A Z-shaped spliced ​​target

Abstract

The invention relates to the technical field of target materials, in particular to a Z-shaped spliced ​​target material, comprising a base plate and an adjusting device symmetrically arranged on the upper end of the base plate, wherein a back target is fixedly connected to the proximal end of the adjusting device, the back target is hollow in structure, a plurality of target materials are spliced ​​on the side wall of the back target to form a target surface, the target material and the back target are connected by a locking device, and a traditional integrated target material is designed as a multi-piece splicable structure, and a single piece of target material is designed as a "Z" shape, and the splicing parts are pressed together, which is conducive to ensuring the reliability of the splicing, and the target material utilization rate is improved by replacing the position of the target material. In addition, a locking device that is easy to disassemble and assemble can be used between the target material and the back target, which is conducive to the displacement and replacement of the target material and improves the efficiency of the target material replacement.

Description

Technical Field

[0001] The invention relates to the technical field of target materials, in particular to a Z-shaped spliced ​​target material. Background Art

[0002] The target material is the target material for high-energy particle bombardment and is also one of the main materials for preparing thin films. It is mainly used in integrated circuits, flat panel displays, solar cells, and smart glass. Sputtering is one of the main technologies for preparing thin film materials. Its principle is to use the ions generated by the ion source to form a high-speed ion beam after vacuum acceleration, and then bombard the solid surface. The ions and the solid surface exchange kinetic energy, causing the atoms on the solid surface to leave the solid and deposit on the substrate surface. The bombarded solid is the sputtering target. The target material is a consumable. During use, as the material is continuously consumed, when it reaches a certain level, it needs to be replaced.

[0003] At present, most of the existing target materials are of one-piece design. During actual magnetron sputtering, the trajectory of the magnetic lines of force has a certain positionality, so that only a small area of ​​the entire target material is used. This not only reduces the utilization rate of the target material, but also increases the target material consumption, thereby leading to an increase in the target material cost. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides a Z-shaped spliced ​​target material, which designs the traditional one-piece target material into a multi-piece spliced ​​structure, and the single target material is designed into a "Z" shape, and the splicing parts are pressed together, which is beneficial to ensure the reliability of the splicing. By replacing the position of the target material, the utilization rate of the target material is improved. In addition, a locking device that is easy to disassemble and assemble can be used between the target material and the back target, which is beneficial to the displacement and replacement of the target material and improves the efficiency of the target material replacement.

[0005] The technical solution adopted by the present invention to solve the above technical problems is: a Z-shaped spliced ​​target material, comprising a bottom plate and an adjusting device symmetrically arranged on the upper end of the bottom plate, wherein the adjusting device is fixedly connected to a back target at the proximal end, the back target is a hollow structure, a plurality of target materials are spliced ​​on the side wall of the back target to form a target surface, and the target material and the back target are connected by a locking device;

[0006] The side wall of the back target close to the target material is evenly provided with slide grooves from top to bottom, the slide grooves are arranged in pairs, and a through groove is provided on the back target between each pair of slide grooves, and positioning holes are symmetrically provided in the slide grooves on the upper and lower sides of the through groove;

[0007] An extension rod is fixedly arranged at the middle of the side wall of the single target material near the back target, and the end of the extension rod away from the target material is fixedly connected with a clamping head, and the clamping head extends to the through-type groove, and positioning rods corresponding to the number of positioning holes are fixedly arranged on the side wall of the target material around the extension rod, and the end of the positioning rod away from the target material abuts against the positioning hole;

[0008] The target material has a "Z"-shaped cross section so that the two ends of the target material form a proximal face and a distal face from the back target. The proximal face of the target material and the distal face of the target material adjacent thereto in the horizontal direction are connected to form a transverse target face through a clamping assembly. The two adjacent target materials in the vertical direction are tightly attached to each other to form a vertical target face. The transverse target face and the vertical target face together constitute the target face.

