The present invention belongs to the field of
semiconductor testing technology, and discloses a
probe card detection method, device, equipment and storage medium in WAT testing. By establishing a remote connection between a
remote control management platform and a
wafer acceptance test WAT test device, and after the WAT test device is in a controllable state, a corresponding service and a corresponding service interface are called from the
remote control management platform based on the started
probe card operation process, an automatic operation script is generated based on an image taken by a
machine camera through the service interface, and based on the automatic operation script, the
probe card is controlled by an
actuator of the WAT test device to perform a corresponding operation, the operation of the probe card is detected, the detection result is fed back to the
remote control management platform, and a subsequent WAT test is performed after the detection result is verified to be qualified. Through the above method, the problems of frequent manual operation and reliance on professional technicians in traditional WAT testing are solved, the startup of the test process and the
test efficiency are improved, and the accuracy of the test is ensured.