Coating device and coating method

Abstract

The present invention discloses a coating device and a coating method, wherein the coating device comprises: a circular track, a plurality of coating platforms, a coating assembly, a loading assembly and a unloading assembly. The coating platform circulates on the circular track, and the coating assembly comprises a bracket and a coating head, and the coating head is arranged above the circular track, and the coating platform drives the substrate to move relative to the coating head along the coating direction. Among them, when the coating head coats the substrate located at the coating station, the substrate on the coating platform located at the coating station is arranged against the substrate to be coated on the adjacent coating platform. The coating device of the present application can continuously coat the substrate, which not only shortens the production cycle of the perovskite battery, but also makes the coating of each substrate more uniform, improves the quality of the perovskite battery, and thus reduces the production cost of the perovskite battery.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and in particular to a coating equipment and a coating method. Background Art

[0002] With the rapid development of new energy, perovskite cells, as a new type of solar cells with high efficiency and low cost, have been widely used in photovoltaic power generation, optoelectronic devices, photoelectric sensors and other fields.

[0003] In the prior art, the preparation process of perovskite cells is as follows: after the loading component transfers the substrate to the coating station, the coating head first pre-coates the substrate in the pre-coating device and then coats the substrate, and the unloading component transfers the coated substrate from the coating station, and the cycle continues. Since the coating head is in a waiting state when the substrate is unloaded and loaded, it not only prolongs the production cycle of the perovskite cell, but also reduces the coating efficiency of the coating head, thereby reducing the overall working efficiency of the coating equipment. In addition, since there is an interval time between each coating of the coating head, the coating head needs to be pre-coated by the mask roller of the pre-coating device before each coating. After each pre-coating, the cleaning component of the pre-coating device needs to use a cleaning liquid to clean the mask roller, which leads to a waste of the coating liquid and greatly increases the amount of cleaning liquid used in the pre-coating device, thereby increasing the production cost of the perovskite cell. How to improve the efficiency of the coating equipment is a difficult problem that needs to be solved urgently. Summary of the invention

[0004] The object of the present invention is to provide a coating device and a coating method, which can continuously coat substrates, which not only shortens the production cycle of perovskite cells and improves production efficiency, but also makes the coating of each substrate more uniform, improves the quality of perovskite cells, and reduces the waste of coating liquid and reduces the use of cleaning liquid of the pre-coating device, thereby reducing the production cost of perovskite cells.

[0005] The purpose of the present invention is achieved by the following technical solutions:

[0006] A coating device, comprising:

[0007] Circular track;

[0008] A plurality of coating platforms, wherein the coating platforms are used to place substrates, and the coating platforms cyclically move on the annular track;

[0009] A coating assembly, the coating assembly comprising a bracket and a coating head disposed on the bracket, the coating head being disposed above the annular track, the coating platform driving the substrate to move relative to the coating head along a coating direction, and the coating head coating the substrate;

[0010] A loading assembly and a unloading assembly, wherein the loading assembly is used to transfer the substrate to be coated onto the coating platform, and the unloading assembly is used to transfer the coated substrate from the coating platform;

[0011] Wherein, when the coating head is coating the substrate located at the coating station, the substrate on the coating platform of the coating station is arranged close to the substrate to be coated on the adjacent coating platform.

[0012] Preferably, a discharge slit is provided on the side of the coating head facing the substrate, the coating width of the discharge slit is greater than the width of the substrate, and mask rollers are provided at both ends of the discharge slit for coating liquid that exceeds the width of the substrate.

[0013] The beneficial effect of this technical solution is that due to the uneven distribution of the coating liquid at both ends of the discharge slit, the coating liquid on the substrate near the two ends of the discharge slit is unevenly distributed, thereby affecting the quality of the perovskite battery. The coating width of the discharge slit in this application is greater than the substrate width, and the two ends of the discharge slit can protrude from the two ends of the substrate, that is, the coating liquid at both ends of the discharge slit will not be coated on the substrate, so that the coating liquid on the substrate is evenly distributed, avoiding uneven coating at the edge of the substrate, and also preventing leakage of coating at the edge of the substrate, thereby improving the quality of the perovskite battery. By arranging mask rollers at both ends of the discharge slit, the coating liquid at both ends of the discharge slit is coated on the mask roller, and the mask roller takes away the excess coating liquid.

[0014] Preferably, cleaning components are provided at both ends of the discharge slit, and the cleaning components are used to clean the mask roller.

[0015] Preferably, it further comprises a measuring module, wherein the measuring module is used to measure the surface height of the substrate to be coated located on the coating platform.

[0016] Preferably, the coating platform comprises a stage and a base, and a first driving device disposed between the stage and the base, and the first driving device drives the stage to move up and down according to the measurement data of the measurement module;

[0017] The number of the first driving devices is two or three. When the number of the first driving devices is two, the two first driving devices are respectively arranged at two ends of the stage. When the number of the first driving devices is three, the three first driving devices are distributed in a triangle.

