A temperature-salinity deep ocean flexible sensor and its preparation method

Abstract

The present invention discloses a temperature-salinity-depth ocean flexible sensor and a preparation method thereof, and belongs to the field of marine environment monitoring. The flexible sensor comprises a flexible film, on which a temperature sensor, a salinity sensor and a pressure sensor are arranged; the flexible film comprises a bottom flexible film layer and a top flexible film layer; the pressure sensor comprises a bottom electrode, a top electrode and a pressure-sensitive unit layer; an insulating layer is arranged on the top surface of the bottom flexible film layer, and the bottom electrode and the temperature sensor are both arranged on the insulating layer; the top electrode is arranged on the bottom surface of the top flexible film layer, and a TPU ink layer is also arranged between the top flexible film layer and the bottom flexible film layer; the salinity sensor is arranged on the top surface of the top flexible film layer. The flexible temperature-salinity-depth sensor of the present invention is an integrated three-dimensional sensor unit with high stability and reliability, and is conducive to integration with different platforms for monitoring the temperature-salinity-depth environment of the ocean.

Description

Technical Field

[0001] The present invention belongs to the field of marine environment monitoring, and in particular relates to a flexible sensor device for monitoring and recording ocean temperature, salinity and depth, and a method for preparing the flexible sensor device. Background Art

[0002] Seawater temperature, salinity, and depth are the most basic marine environmental information. They not only play an important role in marine scientific research, but are also an indispensable data source for operational marine observation and forecasting and marine safety assurance. By electronically marking and tracking targets such as marine organisms, ocean buoys, underwater robots, diving equipment, and ships, information on the target's behavior, environmental conditions, and geographic location can be obtained, enabling the research community to remotely study various variables to monitor the stability of marine ecosystems and environmental changes.

[0003] However, most temperature, salinity and depth sensors on the market are not suitable for research on individuals such as organisms and humans due to their excessive weight, non-flexible characteristics and even invasive attachment methods. Their high production costs also impose many restrictions on research. At present, there are also separate flexible pressure sensors on the market, but when used, they still need to be used in conjunction with temperature sensors and depth sensors to monitor temperature, salinity and depth in the marine environment. The degree of integration is low, and it is obviously not suitable for direct attachment to organisms for marine environment monitoring. Summary of the invention

[0004] Based on the above technical problems, the present invention proposes a temperature-salinity deep-sea flexible sensor and a preparation method thereof.

[0005] The technical solution adopted by the present invention is:

[0006] A temperature-salinity deep ocean flexible sensor, comprising a flexible film, on which a temperature sensor, a salinity sensor and a pressure sensor are arranged;

[0007] The flexible film comprises a bottom flexible film layer and a top flexible film layer; the pressure sensor comprises a bottom electrode, a top electrode and a pressure sensitive unit layer;

[0008] An insulating layer is arranged on the top surface of the bottom flexible film layer, and the bottom electrode and the temperature sensor are both arranged on the insulating layer; the top electrode is arranged on the bottom surface of the top flexible film layer, and a TPU ink layer is also arranged between the top flexible film layer and the bottom flexible film layer. When the top flexible film layer and the bottom flexible film layer are bonded together through the TPU ink layer, the top electrode is located directly above the bottom electrode, and the pressure sensitive unit layer is located between the top electrode and the bottom electrode;

[0009] The width of the top flexible film layer is smaller than that of the bottom flexible film layer, and the top flexible film layer covers the pressure sensor and exposes the temperature sensor;

[0010] The salinity sensor is arranged on the top surface of the top flexible film layer;

[0011] A bottom packaging layer is arranged on the bottom surface of the bottom flexible film layer, and a top packaging layer is arranged on the top surface of the top flexible film layer. The areas of the bottom packaging layer and the top packaging layer are both greater than or equal to the area of ​​the bottom flexible film layer. A through hole is arranged on the top packaging layer and at a position directly facing the salinity sensor, so that the salinity sensor is exposed after packaging.

