Method, device, equipment and computer storage medium for detecting coaxiality of single crystal furnace

Abstract

The embodiment of the present invention discloses a method, device, equipment and computer storage medium for detecting the coaxiality of a single crystal furnace; the method comprises: capturing a first inter-pixel distance between scale lines in the circumferential direction of the centering disk from an image of the centering disk acquired by a CCD camera; determining a corresponding relationship between the actual distance and the first inter-pixel distance based on the first inter-pixel distance and the corresponding actual distance between the scale lines in the circumferential direction of the centering disk; obtaining a second inter-pixel distance between the center of the first pixel of the centering disk and the center of the second pixel corresponding to a light spot irradiated by a laser beam on the centering disk; and determining a second actual distance between the center of a weight and the center of a furnace body based on the second inter-pixel distance and the corresponding relationship.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of semiconductor technology, and in particular to a method, device, equipment and computer storage medium for detecting the coaxiality of a single crystal furnace. Background Art

[0002] Before the actual production of the single crystal furnace, a series of debugging is required for the single crystal furnace. According to the requirements of the crystal pulling process, the upper and lower transmissions must be aligned during debugging to ensure that the coaxiality of the seed crystal axis and the crucible axis is lower than a certain standard value. At present, the debugging and alignment adopts the naked eye estimation method, that is, after hanging a heavy hammer on the seed crystal rope, the heavy hammer is lowered to the place where the seed crystal position is approximately in contact with the graphite tray, and people evaluate from the external observation window. This method has a large error in the estimation of the value because the distance between people and the observed object is far and the field of vision is limited. In addition, during the measurement process, the heavy hammer will make a circular motion near the center of the circle, which makes it impossible for humans to observe accurately. This directly affects the quality of the crystal rod. Summary of the invention

[0003] In view of this, the embodiments of the present invention hope to provide a method, device, equipment and computer storage medium for detecting the coaxiality of a single crystal furnace; the problems of poor accuracy and difficulty in observation in the existing methods for detecting the coaxiality of a single crystal furnace can be solved, thereby improving the quality of single crystal silicon rods.

[0004] The technical solution of the embodiment of the present invention is achieved as follows:

[0005] In a first aspect, an embodiment of the present invention provides a method for detecting the coaxiality of a single crystal furnace, the method comprising:

[0006] Capturing a first inter-pixel distance between scale lines in a circumferential direction of the centering disk from an image of the centering disk acquired by a CCD camera;

[0007] Based on the first inter-pixel distance and the actual distance between the corresponding scale lines in the circumferential direction of the centering disk, determining a corresponding relationship between the actual distance and the first inter-pixel distance;

[0008] Acquire a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk;

[0009] Based on the second inter-pixel distance and the corresponding relationship, a second actual distance between the center of the weight and the center of the furnace body is determined; wherein the second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

[0010] In a second aspect, an embodiment of the present invention provides a device for detecting the coaxiality of a single crystal furnace, the device comprising: a capturing part, a first determining part, an acquiring part, and a second determining part; wherein:

[0011] The capturing part is configured to capture a first inter-pixel distance between scale lines in a circumferential direction of the centering disk from the centering disk image acquired by the CCD camera;

[0012] The first determining section is configured to determine a correspondence between the first inter-pixel distance and the first inter-pixel distance based on the actual distance between the first inter-pixel distance and the corresponding scale line in the circumferential direction of the centering disk;

[0013] The acquisition part is configured to acquire a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk;

[0014] The second determination part is configured to determine the second actual distance between the center of the weight and the center of the furnace body based on the second pixel distance and the corresponding relationship; wherein the second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

[0015] In a third aspect, an embodiment of the present invention provides a device for detecting the coaxiality of a single crystal furnace, the device being applied to a single crystal furnace, the device comprising: a weight disposed below a seed crystal axis, a laser generator threadedly connected to the weight, a CCD camera, a memory, and a processor; wherein,

[0016] The memory is used to store a computer program that can be run on the processor;

[0017] The processor is configured to perform the following steps when running the computer program:

[0018] Capturing a first inter-pixel distance between scale lines in a circumferential direction of the centering disk from an image of the centering disk acquired by a CCD camera;

