Diamond high thermal conductivity material coating equipment

Abstract

The invention relates to the field of diamond coating, and specifically to a diamond high thermal conductivity material coating equipment, comprising a workbench, a dividing plate, and several carriers, each of which is provided with a suction cup for sucking a diamond sheet, and a valve core for deflating the suction cup is provided on one side of the carrier. A loading station, a double-sided grinding station, a double-target magnetron coating machine, and an unloading station are provided on the workbench, and a coating feeding mechanism for feeding the diamond sheet into the double-target magnetron coating machine is mounted above the dividing plate. The loading station, the double-sided grinding station, the double-target magnetron coating machine, and the unloading station are all provided with a deflating cylinder contacting the valve core. Compared with the prior art, the diamond high thermal conductivity material coating equipment provided by the invention simplifies the complex coating process of the diamond sheet and combines it into an integrated automated production. The invention has the characteristics of small footprint, reasonable equipment layout, powerful functions, high degree of automation, low failure rate, convenient maintenance, energy saving and environmental protection, and high production efficiency.

Description

Technical Field

[0001] The invention relates to the field of diamond coating, and in particular to a diamond high thermal conductivity material coating device. Background Art

[0002] In the electronic packaging structure, the heat generated by the semiconductor chip is conducted to the heat dissipation base plate through the thin sheet diamond-aluminum composite material, and then diffused to the external environment. Among them, the upper and lower surfaces of the composite material need to be brazed to achieve metal connection with the chip and the heat dissipation base plate to reduce thermal resistance. In the electronic packaging process, the most commonly used solder is gold-tin solder, so it is usually required that the surface of the welded part be nickel-plated or gold-plated, in which nickel is used as a transition layer, and the outermost gold-plated layer can ensure that the solder has good wettability and spreadability on its surface. In the diamond-aluminum composite material, the volume fraction of diamond particles is high, and its surface is composed of aluminum matrix and diamond particles, and the weldability is poor, so the surface must be nickel-plated or gold-plated. Since gold plating on the nickel surface can be achieved by a mature electroplating gold process, the most critical thing for the surface treatment process of the diamond-aluminum composite material is how to deposit a uniform and dense nickel layer with good interface bonding force on the surface of the diamond and aluminum matrix.

[0003] Although the technology of magnetron sputtering coating on aluminum alloy or diamond surface is relatively mature, the process of using traditional magnetron sputtering coating technology equipment for diamond-aluminum composite materials for electronic packaging heat dissipation is too scattered and requires a large number of mechanical equipment. The frequent transfer of diamonds between mechanical equipment increases the risk of contamination. Summary of the invention

[0004] Based on this, it is necessary to provide a diamond high thermal conductivity material coating equipment to address the existing technical problems.

[0005] In order to solve the problems of the prior art, the technical solution adopted by the present invention is:

[0006] A diamond high thermal conductivity material coating device, comprising:

[0007] The workbench is set in a horizontal position.

[0008] The dividing plate is fixedly arranged on the workbench.

[0009] A plurality of carriers are arranged on the dividing plate at equal angles along the circumferential direction. A suction cup for sucking the diamond sheet is arranged at the top center of each carrier, and a valve core for deflating the suction cup is arranged on one side of the carrier.

[0010] The workbench is provided with a loading station, a double-sided grinding station, a dual-target magnetron coating machine and a discharging station which are arranged in sequence around the indexing plate, and a coating feeding mechanism for feeding the diamond sheet into the dual-target magnetron coating machine is arranged above the indexing plate;

[0011] The loading station, double-sided grinding station, double-target magnetron coating machine and unloading station are all provided with a deflation cylinder for contacting the valve core.

[0012] Furthermore, the loading station includes a vibrating loader, a first two-axis moving assembly and a first pneumatic suction rod arranged on the output end of the first two-axis moving assembly, a support column fixed to the top of the workbench is provided below the first pneumatic suction rod, a receiving platform is provided on the top of the support column, the receiving platform is connected to the end of the material channel of the vibrating loader, a baffle is fixedly provided at one end of the receiving platform away from the vibrating loader, and a proximity sensor for detecting the position of the diamond sheet is installed on the outer side of the baffle.

