A detection method and a detection device

Abstract

The present invention provides a detection method and a detection device, comprising: providing detection light, wherein the detection light forms a detection light spot on the surface of an object to be detected, and the detection light forms a signal light through the object to be detected; detecting a first signal light in a detection area on the surface of the object to be detected, wherein the detection area at least partially overlaps with the detection light spot, and adjusting the size of the detection area of ​​the first signal light, wherein adjusting the size of the detection area of ​​the first signal light comprises: when detecting an area of ​​the object to be detected that is far away from its center, adjusting the detection area of ​​the first signal light to a first size, and when detecting an area of ​​the object to be detected that is close to its center, adjusting the detection area of ​​the first signal light to a second size, and in a direction perpendicular to a scanning direction, the first size is larger than the second size, so as to reduce the difference in scanning speed between the inner and outer sides of the light spot and improve the detection sensitivity.

Description

Technical Field

[0001] The present invention relates to the field of optical detection technology, and more specifically, to a detection method and a detection device. Background Art

[0002] Before or during chip manufacturing, it is necessary to detect defects on the wafer and other structures to improve the yield of the chip. In the prior art, optical detection methods are generally used to detect defects on the wafer surface, that is, the detection light is irradiated onto the wafer surface, and signal light is formed after reflection or scattering from the wafer surface. The signal light is collected by a detection device to obtain defect information on the wafer surface.

[0003] In order to collect defect information of each area of ​​the wafer, it is necessary to move the detection light so that the detection light scans the wafer point by point. In order to speed up the detection speed, linear scanning can be used instead of point scanning, such as linear scanning of the wafer surface along a spiral line, or linear scanning of the wafer surface along a concentric circle. However, when the above scanning method is used for scanning detection, the detection sensitivity is low. Summary of the invention

[0004] In view of this, the present invention provides a detection method and a detection device to improve the sensitivity of detection.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A detection method comprising:

[0007] Providing detection light, wherein the detection light forms a detection light spot on the surface of the object to be detected, and the detection light forms a signal light through the object to be detected;

[0008] Detecting the first signal light in a detection area on the surface of the object to be detected, wherein the detection area at least partially overlaps with the detection light spot;

[0009] adjusting the size of the detection area of ​​the first signal light;

[0010] Wherein, adjusting the size of the detection area of ​​the first signal light includes:

[0011] When detecting an area of ​​the object to be detected that is away from the center, the detection area of ​​the first signal light is adjusted to a first size. When detecting an area of ​​the object to be detected that is close to the center, the detection area of ​​the first signal light is adjusted to a second size. In a direction perpendicular to the scanning direction, the first size is larger than the second size.

[0012] Optionally, adjusting the size of the detection area of ​​the first signal light includes:

[0013] The size of the detection light spot is adjusted and / or the size of the detection area is adjusted.

[0014] Optionally, it also includes:

[0015] The center of the detection area is overlapped with the center of the detection light spot.

[0016] Optionally, when detecting an area of ​​the object to be detected that is far from the center thereof, adjusting the detection area of ​​the first signal light to a first size, and when detecting an area of ​​the object to be detected that is close to the center thereof, adjusting the detection area of ​​the first signal light to a second size includes:

[0017] When detecting an area of ​​the object to be detected that is far from the center, the size of the detection light spot is adjusted to a first size, and when detecting an area of ​​the object to be detected that is close to the center, the size of the detection light spot is adjusted to a second size, and in any direction, the size of the detection light spot is less than or equal to the size of the detection area;

[0018] And / or, when detecting an area away from the center of the object to be detected, the size of the detection area is adjusted to a first size; when detecting an area close to the center of the object to be detected, the size of the detection area is adjusted to a second size, and in any direction, the size of the detection area is less than or equal to the size of the detection spot.

[0019] Optionally, adjusting the size of the detection light spot to a first size comprises: controlling a first beam expansion component to enter an optical path of the detection light, and / or controlling a first aperture component to leave the optical path of the detection light, so as to adjust the size of the detection light spot to the first size;

[0020] Adjusting the size of the detection light spot to a second size includes: controlling the first beam expander to leave the optical path of the detection light, and / or controlling the first aperture assembly to enter the optical path of the detection light, so as to adjust the size of the detection light spot to the second size.

[0021] Optionally, adjusting the size of the detection area to a first size and adjusting the size of the detection area to a second size includes:

[0022] Controlling the size of a detection area of ​​interest to the detection module to adjust the size of the detection area to a first size and to adjust the size of the detection area to a second size;

[0023] Wherein, the detection module is used to detect the signal light in the detection area on the surface of the object to be detected.

[0024] Optionally, adjusting the size of the detection area to the first size includes: controlling the second aperture assembly to leave the optical path of the signal light to adjust the size of the detection area to the first size;

[0025] Adjusting the size of the detection area to a second size includes:

[0026] The second aperture assembly is controlled to enter the optical path of the signal light to adjust the size of the detection area to a second size.

[0027] Optionally, in a direction away from the center of the object to be tested, the object to be tested includes a first region to an Nth region arranged in sequence, N being a natural number greater than or equal to 2, and adjusting the size of the region for detecting the first signal light on the surface of the object to be tested includes:

[0028] When the first area to the Nth area are detected in sequence, the size of the detection light spot is increased in sequence;

[0029] And / or, when the first area to the Nth area are detected sequentially, the size of the detection area is increased sequentially.