[0019] Based on the first inter-pixel distance and the actual distance between the corresponding scale lines in the circumferential direction of the centering disk, determining a corresponding relationship between the actual distance and the first inter-pixel distance;

[0020] Acquire a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk;

[0021] Based on the second inter-pixel distance and the corresponding relationship, a second actual distance between the center of the weight and the center of the furnace body is determined; wherein the second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

[0022] In a fourth aspect, an embodiment of the present invention provides a computer storage medium, wherein the computer storage medium stores a program for detecting the coaxiality of a single crystal furnace, and when the program for detecting the coaxiality of a single crystal furnace is executed by at least one processor, the method steps for detecting the coaxiality of a single crystal furnace described in the first aspect are implemented.

[0023] The embodiment of the present invention provides a method, device, equipment and computer storage medium for detecting the coaxiality of a single crystal furnace; the method obtains the correspondence between the first actual distance between the scale lines in the circumferential direction of the centering disk and the first pixel distance collected by the CCD camera, and then determines the coaxiality deviation value of the single crystal furnace through the second pixel distance between the first pixel center of the centering disk and the second pixel center corresponding to the spot irradiated by the laser beam on the centering disk and the above correspondence. The method solves the problems of poor accuracy and difficulty in observation in the existing methods for detecting the coaxiality of single crystal furnaces, and improves the quality of single crystal silicon rods. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of a single crystal furnace structure provided by an embodiment of the present invention;

[0025] Figure 2 A schematic diagram of the position of a light spot on a centering disk when a heavy hammer is stationary provided in an embodiment of the present invention;

[0026] Figure 3 A schematic diagram of the position of a light spot on a centering disk when a heavy hammer swings provided in an embodiment of the present invention;

[0027] Figure 4 A schematic flow chart of a method for detecting the coaxiality of a single crystal furnace provided in an embodiment of the present invention;

[0028] Figure 5 A schematic diagram of the composition of a device for detecting the coaxiality of a single crystal furnace provided in an embodiment of the present invention;

[0029] Figure 6 A schematic diagram of the hardware structure of a device for detecting the coaxiality of a single crystal furnace provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0031] See also Figure 1 , which shows a single crystal furnace 1 that can implement the technical solution of the embodiment of the present invention, the single crystal furnace 1 may include: a furnace body 101, a guide tube 102, a crucible 103, a crucible tray 104 for carrying the crucible 103, and a control component 105 for driving the crucible 103 to move in the vertical direction; it should be noted that, Figure 1The structure of the single crystal furnace 1 shown is not specifically limited. In order to clearly illustrate the technical solution of the embodiment of the present invention, other components required for implementing the Czochralski method to manufacture single crystal silicon are omitted, such as a heater for heating the polysilicon raw material contained in the crucible 103. Figure 1 The single crystal furnace 1 shown may also be provided with an observation window 106 on the upper portion of the furnace body 101 for an optical observation instrument 107 , such as a charge coupled device (CCD) camera, to observe the interior of the furnace body 101 .

[0032] It can be understood that in order to detect the coaxiality of the single crystal furnace 1, a weight 109 is hung below the seed crystal axis 108, and a laser generator 110 is arranged below the weight 109, wherein: the laser generator 110 is threadedly connected to the weight 109, and is lowered to a suitable position for measurement through the seed crystal axis 108, and the laser beam emitted by the laser generator 110 is irradiated to the centering disk 111 placed horizontally on the crucible tray 104 to form a light spot; it can be understood that if the weight 109 is in a stationary state when detecting the coaxiality of the single crystal furnace 1, that is, the weight 109 does not make a circular motion around the fixed point Q of the seed crystal axis 108, the laser beam emitted by the laser generator 110 is irradiated to the light spot p of the centering disk 111, as shown in the figure. Figure 2 As shown; on the other hand, Figure 3 As shown, when the coaxiality of the single crystal furnace 1 is detected, the weight 109 is in a swinging state, that is, when the weight 109 makes a circular motion around the fixed point Q of the seed crystal axis 108, the laser beam emitted by the laser generator 110 irradiates the area where multiple light spots on the surface of the centering disk 111 are located, and can fit to form a circular area (the dotted elliptical area in the figure). It should be noted that the multiple scale lines on the centering disk 111 are evenly engraved in the circumferential direction of the centering disk 111, and the actual distance between adjacent scale lines is L.