[0013] Furthermore, a positioning cover is connected to the lower end of the first pneumatic suction rod, and the positioning cover is coaxially arranged with the first pneumatic suction rod. Two positioning arc strips evenly distributed in the circumferential direction are formed at the bottom edge of the positioning cover, and an bevel is provided at the inner edge of each positioning arc strip. The bottom of the positioning cover is flush with the bottom of the first pneumatic suction rod, and a part groove for accommodating the diamond sheet is provided at the top of the receiving platform, and two arc-shaped avoidance notches for avoiding the positioning arc strips are formed on the groove wall of the part groove.

[0014] Furthermore, the double-sided grinding station includes a second two-axis moving component, a motor arranged on the output end of the second two-axis moving component, a grinding disc connected to the output end of the motor, a bracket fixedly installed next to the output end of the second two-axis moving component, a manipulator fixedly arranged on the bracket, and a blowing mechanism arranged next to the dividing plate. The motor is arranged in a vertical state and its output shaft is fixedly connected downward to the grinding disc. The blowing mechanism includes a second column and a high-pressure air pipe arranged on the top of the second column.

[0015] Furthermore, the manipulator includes a first clamping mechanism for clamping the diamond sheet in a horizontal state and a first rotating mechanism for driving the first clamping mechanism to rotate, and the first rotating mechanism is fixedly connected to the bracket in a horizontal state.

[0016] Furthermore, the first clamping mechanism includes a claw seat, a second motor, a driving gear, two driven gears, a second connecting rod and a clamping claw. The claw seat is fixedly connected to the rotating output shaft of the first rotating mechanism, the second motor is fixedly arranged on the claw seat, and the two driven gears are symmetrically fixedly axially connected to the inner side of the claw seat. Each driven gear is formed with a first connecting rod extending outward from the edge, the driving gear and the second motor are coaxially arranged, the driving gear is located on the inner side of the claw seat, the output shaft of the motor is fixedly connected to the driving gear, the two driven gears are meshed with each other, the driving gear is meshed with one of the driven gears, and the two clamping claws are symmetrically arranged on the front side of the claw seat, the ends of the two clamping claws close to the claw seat are axially connected to the free end of the first connecting rod, the two second connecting rods are located on the front side of the claw seat and are symmetrically arranged, one end of the two second connecting rods are axially connected to the claw seat, and the other end is respectively axially connected to the corresponding clamping claw.

[0017] Furthermore, an air duct is formed in the carrier, the valve core is located on a side of the carrier away from the center of the dividing plate, the air duct connects the suction cup and the valve core, a strip protrusion is formed on the top of the carrier, a positioning groove is provided in the middle of the strip protrusion, the suction cup is embedded in the positioning groove, the length direction of the strip protrusion is consistent with the radial direction of the dividing plate, and an embedding groove is formed on each side of the two jaws facing each other.

[0018] Furthermore, the dual-target magnetron coating machine includes a rotating opening and closing closed cabinet door, the coating feeding mechanism includes a crossbeam, a lifting mechanism and a horizontal transfer mechanism, one end of the crossbeam is fixedly connected to the double-sided grinding station, and the other end is fixedly connected to the unloading station, the lifting mechanism is vertically erected in the middle of the crossbeam, and the output end of the lifting mechanism is vertically arranged downward, the horizontal moving mechanism includes a third long-rod cylinder, a second rotating mechanism, and a second clamping mechanism, the third long-rod cylinder is horizontally fixedly connected to the output end of the lifting mechanism, and the second clamping mechanism is fixedly connected to the output shaft of the third long-rod cylinder.

[0019] Furthermore, the lifting mechanism includes a lifting cylinder, a support frame, and a lifting plate. The support frame is vertically fixed to the middle of the beam, the lifting cylinder is vertically arranged on the top of the support frame, the lifting plate is horizontally movably arranged on the support frame, and the top of the lifting plate is fixedly connected to the output shaft of the lifting cylinder.

