A large-size target material processing full-process automated production line and target material production method

Abstract

The present invention discloses a full-process automated production line for large-size target material processing and a target material production method, and belongs to the field of target material processing technology. The automated production line of the present invention is arranged in a straight line, including a ground track, a robot buffer tray, a robot, an MES system device, a machine tool, a workpiece flipping table, an ultrasonic cleaning tank, a loading table and an unloading table. The present invention processes the workpiece by setting up three machine tools, and uses the ground track and the robot buffer tray placed in parallel in front of the machine tool to move the robot, and completes the workpiece handling action by controlling the robot. At the same time, a workpiece flipping platform is provided, which cooperates with the robot handling to flip the workpiece, and is used to replace manual labor to reduce labor costs; an anti-scratch fixture is provided in the machine tool, which can further reduce the scratches on the target material; the hollow circular holes and ultrasonic cleaning tank of the loading and unloading tables can reduce the residual cutting fluid on the surface of the target material, and avoid the oxidation of the target material resulting in unqualified surface quality; the target material processing information is interconnected with the MES system for easy management.

Description

Technical Field

[0001] The present invention belongs to the technical field of target material processing, and in particular relates to a full-process automated production line for large-size target material processing and a target material production method. Background Art

[0002] The statements in this section are merely intended to provide background information related to the technical solution of the present application to aid understanding, and they do not necessarily constitute prior art for the technical solution of the present application.

[0003] As a key supporting material for extremely large-scale integrated circuits, high-purity sputtering targets have flourished into a specialized industry since the 1990s.

[0004] For the shape processing of the target material, the process design must first be carried out according to the performance of the downstream application field. The processes involved in the manufacture of sputtering targets are delicate and numerous, and the process level will directly affect the quality and yield rate of the sputtering targets. The shape processing requirements of sputtering targets are extremely high. No scratches or dents are allowed on the surface of the finished workpiece after processing. The surface color must be bright and consistent after processing, and no abnormal knife marks or discoloration defects are allowed. No burrs are allowed to remain on the front and back of the target material, in the hole, in the sealing groove, and on the edge of the flange.

[0005] In the machining and production of high-purity sputtering targets, most of the targets are processed and tested by traditional manual operation, which is basically completed by a single person and a single machine. Since the product weighs about 50KG, it needs to be lifted and clamped by manpower. During clamping, the weight of the target itself will cause scratches on the surface of the target. Therefore, the current traditional manual operation method has a low degree of automation, many production links, long processing time, easy scratches, deformation, oxidation of the metal surface, and poor product processing consistency, resulting in a one-time processing yield of less than 70%.

[0006] There are also schemes that introduce some automated production equipment during the production process. For example, Chinese patent CN208680539U discloses an automated target processing and inspection production line, but manual assistance is still required in some links such as turning over the workpiece and recording the workpiece. This not only leads to problems such as low production efficiency, unstable product quality, and high production costs, but also limits the production capacity of the target and the space for large-scale development. In addition, although there are devices for turning over workpieces in the prior art, such as the turning table for the target disclosed in Chinese patent CN221176166U, its structural setting is not suitable for the full-process automated production line, and the contact area with the target is large, which can easily cause scratches on the target surface. At the same time, in the automated production process, the metal surface of the target is also prone to scratches, deformation, and oxidation, and it is necessary to further design anti-scratch fixtures to assist automated production.

[0007] Therefore, realizing intelligent, standardized, large-scale, scratch-proof and anti-oxidation full-process automated production of target material processing is an urgent problem that needs to be solved at present. Summary of the invention

[0008] In order to enhance the stability of target material production and reduce the intensity of manual labor, the present invention proposes a highly automated large-size target material processing full-process automated production line and a target material production method. This production line aims to improve the production capacity of target materials, support large-scale development, reduce the demand for human resources, and at the same time minimize scratches and oxidation during the workpiece processing and mobile placement process of the automated production line.

[0009] The specific technical solutions of the present invention are as follows:

[0010] A full-process automated production line for large-size target material processing, comprising a first machine tool, a second machine tool, a third machine tool, a ground track, a robot cache tray, a robot, an ultrasonic cleaning tank, an MES system device, a workpiece flipping table, a loading table and an unloading table, wherein the loading table and the unloading table are respectively located at two ends of the ground track, the first machine tool and the second machine tool are located side by side on one side of the ground track, and the workstation direction (i.e., the entrance of the workpiece into the machine tool) faces the ground track, the third machine tool, the ultrasonic cleaning tank and the MES system device are located side by side on the other side of the ground track, and the workstation direction of the third machine tool faces the ground track, the MES system device is close to the loading table and away from the unloading table, so as to facilitate the input of coding and program setting in the MES system when the workpiece is loaded; the robot cache tray is located on the ground track, and the robot is located on the robot cache tray; the workpiece flipping table is located between the first machine tool and the second machine tool, and the workstation direction is consistent with that of the first machine tool and the second machine tool; The turntable is composed of an inclined mark plate, an upright support plate and rib plates arranged on both sides, the inclined mark plate is fixedly connected to the top of the support plate and the angle between the inclined mark plate and the support plate is 100°-150°, the rib plates are fixedly connected to the inclined mark plate and the support plate, and the rib plates can enhance the structural strength and prevent deformation; a hollow semicircular support structure is provided above the inclined mark plate, and a long groove is provided below the semicircular support structure, and a plurality of target positioning blocks are evenly fixed on the circumference of the semicircular support structure. The hollow design of the semicircular support structure reduces the contact area between the turning table and the target material, thereby further reducing the possibility of scratches on the target surface; the second machine tool is provided with a target drilling anti-scratch fixture and a first laser detection probe, and the second machine tool is a drilling processing machine tool; the first machine tool and the third machine tool are both provided with a target end face processing anti-scratch fixture, the first machine tool is a rough processing machine tool, and the third machine tool is a fine processing machine tool, and the third machine tool is provided with a second laser detection probe. The ultrasonic cleaning pool can perform automatic cleaning and drying processes, and the ultrasonic cleaning pool can use overflow self-circulation to filter metal debris during operation.

[0011] Furthermore, the anti-scratch fixture for target drilling includes a fixture base plate, two fixed ear plates, a target plate, an air blowing joint, an automatic water spraying mechanism, a vacuum suction cup and a radial positioning block, wherein the two fixed ear plates are fixed face to face and vertically at the two ends of the fixture base plate, the target plate is fixed between the two fixed ear plates and suspended above the fixture base plate, the vacuum suction cup is fixed above the target plate, the surface of the vacuum suction cup has a rubber interlayer, the radial positioning blocks are symmetrically arranged along the circumference of the vacuum suction cup and fixed to the target plate, the air blowing joints are symmetrically arranged along the circumference of the vacuum suction cup and fixed to the target plate, and the automatic water spraying mechanism is symmetrically fixed to the fixture base plate. The setting of the rubber interlayer ensures that the table top is in a vacuum state, the target material only contacts the rigid table top, and avoids direct contact with hard metal in a non-vacuum state, thereby preventing scratches. During the processing, the air blowing joint on the top of the target plate can blow away the metal debris on the target material, and the water spraying device around the substrate forms a protective water layer on the target material surface by spraying water on the target material surface to prevent scratches by debris.

[0012] Furthermore, the target end surface processing anti-scratch fixture comprises a three-jaw chuck, a target-specific soft jaw, a metal jaw, a metal heightening pad and a heightening pad. The three-jaw chuck is circular and has concave grooves distributed on the upper edge. There are three target-specific soft jaws, which are evenly and movably connected on the upper surface circumference of the three-jaw chuck. The metal jaw is fixed on the target-specific soft jaw. The inner circle of the metal jaw is in an arc shape and is fixed with a plastic jaw pad; a metal heightening pad is arranged between two adjacent target-specific soft jaws. Block, a plastic square pad is fixed on the upper surface of the metal heightening pad, a convex block is arranged below the metal heightening pad, and the metal heightening pad is connected with the concave groove on the circumference of the three-jaw chuck through the convex block; the heightening pad is fixed to the center of the three-jaw chuck, a plastic pad is fixed on the upper surface of the heightening pad, and a groove is provided on the surface of the three-jaw chuck below the heightening pad, and the target material specific soft claw cooperates with the three-jaw chuck through the groove and realizes radial movement relative to the three-jaw chuck. Among them, the outer arc of the plastic claw pad is the same size as the metal claw, and the inner diameter is equivalent to the clamping target material, so it can not only tightly clamp the target material, but also prevent the target material from being scratched; in addition, the metal heightening pad can slide radially along the concave groove. The plastic square pad and the plastic pad directly contact the surface of the target material. The pad height can be adjusted according to the working conditions so that the target material does not directly contact the metal fixture during processing. In addition, the precise positioning of the target material when transported by the robot can prevent scratches. In addition, the specific soft claws of the target material can move radially along the grooves on the surface of the three-jaw chuck below the heightened pad to adjust the appropriate position to prevent the clamped target material from being subjected to excessive radial clamping force.

[0013] Furthermore, the robot cache tray is in a step shape, the lower step surface is provided with a threaded hole, the robot is fixedly connected to the robot cache tray through the threaded hole, and the higher step surface is provided with four circular workpiece placement positions, each of which is composed of 8 target positioning blocks forming a circle.