[0033] According to the structural example of the single crystal furnace 1 described above, the embodiment of the present invention hopes to provide a solution for detecting the coaxiality of the single crystal furnace, obtain the correspondence between the actual distance between the scale lines in the circumferential direction of the centering disk 111 and the distance between pixels collected by the CCD camera in advance, and then obtain the actual distance between the center of the weight 109 and the center of the furnace body 101 through the pixel distance between the pixel center point of the centering disk 111 and the pixel center point corresponding to the light spot irradiated by the laser beam on the centering disk 111 and the above correspondence, and use the actual distance to characterize the coaxiality deviation value of the single crystal furnace 1. In this way, the problems of poor accuracy and difficulty in observation existing in the coaxiality detection method of the single crystal furnace 1 can be solved, so as to prepare a single crystal silicon rod with a central axis, a seed crystal end cone and a tail end cone, and a cylinder with a nearly constant diameter between the seed crystal end cone and the tail end cone, thereby improving the quality of the single crystal silicon rod. See. Figure 4, which shows a method for detecting the coaxiality of a single crystal furnace provided by an embodiment of the present invention, the method may include:

[0034] S401, capturing a first inter-pixel distance between scale lines in a circumferential direction of the centering disk from an image of the centering disk acquired by a CCD camera;

[0035] S402, based on the first inter-pixel distance and the actual distance between the corresponding scale lines in the circumferential direction of the centering disk, determining a corresponding relationship between the actual distance and the first inter-pixel distance;

[0036] S403, obtaining a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk;

[0037] S404. Determine a second actual distance between the center of the weight and the center of the furnace body based on the second inter-pixel distance and the corresponding relationship; wherein the second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

[0038] For the above technical solution, steps S401 and S402 can be considered as the process of pre-testing to generate a corresponding relationship before actually detecting the coaxiality of the single crystal furnace 1. Steps S403 and S404 can be considered as the actual measurement process of detecting the coaxiality of the single crystal furnace 1. It can be seen that by controlling the accuracy of generating the corresponding relationship, the accuracy of the actual measurement process can be controlled. Based on this, compared with the current related technologies, the embodiment of the present invention can improve the measurement accuracy of detecting the coaxiality of the single crystal furnace 1, thereby improving the quality of the single crystal silicon rod.

[0039] for Figure 4 In some possible implementations of the technical solution shown, determining the corresponding relationship between the actual distance and the first inter-pixel distance based on the first inter-pixel distance and the corresponding actual distance between the scale lines in the circumferential direction of the centering disk includes:

[0040] Based on the captured first inter-pixel distance l between adjacent scale lines in the circumferential direction of the centering disk and the actual distance L between the adjacent scale lines, the corresponding relationship between the actual distance L and the first inter-pixel distance l is obtained according to the following formula:

[0041] K=L / l (1).

[0042] It is understandable that in order to ensure the accuracy of the generated corresponding relationship K, in the specific implementation process, the corresponding relationship K can also be determined by capturing the first pixel distance l multiple times and then performing an average calculation, which will not be described in detail in the embodiment of the present invention.

[0043] for Figure 4 In some possible implementations of the technical solution shown, obtaining a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a spot on the centering disk irradiated by the laser beam includes:

[0044] Capturing the coordinates of a first pixel center point of the centering disk from the centering disk image;

[0045] Acquire the coordinates of the second pixel center point corresponding to the light spot irradiated by the laser beam on the centering disk from the centering disk image;

[0046] A second inter-pixel distance d between the first pixel center point and the second pixel center point is calculated based on the coordinates of the first pixel center point and the coordinates of the second pixel center point.

[0047] For example, after the image of the centering disk 111 is captured by a CCD camera, the coordinates O1 (x1, y1) of the center point of the first pixel of the centering disk 111 can be captured from the captured image; of course, the coordinates O2 (x2, y2) of the center point of the second pixel corresponding to the spot irradiated by the laser beam on the centering disk 111 can also be obtained from the captured image; after obtaining the coordinates O1 (x1, y1) of the center point of the first pixel and the coordinates O2 (x2, y2) of the center point of the second pixel, the second pixel distance between the center point of the first pixel and the center point of the second pixel can be calculated.