[0020] Furthermore, the unloading station includes a unloading guide plate and a third two-axis moving assembly. The third two-axis moving assembly is fixedly arranged on the workbench and is located beside the dividing plate. The unloading guide plate is arranged on the workbench and is located beside the dividing plate.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] Firstly, compared with the prior art, the present invention simplifies the complex coating process of diamond sheets and combines it into an integrated automated production.

[0023] Secondly, compared with traditional equipment, the present invention has the advantages of small footprint, reasonable equipment layout, powerful functions and high degree of automation. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 The three-dimensional structure of the present invention is shown as follows Figure 1 .

[0025] Figure 2 The three-dimensional structure of the present invention is shown as follows Figure 2 .

[0026] Figure 3 Shown is a schematic diagram of the three-dimensional structure of the loading station of the present invention.

[0027] Figure 4 Shown is a schematic diagram of the three-dimensional structure of the double-sided grinding station of the present invention.

[0028] Figure 5 Shown is a schematic diagram of the structure of the robot.

[0029] Figure 6 Shown is a schematic diagram of the three-dimensional structure of the carrier.

[0030] Figure 7 Shown is a schematic diagram of the three-dimensional structure of the receiving platform.

[0031] Figure 8 Shown is a schematic diagram of the three-dimensional structure of the coating feeding mechanism.

[0032] Fig. 9 Shown Figure 1 A is an enlarged schematic diagram.

[0033] Fig.10 Shown Figure 3 The enlarged schematic diagram of point B in FIG.

[0034] Fig.11 Shown is a top view of the carrier.

[0035] Fig.12 Shown Fig.11 Cross-sectional view at CC.

[0036] Fig.13 Shown is a left side view of the robot.

[0037] Fig.14 Shown Fig.13 Cross-sectional view at DD.

[0038] The numbers in the figure are: 1, workbench; 2, indexing plate; 3, carrier; 4, airway; 5, bar protrusion; 6, positioning groove; 7, suction cup; 8, valve core; 9, loading station; 10, first two-axis moving assembly; 11, first pneumatic suction rod; 12, positioning cover; 13, positioning arc strip; 14, bevel; 15, vibration loader; 16, support column; 17, receiving platform; 18, parts slot; 19, arc avoidance gap; 20, baffle; 21, proximity sensor; 22, deflation cylinder; 23, Double-sided grinding station; 24, second two-axis moving assembly; 25, motor; 26, grinding disc; 27, bracket; 28, manipulator; 29, first rotating mechanism; 30, first clamping mechanism; 31, claw seat; 32, second motor; 33, driving gear; 34, driven gear; 35, first connecting rod; 36, second connecting rod; 37, clamping claw; 38, embedded groove; 39, blowing mechanism; 40, second column; 41, high-pressure air pipe; 42, dual-target magnetron coating machine; 43, rotating opening and closing of closed cabinet door; 44. Coating feeding mechanism; 45. Crossbeam; 46. Lifting mechanism; 47. Lifting cylinder; 48. Support frame; 49. Lifting plate; 50. Horizontal transfer mechanism; 51. Third long rod cylinder; 52. Second rotating mechanism; 53. Second clamping mechanism; 54. Unloading station; 55. Unloading guide plate; 56. Third two-axis moving assembly. DETAILED DESCRIPTION

[0039] In order to further understand the features, technical means, specific objectives and functions of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0040] Reference Figures 1 to 12 As shown, a diamond high thermal conductivity material coating device comprises:

[0041] A workbench 1 is arranged in a horizontal state;

[0042] The indexing plate 2 is fixedly arranged on the workbench 1;

[0043] A plurality of carriers 3, all of which are arranged on the indexing plate 2 at equal angles along the circumferential direction, a suction cup 7 for sucking the diamond sheet is provided at the top center of each carrier 3, and a valve core 8 for deflating the suction cup 7 is provided on one side of the carrier 3;

[0044] The workbench 1 is provided with a loading station 9, a double-sided grinding station 23, a dual-target magnetron coating machine 42 and a discharging station 54 arranged in sequence around the indexing plate 2. A coating feeding mechanism 44 for feeding diamond sheets into the dual-target magnetron coating machine 42 is mounted above the indexing plate 2.