[0030] A detection device, comprising:

[0031] A light source module, used for providing detection light, wherein the detection light forms a detection light spot on the surface of the object to be detected, and the detection light forms a signal light through the object to be detected;

[0032] A detection module, used for detecting the first signal light in a detection area on the surface of the object to be detected, wherein the detection light spot at least partially overlaps with the detection area;

[0033] An adjustment module is used to adjust the size of the detection area of ​​the first signal light; wherein the adjustment module is used to adjust the detection area of ​​the first signal light to a first size when detecting an area of ​​the object to be detected away from its center, and to adjust the detection area of ​​the first signal light to a second size when detecting an area of ​​the object to be detected close to its center, and the first size is larger than the second size in a direction perpendicular to the scanning direction of the detection module.

[0034] Optionally, the adjustment module is used to adjust the size of the detection light spot and / or adjust the size of the detection area;

[0035] The adjustment module is used to adjust the size of the detection light spot to a first size when detecting an area of ​​the object to be detected that is far from the center thereof, and to adjust the size of the detection light spot to a second size when detecting an area of ​​the object to be detected that is close to the center thereof, and in a direction perpendicular to a scanning direction of the detection module, the first size is larger than the second size, and in any direction, the size of the detection light spot is larger than and smaller than the size of the detection area;

[0036] And / or, the adjustment module is used to adjust the size of the detection area to a first size when detecting an area of ​​the object to be detected away from its center, and to adjust the size of the detection area to a second size when detecting an area of ​​the object to be detected close to its center, and in a direction perpendicular to the scanning direction of the detection module, the first size is larger than the second size, and in any direction, the size of the detection area is larger than and smaller than the size of the detection spot.

[0037] Optionally, the scanning mode of the detection module includes a concentric circle scanning mode and a spiral scanning mode.

[0038] Optionally, the adjustment module includes a light spot adjustment unit, an area adjustment unit and a control unit;

[0039] The light spot adjustment unit is located on the optical path of the detection light and is used to adjust the size of the detection light spot formed on the surface of the object to be detected;

[0040] The area adjustment unit is located on the optical path of the signal light and is used to adjust the size of the detection area;

[0041] The control unit adjusts the size of the detection light spot by controlling the light spot adjustment unit, and adjusts the size of the detection area by controlling the area adjustment unit.

[0042] Optionally, the adjustment module includes a light spot adjustment unit and a control unit;

[0043] The light spot adjustment unit is located on the optical path of the detection light and is used to adjust the size of the detection light spot formed on the surface of the object to be detected;

[0044] The control unit adjusts the size of the detection light spot by controlling the light spot adjustment unit, and adjusts the size of the detection area by controlling the size of the detection area of ​​interest of the detection module.

[0045] Optionally, the light spot adjustment unit includes at least one first beam expansion component and / or at least one first aperture component;

[0046] The control unit is used to control the first beam expander assembly to enter the optical path of the detection light, and / or to control the first aperture assembly to leave the optical path of the detection light, so as to adjust the size of the detection light spot to a first size, and is used to control the first beam expander assembly to leave the optical path of the detection light, and / or to control the first aperture assembly to enter the optical path of the detection light, so as to adjust the size of the detection light spot to a second size.

[0047] Optionally, the first beam expansion assembly includes a plurality of first beam expansion areas, and / or the first aperture assembly includes a plurality of first light transmission areas;

[0048] The size of the light spot of the detection light after passing through different first beam expansion areas is different, and the size of the light spot of the detection light after passing through different first light transmission areas is different;

[0049] The control unit is also used to control different first beam expansion areas to be located on the optical path of the detection light after controlling the first beam expansion component to enter the optical path of the detection light, and / or to control different first light-transmitting areas to be located on the optical path of the detection light after controlling the first aperture component to enter the optical path of the detection light, so as to obtain different detection spot sizes.

[0050] Optionally, the area adjustment unit includes at least one second aperture assembly;

[0051] The control unit is used to control the second aperture component to leave the optical path of the signal light to adjust the size of the detection area to a first size, and control the second aperture component to enter the optical path of the signal light to adjust the size of the detection area to a second size.

[0052] Optionally, the detection module includes a lens assembly and a detector, the lens assembly is used to collect the signal light, the detector is used to detect the signal light collected by the lens assembly, and the second aperture assembly is arranged on the photosensitive surface of the detector.

[0053] Optionally, the second aperture assembly includes a plurality of second light-transmitting areas;

[0054] The size of the light spot of the signal light is different after passing through different second light-transmitting areas;

[0055] The control unit is further used to control different second light-transmitting areas to be located on the optical path of the signal light after controlling the second aperture assembly to enter the optical path of the signal light, so as to obtain different detection area sizes.

