A standard gas filling device and filling process for gas-liquid mixed sampling

Abstract

The present invention relates to a standard gas filling device and filling process for gas-liquid mixed sampling, the standard gas filling device comprises a diluent gas bottle, a bottle to be filled, and a plurality of raw gas tanks, the two ventilation pipes of the raw gas tanks are both installed with a first valve, the plurality of raw gas tanks are connected in sequence to form a filling passage, one end of the filling passage is connected to the outlet pipe of the diluent gas bottle, the outlet pipe of the diluent gas bottle is installed with a second valve, the other end of the filling passage is connected to the inlet pipe of the bottle to be filled, and the inlet pipe of the bottle to be filled is installed with a third valve. The filling process of the present invention respectively fills a plurality of raw gas tanks with single-component raw gas of proportional quality, and the quality of each single-component raw gas can be clearly determined before mixing and filling in the bottle to be filled, and the filling process is easy to control and has high fault tolerance. The filling device is used to connect a plurality of raw gas tanks in sequence, so that a plurality of raw gas with accurate proportions can be all filled into the bottle to be filled through the filling passage at one time, which is convenient to operate and improves the filling efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of standard gas filling, and in particular to a standard gas filling device and a filling process for gas-liquid mixed sampling. Background Art

[0002] Standard gas is prepared by using a high-purity gas as diluent (also called balance gas or background gas), and then adding one or more other high-purity gases (also called component gas or raw gas) in a constant proportion. Therefore, controlling the accurate filling ratio of various raw gases is an important condition to ensure the effectiveness of the standard mixed gas composition.

[0003] The existing standard gas preparation uses filling equipment to complete gas filling. The filling process of the existing filling equipment has a main pipeline connected to the bottle to be filled. The main pipeline is equipped with multiple branches that are respectively connected to various raw gas cylinders and dilution gas cylinders. Each branch has a valve control switch. The standard gas cylinder is placed on a precision electronic balance to weigh the quality of the gas filled. During filling, in order to ensure the accuracy of the raw gas filling ratio, only one raw gas can be filled into the standard gas cylinder in the main pipeline at a time. Only after the ratio is accurate can the next raw gas be filled. The operation is cumbersome and the efficiency is low.

[0004] Moreover, since this filling process requires the raw gases to be filled into standard gas cylinders one by one and weighed in the proportions, if one raw gas is overfilled or the proportions of other raw gases change during the filling process, it is necessary to adjust the filling amounts of all raw gases and re-proportion and re-fill the entire cylinder. The process is cumbersome, reduces efficiency, is difficult to control, and the filling process has low fault tolerance. Summary of the invention

[0005] In view of the deficiencies in the prior art, the present invention provides an automatic and efficient filling device and process, wherein the filling process is easy to control and has high fault tolerance.

[0006] The present invention is realized by the following technical scheme: a filling process of a standard gas filling device for gas-liquid mixed sampling, the standard gas filling device for gas-liquid mixed sampling comprises a diluent gas bottle, a bottle to be filled, and a plurality of raw gas tanks, the raw gas tank is provided with two ventilation pipes, both ventilation pipes are equipped with a first valve, a plurality of raw gas tanks are connected in sequence to form a filling passage, one end of the filling passage is connected with an outlet pipe of the diluent gas bottle, a second valve is installed on the outlet pipe of the diluent gas bottle, the other end of the filling passage is connected with an inlet pipe of the bottle to be filled, and a third valve is installed on the inlet pipe of the bottle to be filled;

[0007] The filling process comprises the following steps:

[0008] S1: Fill different types of single-component raw gas into different raw gas tanks according to the required ratio, and connect multiple raw gas tanks in sequence to form a filling passage;

[0009] The pipeline between the first valve at one end of the S2 filling passage and the second valve of the dilution gas bottle, the pipeline between the first valve at the other end of the filling passage and the third valve of the bottle to be filled, and the pipeline between the two first valves of adjacent raw gas tanks are all vacuumed;

[0010] S3 All the first valves, second valves and third valves are fully opened, and the diluent gas cylinder delivers the diluent gas into the filling passage. The flow of the diluent gas drives all the single-component raw gas in the multiple raw gas tanks to be filled into the bottles to be filled, and the diluent gas cylinder continuously delivers the diluent gas flow into the bottles to be filled;

[0011] S4: As the diluent gas is continuously delivered, the bottle to be filled is weighed at the same time. When the filling mass of the bottle to be filled reaches the set value, the second valve and the third valve are closed to complete the filling. At this time, standard gas is formed in the bottle to be filled.

[0012] S5: Replace the raw gas tank and the bottle to be filled with new one filled with single-component raw gas, and repeat steps S2 to S4.

