Air intake assembly of deposition furnace and deposition furnace

Abstract

The present invention discloses an air intake assembly of a deposition furnace and a deposition furnace. The air intake assembly includes an air intake pipe with an air inlet and an air outlet, and also includes an energy-enhancing block movably arranged in the air intake pipe, the top of the energy-enhancing block is arranged toward the air inlet, and the bottom opposite to the top is arranged toward the air outlet, and the cross section of the energy-enhancing block perpendicular to its extension direction gradually increases from the top to the bottom. The air intake assembly can change and control the flow state of the gas in the pipeline by arranging the energy-enhancing block in the pipeline, so that the cross section of the energy-enhancing block is continuously increased along the direction from the air inlet to the air outlet, and the effective cross-sectional area for the gas to pass through in the air intake pipe can be controlled to be continuously reduced from the air inlet to the air outlet, thereby causing the gas to be continuously squeezed in the process of flowing to the air outlet, greatly increasing the pressure and speed of the gas ejected from the air outlet, so that the gas ejected from the air intake assembly has greater kinetic energy, and the phenomenon of carbon atoms in the gas being deposited is avoided.

Description

Technical Field

[0001] The invention belongs to the technical field of carbon / carbon composite material crucible manufacturing, and in particular relates to an air intake component of a deposition furnace and the deposition furnace. Background Art

[0002] In the prior art, the basic process for preparing a crucible is to produce a preform in the shape of a crucible, and then infiltrate carbon atoms into the preform made of carbon fibers by vapor deposition or liquid deposition, and at the same time perform high-temperature treatment to graphitize the carbon atoms. The process of depositing carbon on the preform in a deposition furnace using the vapor deposition method is to introduce methane into the deposition furnace, and at the same time provide high temperature to decompose the methane into gaseous carbon and hydrogen, and then make the gaseous carbon contact the preform, and finally infiltrate the carbon atoms into the preform, thereby improving the strength, density and other properties of the crucible. However, the structure of the existing deposition furnace for gas supply is prone to blockage and uneven gas distribution.

[0003] The Chinese invention patent with application number: 202210268346.4 discloses a chemical vapor deposition device for high-purity pyrolytic carbon coating, including a chemical vapor deposition furnace and a PLC control cabinet. A steel cage and a muffle are provided in the chemical vapor deposition furnace. The muffle is located in the steel cage. An insulation felt is provided on the inner wall of the steel cage. A heating plate is provided between the insulation felt and the muffle. An exhaust pipe is connected to the upper end of the muffle, and the exhaust pipe is connected to the exhaust gas treatment system. The bottom of the muffle is sealed and connected to a gas distribution mechanism, and the gas distribution mechanism is connected to the gas supply system. The gas supply system and the exhaust gas treatment system are both electrically connected to the PLC control cabinet.

[0004] In the invention, the gas distribution mechanism includes an air intake pipe, which includes an upper air intake pipe and a lower air intake pipe, which are connected by a gas distribution box, and the lower air intake pipe is the general air intake pipe. After the gas enters the gas distribution box, it is evenly distributed to multiple upper air intake pipes and finally enters the deposition chamber. Although this gas distribution mechanism solves the problem of uneven gas distribution, it does not add kinetic energy to the gas entering the deposition furnace, resulting in insufficient power of the gas in the deposition chamber. The carbon atom density of the gaseous carbon in the deposition chamber gradually decreases with the increase of height, and the carbon atoms deposited on the preform are uneven. The decomposed gaseous carbon is accumulated on the inner wall of the pipeline and the gas distribution box, wasting carbon atoms used for deposition on the preform.

[0005] In view of this, the present invention is proposed. Summary of the invention

[0006] The object of the present invention is to provide an air intake assembly for a deposition furnace, so as to increase the kinetic energy of the gas entering the deposition furnace through the air intake assembly during the ventilation process to the deposition furnace, thereby making the carbon atom density in the gas in the deposition furnace uniform.

[0007] The present invention also aims to provide a deposition furnace having the above-mentioned air inlet assembly, so as to increase the proportion of carbon atoms in gaseous carbon deposited on the preform, improve the efficiency of the deposition furnace and improve the quality of preform processing.

[0008] In order to solve the above technical problems, the basic concept of the technical solution adopted by the present invention is:

[0009] An air intake assembly for a deposition furnace comprises an air intake pipe having an air inlet and an air outlet, and also comprises an energy-enhancing block movably arranged in the air intake pipe, wherein the top end of the energy-enhancing block faces the air inlet, and the bottom end opposite to the top end faces the air outlet, and the cross section of the energy-enhancing block perpendicular to its extension direction gradually increases from the top end to the bottom end.

[0010] Further, a limiting portion protruding radially toward the central axis of the intake pipe is provided at the intake port and / or the outlet, and the limiting portion overlaps with the energy boosting block in a cross section perpendicular to the central axis of the intake pipe, so as to limit the energy boosting block within the intake pipe;

[0011] Preferably, the limiting portion is an upper limiting ring and a lower limiting ring having a center hole and a center hole diameter smaller than the bottom end diameter;

[0012] More preferably, the upper limit ring and the lower limit ring are detachably fixed to both ends of the air inlet pipe respectively.