[0018] Preferably, the coating assembly further comprises a second driving device, which is disposed on the bracket and drives the coating head to move up and down according to the measurement data of the measurement module; and / or,

[0019] The coating assembly further comprises a balancing device, which is arranged on the bracket and is used for applying a force in the direction opposite to the gravity to the coating head.

[0020] Preferably, a plurality of magnetic drive sub-slide blocks are arranged on the annular track, the coating platform is arranged on the magnetic drive sub-slide blocks, and the magnetic drive sub-slide blocks drive the coating platform to circulate on the annular track.

[0021] Preferably, the circular track has a first straight track and a second straight track that are relatively arranged, and a first curved track and a second curved track that are relatively arranged, the first straight track is located above the second straight track, the coating head is arranged above the first straight track, the loading assembly and the unloading assembly are respectively arranged close to the first curved track and the second curved track, when the magnetic drive sub-slider is located at the first straight track, the upper surface of the coating platform is arranged upward, and when the magnetic drive sub-slider is located at the second straight track, the upper surface of the coating platform is arranged downward.

[0022] Preferably, the loading assembly comprises a loading carrier, a loading front section and a loading rear section, the loading carrier is used to place the substrate to be coated, the loading front section is used to transport the substrate to be coated on the loading carrier to the loading rear section, and the loading rear section is used to transport the substrate to be coated to the coating platform;

[0023] The unloading component includes an unloading front section, an unloading rear section and an unloading carrier. The unloading front section is used to transport the coated substrate on the coating platform to the unloading rear section, and the unloading rear section is used to transport the coated substrate to the unloading carrier.

[0024] Preferably, it further comprises a liquid supply system, which is communicated with the coating head and provides coating liquid to the coating head.

[0025] A coating method, using any one of the coating devices described above, the coating method comprising:

[0026] The loading assembly transfers the substrate to be coated to the coating platform;

[0027] The substrate to be coated moves with the coating platform to below the coating head, and the coating head coats the substrate to be coated, and the next substrate to be coated moves with the coating platform and is placed close to the substrate being coated;

[0028] The unloading assembly transfers the coated substrate from the coating platform.

[0029] Compared with the prior art, the beneficial effects of the present invention include at least:

[0030] The coating equipment and coating method of the present invention are characterized by multiple coating platforms circulating on a circular track. When the coating head coats the substrate located at the coating station, the substrate on the coating platform located at the coating station is arranged close to the substrate to be coated on the adjacent coating platform. That is to say, driven by the coating platform, the substrate being coated and the substrate to be coated can be spliced ​​together, and the loading component, the coating head and the unloading component can operate synchronously. The coating head can continuously coat the substrate, which not only shortens the production cycle of the perovskite battery and improves the production efficiency, but also makes the coating of each substrate more uniform, improves the quality of the perovskite battery, and the coating head does not need to pre-coat on the pre-coating device when coating different substrates, reduces the waste of coating liquid and reduces the use of cleaning liquid of the pre-coating device, thereby reducing the production cost of the perovskite battery. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the three-dimensional structure of the coating device of an embodiment of the present invention from one viewing angle.

[0032] Figure 2 yes Figure 1 A partial enlarged view of point A in the middle.

[0033] Figure 3 It is a schematic diagram of the three-dimensional structure of the coating device of an embodiment of the present invention from another perspective.

[0034] Figure 4 It is a schematic diagram of the three-dimensional structure of the coating platform and the magnetic drive sub-slider in the embodiment of the present invention.

[0035] Figure 5 It is a schematic diagram of the planar structure of the coating device of an embodiment of the present invention from one viewing angle.

[0036] Figure 6 It is a schematic diagram of the planar structure of the coating device of an embodiment of the present invention from another perspective.

[0037] Figure 7 Schematic diagram of the structure of the liquid supply system in the embodiment of the present invention.

[0038] Figure 8 Detailed description of the invention The invention relates to a coating method according to an embodiment of the invention.

[0039] In the figure: 100, coating equipment; 1, circular track; 11, magnetic drive sub-slider; 12, first linear track; 13, second linear track; 14, first arc track; 15, second arc track; 2, coating platform; 21, loading table; 22, base; 23, first driving device; 3, coating assembly; 31, bracket; 311, crossbeam; 312, first column; 313, second column; 32, coating head; 321, discharge slit; 33, second driving device; 34, balancing device; 4, upper Material assembly; 41, material loading carrier; 42, material loading front section; 43, material loading rear section; 5, material unloading assembly; 51, material unloading front section; 52, material unloading rear section; 53, material unloading carrier; 6, mask roller; 7, cleaning assembly; 8, measurement module; 9, liquid supply system; 90, solution tank; 91, liquid supply pump; 92, air pump; 93, pressure tank; 94, first pressure sensor; 95, degassing filter; 96, flow sensor; 97, vacuum tank; 98, second pressure sensor; 99, vacuum pump; 200, substrate. DETAILED DESCRIPTION

[0040] Example embodiments will now be described more fully with reference to the accompanying drawings. However, example embodiments can be implemented in a variety of forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided to make the present invention more comprehensive and complete and to fully convey the concepts of example embodiments to those skilled in the art. The same reference numerals in the figures represent the same or similar structures, and thus their repeated description will be omitted.

