A welding machine for fully automatic wafer cleaning machine shell processing

Abstract

The present invention discloses a welding machine for processing the shell of a fully automatic wafer cleaning machine, which relates to the technical field of component welding, and includes a base, a welding assembly is fixed on one side of the base, and a constraint assembly is installed on the other side of the base; the constraint assembly includes a connecting plate fixed to the side wall of the base, two groups of support arms are fixed on the top of the connecting plate, a connecting shaft is rotatably provided between the two groups of support arms, and two groups of outer plates are fixed on the outer wall of each group of the connecting shaft. The present invention makes the metal plate of the welded shell stand up by cooperating with the L plate and the outer plate in the constraint assembly, and at the same time, the two metal plates can be butted and fixed in a state where the corners are vertical, so as to achieve the purpose of convenient and efficient positioning, and at the same time, the welded metal plate can be rotated and changed, which can reduce the time required for manual operation, save manpower and material resources, and achieve the purpose of high efficiency of welding operation.

Description

Technical Field

[0001] The invention relates to the technical field of component welding, in particular to a welding machine for processing a shell of a full-automatic wafer cleaning machine. Background Art

[0002] Wafer refers to the silicon wafer used to make silicon semiconductor integrated circuits. Its original material is silicon. High-purity polysilicon is dissolved and doped with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. As the semiconductor feature size becomes smaller and smaller, the processing and measurement equipment becomes more and more advanced, resulting in new data characteristics in wafer processing. As the feature size decreases, the number of particles in the air during wafer processing has a greater impact on the quality and reliability of the wafer after processing. Therefore, cleaning wafers is a common process in semiconductor manufacturing.

[0003] The wafer cleaning machine needs to be welded on the shell during the manufacturing process. However, there are many defects in the welding of the wafer cleaning machine shell at this stage. The raw metal plates of the shell need to be butt-jointed and assembled into a rough outline, and the holding arms need to be manually operated one by one to position the metal plates, which makes the manual shell welding preparation work cumbersome and invisibly increases manpower and material resources. At the same time, the metal plates need to be replaced after welding, and the welding device needs to be stopped and waited, which results in low efficiency of the shell welding operation. For this reason, a fully automatic wafer cleaning machine shell processing welding machine is proposed. Summary of the invention

[0004] Based on this, the purpose of the present invention is to provide a welding machine for processing the shell of a fully automatic wafer cleaning machine to solve the technical problems raised in the above background.

[0005] To achieve the above object, the present invention provides the following technical solution: a welding machine for processing the shell of a fully automatic wafer cleaning machine, comprising a base, a welding assembly is fixed on one side of the base, and a restraining assembly is assembled on the other side of the base;

[0006] The restraint assembly comprises a connecting plate fixed to the side wall of the base, two groups of support arms are fixed to the top of the connecting plate, a connecting shaft is rotatably arranged between the two groups of support arms, two groups of outer plates are fixed to the outer wall of each group of the connecting shafts, an L plate is fixed to the outer wall of the connecting shaft on one side of the outer plate, a notch is provided on the outer wall of the outer plate away from the connecting shaft, and a hidden plate is rotatably arranged with the end of the outer plate (320);

[0007] The welding assembly includes a base plate fixed to the side wall of the base platform, two groups of U-frames are fixed to the top of the base plate, a screw rod is longitudinally rotated in each group of the U-frames, a driven bar is threadedly sleeved between the two groups of the screw rods, a support plate is fixed to the top of the driven bar, a welding robot is installed on the top of the support plate, two groups of gas collecting bars are longitudinally fixed to the side of the two groups of U-frames close to the base platform, several groups of suction nozzles are connected to the two sides of the gas collecting bars close to the base platform, a horizontal plate is fixed to the top of the two groups of U-frames, the top of the horizontal plate is equipped with an air pump, the output end of the air pump is provided with a three-way pipe connected to the top of the two groups of gas collecting bars, the top of the horizontal plate is equipped with a filter frame connected to the air pump, and the filter frame is located on one side of the air pump.

[0008] As a preferred technical solution of a welding machine for processing the shell of a fully automatic wafer cleaning machine of the present invention, a turntable is movably provided on the top of the base, and a driving motor connected to the center of the bottom end of the turntable is installed in the base.

[0009] As a preferred technical solution of a welding machine for processing the shell of a fully automatic wafer cleaning machine of the present invention, the top of the support plate is equipped with an electromagnetic slide rail, and the top of the electromagnetic slide rail is sleeved with a slide seat connected to the bottom of the welding robot.