[0056] Compared with the prior art, the technical solution provided by the present invention has the following advantages:

[0057] The detection method and detection device provided by the present invention can adjust the size of the detection area of ​​the first signal light in the detection area of ​​the surface of the object to be detected, and when detecting the area of ​​the object to be detected far away from its center, that is, when detecting the area with a small radius difference between the inner and outer sides of the light spot, the detection area of ​​the first signal light can be adjusted to a larger first size. At this time, even if a larger size light spot is used, the difference in scanning speed between the inner and outer sides of the light spot can be made small, thereby ensuring the detection sensitivity. In addition, the scanning speed and the detection speed can be improved by scanning with a large size light spot. In addition, when detecting the area of ​​the object to be detected close to its center, that is, when detecting the area with a large radius difference between the inner and outer sides of the light spot, the detection area of ​​the first signal light can be adjusted to a smaller second size to reduce the difference in scanning speed between the inner and outer sides of the light spot and improve the detection sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0058] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0059] Figure 1 It is a schematic diagram of the scanning method of the existing detection equipment;

[0060] Figure 2 A schematic diagram of a detection method provided by one embodiment of the present invention;

[0061] Figure 3 A schematic diagram of the structure of a detection device provided by one embodiment of the present invention;

[0062] Figure 4 A schematic diagram of a signal light region of a first size and a signal light region of a second size provided by an embodiment of the present invention;

[0063] Figure 5 A schematic diagram of a first beam expansion assembly entering an optical path and a first aperture assembly leaving an optical path provided in one embodiment of the present invention;

[0064] Figure 6 A schematic diagram of a first beam expansion assembly leaving an optical path and a first aperture assembly entering an optical path provided by another embodiment of the present invention;

[0065] Figure 7 A schematic diagram of a second aperture assembly leaving the optical path provided by one embodiment of the present invention;

[0066] Figure 8A schematic diagram of a second aperture assembly entering an optical path provided by another embodiment of the present invention;

[0067] Fig. 9 A schematic diagram of the structure of the first region to the Nth region of the object to be tested provided by one embodiment of the present invention;

[0068] Fig.10 A schematic structural diagram of a first beam expansion assembly, a first aperture assembly or a second aperture assembly provided in accordance with an embodiment of the present invention. DETAILED DESCRIPTION

[0069] As the background technology, when the existing scanning method is used for scanning detection, the detection sensitivity is low. The inventors have found that the main reasons for this problem are: Figure 1 As shown, when the outer circle S1 and the inner circle S2 of the wafer 10 are scanned and detected using a detection spot of the same size, the difference between the radius R1 and the radius R2 on the inner and outer sides of the detection spot at the outer circle S1 is small, and the difference between the radius R3 and the radius R4 on the inner and outer sides of the detection spot at the inner circle S2 is large, resulting in a large difference in scanning speed on the inner and outer sides of the detection spot at the inner circle S2 and a low detection sensitivity.

[0070] Based on this, the present invention provides a detection method and a detection device to overcome the above problems existing in the prior art, wherein the detection method comprises:

[0071] Providing detection light, the detection light forms a detection light spot on the surface of the object to be detected, and the detection light forms a signal light through the object to be detected;

[0072] Detecting the first signal light in a detection area on the surface of the object to be detected, wherein the detection area at least partially overlaps with the detection light spot;

[0073] adjusting the size of the detection area of ​​the first signal light;

[0074] Wherein, adjusting the size of the detection area of ​​the first signal light includes:

[0075] When detecting an area away from the center of the object to be detected, the detection area of ​​the first signal light is adjusted to a first size. When detecting an area close to the center of the object to be detected, the detection area of ​​the first signal light is adjusted to a second size. In a direction perpendicular to the scanning direction, the first size is larger than the second size.

[0076] The detection method and detection device provided by the present invention can adjust the size of the area of ​​the first signal light in the detection area of ​​the surface of the object to be detected, and when detecting the area of ​​the object to be detected far away from its center, that is, when detecting the area with a small radius difference on both sides of the light spot, the detection area of ​​the first signal light can be adjusted to a larger first size. At this time, even if a larger size light spot is used, the difference in scanning speed on both sides of the light spot can be made small, thereby ensuring the sensitivity of detection. In addition, the scanning speed and detection speed can be improved by scanning with a large size light spot; in addition, when detecting the area of ​​the object to be detected close to its center, that is, when detecting the area with a large radius difference on both sides of the light spot, the detection area of ​​the first signal light can be adjusted to a smaller second size to reduce the difference in scanning speed on both sides of the light spot and improve the sensitivity of detection. The above is the core idea of ​​the present invention. In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in the field without making any creative work shall fall within the scope of protection of the present invention.

[0077] The embodiment of the present invention provides a detection method, which is applied to a detection device and is used to detect surface defects of a wafer, etc. Figure 2 As shown, the detection method includes:

[0078] S101: providing a detection light, the detection light forms a detection light spot on the surface of the object to be detected, and the detection light forms a signal light through the object to be detected;

[0079] like Figure 3 As shown, after the light source module 20 in the detection device emits the detection light, the detection light C1 forms a detection light spot Z on the surface of the object to be detected 21, and the detection light is reflected or scattered by the surface of the object to be detected 21 to form a signal light C2. Among them, the object to be detected 21 includes a wafer, etc., and the embodiment of the present invention is only described by taking the wafer as an example and is not limited to this. The signal light C2 contains information on the surface characteristics of the object to be detected 21. After the detection module 23 collects and detects the signal light C2, the film thickness, defects and other information on the surface characteristics of the object to be detected 21 can be obtained.

[0080] S102: Detecting a first signal light in a detection area on the surface of the object to be detected, wherein the detection area at least partially overlaps with the detection light spot.

[0081] like Figure 3As shown, the detection module 22 has a detection area J on the surface of the object to be tested. After the detection light is reflected or scattered by the surface of the object to be tested 21 to form a signal light C2, the detection module 22 detects the first signal light in the detection area J on the surface of the object to be tested 21, and obtains characteristic information of the surface of the object to be tested 21 based on the collected first signal light.

[0082] In some embodiments of the present invention, it is preferred that the center of the detection area J overlaps with the center of the detection spot Z. In this case, the signal light intensity detected by the detection module 22 is maximum, and the detection information obtained is more accurate.