[0041] The words expressing positions and directions described in the present invention are all explained with reference to the accompanying drawings as examples, but they can be changed as needed, and all such changes are included in the protection scope of the present invention.

[0042] refer to Figures 1 to 7The present invention provides a coating device 100, including: a circular track 1, multiple coating platforms 2, a coating component 3, a loading component 4 and a unloading component 5, the coating platform 2 can circulate on the circular track 1, the coating head 32 of the coating component 3 can be arranged above the circular track 1, and the loading component 4 and the unloading component 5 are respectively arranged near the two ends of the circular track 1. The coating device 100 may also include a mask roller 6, a cleaning component 7, a measuring module 8 and a liquid supply system 9. The coating width of the discharge slit 321 of the coating head 32 is greater than the width of the substrate 200. Mask rollers 6 are provided at both ends of the discharge slit 321. The coating liquid at both ends of the discharge slit 321 is coated on the mask roller 6. The cleaning component 7 can remove foreign matter such as the coating liquid on the mask roller 6 to ensure that the surface of the mask roller 6 remains clean. The measuring module 8 is used to measure the surface height of the substrate 200 to be coated on the coating platform 2. Through the adjustment of the first drive device 23 and the second drive device 33, it is ensured that the coating head 32 remains parallel to the upper surface of the substrate 200 and the distance is equal. The liquid supply system 9 can provide the coating head 32 with continuous and stable coating liquid to ensure that the coating head 32 can continuously coat.

[0043] Specifically, refer to Figure 1 , Figure 3 , Figure 5 , the circular track 1 as a whole can be in a circular, elliptical or approximately elliptical shape. As a preferred embodiment, the circular track 1 as a whole is approximately elliptical, and the circular track 1 can have a first linear track 12 and a second linear track 13 that are relatively arranged, and a first curved track 14 and a second curved track 15 that are relatively arranged, that is, the first curved track 14 and the second curved track 15 are respectively arranged at the two ends of the first linear track 12, or the first curved track 14 and the second curved track 15 are respectively arranged at the two ends of the second linear track 13. The first linear track 12 and the second linear track 13 can be arranged in the same horizontal plane, that is, the circular track 1 is arranged parallel to the horizontal plane, and the first linear track 12 and the second linear track 13 can also be at a certain angle, that is, the circular track 1 is arranged at a certain angle to the horizontal plane. In this embodiment, the circular track 1 is arranged vertically to the horizontal plane, and the first linear track 12 can be arranged above the second linear track 13.

[0044] The coating platform 2 is used to place the substrate 200. The coating platform 2 can be circulated on the circular track 1. Each coating platform 2 can place one or more substrates 200. In the present embodiment, each coating platform 2 places a substrate 200. Each coating platform 2 can be independently operated, that is, multiple coating platforms 2 will not interfere with each other. When the coating platform 2 is located at the first linear track 12, the upper surface of the coating platform 2 can be set upward, while ensuring that the coating head 32 can coat the substrate 200, it can also prevent the substrate 200 from falling off the coating platform 2. When the coating platform 2 is located at the second linear track 13, the upper surface of the coating platform 2 is set downward, so that foreign matter on the coating platform 2 can fall off under the action of gravity, avoiding foreign matter from contaminating the substrate 200 and ensuring the quality of the perovskite cell. The substrate 200 can be a crystalline silicon substrate, a glass substrate, etc. In the present application, the substrate 200 is taken as a crystalline silicon substrate as an example for explanation, and a crystalline silicon perovskite cell is formed by coating a perovskite solution on the crystalline silicon substrate.

[0045] As a preferred method, refer to Figure 1 , Figure 3 , Figure 4 , Figure 5 , a plurality of magnetically driven sub-slide blocks 11 may be arranged on the circular track 1, and the coating platform 2 may be arranged on the magnetically driven sub-slide blocks 11, and the magnetically driven sub-slide blocks 11 may drive the coating platform 2 to circulate on the circular track 1. When the magnetically driven sub-slide block 11 is located on the first linear track 12, the upper surface of the coating platform 2 is arranged upward, and when the magnetically driven sub-slide block 11 is located on the second linear track 13, the upper surface of the coating platform 2 is arranged downward. The magnetically driven sub-slide block 11 may rotate clockwise or counterclockwise on the circular track 11. In the present embodiment, the magnetically driven sub-slide block 11 rotates counterclockwise on the circular track 11, that is, the magnetically driven sub-slide block 11 drives the coating platform 2 to rotate counterclockwise on the circular track 11.