[0009] Preferably, an arc-shaped slideway is symmetrically provided on the upper end surface of the bottom plate, and limiting holes are evenly provided at the bottom of the arc-shaped slideway along the arc direction.

[0010] Preferably, the adjustment device includes a sliding disk, which is slidably arranged at the bottom of the arc-shaped slideway, and symmetrically provided with insertion holes, in which pin rods are inserted, and the lower end of the pin rods extends into the limiting hole, and a threaded rod is fixedly connected to the upper end of the sliding disk, and a sliding cylinder is sleeved on the threaded rod, and the upper and lower sides of the sliding cylinder are symmetrically screwed with adjustment screw buckles for fixing the sliding cylinder, a cross bar is fixedly connected to the middle of the opposite side walls of the sliding cylinder, and the end of the cross bar away from the sliding cylinder is fixedly connected to a back target.

[0011] Preferably, there is a clearance fit between the slide cylinder and the threaded rod.

[0012] Preferably, a plurality of heat dissipation holes are provided on the side walls of the back target facing the adjustment device on both sides, and a threaded hole is provided on the side wall of the back target away from the target material and corresponding to the middle of the through groove.

[0013] Preferably, a sliding rod is symmetrically arranged at a position inside the back target opposite to the through groove, and the sliding rod is slidably connected to the locking device.

[0014] Preferably, the clamping assembly includes a proximal clamping plate, a proximal clamping plate is fixedly installed on the proximal surface, the end of the proximal clamping plate away from the proximal surface is fixedly connected to a rectangular bar, a clamping groove is opened in the middle of the rectangular bar, and a distal clamping plate is fixedly connected to the distal surface, the end of the distal clamping plate away from the distal surface is fixedly connected to an arc-shaped connecting part, the end of the arc-shaped connecting part is fixedly connected to a clamping column, and the clamping column is installed in the clamping groove.

[0015] Preferably, a magnet block is fixedly mounted on the side wall of each target material near the back target, and magnet blocks with opposite magnetic properties are arranged on the side walls of two adjacent targets.

[0016] Preferably, the locking device includes a T-shaped locking rod, which is arranged in the threaded hole, the end of the T-shaped locking rod located outside the back target is fixedly connected to the ear plate, a threaded section is provided in the middle of the T-shaped locking rod, the threaded section and the threaded hole are connected in a cooperative manner, and the end of the T-shaped locking rod located inside the back target is rotatably connected to a locking head, and the locking head and the sliding rod are slidably matched.

[0017] Preferably, the locking head includes a rubber segment, the end of the T-shaped locking rod located inside the back target is rotatably connected to the rubber segment, both ends of the rubber segment are fixedly connected to "L"-shaped locking plates, the "L"-shaped locking plates and the clamping head abut against each other, and a flexible layer is arranged between the two "L"-shaped locking plates, and the flexible layer is wrapped around the outside of the clamping head.

[0018] Beneficial effects of the present invention:

[0019] 1. By designing the traditional integrated target material into a multi-piece spliced ​​structure, and the single target material is designed into a "Z" shape, the joints are pressed together, which is conducive to ensuring the reliability and stability of the splicing, and can ensure the flatness of the target surface;

[0020] 2. By replacing the position of the target, when the target is close to its service life, the target is reassembled to ensure that a single target is not in its original position. In different combination modes, theoretically, if there are N single target splicing, there can be N splicing combinations. Due to the existence of the actual cross area, the target utilization rate will also be greatly improved, ensuring economic benefits;

[0021] 3. A bidirectional locking device is set up to lock and fix the spliced ​​target materials, ensuring the stability of the target surface during magnetron sputtering. When the target position needs to be changed, the locking device can quickly release the locking effect on the target material, thereby improving the timeliness of target replacement and further improving the efficiency of magnetron sputtering. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0023] Figure 1 is a first three-dimensional structural schematic diagram of the present invention;