[0013] The filling process of this scheme fills multiple raw gas tanks with single-component raw gas of proportional quality respectively. Before mixing and filling in the bottle to be filled, the quality of each single-component raw gas can be clearly determined, and there is no need to perform quantitative proportioning in the bottle to be filled. In this way, once a raw gas of incorrect quality is filled, this raw gas can be refilled without adjusting the quality of other raw gas. The filling process is easy to control and has high fault tolerance. Use filling equipment to connect multiple raw gas tanks in sequence, so that multiple raw gases with accurate proportions can be filled into the bottle to be filled at one time through the filling passage, eliminating the process of filling the raw gas one by one, making the operation convenient and improving the filling efficiency.

[0014] As an optimization, the filling passage is connected to the outlet pipe of the dilution gas cylinder, the inlet pipe of the bottle to be filled, and the ventilation pipes of two adjacent raw gas tanks through a vacuum pipeline. The vacuum pipeline is located between the corresponding valves of each pipeline, and a vacuum valve is installed on the vacuum pipeline. This optimization scheme uses the vacuum valve to evacuate the vacuum pipeline to achieve the vacuum setting between the valves.

[0015] As an optimization, two ventilation pipes are arranged opposite to each other at both ends of the raw gas tank, and multiple raw gas tanks are connected in a straight line through vacuum pipelines. This optimization scheme facilitates the connection of vacuum pipelines and adjacent raw gas tanks, and the filling passages formed by the raw gas tanks are in a straight line, which is convenient for gas flow filling.

[0016] As an optimization, the raw gas tank is detachably connected to the vacuum pipeline. This optimization solution facilitates the connection and replacement of the raw gas tank.

[0017] As an optimization, the standard gas filling equipment for gas-liquid mixed sampling also includes a docking mechanism, and the two ends of the vacuum pipeline are connected with docking joints through expansion joints. The docking mechanism drives the two docking joints to move in opposite directions and seal and dock with the vent pipes of adjacent raw gas tanks. This optimization scheme docks the docking joint and the vent pipe through the docking mechanism, so that the raw gas tank and the vacuum pipeline are automatically connected, saving manpower and improving work efficiency.

[0018] As an optimization, the docking mechanism includes a rotatable lead screw and a first motor that drives the lead screw to rotate. Multiple groups of threaded wires are distributed along the length direction of the lead screw, and the rotation directions of adjacent threaded wires are opposite. The docking joints at both ends of the vacuum pipeline are fixedly connected with linkage plates, and the two linkage plates are screwed to two adjacent threaded wires on the lead screw. This optimization scheme drives the linkage plates with threaded connections on the lead screw to move along the lead screw through the rotation of the lead screw. Since the rotation directions of adjacent threaded wires are opposite, the movement directions of adjacent linkage plates screwed on the threaded wires are opposite, thereby driving the docking joints at both ends of the vacuum pipeline to move in the opposite direction.

[0019] As an optimization, the standard gas filling equipment for gas-liquid mixed sampling also includes an installation limit seat, the raw gas tank is placed on the installation limit seat, the outer wall of the raw gas tank is fixedly connected to a limit convex ring, and the installation limit seat is provided with a limit concave ring that fits with the limit convex ring. This optimization scheme limits the position of the raw gas tank by installing a limit seat, and the lateral displacement and shaking of the raw gas tank is avoided by the engagement of the limit convex ring and the limit concave ring, so as to facilitate the docking of the raw gas tank and the vacuum pipeline joint.

[0020] As an optimization, the limiting convex ring is provided with a positioning groove, and the limiting concave ring is provided with a positioning protrusion that fits the positioning groove. This optimization solution further positions the raw gas tank through the engagement of the positioning groove and the positioning protrusion.

[0021] As an optimization, the standard gas filling equipment for gas-liquid mixed sampling also includes a gas tank valve switch mechanism, which includes a second motor and a valve knob interlocking structure fixedly connected to the output end of the second motor, and when the positioning groove and the positioning protrusion are engaged, the valve knob interlocking structure and the knob of the first valve are engaged and fixed. This optimization scheme drives the valve knob interlocking structure to rotate through the second motor, thereby driving the knob of the second valve to rotate, realizing automatic opening and closing of the first valve, and further improving the operating efficiency.

[0022] As an optimization, the standard gas filling equipment for gas-liquid mixed sampling also includes a raw gas tank filling station, which includes a gas tank base for carrying the raw gas tank, a vertical fixed arm fixedly connected to one side of the gas tank base, and a movable arm hinged to the other side of the gas tank base, and the ventilation pipes at both ends of the raw gas tank are respectively arranged opposite to the fixed arm and the movable arm, and a driving mechanism for driving the movable arm to rotate and clamp the raw gas tank is provided on the gas tank base, and the fixed arm and the movable arm are respectively provided with an air inlet channel and a liquid inlet channel connected to the relative ventilation pipe. This optimization scheme facilitates personnel to quickly fill single-component raw materials into the raw gas tank.

