Thermal oxidizer housing and thermal oxidizer

Abstract

The present invention discloses a box for a thermal oxidation device and a thermal oxidation device. The purpose of the present invention is to provide a thermal oxidation device that can treat NO at low temperature. x A new flameless catalytic thermal oxidizer is provided to reduce the concentration of harmful substances such as THC. Another object of the present invention is to provide a flameless catalytic thermal oxidizer that can minimize the occurrence of THC and minimize the risk of accidents and environmental pollution caused during maintenance work. According to the above object, the present invention provides a box-type thermal oxidizer that can be separated for maintenance, the internal structure of the box is configured to increase the time that the object to be treated stays in the section with the catalyst, and a component is configured to allow the powder generated by the thermal oxidation reaction to fall and be collected.

Description

Technical Field

[0001] The present invention relates to a thermal oxidation device, and more particularly, to a flameless catalytic thermal oxidation device for treating various environmentally harmful substances generated in oil refining facilities and in semiconductor, LED, display manufacturing processes, etc. Background Art

[0002] As technologies for treating environmentally harmful substances generated in oil refining (especially heavy oil processing) and semiconductor, LED, display element or panel manufacturing processes in oil refineries, thermal storage oxidation, catalytic thermal oxidation, and flameless thermal oxidation can be cited. The purpose of the above technologies is to completely decompose substances such as ammonia generated in the process into hydrogen and nitrogen and discharge them as gases that are harmless to the environment.

[0003] That is, the above technology is a technology for burning substances such as toluene, benzene, ethylene, ammonia, etc. that are harmful to the human body, and completely burning them into carbon dioxide, water vapor, nitrogen, hydrogen, etc. that are harmless to the human body. In particular, in the case of nitrogen compounds such as ammonia during the combustion process, only NO is not generated. x , can be considered to have fully achieved the intended purpose, in the generation of NO x In such cases, secondary air pollution problems may occur.

[0004] Among the above technologies, the flameless thermal oxidation method has the following advantages compared to the thermal storage oxidation method and the catalytic thermal oxidation method: a high complete combustion rate and a high fuel supply relative efficiency.

[0005] However, in the case of the flameless thermal oxidation device disclosed in the past, and in the case of injecting reactants including harmful substances into the reactor to carry out flameless thermal oxidation, NO x The concentration of harmful substances such as chlorinated carbon monoxide and chlorinated carbon monoxide has reached hundreds of ppm and has not reached a satisfactory level. The reasons include: not preheating the reactants but only preheating the reactor interior; no catalyst; unstable energy supply caused by high temperature oxidation and even deterioration of the heater itself.

[0006] Furthermore, it is necessary to minimize the generation of total hydrocarbons (THC), and the risk of accidents and contamination of the internal working environment that may occur when replacing or cleaning a part of the device in a workshop (FAB) using a thermal oxidizer should be minimized. Summary of the invention

[0007] Therefore, the object of the present invention is to provide a method for treating NO x A new flameless catalytic thermal oxidation device for reducing the concentration of various harmful substances such as

[0008] And, another object of the present invention is to provide a flameless catalytic thermal oxidizer that can minimize the occurrence of THC and minimize the risk of accidents and environmental pollution that may occur during maintenance operations.

[0009] According to the purpose, the present invention provides a box-type thermal oxidation device that can be separated for maintenance, wherein the internal structure of the box is constructed to increase the time that the object to be treated stays in the interval with the catalyst, and constitutes a component for causing the powder generated by the thermal oxidation reaction to fall and be collected.

[0010] A box for a thermal oxidation device, as a replaceable box included in a thermal oxidation device for treating an object to be treated, is characterized in that the box includes: a main body, which is a chamber type; a box top, covering the upper end of the main body; a heater, which is arranged in the main body; a catalyst support bottom portion, which supports the catalyst in a manner that the catalyst can be filled around the heater; a channel, which is formed between the heater and the catalyst so that the object to be treated can flow in; an inlet, which is formed in the box top and connected to the channel so that the object to be treated can flow in; an outlet, which is formed in the main body of the box; and an impact component, which is connected to the catalyst support bottom portion; the catalyst support bottom portion is arranged to leave a gap with the box bottom portion and is equipped with an opening portion that allows the object to be treated to flow in, the channel is connected to the gap portion, so that the object to be treated flows into the inlet and passes through the channel and passes through the catalyst, and the catalyst and the object to be treated are heated and oxidized together by the heater and then discharged through the outlet, and the impact component is a hollow tubular component, which includes beads inside, and includes an impact unit that applies impact to the beads, so that the powder existing in the box falls by the movement of the beads.