[0013] Furthermore, the cross section of the top gradually decreases to a point to form a tip, and the energy enhancement block is in a cone shape.

[0014] Furthermore, a gas guide groove for guiding gas is provided on the outer peripheral side surface of the energy booster block, and the gas guide groove is recessed toward the central axis direction of the energy booster block and extends from the top end to the bottom end;

[0015] Preferably, the air guide grooves extend in a straight line and are parallel to the generatrix of the outer peripheral side of the cone, and are radial;

[0016] More preferably, the straight extension direction of the air guide groove is inclined relative to the generatrix of the outer peripheral side surface of the cone, and is in a rotating radial shape.

[0017] Furthermore, the gas guide groove includes a gas gathering section penetrating the top end and an injection section penetrating the bottom end, and the gas gathering section and the injection section are connected and spirally wound on the outer peripheral side of the energy booster block in the same direction.

[0018] Furthermore, the gas guide groove includes a gas gathering section penetrating the top end and an injection section penetrating the bottom end, the gas gathering section and the injection section are connected and spirally wound in opposite directions on the outer peripheral side of the energy booster block;

[0019] Preferably, the air guide groove further includes a diffuser section located between the air gathering section and the injection section;

[0020] More preferably, the groove depth of the diffuser section is greater than the groove depth of the gas gathering section and the groove depth of the injection section.

[0021] Furthermore, a plurality of mutually independent and evenly distributed air guide grooves are provided on the outer peripheral surface of the energy boosting block.

[0022] Furthermore, it also includes an air guide cover with an opening at one end, the opening of the air guide cover covers the air outlet and the side wall of the air guide cover is provided with a through hole.

[0023] Furthermore, it also includes a fixing hole, which has a sleeve portion for fixing the air intake pipe and an air guide portion for fixing the air guide cover, the air guide portion is connected to the sleeve portion and the central axes coincide with each other, the diameter of the air guide portion is larger than the diameter of the sleeve portion, the opening of the air guide cover is embedded in the air guide portion, and the air intake pipe is inserted in the sleeve portion.

[0024] The present invention also provides a deposition furnace, which is equipped with any of the above-mentioned air intake components.

[0025] After adopting the above technical scheme, the present invention has the following beneficial effects compared with the prior art.

[0026] 1. The air intake component can change and control the flow state of the gas in the pipeline by arranging an energy-enhancing block in the pipeline, so that the cross-section of the energy-enhancing block continues to increase along the direction from the air inlet to the air outlet, and can control the effective cross-sectional area for the gas to pass through in the air intake pipe to continuously decrease from the air inlet to the air outlet, thereby causing the gas to be continuously squeezed in the process of flowing to the air outlet, greatly increasing the pressure and speed of the gas ejected from the air outlet, so that the gas ejected from the air intake component has greater kinetic energy, avoiding the deposition of carbon atoms in the gas.

[0027] 2. By changing the external shape of the energy booster block and making it a cone with its apex facing the air inlet, the resistance of the energy booster block to the gas is greatly reduced, and the impact of the gas on the top of the energy booster block is eliminated through the tip of the energy booster block, avoiding turbulence of the gas in the air intake pipe to cause noise.

[0028] 3. A gas guide groove is set on the energy booster block so that the gas ejected from the gas outlet can be more evenly mixed into the deposition chamber of the deposition furnace, so that when the gas passes through the gas guide groove, it can drive the energy booster block to rotate in the air inlet pipe, so that the gas can be sprayed into the deposition chamber from the gas outlet of the air inlet pipe in a continuously rotating manner at all angles and in all directions, thereby improving the uniformity of carbon atoms in the gas and eliminating the problem of carbon atoms depositing at low places.

[0029] 4. By treating the preform with the deposition furnace, the kinetic energy of the gas entering the deposition furnace can be increased through the air intake assembly during the ventilation process, thereby making the density of carbon atoms in the gas in the deposition furnace more uniform. Ultimately, the proportion of carbon atoms in the gaseous carbon that can be deposited on the preform can be greatly increased, the efficiency of the deposition furnace, the effect of carburizing the preform, and the quality of the treated preform can be improved.

[0030] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The accompanying drawings are part of the present invention and are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention, but do not constitute an improper limitation of the present invention. Obviously, the drawings described below are only some embodiments. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the accompanying drawings:

[0032] Figure 1 is a schematic diagram of an air intake assembly of a deposition furnace of the present invention;

[0033] Figure 2 is a schematic diagram of an energy enhancement block of the present invention;

[0034] Figure 3 is a schematic diagram of another energy-enhancing block of the present invention;

[0035] Figure 4 is a schematic diagram of another energy-enhancing block of the present invention;

[0036] Figure 5 is a schematic diagram of an air guide hood of the present invention;

[0037] Figure 6 is a cross-sectional schematic diagram of an air guide hood of the present invention;

[0038] Figure 7 is a schematic diagram of the assembly of internal components of a deposition furnace of the present invention;

[0039] Figure 8 yes Figure 7 An enlarged schematic diagram of a gas component in a local area E;

[0040] Fig. 9 It is a structural schematic diagram of a preheating chamber of a deposition furnace in the present invention;

[0041] Fig.10 It is a cross-sectional schematic diagram of the main components of a deposition furnace of the present invention;

[0042] Fig.11It is a three-dimensional schematic diagram of a muffle cover of a deposition furnace of the present invention;

[0043] Fig.12 is a schematic diagram of a base of a deposition furnace of the present invention;

[0044] Fig.13 It is a schematic diagram of a support plate of a deposition furnace of the present invention.