[0046] The coating assembly 3 may include a bracket 31 and a coating head 32 disposed on the bracket 31. The coating head 32 may be disposed above the first linear track 12. The coating platform 2 may drive the substrate 200 to move relative to the coating head 32 along the coating direction, and the coating head 32 coats the substrate 200. In this embodiment, the bracket 31 of the coating assembly 3 is, for example, a gantry bracket 31. In the coating direction, the position of the bracket 31 is preferably fixed, that is, the coating platform 2 drives the substrate 200 to move from below the coating head 32, and the coating head 32 coats the substrate 200.

[0047] refer to Figure 1 , Figure 3 , Figure 6The bracket 31 may include a crossbeam 311 and a first column 312 and a second column 313 respectively arranged at both ends of the crossbeam 311, the first column 312 and the second column 313 are respectively arranged on both sides of the first linear track 12, the crossbeam 311 is arranged above the first linear track 12, and the coating head 32 can be arranged on the crossbeam 311.

[0048] The loading assembly 4 is used to transfer the substrate 200 to be coated onto the coating platform 2, and the unloading assembly 5 is used to transfer the coated substrate 200 from the coating platform 2. The loading assembly 4 and the unloading assembly 5 can be respectively arranged near the first arc track 14 and the second arc track 15. In this embodiment, in the coating direction, the loading assembly 4 and the unloading assembly 5 are respectively arranged on both sides of the coating assembly 3. Specifically, the loading assembly 4 may include a loading carrier 41, a loading front section 42 and a loading rear section 43. The loading carrier 41 is used to place the substrate 200 to be coated. The loading carrier 41 can place multiple substrates 200 at the same time. The loading front section 42 is used to transport the substrate 200 to be coated on the loading carrier 41 to the loading rear section 43. The loading rear section 43 is used to transport the substrate 200 to be coated to the coating platform 2. The unloading component 5 may include a unloading front section 51, a unloading rear section 52 and a unloading carrier 53. The unloading front section 51 is used to transport the coated substrate 200 on the coating platform 2 to the unloading rear section 52, and the unloading rear section 52 is used to transport the coated substrate 200 to the unloading carrier 53. The unloading carrier 53 can place multiple substrates 200 at the same time.

[0049] When the coating head 32 coats the substrate 200 located at the coating station, the substrate 200 on the coating platform 2 located at the coating station is placed close to the substrate 200 to be coated on the adjacent coating platform 2, that is, there is no gap or almost no gap between the adjacent substrates 200. During operation, the loading component 4 and the unloading component 5 preferably operate synchronously with the coating head 32. Specifically, the loading component 4 transfers the substrate 200 to be coated to the coating platform 2, and the coating platform 2 moves the substrate 200 to the coating station, that is, under the coating head 32. While the coating head 32 coats the substrate 200, the loading component 4 continues to transfer the substrate 200 to be coated to the next coating platform 2, and the coating platform 2 drives the substrate 200 to move and approach the previous coating platform 2, so that the substrate 200 to be coated is placed close to the substrate 200 being coated. In this way, the coating head 32 can achieve continuous coating, which is equivalent to adjacent substrates. 200 are spliced ​​together to form a continuous whole. Compared with discontinuous coating, during discontinuous coating, adjacent substrates 200 are spaced apart, and there is a pause between coating of different substrates 200 by the coating head 32. When the coating head 32 starts coating and ends coating, it is easy to cause incomplete coating or even missing coating of the front and rear ends of the substrate 200 in the coating direction. Continuous coating can avoid the problem of incomplete coating and missing coating of the substrate 200. When the coating of the substrate 200 is completed, the unloading component 5 transfers the coated substrate 200 from the coating platform 2, and the coating platform 2 of the transferred substrate 200 moves to the first arc track 14 to continue to participate in the circulation operation.

[0050] In the present application, multiple coating platforms 2 are circulated on the circular track 1. When the coating head 32 coats the substrate 200 located at the coating station, the substrate 200 on the coating platform 2 located at the coating station is arranged close to the substrate 200 to be coated on the adjacent coating platform 2. That is to say, driven by the coating platform 2, the substrate 200 being coated and the substrate 200 to be coated can be spliced ​​together, and the loading component 4, the coating head 32 and the unloading component 5 can operate synchronously. The coating head 32 can continuously coat the substrate 200, which not only shortens the production cycle of the perovskite battery and improves the production efficiency, but also enables each substrate 200 to be coated more evenly, thereby improving the quality of the perovskite battery. Moreover, when the coating head 32 coats different substrates 200, there is no need to pre-coat them on the pre-coating device, thereby reducing the waste of coating liquid and reducing the amount of cleaning liquid used in the pre-coating device, thereby reducing the production cost of the perovskite battery.

