Probe card detection method, device, equipment and storage medium in WAT test

Abstract

The present invention belongs to the field of semiconductor testing technology, and discloses a probe card detection method, device, equipment and storage medium in WAT testing. By establishing a remote connection between a remote control management platform and a wafer acceptance test WAT test device, and after the WAT test device is in a controllable state, a corresponding service and a corresponding service interface are called from the remote control management platform based on the started probe card operation process, an automatic operation script is generated based on an image taken by a machine camera through the service interface, and based on the automatic operation script, the probe card is controlled by an actuator of the WAT test device to perform a corresponding operation, the operation of the probe card is detected, the detection result is fed back to the remote control management platform, and a subsequent WAT test is performed after the detection result is verified to be qualified. Through the above method, the problems of frequent manual operation and reliance on professional technicians in traditional WAT testing are solved, the startup of the test process and the test efficiency are improved, and the accuracy of the test is ensured.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor testing technology, and in particular to a probe card detection method, device, equipment and storage medium in WAT testing. Background Art

[0002] With the rapid development of semiconductor technology, the requirements and precision of integrated circuit manufacturing processes are increasing. Therefore, it is particularly important to improve the production efficiency and product yield of the manufacturing process. In semiconductor manufacturing, WAT is a key step to test each manufactured wafer to ensure quality and performance. The main testing method is to directly replace the probe card to perform WAT testing on one or more test pads (PADs) formed on the wafer cutting knife between adjacent die. The probes on the probe card directly contact the pads on the wafer to generate electrical signals from the wafer, and then perform electrical testing.

[0003] Currently, before conducting WAT testing, professional operators are required to perform steps such as needle alignment, test needle insertion, and checking whether the needle trace obviously exceeds the PAD position and needle trace size. Due to the variety of probe card types, the differences in pad sizes of different processes, and the inconsistent depth of test needle insertion (overdrive, OD), this step usually requires experienced professional technicians to calibrate repeatedly before starting formal testing. Manually calibrating the probe needle and detecting the needle trace is a tedious task that usually takes a lot of time and human resources, affecting the test efficiency in high-volume semiconductor manufacturing environments.

[0004] The above contents are only used to assist in understanding the technical solution of the present invention and do not constitute an admission that the above contents are prior art. Summary of the invention

[0005] The main purpose of the present invention is to provide a probe card detection method, device, equipment and storage medium in WAT testing, aiming to solve the technical problem that the manual method adopted in the prior art consumes a lot of time and human resources, affecting the test efficiency.

[0006] To achieve the above object, the present invention provides a probe card detection method in WAT test, and the probe card detection method in WAT test comprises the following steps:

[0007] Establishing a remote connection between the remote control management platform and the wafer acceptance test WAT test equipment, and adjusting the WAT test equipment to a controllable state;

[0008] Calling corresponding services and corresponding service interfaces from the remote control management platform based on the initiated probe card operation process;

[0009] Acquire an image captured by a machine camera corresponding to the WAT test device, generate an automatic operation script based on the image captured by the machine camera through the service interface, and control the probe card to perform corresponding operations through the actuator of the WAT test device based on the automatic operation script;

[0010] The operation of the probe card is tested, the test results are fed back to the remote control management platform, and subsequent WAT tests are performed after the test results are verified to be qualified.

[0011] In some embodiments, the startup-based probe card operation process calls corresponding services and corresponding service interfaces from the remote control management platform, including:

[0012] After starting the alignment process of the probe card, the automatic alignment artificial intelligence-application programming interface AI-API service and the first API interface are called from the remote control management platform. The first API interface is used to identify the needle tip on the probe card and the center position of the alignment reference position area of ​​the machine interface.

[0013] In some embodiments, the acquiring of an image captured by a machine camera corresponding to the WAT test device, generating an automatic operation script based on the image captured by the machine camera through the service interface, and controlling the probe card to perform corresponding operations through an actuator of the WAT test device based on the automatic operation script, includes:

[0014] Acquire a needle alignment interface image captured by a machine camera corresponding to the WAT test device, and transmit the needle alignment interface image to the first API interface;

[0015] The region of interest (ROI) of the needle tip and the needle alignment reference position in the image is identified through the first API interface to calculate the center coordinates of the ROI region, an automatic operation script is generated according to the center coordinate information of the ROI region, and based on the automatic operation script, the probe card is controlled by the actuator of the WAT test equipment to perform the needle alignment operation so that the needle tip on the probe card is aligned up and down with the needle alignment reference position.