[0045] Among them: 101, preheating chamber; 110, base; 111, sink; 112, support surface; 113, fixing hole; 115, air guide; 116, sleeve; 120, support plate; 121, air vent; 130, muffle cover; 131, cylinder; 132, sealing ring; 133, exhaust pipe; 134, top plate; 135, exhaust port; 200, air intake assembly; 210, air intake pipe; 211, upper limit ring; 212, Lower limit ring; 220, energy booster block; 221, gas guide groove; 222, tip; 223, gas gathering section; 224, pressure diffuser section; 225, injection section; 226, air inlet; 227, air outlet; 228, top; 229, bottom; 230, air guide hood; 231, guide surface; 232, through hole; 233, end cover; 234, side wall; 235, open mouth; 300, upper furnace body; 310, deposition chamber; 400, lower furnace body.

[0046] It should be noted that these drawings and textual descriptions are not intended to limit the conceptual scope of the present invention in any way, but are intended to illustrate the concept of the present invention for those skilled in the art by referring to specific embodiments. DETAILED DESCRIPTION

[0047] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. The following embodiments are used to illustrate the present invention but are not used to limit the scope of the present invention.

[0048] In the description of the present invention, it should be noted that the terms "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0049] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "contacted", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0050] Embodiment 1

[0051] like Figure 1 As shown, in an embodiment of the present invention, an air intake assembly 200 is introduced. The air intake assembly 200 includes an air intake pipe 210 having an air intake port 226 and an air outlet 227, and also includes an energy booster block 220. The energy booster block 220 is movably disposed in the air intake pipe 210 and the cross section of the energy booster block 220 gradually increases along the direction from the air intake port 226 to the air outlet 227.

[0052] Specifically, Figure 1 As shown, the air intake pipe 210 can be set as a straight hollow pipe, an upper limit ring 211 is set at the port above the air intake pipe 210, and a lower limit ring 212 is set at the port below the air intake pipe 210, and the energy booster block 220 is movably placed in the hollow pipe of the air intake pipe 210.

[0053] like Figure 1 As shown, the energy booster block 220 is a cylindrical component with a continuously changing cross-sectional size, and the cross-sectional size of the energy booster block 220 changes along the central axis direction of the air inlet pipe 210. For example, the cross-sectional size of the energy booster block 220 gradually increases from the air inlet 226 to the air outlet 227, or the cross-sectional size of the energy booster block 220 gradually decreases from the air inlet 226 to the air outlet 227.

[0054] In this embodiment, the air intake component 200 is capable of changing and controlling the flow state of the gas in the pipeline by arranging an energy boosting block 220 in the pipeline, so that the cross-section of the energy boosting block 220 continues to increase along the direction from the air inlet 226 to the air outlet 227, and the effective cross-sectional area for the gas to pass through in the air intake pipe 210 can be controlled to continuously decrease from the air inlet 226 to the air outlet 227, thereby causing the gas to be continuously squeezed in the process of flowing toward the air outlet 227, greatly increasing the pressure and speed of the gas ejected from the air outlet 227, so that the gas ejected from the air intake component 200 has greater kinetic energy, thereby avoiding the deposition of carbon atoms in the gas.

[0055] In another embodiment of the present invention, when using the air intake assembly 200 to ventilate the deposition furnace, the structure of the air intake assembly 200 is improved to prevent the energy booster block 220 from being flushed out of the air intake pipe 210 into the deposition furnace by the gas and being difficult to remove, thereby affecting the use of the deposition furnace.

[0056] The energy booster block 220 includes a top end 228 facing the air inlet 226 and a bottom end 229 facing the air outlet 227. A stopper protruding along the radial direction of the air inlet pipe 210 and toward the central axis of the air inlet pipe 210 is provided at the air inlet 226 and / or the air outlet 227.

[0057] The limiting portion overlaps with the energy boosting block 220 in a cross section perpendicular to the central axis of the air intake pipe 210, so as to limit the energy boosting block 220 in the air intake pipe 210. For example, an upper limiting ring 211 and a lower limiting ring 212 having a central hole whose diameter is smaller than the diameter of the bottom end 229 of the energy boosting block 220 are respectively arranged at the air intake port 226 and the air outlet 227 of the air intake pipe 210.