[0051] In a specific embodiment, reference Figure 2A discharge slit 321 may be provided on the side of the coating head 32 facing the substrate 200 , and the coating width of the discharge slit 321 is greater than the width of the substrate 200 . Mask rollers 6 are provided at both ends of the discharge slit 321 , and the mask rollers 6 are used for coating the discharge liquid from the discharge slit that exceeds the width of the substrate 200 , that is, the coating liquid at both ends of the discharge slit 321 is coated on the mask roller 6 . Since the coating liquid at both ends of the discharge slit 321 is unevenly distributed, the coating liquid on the substrate 200 near both ends of the discharge slit 321 is unevenly distributed, thereby affecting the quality of the perovskite battery. The two ends of the discharge slit 321 in the present application can protrude from the two ends of the substrate 200, that is, the coating liquid at both ends of the discharge slit 321 will not be coated on the substrate 200, so that the coating liquid on the substrate 200 is evenly distributed, avoiding uneven coating at the edge of the substrate 200, and also preventing the edge of the substrate 200 from leaking coating, thereby improving the quality of the perovskite battery. By arranging mask rollers 6 at both ends of the discharge slit 321, the coating liquid at both ends of the discharge slit 321 is coated on the mask roller 6, and the mask roller 6 takes away the excess coating liquid.

[0052] As a preferred method, refer to Figure 2 Cleaning components 7 may also be provided at both ends of the discharge slit 321, and the cleaning components 7 are used to clean the mask roller 6. The cleaning components 7 can remove foreign matter such as coating liquid on the mask roller 6, ensure that the surface of the mask roller 6 remains clean, and prevent foreign matter on the surface of the mask roller 6 from contaminating the coating head 32, thereby ensuring the uniformity of coating by the coating head 32, thereby further improving the quality of the perovskite cell.

[0053] In a specific embodiment, reference Figure 1 , Figure 3 The coating device 100 may further include a measuring module 8, which is used to measure the surface height of the substrate 200 to be coated on the coating platform 2. The measuring module 8 may be arranged on the crossbeam 311, or the measuring module 8 may be arranged independently. In the present embodiment, the measuring module 8 may be arranged on one side of the crossbeam 311 close to the first arc track 14. The measuring module 8 is, for example, a laser sensor, and the number of the measuring modules 8 may be one or more. In the present embodiment, the number of the measuring modules 8 is two.

[0054] As a preferred method, refer to Figure 1 , Figure 3 , Figure 4The coating platform 2 may include a stage 21 and a base 22 and a first driving device 23 disposed between the stage 21 and the base 22. The first driving device 23 may drive the stage 21 to rise and fall according to the measurement data of the measurement module 8, thereby driving the substrate 200 to rise and fall, so that the distance from the upper surface of the substrate 200 located on different coating platforms 2 to the coating head 32 is equal, which can not only adjust the thickness of the coating liquid coated on the substrate 200, but also make the coating liquid uniformly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the perovskite cell. The first driving device 23 may be a piezoelectric ceramic actuator, so that the first driving device 23 can not only drive the stage 21 to rise and fall, but also support the stage 21.

[0055] Specifically, the number of the first driving devices 23 is two or three, and of course the number of the first driving devices 23 can also be one or more than three. When the number of the first driving devices 23 is two, the two first driving devices 23 are respectively arranged at the two ends of the stage 21, that is, in the direction perpendicular to the coating direction, the two first driving devices 23 are respectively arranged at the two ends of the stage 21, or in other words, in the width direction of the substrate 200, the two first driving devices 23 are respectively arranged at the two ends of the stage 21. The two first driving devices 23 can simultaneously drive the two ends of the stage 21 to move in the same direction, or simultaneously drive the two ends of the stage 21 to move in opposite directions, or one of the first driving devices 23 can drive one end of the stage 21 to move, and the other first driving device 23 remains stationary. In other words, the two first driving devices 23 are independent of each other, and can drive the stage 21 together at the same time, or can drive the stage 21 alone. When the whole stage 21 needs to be raised or lowered, the two first driving devices 23 can drive the stage 21 to be raised or lowered at the same time, and the two ends of the stage 21 can be kept relatively level. When one end of the stage 21 needs to be raised and the other end needs to be lowered, one first driving device 23 can drive one end of the stage 21 to be raised, and the other first driving device 23 can drive the other end of the stage 21 to be lowered. When only one end of the stage 21 needs to be raised or lowered, only one first driving device 23 is needed to drive the end of the stage 21 that needs to be raised or lowered. In this embodiment, the two first driving devices 23 are independently arranged, and the position of the stage 21 can be adjusted according to actual needs. In the width direction of the substrate 200, the problem of one high and one low end of the stage 21 or one high and one low end of the substrate 200 caused by parts processing errors, assembly errors, etc. can be eliminated, so as to ensure that the surface of the substrate 200 remains parallel to the coating head 32, that is, to ensure that the distance from the upper surface of the substrate 200 located on different coating platforms 2 to the coating head 32 is equal, which can not only adjust the thickness of the coating liquid coated on the substrate 200, but also make the coating liquid uniformly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the perovskite cell.