[0011] The box body for the thermal oxidation device is characterized in that the thermal oxidation device also includes: a heater shell, which houses the heater; and a double shell, which is arranged with a spacing from the wall of the heater shell, and the spacing between the wall of the heater shell and the wall of the double shell is connected to the inlet through which the material to be treated flows in to form a channel for the material to be treated to pass through, and the material to be treated flows into the inlet and is preheated when passing through the channel.

[0012] Furthermore, the present invention is a replaceable box included in a thermal oxidation device for treating an object to be treated, characterized in that the box includes: a main body, which is a chamber type; a heater, which is arranged in the main body; a catalyst supporting bottom portion, which supports the catalyst in a manner that the catalyst can be filled around the heater; and an inlet, into which the object to be treated flows; an outlet, which is formed in the main body of the box; and an impact component, which is connected to the catalyst supporting bottom portion; the catalyst supporting bottom portion is arranged to leave a gap with the bottom portion of the box, and is equipped with an opening portion that allows the object to be treated to flow in, the inlet is extended in a manner starting from the upper end of the main body and passing through the catalyst supporting bottom portion, so that the object to be treated descends along the inlet and reaches the gap below the catalyst supporting bottom portion, and then rises through the opening portion of the catalyst supporting bottom portion, so that the catalyst and the object to be treated are heated together by the heater and oxidized, and then discharged through the outlet, and the impact component is a hollow tubular component, which includes beads inside, and includes an impact unit that applies impact to the beads, so that the powder present in the box falls by the movement of the beads.

[0013] Furthermore, the present invention provides a box for a thermal oxidation device, as a replaceable box included in a thermal oxidation device for treating an object to be treated, characterized in that the box comprises: a main body, which is a chamber type; a heater, which is arranged in the main body; a catalyst support bottom surface, which supports the catalyst in a manner that the catalyst can be filled around the heater; an inlet, into which the object to be treated flows; an outlet, which is formed in the main body of the box; an impact component, which is connected to the catalyst support bottom surface; and a separation portion, which separates the interior of the main body into a first area that does not include the heater and a second area that includes the heater and the catalyst; the catalyst support bottom surface is arranged to be connected to the box The bottom surface of the body has a gap and includes a first opening portion through which the flow to be processed can flow in. The boundary surface between the first area and the second area of ​​the separation part includes a second opening portion. The inlet starts from the upper end of the main body and extends through the catalyst support bottom surface portion, so that the object to be processed descends along the inlet and reaches the gap below the catalyst support bottom surface portion, and then rises through the first opening portion of the catalyst support bottom surface portion to form a first area with a hollow space, so that the generated powder falls and enters the second area, and the catalyst and the object to be processed are heated together by the heater and oxidized before being discharged through the outlet.

[0014] As described above, a box for a thermal oxidation device is provided, characterized in that the impact component is a hollow tubular component, includes beads inside, and contains an impact unit for applying impact to the beads, thereby causing the powder in the box to fall due to the movement of the beads.

[0015] A thermal oxidation device is provided, characterized in that it includes: the above-mentioned box body; a primary discharge port connected to the outlet of the box body; a wet tank communicated with the primary discharge port; and a secondary discharge port connected to the wet tank, wherein the primary discharge port and the secondary discharge port are formed by a pipe, and one or more nozzles are contained in the pipe for wet treatment.

[0016] As described above, there is provided a thermal oxidizing device characterized in that the used housing is entirely replaced with a new housing.

[0017] As described above, a thermal oxidation device is provided, which is characterized in that the object to be treated is treated at a temperature of 600°C to 800°C.

[0018] The novel flameless catalytic thermal oxidizer according to the present invention can convert NO x The concentration of harmful substances such as chlorinated carbon dioxide is greatly reduced to only a few ppm.

[0019] Furthermore, the present invention provides a heater applicable to the flameless catalytic thermal oxidizer as a high-temperature oxidation prevention structure, and also provides a box structure that is easy to disassemble and assemble when necessary.