[0058] Specifically, the end of the energy booster block 220 with the smallest cross section is set as the top end 228 and the end with the largest cross section is set as the bottom end 229. When the energy booster block 220 is placed in the air inlet pipe 210, the top end 228 of the energy booster block 220 faces the air inlet port 226 of the air inlet pipe 210, and the bottom end 229 of the energy booster block 220 faces the air outlet port 227 of the air inlet pipe 210. In this way, when the air is ventilated from the air inlet port 226 of the air inlet pipe 210 to the deposition furnace, a flow channel with a gradually decreasing effective cross-flow area is formed in the air inlet pipe 210, so that the air pressure and speed of the gas are greatly increased when the gas reaches the air outlet port 227 of the air inlet pipe 210.

[0059] like Figure 2 As shown, in another embodiment of the present invention, in order to eliminate or reduce the turbulence caused by the plane rebound airflow of the top 228 of the gas impact energizing block 220, thereby avoiding the vibration and noise generated, a cross-section of the top 228 is reduced.

[0060] Specifically, the cross section of the top 228 of the energy boosting block 220 is gradually reduced and contracted to a point to form a tip 222, so that the energy boosting block 220 is in a cone shape as a whole. Figure 1 As shown, relative to the position of the air inlet 226 at the bottom and the air outlet 227 at the top of the air inlet pipe 210, the energy booster block 220 is in the shape of an inverted cone.

[0061] In this embodiment, by changing the outer shape of the energy boosting block 220 and making the energy boosting block 220 in a conical shape with the vertex facing the air inlet 226, the resistance of the energy boosting block 220 to the gas is greatly reduced, and the impact of the gas on the top 228 of the energy boosting block 220 is eliminated through the tip 222 of the energy boosting block 220, thereby avoiding the turbulence of the gas in the air inlet pipe 210 to cause noise.

[0062] like Figures 2 to 4 As shown, in another embodiment of the present invention, in order to allow the gas ejected from the gas outlet 227 to be evenly mixed into the deposition chamber 310 of the deposition furnace, a gas guide groove 221 is provided on the energy booster block 220, so that when the gas passes through the gas guide groove 221, it can drive the energy booster block 220 to rotate in the air inlet pipe 210, so that the gas can be sprayed into the deposition chamber 310 from the gas outlet 227 of the air inlet pipe 210 in a continuously rotating manner at all angles and in all directions.

[0063] Specifically, a gas guide groove 221 for guiding gas is provided on the outer circumferential side surface of the energy booster block 220. The gas guide groove 221 is recessed in the direction of the central axis of the energy booster block 220 and extends from the top 228 of the energy booster block 220 to the bottom 229 of the energy booster block 220. The path of the gas guide groove 221 can be a straight radial pattern parallel to the generatrix of the outer circumferential side surface of the cone, or a rotating radial pattern with an angle to the generatrix of the outer circumferential side surface of the cone.

[0064] like Figure 2 and Figure 3 As shown, in another embodiment of the present invention, in order to further enhance the rotational torque generated by the gas on the energy booster block 220 when the gas passes through the gas guide groove 221, the gas guide groove 221 is spirally wound on the outer circumferential side of the energy booster block 220, and the gas guide groove 221 is divided into two sections, one section is a gas gathering section 223, and the other section is an injection section 225.

[0065] Specifically, the gas guide groove 221 connected to the top 228 of the energy booster block 220 is divided from the middle of the height of the energy booster block 220 as the gas gathering section 223, and the gas guide groove 221 connected to the bottom 229 of the energy booster block 220 is the injection section 225. The gas gathering section 223 and the injection section 225 can be directly connected and spirally wound in the same direction on the outer circumferential side of the energy booster block 220. For example, they are spirally wound in a clockwise direction at the same time, or they are spirally wound in a counterclockwise direction at the same time.

[0066] Further, the air guide groove 221 includes a gas gathering section 223 connected to the top end 228 and an injection section 225 connected to the bottom end 229, and the gas gathering section 223 and the injection section 225 are connected in opposite directions at the middle of the outer circumferential surface of the cone. For example, the gas gathering section 223 is spirally wound on the outer circumferential surface in a clockwise direction, while the injection section 225 is spirally wound on the outer circumferential surface in a counterclockwise direction. Alternatively, the gas gathering section 223 is spirally wound on the outer circumferential surface in a counterclockwise direction, while the injection section 225 is spirally wound on the outer circumferential surface in a clockwise direction.

[0067] Further, in order to optimize the effect of the gas gathering section 223 and the injection section 225 being connected in opposite directions and prolong the time for the gas to pass through the gas guide groove 221, the gas guide groove 221 further includes a diffuser section 224. The diffuser section 224 is located between the gas gathering section 223 and the injection section 225. The diffuser section 224 is located in the middle of the outer circumferential surface of the cone, and the groove depth of the diffuser section 224 is greater than the groove depth of the gas gathering section 223 and the groove depth of the injection section 225.

[0068] In this embodiment, by providing the gas guide groove 221 to extend in a spiral manner on the outer circumferential surface of the energy booster block 220, the rotation effect of the gas on the energy booster block 220 when passing through the gas guide groove 221 is further increased, and the speed of changing the direction of the gas ejected from the air intake assembly 200 can be increased. The gas guide groove 221 is divided and arranged into a plurality of functional sections with different winding directions, which can further increase the force of the gas on the energy booster block 220 and improve the energy boosting and mixing effect of the energy booster block 220 on the gas.