[0048] For the above possible implementations, in some examples, obtaining the coordinates of the center point of a second pixel corresponding to the spot irradiated by the laser beam on the centering disk includes:

[0049] When the weight is stationary, the position coordinates of the light spot on the centering disk image are used to represent the coordinates of the second pixel center point corresponding to the light spot.

[0050] For example, if Figure 2 As shown in FIG. 1 , when the weight 109 is in a stationary state, the position coordinates of a light spot p can be captured from the image of the centering plate 111 collected by the CCD camera 107. Therefore, when the weight 109 is stationary, the position coordinates of the light spot p can be used. p (x p ,y p ) is used to characterize the coordinates O2 (x2, y2) of the center point of the second pixel to calculate the coaxiality deviation of the single crystal furnace 1.

[0051] For the above possible implementations, in some examples, obtaining the coordinates of the center point of a second pixel corresponding to the spot irradiated by the laser beam on the centering disk includes:

[0052] When the weight swings, the position coordinates of n light spots on the centering disk image are captured; wherein n≥3;

[0053] According to the position coordinates of the n light spots, the coordinates of the center points of the fitted circular areas where the n light spots are located are obtained;

[0054] Based on the m groups of coordinates of the center points of the fitted circular areas, the coordinates of the center point of the second pixel are obtained; wherein m≥1.

[0055] Specifically, if Figure 3 As shown in FIG. 1 , when the weight 109 is in a swinging state, the position coordinates of n light spots can be captured from the image of the centering plate 111 collected by the CCD camera 107, wherein the position coordinate of the i-th light spot is O pi (x pi ,y pi ), 3≤i≤n. In order to determine the center of the weight 109, in the embodiment of the present invention, the coordinates O of the center point of the fitting circular area where the n light spots are located can be used. p ′(x p ′,y p ′) represents the center of the weight 109.

[0056] It can be understood that after obtaining three non-repetitive spot position coordinates, the center coordinates of the corresponding circular area can be fitted. p ′(x p ′,y p ′). Generally, the least square method can be used to fit the center coordinates of the circular area. The mathematical equation used for fitting is the circle equation. The fitting equation is shown below:

[0057] (x pi -x p ′) 2 +(y pi -y p ′) 2 =r 2

[0058] Where r is the radius of the circular area to be fitted.

[0059] There are three unknowns in the above formula: r, x p ′ and y p ′, therefore, based on the position coordinates of the three light spots that have been determined, for example Figure 3 O p1 (x p1 ,y p1 ), O p2 (x p2 ,y p2 ) and O p3 (xp3 ,y p3 ), the coordinates of the center point of the circular area can be determined p ′(x p ′,y p ′).

[0060] Of course, in order to ensure the detection accuracy, in the actual implementation process, for example, the coordinates of the center points of M groups of fitted circular areas can be obtained to perform an average operation to obtain the coordinates O2 (x2, y2) of the center point of the second pixel. Specifically, the coordinates O2 (x2, y2) of the center point of the second pixel can be expressed as:

[0061]

[0062] Among them, x pm ' represents the abscissa of the center of the fitted circular area of ​​the mth group; y pm ' represents the ordinate of the center of the fitted circular area of ​​the mth group; 1≤m≤M.

[0063] for Figure 4 In some possible implementations of the technical solution shown, determining the second actual distance between the center of the weight and the center of the furnace body based on the second inter-pixel distance and the corresponding relationship includes:

[0064] Based on the second inter-pixel distance d and the corresponding relationship K, the second actual distance between the center of the weight and the center of the furnace body is obtained according to the following formula:

[0065] D=Kd (2).

[0066] It can be understood that the second actual distance calculated according to the formula D=Kd can represent the actual distance between the center of the weight 109 and the center of the furnace body 101 of the single crystal furnace 1, that is, the coaxiality deviation of the single crystal furnace 1.