[0014] Furthermore, the target positioning block is in an "L-shape" with thickness, the inner surface of the "L-shape" is stepped, a countersunk hole is provided on the upper surface of the low step of the "L-shape", a through hole is provided in the countersunk hole, and the high step of the "L-shape" is an arc structure larger than the diameter of the target. The target positioning block is fixed to the robot buffer tray or the workpiece turning table through the countersunk hole and the through hole provided on the upper surface of the low step of the "L-shape", and the screw will not protrude due to the setting of the countersunk hole, thereby preventing scratches on the surface of the target.

[0015] Furthermore, the MES system device uploads the processing program, processing time, marking information and online detection information of the workpiece by scanning the workpiece code, and determines whether the production target material is qualified through online detection. In addition, the program setting of the MES system device controls the movement trajectory and picking and placing operations of the robot.

[0016] Furthermore, the loading platform is provided with a hollow circular hole, and at least three plastic target material pads are evenly arranged along the circumference of the circular hole. The plastic target material pad is in an "L-shape" with thickness and a diameter greater than the circular hole. A space is left between each two plastic target material pads to facilitate the placement of the target material. The unloading platform has the same structure as the loading platform. The hollow circular hole is to prevent the target material from being placed on the workstation for a long time. The chip liquid accumulated on the surface of the target material directly soaks around the target material, which can easily cause the surface of the target material to corrode and discolor.

[0017] Furthermore, the robot includes an anti-slip claw plate and a gripper, the lower surface of the anti-slip claw plate is evenly provided with at least three "I-shaped" concave grooves, the gripper is in the shape of an "L-shaped hook", and a convex structure with a rack is arranged above the end of the long side of the "L-shaped" shape facing away from the hook, the convex structure cooperates with the anti-slip claw plate through the "I-shaped" concave groove, the gripper can move radially through the concave groove, a hook groove is formed inside the "hook" of the gripper, an anti-slip rubber pad is fixed in the hook groove, the robot can move the target material smoothly, and the gripper has anti-scratch and anti-slip functions.

[0018] In addition, the present invention also discloses a method for producing a target material using the above-mentioned large-size target material processing full-process automated production line, wherein the target material is composed of a sputtering surface and a lower backing plate, and the size of the backing plate is larger than the size of the sputtering surface. The production steps are as follows:

[0019] (1) Loading: Place the target with the sputtering surface facing downward on the loading table, enter the target information in the MES system and set the processing program;

[0020] (2) Material Picking: The robot picks up the target material to be processed on the loading table according to the settings and places it at the set position of the robot's cache tray;

[0021] (3) Rough machining: The robot moves to the first machine tool according to the settings, removes the target from the robot buffer tray and places it in the first machine tool with the sputtering surface facing upward, and then the target is rough machined in the first machine tool;

[0022] (4) Flipping: After the rough machining is completed, the robot takes the target out of the first machine tool according to the settings, with the sputtering surface of the target facing outward, transports the target to the workpiece flipping table and places the target from the top of the hollowed-out semicircular support structure, then clamps the bottom of the target from the long groove, pushes the target upward and flips it, with the sputtering surface facing inward;

[0023] (5) Drilling: After the flipping is completed, the robot takes out the target and places it on the second machine tool with the sputtering surface facing up for drilling according to the settings. When the target is qualified, it enters the next process.

[0024] (6) Cleaning and drying: After the drilling process is qualified, the robot takes out the target material and places it on the robot buffer tray. Then, according to the settings, the target material is transported to the ultrasonic cleaning tank and placed in it for ultrasonic cleaning and drying processes;

[0025] (7) Finishing: After cleaning and drying, the robot takes out the target and places it on the third machine tool with the sputtering surface facing up for finishing according to the settings. When the target is qualified, it enters the next process.

[0026] (8) Material unloading: After the finishing is qualified, the robot takes out the target material and places it on the robot buffer tray, and then places the target material on the unloading table with the sputtering surface facing downward according to the setting;

[0027] The ground track is moved under the control of the MES system, and the movements of the above-mentioned robots are all driven by the ground track.

[0028] The structural dimensions of each structure in the automated production line proposed by the present invention can be adjusted according to the size of the target material to be processed.

[0029] Compared with the prior art, the beneficial technical effects of the present invention are:

[0030] (1) The full-process automated production line of the present invention is provided with an MES system device, which binds the target material order number information with the MES system, and realizes online detection through a laser detection probe to determine whether the key dimensions of the target material, the target material installation hole diameter, and the position are qualified, thereby ensuring the stability of the automated target material production quality and the traceability and manageability of the production information. At the same time, the MES system can mark the target material with different production process numbers and workstation number information, which is convenient for tracing the workpiece and preventing the risk of mixing materials.

