A vacuum coating chamber and a vacuum coating device including the chamber

Abstract

The present invention relates to the field of vacuum coating technology, specifically to a vacuum coating equipment, including a vacuum coating machine body, and also including an arc striking device, the arc striking device is arranged in a vacuum chamber, and there are multiple arc striking devices; a rotating shaft, the rotating shaft is rotatably arranged on the arc striking device. When using this vacuum coating equipment, first hang the workpiece to be coated on a hanger, and then transport it to the front of the vacuum coating machine body, then pick up the hanger and align it with a Y-shaped track, so that the connecting rod is docked with the Y-shaped track, and after completion, push the hanger to make the connecting rod drive the push rod to move, the push rod displacement drives the rack to move, further drives the first rotating gear to rotate, synchronously drives the second rotating gear to rotate, and then drives the gear ring and the rotating plate to rotate, drives the fixed seat in the rotating groove to align with the Y-shaped track, and at the same time, the connecting rod engages with the clamping groove under the elastic force of the compression spring to complete the fixation of the hanger.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating, in particular to a vacuum coating chamber and vacuum coating equipment comprising the chamber. Background Art

[0002] Vacuum coating technology mainly involves the separation of atoms of materials from a heating source within a vacuum chamber and hitting the surface of the object to be plated. Currently, decorative coating or functional coating of metal or plastic products such as electronic products and optical components can be obtained through vacuum coating technology. Usually, a rack is fixed in the vacuum coating chamber, and the coating effect is achieved by energizing the target material and the workpiece. Currently, the coating machines on the market are relatively simple, that is, there is only a corresponding rack for a certain type of coating workpiece, and the size, shape and number are fixed. The spacing between the racks cannot be adjusted according to the size and shape of the workpiece to be plated, which results in the vacuum chamber space in the coating machine cannot be fully utilized, resulting in a waste of resources. To this end, we propose a vacuum coating chamber and a vacuum coating equipment including the chamber. Summary of the invention

[0003] The object of the present invention is to provide a vacuum coating chamber and a vacuum coating device including the chamber to solve the problems raised in the above background technology.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] A vacuum coating chamber comprises a vacuum chamber, characterized in that it also comprises a cooling chamber, wherein the cooling chamber is arranged around the peripheral side and the top side of the vacuum chamber.

[0006] A vacuum coating device includes a vacuum coating machine body and an arc-striking device, wherein the arc-striking device is arranged in a vacuum chamber, and the number of the arc-striking devices is plural; a rotating shaft, wherein the rotating shaft is rotatably arranged on the arc-striking device; a fixed seat, wherein the fixed seat is arranged on the arc-striking device, and the number of the fixed seats is plural; a bracket, wherein the bracket is arranged on the fixed seat; an adjusting component, wherein the adjusting component is arranged on the arc-striking device, and the fixed seat is controlled by the adjusting component to adjust the spacing between the brackets, and the number of the adjusting components is plural; a driving component, wherein the driving component is arranged on the arc-striking device, and the fixed seat is driven to move by the driving component, and the number of the driving components is plural; an elastic member, wherein the elastic member is arranged on the bracket, and the bracket is mounted on the fixed seat by the elastic member.

[0007] The measures to further optimize this technical solution are:

[0008] As an improvement, the adjustment assembly includes an adjustment member arranged on the arc striking device, through which the distance between the plurality of fixing seats is adjusted, and a limiting member is arranged on the adjustment member, through which the fixing seat is fixed.

[0009] As an improvement, the adjusting member includes a plurality of rotating plates rotatably arranged on the arc striking device, the rotating plates are connected to the rotating shaft, the rotating plates are provided with rotating grooves, the rotating grooves are slidably connected to the fixed seat, and the fixed seat is provided with a clamping groove.

[0010] As an improvement, the limiting member includes a limiting plate arranged in the rotating groove, a first limiting plate is arranged on the fixed seat, the first limiting plate is slidably connected to the limiting plate, a sliding plate is arranged on the fixed seat, the sliding plate is slidably connected to the fixed seat and the limiting plate, a second limiting plate is arranged on the fixed seat, an extrusion spring is arranged on the fixed seat between the sliding plate and the second limiting plate, and the fixed seat passes through the extrusion spring.