[0056] When the number of the first driving devices 23 is three, the three first driving devices 23 are distributed in a triangle, and the three first driving devices 23 are also preferably independent of each other. The three first driving devices 23 can ensure that the stage 21 is balanced on the one hand, so that the lifting of the stage 21 is more stable, and on the other hand, can ensure that each first driving mechanism is evenly stressed, that is, each first driving mechanism is evenly loaded, so that each first driving mechanism runs more stably and smoothly, and can also prevent the first driving mechanism from affecting the positioning accuracy or causing damage to the first driving mechanism due to excessive load.

[0057] The stage 21 may be provided with an adsorption device (not shown). When the substrate 200 is placed on the stage 21, the adsorption device may fix the substrate 200 to prevent the position of the substrate 200 from shifting and warping, thereby making the surface of the substrate 200 smoother and improving the uniformity of coating. In some embodiments, the stage 21 itself is the adsorption device.

[0058] refer to Figure 1 , Figure 3 , Figure 7 The coating assembly 3 may also include a second drive device 33, which may be disposed on the bracket 31. The second drive device 33 may drive the coating head 32 to rise and fall according to the measurement data of the measurement module 8. The number of the second drive devices 33 may be one or more. In the present embodiment, the number of the second drive devices 33 is two. The two second drive devices 33 are disposed on the first column 312 and the second column 313, respectively. The two second drive devices 33 may drive both ends of the beam 311 to rise and fall, and the beam 311 drives the coating head 32 to rise and fall. The two second drive devices 33 are also preferably independent of each other. The second drive device 33 may be a servo module, or other types of drive components. As an example, the second drive device 33 includes a motor and a guide rail. The drive end of the motor rises and falls or retracts along the guide rail, and the beam 311 is connected to the drive end of the motor.

[0059] In the width direction of the substrate 200, the two second driving devices 33 can eliminate the problem that the two ends of the stage 21 are one high and one low or the two ends of the substrate 200 are one high and one low due to part processing errors, assembly errors, etc. When the surface of the substrate 200 is not parallel to the coating head 32 in the width direction of the substrate 200, the two second driving devices 33 can respectively drive the two ends of the coating head 32 to move in different directions, or one of the second driving devices 33 is stationary, and the other second driving device 33 drives one end of the coating head 32 to rise and fall, so that the surface of the substrate 200 is parallel to the coating head 32 in the width direction of the substrate 200, ensuring that the distance from the upper surface of the substrate 200 located on different coating platforms 2 to the coating head 32 is equal, not only can the thickness of the coating liquid coated on the substrate 200 be adjusted, but also the coating liquid can be evenly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the perovskite cell.

[0060] In the length direction of the substrate 200, the two second driving devices 33 can also eliminate the problem that the two ends of the stage 21 are one high and one low or the two ends of the substrate 200 are one high and one low due to part processing errors, assembly errors, etc. When the surface of the substrate 200 is not parallel to the coating head 32 in the length direction of the substrate 200, the length direction of the substrate 200 is the coating direction, and the two second driving devices 33 can simultaneously drive the coating head 32 to move in the same direction, so that the distance between the surface of the substrate 200 and the coating head 32 in the length direction of the substrate 200 remains equal, ensuring that the distance from the upper surface of the substrate 200 located on different coating platforms 2 to the coating head 32 is equal, not only can the thickness of the coating liquid coated on the substrate 200 be adjusted, but also the coating liquid can be evenly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the perovskite cell.

[0061] refer to Figure 1 , Figure 3 , Figure 6The coating assembly 3 may further include a balancing device 34. The balancing device 34 may be disposed on the bracket 31. The balancing device 34 is used to apply a force to the coating head 32 in the direction opposite to the gravity. The number of the balancing devices 34 may be one or more. In the present embodiment, the number of the balancing devices 34 is two. The two balancing devices 34 are disposed on the first column 312 and the second column 313, respectively. The two balancing devices 34 are also preferably independent of each other. The balancing device 34 may be a cylinder module, or other types of balancing components. As an example, the balancing device 34 includes a cylinder and a push rod. The cylinder drives the push rod to rise or fall or extend. The cylinder can also keep the push rod stationary and maintain a certain pulling force or thrust. The two balancing devices 34 may be connected to both ends of the beam 311, that is, the balancing device 34 may apply a certain pulling force or thrust to the beam 311. The balancing device 34 can at least share part of the load of the second drive device 33, so that the load of the second drive device 33 can be reduced, thereby improving the repeatability of the second drive device 33 or making the second drive device 33 always maintain high repeatability, improving product quality, and extending the service life of the second drive device 33, reducing the replacement frequency of the second drive device 33, improving the efficiency of equipment use, and reducing equipment use and maintenance costs. The load mainly refers to the gravity of the beam 311 or the gravity of the coating head 32, and can also refer to the gravity of the beam 311 and the gravity of the coating head 32.

