An adaptive test quality charge control method and device

Abstract

The present invention discloses an adaptive test mass charge control method and device, wherein an excitation voltage is applied to parallel metal plates in the horizontal direction, a displacement signal is measured and converted into a voltage signal; a control torque and a feedback voltage are calculated according to the voltage signal; the feedback voltage is applied to the parallel metal plates in the horizontal direction, and the test mass is controlled at a balanced position; the estimated value of the charge and the charge of the test mass are subtracted to obtain a charge error value; the feedforward gain coefficient and the feedback gain coefficient required for the charge control are then calculated, and the charge and discharge rate is calculated again; according to the charge and discharge rate, an ultraviolet light irradiation module is driven, and a bias voltage is applied to the parallel metal plates on both sides in the vertical direction, and the charge of the test mass is controlled to 0. The present invention can realize the adaptive charge control of the test mass without measuring the charge and discharge physical characteristics of the test mass, and can provide good charge closed-loop control and robustness.

Description

Technical Field

[0001] The present invention belongs to the field of high-precision inertial sensors, and in particular relates to an adaptive proof mass charge control method and device. Background Art

[0002] In the field of high-precision inertial sensors, such as gravitational wave detection, in the direction of the non-sensitive axis, the displacement measurement module of the inertial sensor detects the relative displacement between the test mass (TM) and the satellite, and transmits the displacement change to the motion control module, applies feedback voltage to the corresponding plates around the test mass, and thus controls the test mass at the center of the inertial sensor. Therefore, it is possible to measure the non-conservative force acceleration caused by atmospheric drag, solar radiation pressure, and tidal force on the satellite during its in-orbit operation. In the direction of the sensitive axis of detection, the displacement measurement module of the inertial sensor detects the relative displacement between the test mass and the satellite with extremely high sensitivity, and transmits the displacement change to the satellite as a thruster, applying thrust to the spacecraft, so that the relative position between the test mass and the satellite remains unchanged, thereby achieving the satellite's follow-up movement of the test mass. At this time, the test mass block serves as an inertial reference for laser interferometry measurement, and gravitational waves are detected by measuring the change in displacement between the two.

[0003] However, high-energy particles and cosmic rays in space will cause the test mass to gradually accumulate charge, generating electrostatic forces with surrounding conductors and interfering with the measurement results. Therefore, the charge on the test mass needs to be controlled. Taking the charge management scheme used in LISA Pathfinder as an example, the process is to illuminate the test mass or the plate, and the photoelectric effect causes electrons to enter or escape from the sensitive probe, so that the surface charge quickly drops below the expected level. Because the space environment is disturbed and the physical properties of charging and discharging of metal conductors change over time, this scheme requires precise measurement of the charge of the conductor before implementing illumination, which poses a huge challenge to practical applications. Summary of the invention

[0004] The purpose of the present invention is to provide an adaptive test quality charge control method and device to address the deficiencies of the prior art.

[0005] The object of the present invention is achieved by the following technical solutions: an adaptive proof mass charge control device, the device comprising parallel metal plates, an ultraviolet light irradiation module, a displacement sensor, a motion control module, a charge measurement module, a reference model module, an adaptive control module, an electrostatic actuator and a charge actuator;

[0006] The parallel metal plates are placed in the horizontal and vertical directions of the inspection mass, parallel to the surface of the inspection mass, all parallel metal plates are parallel to the inspection mass and are at equal distances, the number of parallel metal plates placed on both sides of the inspection mass in the horizontal direction is the same, and the number of parallel metal plates placed on both sides of the inspection mass in the vertical direction is the same;

[0007] The output end of the parallel metal plates in the horizontal direction is connected to the displacement sensor; the output of the displacement sensor is connected to the motion control module; the output end of the motion control module is respectively connected to the charge measurement module and the electrostatic actuator; the output end of the electrostatic actuator is connected to the parallel metal plates in the horizontal direction; the output end of the charge measurement module is connected to the adaptive control module; the output end of the reference model module is connected to the adaptive control module; the output end of the adaptive control module is connected to the charge actuator; the charge actuator is connected to the ultraviolet light irradiation module.