[0045] The loading station 9 , the double-sided grinding station 23 , the dual-target magnetron coating machine 42 and the unloading station 54 are all provided with a venting cylinder 22 for contacting the valve core 8 .

[0046] The equipment puts the diamond sheet on the carrier 3 through the loading station 9. The suction cup 7 on the carrier 3 ensures that the diamond sheet is firmly adsorbed on the carrier 3. The dividing plate 2 rotates clockwise to drive the carrier 3 to move. The carrier 3 moves to the double-sided grinding station 23, and the double-sided grinding station 23 starts to grind. When the diamond sheet needs to be turned over, the air release cylinder 22 on the double-sided grinding station 23 starts to contact the valve core 8. After the valve core 8 is pressed, the gas re-enters the suction cup 7 to achieve the effect of releasing the adsorption of the diamond sheet. When the diamond sheet needs to be moved in other stations, the method is the same. After the double-sided grinding of the diamond sheet is completed, the carrier 3 moves to the double-target magnetron plating station again. In front of the coating machine 42, the coating feeding mechanism 44 feeds the diamond sheet on the carrier 3 into the dual-target magnetron coating machine 42, and the dual-target magnetron coating machine 42 starts to perform coating treatment. After the coating on one side of the diamond sheet is completed, the coating feeding mechanism 44 turns over the diamond sheet inside the dual-target magnetron coating machine 42. After the turning over is completed, the dual-target magnetron coating machine 42 works again. After the coating on both sides is completed, the coating feeding mechanism 44 moves the diamond sheet inside the dual-target magnetron coating machine 42 back to the carrier 3, and the carrier 3 rotates to the unloading station 54 again. The unloading station 54 starts to unload. After unloading is completed, the carrier 3 moves back to the loading station 9, and the loading station 9 operates again.

[0047] The loading station 9 includes a vibrating loader 15, a first two-axis moving assembly 10 and a first pneumatic suction rod 11 arranged on the output end of the first two-axis moving assembly 10. A support column 16 fixed to the top of the workbench 1 is provided below the first pneumatic suction rod 11. A receiving platform 17 is provided on the top of the support column 16. The receiving platform 17 is connected to the end of the material channel of the vibrating loader 15. A baffle 20 is fixedly provided at one end of the receiving platform 17 away from the vibrating loader 15. A proximity sensor 21 for detecting the position of the diamond sheet is installed on the outer side of the baffle 20.

[0048] The vibration loader 15 transfers the diamond piece inside it to the receiving platform 17. The support column 16 at the bottom of the receiving platform 17 is used to fix the receiving platform 17. The baffle 20 on the receiving platform 17 plays the role of fixing the proximity sensor 21. After the proximity sensor 21 detects that the diamond piece on the receiving platform 17 is in place, the signal is uploaded to the control end. After receiving the signal from the proximity sensor 21, the control end controls the first two-axis moving component 10 to move the first pneumatic suction rod 11 to the top of the receiving platform 17. The first pneumatic suction rod 11 sucks up the diamond on the receiving platform 17, and then the first two-axis moving component 10 moves to the top of the carrier 3, and the first pneumatic suction rod 11 places the diamond piece on the carrier 3.

[0049] The lower end of the first pneumatic suction rod 11 is connected to a positioning cover 12, which is coaxially arranged with the first pneumatic suction rod 11. Two positioning arc strips 13 evenly distributed in the circumferential direction are formed at the bottom edge of the positioning cover 12, and an oblique angle 14 is provided at the inner edge of each positioning arc strip 13. The bottom of the positioning cover 12 is flush with the bottom of the first pneumatic suction rod 11, and a part groove 18 for accommodating a diamond sheet is provided at the top of the receiving platform 17. Two arc-shaped avoidance notches 19 for avoiding the positioning arc strips 13 are formed on the groove wall of the part groove 18.