[0031] (2) The machine tool of the present invention is provided with a target end face processing anti-scratch fixture or a target drilling anti-scratch fixture, which can not only tightly clamp the target material, but also prevent the target material from being scratched. At the same time, the structural design of the target end face processing anti-scratch fixture can be used to effectively limit the target material, and at the same time prevent the target material from being subjected to excessive radial clamping force; the target drilling anti-scratch fixture is also provided with an air blowing joint and a water spraying device, which can blow away metal debris on the target surface during processing, and spray water on the target to form a protective water layer to prevent debris from scratching the target surface;

[0032] (3) The fully automated production line of the present invention is equipped with an ultrasonic cleaning pool to clean the target material and prevent oxidation of the target surface. In addition, both the loading and unloading platforms are provided with hollow circular holes to prevent the target material from being placed on the loading and unloading platforms for a long time. The chip liquid accumulated on the surface of the target material directly soaks around the target material, which may cause corrosion and discoloration of the target surface.

[0033] (4) The fully automated production line of the present invention is provided with a workpiece turning table, through which the workpiece can be turned over so that it can enter the machine tool for processing in the correct state. The workpiece turning table is convenient for the robot to pick up and place the target material through its inclined setting and long groove setting. In addition, the hollow design of its semicircular support structure reduces the contact area between the target material and the turning table, reducing the possibility of scratches;

[0034] (5) The present invention is a highly efficient and highly automated target material processing full-process production line with a linear layout. Based on comprehensive consideration of factors such as processing steps and duration, the layout of the automated production line is reasonable and can achieve high-efficiency and high-precision automated processing of target materials. The use of this production line can significantly improve the production capacity of target materials, enhance the stability of target material production, support large-scale development, and reduce the waste of human resources. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 A schematic diagram of the overall structure of a full-process automated production line for large-size target material processing according to the present invention;

[0036] Figure 2 A schematic diagram of a structure of a target material drilling anti-scratch fixture in a full-process automated production line for large-size target material processing according to the present invention;

[0037] Figure 3 A schematic diagram of a structure of a scratch-proof fixture for processing the end face of a target in a full-process automated production line for processing a large-size target according to the present invention;

[0038] Figure 4 A schematic diagram of the structure of a robot buffer tray in a full-process automated production line for large-size target material processing according to the present invention;

[0039] Figure 5 A schematic diagram of the target positioning block structure of a large-size target material processing full-process automated production line according to the present invention;

[0040] Figure 6 A schematic diagram of the structure of a loading platform for a full-process automated production line for large-size target material processing according to the present invention;

[0041] Figure 7 A schematic diagram of the structure of a workpiece turning table of a full-process automated production line for large-size target material processing according to the present invention;

[0042] Figure 8 A schematic diagram of the structure of a robot part in a full-process automated production line for large-size target material processing according to the present invention;

[0043] Fig. 9 A schematic diagram of the structure of a robot gripper in a full-process automated production line for large-size target material processing according to the present invention;

[0044] Fig.10 A schematic diagram of the structure of a target material to be processed in a full-process automated production line for large-size target material processing according to the present invention. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solution and advantages of the present invention more clear, the following is a detailed description of a large-size target material processing full-process automated production line and a target material production method of the present application in combination with an embodiment. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0046] In one embodiment, the large-size target material processing full-process automated production line is linear, and the loading platform 700 and the unloading platform 800 are respectively arranged at both ends of the ground track 100 to facilitate the rapid positioning and placement of the material. Figure 1 Middle machine tool 1), workpiece turning table 600, second machine tool (i.e. Figure 1 The third machine tool (the one attached) is located on the left side of the ground track 100. Figure 1The machine tool 3), the ultrasonic cleaning pool 400, and the MES system device 500 are arranged on the right side of the ground track 100, and the working directions of the machine tool and the workpiece turning table 600 are all facing the ground track 100. Above the ground track 100, a robot cache tray 200 that can move with the track is installed. The robot cache tray 200 is in a step shape. A special workpiece placement position surrounded by a target positioning block 202 is designed on the surface of the high step. The robot 300 is fixed with screws through threaded holes 201 on the surface of the low step, wherein the robot 300 is provided with an anti-slip claw plate 301, and "I-shaped" concave grooves 302 are evenly distributed on its lower surface. The claw 303 is provided with a convex structure 304 with a rack on the upper part of the claw 303 through the teeth, and the claw 303 can move radially along the concave groove 302. The claw is in an "L-shaped hook shape" as a whole, and a hook groove is provided inside the "hook", and an anti-slip rubber pad 305 is fixed by threads. This design can reasonably clamp the target, smoothly move the target, and has the functions of anti-scratch and anti-slip. The robot can realize high-efficiency and high-precision transportation and placement of the target. The target positioning block 202 is in an "L-shape" with thickness, and the inner surface of the "L-shape" is stepped. A countersunk hole 203 is provided on the upper surface of the low step of the "L-shape", and a through hole 204 is provided in the countersunk hole 203. The high step of the "L-shape" is an arc structure 205 that is larger than the diameter of the target.