[0020] Furthermore, the present invention provides a flameless catalytic thermal oxidizer that can minimize the generation of THC and can minimize the risk of accidents and environmental pollution that may be caused during maintenance work.

[0021] Furthermore, according to the present invention, powders contained in the object to be processed or generated by the thermal oxidation reaction can be effectively dropped and collected by the impact component, and pipeline blockage or surrounding environmental pollution caused by the powders can be prevented.

[0022] Furthermore, according to the present invention, the object to be treated passes through a path such as descending and then ascending, and moving horizontally, so that the time the object to be treated stays in the reactor with a catalyst and a heater is prolonged, so that a thermal oxidation reaction can be carried out at a relatively low temperature of 600°C to 800°C, and the concentration of pollutants in the exhaust can be made very low even at low temperatures.

[0023] In the above, since the descending path of the object to be processed passes around the heater, a preheating effect can be obtained to promote the thermal oxidation reaction.

[0024] As described above, since thermal oxidation occurs at a relatively low temperature, high-temperature oxidation of the heater can be prevented, thereby extending the life of the heater. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a schematic diagram schematically showing the structure of the thermal oxidation device of the present invention and the processing procedure of the object to be processed.

[0026] Figure 2 It is a perspective view showing the appearance of the thermal oxidizer of the present invention.

[0027] Figure 3 It is a cross-sectional view showing a modified example of the thermal oxidizer of the present invention.

[0028] Figure 4 This is a cross-sectional view showing another modified embodiment of the thermal oxidizer of the present invention.

[0029] Description of reference numerals:

[0030] 100: Cabinet 200: Heater 300: Catalyst 115: Entrance 110: Top of the box 120: Box body 117: Inlet 117-1: Exit 10: Primary discharge outlet 20: Wet tank 30: Secondary discharge outlet 210: Heater housing 220: Double shell 310: First Area 320: Second Area 400: Ring 450: Catalyst support bottom surface 500: Impact parts DETAILED DESCRIPTION

[0031] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0032] Figure 1 The structure of the flameless thermal oxidation device of the present invention and the path of the object to be treated according to the flameless thermal oxidation device are shown. The device, which is formed in the shape of a cartridge (also called a cylindrical member), is provided with a heater 200 inside, and the heater 200 is filled with a catalyst 300 around it. A top 110 of the box body (top) is assembled at the upper end of the box body 100, which is provided with an inlet 115 for starting the inflow of more than one object to be treated. The object to be treated flows into the inside of the box body through the inlet 115, and flows along the channel formed around the heater 200 and diffuses to the place where the catalyst 300 is provided. The catalyst 300 and the object to be treated are heated and oxidized together by the heater 200. An outlet 117-1 is formed in the box body 120, so that the reaction product after the oxidation reaction is completed is discharged through the outlet 117-1. The outlet 117-1 is connected to the primary discharge port 10, and the primary discharge port 10 is connected to the wet tank 20. The wet tank 20 is connected to a secondary outlet 30 as another outlet, so that the reaction product of the object to be treated is discharged to the outside through the primary outlet 10 and the wet tank 20 through the secondary outlet 30. The primary outlet 10 and the secondary outlet 30 are equipped with one or more liquid spray nozzles inside the pipeline to wet-treat the reaction product.

[0033] Preferably, the inlet 115 of the top 110 of the box body is configured in plurality, and since the heater 200 is located in the center of the box body, the inlet 115 is arranged in a radial shape with the heater 200 as the center. The top 110 of the box body contacts the wall of the double shell of the heater 200 via a plate-shaped support body equipped with the nozzle-shaped inlet 115 and a truncated cone-shaped connection portion extending below the plate-shaped support body.

[0034] The heater housing 210 is located at the center of the tank reactor (a portion filled with catalyst defined by the tank wall and the catalyst support bottom surface 450), and is fixed to the tank top 110 and extends. The heater 200 extends from the top to the inside of the heater housing 210. Although it extends downward in the present embodiment, in the case of a horizontally placed tank, the heater 200 extends horizontally. The heater housing 210 is equipped with a double housing 220, which is arranged to have a gap with the inner wall. The space between the wall of the heater housing 210 and the double housing 220 is connected to the inlet 115 to form a moving channel for the object to be processed. The object to be processed can be heated from the moving path while flowing in through the heater 200.