[0050] The part groove 18 on the receiving platform 17 is used to position the diamond sheet and fix its position. The arc-shaped avoidance notches 19 at both ends of the part groove 18 allow the positioning cover 12 to accurately and firmly fit the diamond sheet. The positioning cover 12 on the first pneumatic suction rod 11 is made of soft material. When the first pneumatic suction rod 11 starts to absorb the diamond sheet, the positioning arc strip 13 on the positioning cover 12 can fix the position of the diamond sheet during absorption, so as to prevent the diamond sheet from shaking when it moves. Because the positioning arc strip 13 has an oblique angle 14, the positioning arc strip 13 on the positioning cover 12 can contact the diamond sheet when the first pneumatic suction rod 11 moves downward, which can reduce the occurrence of the positioning arc strip 13 poking the surface of the diamond sheet.

[0051] The double-sided grinding station 23 includes a second two-axis moving assembly 24, a motor 25 arranged on the output end of the second two-axis moving assembly 24, a grinding disc 26 connected to the output end of the motor 25, a bracket 27 fixedly installed beside the output end of the second two-axis moving assembly 24, a manipulator 28 fixedly arranged on the bracket 27, and a blowing mechanism 39 arranged beside the dividing plate 2. The motor 25 is arranged in a vertical state and its output shaft is fixedly connected downward to the grinding disc 26. The blowing mechanism 39 includes a second column 40 and a high-pressure air pipe 41 arranged at the top of the second column 40.

[0052] When the double-sided grinding station 23 needs to be polished, first the second two-axis moving assembly 24 starts to operate, and the mobile output end is moved to the top of the carrier 3. At this time, the motor 25 is started, and the motor 25 drives the polishing disc 26 to rotate at high speed. The polishing disc 26 contacts the surface of the diamond sheet and starts polishing. At this time, the blowing mechanism 39 starts to blow air to the diamond sheet on the carrier 3 through the high-pressure air pipe 41 on the second column 40, and the debris during polishing is blown away to ensure that the surface of the diamond sheet is smooth and free of residual debris. After the single-sided polishing is completed, the output end of the second two-axis moving assembly 24 starts to move, and the manipulator 28 is connected to the output end of the second two-axis moving assembly 24 through the bracket 27. When the output end of the second two-axis moving assembly 24 moves to the specified position, the manipulator 28 flips the diamond sheet on the carrier 3, and then the output end of the second two-axis moving assembly 24 moves again to move the polishing disc 26 back to the top of the diamond sheet for secondary polishing.

[0053] The manipulator 28 includes a first clamping mechanism 30 for clamping the diamond sheet in a horizontal state and a first rotating mechanism 29 for driving the first clamping mechanism 30 to rotate. The first rotating mechanism 29 is fixedly connected to the bracket 27 in a horizontal state.

[0054] The first rotating mechanism 29 is fixed on the bracket 27 . When the first clamping mechanism 30 needs to rotate, the first rotating mechanism 29 is started to rotate the first clamping mechanism 30 .

[0055] The first clamping mechanism 30 includes a claw seat 31, a second motor 32, a driving gear 33, two driven gears 34, a second connecting rod 36 and a clamping claw 37. The claw seat 31 is fixedly connected to the rotating output shaft of the first rotating mechanism 29. The second motor 32 is fixedly arranged on the claw seat 31. The two driven gears 34 are symmetrically fixedly connected to the inner side of the claw seat 31. Each driven gear 34 is formed with a first connecting rod 35 extending outward from the edge. The driving gear 33 is coaxially arranged with the second motor 32. The driving gear 33 is located at the claw On the inner side of the seat 31, the output shaft of the motor 25 is fixedly connected to the driving gear 33, the two driven gears 34 are meshed with each other, the driving gear 33 is meshed with one of the driven gears 34, and the two clamping claws 37 are symmetrically arranged on the front side of the claw seat 31, and one end of the two clamping claws 37 close to the claw seat 31 is axially connected to the free end of the first connecting rod 35, and the two second connecting rods 36 are located on the front side of the claw seat 31 and are symmetrically arranged, one end of the two second connecting rods 36 is axially connected to the claw seat 31, and the other end is axially connected to the corresponding clamping claws 37.