[0012] The method for preparing the temperature-salinity deep ocean flexible sensor as described above comprises the following steps:

[0013] a. Flexible film pretreatment;

[0014] The bottom flexible film layer and the top flexible film layer are both made of PI film, and the PI film is pre-treated using a plasma cleaning machine;

[0015] b. Printing bottom electrode and temperature sensor;

[0016] Take the insulating ink, use screen printing to form an insulating layer on the bottom flexible film layer, and dry it at room temperature;

[0017] Take platinum paste, use screen printing on the insulating layer to form the bottom electrode of the pressure sensor and the serpentine temperature sensor, and put the printed bottom flexible film layer into a high-temperature furnace for sintering;

[0018] c. Printing pressure sensitive unit layer;

[0019] Put TPU particles into a reactor, add ionic liquid, and stir to form a transparent solution; then, add boron nitride to the transparent solution and stir until a milky white suspension is formed to obtain an ionic solution;

[0020] Taking the ion solution, printing it on the bottom electrode of the pressure sensor to form a pressure sensitive unit layer, and curing it at room temperature;

[0021] d. Printing top electrode and salinity sensor;

[0022] Take platinum paste, use screen printing to form the top electrode of the pressure sensor on the pre-treated top flexible film layer, and cure it at room temperature;

[0023] Subsequently, platinum paste was taken and a four-electrode salinity sensor was formed on the other side of the top flexible film layer using screen printing and cured at room temperature;

[0024] Finally, a TPU ink layer is printed on the edge of one side of the top flexible film layer where the top electrode is printed using a screen mask;

[0025] e. Docking electrodes;

[0026] The top electrode and the bottom electrode of the pressure sensor are butted together, and the top flexible film layer and the bottom flexible film layer are bonded by the TPU ink layer and cured at room temperature;

[0027] f. Make the encapsulation layer and perform sensor encapsulation;

[0028] The lubricating oil and PDMS are mixed and then poured into a mold, and a transparent film is formed by injection molding to obtain a bottom encapsulation layer and a top encapsulation layer, wherein the top encapsulation layer has a through hole formed in the area facing the salinity sensor;

[0029] The pressure sensor formed after the electrodes are docked is placed between the top packaging layer and the bottom packaging layer, and is hot-pressed using a hot press to obtain a temperature-salinity deep-sea flexible sensor.

[0030] The beneficial technical effects of the present invention are:

[0031] The flexible temperature, salinity and depth sensor provided by the present invention includes a flexible metal platinum temperature sensor, a four-electrode flexible salinity sensor and a flexible ion pressure sensor. The three sensors are manufactured on different planes through screen printing technology to form an integrated three-dimensional sensor unit. This integrated design not only reduces the volume and weight of the sensor, but also improves the stability and reliability of the sensor, and is conducive to integration with different platforms, making it convenient to attach to organisms, etc. to monitor the ocean temperature, salinity and depth environment, and provide accurate and reliable data support for marine scientific research. The present invention fills the gap in the current field of marine application of temperature, salinity and depth flexible sensors.

[0032] The temperature-salinity deep ocean flexible sensor of the present invention has the advantages of ductility, non-invasiveness, effective adhesion ability, low cost, high stability, etc., which are described in detail below:

[0033] (1) The sensor of the present invention is made of flexible material, has good ductility and bendability, and can adapt to complex marine environments.

[0034] (2) The integrated design and use of flexible materials of the present invention make the sensor light in weight and small in size, making it easy to carry and install.

[0035] (3) The present invention provides an insulating layer in the sensor, which can effectively eliminate crosstalk between sensor units.

[0036] (4) The raw materials used in the sensor preparation process of the present invention are easily available, and the screen printing process is used to effectively reduce the production cost while ensuring the stability and reliability of the sensor.