[0047] The workpiece turning table 600 includes a vertical support plate 605, and an inclined plate 601 inclined 60° to the horizontal direction is extended from the upper part thereof to facilitate robot operation. A hollow semicircular support structure 602 is designed on the top of the inclined plate, and a long groove 603 is opened at the bottom to facilitate the robot to grasp the target material. Six plastic target positioning blocks 202 are evenly distributed around the semicircular support structure 602 and fixed to the inclined plate 601 by bolts. These positioning blocks effectively protect the target material from scratches. In order to enhance the structural strength and prevent deformation, ribs 604 are also designed on both sides of the inclined plate 601, and these ribs 604 extend to the support plate 605. The design of the semicircular support structure 602 reduces the contact area between the turning table and the target material, which can reduce the risk of scratching the target material.

[0048] The first and third machine tools in the automated production line are both designed with a target end face processing anti-scratch fixture 1100, the second machine tool is designed with a target drilling anti-scratch fixture 1000 and a first laser detection probe, and the third machine tool is designed with a second laser detection probe.

[0049] The target end face processing anti-scratch fixture 1100 is based on the structure of a three-jaw chuck 1101, and three target-specific soft claws 1102 are evenly distributed at 120° on the upper surface circumference of the three-jaw chuck 1101, and can move radially along the three-jaw chuck 1101 through the coordination of the rack. During assembly, a metal claw 1103 of a specific size is fixed to the target-specific soft claw 1102 by a vertical bolt. The metal claw 1103 is arc-shaped, and an arc-shaped plastic claw pad 1104 is fixed to the inner edge of the metal claw 1103 by a horizontal bolt. The outer arc of the plastic claw pad 1104 is the same size as the metal claw 1103, and fits tightly after the bolts are tightened. The inner diameter is equivalent to the clamped target workpiece, which can not only tightly clamp the target but also prevent scratches on the target. A metal heightening pad 1106 is designed between each two target specific soft claws 1102. A convex block 1105 is provided at the bottom of the metal heightening pad 1106. The convex block 1105 cooperates with the concave groove of the three-jaw chuck 1101, and the metal heightening pad 1106 can be radially moved to adjust the position. The upper part of the metal heightening pad 1106 is connected to a plastic square pad 1107 of the same cross-sectional size through 6 bolts. The height of the plastic square pad can be increased or decreased according to different working conditions. The plastic square pad directly contacts the surface of the target material, so that the target material does not directly contact the metal fixture during the processing process. It can achieve a better anti-scratch effect when combined with the robot 300 to accurately position the target material. A heightening pad 1108 is fixed in the middle of the three-jaw chuck 1101 by threads, and a plastic pad 1109 of the same cross-sectional size is fixed on the upper part of the heightening pad 1108 by three evenly distributed bolts. The same principle as the plastic square pad 1107 can be designed according to different working conditions. The height can be directly contacted with the target surface during processing. A groove is provided on the surface of the three-jaw chuck 1101 below the heightening pad 1108, which is used for radial limiting of the target-specific soft claw 1102. The target-specific soft claw 1102 can move radially, thereby driving the metal claw 1103 to move radially, preventing the clamped target from being subjected to excessive radial clamping force.

[0050] In the target drilling anti-scratch fixture 1000, a target plate 1003 is arranged between two fixed ear plates 1002. The target plate 1003 is equipped with a vacuum suction cup 1006 with a rubber interlayer to ensure that the table where the target is placed only contacts the rigid table in a vacuum state, and avoids direct contact with hard metal in a non-vacuum state, thereby preventing scratches. Three radial positioning blocks 1007 are arranged on the target plate 1003 to accurately fix the position of the target. These positioning blocks are made of hard plastic to protect the target from damage during loading. The target plate 1003 is also provided with symmetrically distributed air blowing joints 1004. During the processing, the air blowing joint 1004 on the top of the target plate 1003 can blow away metal debris on the target. Four automatic water spraying mechanisms 1005 are arranged around the vacuum suction cup 1006 on the fixture base plate 1001 to spray water to form a protective water layer on the surface of the target to prevent scratches from debris.

[0051] The loading platform 700 and the unloading platform 800 are both designed with target material stations, which are composed of three evenly distributed arc-shaped plastic target material pads 702 and fixed in position. A space is left between every two arc-shaped plastic target material pads 702 to facilitate the robot 300 claws to carry the target material. A hollow circular hole 701 of a certain size is opened in each station as a liquid spouting hole. The liquid spouting hole is to prevent the target material from being placed on the station for a long time. The chip liquid accumulated on the surface of the target material directly soaks around the target material, which can easily cause corrosion and discoloration of the target surface.