[0056] When the first clamping mechanism 30 needs to clamp, the second motor 32 on the claw seat 31 is started, and the driving gear 33 connected to the second motor 32 starts to rotate. Because the driving gear 33 is meshed with a driven gear 34, when the driving gear 33 starts to rotate, it will drive a driven gear 34 to rotate, and the two driven gears 34 are meshed with each other. Therefore, when the driving gear 33 drives the driven gear 34 to rotate, the driven gear 34 meshed with the driving gear 33 will drive another driven gear 34 to rotate. Therefore, when the two driven gears 34 start to rotate, they will drive the first connecting rod 35 to move. Because the second connecting rod 36 is axially connected to the claw seat 31 and the clamping claw 37, when the first connecting rod 35 moves, it will drive the clamping claw 37 to perform a clamping and releasing movement.

[0057] An air channel 4 is formed in the carrier 3, and the valve core 8 is located on the side of the carrier 3 away from the center of the dividing plate 2. The air channel 4 connects the suction cup 7 and the valve core 8. A strip protrusion 5 is formed on the top of the carrier 3, and a positioning groove 6 is provided in the middle of the strip protrusion 5. The suction cup 7 is embedded in the positioning groove 6. The length direction of the strip protrusion 5 is consistent with the radial direction of the dividing plate 2. The two jaws 37 are each formed with an embedding groove 38 on the opposite sides.

[0058] The valve core 8 is connected to the suction cup 7 through the air channel 4. When the diamond piece is pressed onto the suction cup 7, the valve core 8 is in a closed state, and the air in the suction cup 7 is squeezed out, so that negative air pressure is generated in the suction cup 7, thereby firmly sucking the diamond piece. When the clamping jaws 37 clamp the diamond piece, since the two ends of the diamond piece slightly protrude from the strip protrusions 5 on the carrier 3, the embedded grooves 38 on the inner sides of the two clamping jaws 37 can firmly grasp the diamond piece.

[0059] The dual-target magnetron coating machine 42 includes a rotating opening and closing closed cabinet door 43, and the coating feeding mechanism 44 includes a beam 45, a lifting mechanism 46 and a horizontal transfer mechanism 50. One end of the beam 45 is fixedly connected to the double-sided grinding station 23, and the other end is fixedly connected to the unloading station 54. The lifting mechanism 46 is vertically mounted in the middle of the beam 45, and the output end of the lifting mechanism 46 is vertically arranged downward. The horizontal transfer mechanism 50 includes a third long-rod cylinder 51, a second rotating mechanism 52 and a second clamping mechanism 53. The third long-rod cylinder 51 is horizontally fixedly connected to the output end of the lifting mechanism 46, and the second clamping mechanism 53 is fixedly connected to the output shaft of the third long-rod cylinder 51.

[0060] The dual-target magnetron coating machine 42 is provided with a rotating and opening closed cabinet door 43, and a lifting mechanism 46 is fixed to the middle of the beam 45. The lifting mechanism 46 is used to realize the vertical movement of the horizontal transfer mechanism 50. When the diamond sheet needs to be moved, the second rotating mechanism 52 and the second clamping mechanism 53 have the same structural principle as the first rotating mechanism 29 and the first clamping mechanism 30, and clamp the diamond sheet.

[0061] The lifting mechanism 46 includes a lifting cylinder 47, a support frame 48, and a lifting plate 49. The support frame 48 is vertically fixed to the middle of the beam 45, the lifting cylinder 47 is vertically arranged on the top of the support frame 48, the lifting plate 49 is horizontally movably arranged on the support frame 48, and the top of the lifting plate 49 is fixedly connected to the output shaft of the lifting cylinder 47.

[0062] The horizontal transfer mechanism 50 is connected to the support frame 48 through the lifting plate 49. The lifting cylinder 47 on the support frame 48 controls the vertical movement of the horizontal transfer mechanism 50. The support frame 48 ensures that the horizontal transfer mechanism 50 will not deviate during movement.

[0063] The unloading station 54 includes a unloading guide plate 55 and a third two-axis moving assembly 56 . The third two-axis moving assembly 56 is fixedly arranged on the workbench 1 and is located beside the dividing plate 2 . The unloading guide plate 55 is arranged on the workbench 1 and is located beside the dividing plate 2 .

