OPC Verification Expert System and Diagnosis Method

Abstract

The present invention discloses an OPC verification expert system including: a temporary data initialization module, which is used to collect temporary data formed during product OPC verification and form a dictionary according to OPC index information. A database, which is used to store OPC verification data of multiple known diagnostic results. A data exchange module, which is used to retrieve a graphic structure matching the temporary data in the database. A diagnosis module, which selects the diagnosis result of the graphic structure in the database as the diagnosis result of the temporary data according to a similarity factor, or expands the information of the temporary data into the database and generates a verification report. The present invention also discloses an OPC verification diagnosis method. The present invention can realize high-quality automatic diagnosis of OPC verification, simplify diagnosis and improve the diagnosis rate.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor integrated circuit manufacturing, and in particular to an optical proximity correction (OPC) verification expert system. The present invention also relates to a diagnostic method for OPC verification. Background Art

[0002] In the mask publishing process of semiconductor manufacturing, OPC technology is generally required to correct the mask pattern. After imaging with the OPC-corrected mask, the target pattern formed on the semiconductor substrate can meet the target requirements and eliminate the distortion or deformation of the target pattern caused by the optical proximity effect.

[0003] In the daily work of OPC, OPC verification is a very important part of the work to ensure that it meets the requirements. In addition, in the manufacturing plant (FAB), new products are tapped out every day. It is necessary not only to ensure that their OPC is correct, but also to manually record the product information, such as product process name, process integration (PIE), OPC, error information (errorinfo), etc. After each OPC verification, this information is manually recorded in a specified text file by relevant personnel. The process is complicated and tedious, time-consuming and labor-intensive, and it is easy to forget to record or make mistakes due to various reasons, resulting in subsequent personnel not getting the desired information or getting wrong information when querying the records, which not only affects work efficiency but may even cause errors. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide an OPC verification expert system, which can realize high-quality automatic diagnosis of OPC verification, simplify diagnosis and improve diagnosis rate. To this end, the present invention also provides an OPC verification diagnosis method.

[0005] In order to solve the above technical problems, the OPC verification expert system provided by the present invention comprises:

[0006] The temporary data initialization module is used to collect temporary data generated during product OPC verification and form a dictionary of the temporary data according to OPC index information.

[0007] A database for storing OPC-verified data of multiple known diagnostic results.

[0008] The data exchange module is used to retrieve the graphic structure matching the temporary data in the database.

[0009] A diagnostic module, when a graphic structure that matches the temporary data and meets the similarity factor requirements is retrieved from the database, directly uses the diagnostic result corresponding to the graphic structure retrieved from the database as the diagnostic result of the graphic structure of the temporary data; when a graphic structure that matches the temporary data and meets the similarity factor requirements is not retrieved from the database, if the OPC verification of the graphic structure of the temporary data is correct, the information of the graphic structure of the temporary data is recorded and stored in the database; when a graphic structure that matches the temporary data and meets the similarity factor requirements is not retrieved from the database, if there is a problem with the OPC verification of the graphic structure of the temporary data, the information of the graphic structure of the temporary data is recorded and stored in the database and a verification report is generated at the same time, the verification report feedbacks the problematic graphic structure and detailed risk information corresponding to the graphic structure.

[0010] Further improvements include:

[0011] The OPC index generation module is used to generate the OPC index in the OPC process.

[0012] A further improvement is that the OPC index includes: manufacturer, product and process levels.

[0013] A further improvement is that during the OPC verification process, the temporary data initialization module automatically runs in the background and collects and forms the temporary data.

[0014] A further improvement is that the step of collecting and forming the temporary data by the temporary data initialization module includes:

[0015] Generate a set of arrays, wherein the arrays include keywords of each level of the index of the product;

[0016] The collected temporary data is assigned to the corresponding array according to the key of the index to form the dictionary.