[0067] Based on the same inventive concept as the above technical solution, see Figure 5 , which shows a device 50 for detecting the coaxiality of a single crystal furnace provided by an embodiment of the present invention, the device 50 comprises: a capturing part 501, a first determining part 502, an acquiring part 503 and a second determining part 504; wherein,

[0068] The capturing part 501 is configured to capture the first pixel distance between the scale lines in the circumferential direction of the centering disk from the centering disk image acquired by the CCD camera;

[0069] The first determining part 502 is configured to determine the correspondence between the actual distance and the first inter-pixel distance based on the first inter-pixel distance and the corresponding actual distance between the scale lines in the circumferential direction of the centering disk;

[0070] The acquisition part 503 is configured to acquire a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk;

[0071] The second determination part 504 is configured to determine the second actual distance between the center of the weight and the center of the furnace body based on the second pixel distance and the corresponding relationship; wherein the second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

[0072] In some examples, the first determining portion 502 is configured to:

[0073] Based on the captured first inter-pixel distance l between adjacent scale lines in the circumferential direction of the centering disk and the actual distance L between the adjacent scale lines, the corresponding relationship between the actual distance L and the first inter-pixel distance l is obtained according to the following formula:

[0074] K=L / l (1).

[0075] In some examples, the obtaining portion 503 is configured to:

[0076] Capturing the coordinates of a first pixel center point of the centering disk from the centering disk image;

[0077] Acquire the coordinates of the second pixel center point corresponding to the light spot irradiated by the laser beam on the centering disk from the centering disk image;

[0078] A second inter-pixel distance d between the first pixel center point and the second pixel center point is calculated based on the coordinates of the first pixel center point and the coordinates of the second pixel center point.

[0079] In some examples, the obtaining portion 503 is further configured to:

[0080] When the weight is stationary, the position coordinates of the light spot on the centering disk image are used to represent the coordinates of the second pixel center point corresponding to the light spot.

[0081] In some examples, the obtaining portion 503 is further configured to:

[0082] When the weight swings, the position coordinates of n light spots on the centering disk image are captured; wherein n≥3;

[0083] According to the position coordinates of the n light spots, the coordinates of the center points of the fitted circular areas where the n light spots are located are obtained;

[0084] Based on the coordinates of the center points of the M groups of fitted circular areas, the coordinates of the center point of the second pixel are obtained; wherein M≥1.

[0085] In some examples, the second determining portion 504 is configured to:

[0086] Based on the second inter-pixel distance d and the corresponding relationship K, the second actual distance between the center of the weight and the center of the furnace body is obtained according to the following formula:

[0087] D=Kd (2).

[0088] It can be understood that in this embodiment, "part" can be part of a circuit, part of a processor, part of a program or software, etc., and of course it can also be a unit, a module, or a non-modular one.

[0089] In addition, each component in this embodiment may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above integrated unit may be implemented in the form of hardware or in the form of software function modules.

[0090] If the integrated unit is implemented in the form of a software function module and is not sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this embodiment is essentially or the part that contributes to the prior art or the whole or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions for a computer device (which can be a personal computer, server, or network device, etc.) or a processor to perform all or part of the steps of the method described in this embodiment. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM, Read Only Memory), random access memory (RAM, Random Access Memory), disk or optical disk and other media that can store program codes.

[0091] Therefore, this embodiment provides a computer storage medium, which stores a program for detecting the coaxiality of a single crystal furnace. When the program for detecting the coaxiality of a single crystal furnace is executed by at least one processor, the method steps for detecting the melt level position described in the aforementioned technical solution are implemented.

[0092] According to the above-mentioned device 50 for detecting the coaxiality of the single crystal furnace and the computer storage medium, see Figure 6, which shows the specific hardware structure of a device 60 for detecting the coaxiality of a single crystal furnace provided by an embodiment of the present invention, which can implement the above-mentioned device 50 for detecting the coaxiality of a single crystal furnace. The device 60 can be applied to Figure 1 In the single crystal furnace 1 shown, the device 60 may include: a weight 109 disposed below the seed crystal axis 108, a laser generator 110 threadedly connected to the weight 109, a CCD camera 107, a memory 601, and a processor 602; except for the weight 109 and the laser generator 110; the remaining components may be coupled together via a bus system 603. It is understandable that the bus system 603 is used to achieve connection and communication between these components. In addition to the data bus, the bus system 603 also includes a power bus, a control bus, and a status signal bus. However, for the sake of clarity, in Figure 6 In FIG. 6 , various buses are labeled as bus system 603. Among them,