[0010] As a preferred technical solution of a welding machine for processing the shell of a fully automatic wafer cleaning machine of the present invention, an activated carbon layer is installed in the filter frame, and an exhaust pipe is provided on the top of the filter frame.

[0011] As an optimal technical solution of a welding machine for processing the outer shell of a fully automatic wafer cleaning machine according to the present invention, a first motor is installed in the base plate below one of the groups of screw rods, the output end of the first motor is connected to the bottom end of the screw rod through a coupling, the top ends of the two groups of screw rods are rotatably arranged with the U frame, and the bottom ends of the screw rods are rotatably connected to the base plate and extend into the base plate, the outer walls of the two groups of screw rods are located in the base plate and are sleeved with a first belt, no thread is provided at the contact position between the outer wall of the screw rod and the first belt, and a pulley is provided at the contact position between the outer wall of the screw rod and the first belt.

[0012] As an optimal technical solution of a welding machine for processing the shell of a fully automatic wafer cleaning machine of the present invention, the connecting shaft and the outer plate are located on the outer wall of the connecting shaft close to the support arm, and both ends of the connecting shaft extend into the support arm.

[0013] As a preferred technical solution of a welding machine for processing the outer shell of a fully automatic wafer cleaning machine of the present invention, a second motor is installed at the bottom end of the outer wall of the support arm, and the output end of the second motor extends into the support arm and is connected to a connecting rod, and a driving tooth is fixed to the outer wall of the connecting rod, and a driven tooth engaged with the driving tooth is fixed to the end of the connecting shaft located below, and a second belt is sleeved on the outer walls of the connecting rod and the upper connecting shaft.

[0014] In summary, the present invention mainly has the following beneficial effects:

[0015] The present invention cooperates with the L plate and the outer plate in the constraint assembly so that the metal plate of the welded shell is in an upright state. At the same time, the two metal plates can be butted and fixed in a state where the corners are vertical, thereby achieving the purpose of convenient and efficient positioning. At the same time, the welded metal plate can be rotated and changed, which can reduce the time required for manual operation, save manpower and material resources, and achieve the purpose of high efficiency of welding operations.

[0016] When the welding robot performs welding operation on the metal plate, the air pump is started and the air around the welding is close to the air suction nozzle. Since the air collecting strip is at an obtuse angle, a large amount of air around the welding point can enter the filter frame through the air suction nozzle and finally be discharged through the filtration of the activated carbon layer, thereby ensuring the fresh air around the work area and avoiding harm to the health of the workers. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a structural stereogram of the present invention;

[0018] Figure 2 It is a structural diagram of a welding assembly of the present invention;

[0019] Figure 3 It is a structural diagram of the constraint component of the present invention;

[0020] Figure 4 A partially cutaway side view of a welding assembly of the present invention;

[0021] Figure 5 is a side plan view of a restraining assembly of the present invention;

[0022] Figure 6 For the present invention Figure 5 Enlarged view of point A in the middle;

[0023] Figure 7 It is a front cutaway view of the base platform of the present invention.

[0024] In the figure: 100, base; 200, welding assembly; 300, restraint assembly;

[0025] 110. turntable; 120. drive motor;

[0026] 210, bottom plate; 211, first motor; 220, U frame; 221, horizontal plate; 230, lead screw; 231, first belt; 240, driven bar; 250, support plate; 260, welding robot; 270, air pump; 271, three-way pipe; 280, filter frame; 281, activated carbon layer; 290, gas collecting bar; 291, suction nozzle;

[0027] 310, connecting plate; 320, outer plate; 321, hidden groove; 322, missing groove; 330, L-plate; 340, support arm; 350, connecting shaft; 360, second belt; 370, second motor; 371, connecting rod; 380, driving tooth; 390, driven tooth. DETAILED DESCRIPTION

[0028] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0029] The following describes an embodiment of the present invention based on its overall structure.