[0017] A further improvement is that the database includes an OPCV database and an OPCV knowledge base, the OPCV database stores OPCV data, and the OPCV knowledge base stores knowledge data;

[0018] The OPCV data includes index data, and the knowledge data includes graphic structure data and error information data corresponding to the graphic structure data.

[0019] A further improvement is that the temporary data includes OPCV data and knowledge data.

[0020] A further improvement is that it also includes a human-computer interaction interface;

[0021] Before performing the OPC verification diagnosis, the dictionary information will be displayed on the human-computer interaction interface.

[0022] A further improvement is that after the OPC verification is completed, the data exchange module will trigger a diagnosis request signal, and the database will search upon receiving the diagnosis request signal to find a graphic structure matching the temporary data and display the search results on the human-computer interaction interface.

[0023] A further improvement is that the diagnosis result of the diagnosis module will be displayed on the human-computer interaction interface.

[0024] A further improvement is that in the verification report generated by the diagnosis module, the problematic graphic structure is obtained by intercepting the GDS file of the layout.

[0025] As a further improvement, the size of the problematic graphic structure captured was 2 microns by 2 microns.

[0026] A further improvement is that it also includes a final diagnostic report generation module for the OPC verification person in charge to generate a final diagnostic report;

[0027] The final diagnosis report includes the final diagnosis result and the verification report.

[0028] A further improvement is that the final diagnosis result is formed by combining the diagnosis result output by the diagnosis module with the subjective diagnosis result of the OPC verification person in charge.

[0029] A further improvement is that the verification report is formed in an Excel or PPT format file.

[0030] In order to solve the above technical problems, the diagnostic method of OPC verification provided by the present invention comprises the following steps:

[0031] Step 1: Initialize temporary data, including: collecting temporary data generated during product OPC verification and forming a dictionary of the temporary data according to OPC index information.

[0032] Step 2: data exchange, including: searching a database for a graphic structure matching the temporary data. The database stores OPC-verified data of a plurality of known diagnostic results.

[0033] Step 3: Perform OPC verification diagnosis, including:

[0034] Set the similarity factor.

[0035] When a graph structure matching the temporary data and satisfying the similarity factor requirement is retrieved from the database, the diagnosis result corresponding to the graph structure retrieved from the database is directly used as the diagnosis result of the graph structure of the temporary data.

[0036] When a graphic structure matching the temporary data and satisfying the similarity factor requirement is not retrieved in the database, if the OPC verification of the graphic structure of the temporary data is correct, the information of the graphic structure of the temporary data is recorded and stored in the database.

[0037] When a graphic structure that matches the temporary data and meets the similarity factor requirements is not retrieved in the database, if there is a problem with the OPC verification of the graphic structure of the temporary data, the information of the graphic structure of the temporary data is recorded and stored in the database and a verification report is generated at the same time, and the verification report feeds back the problematic graphic structure and detailed risk information corresponding to the graphic structure.

[0038] A further improvement is that the OPC index is generated during the OPC process.

[0039] A further improvement is that the OPC index includes: manufacturer, product and process levels.

[0040] A further improvement is that, in step 1, a background automatic operation is performed during the OPC verification process to collect and form the temporary data.

[0041] A further improvement is that the step of collecting and forming the temporary data includes:

[0042] Generate a set of arrays, wherein the arrays include keywords of each level of the index of the product;

[0043] The collected temporary data is assigned to the corresponding array according to the key of the index to form the dictionary.

[0044] A further improvement is that the database includes an OPCV database and an OPCV knowledge base, the OPCV database stores OPCV data, and the OPCV knowledge base stores knowledge data;

[0045] The OPCV data includes index data, and the knowledge data includes graphic structure data and error information data corresponding to the graphic structure data.

[0046] A further improvement is that the method further comprises the steps of:

[0047] A final diagnosis report is generated, wherein the final diagnosis report includes a final diagnosis result and the verification report, wherein the final diagnosis result is formed by combining the diagnosis result with a subjective diagnosis result of the OPC verification person in charge.