[0037] (5) The sensor in the present invention is encapsulated with oil-filled polydimethylsiloxane (PDMS), which has good corrosion resistance and stability and can work stably for a long time in a harsh marine environment. In addition, during the encapsulation process, the salinity sensor is exposed to the outside through the through hole on the top encapsulation layer and directly contacts the medium to more accurately measure the salinity in seawater. The present invention realizes real-time monitoring of the three parameters of temperature, salinity and depth by measuring the changes in resistance, conductance and capacitance.

[0038] (6) The flexible temperature, salinity and depth sensor of the present invention can be integrated with various platforms such as ships, buoys, AUVs (autonomous underwater vehicles) and marine life to conduct long-term, multi-scenario monitoring of ocean temperature, salinity and depth. The sensor of the present invention monitors the temperature, salinity and depth parameters of the marine environment in real time to help people conduct in-depth research on the dynamic changes of the ocean and provide accurate and reliable data support for marine scientific research. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a schematic diagram of the overall decomposition structure principle of the temperature-salinity deep ocean flexible sensor of the present invention;

[0040] Figure 2 It is a schematic diagram of the bottom electrode of the pressure sensor and the temperature sensor after being printed on the insulating layer in the present invention;

[0041] Figure 3 is a schematic diagram of a pressure sensor sensitive unit in the present invention;

[0042] Figure 4 is a schematic diagram of the top electrode of the pressure sensor in the present invention;

[0043] Figure 5 It is a top view schematic diagram of the medium-temperature saline deep ocean flexible sensor of the present invention;

[0044] Figure 6 It is a schematic diagram of the process of preparing the temperature-salinity deep-sea flexible sensor of the present invention.

[0045] In the figure: 1-temperature sensor, 2-salinity sensor, 201-reference electrode, 202-inner electrode, 3-bottom flexible film layer, 4-top flexible film layer, 5-bottom electrode, 6-top electrode, 7-pressure sensitive unit layer, 8-insulating layer, 9-TPU ink layer, 10-array hole, 11-bottom encapsulation layer, 12-top encapsulation layer, 13-through hole. DETAILED DESCRIPTION

[0046] The present invention discloses a temperature, salinity and depth ocean flexible sensor and a preparation method thereof. The temperature, salinity and depth ocean flexible sensor comprises a flexible metal platinum temperature sensor, a four-electrode flexible salinity sensor and a flexible ion pressure sensor. Screen printing is used, and the salinity sensor, the temperature sensor and the pressure sensor are on different planes to present a three-dimensional structure. The sensor is encapsulated using oil-filled polydimethylsiloxane (PDMS), wherein the salinity sensor is exposed to the outside and directly contacts the medium. By measuring the changes in resistance, conductance and capacitance, the three parameters of temperature, salinity and depth are monitored. In addition, by introducing an insulating layer, the crosstalk between different units is eliminated, and the stability of the sensor is enhanced. The underwater temperature, salinity and depth flexible sensor has the characteristics of ductility, light weight, small size, low cost, corrosion resistance and strong stability. It can be integrated with various platforms such as ships, buoys, AUVs and marine life to conduct long-term, multi-scenario ocean temperature, salinity and depth monitoring. The highly sensitive and stable temperature, salinity and depth ocean flexible sensor provided by the present invention can adapt well to the complex ocean environment, provide accurate and reliable data, and is convenient to attach to organisms to monitor the ocean temperature, salinity and depth environment, helping people to conduct in-depth research on the dynamic changes of the ocean, filling the gap in the current application of temperature, salinity and depth flexible sensors in the field of ocean applications.

[0047] The present invention will be further described below in conjunction with the accompanying drawings and specific implementations.