[0083] That is to say, when the center of the detection area J overlaps with the center of the detection spot Z, and the size of the detection area J is equal to the size of the detection spot Z, the signal light is all the signal light formed by the detection light on the surface of the object to be measured. In addition, the first signal light is part of all the signal light formed on the surface of the object to be measured.

[0084] S103: adjusting the size of the first signal light detection area;

[0085] In an embodiment of the present invention, the size of the detection area X of the first signal light can be adjusted, wherein the detection area X of the first signal light refers to the area where the detection module 22 detects the effective signal light, that is, the first signal light is used to obtain characteristic information of the surface of the object to be measured, and the size of the detection area X of the first signal light is determined by the detection spot Z and / or the detection area J.

[0086] In the prior art, the size of the detection spot Z and the size of the detection area J are basically consistent and fixed. However, in the embodiment of the present invention, not only the size of the detection spot Z but also the size of the detection area J can be adjusted. Figure 3 As shown, the detection area J at least partially overlaps with the detection spot Z, and the size of the first signal light area X is equal to the size of the overlapping area of ​​the detection spot Z and the detection area J. In other words, the detection module 22 can finally only collect effective signal light within the detection area X of the first signal light.

[0087] Based on this, in the embodiment of the present invention, adjusting the size X of the detection area of ​​the first signal light includes: adjusting the size of the detection spot Z and / or adjusting the size of the detection area J.

[0088] In the embodiment of the present invention, Figure 4 As shown, adjusting the size X of the detection area of ​​the first signal light includes:

[0089] When detecting an area B2 of the object to be detected 21 away from its center O, the detection area X of the first signal light is adjusted to a first size D1. When detecting an area B1 of the object to be detected 21 close to its center O, the detection area X of the first signal light is adjusted to a second size D2. In a direction perpendicular to the scanning direction A, the first size D1 is larger than the second size D2.

[0090] It should be noted that, in the embodiment of the present invention, only the rotation of the object to be detected 21 along the center O, i.e., along the ω direction, is used as an example for explanation. That is, in the embodiment of the present invention, only the scanning mode of the detection module 22 is a concentric circle scanning mode as an example for explanation. The present invention is not limited to this. In other embodiments, the scanning mode of the detection module 22 can also be a spiral scanning mode. The scanning direction A is the direction of any tangent line on the circumference.

[0091] In the embodiment of the present invention, when detecting the area B2 of the object to be detected 21 away from the center O thereof, that is, when detecting the area with a small radius difference between the inner and outer sides of the detection spot, the detection area X of the first signal light is adjusted to a larger first size D1, which can not only make the scanning speed difference between the inner and outer sides of the detection spot smaller and ensure the detection sensitivity, but also improve the scanning speed and the detection speed; in addition, when detecting the area B1 of the object to be detected 21 close to the center O thereof, that is, when detecting the area with a large radius difference between the inner and outer sides of the detection spot, the detection area X of the first signal light is adjusted to a smaller second size D2 to reduce the scanning speed difference between the inner and outer sides of the detection spot and improve the detection sensitivity.

[0092] Since the size of the detection area X for detecting the first signal light on the surface of the object to be detected 21 can be adjusted by adjusting the size of the detection spot Z and / or adjusting the size of the detection area J in the embodiments of the present invention, therefore, in some embodiments of the present invention, when detecting an area B2 of the object to be detected 21 away from its center O, adjusting the detection area X of the first signal light to a first size D1, and when detecting an area B1 of the object to be detected 21 close to its center O, adjusting the detection area X of the first signal light to a second size D2 includes:

[0093] When detecting the area B2 of the object 21 far from its center O, the size of the detection spot Z is adjusted to the first size D1, and when detecting the area B1 of the object 21 close to its center O, the size of the detection spot Z is adjusted to the second size D2, and in any direction, the size of the detection spot Z is less than or equal to the size of the detection area J;

[0094] And / or, when detecting area B2 of the object 21 away from its center O, the size of the detection area J is adjusted to a first size D1; when detecting area B1 of the object 21 close to its center O, the size of the detection area J is adjusted to a second size D2, and in any direction, the size of the detection area J is less than or equal to the size of the detection spot Z.

[0095] Of course, the present invention is not limited thereto. In other embodiments, adjusting the detection area X for detecting the first signal light on the surface of the object to be detected 21 to the first size D1 includes: adjusting the size of the detection spot Z to the first size D1, and / or adjusting the size of the detection area J to the first size D1;

[0096] Adjusting the detection area X of the first signal light to the second size D2 includes: adjusting the size of the detection spot Z to the second size D2, and / or adjusting the size of the detection area J to the second size D2.

[0097] In some embodiments of the present invention, the size of the detection light spot Z can be adjusted by a beam expander assembly and an aperture assembly, and adjusting the size of the detection light spot Z to a first size D1 includes: controlling the first beam expander assembly 23 to enter the optical path of the detection light, and / or controlling the first aperture assembly 24 to leave the optical path of the detection light, so as to adjust the size of the detection light spot Z to the first size D1;

[0098] Adjusting the size of the detection light spot Z to the second size D2 includes: controlling the first beam expander 23 to leave the optical path of the detection light, and / or controlling the first aperture assembly 24 to enter the optical path of the detection light, so as to adjust the size of the detection light spot Z to the second size D2.