[0011] As an improvement, the driving assembly includes a pushing member arranged on the arc striking device, through which the pushing member provides power for the rotation of the rotating plate. The pushing member is provided with a transmission member, through which the power provided by the pushing member is transmitted. The transmission member is provided with a rotating member, through which the rotating plate is driven to rotate.

[0012] As an improvement, the pushing member includes a Y-shaped track arranged on the arc striking device, a driving groove is arranged on the Y-shaped track, a fixing rod is arranged in the driving groove, a reset spring is arranged on the fixing rod, the reset spring is connected to the driving groove, a connecting plate is slidably arranged on the fixing rod, the connecting plate is connected to the reset spring, and a push rod is arranged on the connecting plate.

[0013] As an improvement, the transmission member includes a sliding groove arranged on the driving groove, a transmission rod is arranged on the connecting plate, the transmission rod is slidably connected to the sliding groove, and a rack is arranged on the transmission rod.

[0014] As an improvement, the rotating member includes a rotating shaft arranged on the arc striking device, a first rotating gear used in conjunction with a rack is arranged on the rotating shaft, a second rotating gear is arranged on the rotating shaft, and a gear ring used in conjunction with the second rotating gear is arranged on the rotating plate.

[0015] As an improvement, the elastic member includes a plurality of storage grooves arranged on the hanger, a compression spring is arranged in the storage groove, a compression plate is arranged on the compression spring, a connecting rod is arranged on the compression plate, and the connecting rod is slidably connected to the storage groove.

[0016] The present invention has at least the following beneficial effects: when using this vacuum coating chamber and the vacuum coating equipment including the chamber, first hang the workpiece to be coated on the hanger, and then transport it to the front of the vacuum coating machine body, then pick up the hanger and align it with the Y-shaped track, so that the connecting rod is docked with the Y-shaped track, and after completion, push the hanger to make the connecting rod drive the push rod to move, and the displacement of the push rod drives the rack to move, further drives the first rotating gear to rotate, and synchronously drives the second rotating gear to rotate, and then drives the gear ring and the rotating plate to rotate, driving the fixed seat in the rotating groove to align with the Y-shaped track, and at the same time, the connecting rod engages with the clamping groove under the elastic force of the compression spring to complete the fixation of the hanger.

[0017] Then push the hanger to make the hanger drive the fixed seat to separate from the push rod, and then the push rod is reset under the elastic force of the reset spring, repeat the above operation, fix multiple hangers to the fixed seat, and then adjust the distance between the hangers according to the workpiece on the hanger. The initial distance between the multiple fixed seats is fixed. When the hanger is removed, the fixed seat is reset and wait for the next use. The overall structure is simple and easy to operate, which greatly improves the utilization rate of the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 For the present invention Figure 1 Another structural diagram;

[0020] Figure 3 For the present invention Figure 2 Schematic diagram of the cross-section structure;

[0021] Figure 4 For the present invention Figure 3 Schematic diagram of the cross-section structure;

[0022] Figure 5 For the present invention Figure 4 Schematic diagram of the enlarged structure of the middle A area;

[0023] Figure 6 For the present invention Figure 4 Schematic diagram of explosion structure;

[0024] Figure 7 For the present invention Figure 6 Schematic diagram of the cross-section structure;

[0025] Figure 8 For the present invention Figure 7 Schematic diagram of the enlarged structure of the middle B area;

[0026] Fig. 9 For the present invention Figure 7 Schematic diagram of the enlarged structure of the middle C area;

[0027] Fig.10 It is a schematic diagram of the explosion structure of the rack of the present invention.