[0024] Figure 2 is a second three-dimensional structural schematic diagram of the present invention;

[0025] Figure 3 It is a schematic diagram of the front three-dimensional connection structure of the back target in the present invention;

[0026] Figure 4 It is a schematic diagram of the back three-dimensional connection structure of the back target in the present invention;

[0027] Figure 5 It is a schematic diagram of the three-dimensional connection structure between the back target and the target material in the present invention;

[0028] Figure 6 The present invention Figure 5 A top view of

[0029] Figure 7 It is a schematic diagram of the three-dimensional connection structure of a single target material in the present invention;

[0030] Figure 8 The present invention Figure 5 A schematic diagram of a cross-sectional three-dimensional structure;

[0031] Fig. 9 The present invention Figure 8 A schematic diagram of the enlarged structure at point A;

[0032] Fig.10 The present invention Figure 8 Schematic diagram of the enlarged structure at B.

[0033] In the figure:

[0034] 1. Bottom plate; 11. Arc slideway; 12. Limiting hole;

[0035] 2. Adjustment device; 21. Sliding plate; 22. Pin rod; 23. Threaded rod; 24. Adjustment screw buckle; 25. Sliding cylinder; 26. Crossbar;

[0036] 3. Back target; 31. Slide groove; 32. Through groove; 33. Positioning hole; 34. Heat dissipation hole; 35. Threaded hole; 36. Slide rod;

[0037] 4. target material; 41. extension rod; 42. chuck; 43. positioning rod; 44. proximal end surface; 45. distal end surface;

[0038] 46, snap-on assembly; 461, proximal snap-on plate; 462, rectangular strip; 463, snap-on groove; 464, distal snap-on plate; 465, arc-shaped connecting portion; 466, snap-on column;

[0039] 47. Magnet block;

[0040] 5. Locking device; 51. T-shaped locking rod; 52. Ear plate; 53. Threaded section; 54. Locking head; 541. Rubber section; 542. "L"-shaped locking plate; 543. Flexible layer. DETAILED DESCRIPTION

[0041] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further explained below in conjunction with specific implementation methods.

[0042] Embodiment 1:

[0043] See also Figure 1 to Figure 2 A Z-shaped spliced ​​target material comprises a bottom plate 1 and an adjusting device 2 symmetrically arranged on the upper end of the bottom plate 1, wherein the adjusting device 2 is fixedly connected to a back target 3 at the proximal end thereof, the back target 3 is a hollow structure, a plurality of target materials 4 are spliced ​​on the side wall of the back target 3 to form a target surface, and the target material 4 and the back target 3 are connected by a locking device 5;

[0044] The upper end surface of the bottom plate 1 is symmetrically provided with an arc-shaped slideway 11 , and the bottom of the arc-shaped slideway 11 is evenly provided with limiting holes 12 along the arc direction thereof.

[0045] The adjusting device 2 comprises a sliding disk 21, which is slidably arranged at the bottom of the arc-shaped slideway 11, and symmetrically provided with insertion holes, in which a pin rod 22 is inserted, and the lower end of the pin rod 22 extends into the limiting hole 12, and a threaded rod 23 is fixedly connected to the upper end of the sliding disk 21, and a slide cylinder 25 is sleeved on the threaded rod 23, and the slide cylinder 25 has symmetrical upper and lower sides screwed with adjusting screw buckles 24 for fixing the slide cylinder 25, and a cross bar 26 is fixedly connected to the middle of the side wall opposite to the slide cylinder 25, and the end of the cross bar 26 away from the slide cylinder 25 is fixedly connected to the back target 3, and the slide cylinder 25 and the threaded rod 23 are clearance-fitted.

[0046] In specific operation, before magnetron sputtering, the position of the target surface is determined by manually rotating the position of the sliding disk 21 so that the target surface faces the ion emitter, and then the adjusting screw 24 is rotated to drive the slide 25, the cross bar 26, the back target 3 and the target material 4 to move up and down, so that the middle of the target surface and the ion emitter are at the same level.