[0093] Capturing a first inter-pixel distance between scale lines in a circumferential direction of the centering disk from an image of the centering disk acquired by a CCD camera;

[0094] Based on the first inter-pixel distance and the actual distance between the corresponding scale lines in the circumferential direction of the centering disk, determining a corresponding relationship between the actual distance and the first inter-pixel distance;

[0095] Acquire a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk;

[0096] Based on the second inter-pixel distance and the corresponding relationship, a second actual distance between the center of the weight and the center of the furnace body is determined; wherein the second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

[0097] It can be understood that the memory 601 in the embodiment of the present invention can be a volatile memory or a non-volatile memory, or can include both volatile and non-volatile memories. Among them, the non-volatile memory can be a read-only memory (ROM), a programmable read-only memory (PROM), an erasable programmable read-only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), or a flash memory. The volatile memory can be a random access memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available, such as static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDRSDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous link dynamic random access memory (SLDRAM) and direct RAM bus random access memory (DRRAM). The memory 601 of the systems and methods described herein is intended to include, but is not limited to, these and any other suitable types of memory.

[0098] The processor 602 may be an integrated circuit chip with signal processing capabilities. In the implementation process, each step of the above method can be completed by the hardware integrated logic circuit or software instructions in the processor 602. The above processor 602 may be a general processor, a digital signal processor (Digital Signal Processor, DSP), an application specific integrated circuit (Application Specific Integrated Circuit, ASIC), a field programmable gate array (Field Programmable Gate Array, FPGA) or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components. The methods, steps and logic block diagrams disclosed in the embodiments of the present invention can be implemented or executed. The general processor may be a microprocessor or the processor may also be any conventional processor, etc. The steps of the method disclosed in the embodiment of the present invention can be directly embodied as a hardware decoding processor to be executed, or the hardware and software modules in the decoding processor are combined to be executed. The software module can be located in a mature storage medium in the field such as a random access memory, a flash memory, a read-only memory, a programmable read-only memory or an electrically erasable programmable memory, a register, etc. The storage medium is located in the memory 601, and the processor 602 reads the information in the memory 601 and completes the steps of the above method in combination with its hardware.

[0099] It is understood that the embodiments described herein may be implemented in hardware, software, firmware, middleware, microcode, or a combination thereof. For hardware implementation, the processing unit may be implemented in one or more application specific integrated circuits (ASIC), digital signal processors (DSP), digital signal processing devices (DSPD), programmable logic devices (PLD), field programmable gate arrays (FPGA), general purpose processors, controllers, microcontrollers, microprocessors, other electronic units for performing the functions described in the present application, or a combination thereof.

[0100] For software implementation, the techniques described herein can be implemented by modules (e.g., procedures, functions, etc.) that perform the functions described herein. The software code can be stored in a memory and executed by a processor. The memory can be implemented in the processor or outside the processor.

[0101] Specifically, the processor 602 is also configured to execute the method steps for detecting the coaxiality of the single crystal furnace described in the aforementioned technical solution when running the computer program, which will not be repeated here.

[0102] It should be noted that the technical solutions described in the embodiments of the present invention can be combined arbitrarily without conflict.

[0103] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art who is familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A method for detecting the coaxiality of a single crystal furnace, characterized in that: The method comprises: Capturing a first inter-pixel distance between scale lines in a circumferential direction of the centering disk from an image of the centering disk acquired by a CCD camera; Based on the first inter-pixel distance and the actual distance between the corresponding scale lines in the circumferential direction of the centering disk, determining the corresponding relationship between the actual distance and the first inter-pixel distance; wherein, based on the first inter-pixel distance and the actual distance between the corresponding scale lines in the circumferential direction of the centering disk, determining the corresponding relationship between the actual distance and the first inter-pixel distance comprises: Based on the ratio of the actual distance to the first distance between pixels, acquiring a corresponding relationship between the actual distance and the first distance between pixels; Acquire a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk; Based on the second inter-pixel distance and the corresponding relationship, determining the second actual distance between the center of the weight and the center of the furnace body; wherein, based on the second inter-pixel distance and the corresponding relationship, determining the second actual distance between the center of the weight and the center of the furnace body comprises: Based on the product of the second inter-pixel distance and the corresponding relationship, obtaining a second actual distance between the center of the weight and the center of the furnace body; The second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

2. The method according to claim 1, characterized in that: The step of obtaining a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk comprises: Capturing the coordinates of a first pixel center point of the centering disk from the centering disk image; Acquire the coordinates of the second pixel center point corresponding to the light spot irradiated by the laser beam on the centering disk from the centering disk image; The second pixel distance between the first pixel center point and the second pixel center point is calculated based on the coordinates of the first pixel center point and the coordinates of the second pixel center point. .