[0028] In the figure: 1. vacuum coating machine body; 2. vacuum chamber; 3. arc striking device; 4. rotating shaft; 5. fixing seat; 6. bracket; 7. adjusting assembly; 8. adjusting member; 81. rotating plate; 82. rotating groove; 83. clamping groove; 9. limiting member; 91. limiting plate; 92. first limiting plate; 93. sliding plate; 94. second limiting plate; 95. extrusion spring; 10. driving assembly; 11. pushing member; 111. Y-shaped track; 112. driving groove; 11 3. Fixed rod; 114. Return spring; 115. Connecting plate; 116. Push rod; 12. Transmission member; 121. Sliding groove; 122. Transmission rod; 123. Rack; 13. Rotating member; 131. Rotating shaft; 132. First rotating gear; 133. Second rotating gear; 134. Ring gear; 14. Elastic member; 141. Storage groove; 142. Compression spring; 143. Compression plate; 144. Connecting rod; 15. Mounting groove; 16. Hook. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Example 1

[0031] See also Figure 1-10 , the present invention provides a technical solution:

[0032] A vacuum coating chamber includes a vacuum chamber 2, characterized in that it also includes a cooling chamber, wherein the cooling chamber is arranged around the circumference and top side of the vacuum chamber 2.

[0033] A vacuum coating device includes a vacuum coating machine body 1, and also includes an arc-striking device 3, which is arranged in a vacuum chamber 2, and there are multiple arc-striking devices 3; a rotating shaft 4, which is rotatably arranged on the arc-striking device 3; a fixed seat 5, which is arranged on the arc-striking device 3, and there are multiple fixed seats 5; a bracket 6, which is arranged on the fixed seat 5; an adjusting component 7, which is arranged on the arc-striking device 3, and the fixed seat 5 is controlled by the adjusting component 7 to adjust the spacing between the brackets 6, and there are multiple adjusting components 7; a driving component 10, which is arranged on the arc-striking device 3, and the fixed seat 5 is driven to move by the driving component 10, and there are multiple driving components 10; an elastic member 14, which is arranged on the bracket 6, and the bracket 6 is installed on the fixed seat 5 through the elastic member 14.

[0034] The adjustment assembly 7 includes an adjustment member 8 arranged on the arc striking device 3, and the distance between the plurality of fixing seats 5 is adjusted by the adjustment member 8. A limiting member 9 is arranged on the adjustment member 8, and the fixing seat 5 is fixed by the limiting member 9.

[0035] The adjusting member 8 includes a plurality of rotating plates 81 rotatably arranged on the arc striking device 3 . The rotating plates 81 are connected to the rotating shaft 4 . The rotating plates 81 are provided with rotating grooves 82 . The rotating grooves 82 are slidably connected to the fixing seat 5 . The fixing seat 5 is provided with a clamping groove 83 .

[0036] The limiting member 9 includes a limiting plate 91 arranged in the rotating groove 82, a first limiting plate 92 is arranged on the fixed seat 5, the first limiting plate 92 is slidably connected to the limiting plate 91, a sliding plate 93 is arranged on the fixed seat 5, the sliding plate 93 is slidably connected to the fixed seat 5 and the limiting plate 91, a second limiting plate 94 is arranged on the fixed seat 5, and an extrusion spring 95 is arranged on the fixed seat 5 between the sliding plate 93 and the second limiting plate 94, and the fixed seat 5 passes through the extrusion spring 95.

[0037] The driving assembly 10 includes a pushing member 11 arranged on the arc striking device 3, and the pushing member 11 provides power for the rotation of the rotating plate 81. A transmission member 12 is arranged on the pushing member 11, and the power provided by the pushing member 11 is transmitted through the transmission member 12. A rotating member 13 is arranged on the transmission member 12, and the rotating plate 81 is driven to rotate through the rotating member 13.

[0038] The pushing member 11 includes a Y-shaped track 111 arranged on the arc striking device 3, a driving groove 112 is arranged on the Y-shaped track 111, a fixing rod 113 is arranged in the driving groove 112, a return spring 114 is arranged on the fixing rod 113, the return spring 114 is connected to the driving groove 112, a connecting plate 115 is slidably arranged on the fixing rod 113, the connecting plate 115 is connected to the return spring 114, and a push rod 116 is arranged on the connecting plate 115.

[0039] The transmission member 12 includes a sliding groove 121 arranged on the driving groove 112 . A transmission rod 122 is arranged on the connecting plate 115 . The transmission rod 122 is slidably connected to the sliding groove 121 . A rack 123 is arranged on the transmission rod 122 .

[0040] The rotating member 13 includes a rotating shaft 131 arranged on the arc striking device 3, a first rotating gear 132 used in conjunction with the rack 123 is arranged on the rotating shaft 131, a second rotating gear 133 is arranged on the rotating shaft 131, and a gear ring 134 used in conjunction with the second rotating gear 133 is arranged on the rotating plate 81.

