is fixedly connected to the chuck boss and is located below the chuck boss. The chuck boss is bolted to the guide platform body and is located above the upper tensioning nut. The chuck boss has a sealing ring groove near the center.

6. The device for coating a conductive film in a tube with a large aspect ratio as claimed in claim 1, characterized in that: Each of the wire sealing adapters also includes a wire sealing adapter body, a wire sealing adapter seal, and a wire sealing adapter abutment. One end of each of the wire sealing adapter bodies has a tapered port, and the other end of each of the wire sealing adapter bodies has an external thread structure. Each of the wire sealing adapter seals is sleeved on one side of the tapered port. Each of the wire sealing adapter abutments is fixedly connected to the wire sealing adapter body and is located on one side of the wire sealing adapter seal. Each of the wire sealing adapter abutments has a sealing groove. The other sides of the two wire sealing adapter bodies are respectively threadedly connected to the vacuum box and the guide platform, and are respectively located on the top of the vacuum box and the top of the guide platform.

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