[0048] The OPC verification expert system of the present invention is provided with a database of OPC verification data with multiple known diagnostic results, namely, an instance database. When diagnosing a product after OPC verification, the corresponding diagnostic results are not directly output separately and recorded manually, but the temporary data of OPC verification is processed and a dictionary is formed according to the pre-obtained OPC index information. The dictionary facilitates intuitive selection of the graphic structure of the temporary data, and then data exchange between the temporary data and the database is performed. If the graphic structure of the temporary data has a matching graphic structure in the database that meets the similarity factor requirements, since the diagnostic result of the graphic structure in the database is known, the graphic structure in the database can be directly used as the diagnostic result of the graphic structure of the temporary data, so that the diagnostic result can be obtained simply and quickly.

[0049] If the graphic structure of temporary data does not have a corresponding matching graphic structure in the database that meets the requirements of similar factors, then the graphic structure of temporary data needs to be diagnosed separately. If the OPC verification is correct, the information of the graphic structure of temporary data, that is, the detailed information, will be recorded and stored in the database, so that the database can be expanded; and if the separate diagnosis of the graphic structure of temporary data shows that there is a problem with OPC verification, the information of the graphic structure of temporary data, that is, the detailed information, will be recorded and stored in the database and a verification report will be generated at the same time, all of which can be achieved automatically. As the number of OPC verification diagnoses increases, the size of the database will also increase, so the situation where the graphic structure of temporary data does not have a corresponding matching graphic structure in the database that meets the requirements of similar factors will decrease, so as the usage increases, the diagnostic rate of OPC verification will also increase.

[0050] It can be seen from the above that the present invention can achieve high-quality automatic diagnosis of OPC verification, can simplify diagnosis and can improve the diagnosis rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0051] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments:

[0052] Figure 1 It is a module structure diagram of the OPC verification expert system according to an embodiment of the present invention;

[0053] Figure 2 It is a flow chart of the implementation of the OPC verification expert system of the embodiment of the present invention;

[0054] Figure 3It is a hierarchical structure diagram of the OPC index of the OPC verification expert system according to an embodiment of the present invention;

[0055] Figure 4 It is a composition diagram of dictionary information of the OPC verification expert system according to an embodiment of the present invention;

[0056] Figure 5 This is a flow chart of the OPC verification expert system according to an embodiment of the present invention when implementing data exchange;

[0057] Figure 6 This is a flow chart of the OPC verification expert system according to an embodiment of the present invention when implementing diagnosis through a database;

[0058] Figure 7 This is a flow chart of the OPC verification expert system in an embodiment of the present invention when issuing a final diagnosis report;

[0059] Figure 8 It is a problematic graphic structure diagram captured from the verification report of the OPC verification expert system according to an embodiment of the present invention. DETAILED DESCRIPTION

[0060] like Figure 1 As shown, it is a module structure diagram of the OPC verification expert system 101 according to an embodiment of the present invention; Figure 2 FIG. 1 is a flowchart of an OPC verification expert system 101 according to an embodiment of the present invention when it is implemented; the OPC verification expert system 101 according to an embodiment of the present invention includes:

[0061] The temporary data initialization module 102 is used to collect temporary data generated during the OPC verification of the product 302 and form a dictionary of the temporary data according to the OPC index information.

[0062] The database 103 is used to store OPC verification data of a plurality of known diagnostic results.

[0063] The data exchange module 104 is used to retrieve a graphic structure matching the temporary data in the database 103 .

[0064] The diagnostic module 105, when a graphic structure that matches the temporary data and meets the similarity factor requirements is retrieved in the database 103, directly uses the diagnostic result corresponding to the graphic structure retrieved in the database 103 as the diagnostic result of the graphic structure of the temporary data; when a graphic structure that matches the temporary data and meets the similarity factor requirements is not retrieved in the database 103, if the OPC verification of the graphic structure of the temporary data is correct, the information of the graphic structure of the temporary data is recorded and stored in the database 103; when a graphic structure that matches the temporary data and meets the similarity factor requirements is not retrieved in the database 103, if there is a problem with the OPC verification of the graphic structure of the temporary data, the information of the graphic structure of the temporary data is recorded and stored in the database 103 and a verification report is generated at the same time, and the verification report feeds back the problematic graphic structure and detailed risk information corresponding to the graphic structure.