[0099] like Figure 5 As shown, when detecting the area B2 of the object 21 away from the center O thereof, the first beam expander 23 is controlled to enter the optical path of the detection light, and / or the first aperture assembly 24 is controlled to leave the optical path of the detection light, so as to adjust the size of the detection light spot Z to the first size D1. Figure 6 As shown, when detecting the area B1 of the object 21 away from the center O thereof, the first beam expander 23 is controlled to leave the optical path of the detection light, and / or the first aperture assembly 24 is controlled to enter the optical path of the detection light, so as to adjust the size of the detection light spot Z to the second size D2. Of course, the present invention is not limited to this, and in other embodiments, the size of the detection light spot Z can also be adjusted by other optical components.

[0100] In some embodiments of the present invention, adjusting the size of the detection area J to the first size D1 and adjusting the size of the detection area J to the second size D2 includes:

[0101] Controlling the size of the detection area of ​​interest of the detection module 22 to adjust the size of the detection area J to a first size D1 and to adjust the size of the detection area J to a second size D2;

[0102] The detection module 22 is used to detect the signal light in the detection area J on the surface of the object to be tested 21. The detection area of ​​interest of the detection module 22 refers to the AOI (Automated Optical Inspection) area of ​​the detection module 22. When the detection module 22 is set to the AOI mode, the detection module 22 only stores the signal light in the AOI area, that is, the detection module 22 detects the characteristic information of the surface of the object to be tested in the AOI area.

[0103] That is to say, in some embodiments of the present invention, the size of the detection area J can be adjusted by adjusting the size of the AOI area of ​​the detection module 22 itself, but the present invention is not limited to this. In other embodiments, the size of the detection area J can also be adjusted by optical components.

[0104] That is, in some other embodiments of the present invention, adjusting the size of the detection area J to the first size D1 includes: controlling the second aperture assembly to leave the optical path of the signal light to adjust the size of the detection area J to the first size D1;

[0105] Adjusting the size of the detection area J to the second size D2 includes:

[0106] The second aperture assembly is controlled to enter the optical path of the signal light to adjust the size of the detection area J to a second size D2.

[0107] like Figure 7 As shown, when detecting an area of ​​the object 21 away from its center O, the second aperture assembly is controlled to leave the optical path of the signal light to adjust the size of the detection area J to the first size D1. Figure 8 As shown, when detecting the area of ​​the object 21 away from the center O, the second aperture assembly is controlled to enter the optical path of the signal light to adjust the size of the detection area J to the second size D2. Of course, the present invention is not limited to this, and in other embodiments, the size of the detection area J can also be adjusted by other optical components.

[0108] In some embodiments of the present invention, Figure 4 As shown in FIG. 1 , the object to be tested 21 can be divided into two areas B1 and B2. However, the present invention is not limited thereto. In other embodiments, as shown in FIG. Fig. 9 As shown, in the direction away from the center O of the object to be tested 21, the object to be tested 21 includes a first area B1 to an Nth area B1 arranged in sequence. N , N is a natural number greater than or equal to 3, and adjusting the size of the area X for detecting the signal light on the surface of the object to be tested 21 includes:

[0109] In the first area B1 to the Nth area B N When testing in sequence, the size of the detection spot Z is increased in sequence;

[0110] and / or, in the first area B1 to the Nth area B N When the detection is performed sequentially, the size of the detection area J is increased sequentially.

[0111] That is to say, in some embodiments of the present invention, in the direction away from the center O of the object to be detected 21, the size of the detection area X of the first signal light can be gradually increased to gradually reduce the difference in scanning speed on both sides of the light spot to ensure the detection sensitivity.

[0112] The embodiment of the present invention also provides a detection device, such as Figure 3 As shown, including:

[0113] The light source module 20 is used to provide detection light, the detection light forms a detection light spot Z on the surface of the object to be detected 21, and the detection light forms a signal light through the object to be detected 21;

[0114] The detection module 22 is used to detect the first signal light in the detection area J on the surface of the object to be detected 21, and the detection light spot Z at least partially overlaps with the detection area J;

[0115] An adjustment module is used to adjust the size of the detection area X of the first signal light; wherein the adjustment module is used to adjust the detection area X of the first signal light to a first size D1 when detecting an area B2 of the object to be detected 21 away from its center O, and to adjust the detection area X of the first signal light to a second size D2 when detecting an area B1 of the object to be detected 21 close to its center O, wherein the first size D1 is greater than the second size D2 in a direction perpendicular to a scanning direction A of the detection module 22.

[0116] In the embodiment of the present invention, when detecting the area B2 of the object to be detected 21 away from the center O thereof, that is, when detecting the area with a small radius difference between the inner and outer sides of the detection spot, the detection area X of the first signal light is adjusted to a larger first size D1, which can not only make the scanning speed difference between the inner and outer sides of the detection spot smaller and ensure the detection sensitivity, but also improve the scanning speed and the detection speed; in addition, when detecting the area B1 of the object to be detected 21 close to the center O thereof, that is, when detecting the area with a large radius difference between the inner and outer sides of the detection spot, the detection area X of the first signal light is adjusted to a smaller second size D2 to reduce the scanning speed difference between the inner and outer sides of the detection spot and improve the detection sensitivity.

[0117] In some embodiments of the present invention, the adjustment module is used to adjust the size of the detection spot Z and / or the size of the detection area J. That is, in some embodiments of the present invention, the adjustment module adjusts the size X of the detection area for detecting the first signal light on the surface of the object to be detected 21 by adjusting the size of the detection spot Z and / or the size of the detection area J.