[0016] In some embodiments, the startup-based probe card operation process calls corresponding services and corresponding service interfaces from the remote control management platform, including:

[0017] After starting the probe card's needle insertion process, the PAD information detection AI-API service and the second API interface are called from the remote control management platform. The second API interface is used to identify the area coordinates, needle trace conditions, PAD center coordinates, needle center point coordinates, needle trace area and volume ratio of each pad PAD on the machine interface.

[0018] In some embodiments, the acquiring of an image captured by a machine camera corresponding to the WAT test device, generating an automatic operation script based on the image captured by the machine camera through the service interface, and controlling the probe card to perform corresponding operations through an actuator of the WAT test device based on the automatic operation script, includes:

[0019] Acquire the acupuncture interface image captured by the machine camera corresponding to the WAT test device, and transmit the acupuncture interface image to the second API interface;

[0020] PAD information is extracted from the needle insertion interface image through the second API interface to obtain the center coordinates of any PAD, an automatic operation script is generated according to the PAD center coordinates, and based on the automatic operation script, the probe card is controlled by the actuator of the WAT test equipment to perform the needle insertion operation so that the probe card is inserted at the corresponding PAD position.

[0021] In some embodiments, the method further comprises:

[0022] Start the needle trace detection process, and continue to call the PAD information detection AI-API service and the second API interface from the remote control management platform;

[0023] Acquire a needle trace inspection interface image captured by a machine camera corresponding to the WAT test device, and transmit the needle trace inspection interface image to the second API interface;

[0024] Performing a needle trace quality inspection based on the needle trace inspection interface image inspection through the second API interface, wherein the needle trace quality inspection at least includes detecting whether a needle trace exists and calculating the area of ​​the needle trace and the volume ratio of the needle trace;

[0025] The needle trace detection result is fed back to the remote control management platform, and a subsequent WAT test is performed after the needle trace detection result is verified to be qualified.

[0026] In some embodiments, the method further comprises:

[0027] If the needle trace detection result is verified to be unqualified, a corresponding alarm prompt is triggered, the needle insertion depth parameter is adjusted, and the needle insertion process of the probe card is restarted.

[0028] In addition, to achieve the above-mentioned purpose, the present invention further proposes a probe card detection device in WAT test, wherein the probe card detection system in WAT test is applied to the probe card detection method in WAT test as described above, and the probe card detection system in WAT test comprises:

[0029] A connection module, used to establish a remote connection between the remote control management platform and the wafer acceptance test WAT test equipment, and adjust the WAT test equipment to a controllable state;

[0030] A calling module, used to call corresponding services and corresponding service interfaces from the remote control management platform based on the started probe card operation process;

[0031] A control module, configured to obtain an image captured by a machine camera corresponding to the WAT test device, generate an automatic operation script based on the image captured by the machine camera through the service interface, and control the probe card to perform corresponding operations through an actuator of the WAT test device based on the automatic operation script;

[0032] The verification module is used to detect the operation of the probe card, feed back the detection result to the remote control management platform, and perform subsequent WAT test after the detection result is verified to be qualified.

[0033] In addition, to achieve the above-mentioned purpose, the present invention also proposes a probe card detection device in WAT test, wherein the probe card detection device in WAT test includes: a memory, a processor, and a probe card detection program in WAT test stored in the memory and executable on the processor, wherein the probe card detection program in WAT test is configured to implement the steps of the probe card detection method in WAT test as described above.

[0034] In addition, to achieve the above objectives, the present invention also proposes a storage medium, on which a probe card detection program in WAT test is stored, and when the probe card detection program in WAT test is executed by a processor, the steps of the probe card detection method in WAT test described above are implemented.