[0023] The beneficial effects of the present invention are as follows: the filling process can clarify the quality of each single-component raw gas before mixing and filling in the bottle to be filled by filling multiple raw gas tanks with single-component raw gas of proportional quality, and there is no need to perform quantitative proportioning in the bottle to be filled. In this way, once a raw gas of the wrong quality is filled, this raw gas can be refilled without adjusting the quality of other raw gas. The filling process is easy to control and has high fault tolerance. Using filling equipment to connect multiple raw gas tanks in sequence, multiple raw gas with accurate proportions can be filled into the bottle to be filled at one time through the filling passage, eliminating the process of filling the raw gas one by one, making the operation convenient and improving the filling efficiency.

[0024] The standard gas filling equipment for gas-liquid mixed sampling is equipped with an installation limit seat for positioning and installing the raw gas tank. The raw gas tank and the vacuum pipeline are automatically docked through the docking mechanism, and the opening and closing of the first valve of the raw gas tank is controlled by the gas tank valve switch mechanism, which saves manpower and improves work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A filling process diagram of the filling device of the present invention;

[0026] Figure 2 It is a schematic diagram of the structural relationship between the equipment box, the dilution gas cylinder and the bottle to be filled of the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of the raw gas tank of the present invention;

[0028] Figure 4 This is a cross-sectional view of the installation limit seat structure of the present invention;

[0029] Figure 5 This is a schematic diagram of the structural relationship between the butt joint and the raw gas tank of the present invention;

[0030] Figure 6 It is a schematic diagram of the structural relationship between the docking mechanism, vacuum pipeline and raw material gas tank of the present invention;

[0031] Figure 7 It is a schematic diagram of the structural relationship between the gas tank valve switch mechanism and the raw gas tank of the present invention;

[0032] Figure 8 This is a schematic diagram of the structure of the raw gas tank filling station of the present invention;

[0033] Fig. 9 Schematic diagram of filling the raw gas tank with single-component high-purity gas;

[0034] As shown in the figure:

[0035] 1. Raw gas tank, 11. First valve, 12. Ventilation pipe, 13. Limiting convex ring, 14. Positioning groove, 15. Block, 2. Dilution gas cylinder, 21. Second valve, 3. Bottle to be filled, 31. Third valve, 32. Electronic balance, 4. Vacuum pipeline, 41. Vacuum valve, 42. Vacuum main pipe, 43. Vacuum branch pipe, 5. Installing limiting seat, 51. Limiting concave ring, 52. Positioning protrusion, 6. Gas tank valve switch mechanism, 61. Second motor, 62. Connecting shaft, 63. Valve knob interlocking structure, 64. Slot, 7. Butt joint, 71. Circular slot, 72. Sealing ring, 8. Butt joint mechanism, 81. Screw, 82. First motor, 83. Coupling, 84. Linkage plate, 85. Chain, 9. Expansion joint, 10. Equipment box, 111. Gas tank base, 112. Fixed arm, 113. Movable arm, 114. Connecting rod, 115. Eccentric lock, 116. Sealing slot, 117. Sealing rubber ring, 118. Sealing rubber plug, 119. Air inlet channel, 120. Liquid inlet channel, 121. Raw gas cylinder, 122. Vacuum pump, 123. Hose. DETAILED DESCRIPTION

[0036] In order to clearly illustrate the technical features of this solution, this solution is described below through a specific implementation method.

[0037] like Figures 1 to 7 As shown, a standard gas filling device and filling process for gas-liquid mixed sampling, the standard gas filling device for gas-liquid mixed sampling comprises a diluent gas bottle 2, a bottle to be filled 3, and a plurality of raw gas tanks 1. The raw gas tank 1 is provided with two ventilation pipes 12, the two ventilation pipes 12 are arranged oppositely at the two ends of the raw gas tank 1, and the two ventilation pipes 12 are both installed with a first valve 11. The plurality of raw gas tanks 1 are connected in sequence to form a filling passage, one end of the filling passage is connected to the outlet pipe of the diluent gas bottle 2, the outlet pipe of the diluent gas bottle 2 is installed with a second valve 21, and the other end of the filling passage is connected to the inlet pipe of the bottle to be filled 3, and the inlet pipe of the bottle to be filled 3 is installed with a third valve 31.

[0038] The filling passage is connected to the outlet pipe of the dilution gas cylinder 2, the inlet pipe of the to-be-filled bottle 3, and the ventilation pipes 12 of two adjacent raw gas cylinders 1 through a vacuum pipeline 4. The vacuum pipeline 4 is located between the corresponding valves of each pipeline, and a vacuum valve 41 is installed on the vacuum pipeline 4. In this embodiment, multiple raw gas cylinders 1 are arranged in sequence along a straight line, and the multiple raw gas cylinders 1 are connected in a straight line through the vacuum pipeline 4, thereby forming a linear filling passage, which is convenient for the connection of the vacuum pipeline and the adjacent raw gas cylinders and the flow filling of gas.