[0041] The elastic member 14 includes a plurality of receiving grooves 141 arranged on the hanger 6 , a compression spring 142 is arranged in the receiving groove 141 , a compression plate 143 is arranged on the compression spring 142 , a connecting rod 144 is arranged on the compression plate 143 , and the connecting rod 144 is slidably connected to the receiving groove 141 .

[0042] When in use, first hang the workpiece to be coated on the hanger 6, and then transport it to the front of the vacuum coating machine body 1, then pick up the hanger 6 and align it with the Y-shaped track 111, so that the connecting rod 144 is docked with the Y-shaped track 111. After completion, push the hanger 6, so that the connecting rod 144 drives the push rod 116 to move, and the displacement of the push rod 116 drives the rack 123 to move, further drives the first rotating gear 132 to rotate, and synchronously drives the second rotating gear 133 to rotate, and then drives the ring gear 134 and the rotating plate 81 to rotate, driving the fixed seat 5 in the rotating groove 82 to align with the Y-shaped track 111, and at the same time, the connecting rod 144 engages with the clamping groove 83 under the elastic force of the compression spring 142 to complete the fixation of the hanger 6.

[0043] Then push the hanger 6 so that the hanger 6 drives the fixed seat 5 to disengage from the push rod 116, and then the push rod 116 is reset under the elastic force of the reset spring 114, and repeat the above operation to fix multiple hangers 6 to the fixed seat 5, and then adjust the distance between the hangers 6 according to the workpiece on the hanger 6. The initial distance between the multiple fixed seats 5 is fixed. When the hanger 6 is removed, the fixed seat 5 is reset and it can wait for the next use. The overall structure is simple and easy to operate, which greatly improves the utilization rate of the vacuum chamber 2.

[0044] Example 2

[0045] See also Figure 1-10 , the present invention provides a technical solution:

[0046] A vacuum coating chamber includes a vacuum chamber 2, characterized in that it also includes a cooling chamber, wherein the cooling chamber is arranged around the circumference and top side of the vacuum chamber 2.

[0047] A vacuum coating device includes a vacuum coating machine body 1, and also includes an arc-striking device 3, which is arranged in a vacuum chamber 2, and there are multiple arc-striking devices 3; a rotating shaft 4, which is rotatably arranged on the arc-striking device 3; a fixed seat 5, which is arranged on the arc-striking device 3, and there are multiple fixed seats 5; a bracket 6, which is arranged on the fixed seat 5; an adjusting component 7, which is arranged on the arc-striking device 3, and the fixed seat 5 is controlled by the adjusting component 7 to adjust the spacing between the brackets 6, and there are multiple adjusting components 7; a driving component 10, which is arranged on the arc-striking device 3, and the fixed seat 5 is driven to move by the driving component 10, and there are multiple driving components 10; an elastic member 14, which is arranged on the bracket 6, and the bracket 6 is installed on the fixed seat 5 through the elastic member 14.

[0048] The adjustment assembly 7 includes an adjustment member 8 arranged on the arc striking device 3, and the distance between the plurality of fixing seats 5 is adjusted by the adjustment member 8. A limiting member 9 is arranged on the adjustment member 8, and the fixing seat 5 is fixed by the limiting member 9.

[0049] The adjusting member 8 includes a plurality of rotating plates 81 rotatably arranged on the arc striking device 3 . The rotating plates 81 are connected to the rotating shaft 4 . The rotating plates 81 are provided with rotating grooves 82 . The rotating grooves 82 are slidably connected to the fixing seat 5 . The fixing seat 5 is provided with a clamping groove 83 .

[0050] The limiting member 9 includes a limiting plate 91 arranged in the rotating groove 82, a first limiting plate 92 is arranged on the fixed seat 5, the first limiting plate 92 is slidably connected to the limiting plate 91, a sliding plate 93 is arranged on the fixed seat 5, the sliding plate 93 is slidably connected to the fixed seat 5 and the limiting plate 91, a second limiting plate 94 is arranged on the fixed seat 5, and an extrusion spring 95 is arranged on the fixed seat 5 between the sliding plate 93 and the second limiting plate 94, and the fixed seat 5 passes through the extrusion spring 95.