[0048] Example 1

[0049] like Figure 1 As shown, a temperature-salinity deep ocean flexible sensor includes a flexible film, on which a temperature sensor 1, a salinity sensor 2 and a pressure sensor are arranged. The flexible film includes a bottom flexible film layer 3 and a top flexible film layer 4. The pressure sensor includes a bottom electrode 5, a top electrode 6 and a pressure sensitive unit layer 7, as shown in FIG. Figure 3 , Figure 4 An insulating layer 8 is disposed on the top surface of the bottom flexible film layer 3, and the bottom electrode 5 and the temperature sensor 1 are both disposed on the insulating layer 8, as shown in FIG. Figure 2 As shown. The top electrode 6 is arranged on the bottom surface of the top flexible film layer 4, and a TPU ink layer 9 is also arranged between the top flexible film layer 4 and the bottom flexible film layer 3. The TPU ink layer 9 is provided with array holes 10 at the corresponding pressure sensitive unit layer. When the top flexible film layer 4 and the bottom flexible film layer 3 are bonded together by the TPU ink layer 9, the top electrode 6 is located directly above the bottom electrode 5, and the pressure sensitive unit layer 7 is located between the top electrode 6 and the bottom electrode 5, and the pressure sensor is assembled. The TPU ink layer 9 can also be used as a pressure sensor spacing layer, so that the pressure sensor has a larger deformation space when subjected to force.

[0050] The width of the top flexible film layer 4 is smaller than that of the bottom flexible film layer 3, that is, the top flexible film layer 4 can only cover a partial area of ​​the bottom flexible film layer 3. That is, the top flexible film layer 4 covers the pressure sensor and exposes the temperature sensor 1. The salinity sensor 2 is arranged on the top surface of the top flexible film layer 4. A bottom encapsulation layer 11 is arranged on the bottom surface of the bottom flexible film layer 3, and a top encapsulation layer 12 is arranged on the top surface of the top flexible film layer 4. The areas of the bottom encapsulation layer 11 and the top encapsulation layer 12 are both greater than or equal to the area of ​​the bottom flexible film layer 3. A through hole 13 is arranged on the top encapsulation layer 12 and at a position directly opposite to the salinity sensor, so that the salinity sensor 2 is exposed after encapsulation. The top view of the overall temperature-salinity deep ocean flexible sensor is as shown in the figure. Figure 5 shown.

[0051] The flexible film is a polyimide film (PI film), and the thickness of the PI film is 0.15-0.2 mm. The bottom electrode 5 and the temperature sensor 1 of the pressure sensor are both made by printing platinum paste on the PI film at the same time. The thickness of the bottom electrode 5 and the temperature sensor 1 of the pressure sensor is set to 15-30 um. The thickness of the bottom encapsulation layer 11 and the top encapsulation layer 12 are both set to 2-3 mm.

[0052] Example 2

[0053] The scheme is the same as Example 1, except that: the shape of the temperature sensor 1 is set to be serpentine. The temperature sensor and the pressure sensor are both two electrodes, and the salinity sensor is four electrodes. After all the electrodes are led out, they are connected to the data acquisition card through the FPC connector. The main control MCU in the acquisition card controls the acquisition timing, communicates with the host computer, and uploads the digital signal to the host computer in real time to realize the visualization and analysis of the temperature-salinity-depth signal.

[0054] The temperature sensor 1 is designed as a serpentine structure, which has a high space utilization rate, can increase the contact area between the temperature sensitive area and the medium, and enhance the ability to perceive temperature. Its measurement mechanism is that platinum, as a positive temperature coefficient metal, its resistance increases with the increase of temperature. At 0°C, its resistance is 100Ω. When the temperature changes, the temperature change is calculated by measuring the resistance change.

[0055] The salinity sensor 2 adopts a four-electrode structure, the outermost two electrodes are reference electrodes 201, the inner electrode 202 is a measuring electrode, and each electrode has a wavy structure. The measurement process is that the reference electrode provides alternating current, and the measuring electrode measures the voltage drop across the medium. This configuration minimizes the capacitive parasitic elements caused by the electric double layer (EDL) and reduces the influence of the lead resistance and inductance errors between the sensor and the instrument.