[0039] The vacuum pipeline 4 in this embodiment is a three-way pipe fitting, and the filling passage is connected to the outlet pipe of the dilution gas bottle, the inlet pipe of the bottle to be filled, and the ventilation pipes of two adjacent raw material gas tanks through two oppositely arranged ports of the three-way pipe fitting, and the vacuum valve 41 is installed on the third port of the three-way pipe fitting, so as to realize the vacuum setting between each valve. And the third port of each three-way pipe fitting is connected to the vacuum main pipe 42 through a vacuum branch pipe 43, and the vacuum main pipe 42 is connected to a vacuum pump to facilitate the pumping and transportation of the vacuum valve.

[0040] The standard gas filling equipment for gas-liquid mixed sampling also includes an equipment box 10, which is provided with a program control area and a gas tank installation area. The program control area is provided with a control system, which includes a controller, a display screen, a control panel and a signal indicator light. The gas tank installation area is provided with a plurality of gas tank compartments for placing raw gas tanks 1, and the plurality of gas tank compartments correspond to the number of the plurality of raw gas tanks. The plurality of gas tank compartments are arranged in sequence along a straight line, and the raw gas tanks are placed and installed in the gas tank compartments one by one.

[0041] Specifically, the standard gas filling equipment for gas-liquid mixed sampling also includes an installation limit seat 5, which is located in the gas tank compartment. The number of the installation limit seats 5 is the same as the number of the raw gas tanks 1. The raw gas tanks 1 are placed on the installation limit seat 5. The outer wall of the raw gas tank 1 is fixedly connected to the limit convex ring 13, and the installation limit seat 5 is provided with a limit concave ring 51 that fits the limit convex ring 13. The limit convex ring 13 is provided with a hemispherical positioning groove 14, and the limit concave ring 51 is provided with a hemispherical positioning protrusion 52 that fits the positioning groove 14. The raw gas tank 1 is placed on the installation limit seat 5 in the gas tank compartment, so that the limit convex ring 13 and the limit concave ring 51 are engaged to prevent the lateral displacement of the raw gas tank. The knob position of the first valve 11 is positioned by engaging the positioning groove 14 and the positioning protrusion 52. In this embodiment, when the positioning groove 14 and the positioning protrusion 52 are engaged, the knobs of the first valves 11 at both ends of the raw material gas tank 1 are set to face upward.

[0042] The vacuum pipeline 4 is fixedly installed in the equipment box 10, and the adjacent raw gas tank 1 is detachably connected to the corresponding vacuum pipeline 4. The two ends of the vacuum pipeline 4 are connected to the docking joint 7 through the expansion joint 9. The standard gas filling equipment also includes a docking mechanism 8, which drives the two docking joints 7 to move in opposite directions and seal and dock with the vent pipe 12 of the adjacent raw gas tank 1. One end of the expansion joint 9 in this embodiment is fixedly connected to the port of the vacuum pipeline 4, and the other end of the expansion joint is fixedly connected to one end of the docking joint 7.

[0043] The docking joint 7 is an annular block structure, and the inner diameter of the docking joint 7 is smaller than the inner diameter of the vent pipe 12. A circular slot 71 for inserting the vent pipe 12 is provided at the center of the other end of the docking joint 7. The inner diameter of the circular slot 71 matches the outer diameter of the vent pipe 12. The vent pipe 12 is inserted into the circular slot 71, so that the inner hole of the docking joint 7 and the vent pipe 12 are connected. A sealing ring 72 is fixed to the inner wall of the circular slot 71. The vacuum pipeline 4 is located between adjacent raw gas tanks 1 and is fixedly arranged. The docking joints 7 at both ends are driven by the docking mechanism 8 to move in the opposite direction in a straight line. The docking joints 7 move into the gas tank compartment and dock with the vent pipe 12 of the raw gas tank, so that the raw gas tank 1 and the vacuum pipeline 4 are connected to form a filling passage.

[0044] Specifically, the docking mechanism 8 is a ball screw pair, which includes a rotatable screw 81 and a first motor 82 that drives the screw to rotate. The screw 81 has multiple groups of threads distributed along the length direction, and the rotation directions of adjacent threads are opposite. The docking joints 7 at both ends of the vacuum pipeline 4 are fixedly connected with linkage plates 84, and two adjacent linkage plates 84 are screwed with two adjacent threads on the screw 81. In this embodiment, the screw 81 is rotatably installed in the equipment box 10, the first motor 82 is fixedly connected in the equipment box 10, and the output end of the first motor 82 is connected to one end of the screw 81 through a coupling 83.