[0035] The space around the heater housing 210 is filled with a catalyst 300, and the bottom portion of the catalyst-filled space is separated from the bottom portion of the box as a catalyst support bottom portion 450. The catalyst support bottom portion 450 has an opening that allows the object to be processed to pass through, and can be mesh-shaped. In this embodiment, the catalyst support bottom portion 450 is formed by arranging a plurality of rings 400 with a spacing between each other and fixing them with a fixing component centered on the bottom portion of the heater housing. The catalyst support bottom portion 450 is supported by an impact component 500, and the impact component 500 is supported by contacting the bottom portion of the box. The impact component 500 is composed of a hollow tube, and includes a plurality of beads and an impact unit that can impact the beads. The impact applied to the beads causes the movement of the beads, so that the powder generated in the reactor filled with the catalyst falls. Powders adhered to the catalyst or to components such as the ring 400 fall by the impact component to prevent the reaction efficiency from slowing down. The impact unit imparts motion to the beads in a fluid pressure manner, preferably, imparts motion to the beads in a gas pressure manner.

[0036] The space formed by the ring 400 becomes a passage for the material to be treated to flow toward the catalyst side, and the ring 400 plays a role in guiding the path of the material to be treated.

[0037] In the above, the housing top 110 portion is configured in a lid shape that covers the chamber as the housing body.

[0038] The flameless thermal oxidation device can treat the material at a temperature of 600°C to 800°C while minimizing NO x The objects to be treated may also include NF3 and VOC.

[0039] Since the flameless thermal oxidizer of the present invention does not use LNG but uses the energy stored by heating the catalyst with a heater, the device can be operated below 1000°C, and thus almost no thermally generated nitrogen oxides (Thermal NOx ).

[0040] In addition, the production of total hydrocarbons (THC) will be minimized.

[0041] Furthermore, since LNG is not used, the hydrocarbon (C x H y ) compounds are very effective.

[0042] As described above, the box-type device can replace (Swap) the box itself when necessary. That is, when it is necessary to perform various maintenance operations such as adding or replacing catalysts, replacing or repairing heaters, replacing parts, internal cleaning, etc., the old box can be replaced with a pre-prepared new box in the workshop (FAB) and then moved to a separate location, and maintenance can be performed after disassembly. This box replacement method minimizes the risk of accidents caused by operations in the FAB. In addition, since no maintenance is performed in the workshop and only the replacement of the box itself is performed, there is almost no concern about environmental pollution in the workshop. In other words, the risk of residual gas leakage caused by opening the chamber and implementing cleaning processes in the workshop production line and the environmental pollution caused by dust generation are eliminated.

[0043] Figure 2 The overall appearance of the flameless thermal oxidizer according to the present invention is shown. The flameless thermal oxidizer is built into a cabinet, and various operation control devices are arranged on the cabinet, thereby increasing the convenience and safety of use.

[0044] Figure 3 A modified embodiment of the flameless thermal oxidizer according to the invention is shown.

[0045] The flameless thermal oxidation device of the above-mentioned embodiment is configured in the shape of a replaceable box 100, and the inlet 117 for the treated material to flow in extends to reach the vicinity of the lower end of the chamber as the box body, and a heater 200 is provided at the center of the plurality of inlet 117. No separate separation section ( Figure 1The connection portion connected to the wet scrubber is formed on the outer wall of the chamber, preferably, formed at an upper portion higher than the middle of the chamber height. A catalyst support bottom portion 450 capable of supporting the catalyst is provided at a position higher than the bottom surface of the chamber, and a plurality of annular components are arranged coaxially with intervals between them, or can be provided as mesh components, or can be provided as plate components with pores. A plurality of impact components 500 are provided below the catalyst support bottom surface 450, and these impact components 500 play a role in applying impact to the catalyst support bottom portion 450 to cause the powder generated by the oxidation reaction to fall. The interior of the chamber, which is equivalent to the rest except for the heater, is filled with the catalyst 300.