[0035] The present invention establishes a remote connection between the remote control management platform and the WAT test equipment, and after the WAT test equipment is in a controllable state, calls the corresponding service and the corresponding service interface from the remote control management platform based on the started probe card operation process, generates an automatic operation script based on the image taken by the machine camera through the service interface, and controls the probe card to perform corresponding operations through the actuator of the WAT test equipment based on the automatic operation script, detects the operation of the probe card, feeds back the detection result to the remote control management platform, and performs subsequent WAT tests after the detection result is verified to be qualified. Through the above method, the problems of frequent manual operation and dependence on professional technicians in traditional WAT tests are solved, the startup of the test process and the test efficiency are improved, and the accuracy of the test is ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] Figure 1 It is a flow chart of the first embodiment of the probe card detection method in WAT test of the present invention;

[0037] Figure 2 This is a diagram of the remote control management software architecture in the probe card detection method in the WAT test of the present invention;

[0038] Figure 3 A schematic diagram of the initial scene of the probe card detection method in the WAT test of the present invention;

[0039] Figure 4 It is a schematic diagram of the needle alignment completion scenario in the probe card detection method in the WAT test of the present invention;

[0040] Figure 5 It is a schematic diagram of the PAD detection scenario in the probe card detection method in the WAT test of the present invention;

[0041] Figure 6 It is a structural block diagram of the first embodiment of the probe card detection system in the WAT test of the present invention.

[0042] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0043] It should be understood that the specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention.

[0044] The embodiment of the present invention provides a probe card detection method in WAT test, referring to Figure 1 , Figure 1 It is a flow chart of a first embodiment of a probe card detection method in WAT testing of the present invention.

[0045] In this embodiment, the probe card detection method in the WAT test includes the following steps:

[0046] Step S10: Establish a remote connection between the remote control management platform and the wafer acceptance test WAT test equipment, and adjust the WAT test equipment to a controllable state.

[0047] In this embodiment, the execution subject of this embodiment is the probe card detection system in the wafer acceptance test (Wafer Acceptance Test, WAT) test, and the probe card detection system in the WAT test includes a remote control management (RCM) platform, an equipment machine, and a software platform client. The authorized personnel of the RCM software platform can operate the equipment machine through remote control, or automatically process the equipment machine information through code writing to replace manual operation. Specifically, the RCM platform uses the multi-computer switch KVM (Keyboard, Video, Mouse) technology to realize the local scheduling and monitoring of remote equipment machines, and realizes the local authorized user's simultaneous access to hundreds or more devices. The RCM software platform is divided into 3 services, namely automatic operation service, RCM service, and AI service. Among them, the RCM service is the core service, which is used to provide data interface for other modules in the RCM platform, including user interface, user interface, system report, historical report, grid monitoring, and remote operation function. AI service is a deep learning and machine learning algorithm service, which provides API interface to other modules in RCM software platform. Its algorithms include image classification, target detection, semantic segmentation, optical character detection and recognition algorithm, etc.; automatic operation service is a script execution program, which automatically operates the host computer through KVM technology, and feeds back the corresponding script execution information and alarm information to RCM service. The remote control management software architecture diagram is as follows: Figure 2 shown.

[0048] In the specific implementation, remote connection and preparation are required first. Specifically, in this embodiment, a remote connection is established between the remote control management platform and the WAT test equipment, and the WAT test equipment is adjusted to a controllable state. The controllable state means that the WAT test equipment can receive instructions to perform corresponding operations on the probe card.

[0049] Step S20: calling corresponding services and corresponding service interfaces from the remote control management platform based on the started probe card operation process.

[0050] For different operation processes, different calling services and corresponding interfaces are adopted in this embodiment. Specifically, with regard to the needle alignment operation process, the needle alignment operation process is started on the RCM software platform to prepare for the probe card needle alignment. In this embodiment, after starting the probe card needle alignment process, the automatic needle alignment AI-API service and the first API interface are called from the remote control management platform. The first API interface is used to identify the needle tip on the probe card and the center position of the needle alignment reference position area of ​​the machine interface. The first API interface is, for example, the "AutoCheckPin" API interface.

[0051] Regarding the acupuncture process, you need to initialize the acupuncture depth parameters first. When acupuncture is performed for the first time, set the test acupuncture depth (OD) to 0. Then, after starting the needle insertion process of the probe card, the PAD information detection AI-API service and the second API interface are called from the remote control management platform. The second API interface is used to identify the area coordinates, needle trace conditions, PAD center coordinates, needle center point coordinates, needle trace area and volume ratio of each PAD on the machine interface. The volume ratio is the ratio of the needle trace area to the PAD area. The second API interface is such as the "DetectPadInfo" API interface, and the PAD information is such as the pad information.