[0056] The pressure sensor adopts a sandwich structure, including a top electrode 6, a pressure sensitive unit layer 7 and a bottom electrode 5. When the sensor deforms due to pressure, the capacitance formed between the sensitive unit and the electrode changes, and an electrical signal with a certain relationship with the voltage can be output through the measurement circuit.

[0057] The structural mode of the temperature sensor 1, salinity sensor 2 and pressure sensor enables the sensors to have good stretchability and ductility and to adapt to different application scenarios.

[0058] The materials and properties used in the preparation of the temperature-salinity deep ocean flexible sensor of the present invention are as follows:

[0059] Low temperature platinum slurry: used to manufacture temperature sensors and salinity sensors, as well as pressure sensor electrodes. TPU ink: used for the pressure sensor spacer layer, so that the pressure sensor has a larger deformation space when subjected to force. PDMS: used to encapsulate the sensor, so that the sensor has good airtightness and can work stably underwater for a long time. Adding lubricating oil to PDMS can enhance the corrosion resistance of PDMS. Insulating ink: used to eliminate crosstalk between temperature sensors and pressure sensors and enhance overall stability.

[0060] Example 3

[0061] like Figure 6 As shown, the preparation method of the temperature-salinity deep ocean flexible sensor comprises the following steps:

[0062] a. Flexible film pretreatment;

[0063] The bottom flexible film layer 3 and the top flexible film layer 4 are both made of PI film. Specifically, the bottom flexible film layer 3 is made of 4×4 cm PI film with a thickness of 260 um, and the top flexible film layer 4 is made of 2×2 cm PI film with a thickness of 260 um. A plasma cleaning machine is used for processing at a plasma gas flow rate of 5 m / s for 3 minutes to improve the adhesion effect of the material during screen printing.

[0064] b. Printing bottom electrode and temperature sensor;

[0065] 2 g of insulating ink was taken and printed on the bottom flexible film layer 3 using a 200-mesh screen to form an insulating layer 8, which was then dried at room temperature for 20 minutes.

[0066] Take 1g of low-temperature platinum slurry and print the bottom electrode 5 of the pressure sensor and the serpentine temperature sensor on the insulating layer using a 200-mesh screen mask with an average thickness of 20um. Put the printed bottom flexible film layer into a high-temperature furnace and sinter it at 300 degrees Celsius for 20 minutes to enhance the stability and temperature sensitivity of platinum.

[0067] c. Printing pressure sensitive unit;

[0068] Place 1g of TPU soluble particles in a beaker, drop 2ml of ionic liquid, and stir at 80°C until a transparent solution is formed. The ionic liquid can be 1-ethyl-3-methylimidazolium bis(trifluoromethanesulfonyl)imide salt (molecular formula: C8H 11 F6N3O4S2, molecular weight: 391.31, purity: 97%). Subsequently, 1g of boron nitride (particle size: 12-15um) was weighed and added to the transparent solution, and stirred at room temperature until a milky suspension was formed to obtain an ion solution.

[0069] 1 g of the ion solution was taken and printed on the bottom electrode of the pressure sensor using a 300-mesh screen mask to form a pressure-sensitive unit layer 7, which was then cured at room temperature for 10 minutes.

[0070] d. Printing top electrode and salinity sensor;

[0071] The pretreated top flexible film layer 4 is spread flat on a printing workbench, 0.5 g of platinum paste is taken, and a 200-mesh screen mask is used for printing to form a top electrode 6 of the pressure sensor, which is then cured at room temperature for 10 minutes.

[0072] Subsequently, platinum paste was taken and a four-electrode salinity sensor was formed on the other side of the top flexible film layer 4 by screen printing, and then cured at room temperature for 10 minutes.

[0073] Finally, a TPU ink is printed on the edge of one side of the top flexible film layer 4 where the top electrode is printed using a silk screen mask to form a TPU ink layer 9 .