[0030] A welding machine for processing the shell of a fully automatic wafer cleaning machine, such as Figures 1 to 7 As shown, it includes a base 100, a welding assembly 200 is fixed on one side of the base 100, and a restraining assembly 300 is assembled on the other side of the base 100;

[0031] The restraint assembly 300 includes a connecting plate 310 fixed to the side wall of the base 100, two groups of support arms 340 are fixed to the top of the connecting plate 310, a connecting shaft 350 is rotatably provided between the two groups of support arms 340, two groups of outer plates 320 are fixed to the outer wall of each group of connecting shafts 350, an L plate 330 is fixed to the outer wall of the connecting shaft 350 on one side of the outer plate 320, a notch 322 is provided on the outer wall of the outer plate 320 away from the side of the connecting shaft 350, and a hidden plate 321 is rotatably provided with the end of the outer plate 320;

[0032] The welding assembly 200 includes a bottom plate 210 fixed to the side wall of the base 100, two sets of U frames 220 are fixed on the top of the bottom plate 210, and a screw rod 230 is longitudinally rotated in each set of U frames 220. A driven bar 240 is threadedly sleeved between the two sets of screw rods 230. A support plate 250 is fixed on the top of the driven bar 240. A welding robot 260 is installed on the top of the support plate 250. Two sets of U frames 220 are longitudinally fixed on one side close to the base 100. A gas collecting strip 290 is provided, and both sides of the gas collecting strip 290 close to the bottom platform 100 are connected to a plurality of gas suction nozzles 291. A horizontal plate 221 is fixed to the top of the two groups of U frames 220. The top of the horizontal plate 221 is equipped with an air pump 270. The output end of the air pump 270 is provided with a three-way pipe 271 connected to the top of the two groups of gas collecting strips 290. A filter frame 280 connected to the air pump 270 is installed at the top of the horizontal plate 221, and the filter frame 280 is located on one side of the air pump 270.

[0033] A turntable 110 is movably disposed at the top of the base 100, and a driving motor 120 connected to the center of the bottom end of the turntable 110 is installed inside the base 100;

[0034] The connecting shaft 350 and the outer plate 320 are located on the outer wall of the connecting shaft 350 near the support arm 340, and both ends of the connecting shaft 350 extend into the support arm 340. A second motor 370 is installed at the bottom end of the outer wall of the support arm 340. The output end of the second motor 370 extends into the support arm 340 and is connected to a connecting rod 371. A driving tooth 380 is fixed to the outer wall of the connecting rod 371. A driven tooth 390 that is meshed with the driving tooth 380 is fixed to the end of the connecting shaft 350 at the bottom. A second belt 360 is sleeved on the connecting rod 371 and the outer wall of the upper connecting shaft 350.

[0035] Two sets of metal plates for preparing the outer shell of the wafer cleaning machine are erected on the top of the base 100, and then the second motor 370 is operated first, and its output end drives the connecting rod 371 to rotate, and then the upper connecting shaft 350 is driven to rotate under the action of the second belt 360, so that the two sets of L plates 330 and the outer plate 320 on the outer wall rotate from the bottom to the horizontal state, and at the same time, the active teeth 380 on the outer wall of the connecting rod 371 rotate synchronously, and the driven teeth 390 rotate in the opposite direction, so that the lower connecting shaft 350 rotates, so that the two sets of L plates 330 and the outer plate 320 on the outer wall rotate from the top to the horizontal direction, as shown in the attached manual. Figure 3 The state shown in the figure, and the L plate 330 and the outer plate 320 are located inside and outside the metal plate in the erected state, thereby ensuring that the metal plate used for welding the shell is in an erected state, and at the same time, another metal plate is placed on the top of the two groups of metal plates, and another group of erected metal plates is placed on the side of the two groups of metal plates close to the welding assembly 200, and at the same time, the hidden plate 321 of the outer wall of the outer plate 320 is swung to rotate around the contact point with the end surface of the outer plate 320 to a 270° position, so that the newly erected metal plate is tightly fitted with the two groups of metal plates erected first, and with the cooperation of the L plate 330, the corners of the metal plate are in a vertical state; in this way, the welding assembly 200 can be operated to perform welding operations;

[0036] A first motor 211 is installed below one of the groups of screw rods 230 in the base plate 210, and the output end of the first motor 211 is connected to the bottom end of the screw rod 230 through a coupling. The top ends of the two groups of screw rods 230 are rotatably arranged with the U frame 220, and the bottom ends of the screw rods 230 are rotatably connected with the base plate 210 and extend into the base plate 210. The outer walls of the two groups of screw rods 230 are located in the base plate 210 and are sleeved with a first belt 231. No thread is provided at the contact position between the outer wall of the screw rod 230 and the first belt 231, and a pulley is provided at the contact position between the outer wall of the screw rod 230 and the first belt 231.