[0051] The driving assembly 10 includes a pushing member 11 arranged on the arc striking device 3, and the pushing member 11 provides power for the rotation of the rotating plate 81. A transmission member 12 is arranged on the pushing member 11, and the power provided by the pushing member 11 is transmitted through the transmission member 12. A rotating member 13 is arranged on the transmission member 12, and the rotating plate 81 is driven to rotate through the rotating member 13.

[0052] The pushing member 11 includes a Y-shaped track 111 arranged on the arc striking device 3, a driving groove 112 is arranged on the Y-shaped track 111, a fixing rod 113 is arranged in the driving groove 112, a return spring 114 is arranged on the fixing rod 113, the return spring 114 is connected to the driving groove 112, a connecting plate 115 is slidably arranged on the fixing rod 113, the connecting plate 115 is connected to the return spring 114, and a push rod 116 is arranged on the connecting plate 115.

[0053] The transmission member 12 includes a sliding groove 121 arranged on the driving groove 112 . A transmission rod 122 is arranged on the connecting plate 115 . The transmission rod 122 is slidably connected to the sliding groove 121 . A rack 123 is arranged on the transmission rod 122 .

[0054] The rotating member 13 includes a rotating shaft 131 arranged on the arc striking device 3, a first rotating gear 132 used in conjunction with the rack 123 is arranged on the rotating shaft 131, a second rotating gear 133 is arranged on the rotating shaft 131, and a gear ring 134 used in conjunction with the second rotating gear 133 is arranged on the rotating plate 81.

[0055] The elastic member 14 includes a plurality of receiving grooves 141 arranged on the hanger 6 , a compression spring 142 is arranged in the receiving groove 141 , a compression plate 143 is arranged on the compression spring 142 , a connecting rod 144 is arranged on the compression plate 143 , and the connecting rod 144 is slidably connected to the receiving groove 141 .

[0056] The hanger 6 is provided with a plurality of mounting slots 15 , on which hooks 16 are movably provided. The provision of the plurality of mounting slots 15 enables the staff to adjust the upper and lower distances of the workpieces on the hanger 6 according to the size of the workpieces, thereby improving the utilization rate of the hanger 6 .

[0057] When in use, first hang the workpiece to be coated on the hanger 6, and then transport it to the front of the vacuum coating machine body 1, then pick up the hanger 6 and align it with the Y-shaped track 111, so that the connecting rod 144 is docked with the Y-shaped track 111. After completion, push the hanger 6, so that the connecting rod 144 drives the push rod 116 to move, and the displacement of the push rod 116 drives the rack 123 to move, further drives the first rotating gear 132 to rotate, and synchronously drives the second rotating gear 133 to rotate, and then drives the ring gear 134 and the rotating plate 81 to rotate, driving the fixed seat 5 in the rotating groove 82 to align with the Y-shaped track 111, and at the same time, the connecting rod 144 engages with the clamping groove 83 under the elastic force of the compression spring 142 to complete the fixation of the hanger 6.

[0058] Then push the hanger 6 so that the hanger 6 drives the fixed seat 5 to disengage from the push rod 116, and then the push rod 116 is reset under the elastic force of the reset spring 114, and repeat the above operation to fix multiple hangers 6 to the fixed seat 5, and then adjust the distance between the hangers 6 according to the workpiece on the hanger 6. The initial distance between the multiple fixed seats 5 is fixed. When the hanger 6 is removed, the fixed seat 5 is reset and wait for the next use. The setting of multiple installation grooves 15 allows the staff to adjust the upper and lower distances of the workpieces on the hanger 6 according to the size of the workpiece, thereby improving the utilization rate of the hanger 6. The overall structure is simple and easy to operate, which greatly improves the utilization rate of the vacuum chamber 2.