[0064] The diamond sheet on the carrier 3 is moved to the top of the unloading guide plate 55 by the third two-axis moving assembly 56 and released. The unloading guide plate 55 guides the plated diamond sheet out of the device.

[0065] When the device starts working, the vibration feeder 15 conveys the diamond sheet inside to the receiving platform 17. After the proximity sensor 21 senses the diamond sheet, it uploads the signal. After receiving the signal, the first two-axis moving component 10 moves its output end to the top of the receiving platform 17. The first pneumatic suction rod 11 sucks the diamond sheet and moves it to the carrier 3. The carrier 3 moves clockwise to the double-sided grinding station 23. The second two-axis moving component 24 drives the grinding disc 26 to grind the diamond on the carrier 3. The diamond sheet is polished. After the polishing is completed, the carrier 3 continues to move to the front of the dual-target magnetron coating machine 42. The coating feeding mechanism 44 feeds the diamond sheet on the carrier 3 into the dual-target magnetron coating machine 42 for coating. After the coating is completed, the coating feeding mechanism 44 moves the diamond sheet in the dual-target magnetron coating machine 42 back to the carrier 3. The carrier 3 continues to move to the unloading station 54, and the third two-axis moving component 56 slides the diamond sheet on the carrier 3 out of the equipment through the unloading guide plate 55.

Claims

1. A diamond high thermal conductivity material coating equipment, characterized in that: include: The workbench (1) is arranged in a horizontal state; A dividing plate (2) is fixedly arranged on the workbench (1); A plurality of carriers (3), all of which are arranged on the indexing plate (2) at equal angles in a circumferential direction, a suction cup (7) for sucking the diamond sheet is provided at the top center of each carrier (3), and a valve core (8) for deflation of the suction cup (7) is provided on one side of the carrier (3); The workbench (1) is provided with a loading station (9), a double-sided grinding station (23), a dual-target magnetron coating machine (42), and a discharging station (54) which are arranged in sequence around a dividing plate (2); a coating feeding mechanism (44) for feeding a diamond sheet into the dual-target magnetron coating machine (42) is mounted above the dividing plate (2); The loading station (9), the double-sided grinding station (23), the dual-target magnetron coating machine (42), and the unloading station (54) are all provided with a deflation cylinder (22) for contacting the valve core (8); The loading station (9) comprises a vibrating feeder (15), a first two-axis moving assembly (10), and a first pneumatic material suction rod (11) arranged at the output end of the first two-axis moving assembly (10), a support column (16) fixed to the top of the workbench (1) is arranged below the first pneumatic material suction rod (11), a receiving platform (17) is arranged on the top of the support column (16), the receiving platform (17) is connected to the end of the material channel of the vibrating feeder (15), a baffle (20) is fixedly arranged at one end of the receiving platform (17) away from the vibrating feeder (15), and a detection device is installed on the outer side of the baffle (20). A proximity sensor (21) for detecting the position of the diamond piece; a positioning cover (12) is connected to the lower end of the first pneumatic suction rod (11), the positioning cover (12) and the first pneumatic suction rod (11) are coaxially arranged, two positioning arc strips (13) are formed at the bottom edge of the positioning cover (12) and are evenly distributed in the circumferential direction, and an oblique angle (14) is provided at the inner edge of each positioning arc strip (13), the bottom of the positioning cover (12) is flush with the bottom of the first pneumatic suction rod (11), and a part groove (18) for accommodating the diamond piece is provided at the top of the receiving platform (17), and two parts for avoiding the positioning arc strips are formed on the groove wall of the part groove (18). The double-target magnetron coating machine (42) includes a rotary open and close closed cabinet door (43), the coating feeding mechanism (44) includes a crossbeam (45), a lifting mechanism (46) and a horizontal transfer mechanism (50), one end of the crossbeam (45) is fixedly connected to the double-sided grinding station (23), and the other end is fixedly connected to the unloading station (54), the lifting mechanism (46) is vertically mounted in the middle of the crossbeam (45), the output end of the lifting mechanism (46) is vertically arranged downward, and the horizontal movement mechanism (50) includes a third long rod cylinder (51), a second rotating mechanism (52), and a second clamping mechanism (51). The lifting mechanism (46) comprises a lifting cylinder (47), a support frame (48), and a lifting plate (49). The support frame (48) is fixed to the middle of the crossbeam (45) in a vertical state. The lifting cylinder (47) is arranged on the top of the support frame (48) in a vertical state. The lifting plate (49) is movably arranged on the support frame (48) in a horizontal state. The top of the lifting plate (49) is fixedly connected to the output shaft of the lifting cylinder (47).