[0065] In the embodiment of the present invention, it also includes:

[0066] The OPC index generation module is used to generate the OPC index in the OPC process. Figure 2 As shown, the design layout of the product 302 will perform the OPC corresponding to the mark 201 , and the embodiment of the present invention generates the index of the OPC in the step of performing the OPC corresponding to the mark 201 .

[0067] like Figure 3 , which is a hierarchical structure diagram of the OPC index of the OPC verification expert system according to an embodiment of the present invention; the OPC index includes: manufacturer 301, product 302 and process level 303. Figure 3 In the figure, the manufacturer is represented by FAB, and three manufacturers are listed, namely FAB1, FAB3 and FAB7. When there are only three manufacturers, the information of manufacturer 301 in the index can only be selected from FAB1, FAB3 and FAB7. Product 302 is represented by Tech, which is a technical product. The level of product 302 includes many different types of products, such as Eflash_90 and Efash_11. Eflash_90 and Efash_11 are the product numbers, usually the numbers of flash memory products. The process level 303 is represented by Layer. Figure 3 Two process levels, ACT and M1, are listed. ACT represents the active area and M1 represents the first metal layer. Figure 3 More layers corresponding to the mark 304 are also shown, which can be set according to the layout data of the actual product.

[0068] Depend on Figure 3As mentioned above, the index is the relevant information that needs to be entered when running OPC based on the actual product, such as FAB / Tech / Layer / … These are all information that needs to be entered before running OPC, so that when a product enters OPC, each layer has its own unique mark, i.e., index, and all graphic structures can be found through the corresponding index.

[0069] In the embodiment of the present invention, during the OPC verification process, the temporary data initialization module 102 automatically runs in the background and collects and forms the temporary data. Figure 2 As shown, the step corresponding to mark 202 is OPC verification, that is, Figure 2 In the embodiment of the present invention, the temporary data is collected and formed directly in the OPC verify corresponding to the surface 202, and the temporary data initialization module 102 works directly in the background.

[0070] The steps of the temporary data initialization module 102 collecting and forming the temporary data include:

[0071] A set of arrays is generated, wherein the array includes the keywords of each layer of the index of the product 302, for example, the array is [FAB, Product, Layer, ...].

[0072] According to the keyword of the index, the collected temporary data is assigned to the corresponding array to form the dictionary. That is, when this module is started, the previously marked indexes are compared one by one to form a dictionary: {FAB:FAB7,Product:XXX,Layer:M1,……}. Figure 4 As shown, it is a composition diagram of the dictionary information of the OPC verification expert system of an embodiment of the present invention; the values ​​of the array corresponding to the dictionary, i.e., Dictionary 401, are obtained according to the index, such as the FAB value is obtained according to the corresponding FAB: FAB7 in the tag 301a, the value of the product Product is obtained according to the Tech: Eflash_90 corresponding to the tag 302a, and the value of Layer is obtained according to the Layer: M1 corresponding to the tag 303a. In addition, the error information corresponding to the tag 304a, i.e., Error: XXX, and other information corresponding to the tag 304b can also be added to the dictionary 401. In the specification of the present invention, XXX indicates that the specific description is omitted.

[0073] like Figure 2 As shown, the database 103 includes an OPCV database 103a and an OPCV knowledge base, where OPCV stands for OPC verification. The OPCV database 103a stores OPCV data, and the OPCV knowledge base stores knowledge data.

[0074] The OPCV data includes index data, and the knowledge data includes graphic structure data and error information data corresponding to the graphic structure data.