[0008] Furthermore, the parallel metal plates in the horizontal direction are used to receive an excitation voltage, so that the inspection mass rotates, and the excitation voltages applied to the adjacent parallel metal plates on the same side are equal in magnitude and opposite in direction;

[0009] The vertically parallel metal plates are used to apply a bias voltage;

[0010] The ultraviolet irradiation module includes a first ultraviolet irradiation submodule and a second ultraviolet irradiation submodule;

[0011] The displacement sensor is used to measure the displacement of the inspection mass relative to the parallel metal plate in the horizontal direction, and convert the displacement into a voltage signal and transmit it to the motion control module;

[0012] The motion control module is used to receive the voltage signal and calculate the control torque and feedback voltage required to control the inspection mass at the equilibrium position;

[0013] The electrostatic actuator applies the calculated feedback voltage to all parallel metal plates in the horizontal direction;

[0014] The reference model module calculates an estimated value of the charge of the test mass according to an ideal charge and discharge model of the test mass and inputs the estimated value into the adaptive control module;

[0015] The charge measurement module receives the control torque, calculates the charge of the test mass through the control torque according to the sinusoidal demodulation algorithm, and inputs the charge to the adaptive control module;

[0016] The adaptive control module subtracts the estimated value of the received charge from the charge of the inspection mass to obtain a charge error value; then, based on the charge error value, the feedforward gain coefficient and the feedback gain coefficient required for charge control are calculated, and based on the on-track charge and discharge model, the charge and discharge rate required to control the charge to zero is calculated;

[0017] The charge actuator receives the charge and discharge rate, drives the first ultraviolet irradiation submodule to emit ultraviolet light to the surface of the inspection mass opposite to the parallel metal plates on one side of the vertical direction, or drives the second ultraviolet irradiation submodule to emit ultraviolet light to the surface of the parallel metal plates on the one side of the vertical direction opposite to the inspection mass, and applies bias voltages of the same magnitude and opposite direction to the parallel metal plates on both sides of the vertical direction, respectively, to control the charge of the inspection mass to 0.

[0018] Furthermore, the central wavelengths of the ultraviolet rays emitted by the first ultraviolet irradiation submodule and the second ultraviolet irradiation submodule are both 250 nm.

[0019] Furthermore, the number of the parallel metal plates is 6, including 4 parallel metal plates in the horizontal direction and 2 parallel metal plates in the vertical direction;

[0020] The four parallel metal plates in the horizontal direction are respectively a first parallel metal plate, a second parallel metal plate, a third parallel metal plate and a fourth parallel metal plate; the first parallel metal plate and the third parallel metal plate are located on one side of the horizontal direction of the inspection mass, and the second parallel metal plate and the fourth parallel metal plate are located on the other side of the horizontal direction of the inspection mass; the first parallel metal plate is directly parallel to the second parallel metal plate; the third parallel metal plate is directly parallel to the fourth parallel metal plate;

[0021] The two vertical parallel metal plates are respectively the fifth parallel metal plate and the sixth parallel metal plate; the fifth parallel metal plate is located on one side of the vertical direction of the inspection mass, and the sixth parallel metal plate is located on the other side of the vertical direction of the inspection mass; the fifth parallel metal plate is directly parallel to the sixth parallel metal plate.

[0022] The present invention also provides an adaptive test quality charge control method, which is applied to the above-mentioned adaptive test quality charge control device, and comprises the following steps:

[0023] Parallel metal plates are placed in the horizontal direction and the vertical direction of the inspection mass, respectively, wherein all the parallel metal plates are parallel to the inspection mass and are at equal distances, the number of parallel metal plates placed on both sides of the horizontal direction of the inspection mass is the same, and the number of parallel metal plates placed on both sides of the vertical direction of the inspection mass is the same;

[0024] Applying excitation voltages of the same magnitude to all parallel metal plates in the horizontal direction of the test mass respectively, so that the test mass rotates, measuring the displacement signal generated by the deviation of the test mass from the equilibrium position by the displacement sensor, and converting the displacement signal into a voltage signal;

[0025] The motion control module calculates the control torque and the corresponding feedback voltage required to control the inspection mass at the equilibrium position according to the voltage signal;

[0026] Then, the electrostatic actuator applies the feedback voltage to all parallel metal plates in the horizontal direction respectively, so that the electrostatic force generated between all parallel metal plates in the horizontal direction and the inspection mass controls the inspection mass in a balanced position;

[0027] The reference model module calculates an estimated value of the charge of the test mass according to an ideal charge and discharge model of the test mass; the charge measurement module calculates the charge of the test mass by controlling the torque according to a sinusoidal demodulation algorithm;

[0028] Then, the adaptive control module subtracts the estimated value of the charge from the charge of the inspection mass to obtain a charge error value; then, based on the charge error value, the feedforward gain coefficient and the feedback gain coefficient required for charge control are calculated, and based on the on-track charge and discharge model, the charge and discharge rate required to control the charge to zero is calculated;

[0029] Finally, the charge actuator drives the ultraviolet light irradiation module to emit ultraviolet light to irradiate the inspection mass or the parallel metal plates on one side in the vertical direction according to the charge and discharge rate, and applies bias voltages of the same magnitude and opposite direction to the parallel metal plates on both sides in the vertical direction, respectively, to control the charge of the inspection mass to 0.