[0046] In such an embodiment, the material to be treated that flows into the long inlet 117 falls to the lower part of the chamber, rises to the position of the catalyst 300 through the pores of the catalyst support bottom surface 450, and is heated and oxidized by the heater 200. The inflowing material to be treated descends along the long inlet 117 and is preheated by the heater 200, and is heated and oxidized by the action of the catalyst while rising. At this time, heat exchange is performed with the new material to be treated that flows in from the inlet 117. The new material that flows in can reduce the preheating effect, and the oxidized material can reduce the heat load, thereby reducing the heat load transferred to the wet scrubber. That is, the air-cooled heat exchange effect can reduce the temperature load of the wet scrubber. Since the material to be treated rises and passes through the catalyst interval after descending to the bottom of the chamber, its residence time in the reactor is ensured by extending the path, so that stable treatment of the flow load can be achieved.

[0047] Furthermore, the impact component 500 impacts the bottom 450 of the catalyst support surface, so that the generated powder can fall through the pores of the catalyst support bottom portion 450 and be collected. To this end, the impact component 500 can periodically impact the catalyst support bottom portion 450. The impact component 500 is a hollow tubular component, including beads inside, and includes an impact unit that impacts the beads, so that the powder in the box falls by the movement of the beads.

[0048] Figure 4 An embodiment configured to more favorably react to generate a large amount of powder from a material to be processed is shown.

[0049] for Figure 3The structure is such that a separation portion 600 is provided to separate the chamber into two parts, and the first area 310 without catalyst and the second area 320 filled with catalyst are formed. The second area 320 includes a place where the heater 200 is arranged, thereby occupying more than half of the volume of the chamber. The separation portion 600 is equipped with a wall portion having a vertical component that separates the first area 310 and the second area 320, and the wall portion includes pores. By means of the separation portion 600, the catalyst is confined to the second area 320, and the first area 310 is maintained as a hollow space. The height of the separation portion 600 is the lower limit of the height of the filled catalyst. In addition, in the separation portion 600, the structure of the boundary surface that divides the first area 310 and the second area 320 can be formed as follows: an opening is formed up to the height filled with the catalyst, or even a mesh member is used, and a closed surface is formed above it, so that it cannot be discharged from the outlet without passing through the catalyst.

[0050] exist Figure 4 In the embodiment, the separation part 600 is formed into a shape such as cutting the upper end of a cylinder with an oblique line and then vertically cutting a part. However, the separation part can be formed into various shapes as long as it is a partition wall with air holes erected in a manner to separate the chamber space into a heater-containing part and a heater-non-containing part.

[0051] In such a configuration, after the inflowing object to be processed reaches the lower end of the chamber, most of it flows into the first area 310 of the hollow space, and flows into the second area 320 having the catalyst while reacting with the heater. That is, the path of the object to be processed first descends along the inlet 117, then rises to the first area 310, and moves toward the second area 320 in a state with a horizontal component. Therefore, the path of the object to be processed becomes longer, and the residence time becomes longer.

[0052] In addition, in the first area 310, the powder contained in the object to be treated and the powder generated by the thermal oxidation reaction fall into the hollow space of the first area 310 and are collected. That is, after the first area 310 removes the powder as much as possible, a catalytic thermal oxidation reaction occurs in the second area 320, and the powder is discharged to the wet scrubber through the outlet of the chamber formed on the side of the second area 320.

[0053] The powder generated in the second area 320 falls and is collected by the impact component, which is a hollow tubular component including beads inside and an impact unit for applying impact to the beads, so that the powder in the box falls by the movement of the beads.

[0054] Since the powder is removed in the first region 310 and a catalytic thermal oxidation reaction is caused in the second region 320, the efficiency of the thermal decomposition reaction is improved. Therefore, such a configuration is more conducive to a reaction that generates more powder.

[0055] In addition, the specific numerical values ​​proposed in the embodiments are exemplary numerical values, which can obviously be deformed as needed, and the technical personnel of the technical field to which the present invention belongs should understand that the present invention is implemented in other specific forms without changing its technical ideas or essential features. Therefore, it should be understood that the above-mentioned embodiments are exemplary embodiments in all aspects, rather than restrictive embodiments. The scope of the present invention is limited by the scope of the claims, rather than by the above detailed description, and should be interpreted as all changes or deformations derived from the meaning, scope and equivalent concepts of the scope of the claims are included in the scope of the present invention.