[0075] The temporary data includes OPCV data and knowledge data.

[0076] like Figure 2 As shown, in the embodiment of the present invention, the OPC verification expert system 101 also includes a human-computer interaction interface 106 .

[0077] like Figure 5 As shown, this is a flow chart of the OPC verification expert system implementing data exchange according to an embodiment of the present invention. Figure 5 yes Figure 2 Flowcharts related to individual and data exchange; Figure 5 Not involved in Figure 2 The OPC verification owner 203 in the mark 203 is the OPCV owner corresponding to the mark 203, that is, the OPC verify owner. The data exchange is described in detail as follows:

[0078] 1) Before the diagnosis of OPC verification is performed, the information of the dictionary will be displayed on the human-machine interaction interface 106. That is, before the OPC verify owner starts working, the GUI display interface, i.e., the human-machine interaction interface 106, will display the previous dictionary 401 information on the interaction interface, and display some basic information introduced by OPC, so that the OPC verify owner can observe the basic information, as shown in Table 1 below:

[0079] Table 1

[0080] FAB Tech Layer … Error xxx xxx xxx … xxx

[0081] 2) After the OPC verification is completed, the data exchange module 104 will trigger a diagnostic request signal, that is, when the verify signal is triggered, a diagnostic request is sent to the diagnostic system storage center, including temporary data OPCV data and knowledge data. The OPCV data includes {FAB:XXX, Tech:XXX, Layer:XXX,...}, and the knowledge data includes graphic structure (pattern) data and error (error) information data.

[0082] 3) When receiving the diagnosis request signal, the database 103 searches to find the graphic structure matching the temporary data and displays the search result on the human-computer interaction interface 106. That is:

[0083] After receiving the diagnosis request, the OPCV database 103a and the knowledge base 103b will search the database to see whether there is a matching pattern, and display the search results through an interactive interface.

[0084] like Figure 6 FIG. 1 is a flow chart of an OPC verification expert system according to an embodiment of the present invention when implementing diagnosis through a database;

[0085] Figure 6 yes Figure 2 A flowchart related to system diagnosis, that is, the work of the diagnosis module 105, is given separately and through the database; the diagnosis process of the diagnosis module 105 is described in detail as follows:

[0086] 1) Set the similarity factor ξ to be used as the pattern matching standard.

[0087] 2) When a pattern satisfying the similarity factor ξ is searched in the library, i.e., the database 103, the knowledge base diagnosis result is displayed on the interactive interface, as shown in the following Table 2:

[0088] Table 2

[0089]

[0090] As shown in Table 2, the diagnosis structure such as various error information can be directly obtained by reading from the database 103. Finally, the diagnosis result of the diagnosis module 105 will be displayed on the human-computer interaction interface 106.

[0091] 3) When the similarity factor ξ is not met and OPC verify is ok, the system will record and archive the detailed information to enrich the OPCV database and knowledge base. If there is a problem, the expert system will generate a verify report in addition to archiving the record, which is used to feedback the problematic pattern and detailed risk.

[0092] like Figure 8 As shown, it is a problematic graphic structure diagram captured in the verification report of the OPC verification expert system of the embodiment of the present invention. In the verification report generated by the diagnostic module 105, the problematic graphic structure is captured by capturing the GDS file of the layout. For example, the size of the captured problematic graphic structure is 2 microns × 2 microns. Figure 8 In FIG. 5 , the graphic structure is composed of graphic lines 501 .

[0093] like Figure 7 As shown, it is a flow chart when the OPC verification expert system issues a final diagnosis report 204 according to an embodiment of the present invention; Figure 7 yes Figure 2In the flowchart, there is a separate process related to issuing the final diagnostic report 204. Since the final diagnostic report 204 needs to be issued by the OPC verification person in charge 203, the process related to the OPC verification person in charge 203 is illustrated. In the embodiment of the present invention, a final diagnostic report 204 generation module is included, which is used for the OPC verification person in charge 203 to generate the final diagnostic report 204. Figure 7 In the example, the final diagnostic report 204 is also represented by an OPC verify diagnostic report.