[0069] like Figure 4 As shown, in another embodiment of the present invention, in order to make the force of the gas on the energy booster block 220 more evenly distributed on the outer surface of the energy booster block 220, a plurality of gas guide grooves 221 are provided on the outer circumferential surface of the energy booster block 220. Each gas guide groove 221 is an independent channel for gas circulation, and at least two gas guide grooves 221 are evenly distributed on the outer circumferential surface of the energy booster block 220.

[0070] like Figure 7 and Figure 8 As shown, in another embodiment of the present invention, in order to limit the flow direction of the gas ejected from the air inlet pipe 210 within a plane, an air guide cover 230 is provided above the air outlet 227 of the air inlet pipe 210, and one end of the air guide cover 230 has an opening 235, and the opening 235 of the air guide cover 230 covers the air outlet 227.

[0071] Specifically, Figure 5 and Figure 6As shown, the air guide cover 230 includes an end cover 233, a side wall 234 and a through hole 232. The side wall 234 is arranged to form a cylinder, and then one end of the cylinder is connected to the end cover 233, and the other end of the cylinder forms an opening 235. A plurality of through holes 232 are arranged on the side wall 234 and are evenly distributed along the circumference of the side wall 234.

[0072] Furthermore, in order to reduce the loss of kinetic energy of the ejected gas caused by the air guide cover 230, a conical guide surface 231 is formed on the inner surface of the end cover 233, and the vertex of the guide surface 231 protrudes toward the opening 235. In order to allow the gas to smoothly rush out of the air guide cover 230, all the through holes 232 are provided on the side wall 234 connected to one end of the end cover 233, and the circumferential edge of the guide surface 231 extends to the through holes 232.

[0073] In this embodiment, an air guide hood 230 is provided above the air outlet 227 of the air inlet pipe 210 so that the injection directions of the gases into the deposition furnace are all on the same horizontal plane. The air guide hood 230 is used to guide the ejected gases, thereby reducing the energy loss of the gases, ensuring the uniformity of the carbon atom density in the gases, and improving the effect of preform processing.

[0074] like Figure 8 As shown, in another embodiment of the present invention, in order to connect and fix the air guide cover 230 to the air intake pipe 210 and ensure the overall stability of the air intake assembly 200, a fixing hole 113 is further provided on the component for mounting the air intake pipe 210 and the air guide cover 230.

[0075] Specifically, the forming surface of the fixing hole 113 is cylindrical, and the fixing hole 113 includes an air guide portion 115 and a sleeve portion 116. The sleeve portion 116 is used to fix the air intake pipe 210, and the air guide portion 115 is used to fix the air guide cover 230.

[0076] The diameter of the air guide portion 115 is greater than the diameter of the sleeve portion 116. The air guide portion 115 is connected to the sleeve portion 116 and the central axes of the two coincide. When the air guide cover 230 is connected to the fixing hole 113, the opening 235 of the air guide cover 230 is embedded in the air guide portion 115. When the air intake pipe 210 is connected to the fixing hole 113, the air intake pipe 210 is inserted into the sleeve portion 116.

[0077] In this embodiment, the air guide cover 230 and the air intake pipe 210 can be fixedly connected by directly setting the fixing hole 113 on the component of the deposition furnace. The stability of the positional relationship between the air guide cover 230 and the air intake pipe 210 is ensured, the overall stability of the air intake assembly 200 is ensured, and the components used to fix the air guide cover 230 and the air intake pipe 210 are saved.

[0078] like Figures 10 to 13As shown, the present invention also provides a deposition furnace equipped with the above-mentioned air intake assembly 200. The deposition furnace includes a lower furnace body 400 provided with an air intake pipe 210, a base 110 and a support plate 120 installed in the lower furnace body 400, and also includes an upper furnace body 300 buckled on the upper part of the lower furnace body 400, the support plate 120 is horizontally placed in the lower furnace body 400, one side of the support plate 120 forms a deposition chamber 310, and the other side covers the base 110 to form a preheating chamber 101, the support plate 120 is provided with an air hole 121 connecting the deposition chamber 310 and the preheating chamber 101, and the base 110 is provided with a fixing hole 113 connecting the preheating chamber 101 and the air intake pipe 210.

[0079] By treating the preform with the deposition furnace, the kinetic energy of the gas entering the deposition furnace can be increased by the gas inlet assembly 200 during the ventilation process, thereby making the density of carbon atoms in the gas in the deposition furnace more uniform. Ultimately, the proportion of carbon atoms in the gaseous carbon that can be deposited on the preform can be greatly increased, thereby improving the efficiency of the deposition furnace, the effect of carburizing the preform, and the quality of the treated preform.

[0080] Embodiment 2

[0081] like Fig.10 As shown, in this embodiment, a deposition furnace equipped with the above-mentioned air intake assembly is introduced. The deposition furnace includes a lower furnace body 400 provided with an air intake pipe 210, a base 110 installed in the lower furnace body 400, and a support plate 120. Among them, the base 110 can heat the gas. The deposition furnace also includes an upper furnace body 300 buckled on the lower furnace body 400, and the upper furnace body 300 has a cavity with an opening facing downward. The upper furnace body 300 and the lower furnace body 400 are buckled to form a closed space.