[0045] The lead screws 81 are provided with two, and the two lead screws 81 are parallelly distributed up and down, and sprockets are fixedly connected to the two lead screws 81. The two sprockets are connected by a chain 85, and move synchronously through the drive of the first motor 82. The chain sprocket transmission structure of this embodiment can be replaced by a synchronous belt transmission structure to achieve the same function. The butt joint 7 is fixedly connected to the middle of the linkage plate 84, and the upper and lower ends of the linkage plate 84 are respectively threadedly connected and matched with the two lead screws 81. The rotation of the lead screw 81 drives the linkage plate 84 to move along the thread on the lead screw. By providing two lead screws, the linkage plate is more stable when moving.

[0046] The standard gas filling equipment for gas-liquid mixed sampling also includes a gas tank valve switch mechanism 6, which includes a second motor 61 and a valve knob interlocking structure 63 fixedly connected to the output end of the second motor 61. When the positioning groove 14 and the positioning protrusion 52 are engaged, the valve knob interlocking structure 63 and the knob of the first valve 11 are engaged and fixed.

[0047] Specifically, the number of the gas tank valve switch mechanisms 6 is the same as the number of the first valves 11 and corresponds to each other. The gas tank valve switch mechanisms 6 are arranged directly above the first valves 11. The second motor 61 is fixedly connected in the equipment box 10. The output end of the second motor 61 is arranged downward and fixedly connected with a vertical connecting shaft 62. The connecting shaft 62 extends downward into the gas tank compartment. The valve knob interlocking structure 63 is fixedly connected to the lower end of the connecting shaft 62. The valve knob interlocking structure 63 is a cylindrical block structure. A card slot 64 is provided at the bottom of the cylindrical block. The card slot 64 is a rectangular through slot. A rectangular card block 15 matching the card slot 64 is fixedly connected to the knob of the first valve 11. When the personnel rotates the raw material gas tank 1 to engage the positioning groove 14 and the positioning protrusion 52, the knobs of the first valves 11 at both ends of the raw material gas tank are arranged toward the top. At this time, the card block 15 is also engaged in the card slot 64. The second motor 61 is a servo motor. The forward and reverse rotation of the second motor 61 drives the valve knob engaging structure 63 to rotate forward and reverse, thereby controlling the opening and closing of the first valve 11 and improving the working efficiency.

[0048] The dilution gas cylinder 2 and the bottle to be filled 3 described in this embodiment are both located outside the equipment box 10, and the bottle to be filled 3 is placed on the electronic balance 32. The outlet pipe of the dilution gas cylinder and the inlet pipe of the bottle to be filled are made of hoses and fixedly connected to the docking joint 7 of the vacuum pipeline 4.

[0049] In this embodiment, the second valve 21, the third valve 31, and the vacuum valve 41 are all electrically controlled valves, and the first motor 82, the second motor 61, the second valve 21, the third valve 31, the vacuum valve 41, and the electronic balance 32 are all connected to the controller of the control system by electrical signals. The control panel controls the start and stop of the first motor and the second motor and the opening and closing of the second valve, the third valve, and the vacuum valve through the controller. The control panel can set the filling amount of the bottle to be filled, and the filling amount is detected in real time through the electronic balance. The display screen can display the filling amount in real time. When the set value is reached, the controller controls the corresponding valve to close. This control system can be implemented by programming by technicians in related fields, and no further elaboration is given here.

[0050] The filling process comprises the following steps:

[0051] S1 Preparatory process: different types of single-component raw gas are charged into different raw gas tanks 1 through the raw gas tank filling station according to the required quality ratio, and multiple raw gas tanks 1 are connected in sequence to form a filling passage;

[0052] A plurality of raw material gas tanks are sequentially placed on a plurality of mounting limit seats 5. When the positioning groove 14 of the raw material gas tank 1 is engaged with the positioning protrusion 52 of the mounting limit seat, the knobs of the first valves 11 at both ends of the raw material gas tank are engaged in the slots 64 of the gas tank valve switch mechanism 6 through the clamping blocks 15. The opening and closing of the first valve 11 can be controlled by the forward and reverse rotation of the second motor 61 of the gas tank valve switch mechanism 6.

[0053] The first motor 82 of the docking mechanism 8 drives the lead screw 81 to rotate, and the lead screw 81 drives the adjacent linkage plate 84 to move in the opposite direction along the lead screw, so that the docking joints 7 on both sides of the vacuum pipeline 4 move in the opposite direction and dock with the adjacent ventilation pipes 12 of the raw material gas tank to form the filling passage, and the ventilation pipes 12 of the raw material gas tank are inserted into the circular slots 71 of the docking joints 7 to achieve sealed docking;

[0054] S2 Mixed filling process: The pipeline between the first valve at one end of the filling passage and the second valve of the dilution gas bottle, the pipeline between the first valve at the other end of the filling passage and the third valve of the bottle to be filled, and the vacuum pipeline 4 between the two first valves of adjacent raw gas tanks are all evacuated;

[0055] S3 All the first valves 11, the second valves 21 and the third valves 31 are fully opened, the dilution gas cylinder 2 delivers the dilution gas into the filling passage, the flow of the dilution gas drives all the single-component raw gas in the multiple raw gas tanks 1 to be filled into the bottles to be filled 3, and the dilution gas cylinder 2 continuously delivers the dilution gas flow into the bottles to be filled 3;

[0056] S4: As the diluent gas is continuously delivered, the bottle 3 to be filled is weighed at the same time. When the filling mass of the bottle 3 to be filled reaches the set value, the second valve 21 and the third valve 31 are closed to complete the filling. At this time, standard gas is formed in the bottle 3 to be filled.