[0094] The final diagnosis report 204 includes the final diagnosis result and the verification report.

[0095] The final diagnosis result is formed by combining the diagnosis result output by the diagnosis module 105 with the subjective diagnosis result of the OPC verification person in charge 203 .

[0096] The verification report is formed in the form of an Excel or PPT file. Finally, the final diagnosis report 204 is formed in the form of an Excel or PPT file. Figure 7 The Excel and PPT shown in the figure represent the corresponding Excel and PPT format files.

[0097] In the OPC verification expert system 101 of the embodiment of the present invention, a database 103, i.e., an instance database 103, is provided for storing OPC verification data with multiple known diagnostic results. When diagnosing the OPC-verified product 302, the corresponding diagnostic results are not directly and separately obtained and manually recorded. Instead, the temporary data of the OPC verification is processed and a dictionary is formed according to the pre-obtained OPC index information. The dictionary facilitates intuitive selection of the graphic structure of the temporary data, and then data exchange is performed between the temporary data and the database 103. If the graphic structure of the temporary data has a matching graphic structure in the database 103 that meets the similarity factor requirements, since the diagnostic result of the graphic structure in the database 103 is known, the graphic structure in the database 103 can be directly used as the diagnostic result of the graphic structure of the temporary data, so that the diagnostic result can be obtained simply and quickly.

[0098] If the graphic structure of the temporary data does not have a corresponding matching graphic structure that meets the requirements of the similarity factor in the database 103, then the graphic structure of the temporary data needs to be diagnosed separately. If the OPC verification is correct, the information of the graphic structure of the temporary data, i.e., the detailed information, is recorded and stored in the database 103, so that the database 103 can be expanded; and if the separate diagnosis of the graphic structure of the temporary data shows that there is a problem with the OPC verification, the information of the graphic structure of the temporary data, i.e., the detailed information, is recorded and stored in the database 103 and a verification report is generated at the same time, all of which can be achieved automatically. As the number of diagnoses of OPC verification increases, the size of the database 103 will also increase, so the situation where the graphic structure of the temporary data does not have a corresponding matching graphic structure that meets the requirements of the similarity factor in the database 103 will decrease, so as the usage increases, the diagnostic rate of the OPC verification will also increase.

[0099] It can be seen from the above that the embodiments of the present invention can achieve high-quality automatic diagnosis of OPC verification, simplify diagnosis and improve the diagnosis rate.

[0100] The diagnostic method of OPC verification according to the embodiment of the present invention comprises the following steps:

[0101] Step 1: Initialize temporary data, including: collecting temporary data generated during OPC verification of product 302 and forming a dictionary of the temporary data according to OPC index information.

[0102] In the method of the embodiment of the present invention, the OPC index is generated during the process of performing the OPC.

[0103] The OPC index includes: manufacturer 301 , product 302 , and process level 303 .

[0104] During the OPC verification process, the temporary data is automatically collected and formed in the background.

[0105] The steps of collecting and forming the temporary data include:

[0106] Generate a set of arrays, wherein the arrays include keywords of each level of the index of the product 302;

[0107] The collected temporary data is assigned to the corresponding array according to the key of the index to form the dictionary.

[0108] Step 2: data exchange, including: searching the database 103 for a graphic structure matching the temporary data. The database 103 stores OPC-verified data of a plurality of known diagnostic results.

[0109] In the method of the embodiment of the present invention, the database 103 includes an OPCV database 103a and an OPCV knowledge base, the OPCV database 103a stores OPCV data, and the OPCV knowledge base stores knowledge data;

[0110] The OPCV data includes index data, and the knowledge data includes graphic structure data and error information data corresponding to the graphic structure data.

[0111] Step 3: Perform OPC verification diagnosis, including:

[0112] Set the similarity factor.