[0059] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0060] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating device, comprising a vacuum coating machine body (1), characterized in that: A vacuum coating chamber, the vacuum coating chamber comprising a vacuum chamber (2) and a cooling chamber, the cooling chamber being arranged around the periphery and top side of the vacuum chamber (2); Also includes An arc striking device (3), wherein the arc striking device (3) is arranged in the vacuum chamber (2), and there are a plurality of arc striking devices (3); A rotating shaft (4), wherein the rotating shaft (4) is rotatably arranged on the arc striking device (3); A fixing seat (5), the fixing seat (5) being arranged on the arc striking device (3), and the fixing seat (5) being in a plurality; A hanging bracket (6), wherein the hanging bracket (6) is arranged on the fixing base (5); An adjusting component (7), wherein the adjusting component (7) is arranged on an arc striking device (3), and the fixing seat (5) is controlled by the adjusting component (7) to adjust the spacing between the hangers (6). There are a plurality of adjusting components (7), and the adjusting component (7) comprises an adjusting member (8) arranged on the arc striking device (3), and the distance between the plurality of fixing seats (5) is adjusted by the adjusting member (8). The adjusting member (8) is provided with a limiting member (9), and the fixing seat (5) is fixed by the limiting member (9). The adjusting member (8) comprises a plurality of rotating plates (81) rotatably arranged on the arc striking device (3), and the rotating plates (81) are connected to the rotating shaft (4), and the rotating plates (81) are provided with a rotating groove (82). The rotating groove (82) is slidably connected with the fixed seat (5), the fixed seat (5) is provided with a clamping groove (83), the limiting member (9) comprises a limiting plate (91) arranged in the rotating groove (82), the fixed seat (5) is provided with a first limiting plate (92), the first limiting plate (92) is slidably connected with the limiting plate (91), the fixed seat (5) is provided with a sliding plate (93), the sliding plate (93) is slidably connected with the fixed seat (5) and the limiting plate (91), the fixed seat (5) is provided with a second limiting plate (94), the fixed seat (5) is provided with an extrusion spring (95) between the sliding plate (93) and the second limiting plate (94), and the fixed seat (5) passes through the extrusion spring (95); A driving assembly (10), wherein the driving assembly (10) is arranged on the arc striking device (3), and the fixing seat (5) is driven to move by the driving assembly (10), and the driving assembly (10) is multiple; An elastic member (14), wherein the elastic member (14) is arranged on the hanging bracket (6), and the hanging bracket (6) is mounted on the fixing seat (5) via the elastic member (14).

2. The vacuum coating device according to claim 1, characterized in that: The driving assembly (10) comprises a pushing member (11) arranged on the arc striking device (3), and the pushing member (11) is used to provide power for the rotation of the rotating plate (81); a transmission member (12) is arranged on the pushing member (11), and the power provided by the pushing member (11) is transmitted through the transmission member (12); a rotating member (13) is arranged on the transmission member (12), and the rotating plate (81) is driven to rotate through the rotating member (13).

3. A vacuum coating device according to claim 2, characterized in that: The pushing member (11) comprises a Y-shaped track (111) arranged on the arc striking device (3), the Y-shaped track (111) being provided with a driving groove (112), a fixing rod (113) being provided in the driving groove (112), a return spring (114) being provided on the fixing rod (113), the return spring (114) being connected to the driving groove (112), a connecting plate (115) being slidably provided on the fixing rod (113), the connecting plate (115) being connected to the return spring (114), and a pushing rod (116) being provided on the connecting plate (115).

4. The vacuum coating device according to claim 3, characterized in that: The transmission member (12) comprises a sliding groove (121) arranged on the driving groove (112); a transmission rod (122) is arranged on the connecting plate (115); the transmission rod (122) is slidably connected to the sliding groove (121); and a rack (123) is arranged on the transmission rod (122).

5. The vacuum coating device according to claim 4, characterized in that: The rotating member (13) comprises a rotating shaft (131) arranged on the arc striking device (3); a first rotating gear (132) for use in conjunction with a rack (123) is arranged on the rotating shaft (131); a second rotating gear (133) is arranged on the rotating shaft (131); and a gear ring (134) for use in conjunction with the second rotating gear (133) is arranged on the rotating plate (81).

6. The vacuum coating equipment according to claim 5, characterized in that: The elastic member (14) comprises a plurality of receiving grooves (141) arranged on the hanger (6), a compression spring (142) being arranged in the receiving groove (141), a compression plate (143) being arranged on the compression spring (142), a connecting rod (144) being arranged on the compression plate (143), and the connecting rod (144) being slidably connected to the receiving groove (141).

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