[0047] Embodiment 2:

[0048] The technical solution is basically the same as that of the first embodiment, see Figures 1 to 10 The difference is that: the side wall of the back target 3 close to the target material 4 is evenly provided with slide grooves 31 from top to bottom, the slide grooves 31 are arranged in pairs and a through groove 32 is provided on the back target 3 between each pair of slide grooves 31, and positioning holes 33 are symmetrically provided in the slide grooves 31 on the upper and lower sides of the through groove 32, and a number of heat dissipation holes 34 are provided on the side walls of the back target 3 facing the adjustment device 2 on both sides, and threaded holes 35 are provided on the side wall of the back target 3 away from the target material 4 and corresponding to the middle of the through groove 32, and sliding rods 36 are symmetrically provided at the positions of the back target 3 facing the through groove 32, and the sliding rods 36 are slidably connected to the locking device 5.

[0049] An extension rod 41 is fixedly provided on the middle part of the side wall of the single target material 4 near the back target 3, and the end of the extension rod 41 away from the target material 4 is fixedly connected with a clamping head 42, and the clamping head 42 extends to the through groove 32. Positioning rods 43 corresponding to the number of positioning holes 33 are fixedly provided on the side wall of the target material 4 around the extension rod 41, and the end of the positioning rod 43 away from the target material 4 abuts against the positioning hole 33.

[0050] The cross section of the target material 4 is in a "Z" shape so that the two ends of the target material 4 form a proximal surface 44 and a distal surface 45 from the back target 3. In the horizontal direction, the proximal surface 44 of the target material 4 and the distal surface 45 of the target material 4 adjacent thereto are connected to form a transverse target surface through a clamping assembly 46. In the vertical direction, two adjacent target materials 4 are tightly attached to each other to form a vertical target surface. The transverse target surface and the vertical target surface together constitute the target surface.

[0051] The clamping assembly 46 includes a proximal clamping plate 461, which is fixedly installed on the proximal surface 44, and the end of the proximal clamping plate 461 away from the proximal surface 44 is fixedly connected to a rectangular strip 462, and a clamping groove 463 is opened in the middle of the rectangular strip 462, and a distal clamping plate 464 is fixedly connected to the distal surface 45, and the end of the distal clamping plate 464 away from the distal surface 45 is fixedly connected to an arc-shaped connecting portion 465, and the end of the arc-shaped connecting portion 465 is fixedly connected to a clamping column 466, and the clamping column 466 is installed in the clamping groove 463.

[0052] A magnet block 47 is fixedly mounted on the side wall of each target material 4 near the back target 3 , and magnet blocks 47 with opposite magnetic properties are arranged on the adjacent side walls of two adjacent target materials 4 .

[0053] During the specific operation, two target materials 4 are first placed alternately up and down manually so that the proximal end surface 44 of one target material 4 is parallel to the distal end surface 45 of the other target material 4, and then the two target materials 4 are moved horizontally so that the clamping column 466 and the clamping groove 463 are aligned, and then the two target materials 4 are pushed up and down so that the clamping column 466 moves into the clamping groove 463, and finally the upper and lower end surfaces of the two target materials 4 are at the same height, and the target surfaces of the two target materials 4 are also in the same vertical plane, thereby completing the splicing between the two target materials 4, and then the required target materials 4 are spliced ​​together according to the above method to form a complete target surface, until the required target surface is larger than the area formed by the required sputtering trajectory;

[0054] After the above steps are completed, the positioning rod 43 of the entire target material 4 is inserted into the slide groove 31 and moved horizontally along the slide groove 31 to a suitable position. At this time, the positioning rod 43 will be aligned with the positioning hole 33. The entire target material 4 is gently pressed toward the back of the target 3 manually to insert the positioning rod 43 into the corresponding positioning hole 33. The magnet blocks 47 between the two target materials 4 will attract each other, so that the left and right target materials 4 fit tightly together.