3. The method according to claim 2, characterized in that The step of obtaining the coordinates of the center point of a second pixel corresponding to the spot on the centering disk irradiated by the laser beam comprises: When the weight is stationary, the position coordinates of the light spot on the centering disk image are used to represent the coordinates of the second pixel center point corresponding to the light spot.

4. The method according to claim 2, characterized in that: The step of obtaining the coordinates of the center point of a second pixel corresponding to the spot on the centering disk irradiated by the laser beam comprises: When the weight swings, the centering disk image is captured. n The position coordinates of the light spots; wherein, n ≥3; according to n The position coordinates of the light spots are obtained n The coordinates of the center point of the fitted circular area where the light spot is located; based on M The coordinates of the center point of the fitted circular area are obtained to obtain the coordinates of the center point of the second pixel; wherein, M ≥1.

5. A device for detecting the coaxiality of a single crystal furnace, characterized in that: The device comprises: a capturing part, a first determining part, an acquiring part, and a second determining part; wherein, The capturing part is configured to capture a first inter-pixel distance between scale lines in a circumferential direction of the centering disk from the centering disk image acquired by the CCD camera; The first determining section is configured to determine a correspondence between the first inter-pixel distance and the first inter-pixel distance based on the first inter-pixel distance and the corresponding actual distance between the scale lines in the circumferential direction of the centering disk; The first determining part is configured to obtain a corresponding relationship between the actual distance and the first distance between pixels based on a ratio of the actual distance to the first distance between pixels; The acquisition part is configured to acquire a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk; The second determining part is configured to determine a second actual distance between the center of the weight and the center of the furnace body based on the second inter-pixel distance and the corresponding relationship; The second determining part is configured to obtain a second actual distance between the center of the weight and the center of the furnace body based on the product of the second distance between pixels and the corresponding relationship; The second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

6. A device for detecting the coaxiality of a single crystal furnace, characterized in that: The device is applied to a single crystal furnace, and comprises: a weight disposed below the seed crystal axis, a laser generator threadedly connected to the weight, a CCD camera, a memory, and a processor; wherein, The memory is used to store a computer program that can be run on the processor; The processor is configured to perform the following steps when running the computer program: Capturing a first inter-pixel distance between scale lines in a circumferential direction of the centering disk from an image of the centering disk acquired by a CCD camera; Based on the first inter-pixel distance and the actual distance between the corresponding scale lines in the circumferential direction of the centering disk, determining the corresponding relationship between the actual distance and the first inter-pixel distance; wherein, based on the first inter-pixel distance and the actual distance between the corresponding scale lines in the circumferential direction of the centering disk, determining the corresponding relationship between the actual distance and the first inter-pixel distance comprises: Based on the ratio of the actual distance to the first distance between pixels, acquiring a corresponding relationship between the actual distance and the first distance between pixels; Acquire a second inter-pixel distance between a first pixel center of the centering disk and a second pixel center corresponding to a light spot irradiated by the laser beam on the centering disk; Based on the second inter-pixel distance and the corresponding relationship, determining the second actual distance between the center of the weight and the center of the furnace body; wherein, based on the second inter-pixel distance and the corresponding relationship, determining the second actual distance between the center of the weight and the center of the furnace body comprises: Based on the product of the second inter-pixel distance and the corresponding relationship, obtaining a second actual distance between the center of the weight and the center of the furnace body; The second actual distance between the center of the weight and the center of the furnace body is used to characterize the coaxiality deviation value of the single crystal furnace.

7. A computer storage medium, characterized in that: The computer storage medium stores a program for detecting the coaxiality of a single crystal furnace. When the program for detecting the coaxiality of a single crystal furnace is executed by at least one processor, the method steps for detecting the coaxiality of a single crystal furnace described in any one of claims 1 to 4 are implemented.

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