[0052] The MES system device 500 scans the target workpiece code and develops software programs such as information binding to bind the target order number information with the MES system, and uses the laser detection probes in the second machine tool and the third machine tool to perform online detection and determine whether the key dimensions of the target material, the target installation hole diameter, and the position are qualified, thereby ensuring the stability of the quality of the automated target material and the traceability and manageability of the production information. The MES system can also mark different production process numbers and target station number information to facilitate the traceability of workpieces and prevent the risk of mixed materials.

[0053] The ultrasonic cleaning pool 400 can be used for overflow self-circulation during operation to filter metal debris. The robot 300 can clamp the target material and immerse it directly in the cleaning pool for ultrasonic cleaning and drying to clean the target material surface and prevent oxidation of the target material surface.

[0054] The target material 1200 to be processed is composed of a sputtering surface 1201 and a lower backing plate 1202. The size of the backing plate 1202 is larger than the size of the sputtering surface 1201. The specific working process is as follows:

[0055] Loading: The target material 1200 to be processed is manually transported and placed on the station composed of the plastic target material pad 702 in the loading platform 700 of the automated production line, with the sputtering surface 1201 facing downward. The station number and production information corresponding to the target material 1200 are input into the MES system device 500 to start the automated production line;

[0056] Material collection: The robot 300, driven by the ground track 100, moves the target material 1200 to the set position with the robot buffer tray 200 according to the instructions of the MES system device, and moves the target material 1200 to be processed to the first machine tool processing coordinate position. The robot buffer tray 200 is set with multiple stations, which can be set through the program to facilitate the robot to replace the processed target material, realize the simultaneous processing of multiple target materials on the automated production line, and improve efficiency;

[0057] Rough machining: The robot 300 moves to the first machine tool according to the setting. The robot 300 removes the target 1200 from the robot buffer tray 200 and places the sputtering surface 1201 upward in the first machine tool. Then the target 1200 is rough machined in the first machine tool. The first machine tool is designed with a target end face processing anti-scratch fixture 1100. According to the requirements of the rough machining target surface sputtering size, the target sputtering surface 1201 is placed upward. The plastic square pad 1107 on the upper part of the metal heightening pad 1106 and the circular plastic pad 1109 on the upper part of the metal circular heightening pad 1108 of the target end face processing anti-scratch fixture 1100 directly contact the unprocessed target back plate. The set heights of the plastic square pad 1107 and the plastic pad 1109 make the target back plate flange surface slightly higher than the bottom surface of the metal claw 1103. The metal clamping claw 1103 moves radially under the drive of the target material specific soft claw 1102 to clamp the target material to be processed. The side of the target material back plate contacts the plastic clamping claw pad 1104. At this time, the target material to be processed is in a clamped state. The three-jaw chuck 1101 spindle rotates and cooperates with the machine tool to start rough machining the target material back plate to the required size;

[0058] Turning: After the rough machining is completed, the robot 300 takes the target 1200 out of the first machine tool according to the setting, at which time the sputtering surface 1201 of the target faces outward, transports the target 1200 to the workpiece turning table 600 and places the target from above the semicircular support structure 602, then clamps the bottom of the target from the long groove 603, pushes the target upward and turns it over, at which time the sputtering surface 1201 faces inward;

[0059] Drilling processing: After the flipping is completed, the robot 300 takes out the target material 1200, sends it to the processing coordinate position of the second machine tool, and places the target material 1200 with the sputtering surface 1201 facing up on the second machine tool for drilling processing according to the requirements of the target material finished product for the target material flange hole and groove processing. When the target material 1200 is qualified, it enters the next process. The characteristic of the target material drilling anti-scratch fixture 1000 is that the target material is clamped by the vacuum suction cup 1006 on the upper part of the target plate 1003, and the rubber interlayer on the upper part of the vacuum suction cup 1006 prevents the target material back plate from directly contacting the target plate 1003. During the processing, the automatic water spray mechanism 1005 and the air blowing joint 1004 cooperate to remove the debris generated during the processing, thereby playing an anti-scratch role. After the processing is completed, the laser probe is used to detect whether the dimensions of each mounting hole and sealing groove meet the requirements. If qualified, it will proceed to the next sequence. If unqualified, it will prompt and stop the operation;

[0060] Cleaning and drying: After the drilling process is qualified, the robot 300 takes out the target material 1200 and places it on the robot buffer tray 200, and then transports the target material 1200 to the ultrasonic cleaning tank 400 according to the setting and puts it therein for ultrasonic cleaning and drying process;

[0061] Finishing: After cleaning and drying, the robot 300 takes out the target 1200 and places the target 1200 with the sputtering surface 1201 facing upward on the third machine tool for finishing. After finishing, the laser probe is used to detect whether the end face size and thickness of each target meet the requirements. If qualified, it will be transferred to the next process. If unqualified, it will prompt and stop the operation;

[0062] Discharging: After the finishing is qualified, the robot 300 takes out the target 1200 and places it on the robot buffer tray 200, and then places the target 1200 with the sputtering surface facing downward on the unloading table 800 according to the setting, wherein the hollow circular hole is used as a liquid injection port to effectively discharge the cutting fluid on the target surface;

[0063] The ground track 100 is moved under the control of the MES system, and the movements of the above-mentioned robots are all driven by the ground track 100 .