[0074] e. Docking electrodes;

[0075] The top electrode 6 and the bottom electrode 5 of the pressure sensor are butted together, and the top flexible film layer 4 and the bottom flexible film layer 3 are bonded together through the TPU ink layer 9. The TPU ink plays a bonding role and is cured at room temperature for 30 minutes.

[0076] f. Make the encapsulation layer and perform sensor encapsulation;

[0077] Take 20g PDMS and 2g curing agent, stir with a magnetic stirrer for 1h, then drop 2g lubricating oil to obtain oil-injected PDMS. The curing agent model is Dow Corning DC184. The oil-injected PDMS has stronger corrosion resistance, ensuring the long-term airtightness of the sensor in the ocean. Then pour the oil-injected PDMS into the top encapsulation layer and the bottom encapsulation layer molds respectively, and after curing at 80°C for 1 hour, a transparent film with a thickness of 2mm is formed, that is, the bottom encapsulation layer and the top encapsulation layer are obtained. The top encapsulation layer is formed with a through hole 13 in the area facing the salinity sensor to ensure that the salinity sensor can be in direct contact with the medium.

[0078] The pressure sensor formed after the electrodes are butted is placed between the top packaging layer 12 and the bottom packaging layer 11, and is hot-pressed at 60°C for 5 minutes using a hot press to obtain a warm-salinity deep-sea flexible sensor.

[0079] The parts not mentioned in the above methods can be realized by adopting or drawing on existing technologies.

[0080] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any improvements, equivalent substitutions, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A method for preparing a temperature-salinity deep ocean flexible sensor, characterized in that: The temperature-salinity deep ocean flexible sensor comprises a flexible film, on which a temperature sensor, a salinity sensor and a pressure sensor are arranged; The flexible film comprises a bottom flexible film layer and a top flexible film layer; the pressure sensor comprises a bottom electrode, a top electrode and a pressure sensitive unit layer; An insulating layer is arranged on the top surface of the bottom flexible film layer, and the bottom electrode and the temperature sensor are both arranged on the insulating layer; the top electrode is arranged on the bottom surface of the top flexible film layer, and a TPU ink layer is also arranged between the top flexible film layer and the bottom flexible film layer. When the top flexible film layer and the bottom flexible film layer are bonded together through the TPU ink layer, the top electrode is located directly above the bottom electrode, and the pressure sensitive unit layer is located between the top electrode and the bottom electrode; The width of the top flexible film layer is smaller than that of the bottom flexible film layer, and the top flexible film layer covers the pressure sensor and exposes the temperature sensor; The salinity sensor is arranged on the top surface of the top flexible film layer; A bottom encapsulation layer is disposed on the bottom surface of the bottom flexible film layer, and a top encapsulation layer is disposed on the top surface of the top flexible film layer, and the areas of the bottom encapsulation layer and the top encapsulation layer are both greater than or equal to the area of ​​the bottom flexible film layer; A through hole is provided on the top packaging layer and at a position directly facing the salinity sensor, so that the salinity sensor is exposed after packaging; The preparation method comprises the following steps: a. Flexible film pretreatment; The bottom flexible film layer and the top flexible film layer are both made of PI film, and the PI film is pre-treated using a plasma cleaning machine; b. Printing bottom electrode and temperature sensor; Take the insulating ink, use screen printing to form an insulating layer on the bottom flexible film layer, and dry it at room temperature; Take platinum paste, use screen printing on the insulating layer to form the bottom electrode of the pressure sensor and the serpentine temperature sensor, and put the printed bottom flexible film layer into a high-temperature furnace for sintering; c. Printing pressure sensitive unit layer; Put TPU particles into a reactor, add ionic liquid, and stir to form a transparent solution; then, add boron nitride to the transparent solution and stir until a milky white suspension is formed to obtain an ionic solution; Taking the ion solution, printing it on the bottom electrode of the pressure sensor to form a pressure sensitive unit layer, and curing it at room temperature; d. Printing top electrode and salinity sensor; Take platinum paste, use screen printing to form the top electrode of the pressure sensor on the pre-treated top flexible film layer, and cure it at room temperature; Subsequently, platinum paste was taken and a four-electrode salinity sensor was formed on the other side of the top flexible film layer using screen printing and cured at room temperature; Finally, a TPU ink layer is printed on the edge of one side of the top flexible film layer where the top electrode is printed using a screen mask; e. Docking electrodes; The top electrode and the bottom electrode of the pressure sensor are butted together, and the top flexible film layer and the bottom flexible film layer are bonded by the TPU ink layer and cured at room temperature; f. Make the encapsulation layer and perform sensor encapsulation; The lubricating oil and PDMS are mixed and then poured into a mold, and a transparent film is formed by injection molding to obtain a bottom encapsulation layer and a top encapsulation layer, wherein the top encapsulation layer has a through hole formed in the area facing the salinity sensor; The pressure sensor formed after the electrodes are docked is placed between the top packaging layer and the bottom packaging layer, and is hot-pressed using a hot press to obtain a temperature-salinity deep-sea flexible sensor.