Claims

1. A box for a thermal oxidation device, as a replacement box included in a thermal oxidation device for treating an object to be treated, characterized in that: The box body comprises: The main body is chamber type; A box top, covering the upper end of the main body; A heater is disposed in the main body; a catalyst supporting bottom surface portion for supporting the catalyst in such a manner that the catalyst can be filled around the heater; a channel formed between the heater and the catalyst and capable of allowing the flow of the treated fluid to flow in; an inlet formed at the top of the box body and connected to the channel to allow the flow of the treated fluid to flow in; an outlet formed in the main body of the box; and An impact component connected to the catalyst support bottom surface; The catalyst support bottom surface is arranged to leave a gap with the bottom surface of the box body, and is equipped with an opening portion for the flow of the to-be-processed fluid. The channel is connected to the partition part, so that the treated material flows into the inlet and passes through the channel and the catalyst, and the catalyst and the treated material are heated and oxidized by the heater and then discharged through the outlet. The impact component is a hollow tubular component including beads inside and an impact unit for applying impact to the beads. The impact unit imparts movement to the beads by fluid pressure, so that powder adhering to the catalyst or components in the box falls down by the movement of the beads.

2. The box for thermal oxidation device according to claim 1, characterized in that: in, The thermal oxidation device also includes: a heater housing in which the heater is built; and The double shell is arranged with a spacing from the wall of the heater shell, The distance between the wall surface of the heater shell and the wall surface of the double shell communicates with the inlet through which the treated object flows to form a channel for the treated object to pass through. The treated object flows toward the inlet and is preheated when passing through the channel.

3. A box for a thermal oxidation device, as a replacement box included in a thermal oxidation device for treating an object to be treated, characterized in that: The box body comprises: The main body is chamber type; A heater is disposed in the main body; a catalyst supporting bottom surface portion for supporting the catalyst in such a manner that the catalyst can be filled around the heater; and an inlet into which the to-be-processed fluid flows; an outlet formed in the main body of the box; and An impact component connected to the catalyst support bottom surface; The catalyst support bottom surface is arranged to leave a gap with the bottom surface of the box body, and is equipped with an opening portion for the flow of the to-be-processed fluid. The inlet extends from the upper end of the main body and through the catalyst support bottom surface, so that the object to be treated descends along the inlet and reaches the gap below the catalyst support bottom surface, and then rises through the opening of the catalyst support bottom surface, so that the catalyst and the object to be treated are heated together by the heater and oxidized, and then discharged through the outlet. The impact member is a hollow tubular member including beads inside, and includes an impact unit that applies impact to the beads, thereby causing powder present in the box to fall by movement of the beads.

4. A box for a thermal oxidation device, as a replacement box included in a thermal oxidation device for treating an object to be treated, characterized in that: The box body comprises: The main body is chamber type; A heater is disposed in the main body; a catalyst supporting bottom surface portion for supporting the catalyst in such a manner that the catalyst can be filled around the heater; an inlet into which the to-be-processed fluid flows; an outlet formed in the main body of the box; an impact member connected to the catalyst support bottom surface portion; and a separation portion for separating the interior of the main body into a first area not including the heater and a second area including the heater and the catalyst; The catalyst support bottom surface is arranged to leave a gap with the bottom surface of the box body, and comprises a first opening portion capable of allowing the flow of the to-be-processed fluid to flow in. The boundary surface between the first region and the second region of the separation portion includes a second opening. The impact component is a hollow tubular component, includes beads inside, and includes an impact unit for applying impact to the beads, so that the powder in the box falls due to the movement of the beads. The inlet extends from the upper end of the main body and through the catalyst support bottom surface, so that the object to be processed descends along the inlet and reaches the interval below the catalyst support bottom surface, and then rises through the first opening of the catalyst support bottom surface to form a first area of ​​a hollow space, so that the generated powder falls and enters the second area, and the catalyst and the object to be processed are heated and oxidized by the heater together and then discharged through the outlet.

5. A thermal oxidation device, characterized in that: include: A casing according to any one of claims 1 to 4; A primary discharge port connected to the outlet of the box; a wet tank in communication with the primary discharge port; and The secondary discharge port is connected to the wet tank. The primary discharge port and the secondary discharge port are formed by a tube, and one or more nozzles are included in the tube to perform wet treatment.

6. The thermal oxidation device according to claim 5, characterized in that: The used cabinet is entirely replaced by a new cabinet.

7. The thermal oxidation device according to claim 5, characterized in that: The object to be treated is treated at a temperature of 600°C to 800°C.

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