[0052] Step S30: Acquire an image captured by a machine camera corresponding to the WAT test device, generate an automatic operation script based on the image captured by the machine camera through the service interface, and control the probe card to perform corresponding operations through the actuator of the WAT test device based on the automatic operation script.

[0053] After completing the service call and the interface call, regarding the automatic needle alignment operation, in this embodiment, the needle alignment interface image taken by the machine camera corresponding to the WAT test device is obtained, and the needle alignment interface image is transmitted to the first API interface; the ROI area of ​​the needle tip and the needle alignment reference position in the image is identified through the first API interface to calculate the ROI area center coordinates, and an automatic operation script is generated according to the ROI area center coordinate information, and based on the automatic operation script, the probe card is controlled by the actuator of the WAT test device to perform the needle alignment operation, so that the needle tip on the probe card is aligned with the needle alignment reference position up and down. For example, the needle alignment scene Figure 3 As shown in the figure, for example, in the automatic needle alignment operation, the needle alignment interface image obtained in real time by the machine camera is transmitted to the API interface of the AI ​​service "AutoCheckPin" for processing. The API interface identifies the ROI area of ​​the needle tip and the needle alignment reference position in the image, and calculates the coordinates of the center of the area. The automatic operation script is written according to the ROI area center coordinate information to control the actuator on the test equipment to ensure that the needle tip on the probe card is aligned with the needle alignment reference position. The scene after the needle alignment is completed is as follows Figure 4 shown.

[0054] Regarding the needle-piercing operation, in this embodiment, the needle-piercing interface image captured by the machine camera corresponding to the WAT test device is obtained, and the needle-piercing interface image is transmitted to the second API interface; the PAD information is extracted from the needle-piercing interface image through the second API interface to obtain the center coordinates of any PAD, and an automatic operation script is generated according to the PAD center coordinates, and based on the automatic operation script, the probe card is controlled by the actuator of the WAT test device to perform the needle-piercing operation, so that the probe card is inserted in the corresponding PAD position. For example, in the automatic needle-piercing operation, the real-time needle-piercing interface image of the machine camera is obtained and transmitted to the "DetectPadInfo" API for processing. The API analyzes the image and extracts the PAD information, thereby obtaining the center coordinates of any PAD, and the automatic operation script is written according to the PAD center coordinates to control the actuator on the test device to ensure that the probe card is correctly inserted in the corresponding PAD position.

[0055] Step S40: Detect the operation of the probe card, feed back the detection result to the remote control management platform, and perform subsequent WAT test after the detection result is verified to be qualified.

[0056] It should be noted that, in this embodiment, the probe card is tested before the WAT test. If the probe card passes the test, the subsequent WAT test can be performed.

[0057] Specifically, after the automatic needle alignment operation is completed, the needle alignment result will be verified in this embodiment. If the needle tip is well aligned with the reference position, the subsequent WAT test process can continue; if the alignment is not good, the needle alignment operation needs to be repeated or manual intervention and adjustment need to be performed.

[0058] After the needle insertion operation is completed, in this embodiment, it is necessary to further start the needle trace detection process, and then continue to call the PAD information detection AI-API service and the second API interface from the remote control management platform; obtain the needle trace inspection interface image taken by the machine camera corresponding to the WAT test equipment, and transmit the needle trace inspection interface image to the second API interface; perform needle trace quality inspection based on the needle trace inspection interface image detection through the second API interface. If the needle trace detection result is verified to be unqualified, trigger the corresponding alarm prompt, adjust the needle trace depth parameters, and restart the needle trace process of the probe card. For example, the process of starting the needle trace detection operation on the RCM software platform is ready for needle trace evaluation. The PAD detection scenario is as follows: Figure 5As shown. The PAD information AI-API service call uses the "DetectPadInfo" API interface to process the stitch inspection interface image acquired by the machine camera in real time. The API analyzes the image and extracts information about each PAD area, including whether a stitch exists, the area of ​​the stitch, and the volume ratio of the stitch. Stitch quality verification determines whether the stitch meets the preset quality standards based on the data returned by the API. The stitch detection results are fed back to the RCM software platform. If it meets the requirements, the subsequent WAT test process will continue; if it does not meet the requirements, the corresponding alarm will be triggered and the preset OD parameter size will be executed, such as , that is, the acupuncture depth parameter is changed from 0 Adjust to , and repeat the above needle insertion process and needle trace detection process. By using the API interface of the AI-API service in the above way, you can customize the development of deep learning algorithms through different scenarios for different tasks to call. The automated operation achieved by KVM technology can support access to multiple devices, reduce manual intervention, and improve production efficiency. The automated process replaces manual repetitive operations and shortens the test preparation time. Through automated devices and remote control software systems, the problems of frequent manual operations and reliance on professional technicians in traditional WAT tests are solved, thereby improving the startup efficiency and consistency of the test, and ensuring the accuracy and reliability of the test.