[0037] The first motor 211 is controlled to operate, and its output end drives one set of screw rods 230 to rotate, and under the transmission of the first belt 231 sleeved on the outer wall, the two sets of screw rods 230 rotate synchronously, so that the driven bar 240 moves vertically along the screw rods 230 and in the U frame 220, and the welding robot 260 can move forward and backward under the drive of the electromagnetic slide rail, so that the welding robot 260 can perform welding operations on the spliced ​​metal plates in both horizontal and vertical directions;

[0038] When the welding is completed on one side close to the welding robot 260, the second motor 370 is controlled to work, driving the upper and lower sets of L plates 330 and the outer plate 320 to rotate vertically and be located on the inner side of the support arm 340. At this time, the drive motor 120 can be controlled to work slowly, driving the turntable 110 and the welded metal plates of the order to rotate, completing the final face-changing process and achieving efficient welding operations;

[0039] When the welding robot 260 is welding the metal plate, the air pump 270 is started, so that the air around the welding area approaches the air suction nozzle 291, enters the air collecting strip 290 through the air suction nozzle 291, and enters the filter frame 280 through the three-way pipe 271 and the air pump 270, and is finally filtered out through the activated carbon layer 281, ensuring that the air around the work area is fresh and avoiding harm to the health of the staff.

[0040] Please refer to Figure 1 , Figure 2 and Figure 4 The top of the support plate 250 is equipped with an electromagnetic slide rail, and the top of the electromagnetic slide rail is sleeved with a slide seat connected to the bottom of the welding robot 260.

[0041] By utilizing the electromagnetic slide rail and the slide seat in conjunction with the screw rod 230, welding operations in both horizontal and vertical directions can be achieved.

[0042] Please refer to Figure 4 An activated carbon layer 281 is installed in the filter frame 280, and an exhaust pipe is provided at the top of the filter frame 280.

[0043] The odor produced by welding is collected and filtered to avoid a poor working environment and to avoid harm to the health of workers.

[0044] When in use, two sets of metal plates for preparing the outer shell of the wafer cleaning machine are erected on the top of the base 100, and then the second motor 370 is first operated to drive the connecting rod 371 to rotate at its output end, and then the upper connecting shaft 350 is driven to rotate under the action of the second belt 360, so that the two sets of L plates 330 and the outer plate 320 of the outer wall are rotated from the bottom to the horizontal state, and at the same time, the active teeth 380 of the outer wall of the connecting rod 371 rotate synchronously, and the driven teeth 390 rotate in the opposite direction, so as to rotate the lower connecting shaft 350, so that the two sets of L plates 330 and the outer plate 320 of the outer wall are rotated from the top to the horizontal direction, as shown in the attached manual. Figure 3 The state shown in the figure, and the L plate 330 and the outer plate 320 are located inside and outside the metal plate in the erected state, thereby ensuring that the metal plate used for welding the shell is in an erected state, and at the same time, another metal plate is placed on the top of the two groups of metal plates, and another group of erected metal plates is placed on the side of the two groups of metal plates close to the welding assembly 200, and at the same time, the hidden plate 321 of the outer wall of the outer plate 320 is swung to rotate around the contact point with the end surface of the outer plate 320 to a 270° position, so that the newly erected metal plate is tightly fitted with the two groups of metal plates erected first, and with the cooperation of the L plate 330, the corners of the metal plate are in a vertical state; in this way, the welding assembly 200 can be operated to perform welding operations;

[0045] The first motor 211 is controlled to operate, and its output end drives one set of screw rods 230 to rotate, and under the transmission of the first belt 231 sleeved on the outer wall, the two sets of screw rods 230 rotate synchronously, so that the driven bar 240 moves vertically along the screw rods 230 and in the U frame 220, and the welding robot 260 can move forward and backward under the drive of the electromagnetic slide rail, so that the welding robot 260 can perform welding operations on the spliced ​​metal plates in both horizontal and vertical directions;

[0046] When the welding is completed on one side close to the welding robot 260, the second motor 370 is controlled to work, driving the upper and lower sets of L plates 330 and the outer plate 320 to rotate vertically and be located on the inner side of the support arm 340. At this time, the drive motor 120 can be controlled to work slowly, driving the turntable 110 and the welded metal plates of the order to rotate, completing the final face-changing process and achieving efficient welding operations;

[0047] When the welding robot 260 is welding the metal plate, the air pump 270 is started, so that the air around the welding area approaches the air suction nozzle 291, enters the air collecting strip 290 through the air suction nozzle 291, and enters the filter frame 280 through the three-way pipe 271 and the air pump 270, and is finally filtered out through the activated carbon layer 281, ensuring that the air around the work area is fresh and avoiding harm to the health of the workers. The parts not involved in the device are the same as the prior art or can be implemented using the prior art.