2. The method for preparing a temperature-salinity deep-sea flexible sensor according to claim 1, characterized in that: The flexible film is a PI film.

3. The method for preparing a temperature-salinity deep ocean flexible sensor according to claim 1, characterized in that: The bottom electrode of the pressure sensor and the temperature sensor are both made by platinum paste printing.

4. The method for preparing a temperature-salinity deep-sea flexible sensor according to claim 1, characterized in that: The thickness of the bottom electrode of the pressure sensor and the temperature sensor are both set to 15-30 um.

5. The method for preparing a temperature-salinity deep-sea flexible sensor according to claim 1, characterized in that: The shape of the temperature sensor is set to be a snake shape.

6. The method for preparing a temperature-salinity deep-sea flexible sensor according to claim 1, characterized in that: The salinity sensor is configured as a four-electrode salinity sensor.

7. The method for preparing a temperature-salinity deep-sea flexible sensor according to claim 1, characterized in that: The thickness of the bottom packaging layer and the top packaging layer are both set to 2-3 mm.

8. The method for preparing the temperature-salinity deep ocean flexible sensor according to claim 1, characterized in that: In step a: the width of the top flexible film layer is smaller than the width of the bottom flexible film layer; the thickness of the top flexible film layer and the thickness of the bottom flexible film layer are both set to 220-260 um; a plasma cleaning machine is used for processing at a plasma gas flow rate of 3-5 m / s for 3-5 minutes; In step b: the thickness of the printed bottom electrode and the serpentine temperature sensor are both set to 15-30 um; the sintering temperature in the high temperature furnace is controlled to be 300-350° C., and the sintering time is 20-30 minutes; In step c: the dosage ratio of TPU particles to ionic liquid is 1g:2-3ml, and the stirring temperature is controlled to be 70-80°C; the mass ratio of TPU particles to boron nitride is 1:0.5-2; the particle size of the boron nitride is 12-15um; when printing to form the pressure sensitive unit layer, the curing is controlled at room temperature for 10-15 minutes.

9. The method for preparing the temperature-salinity deep ocean flexible sensor according to claim 1, characterized in that: In step d: when the top electrode of the pressure sensor is formed by screen printing, curing is controlled at room temperature for 10-15 minutes; when the four-electrode salinity sensor is formed by screen printing, curing is controlled at room temperature for 10-15 minutes; In step e: the curing time at room temperature is controlled to be 30-40 minutes; In step f: the mass ratio of lubricating oil to PDMS is controlled to be 1:8-10; when the transparent film is formed by injection molding, the curing temperature is controlled to be 80-90° C. for 1-2 hours; the thickness of the obtained bottom encapsulation layer and the top encapsulation layer are both set to 2-3 mm; When packaging the sensor, the temperature of the hot press is controlled to be 60-70°C and the hot pressing time is 5-10 minutes.

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