[0059] This embodiment establishes a remote connection between the remote control management platform and the WAT test equipment, and after the WAT test equipment is in a controllable state, calls the corresponding service and the corresponding service interface from the remote control management platform based on the started probe card operation process, generates an automatic operation script based on the image taken by the machine camera through the service interface, and controls the probe card to perform corresponding operations through the actuator of the WAT test equipment based on the automatic operation script, detects the operation of the probe card, feeds back the detection result to the remote control management platform, and performs subsequent WAT tests after the detection result is verified to be qualified. Through the above method, the problems of frequent manual operation and reliance on professional technicians in traditional WAT testing are solved, the startup of the test process and the test efficiency are improved, and the accuracy of the test is ensured.

[0060] In addition, an embodiment of the present invention further proposes a storage medium on which a probe card detection program in a WAT ​​test is stored. When the probe card detection program in a WAT ​​test is executed by a processor, the steps of the probe card detection method in a WAT ​​test described above are implemented.

[0061] Reference Figure 6 , Figure 6 It is a structural block diagram of the first embodiment of the probe card detection system in the WAT test of the present invention.

[0062] like Figure 6 As shown, the probe card detection system in the WAT test proposed in the embodiment of the present invention includes:

[0063] The connection module 10 is used to establish a remote connection between the remote control management platform and the wafer acceptance test WAT test equipment, and adjust the WAT test equipment to a controllable state.

[0064] The calling module 20 is used to call corresponding services and corresponding service interfaces from the remote control management platform based on the started probe card operation process.

[0065] The control module 30 is used to obtain the image taken by the machine camera corresponding to the WAT test device, generate an automatic operation script based on the image taken by the machine camera through the service interface, and control the probe card to perform corresponding operations through the actuator of the WAT test device based on the automatic operation script.

[0066] The verification module 40 is used to detect the operation of the probe card, feed back the detection result to the remote control management platform, and perform subsequent WAT test after the detection result is verified to be qualified.

[0067] This embodiment establishes a remote connection between the remote control management platform and the WAT test equipment, and after the WAT test equipment is in a controllable state, calls the corresponding service and the corresponding service interface from the remote control management platform based on the started probe card operation process, generates an automatic operation script based on the image taken by the machine camera through the service interface, and controls the probe card to perform corresponding operations through the actuator of the WAT test equipment based on the automatic operation script, detects the operation of the probe card, feeds back the detection result to the remote control management platform, and performs subsequent WAT tests after the detection result is verified to be qualified. Through the above method, the problems of frequent manual operation and reliance on professional technicians in traditional WAT testing are solved, the startup of the test process and the test efficiency are improved, and the accuracy of the test is ensured.

[0068] In some embodiments, the calling module 20 is used to call the automatic alignment artificial intelligence-application programming interface AI-API service and the first API interface from the remote control management platform after starting the alignment process of the probe card. The first API interface is used to identify the needle tip on the probe card and the center position of the alignment reference position area of ​​the machine interface.

[0069] In some embodiments, the control module 30 is used to obtain a needle alignment interface image taken by a machine camera corresponding to the WAT test device, and transmit the needle alignment interface image to the first API interface; identify the region of interest ROI area of ​​the needle tip and the needle alignment reference position in the image through the first API interface to calculate the center coordinates of the ROI area, generate an automatic operation script according to the ROI area center coordinate information, and control the probe card to perform the needle alignment operation through the actuator of the WAT test device based on the automatic operation script, so that the needle tip on the probe card is aligned with the needle alignment reference position up and down.

[0070] In some embodiments, the calling module 20 is used to call the pad PAD information detection AI-API service and the second API interface from the remote control management platform after starting the probe card insertion process. The second API interface is used to identify the area coordinates, needle trace conditions, PAD center coordinates, needle center point coordinates, needle trace area and volume ratio of each PAD on the machine interface.