[0082] Specifically, the support plate 120 is placed horizontally in the lower furnace body 400 and completely separates the space in the deposition furnace. Thus, a deposition chamber 310 is formed on one side of the support plate 120. A base 110 is provided on the other side of the support plate 120, and the support plate 120 covers the base 110 to form a preheating chamber 101. At the same time, a vent hole 121 is provided on the support plate 120, and the vent hole 121 connects the deposition chamber 310 and the preheating chamber 101. A fixing hole 113 is provided on the base 110 to connect the preheating chamber 101 and the air inlet pipe 210.

[0083] Furthermore, the lower furnace body 400 has a cavity with an opening facing upward, the base 110 is installed inside the cavity and fixedly connected to the bottom wall of the lower furnace body 400, and the support plate 120 covers the base 110 and fills the cavity opening of the lower furnace body 400. The air inlet pipe 210 is arranged on the bottom wall of the lower furnace body 400, and the fixing hole 113 is opened on one side of the base 110 that is close to the bottom wall, and the fixing hole 113 is sleeved on the air inlet pipe 210.

[0084] Preferably, the support plate 120 is a circular flat plate and the preheating chamber 101 is in a flat cylindrical shape, and the diameter of the preheating chamber 101 is slightly smaller than the diameter of the support plate 120 .

[0085] In the present embodiment, the deposition furnace is provided with a preheating chamber 101 for heating the gas below the deposition chamber 310, so that the gas can complete the decomposition process in the preheating chamber 101, so that the gas entering the deposition chamber 310 is gaseous carbon that can directly perform deposition processing on the preform, which greatly reduces the time for depositing carbon on the preform. The gas flows from the preheating chamber 101 to the deposition chamber 310 from bottom to top, which is consistent with the direction of gas and heat dissipation transfer, thereby ensuring that the gas has a uniform temperature field in the deposition chamber 310, so that the deposition furnace can process preforms with larger specifications and sizes.

[0086] like Figures 7 to 10 As shown, in another embodiment of the present invention, in order to allow all the gas leading to the preheating chamber 101 to be ejected in the diameter direction, an air guide hood 230 is provided in the preheating chamber 101, and the air guide hood 230 is used to guide the gas.

[0087] Specifically, the fixing hole 113 of the base 110 is sleeved on the air inlet pipe 210, and an air guide cover 230 covering the air outlet 227 is provided above the air outlet 227 of the air inlet pipe 210. The air guide cover 230 is provided with an opening 235, and the air guide cover 230 is embedded in the fixing hole 113 in a manner that the opening 235 faces the air inlet pipe 210.

[0088] In this embodiment, a gas guide hood 230 is provided in the preheating chamber 101 so that the injection directions of the gases into the deposition furnace are all on the same horizontal plane. The gas guide hood 230 is used to guide the ejected gases, thereby reducing the energy loss of the gases, ensuring the uniformity of the carbon atom density in the gases, and improving the effect of preform processing.

[0089] like Figures 7 to 10 As shown, in another embodiment of the present invention, in order to make the flow direction of the gas sprayed into the preheating chamber 101 along the diameter direction of the preheating chamber 101, an air guide hood 230 connected to the fixing hole 113 is provided in the preheating chamber 101, and one end of the air guide hood 230 has an opening 235, and the opening 235 of the air guide hood 230 is embedded in the fixing hole 113.

[0090] Specifically, Figure 5 and Figure 6As shown, the air guide cover 230 includes an end cover 233, a side wall 234 and a through hole 232. The side wall 234 is arranged to form a cylindrical shape, and then one end of the cylinder is connected to the end cover 233, and the other end of the cylinder forms an opening 235. A plurality of through holes 232 are arranged on the side wall 234 and are evenly distributed along the circumference of the side wall 234. The through holes 232 of the air guide cover 230 at least partially expose the fixing hole 113.

[0091] Furthermore, in order to reduce the loss of kinetic energy of the ejected gas caused by the air guide cover 230, a conical guide surface 231 is formed on the inner surface of the end cover 233, and the vertex of the guide surface 231 protrudes toward the opening 235. In order to allow the gas to smoothly rush out of the air guide cover 230, all the through holes 232 are provided on the side wall 234 connected to one end of the end cover 233, and the circumferential edge of the guide surface 231 extends to the through holes 232.

[0092] In order to reduce the loss caused by gas impact on the guide surface 231 and ensure the guiding effect of the guide surface 231 , the distance from the vertex of the guide surface 231 to the end cover 233 is set to be at least greater than the radius of the through hole 232 .

[0093] In this embodiment, an air guide hood 230 is provided at the fixed hole 113 of the preheating chamber 101 so that the injection directions of the gases into the deposition furnace are all on the same horizontal plane. The air guide hood 230 is used to guide the ejected gases, thereby reducing the energy loss of the gases, ensuring the uniformity of the carbon atom density in the gases, and improving the effect of preform processing.