2. The diamond high thermal conductivity material coating equipment according to claim 1, characterized in that: The double-sided grinding station (23) comprises a second two-axis moving assembly (24), a motor (25) arranged on the output end of the second two-axis moving assembly (24), a grinding disc (26) connected to the output end of the motor (25), a bracket (27) fixedly mounted beside the output end of the second two-axis moving assembly (24), a manipulator (28) fixedly arranged on the bracket (27), and an air blowing mechanism (39) arranged beside the indexing plate (2), wherein the motor (25) is arranged in a vertical state and its output shaft is fixedly connected downward to the grinding disc (26), and the air blowing mechanism (39) comprises a second column (40) and a high-pressure air pipe (41) arranged on the top of the second column (40).

3. The diamond high thermal conductivity material coating equipment according to claim 2, characterized in that: The manipulator (28) comprises a first clamping mechanism (30) for clamping the diamond sheet in a horizontal state and a first rotating mechanism (29) for driving the first clamping mechanism (30) to rotate. The first rotating mechanism (29) is fixedly connected to the bracket (27) in a horizontal state.

4. The diamond high thermal conductivity material coating equipment according to claim 3, characterized in that: The first clamping mechanism (30) comprises a claw seat (31), a second motor (32), a driving gear (33), two driven gears (34), a second connecting rod (36) and a clamping claw (37). The claw seat (31) is fixedly connected to the rotating output shaft of the first rotating mechanism (29). The second motor (32) is fixedly arranged on the claw seat (31). The two driven gears (34) are symmetrically fixedly connected to the inner side of the claw seat (31). Each driven gear (34) is formed with a first connecting rod (35) extending outward from the edge. The driving gear (33) and the second motor (32) are coaxially arranged. The driving gear (33) is located at a position On the inner side of the claw seat (31), the output shaft of the motor (25) is fixedly connected to the driving gear (33), the two driven gears (34) are meshed with each other, the driving gear (33) is meshed with one of the driven gears (34), the two clamping claws (37) are symmetrically arranged on the front side of the claw seat (31), one end of the two clamping claws (37) close to the claw seat (31) is axially connected to the free end of the first connecting rod (35), the two second connecting rods (36) are located on the front side of the claw seat (31) and are symmetrically arranged, one end of the two second connecting rods (36) is axially connected to the claw seat (31), and the other end is axially connected to the corresponding clamping claw (37).

5. The diamond high thermal conductivity material coating equipment according to claim 1, characterized in that: An air passage (4) is formed in the carrier (3), the valve core (8) is located on a side of the carrier (3) away from the center of the indexing disk (2), the air passage (4) connects the suction cup (7) and the valve core (8), a strip protrusion (5) is formed on the top of the carrier (3), a positioning groove (6) is provided in the middle of the strip protrusion (5), the suction cup (7) is embedded in the positioning groove (6), the length direction of the strip protrusion (5) is consistent with the radial direction of the indexing disk (2), and the two clamping jaws (37) are each formed with an embedding groove (38) on the opposite sides.

6. The diamond high thermal conductivity material coating equipment according to claim 1, characterized in that: The unloading station (54) comprises a unloading guide plate (55) and a third two-axis moving assembly (56). The third two-axis moving assembly (56) is fixedly arranged on the workbench (1) and is located beside the indexing plate (2). The unloading guide plate (55) is arranged on the workbench (1) and is located beside the indexing plate (2).

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