[0071] In some embodiments, the control module 30 is used to obtain the needle insertion interface image taken by the machine camera corresponding to the WAT testing device, and transmit the needle insertion interface image to the second API interface; extract PAD information from the needle insertion interface image through the second API interface to obtain any PAD center coordinates, generate an automatic operation script according to the PAD center coordinates, and control the probe card to perform the needle insertion operation through the actuator of the WAT testing device based on the automatic operation script, so that the probe card is inserted at the corresponding PAD position.

[0072] In some embodiments, the calling module 20 is used to start the needle trace detection process and continue to call the PAD information detection AI-API service and the second API interface from the remote control management platform;

[0073] The control module 30 is used to obtain a needle trace inspection interface image taken by a machine camera corresponding to the WAT test device, and transmit the needle trace inspection interface image to the second API interface; perform a needle trace quality inspection based on the needle trace inspection interface image detection through the second API interface, and the needle trace quality inspection at least includes detecting whether a needle trace exists and calculating the area of ​​the needle trace and the volume ratio of the needle trace; feed back the needle trace detection result to the remote control management platform, and perform a subsequent WAT test after the needle trace detection result is verified to be qualified.

[0074] In some embodiments, the verification module 40 is used to trigger a corresponding alarm prompt, adjust the needle insertion depth parameter, and restart the needle insertion process of the probe card if the needle trace detection result is verified to be unqualified.

[0075] An embodiment of the present application also provides a probe card detection device in a WAT ​​test, including a processor, a communication interface, a memory and a communication bus, wherein the processor, the communication interface and the memory communicate with each other through the communication bus, and the memory is used to store computer programs; the processor is used to implement the above-mentioned probe card detection method in the WAT test when executing the program stored in the memory.

[0076] The communication bus mentioned in the probe card detection equipment in the WAT test can be a Peripheral Component Interconnect (PCI) bus or an Extended Industry Standard Architecture (EISA) bus, etc. The communication bus can be divided into an address bus, a data bus, a control bus, etc.

[0077] The communication interface is used for communication between the probe card detection device and other devices in the above-mentioned WAT test.

[0078] The memory may include a random access memory (RAM) or a non-volatile memory (NVM), such as at least one disk memory. Optionally, the memory may also be at least one storage device located away from the aforementioned processor.

[0079] The above-mentioned processor can be a general-purpose processor, including a central processing unit (CPU), a network processor (NP), etc.; it can also be a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, and discrete hardware components.

[0080] In the above embodiments, it can be implemented in whole or in part by software, hardware, firmware or any combination thereof. When implemented using software, it can be implemented in whole or in part in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions may be transmitted from a website site, a computer, a server or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) mode to another website site, computer, server or data center. The computer-readable storage medium may be any available medium that a computer can access or a data storage device such as a server or a data center that includes one or more available media integrated. The available medium may be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid-state drive Solid State Disk (SSD)), etc.

[0081] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0082] Each embodiment in this specification is described in a related manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the partial description of the method embodiment.

[0083] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that the technical solutions described in the aforementioned embodiments may still be modified, or some of the technical features may be replaced by equivalents. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

[0084] It should be understood that the above is only an example and does not constitute any limitation on the technical solution of the present invention. In specific applications, technicians in this field can make settings as needed, and the present invention does not limit this.

[0085] It should be noted that the workflow described above is merely illustrative and does not limit the scope of protection of the present invention. In practical applications, technicians in this field can select part or all of them according to actual needs to achieve the purpose of the present embodiment, and no limitation is made here.

[0086] In addition, for technical details not fully described in this embodiment, reference can be made to the probe card detection method in the WAT test provided in any embodiment of the present invention, and will not be repeated here.

[0087] In addition, it should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or system. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or system including the element.

[0088] The serial numbers of the above embodiments of the present invention are only for description and do not represent the advantages or disadvantages of the embodiments.

[0089] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus a necessary general hardware platform, and of course by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art can be embodied in the form of a software product, which is stored in a storage medium (such as a read-only memory (ROM) / RAM, a magnetic disk, or an optical disk), and includes a number of instructions for a terminal device (which can be a mobile phone, a computer, a server, or a network device, etc.) to execute the methods described in each embodiment of the present invention.