[0113] When a graph structure matching the temporary data and satisfying the similarity factor requirement is retrieved in the database 103 , the diagnosis result corresponding to the graph structure retrieved in the database 103 is directly used as the diagnosis result of the graph structure of the temporary data.

[0114] When a graphic structure matching the temporary data and satisfying the similarity factor requirement is not retrieved in the database 103 , if the OPC verification of the graphic structure of the temporary data is correct, the information of the graphic structure of the temporary data is recorded and stored in the database 103 .

[0115] When a graphic structure that matches the temporary data and meets the similarity factor requirements is not retrieved in the database 103, if there is a problem with the OPC verification of the graphic structure of the temporary data, the information of the graphic structure of the temporary data is recorded and stored in the database 103 and a verification report is generated at the same time, and the verification report feeds back the problematic graphic structure and detailed risk information corresponding to the graphic structure.

[0116] Also includes the steps:

[0117] A final diagnosis report 204 is generated, wherein the final diagnosis report 204 includes a final diagnosis result and the verification report, wherein the final diagnosis result is formed by combining the diagnosis result with the subjective diagnosis result of the OPC verification person in charge 203 .

[0118] The present invention has been described in detail above through specific embodiments, but these do not constitute a limitation of the present invention. Without departing from the principle of the present invention, those skilled in the art may also make many variations and improvements, which should also be regarded as the protection scope of the present invention.

Claims

1. An OPC verification expert system, characterized in that: include: A temporary data initialization module is used to collect temporary data generated during product OPC verification and form a dictionary of the temporary data according to OPC index information; A database for storing OPC-verified data of a plurality of known diagnostic results; A data exchange module, used for retrieving a graphic structure matching the temporary data in a database; A diagnosis module, when a graphic structure matching the temporary data and satisfying the similarity factor requirement is retrieved from the database, directly using the diagnosis result corresponding to the graphic structure retrieved from the database as the diagnosis result of the graphic structure of the temporary data; when a graphic structure matching the temporary data and satisfying the similarity factor requirement is not retrieved from the database, if the OPC verification of the graphic structure of the temporary data is correct, then recording and storing the information of the graphic structure of the temporary data in the database; when a graphic structure matching the temporary data and satisfying the similarity factor requirement is not retrieved from the database, if there is a problem with the OPC verification of the graphic structure of the temporary data, then recording and storing the information of the graphic structure of the temporary data in the database and generating a verification report at the same time, wherein the verification report provides feedback on the problematic graphic structure and detailed risk information corresponding to the graphic structure; The step of collecting and forming the temporary data by the temporary data initialization module includes: Generate a set of arrays, wherein the arrays include keywords of each level of the index of the product; Assigning the collected temporary data to the corresponding array according to the keyword of the index to form the dictionary; It also includes the human-computer interface; The database includes an OPCV database and an OPCV knowledge base, wherein the OPCV database stores OPCV data, and the OPCV knowledge base stores knowledge data; The OPCV data includes index data, and the knowledge data includes graphic structure data and error information data corresponding to the graphic structure data; Before performing the OPC verification diagnosis, the dictionary information will be displayed on the human-computer interaction interface.

2. The OPC verification expert system according to claim 1, characterized in that: Also includes: The OPC index generation module is used to generate the OPC index in the OPC process.

3. The OPC verification expert system as claimed in claim 2, characterized in that: The OPC index includes: manufacturer, product and process levels.

4. The OPC verification expert system as claimed in claim 1, characterized in that: During the OPC verification process, the temporary data initialization module automatically runs in the background and collects and forms the temporary data.

5. The OPC verification expert system as claimed in claim 1, characterized in that: The temporary data includes OPCV data and knowledge data.

6. The OPC verification expert system as claimed in claim 1, characterized in that: After the OPC verification is completed, the data exchange module triggers a diagnosis request signal. When receiving the diagnosis request signal, the database searches to find a graphic structure that matches the temporary data and displays the search result on the human-computer interaction interface.