[0094] like Fig.12 As shown, in another embodiment of the present invention, in order to reduce the difficulty of making the preheating chamber 101 and reduce the cost of making the deposition furnace, a sinking groove 111 is opened in the middle of the end surface of the base 110, so that the preheating chamber 101 is formed by covering the sinking groove 111 with a support plate 120.

[0095] Specifically, the depth of the sink 111 is at least greater than the diameter of the through hole 232 of the air guide cover 230. The diameter of the sink 111 is smaller than the diameter of the end surface of the base 110, so that an annular support surface 112 is formed on the upper end surface of the base 110 for connecting and cooperating with the support plate 120. The support plate 120 is arranged to fit the support surface 112 of the base 110 to cover the sink 111 of the base 110 to form the preheating chamber 101.

[0096] Preferably, in order to ensure that the gas introduced into the deposition furnace is evenly diffused in the preheating chamber 101 , the fixing hole 113 is opened in the center of the trough 111 , and the air inlet pipe 210 is also correspondingly arranged at the center of the bottom wall of the lower furnace body 400 .

[0097] Further preferably, in order to ensure that the relative position of the air guide cover 230 and the air intake pipe 210 is accurate and stable and to ensure the air intake effect, the fixing hole 113 includes a sleeve portion 116 and an air guide portion 115. The sleeve portion 116 is used to fix the air intake pipe 210, and the air guide portion 115 is used to fix the air guide cover 230.

[0098] Furthermore, the diameter of the air guide portion 115 is greater than the diameter of the sleeve portion 116, the air guide portion 115 is connected to the sleeve portion 116, and the central axes of the two coincide. When the air guide cover 230 is connected to the fixing hole 113, the opening 235 of the air guide cover 230 is embedded in the air guide portion 115. When the air intake pipe 210 is connected to the fixing hole 113, the air intake pipe 210 is inserted into the sleeve portion 116.

[0099] In order to reduce the impact of gas on the air guide cover 230 and reduce the noise generated by the gas passing through the through hole 232 of the air guide cover 230, the diameter of the air guide portion 115 of the fixing hole 113 is set to be at least twice the diameter of the sleeve portion 116, so that when the air guide cover 230 is embedded in the air guide portion 115, a space for buffer gas is formed between the air guide cover 230 and the intake pipe 210.

[0100] In this embodiment, a fixing hole 113 is provided on the base 110, and the air guide cover 230 and the air intake pipe 210 are fixedly connected by using the fixing hole 113. The stability of the positional relationship between the air guide cover 230 and the air intake pipe 210 is ensured, the overall stability of the air intake assembly 200 is ensured, and the components used to fix the air guide cover 230 and the air intake pipe 210 are saved.

[0101] like Figures 7 to 10 As shown, in another embodiment of the present invention, in order to prevent the gaseous carbon entering the deposition chamber 310 from directly contacting the heating layer inside the upper furnace body 300, thereby forming a deposited carbon layer on the surface of the heating layer, changing the thermal conductivity, electrical conductivity and other properties of the heating layer, and causing the deposition furnace to malfunction. When the deposition furnace is used to carburize the preform, a muffle cover 130 is provided in the deposition chamber 310 to prevent the gaseous carbon from diffusing to the heating layer, and the cavity opening of the muffle cover 130 faces downward and is connected to the support plate 120. The muffle cover 130 covers all the preforms to be processed and the air holes 121 on the support plate 120.

[0102] Specifically, Fig.10 and Fig.11 As shown, the muffle cover 130 is cylindrical and is buckled on the support plate 120. The diameter of the cross section of the muffle cover 130 is larger than the diameter of the cross section of the preheating chamber 101. At the same time, the diameter of the cross section of the muffle cover 130 is smaller than the diameter of the cross section of the deposition chamber 310, so as to ensure that the gaseous carbon is fully deposited on the preform in the cavity of the muffle cover 130.

[0103] In another embodiment of the present invention, in order to improve the adaptability of the muffle cover 130 to various preform specifications and sizes, reduce the number of the muffle covers 130 and save costs, the muffle cover 130 is configured as a split structure.

[0104] Specifically, the muffle cover 130 includes a plurality of cylinders 131, a sealing ring 132 and a top plate 134. The cylinder 131 is composed of a cylindrical thin wall. The sealing ring 132 is a circular sheet structure, and the diameter of the sealing ring 132 is the same as the diameter of the cylinder 131. When the muffle cover 130 is used in the deposition furnace, the cylinder 131 and the sealing ring 132 are alternately stacked, and then the top plate 134 is covered on the top.

[0105] Furthermore, an exhaust pipe 133 is provided at the top of the muffle cover 130 to discharge the waste gas after use. At this time, an exhaust port 135 is correspondingly opened on the top plate 134, so that the exhaust pipe 133 is connected to the top plate 134 and covers the exhaust port 135.

[0106] Preferably, a pipeline connected to the exhaust pipe 133 may be provided in the upper furnace body 300, or a through hole 232 may be directly opened in the upper furnace body 300 so that the exhaust pipe 133 penetrates the upper furnace body 300 and leads to the outside of the deposition furnace.