[0064] The above embodiments are merely illustrative of the concept and efficacy of the present invention, and are not intended to limit the present invention. The present invention can be improved in many aspects without violating the overall concept, and any person familiar with the technology can make modifications or changes within the spirit and scope of the present invention, which fall within the protection scope and disclosure scope of the present invention.

Claims

1. A full-process automated production line for large-size target material processing, characterized in that: The invention comprises a first machine tool, a second machine tool, a third machine tool, a ground track (100), a robot buffer tray (200), a robot (300), an ultrasonic cleaning tank (400), an MES system device (500), a workpiece turning table (600), a loading table (700) and an unloading table (800), wherein the loading table (700) and the unloading table (800) are respectively located at two ends of the ground track (100), the first machine tool and the second machine tool are located side by side on one side of the ground track (100) with the workstation direction facing the ground track (100), and the third machine tool, the ultrasonic cleaning tank (400) and the MES system device (500) are The S system device (500) is located side by side on the other side of the ground track (100) and the third machine tool station is facing the ground track (100); the robot cache tray (200) is located on the ground track (100) and can move with the ground track (100); the robot (300) is located on the robot cache tray (200); the robot (300) comprises an anti-slip claw plate (301) and a hand claw (303); the lower surface of the anti-slip claw plate (301) is evenly provided with "I" concave grooves (302); the hand claw (303) is in the shape of an "L-shaped hook"; the hand claw (30 3) A convex structure (304) with a rack is arranged above the end of the long side of the "L-shaped" back-facing hook, the convex structure (304) cooperates with the anti-slip claw plate (301) through the "I-shaped" concave groove (302), a hook groove is formed inside the "hook" of the hand claw (303), and an anti-slip rubber pad (305) is fixed in the hook groove of the hand claw (303); the workpiece turning table (600) is located between the first machine tool and the second machine tool, and the workstation direction is consistent with the first machine tool and the second machine tool. The workpiece turning table (600) is composed of an inclined standard plate (601), an upright support plate (602), and a plurality of support plates (603) arranged on the workpiece turning table (600). 05) and ribs (604) arranged on both sides, the inclined target plate (601) is fixedly connected to the top of the support plate (605) and the angle between the inclined target plate (601) and the support plate (605) is 100°-150°, the ribs (604) are fixedly connected to the inclined target plate (601) and the support plate (605), a hollow semicircular support structure (602) is opened above the inclined target plate (601), and a long groove (603) is opened below the semicircular support structure (602), and a plurality of target positioning blocks (202) are evenly fixed on the circumference of the semicircular support structure (602);The second machine tool is provided with a target material drilling anti-scratch fixture (1000) and a first laser detection probe. The second machine tool is a drilling processing machine tool. The target material drilling anti-scratch fixture (1000) comprises a fixture base plate (1001), two fixed ear plates (1002), a target plate (1003), an air blowing joint (1004), an automatic water spraying mechanism (1005), a vacuum suction cup (1006) and a radial positioning block (1007), wherein the two fixed ear plates (1002) are fixed face to face and vertically at two ends of the fixture base plate (1001), the target plate (1003) is fixed between the two fixed ear plates (1002) and suspended above the fixture base plate (1001), and the vacuum suction cup (1006) is fixed Above the target plate (1003), the surface of the vacuum suction cup (1006) has a rubber interlayer, the radial positioning block (1007) is symmetrically arranged along the circumference of the vacuum suction cup (1006) and fixed on the target plate (1003), the air blowing joint (1004) is symmetrically arranged along the circumference of the vacuum suction cup (1006) and fixed on the target plate (1003), and the automatic water spraying mechanism (1005) is symmetrically fixed on the fixture base plate (1001); the first machine tool and the third machine tool are both provided with a target end surface processing anti-scratch fixture (1100), the first machine tool is a rough processing machine tool, the third machine tool is a fine processing machine tool, the third machine tool is provided with a second laser detection probe, and the target end surface processing anti-scratch fixture (1100) 100) comprises a three-jaw chuck (1101), a target material specific soft jaw (1102), a metal jaw (1103), a metal heightening pad (1106) and a heightening pad (1108), wherein the three-jaw chuck (1101) is circular and has concave grooves distributed on the upper edge, the target material specific soft jaws (1102) are three in total and are evenly and movably connected on the circumference of the upper surface of the three-jaw chuck (1101), the metal jaw (1103) is fixed on the target material specific soft jaw (1102), the inner circle of the metal jaw (1103) is in an arc shape and is fixed with a plastic jaw pad (1104); a metal heightening pad (1106) is arranged between two adjacent target material specific soft jaws (1102), and the metal A plastic square pad (1107) is fixed on the upper surface of the heightening pad (1106); a convex block (1105) is arranged below the metal heightening pad (1106), and the convex block (1105) is connected with the concave groove on the circumference of the three-jaw chuck (1101); the heightening pad (1108) is fixed at the center of the three-jaw chuck (1101); a plastic pad (1109) is fixed on the upper surface of the heightening pad (1108); a groove is provided on the surface of the three-jaw chuck (1101) below the heightening pad (1108); the target material specific soft claw (1102) cooperates with the three-jaw chuck (1101) via the groove and realizes radial movement relative to the three-jaw chuck (1101);The MES system device (500) uploads the processing program, processing time, marking information and online detection information of the workpiece by scanning the workpiece code, and determines whether the production target material is qualified through online detection. In addition, the program setting of the MES system device (500) controls the movement trajectory and picking and placing operations of the robot. ; 2. The large-size target material processing full-process automated production line according to claim 1, characterized in that: The robot cache tray (200) is in a step shape, a threaded hole (201) is provided on the surface of the lower step, the robot (300) is fixedly connected to the robot cache tray (200) via the threaded hole (201), and four circular workpiece placement positions are provided on the surface of the upper step, each of the workpiece placement positions being formed by eight target material positioning blocks (202) forming a circle.