[0090] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made using the contents of the present invention specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

[0091] It is understandable that the system provided by the embodiment of the present invention corresponds to the method provided by the embodiment of the present invention, and the explanation, examples and beneficial effects of the relevant contents can refer to the corresponding parts in the above method.

Claims

1. A probe card detection method in WAT testing, characterized in that: The probe card detection method in the WAT test includes: Establish a remote connection between the remote control management platform and the wafer acceptance test WAT test equipment, and adjust the WAT test equipment to a controllable state, wherein the remote control management platform realizes the local scheduling and monitoring of remote equipment and machines through the multi-computer switch KVM technology, and realizes the local authorized user's simultaneous access to hundreds or more devices. The RCM software platform is divided into three services, namely automatic operation service, RCM service, and AI service, wherein the RCM service is the core service, which is used to provide data interface for other modules in the RCM platform, including user interface, user interface, system report, historical report, grid monitoring, and remote operation function. The AI ​​service is a deep learning and machine learning algorithm service, which provides an API interface to other modules in the RCM software platform. Its algorithms include image classification, target detection, semantic segmentation, optical character detection and recognition algorithms, etc. The automatic operation service is a script execution program, which automatically operates the host computer through KVM technology, and feeds back the corresponding script execution information and alarm information to the RCM service; Based on the started probe card operation process, the corresponding service and the corresponding service interface are called from the remote control management platform, wherein the probe card needle matching process corresponds to the first API interface, and the probe card needle insertion process corresponds to the second API interface; Acquire an image captured by a machine camera corresponding to the WAT test device, generate an automatic operation script based on the image captured by the machine camera through the service interface, and control the probe card to perform corresponding operations through the actuator of the WAT test device based on the automatic operation script, wherein the automatic operation script generated based on the image captured by the machine camera through the service interface includes: identifying the region of interest ROI area of ​​the needle tip and the needle reference position in the image through the first API interface to calculate the center coordinates of the ROI area, and generating an automatic operation script according to the center coordinate information of the ROI area, or extracting PAD information from the acupuncture interface image through the second API interface to obtain the center coordinates of any PAD, and generating an automatic operation script according to the PAD center coordinates; The operation of the probe card is tested, the test results are fed back to the remote control management platform, and subsequent WAT tests are performed after the test results are verified to be qualified.

2. The probe card detection method in WAT test according to claim 1, characterized in that: The probe card operation process based on startup calls corresponding services and corresponding service interfaces from the remote control management platform, including: After starting the alignment process of the probe card, the automatic alignment artificial intelligence-application programming interface AI-API service and the first API interface are called from the remote control management platform. The first API interface is used to identify the needle tip on the probe card and the center position of the alignment reference position area of ​​the machine interface.

3. The probe card detection method in WAT test according to claim 2, characterized in that: The step of obtaining an image captured by a machine camera corresponding to the WAT test device, generating an automatic operation script based on the image captured by the machine camera through the service interface, and controlling the probe card to perform corresponding operations through an actuator of the WAT test device based on the automatic operation script includes: Acquire a needle alignment interface image captured by a machine camera corresponding to the WAT test device, and transmit the needle alignment interface image to the first API interface; The region of interest (ROI) of the needle tip and the needle alignment reference position in the image is identified through the first API interface to calculate the center coordinates of the ROI region, an automatic operation script is generated according to the center coordinate information of the ROI region, and based on the automatic operation script, the probe card is controlled by the actuator of the WAT test equipment to perform the needle alignment operation so that the needle tip on the probe card is aligned up and down with the needle alignment reference position.

4. The probe card detection method in WAT test according to claim 1, characterized in that: The probe card operation process based on startup calls corresponding services and corresponding service interfaces from the remote control management platform, including: After starting the probe card's needle insertion process, the PAD information detection AI-API service and the second API interface are called from the remote control management platform. The second API interface is used to identify the area coordinates, needle trace conditions, PAD center coordinates, needle center point coordinates, needle trace area and volume ratio of each pad PAD on the machine interface.