[0062] refer to Figure 7The coating device 100 may further include a liquid supply system 9, which is connected to the coating head 32 and provides the coating head 32 with coating liquid. The liquid supply system 9 may transport the coating liquid in the solution tank 90 to the coating head 32. The liquid supply system 9 may include a liquid supply pump 91, an air pump 92, a pressure tank 93, a first pressure sensor 94, a degassing filter 95, and a flow sensor 96. The liquid supply pump 91 can deliver the coating liquid in the solution bottle to the pressure tank 93, and the pressure tank 93 needs to maintain about half of the liquid height. The first pressure sensor 94 can monitor the pressure in the pressure tank 93. The air pump 92 can fill the pressure tank 93 with gas to increase the pressure and reach a preset value. The pressure tank 93 is provided with a first pressure sensor 94. The coating liquid in the pressure tank can flow into the degassing filter 95. The degassing filter 95 can separate the gas in the coating liquid. The degassing filter 95 is connected to the coating head 32 and provides the coating liquid to the coating head 32. A flow sensor 96 is provided between the degassing filter 95 and the coating head 32. The flow sensor 96 can monitor the flow of the coating liquid entering the coating head 32. When the flow sensor 96 detects that the flow value is stable, the liquid supply pump 91 can adjust the flow of the coating liquid delivered to the pressure tank 93 according to the flow value detected by the flow sensor 96. The liquid supply system 9 can provide the coating head 32 with continuous and stable coating liquid, ensuring that the coating head 32 can continuously coat and also ensuring the coating uniformity of the coating head 32.

[0063] The liquid supply system 9 may also include a vacuum tank 97, a second pressure sensor 98 and a vacuum pump 99. The vacuum tank 97 is connected to the degassing filter 95 and the vacuum pump 99 respectively. The second pressure sensor 98 is used to detect the pressure in the vacuum tank 97. The vacuum pump 99 reduces the pressure of the vacuum tank 97 to a set value.

[0064] refer to Figure 8 The present invention also provides a coating method, using the coating device 100 as described in any one of the above, and the coating method includes: step S10-step S30.

[0065] Step S10: the loading assembly 4 transfers the substrate 200 to be coated to the coating platform 2 .

[0066] Specifically, when the coating platform 2 moves to one end of the first linear track 12 close to the first curved track 14, the front loading section 42 can transport the substrate 200 to be coated on the loading carrier 41 to the rear loading section 43, and the rear loading section 43 can transport the substrate 200 to be coated to the coating platform 2. As a preferred embodiment, before the coating platform 2 moves to the first linear track 12 close to the first curved track 14, the substrate 200 to be coated is located in advance on the front loading section 42 and the rear loading section 43. When the coating platform 2 moves to one end of the first linear track 12 close to the first curved track 14, the rear loading section 43 can transport the substrate 200 to be coated on the rear loading section 43 to the coating platform 2, the front loading section 42 can transport the substrate 200 to be coated on the front loading section 42 to the rear loading section 43, and finally the substrate 200 to be coated on the loading carrier 41 is transported to the front loading section 42. This can reduce the time required to transfer the substrate 200 to be coated to the coating platform 2, thereby improving the efficiency of the equipment operation.

[0067] Step S20: the substrate 200 to be coated moves with the coating platform 2 to below the coating head 32, the coating head 32 coats the substrate 200 to be coated, and the next substrate 200 to be coated moves with the coating platform 2 and is placed close to the substrate 200 being coated.

[0068] Specifically, the substrate 200 to be coated moves with the coating platform 2, the measuring module 8 measures the surface of the substrate 200 to be coated, the first driving device 23 can drive the stage 21 to rise and fall according to the measurement data of the measuring module 8, and the second driving device 33 can also drive the stage 21 to rise and fall according to the measurement data of the measuring module 8, thereby driving the substrate 200 to rise and fall, so that the distance from the upper surface of the substrate 200 located on different coating platforms 2 to the coating head 32 is equal, and the next substrate 200 to be coated moves with the coating platform 2 and is set close to the substrate 200 being coated and has the same moving speed as the substrate 200 being coated. In other words, adjacent substrates 200 are spliced ​​together, and there is no gap between adjacent substrates 200 in the coating direction, and the coating head 32 can continuously coat the substrate 200, that is, there is no pause when the coating head 32 coats different substrates 200, which not only improves the coating efficiency, but also improves the coating quality.

[0069] Step S30 : the unloading component 5 transfers the coated substrate 200 from the coating platform 2 .