3. The large-size target material processing full-process automated production line according to claim 1 or 2, characterized in that: The target positioning block (202) is in an "L-shape" with thickness, the inner surface of the "L-shape" is in a stepped shape, a countersunk hole (203) is provided on the upper surface of the lower step of the "L-shape", a through hole (204) is provided in the countersunk hole (203), and the upper step of the "L-shape" is an arc structure (205) larger than the diameter of the target.

4. The large-size target material processing full-process automated production line according to claim 1, characterized in that: The loading platform (700) is provided with a hollow circular hole (701), and at least three plastic target material pads (702) are evenly arranged along the circumference of the circular hole (701). The plastic target material pads (702) are in an "L-shape" with a thickness and a diameter greater than the circular hole (701), and a space is left between every two of the plastic target material pads (702). The unloading platform (800) has the same structure as the loading platform (700).

5. The large-size target material processing full-process automated production line according to claim 1, characterized in that: At least three "I"-shaped concave grooves (302) are evenly formed on the lower surface of the anti-slip claw plate (301).

6. A method for producing a target material using the large-size target material processing full-process automated production line according to claim 1, wherein the target material (1200) is composed of a sputtering surface (1201) and a lower backing plate (1202), and the size of the backing plate (1202) is larger than the size of the sputtering surface (1201), characterized in that: The production steps are as follows: (1) Loading: placing the target (1200) with the sputtering surface facing downward on the loading table (700), and entering the target information and setting the processing program in the MES system device (500); (2) Material collection: the robot (300) takes the target material (1200) to be processed on the loading platform (700) according to the settings and places it at the set position of the robot buffer tray (200); (3) Rough processing: the robot (300) moves to the first machine tool according to the setting, the robot (300) removes the target material (1200) from the robot buffer tray (200) and places the target material (1200) with the sputtering surface (1201) facing upward in the first machine tool, and then the target material (1200) is rough processed in the first machine tool; (4) Turning over: After the rough machining is completed, the robot (300) takes the target (1200) out of the first machine tool according to the setting, and the sputtering surface (1201) of the target faces outward, and transports the target (1200) to the workpiece turning table (600) and places the target from the upper part of the hollowed-out semicircular support structure (602), and then clamps the lower part of the target from the long groove (603), pushes the target upward and turns it over, and the sputtering surface (1201) faces inward; (5) Drilling: After the turning is completed, the robot (300) takes out the target (1200) and places the target (1200) with the sputtering surface (1201) facing upward on the second machine tool for drilling. When the target (1200) is qualified, it enters the next process. (6) Cleaning and drying: After the drilling process is qualified, the robot (300) takes out the target material (1200) and places it on the robot buffer tray (200), and then transports the target material (1200) to the ultrasonic cleaning tank (400) according to the setting and puts it therein for ultrasonic cleaning and drying process; (7) Finishing: After cleaning and drying, the robot (300) takes out the target (1200) and places the target (1200) with the sputtering surface (1201) facing upward on the third machine tool for finishing according to the setting. When the target is qualified, it enters the next process; (8) Material discharge: After the fine processing is qualified, the robot (300) takes out the target material (1200) and places it on the robot buffer tray (200), and then places the target material (1200) with the sputtering surface facing downward on the unloading table (800) according to the setting; The ground track (100) is moved under the control of the MES system, and the movement of the above-mentioned robots is driven by the ground track (100).

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