[0048] Although an embodiment of the present invention has been shown and described, this specific embodiment is merely an explanation of the present invention and is not a limitation of the invention. The specific features, structures, materials or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions and variations to the embodiments without creative contributions as needed without departing from the principles and purpose of the present invention. However, as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A welding machine for processing the shell of a fully automatic wafer cleaning machine, comprising a base (100), Features: A welding assembly (200) is fixed on one side of the base (100), and a restraining assembly (300) is assembled on the other side of the base (100); The restraint assembly (300) comprises a connecting plate (310) fixed to the side wall of the base (100), two groups of support arms (340) being fixed to the top of the connecting plate (310), a connecting shaft (350) being rotatably provided between the two groups of support arms (340), two groups of outer plates (320) being fixed to the outer wall of each group of the connecting shafts (350), an L plate (330) being fixed to the outer wall of the connecting shaft (350) on one side of the outer plate (320), a notch (322) being provided on the outer wall of the outer plate (320) away from the connecting shaft (350), and a hidden plate (321) being rotatably provided with the end of the outer plate (320); The welding assembly (200) comprises a bottom plate (210) fixed to the side wall of the base (100), two groups of U frames (220) are fixed to the top of the bottom plate (210), a screw rod (230) is longitudinally rotatably arranged in each group of the U frames (220), a driven bar (240) is threadedly sleeved between the two groups of the screw rods (230), a support plate (250) is fixed to the top of the driven bar (240), a welding robot (260) is mounted on the top of the support plate (250), and two U frames (220) are longitudinally fixed to one side close to the base (100). A group of gas collecting strips (290), the two sides of the gas collecting strips (290) close to the base (100) are connected to a plurality of groups of gas suction nozzles (291), the top ends of the two groups of U frames (220) are fixed with a horizontal plate (221), the top end of the horizontal plate (221) is equipped with an air pump (270), the output end of the air pump (270) is provided with a three-way pipe (271) connected to the top ends of the two groups of gas collecting strips (290), the top end of the horizontal plate (221) is equipped with a filter frame (280) connected to the air pump (270), and the filter frame (280) is located on one side of the air pump (270); The connecting shaft (350) and the outer plate (320) are located at positions on the outer wall of the connecting shaft (350) close to the support arm (340), and both ends of the connecting shaft (350) extend into the support arm (340). A second motor (370) is mounted at the lower end of the outer wall of the support arm (340), and an output end of the second motor (370) extends into the support arm (340) and is connected to a connecting rod (371). A driving tooth (380) is fixed to the outer wall of the connecting rod (371), and a driven tooth (390) engaged with the driving tooth (380) is fixed to the end of the lower connecting shaft (350). A second belt (360) is sleeved between the connecting rod (371) and the outer wall of the upper connecting shaft (350).

2. A welding machine for processing the shell of a fully automatic wafer cleaning machine according to claim 1, Features: A rotating disk (110) is movably provided at the top of the base (100), and a driving motor (120) connected to the center of the bottom end of the rotating disk (110) is installed inside the base (100).

3. A welding machine for processing the shell of a fully automatic wafer cleaning machine according to claim 1, Features: The top end of the support plate (250) is equipped with an electromagnetic slide rail, and the top end of the electromagnetic slide rail is sleeved with a slide seat connected to the bottom end of the welding robot (260).

4. A welding machine for processing the shell of a fully automatic wafer cleaning machine according to claim 1, Features: An activated carbon layer (281) is installed in the filter frame (280), and an exhaust pipe is provided at the top of the filter frame (280).

5. A welding machine for processing the shell of a fully automatic wafer cleaning machine according to claim 1, Features: A first motor (211) is installed in the bottom plate (210) below one of the groups of screw rods (230); the output end of the first motor (211) is connected to the bottom end of the screw rod (230) via a coupling; the top ends of the two groups of screw rods (230) are rotatably arranged with the U frame (220), and the bottom ends of the screw rods (230) are rotatably connected with the bottom plate (210) and extend into the bottom plate (210); the outer walls of the two groups of screw rods (230) are located in the bottom plate (210) and are sleeved with a first belt (231); no thread is provided at the contact position between the outer wall of the screw rod (230) and the first belt (231), and a pulley is provided at the contact position between the outer wall of the screw rod (230) and the first belt (231).

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