[0057] Each vacuum pipeline 4 is evacuated again to release the residual pressure in the pipeline. While evacuating, all the residual dilution gas in the multiple raw material gas tanks 1 is also extracted, and then all the first valves 11 are closed;

[0058] S5: Replace the raw gas tank 1 and the bottle to be filled 3 filled with new single-component raw gas, and repeat steps S2 to S4.

[0059] The filling process described above can be used to fill multiple raw gas tanks 1 with single-component raw gas of proportional quality. Before mixing and filling in the bottle to be filled, the quality of each single-component raw gas can be clearly determined, and there is no need to perform quantitative proportioning in the bottle to be filled. In this way, once a raw gas of incorrect quality is filled, the raw gas tank can be refilled without adjusting the quality of other raw gas. The filling process is easy to control and has high fault tolerance. Using filling equipment to connect multiple raw gas tanks in sequence, multiple raw gas with accurate proportions can be filled into the bottle to be filled at one time through the filling passage, eliminating the process of filling the raw gas one by one, making the operation convenient and improving the filling efficiency.

[0060] It should be noted that in the filling process of the present invention, the single-component raw gas filled into the raw gas tank 1 in step S1 can be a high-purity gas or a gasified liquid. The standard gas filling equipment for gas-liquid mixed sampling also includes a raw gas tank filling station, and the raw gas tank in step S1 is filled with the single-component raw gas through the raw gas tank filling station.

[0061] The plurality of raw gas cylinders may be pre-filled and prepared in multiple groups. When the mixed filling of one group of raw gas cylinders in steps S2 to S4 is completed, another group of raw gas cylinders that have been pre-filled may be directly replaced in step S5 to continue the operation, thereby further improving the filling efficiency. An operator dedicated to filling raw gas cylinders may be set up, so that the operator refills the raw gas cylinders replaced in step S5 through the raw gas cylinder filling station.

[0062] like Figures 8-9 As shown, in order to facilitate personnel to fill the raw gas tank with single-component raw materials, the raw gas tank filling platform includes a gas tank base 111 for carrying the raw gas tank 1, the gas tank base is placed on the electronic balance 32, a vertical fixed arm 112 is fixedly connected to one side of the gas tank base 111, and a movable arm 113 is hinged to the other side of the gas tank base through a horizontal first hinge axis, the raw gas tank 1 is located between the fixed arm 112 and the movable arm 113, the ventilation pipes 12 at both ends of the raw gas tank 1 are respectively arranged opposite to the fixed arm 112 and the movable arm 113, and the opposite side walls of the fixed arm 112 and the movable arm 113 are provided with sealing slots 116 that are sealed and docked with the ventilation pipes 12 at both ends of the raw gas tank 1, and a sealing rubber ring 117 is provided in the sealing slot 116, and a driving mechanism for driving the movable arm 113 to rotate and clamp the raw gas tank 1 is provided on the gas tank base 111, and an air inlet channel 119 and a liquid inlet channel 120 that are connected to the relative ventilation pipes are respectively provided on the fixed arm and the movable arm.

[0063] Specifically, the driving mechanism includes a connecting rod 114 and an eccentric lock 115. One end of the connecting rod 114 is hinged to the gas tank base 111 through a second hinge shaft. The second hinge shaft is located on the side of the movable arm 113 close to the raw gas tank 1. The other end of the connecting rod 114 is hinged to the eccentric lock 115 through a third hinge shaft. The eccentric lock 115 is located on the side of the movable arm 113 away from the raw gas tank 1 and abuts against the movable arm. The eccentric lock 115 rotates to drive the movable arm to rotate in a small range around the first hinge shaft, so that the movable arm rotates to press the raw gas tank. The eccentric lock 115 described in this embodiment is a commonly used part with standard size models, which can be purchased directly on the market and will not be described in detail here.