[0055] Embodiment three:

[0056] The technical solution is basically the same as that of the first embodiment, see Figure 2 , Figure 6 , Figure 8 and Fig.10The difference is that: the locking device 5 includes a T-shaped locking rod 51, the T-shaped locking rod 51 is penetrated in the threaded hole 35, the end of the T-shaped locking rod 51 located outside the back target 3 is fixedly connected with an ear plate 52, a threaded section 53 is opened in the middle of the T-shaped locking rod 51, the threaded section 53 is connected with the threaded hole 35, and the end of the T-shaped locking rod 51 located inside the back target 3 is rotatably connected with a locking head 54, and the locking head 54 and the sliding rod 36 are slidably matched.

[0057] The locking head 54 includes a rubber segment 541. The end of the T-shaped locking rod 51 located inside the back target 3 is rotatably connected to the rubber segment 541. Both ends of the rubber segment 541 are fixedly connected to "L"-shaped locking plates 542. The "L"-shaped locking plates 542 and the clamping head 42 abut against each other. A flexible layer 543 is arranged between the two "L"-shaped locking plates 542, and the flexible layer 543 is wrapped around the outside of the clamping head 42.

[0058] During specific operation, after the positioning rod 43 is inserted into the corresponding positioning hole 33, the ear plate 52 and the T-shaped locking rod 51 are manually rotated forward. Due to the existence of the sliding rod 36, the sliding rod 36 will provide a certain support force to the locking head 54 and limit it at the same time, so the locking head 54 will not rotate. At this time, the T-shaped locking rod 51 rotates and drives the locking head 54 to move toward the target material 4. Finally, the clamping head 42 will move to the inside of the "L"-shaped locking plate 542 and squeeze the flexible layer 543. At this time, the flexible layer 543 continuously covers both sides of the clamping head 42, and the squeezing force will make the "L"-shaped locking plates on both sides The end of 542 away from the rubber segment 541 approaches the clamping head 42 and contacts the extension rod 41. At this time, the ear plate 52 and the T-locking rod 51 are rotated in the opposite direction. At this time, the T-locking rod 51 will move in the direction away from the target material 4. At the same time, the T-locking rod 51 will pull the rubber segment 541 and cause it to deform away from the target material 4. The deformation will drive the "L"-shaped locking plate 542 to slide relative to the extension rod 41. Finally, the "L"-shaped locking plate 542 abuts against both sides of the clamping head 42, and cooperates with the reaction force of the flexible layer 543 to achieve the purpose of locking and fixing the target material 4. At this point, the installation process of the target material 4 is completed.

[0059] The working principle of the present invention when in use:

[0060] One: First, manually place two target materials 4 in an alternating manner up and down, so that the proximal end surface 44 of one target material 4 is parallel to the distal end surface 45 of the other target material 4, then move the two target materials 4 horizontally to align the clamping column 466 with the clamping groove 463, and then push the two target materials 4 up and down to move the clamping column 466 into the clamping groove 463, and finally the upper and lower end surfaces of the two target materials 4 are at the same height, and the target surfaces of the two target materials 4 are also in the same vertical plane, thereby completing the splicing between the two target materials 4, and then splicing the required target materials 4 according to the above method to form a complete target surface, until the required target surface is larger than the area formed by the required sputtering trajectory;

[0061] 2. After the above step 1 is completed, the positioning rod 43 of the entire target material 4 is inserted into the slide groove 31 and moved horizontally along the slide groove 31 to a suitable position. At this time, the positioning rod 43 will be aligned with the positioning hole 33. The entire target material 4 is gently pressed toward the back of the target 3 manually to insert the positioning rod 43 into the corresponding positioning hole 33. The magnet blocks 47 between the two target materials 4 will attract each other, so that the left and right target materials 4 are tightly fitted.