[0118] Based on this, in some embodiments of the present invention, the adjustment module is used to adjust the size of the detection spot Z to a first size D1 when detecting an area B2 of the object 21 away from its center O, and to adjust the size of the detection spot Z to a second size D2 when detecting an area B1 of the object 21 close to its center O, and in a direction perpendicular to the scanning direction A of the detection module 22, the first size D1 is larger than the second size D2, and in any direction, the size of the detection spot Z is less than or equal to the size of the detection area J;

[0119] And / or, the adjustment module is used to adjust the size of the detection area J to a first size D1 when detecting an area B2 of the object 21 away from its center O, and to adjust the size of the detection area J to a second size D2 when detecting an area B1 of the object 21 close to its center O. In a direction perpendicular to a scanning direction A of the detection module 22, the first size D1 is greater than the second size D2, and in any direction, the size of the detection area J is less than or equal to the size of the detection spot Z.

[0120] In the embodiment of the present invention, the scanning mode of the detection module 22 includes concentric circle scanning mode and spiral scanning mode. In the embodiment of the present invention, the scanning mode of the detection module 22 is only described as concentric circle scanning mode, but is not limited thereto, wherein the scanning direction A is the direction of any tangent line on the circumference.

[0121] In some embodiments of the present invention, Figure 4 As shown in FIG. 1 , the object to be tested 21 can be divided into two areas B1 and B2. However, the present invention is not limited thereto. In other embodiments, as shown in FIG. Fig. 9 As shown, in the direction away from the center O of the object to be tested 21, the object to be tested 21 includes a first area B1 to an Nth area B1 arranged in sequence. N , N is a natural number greater than or equal to 3;

[0122] The adjustment module is used to adjust the first area B1 to the Nth area B N When testing in sequence, the size of the detection spot Z is increased in sequence;

[0123] And / or, the adjustment module is used to adjust the first area B1 to the Nth area B N When the detection is performed sequentially, the size of the detection area J is increased sequentially.

[0124] That is to say, in some embodiments of the present invention, in the direction away from the center O of the object to be detected 21, the size of the detection area X of the first signal light can be gradually increased to gradually reduce the difference in scanning speed on both sides of the light spot and improve the detection sensitivity.

[0125] In some embodiments of the present invention, the adjustment module includes a light spot adjustment unit, an area adjustment unit and a control unit.

[0126] The light spot adjustment unit is located on the optical path of the detection light and is used to adjust the size of the detection light spot Z formed on the surface of the object to be detected 21;

[0127] The area adjustment unit is located on the optical path of the signal light and is used to adjust the size of the detection area J;

[0128] The control unit adjusts the size of the detection light spot Z by controlling the light spot adjustment unit, and adjusts the size of the detection area J by controlling the area adjustment unit.

[0129] Of course, the present invention is not limited thereto. In other embodiments of the present invention, the adjustment module includes a light spot adjustment unit and a control unit.

[0130] The light spot adjustment unit is located on the optical path of the detection light and is used to adjust the size of the detection light spot Z formed on the surface of the object to be detected 21;

[0131] The control unit adjusts the size of the detection light spot Z by controlling the light spot adjustment unit, and adjusts the size of the detection area J by controlling the size of the detection area of ​​interest of the detection module 22 .

[0132] Based on any of the above embodiments, in some embodiments of the present invention, Figure 5 and Figure 6 As shown, the light spot adjustment unit includes at least one first beam expansion component 23 and / or at least one first aperture component 24;

[0133] The control unit is used to control the first beam expander component 23 to enter the optical path of the detection light, and / or control the first aperture component 24 to leave the optical path of the detection light, so as to adjust the size of the detection light spot Z to the first size D1, and is used to control the first beam expander component 23 to leave the optical path of the detection light, and / or control the first aperture component 24 to enter the optical path of the detection light, so as to adjust the size of the detection light spot Z to the second size D2.

[0134] like Figure 5 As shown, when detecting the area B2 of the object 21 away from the center O thereof, the first beam expander 23 is controlled to enter the optical path of the detection light, and / or the first aperture assembly 24 is controlled to leave the optical path of the detection light, so as to adjust the size of the detection light spot Z to the first size D1. Figure 6As shown, when detecting the area B1 of the object 21 away from the center O thereof, the first beam expander 23 is controlled to leave the optical path of the detection light, and / or the first aperture assembly 24 is controlled to enter the optical path of the detection light, so as to adjust the size of the detection light spot Z to the second size D2. Of course, the present invention is not limited to this, and in other embodiments, the size of the detection light spot Z can also be adjusted by other optical components.

[0135] In some embodiments of the present invention, Figure 7 and Figure 8 As shown, when the adjustment module includes a regional adjustment unit, the regional adjustment unit includes at least one second aperture assembly 25;

[0136] The control unit is used to control the second aperture assembly 25 to leave the optical path of the signal light to adjust the size of the detection area J to the first size D1, and control the second aperture assembly 25 to enter the optical path of the signal light to adjust the size of the detection area J to the second size D2.

[0137] like Figure 7 As shown, when detecting an area of ​​the object 21 away from its center O, the second aperture assembly is controlled to leave the optical path of the signal light to adjust the size of the detection area J to the first size D1. Figure 8 As shown, when detecting the area of ​​the object 21 away from the center O, the second aperture assembly is controlled to enter the optical path of the signal light to adjust the size of the detection area J to the second size D2. Of course, the present invention is not limited to this, and in other embodiments, the size of the detection area J can also be adjusted by other optical components.