[0064] Specifically, the vent pipe 12 at one end of the raw gas tank 1 is inserted into the sealing slot 116 of the fixed arm 112, and the driving mechanism drives the movable arm 113 to clamp the raw gas tank 1, so that the vent pipe 12 at the other end of the raw gas tank 1 is inserted into the sealing slot 116 of the movable arm 113. An air inlet channel 119 connected to the vent pipe is provided in the sealing slot 116 on the fixed arm. The air inlet channel 119 passes through the fixed arm 112 and is connected to the raw gas cylinder 121 through a hose 123. A vacuum valve 41 is installed on the hose 123, and the vacuum valve 41 is connected to a vacuum pump 122. A liquid inlet channel 120 connected to the vent pipe 12 is provided in the sealing slot 116 on the movable arm. The liquid inlet channel 120 passes through the movable arm 113. A sealing rubber plug 118 for blocking the liquid inlet channel is threadedly connected to the side of the movable arm 113 away from the raw gas tank 1.

[0065] The method of a raw gas tank filling station of the present invention for filling a single component high purity gas into a raw gas tank is as follows:

[0066] 1. Place the raw material gas tank 1 replaced in step S5 on the gas tank base 111, insert the ventilation pipes 12 at both ends of the raw material gas tank 1 into the sealing slots 116 of the fixed arm 112 and the movable arm 113 respectively, press down the eccentric lock 115, so that the fixed arm 112 and the movable arm 113 clamp the raw material gas tank 1;

[0067] 2. Open the first valve 11 and the vacuum valve 41 at both ends of the raw material gas tank 1, and after vacuumizing the raw material gas tank and the hose by the vacuum pump 122, close the vacuum valve 41 and the first valve 11 at one end of the movable arm 113 of the raw material gas tank 1;

[0068] 3. The electronic balance is reset, and the valve of the raw material gas cylinder 121 is opened to fill the raw material gas tank 1. When the electronic balance reaches a predetermined mass, the valve of the raw material gas cylinder 121 and the first valve 11 of the raw material gas tank 1 at one end of the fixed arm 112 are closed;

[0069] Fourth, open the vacuum valve 41 again, draw out the remaining gas in the hose, close the vacuum valve, lift the eccentric lock, remove the raw gas tank, and complete the filling of the single-component high-purity gas.

[0070] The method of a raw gas tank filling station of the present invention for filling a single-component gasified liquid into a raw gas tank is as follows:

[0071] 1. Place the raw material gas tank 1 replaced in step S5 on the gas tank base 111, insert the ventilation pipes at both ends of the raw material gas tank into the sealing slots of the fixed arm and the movable arm respectively, press the eccentric lock buckle pressure, so that the fixed arm and the movable arm clamp the raw material gas tank;

[0072] 2. Open the first valve and vacuum valve at both ends of the raw material gas tank, evacuate the raw material gas tank and the hose by using a vacuum pump, and then close the vacuum valve 41 and the first valve 11 of the raw material gas tank 1 at one end of the fixed arm 112;

[0073] 3. Use a sample injector (existing equipment can be directly purchased on the market) to extract the required mass of gasified liquid, remove the sealing rubber plug 118 that blocks the liquid inlet channel, and extend the sample injector into the liquid inlet channel 120 to inject the gasified liquid into the raw gas tank 1;

[0074] Fourth, close the first valve 11 of the raw material gas tank 1 at one end of the movable arm 113, lift the eccentric lock, and complete the filling of the gasified liquid raw material.

[0075] Of course, the above description is not limited to the above examples. Technical features not described in the present invention can be achieved by or by using existing technologies, which will not be described here. The above embodiments and drawings are only used to illustrate the technical scheme of the present invention and are not limitations of the present invention. The present invention is described in detail with reference to the preferred implementation methods. Ordinary technicians in this field should understand that changes, modifications, additions or substitutions made by ordinary technicians in this technical field within the essential scope of the present invention do not depart from the purpose of the present invention, and should also fall within the scope of protection of the claims of the present invention.