[0030] Furthermore, the method of calculating the charge of the test mass by controlling the torque according to the sinusoidal demodulation algorithm specifically includes the following sub-steps:

[0031] (a.1) According to the multiplication of the control torque and the sine wave signal, the first multiplied signal is obtained ;

[0032] The control torque is ,in, It represents the magnitude of the control torque to which the test mass is subjected, is the angular frequency, is the frequency applied to the excitation voltage;

[0033] The first multiplied signal for ,in, is the noise term, is the amplitude of the sine wave signal, is the phase of the sine wave signal;

[0034] (a.2) The signal after the first multiplication Input into the low-pass filter to filter out the high-frequency signal and obtain the first filtered signal ; The first filtered signal for ;

[0035] (a.3) Change the phase of the sine wave signal by 90° and multiply it by the control torque to obtain the second multiplied signal ; The second multiplied signal for ;

[0036] (a.4) The second multiplied signal Input into the low-pass filter to filter out the high-frequency signal and obtain the second filtered signal ; The second filtered signal for ;

[0037] (a.5) The first filtered signal and the second filtered signal Substitute the charge calculation formula of the test mass into the charge calculation formula of the test mass and calculate the charge of the test mass ;

[0038] The test mass charge calculation formula is: ,in, It is the capacitance between the horizontal parallel metal plates and the test mass when the test mass is in the equilibrium position; is the distance between the center of the first parallel metal plate and the center of the third parallel metal plate; is the distance between the first parallel metal plate and the test mass when the test mass is in the equilibrium position; is the amplitude of the excitation voltage.

[0039] Furthermore, the ideal charge and discharge model is ,in, Attenuation coefficient of charge and discharge rate to test quality; is the estimated value of the charge of the test mass under ideal conditions; is the derivative of the charge estimate; To input reference instructions, for The input coefficient of .

[0040] Furthermore, the on-track charging and discharging model is: ,in, To verify the attenuation coefficient of the actual charging rate of mass in space; The charge to test the mass; To test the derivative of mass charge; It indicates the charge and discharge rate calculated by the feedforward gain coefficient and the feedback gain coefficient when the ultraviolet light is irradiated to inspect the quality; Indicates the UV charge and discharge rate attenuation coefficient of the actual model;

[0041] The charge and discharge rate for ,in, is the feedback gain coefficient, is the feedforward gain coefficient;

[0042] The feedback gain coefficient for ,in, is the first adaptive rate, , Indicates the charge error value;

[0043] The feedforward gain coefficient for ,in, is the second adaptive rate, .

[0044] The present invention also provides an adaptive test mass charge control device, comprising one or more processors for implementing the adaptive test mass charge control method.

[0045] The present invention also provides a computer-readable storage medium on which a program is stored. When the program is executed by a processor, it is used to implement the above-mentioned adaptive inspection quality charge control method.

[0046] The beneficial effects of the present invention are:

[0047] 1) By applying an excitation voltage to the parallel metal plates in the horizontal direction, the inspection mass is driven to produce displacement. The calculated feedback voltage is applied to the parallel plates in the corresponding horizontal direction through the displacement sensor and the motion control module to control the inspection mass at the equilibrium position, thereby using a closed-loop control method to suppress the large-scale movement of the inspection mass and reduce the noise caused by the measurement charge;

[0048] 2) The charge measurement module calculates the charge (potential) value of the test mass surface according to the control torque output by the motion control module; the charge (potential) value is subtracted from the reference charge (potential) value output by the reference model module to obtain a charge error value; the adaptive control module receives the charge error, calculates the feedforward gain coefficient and feedback gain coefficient required for charge control, and calculates the charge and discharge rate required to control the charge to near zero based on the on-track charge and discharge model; the charge actuator receives the charge and discharge rate, drives the ultraviolet light to irradiate the test mass and the corresponding vertical parallel metal plate, and applies a bias voltage to the vertical plate to control the charge to near zero;

[0049] 3) The control parameters in the present invention can be automatically adjusted. When the external environment is disturbed or the charge and discharge physical properties of the conductor itself change, there is no need to interrupt the target signal detection to re-measure the external charging rate, thus avoiding the interference problem caused by interrupting the target signal detection when measuring the accumulated charge of the inspection mass, and has broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1 is a flow chart of an adaptive inspection mass charge control method in Example 2;

[0051] Figure 2 Schematic diagram of the principle of the sinusoidal demodulation algorithm in Example 2;

[0052] Figure 3 Flow chart of the sinusoidal demodulation algorithm in Example 2;

[0053] Figure 4 is a schematic structural diagram of an adaptive inspection mass charge control device in Example 3;

[0054] Figure 5 is a schematic diagram of the mechanical structure of an adaptive test mass charge control device in Example 3;

[0055] Figure 6 This is a schematic structural diagram of an adaptive inspection mass charge control device in Example 4. DETAILED DESCRIPTION

[0056] In order to make the purpose, technical scheme and advantages of the present invention more clear, the present invention is further described in detail in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0057] Embodiment 1: The present invention provides an adaptive inspection mass charge control device, which includes parallel metal plates, an ultraviolet light irradiation module, a displacement sensor, a motion control module, a charge measurement module, a reference model module, an adaptive control module, an electrostatic actuator and a charge actuator.