7. The OPC verification expert system according to claim 1, characterized in that: The diagnosis result of the diagnosis module will be displayed on the human-computer interaction interface.

8. The OPC verification expert system as claimed in claim 7, characterized in that: In the verification report generated by the diagnosis module, the problematic graphic structure is obtained by intercepting the GDS file of the layout.

9. The OPC verification expert system as claimed in claim 8, characterized in that: The size of the problematic graphic structure captured was 2 microns by 2 microns.

10. The OPC verification expert system as claimed in claim 8, characterized in that: It also includes a final diagnostic report generation module for the OPC verification person in charge to generate a final diagnostic report; The final diagnosis report includes the final diagnosis result and the verification report.

11. The OPC verification expert system according to claim 10, characterized in that: The final diagnosis result is formed by combining the diagnosis result output by the diagnosis module with the subjective diagnosis result of the OPC verification person in charge.

12. The OPC verification expert system according to claim 10, characterized in that: The verification report is formed in Excel or PPT format.

13. A diagnostic method for OPC verification, characterized in that: The steps include: Step 1: Initialize temporary data, including: collect temporary data generated during product OPC verification and form a dictionary of the temporary data according to OPC index information; The steps of collecting and forming the temporary data include: Generate a set of arrays, wherein the arrays include keywords of each level of the index of the product; Assigning the collected temporary data to the corresponding array according to the keyword of the index to form the dictionary; Before performing the OPC verification diagnosis, the dictionary information will be displayed on the human-computer interaction interface; Step 2, performing data exchange, including: retrieving a graphic structure matching the temporary data in a database; the database stores OPC-verified data of a plurality of known diagnostic results; The database includes an OPCV database and an OPCV knowledge base, wherein the OPCV database stores OPCV data, and the OPCV knowledge base stores knowledge data; The OPCV data includes index data, and the knowledge data includes graphic structure data and error information data corresponding to the graphic structure data; Step 3: Perform OPC verification diagnosis, including: Set similarity factor; When a graphic structure matching the temporary data and satisfying the similarity factor requirement is retrieved in the database, the diagnosis result corresponding to the graphic structure retrieved in the database is directly used as the diagnosis result of the graphic structure of the temporary data; When a graphic structure matching the temporary data and satisfying the similarity factor requirement is not retrieved in the database, if the OPC verification of the graphic structure of the temporary data is correct, the information of the graphic structure of the temporary data is recorded and stored in the database; When a graphic structure that matches the temporary data and meets the similarity factor requirements is not retrieved in the database, if there is a problem with the OPC verification of the graphic structure of the temporary data, the information of the graphic structure of the temporary data is recorded and stored in the database and a verification report is generated at the same time, and the verification report feeds back the problematic graphic structure and detailed risk information corresponding to the graphic structure.

14. The diagnostic method for OPC verification as claimed in claim 13, characterized in that: Also includes: The OPC index is generated during the OPC process.

15. The diagnostic method for OPC verification as claimed in claim 14, characterized in that: The OPC index includes: manufacturer, product and process levels.

16. The diagnostic method for OPC verification as claimed in claim 13, characterized in that: In step 1, during the OPC verification process, the temporary data is automatically collected and formed in the background.

17. The diagnostic method for OPC verification according to claim 13 or 16, characterized in that: The database includes an OPCV database and an OPCV knowledge base, wherein the OPCV database stores OPCV data, and the OPCV knowledge base stores knowledge data; The OPCV data includes index data, and the knowledge data includes graphic structure data and error information data corresponding to the graphic structure data.

18. The diagnostic method for OPC verification as claimed in claim 13, characterized in that: Also includes the steps: A final diagnosis report is generated, wherein the final diagnosis report includes a final diagnosis result and the verification report, wherein the final diagnosis result is formed by combining the diagnosis result with a subjective diagnosis result of the OPC verification person in charge.

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