Claims

1. A filling process for a standard gas filling device for gas-liquid mixed sampling, characterized in that: The standard gas filling device for gas-liquid mixed sampling comprises a diluent gas bottle (2), a bottle to be filled (3), and a plurality of raw gas tanks (1), wherein the raw gas tank (1) is provided with two ventilation pipes (12), and the two ventilation pipes are both provided with a first valve (11), and the plurality of raw gas tanks (1) are connected in sequence to form a filling passage, wherein one end of the filling passage is connected to the gas outlet pipe of the diluent gas bottle (2), and the gas outlet pipe of the diluent gas bottle is provided with a second valve (21), and the other end of the filling passage is connected to the gas inlet pipe of the bottle to be filled (3), and the gas inlet pipe of the bottle to be filled is provided with a third valve (31); The filling passage is connected to the outlet pipe of the dilution gas bottle (2), the inlet pipe of the bottle to be filled (3), and the ventilation pipes (12) of two adjacent raw material gas tanks through a vacuum pipeline (4). The vacuum pipeline is located between the corresponding valves of each pipeline. A vacuum valve (41) is installed on the vacuum pipeline (4); The two ventilation pipes (12) are arranged opposite to each other at two ends of the raw material gas tank (1), and a plurality of raw material gas tanks are connected in a straight line via a vacuum pipeline (4); The vacuum pipeline (4) is a three-way pipe fitting, and the filling passage is connected to the outlet pipe of the dilution gas bottle, the inlet pipe of the bottle to be filled, and the ventilation pipes of two adjacent raw material gas tanks through two oppositely arranged ports of the three-way pipe fitting, and the vacuum valve (41) is installed on the third port of the three-way pipe fitting; The filling process comprises the following steps: S1: charging different types of single-component raw gas into different raw gas tanks (1) according to the required mass ratio, and connecting multiple raw gas tanks in sequence to form a charging passage; The pipeline between the first valve (11) at one end of the S2 filling passage and the second valve (21) of the dilution gas bottle, the pipeline between the first valve (11) at the other end of the filling passage and the third valve (31) of the bottle to be filled, and the pipeline between the two first valves (11) of adjacent raw material gas tanks (1) are all vacuumed; S3 All the first valves (11), the second valves (21) and the third valves (31) are fully opened, the diluent gas cylinder (2) delivers the diluent gas into the filling passage, the flow of the diluent gas drives all the single-component raw gas in the plurality of raw gas tanks (1) to be filled into the bottles to be filled (3), and the diluent gas cylinder continuously delivers the diluent gas flow into the bottles to be filled; S4: As the diluent gas is continuously delivered, the bottle to be filled (3) is weighed at the same time. When the filling mass of the bottle to be filled reaches a set value, the second valve (21) and the third valve (31) are closed to complete the filling. At this time, standard gas is formed in the bottle to be filled (3); S5 Replace the raw gas tank (1) and the bottle to be filled (3) filled with a new single-component raw gas, and repeat steps S2 to S4.

2. The filling process of a standard gas filling device for gas-liquid mixed sampling according to claim 1 is characterized in that: The raw material gas tank (1) is detachably connected to the vacuum pipeline (4).

3. The filling process of a standard gas filling device for gas-liquid mixed sampling according to claim 2 is characterized by: The standard gas filling device for gas-liquid mixed sampling also includes a docking mechanism (8), and both ends of the vacuum pipeline (4) are connected to docking joints (7) via expansion joints (9). The docking mechanism (8) drives the two docking joints (7) to move in opposite directions and to seal and dock with the ventilation pipe (12) of the adjacent raw material gas tank (1).

4. The filling process of a standard gas filling device for gas-liquid mixed sampling according to claim 3 is characterized by: The docking mechanism (8) comprises a rotatably arranged lead screw (81) and a first motor (82) for driving the lead screw to rotate. The lead screw (81) has a plurality of groups of threaded threads distributed along its length, and the rotation directions of adjacent threaded threads are opposite. The docking joints (7) at both ends of the vacuum pipeline are both fixedly connected with linkage plates (84), and two adjacent linkage plates are threadedly connected to two adjacent threaded threads on the lead screw.

5. The filling process of a standard gas filling device for gas-liquid mixed sampling according to claim 4 is characterized in that: The standard gas filling device for gas-liquid mixed sampling also includes an installation limit seat (5), the raw gas tank (1) is placed on the installation limit seat, the outer wall of the raw gas tank is fixedly connected to the limit convex ring (13), and the installation limit seat is provided with a limit concave ring (51) that is locked with the limit convex ring (13).

6. The filling process of a standard gas filling device for gas-liquid mixed sampling according to claim 5 is characterized by: The limiting convex ring (13) is provided with a positioning groove (14), and the limiting concave ring (51) is provided with a positioning protrusion (52) that fits in the positioning groove (14).

7. The filling process of a standard gas filling device for gas-liquid mixed sampling according to claim 6 is characterized by: The standard gas filling device for gas-liquid mixed sampling also includes a gas tank valve switch mechanism (6), the gas tank valve switch mechanism includes a second motor (61) and a valve knob interlocking structure (63) fixedly connected to the output end of the second motor, and when the positioning groove (14) and the positioning protrusion (52) are engaged, the valve knob interlocking structure (63) is also engaged and fixed with the knob of the first valve (11).

8. The filling process of a standard gas filling device for gas-liquid mixed sampling according to claim 1 is characterized by: The standard gas filling device for gas-liquid mixed sampling also includes a raw material gas tank filling platform, the raw material gas tank filling platform includes a gas tank base (111) for carrying the raw material gas tank (1), a vertical fixed arm (112) is fixedly connected to one side of the gas tank base (111), and a movable arm (113) is hingedly connected to the other side of the gas tank base, the ventilation pipes (12) at both ends of the raw material gas tank (1) are respectively arranged opposite to the fixed arm (112) and the movable arm (113), the gas tank base (111) is provided with a driving mechanism for driving the movable arm (113) to rotate and clamp the raw material gas tank, and the fixed arm and the movable arm are respectively provided with an air inlet channel (119) and a liquid inlet channel (120) that are connected to the relative ventilation pipes (12).

Images