5. The probe card detection method in WAT test according to claim 4, characterized in that: The step of obtaining an image captured by a machine camera corresponding to the WAT test device, generating an automatic operation script based on the image captured by the machine camera through the service interface, and controlling the probe card to perform corresponding operations through an actuator of the WAT test device based on the automatic operation script includes: Acquire the acupuncture interface image captured by the machine camera corresponding to the WAT test device, and transmit the acupuncture interface image to the second API interface; PAD information is extracted from the needle insertion interface image through the second API interface to obtain the center coordinates of any PAD, an automatic operation script is generated according to the PAD center coordinates, and based on the automatic operation script, the probe card is controlled by the actuator of the WAT test equipment to perform the needle insertion operation so that the probe card is inserted at the corresponding PAD position.

6. The probe card detection method in WAT test according to claim 5, characterized in that: The method further comprises: Start the needle trace detection process, and continue to call the PAD information detection AI-API service and the second API interface from the remote control management platform; Acquire a needle trace inspection interface image captured by a machine camera corresponding to the WAT test device, and transmit the needle trace inspection interface image to the second API interface; Performing a needle trace quality inspection based on the needle trace inspection interface image inspection through the second API interface, wherein the needle trace quality inspection at least includes detecting whether a needle trace exists and calculating the area of ​​the needle trace and the volume ratio of the needle trace; The needle trace detection result is fed back to the remote control management platform, and a subsequent WAT test is performed after the needle trace detection result is verified to be qualified.

7. The probe card detection method in WAT test according to claim 6, characterized in that: The method further comprises: If the needle trace detection result is verified to be unqualified, a corresponding alarm prompt is triggered, the needle insertion depth parameter is adjusted, and the needle insertion process of the probe card is restarted.

8. A probe card detection system in WAT testing, characterized in that: The probe card detection system in WAT test is applied to the probe card detection method in WAT test according to any one of claims 1 to 7, and the probe card detection system in WAT test comprises: A connection module is used to establish a remote connection between the remote control management platform and the wafer acceptance test WAT test equipment, and adjust the WAT test equipment to a controllable state, wherein the remote control management platform realizes the local scheduling and monitoring of remote equipment and machines through the multi-computer switch KVM technology, and realizes the local authorized user's simultaneous access to hundreds or more devices. The RCM software platform is divided into three services, namely automatic operation service, RCM service, and AI service, wherein the RCM service is the core service, which is used to provide data interface for other modules in the RCM platform, including user interface, user interface, system report, historical report, grid monitoring, and remote operation function. The AI ​​service is a deep learning and machine learning algorithm service, which provides an API interface to other modules in the RCM software platform. Its algorithms include image classification, target detection, semantic segmentation, optical character detection and recognition algorithms, etc. The automatic operation service is a script execution program, which automatically operates the host computer through KVM technology, and feeds back the corresponding script execution information and alarm information to the RCM service; A calling module, used to call corresponding services and corresponding service interfaces from the remote control management platform based on the started probe card operation process, wherein the probe card needle matching process corresponds to the first API interface, and the probe card needle puncture process corresponds to the second API interface; A control module, for acquiring an image captured by a machine camera corresponding to the WAT test device, generating an automatic operation script based on the image captured by the machine camera through the service interface, and controlling the probe card to perform corresponding operations through the actuator of the WAT test device based on the automatic operation script, wherein the generating of the automatic operation script based on the image captured by the machine camera through the service interface comprises: identifying the region of interest (ROI) of the needle tip and the needle reference position in the image through the first API interface to calculate the center coordinates of the ROI region, generating an automatic operation script according to the center coordinate information of the ROI region, or extracting PAD information from the acupuncture interface image through the second API interface to obtain the center coordinates of any PAD, and generating an automatic operation script according to the center coordinates of the PAD; The verification module is used to detect the operation of the probe card, feed back the detection result to the remote control management platform, and perform subsequent WAT test after the detection result is verified to be qualified.

9. A probe card detection device in WAT testing, characterized in that: The probe card detection device in WAT test includes: a memory, a processor, and a probe card detection program in WAT test stored in the memory and executable on the processor, wherein the probe card detection program in WAT test is configured to implement the steps of the probe card detection method in WAT test as described in any one of claims 1 to 7.

10. A storage medium, characterized in that: The storage medium stores a probe card detection program in a WAT ​​test, and when the probe card detection program in a WAT ​​test is executed by a processor, the steps of the probe card detection method in a WAT ​​test according to any one of claims 1 to 7 are implemented.

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