[0062] 3. When the positioning rod 43 is inserted into the corresponding positioning hole 33, the ear plate 52 and the T-shaped locking rod 51 are first rotated forward manually. Due to the existence of the sliding rod 36, the sliding rod 36 will provide a certain support force to the locking head 54 and limit it at the same time, so the locking head 54 will not rotate. At this time, the T-shaped locking rod 51 rotates and drives the locking head 54 to move toward the target material 4. Finally, the clamping head 42 will move to the inside of the "L"-shaped locking plate 542 and squeeze the flexible layer 543. At this time, the flexible layer 543 continuously covers both sides of the clamping head 42. At the same time, the squeezing force will make the "L"-shaped locking plates 542 on both sides move away from the end of the rubber segment 541. The clamping head 42 approaches and contacts the extension rod 41, and the ear plate 52 and the T-shaped locking rod 51 are rotated in the opposite direction. At this time, the T-shaped locking rod 51 will move in the direction away from the target material 4. At the same time, the T-shaped locking rod 51 will pull the rubber segment 541 and deform it away from the target material 4. The deformation will drive the "L"-shaped locking plate 542 to slide relative to the extension rod 41. Finally, the "L"-shaped locking plate 542 abuts against both sides of the clamping head 42, and cooperates with the reaction force of the flexible layer 543 to achieve the purpose of locking and fixing the target material 4. According to the above steps, each locking device 5 and the corresponding clamping head 42 are locked in turn, thereby completing the installation process of the target material 4;

[0063] Fourth: The position of the target surface is determined by manually rotating the position of the sliding plate 21 so that the target surface faces the ion emitter, and then the adjusting screw 24 is rotated to drive the slide 25, the cross bar 26, the back target 3 and the target material 4 to move up and down, so that the middle of the target surface and the ion emitter are at the same level, and then the ion emitter is started to complete magnetron sputtering;

[0064] Five: When the target surface of the target material 4 is consumed to a certain extent and needs to be replaced, the ear plate 52 and the T-shaped locking rod 51 are manually rotated forward, and the locking device 5 will release the locking effect on the chuck 42. The targets 4 can be manually removed and rearranged, and then installed according to the above steps to perform magnetron sputtering again.

[0065] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A Z-shaped spliced ​​target, comprising a base plate (1) and an adjustment device (2) symmetrically arranged on the upper end of the base plate (1), characterized in that: The proximal end of the adjusting device (2) is fixedly connected to a back target (3), the back target (3) is a hollow structure, a plurality of target materials (4) are spliced ​​on the side wall of the back target (3) to form a target surface, and the target material (4) and the back target (3) are connected via a locking device (5); The side wall of the back target (3) close to the target material (4) is evenly provided with slide grooves (31) from top to bottom, the slide grooves (31) are arranged in pairs, and a through groove (32) is provided on the back target (3) between each pair of slide grooves (31), and positioning holes (33) are symmetrically provided in the slide grooves (31) on the upper and lower sides of the through groove (32); An extension rod (41) is fixedly arranged at the middle of the side wall of the single target material (4) close to the back target (3); the end of the extension rod (41) away from the target material (4) is fixedly connected to a clamping head (42); the clamping head (42) extends to the through-type groove (32); and positioning rods (43) corresponding to the number of positioning holes (33) are fixedly arranged on the side wall of the target material (4) around the extension rod (41); the end of the positioning rod (43) away from the target material (4) abuts against the positioning hole (33); A sliding rod (36) is symmetrically arranged at a position inside the back target (3) directly opposite to the through groove (32), and the sliding rod (36) is slidably connected to the locking device (5); The locking device (5) comprises a T-shaped locking rod (51), the threaded hole (35) is penetrated by the T-shaped locking rod (51), the end of the T-shaped locking rod (51) located outside the back target (3) is fixedly connected to the ear plate (52), the middle of the T-shaped locking rod (51) is provided with a threaded section (53), the threaded section (53) and the threaded hole (35) are connected in a mating manner, the end of the T-shaped locking rod (51) located inside the back target (3) is rotatably connected to a locking head (54), and the locking head (54) and the sliding rod (36) are slidably matched; The target material (4) has a "Z"-shaped cross section so that two ends of the target material (4) form a proximal surface (44) and a distal surface (45) from the back target (3); the proximal surface (44) of the target material (4) and the distal surface (45) of the target material (4) adjacent thereto are connected in the horizontal direction by a clamping assembly (46) to form a transverse target surface; two adjacent target materials (4) in the vertical direction are closely attached to each other to form a vertical target surface; the transverse target surface and the vertical target surface together constitute the target surface; The clamping assembly (46) comprises a proximal clamping plate (461), the proximal clamping plate (461) being fixedly mounted on the proximal surface (44), the end of the proximal clamping plate (461) away from the proximal surface (44) being fixedly connected to a rectangular strip (462), a clamping groove (463) being provided in the middle of the rectangular strip (462), the distal surface (45) being fixedly connected to a distal clamping plate (464), the end of the distal clamping plate (464) away from the distal surface (45) being fixedly connected to an arc-shaped connecting portion (465), the end of the arc-shaped connecting portion (465) being fixedly connected to a clamping column (466), and the clamping column (466) being mounted in the clamping groove (463).