[0070] Specifically, after the coating of the substrate 200 is completed, the coated substrate 200 continues to move to the unloading front section 51 along with the coating platform 2, and the unloading front section 51 can transfer the coated substrate 200 to the unloading rear section 52, and the unloading rear section 52 can transfer the coated substrate 200 to the unloading carrier 53, and the empty coating platform 2 continues to move to the end of the first linear track 12 close to the first arc track 14, and the loading component 4 transfers the substrate 200 to be coated to the coating platform 2, and the coating platform 2 performs a cyclic operation. As a preferred mode, after the coating of the substrate 200 is completed, the coating platform 2 can be accelerated to move to the unloading front section 51, which can improve the operation efficiency of the equipment.

[0071] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, substitute and modify the above embodiments within the scope of the invention without departing from the principles and purpose of the present invention. All such changes should fall within the scope of protection of the claims of the present invention.

Claims

1. A coating device, characterized in that: include: Circular track; A plurality of coating platforms, wherein the coating platforms are used to place substrates, and the coating platforms cyclically move on the annular track; A coating assembly, the coating assembly comprising a bracket and a coating head disposed on the bracket, the coating head being disposed above the annular track, the coating platform driving the substrate to move relative to the coating head along a coating direction, and the coating head coating the substrate; A loading assembly and a unloading assembly, wherein the loading assembly is used to transfer the substrate to be coated onto the coating platform, and the unloading assembly is used to transfer the coated substrate from the coating platform; Among them, when the coating head coats the substrate located at the coating station, the substrate on the coating platform located at the coating station is arranged against the substrate to be coated on the adjacent coating platform, and the coating head is provided with a discharge slit on the side facing the substrate, the coating width of the discharge slit is greater than the width of the substrate, and mask rollers are provided at both ends of the discharge slit, and the mask rollers are used for coating the liquid discharged from the discharge slit that exceeds the width of the substrate.

2. The coating device according to claim 1, characterized in that: Cleaning components are also provided at both ends of the discharge slit, and the cleaning components are used to clean the mask roller.

3. The coating device according to claim 1, characterized in that: It also includes a measuring module, which is used to measure the surface height of the substrate to be coated located on the coating platform.

4. The coating device according to claim 3, characterized in that: The coating platform includes a stage and a base, and a first driving device arranged between the stage and the base, wherein the first driving device drives the stage to move up and down according to the measurement data of the measurement module; The number of the first driving devices is two or three. When the number of the first driving devices is two, the two first driving devices are respectively arranged at two ends of the stage. When the number of the first driving devices is three, the three first driving devices are distributed in a triangle.

5. The coating device according to claim 3, characterized in that: The coating assembly further includes a second driving device, which is disposed on the bracket and drives the coating head to move up and down according to the measurement data of the measurement module; and / or, The coating assembly further comprises a balancing device, which is arranged on the bracket and is used for applying a force in the direction opposite to the gravity to the coating head.

6. The coating device according to claim 1, characterized in that: A plurality of magnetic drive sub-slide blocks are arranged on the annular track, the coating platform is arranged on the magnetic drive sub-slide blocks, and the magnetic drive sub-slide blocks drive the coating platform to circulate on the annular track.

7. The coating device according to claim 6, characterized in that: The circular track comprises a first straight track and a second straight track arranged opposite to each other and a first arc track and a second arc track arranged opposite to each other, the first straight track is located above the second straight track, the coating head is arranged above the first straight track, the loading assembly and the unloading assembly are arranged close to the first arc track and the second arc track respectively, when the magnetic drive sub-slider is located at the first straight track, the upper surface of the coating platform is arranged upward, and when the magnetic drive sub-slider is located at the second straight track, the upper surface of the coating platform is arranged downward.

8. The coating device according to claim 1, characterized in that: The loading assembly includes a loading carrier, a loading front section and a loading rear section, wherein the loading carrier is used to place the substrate to be coated, the loading front section is used to transport the substrate to be coated on the loading carrier to the loading rear section, and the loading rear section is used to transport the substrate to be coated to the coating platform; The unloading component includes an unloading front section, an unloading rear section and an unloading carrier. The unloading front section is used to transport the coated substrate on the coating platform to the unloading rear section, and the unloading rear section is used to transport the coated substrate to the unloading carrier.

9. The coating device according to claim 1, characterized in that: The coating head also includes a liquid supply system, which is communicated with the coating head and provides coating liquid to the coating head.

10. A coating method, characterized in that: Using the coating device according to any one of claims 1 to 9, the coating method comprises: The loading assembly transfers the substrate to be coated to the coating platform; The substrate to be coated moves with the coating platform to below the coating head, and the coating head coats the substrate to be coated, and the next substrate to be coated moves with the coating platform and is placed close to the substrate being coated; The unloading assembly transfers the coated substrate from the coating platform.

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