[0107] In this embodiment, by arranging the muffle 130 in the deposition chamber 310, the gas containing carbon atoms can only diffuse in the cavity of the muffle 130, thereby avoiding the contact between the gaseous carbon and the heating layer of the upper furnace body 300, thereby preventing the harm of depositing a carbon layer on the heating layer. At the same time, the muffle 130 is improved into a split structure, which improves the adaptability of the muffle 130 to various preform specifications and sizes, reduces the number of muffles 130 and saves costs.

[0108] Embodiment 3

[0109] In this embodiment, a process of carburizing a preform using a deposition furnace equipped with an air intake assembly is introduced: first, the preform is placed in the deposition furnace; second, the deposition furnace is closed and the internal cavity reaches a vacuum value of 2500pa; then, the temperature inside the deposition furnace is controlled to increase and maintain the temperature at about 1100 degrees; finally, methane gas is controlled to continue to flow into the deposition furnace for 180 hours, with a gas flow rate of 100L / min.

[0110] The above is only a preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this patent can make some changes or modify the technical contents suggested above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention still fall within the scope of the solution of the present invention.

Claims

1. An air intake assembly for a deposition furnace, comprising an air intake pipe (210) having an air inlet (226) and an air outlet (227), characterized in that , It also includes an energy boosting block (220) movably arranged in the air intake pipe (210), the top end (228) of the energy boosting block (220) facing the air intake port (226), and the bottom end (229) opposite to the top end (228) facing the air outlet port (227), and the cross section of the energy boosting block (220) perpendicular to its extension direction gradually increases from the top end (228) to the bottom end (229); a limiting portion protruding radially toward the central axis of the air intake pipe (210) is arranged at the air intake port (226) and the air outlet (227), and the limiting portion overlaps with the energy boosting block (220) in a cross section perpendicular to the central axis of the air intake pipe (210), so as to limit the energy boosting block (220) in the air intake pipe (210); The cross section of the top end (228) gradually narrows to a point to form a tip (222), and the energy booster block (220) is in a conical shape; a gas guide groove (221) for guiding gas is provided on the outer peripheral side surface of the energy booster block (220); the gas guide groove (221) is recessed in the direction of the central axis of the energy booster block (220) and extends from the top end (228) to the bottom end (229); the linear extension direction of the gas guide groove (221) is inclined relative to the generatrix of the outer peripheral side surface of the cone, and is in a rotating radial shape.

2. The gas inlet assembly of a deposition furnace according to claim 1, characterized in that: The limiting portion is an upper limiting ring (211) and a lower limiting ring (212) having a central hole and a diameter of the central hole smaller than a diameter of the bottom end (229).

3. The gas inlet assembly of a deposition furnace according to claim 2, characterized in that: An upper limit ring (211) and a lower limit ring (212) are respectively detachably fixed on the two ends of the air intake pipe (210).

4. The gas inlet assembly of a deposition furnace according to claim 1, characterized in that: The gas guide groove (221) comprises a gas gathering section (223) penetrating the top end (228) and an injection section (225) penetrating the bottom end (229); the gas gathering section (223) and the injection section (225) are connected and spirally wound in the same direction on the outer peripheral side of the energy boosting block (220).

5. The gas inlet assembly of a deposition furnace according to claim 1, characterized in that: The gas guide groove (221) comprises a gas gathering section (223) penetrating the top end (228) and an injection section (225) penetrating the bottom end (229); the gas gathering section (223) and the injection section (225) are connected and spirally wound in opposite directions on the outer peripheral side of the energy boosting block (220).

6. The gas inlet assembly of a deposition furnace according to claim 4 or 5, characterized in that: The air guide groove (221) further comprises a diffuser section (224) located between the air gathering section (223) and the injection section (225).

7. The gas inlet assembly of a deposition furnace according to claim 6, characterized in that: The groove depth of the diffuser section (224) is greater than the groove depth of the gas gathering section (223) and the groove depth of the injection section (225).

8. The gas inlet assembly of a deposition furnace according to claim 1, characterized in that: A plurality of mutually independent and evenly distributed air guide grooves (221) are provided on the outer peripheral side surface of the energy boosting block (220).

9. The gas inlet assembly of a deposition furnace according to claim 1, characterized in that: It also includes an air guide cover (230) having an opening (235) at one end, the opening (235) of the air guide cover (230) covers the air outlet (227), and a through hole (232) is provided on a side wall of the air guide cover (230).

10. The gas inlet assembly of a deposition furnace according to claim 9, characterized in that: It also includes a fixing hole (113), the fixing hole (113) having a sleeve portion (116) for fixing the air intake pipe (210) and an air guide portion (115) for fixing the air guide cover (230), the air guide portion (115) being connected to the sleeve portion (116) and having central axes that coincide with each other, the diameter of the air guide portion (115) being greater than the diameter of the sleeve portion (116), the opening of the air guide cover (230) being embedded in the air guide portion (115), and the air intake pipe (210) being inserted into the sleeve portion (116).

11. A deposition furnace, characterized in that: The deposition furnace is equipped with an air intake assembly as described in any one of claims 1 to 10.

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