2. A Z-shaped spliced ​​target according to claim 1, characterized in that: The upper end surface of the bottom plate (1) is symmetrically provided with an arc-shaped slideway (11), and the bottom of the arc-shaped slideway (11) is evenly provided with limiting holes (12) along the arc direction thereof.

3. The Z-shaped spliced ​​target according to claim 2, characterized in that: The adjusting device (2) comprises a sliding plate (21), the sliding plate (21) is slidably arranged at the bottom of the arc-shaped slideway (11), the sliding plate (21) is symmetrically provided with insertion holes, a pin rod (22) is inserted into the insertion hole and the lower end of the pin rod (22) extends into the limiting hole (12), a threaded rod (23) is fixedly connected to the upper end of the sliding plate (21), a sliding cylinder (25) is sleeved on the threaded rod (23), and the sliding cylinder (25) is symmetrically screwed with adjustment screw buckles (24) for fixing the sliding cylinder (25) on the upper and lower sides, a cross bar (26) is fixedly connected to the middle of the side walls opposite to the sliding cylinder (25), and the end of the cross bar (26) away from the sliding cylinder (25) is fixedly connected to the back target (3).

4. The Z-shaped spliced ​​target according to claim 3, characterized in that: There is a clearance fit between the slide cylinder (25) and the threaded rod (23).

5. The Z-shaped spliced ​​target according to claim 1, characterized in that: A plurality of heat dissipation holes (34) are provided on the side walls of the back target (3) facing the adjustment device (2) on both sides, and a threaded hole (35) is provided on the side wall of the back target (3) away from the target material (4) and corresponding to the middle of the through groove (32).

6. The Z-shaped spliced ​​target according to claim 1, characterized in that: A magnet block (47) is fixedly mounted on the side wall of each target material (4) near the back target (3), and magnet blocks (47) with opposite magnetic properties are arranged on the adjacent side walls of two adjacent target materials (4).

7. The Z-shaped spliced ​​target according to claim 6, characterized in that: The locking head (54) comprises a rubber segment (541), the end of the T-shaped locking rod (51) located inside the back target (3) is rotatably connected to the rubber segment (541), both ends of the rubber segment (541) are fixedly connected to "L"-shaped locking plates (542), the "L"-shaped locking plates (542) and the clamping head (42) are in contact with each other, a flexible layer (543) is provided between the two "L"-shaped locking plates (542), and the flexible layer (543) is wrapped around the outside of the clamping head (42).

Images