[0138] In some embodiments of the present invention, the detection module 22 includes a lens assembly and a detector, the lens assembly is used to collect signal light, the detector is used to detect the signal light collected by the lens assembly, and the second aperture assembly 25 is disposed on the photosensitive surface of the detector.

[0139] It should be noted that, in the embodiment of the present invention, the first beam expander assembly 23, the first aperture assembly 24 and the second aperture assembly 25 can be controlled to enter and exit the optical path by means of a motor and a support assembly, etc., which will not be elaborated herein.

[0140] Further, in some embodiments of the present invention, Fig.10 As shown, the first beam expansion assembly 23 includes a plurality of first beam expansion regions 230, and / or the first aperture assembly 24 includes a plurality of first light transmission regions 240;

[0141] The size of the light spot of the detection light after passing through different first beam expansion areas 230 is different, and the size of the light spot of the detection light after passing through different first light transmission areas 240 is different;

[0142] The control unit is also used to control different first beam expansion areas 230 to be located on the optical path of the detection light after controlling the first beam expansion component 23 to enter the optical path of the detection light, and / or to control different first light-transmitting areas 240 to be located on the optical path of the detection light after controlling the first aperture component 24 to enter the optical path of the detection light, so as to obtain different detection light spot Z sizes.

[0143] Further, in some embodiments of the present invention, Fig.10 As shown, the second aperture assembly 25 includes a plurality of second light-transmitting areas 250;

[0144] The size of the light spot of the signal light is different after passing through different second light-transmitting areas 250;

[0145] The control unit is further used to control different second light-transmitting areas 250 to be located on the optical path of the signal light after controlling the second aperture assembly 25 to enter the optical path of the signal light, so as to obtain different sizes of the detection area J.

[0146] In some embodiments of the present invention, not only can the size of the detection area J be adjusted by the second aperture assembly 25, but also, when the image field of the detection device is smaller than the target surface of the detector, the second aperture assembly 25 can effectively reduce the out-of-focus background light collected by the detector, thereby improving image contrast.

[0147] It should be noted that, in the embodiment of the present invention, different first beam expansion areas 230, first light transmission areas 240 or second light transmission areas 250 can be made to enter the optical path by controlling the first beam expansion component 23, the first aperture component 24 or the second aperture component 25 to rotate around the center. Of course, the present invention is not limited thereto. In other embodiments, other methods can be used to adjust the size of the detection spot Z or the detection area J, which will not be described in detail here.

[0148] In this specification, each embodiment is described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the embodiments can be referred to each other. For the device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part.

[0149] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A detection method, characterized in that: include: Providing detection light, wherein the detection light forms a detection light spot on the surface of the object to be detected, and the detection light forms a signal light through the object to be detected; Detecting the first signal light in a detection area on the surface of the object to be detected, wherein the detection area at least partially overlaps with the detection light spot; Adjusting the size of the detection area of ​​the first signal light according to the area where the object to be detected is detected; Wherein, adjusting the size of the detection area of ​​the first signal light includes: When detecting an area of ​​the object to be detected that is away from the center, the detection area of ​​the first signal light is adjusted to a first size. When detecting an area of ​​the object to be detected that is close to the center, the detection area of ​​the first signal light is adjusted to a second size. In a direction perpendicular to the scanning direction, the first size is larger than the second size.

2. The method according to claim 1, characterized in that Adjusting the size of the detection area of ​​the first signal light includes: The size of the detection light spot is adjusted and / or the size of the detection area is adjusted.

3. The method according to claim 1, characterized in that Before providing the detection light, the method further comprises: The center of the detection area is overlapped with the center of the detection light spot.

4. The method according to claim 3, characterized in that When detecting an area of ​​the object to be detected that is far from the center thereof, adjusting the detection area of ​​the first signal light to a first size, and when detecting an area of ​​the object to be detected that is close to the center thereof, adjusting the detection area of ​​the signal light to a second size includes: When detecting an area of ​​the object to be detected that is far from the center, the size of the detection light spot is adjusted to a first size, and when detecting an area of ​​the object to be detected that is close to the center, the size of the detection light spot is adjusted to a second size, and in any direction, the size of the detection light spot is less than or equal to the size of the detection area; And / or, when detecting an area away from the center of the object to be detected, the size of the detection area is adjusted to a first size; when detecting an area close to the center of the object to be detected, the size of the detection area is adjusted to a second size, and in any direction, the size of the detection area is less than or equal to the size of the detection spot.

5. The method according to claim 4, characterized in that Adjusting the size of the detection light spot to the first size includes: controlling a first beam expansion component to enter the optical path of the detection light, and / or controlling a first aperture component to leave the optical path of the detection light, so as to adjust the size of the detection light spot to the first size; Adjusting the size of the detection light spot to a second size includes: controlling the first beam expander to leave the optical path of the detection light, and / or controlling the first aperture assembly to enter the optical path of the detection light, so as to adjust the size of the detection light spot to the second size.

6. The method according to claim 4, characterized in that Adjusting the size of the detection area to a first size, and adjusting the size of the detection area to a second size comprises: Controlling the size of a detection area of ​​interest to the detection module to adjust the size of the detection area to a first size and to adjust the size of the detection area to a second size; Wherein, the detection module is used to detect the signal light in the detection area on the surface of the object to be detected.

7. The method according to claim 4, characterized in that Adjusting the size of the detection area to the first size includes: controlling the second aperture assembly to leave the optical path of the signal light to adjust the size of the detection area to the first size; Adjusting the size of the detection area to a second size includes: The second aperture assembly is controlled to enter the optical path of the signal light to adjust the size of the detection area to a second size.

8. The method according to claim 1, characterized in that In a direction away from the center of the object to be detected, the object to be detected includes a first area to an Nth area arranged in sequence, N is a natural number greater than or equal to 2, and adjusting the size of the detection area of ​​the first signal light includes: When the first area to the Nth area are detected in sequence, the size of the detection light spot is increased in sequence; And / or, when the first area to the Nth area are detected sequentially, the size of the detection area is increased sequentially.

9. A detection device, characterized in that: include: A light source module, used for providing detection light, wherein the detection light forms a detection light spot on the surface of the object to be detected, and the detection light forms a signal light through the object to be detected; A detection module, used for detecting the first signal light in a detection area on the surface of the object to be detected, wherein the detection light spot at least partially overlaps with the detection area; An adjustment module is used to adjust the size of the detection area of ​​the first signal light according to the area where the object to be detected is detected; wherein the adjustment module is used to adjust the detection area of ​​the first signal light to a first size when detecting an area of ​​the object to be detected away from its center, and to adjust the detection area of ​​the first signal light to a second size when detecting an area of ​​the object to be detected close to its center, and the first size is larger than the second size in a direction perpendicular to the scanning direction of the detection module.

10. The detection device according to claim 9, characterized in that: The adjustment module is used to adjust the size of the detection light spot and / or adjust the size of the detection area; The adjustment module is used to adjust the size of the detection light spot to a first size when detecting an area of ​​the object to be detected that is far from the center thereof, and to adjust the size of the detection light spot to a second size when detecting an area of ​​the object to be detected that is close to the center thereof, and in a direction perpendicular to a scanning direction of the detection module, the first size is larger than the second size, and in any direction, the size of the detection light spot is larger than and smaller than the size of the detection area; And / or, the adjustment module is used to adjust the size of the detection area to a first size when detecting an area of ​​the object to be detected away from its center, and to adjust the size of the detection area to a second size when detecting an area of ​​the object to be detected close to its center, and in a direction perpendicular to the scanning direction of the detection module, the first size is larger than the second size, and in any direction, the size of the detection area is larger than and smaller than the size of the detection spot.

11. The detection device according to claim 9, characterized in that: The scanning mode of the detection module includes a concentric circle scanning mode and a spiral scanning mode.

12. The detection device according to claim 9, characterized in that: The adjustment module includes a light spot adjustment unit, an area adjustment unit and a control unit; The light spot adjustment unit is located on the optical path of the detection light and is used to adjust the size of the detection light spot formed on the surface of the object to be detected; The area adjustment unit is located on the optical path of the signal light and is used to adjust the size of the detection area; The control unit adjusts the size of the detection light spot by controlling the light spot adjustment unit, and adjusts the size of the detection area by controlling the area adjustment unit.

13. The detection device according to claim 9, characterized in that: The adjustment module includes a light spot adjustment unit and a control unit; The light spot adjustment unit is located on the optical path of the detection light and is used to adjust the size of the detection light spot formed on the surface of the object to be detected; The control unit adjusts the size of the detection light spot by controlling the light spot adjustment unit, and adjusts the size of the detection area by controlling the size of the detection area of ​​interest of the detection module.

14. The detection device according to claim 12 or 13, characterized in that: The light spot adjustment unit includes at least one first beam expansion component and / or at least one first aperture component; The control unit is used to control the first beam expander assembly to enter the optical path of the detection light, and / or to control the first aperture assembly to leave the optical path of the detection light, so as to adjust the size of the detection light spot to a first size, and is used to control the first beam expander assembly to leave the optical path of the detection light, and / or to control the first aperture assembly to enter the optical path of the detection light, so as to adjust the size of the detection light spot to a second size.

15. The detection device according to claim 14, characterized in that: The first beam expansion assembly includes a plurality of first beam expansion areas, and / or the first aperture assembly includes a plurality of first light transmission areas; The size of the light spot of the detection light after passing through different first beam expansion areas is different, and the size of the light spot of the detection light after passing through different first light transmission areas is different; The control unit is also used to control different first beam expansion areas to be located on the optical path of the detection light after controlling the first beam expansion component to enter the optical path of the detection light, and / or to control different first light-transmitting areas to be located on the optical path of the detection light after controlling the first aperture component to enter the optical path of the detection light, so as to obtain different detection spot sizes.

16. The detection device according to claim 12, characterized in that: The area adjustment unit includes at least one second aperture assembly; The control unit is used to control the second aperture component to leave the optical path of the signal light to adjust the size of the detection area to a first size, and control the second aperture component to enter the optical path of the signal light to adjust the size of the detection area to a second size.

17. The detection device according to claim 16, characterized in that: The detection module includes a lens assembly and a detector. The lens assembly is used to collect the signal light. The detector is used to detect the signal light collected by the lens assembly. The second aperture assembly is arranged on the photosensitive surface of the detector.

18. The detection device according to claim 16, characterized in that The second aperture assembly includes a plurality of second light-transmitting areas; The size of the light spot of the signal light is different after passing through different second light-transmitting areas; The control unit is further used to control different second light-transmitting areas to be located on the optical path of the signal light after controlling the second aperture assembly to enter the optical path of the signal light, so as to obtain different detection area sizes.

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