[0058] The horizontal parallel metal plates are used to receive an excitation voltage to cause the inspection mass to rotate, and the excitation voltages applied to the adjacent parallel metal plates on the same side are equal in magnitude and opposite in direction.

[0059] The vertically parallel metal plates are used to apply a bias voltage.

[0060] The ultraviolet irradiation module includes a first ultraviolet irradiation submodule and a second ultraviolet irradiation submodule.

[0061] The displacement sensor is used to measure the displacement of the inspection mass relative to the parallel metal plate in the horizontal direction, and convert the displacement into a voltage signal and transmit it to the motion control module.

[0062] The motion control module is used to receive the voltage signal and calculate the control torque and feedback voltage required to control the inspection mass at a balanced position.

[0063] The electrostatic actuator applies the calculated feedback voltage to all parallel metal plates in the horizontal direction.

[0064] The reference model module calculates an estimated value of the charge of the test mass according to an ideal charge and discharge model of the test mass and inputs the estimated value into the adaptive control module.

[0065] The charge measurement module receives the control torque, calculates the charge of the test mass through the control torque according to a sinusoidal demodulation algorithm, and inputs the charge to the adaptive control module.

[0066] The adaptive control module subtracts the estimated value of the received charge from the charge of the inspection mass to obtain a charge error value; then, based on the charge error value, the feedforward gain coefficient and feedback gain coefficient required for charge control are calculated, and based on the on-track charge and discharge model, the charge and discharge rate required to control the charge to zero is calculated.

[0067] The charge actuator receives the charge and discharge rate, drives the first ultraviolet irradiation submodule to emit ultraviolet light to the surface of the inspection mass opposite to the parallel metal plates on one side of the vertical direction, so that the surface of the inspection mass excites photoelectrons, thereby increasing the charge of the inspection mass; or drives the second ultraviolet irradiation submodule to emit ultraviolet light to the surface of the parallel metal plates on the side of the vertical direction opposite to the inspection mass, so that the surface of the parallel metal plates excites photoelectrons, thereby reducing the charge of the inspection mass; and applies bias voltages of the same magnitude and opposite direction to the parallel metal plates on both sides of the vertical direction, respectively, to control the charge of the inspection mass to 0.

[0068] The central wavelengths of the ultraviolet rays emitted by the first ultraviolet irradiation submodule and the second ultraviolet irradiation submodule are both 250 nm.

[0069] The number of the parallel metal plates is 6, including 4 parallel metal plates in the horizontal direction and 2 parallel metal plates in the vertical direction.

[0070] The four parallel metal plates in the horizontal direction are respectively the first parallel metal plate, the second parallel metal plate, the third parallel metal plate and the fourth parallel metal plate; the first parallel metal plate and the third parallel metal plate are located on one side of the horizontal direction of the inspection mass, and the second parallel metal plate and the fourth parallel metal plate are located on the other side of the horizontal direction of the inspection mass; the first parallel metal plate is directly opposite and parallel to the second parallel metal plate; the third parallel metal plate is directly opposite and parallel to the fourth parallel metal plate.

[0071] The two vertical parallel metal plates are respectively the fifth parallel metal plate and the sixth parallel metal plate; the fifth parallel metal plate is located on one side of the vertical direction of the inspection mass, and the sixth parallel metal plate is located on the other side of the vertical direction of the inspection mass; the fifth parallel metal plate is directly parallel to the sixth parallel metal plate.

[0072] Example 2: Figure 1 As shown, the present invention also provides an adaptive inspection quality charge control method, comprising the following steps:

[0073] Parallel metal plates are placed in the horizontal and vertical directions of the inspection mass, respectively, wherein all parallel metal plates are parallel to and equidistant from the inspection mass, the number of parallel metal plates placed on both sides of the horizontal direction of the inspection mass is the same, and the number of parallel metal plates placed on both sides of the vertical direction of the inspection mass is the same.

[0074] The same excitation voltage is applied to all parallel metal plates in the horizontal direction of the inspection mass, so that the inspection mass rotates. The displacement signal generated by the inspection mass deviating from the equilibrium position is measured by the displacement sensor and converted into a voltage signal.

[0075] The motion control module calculates the control torque and the corresponding feedback voltage required to control the inspection mass at the equilibrium position according to the voltage signal.

[0076] Then, the electrostatic actuator applies the feedback voltage to all parallel metal plates in the horizontal direction respectively, so that the electrostatic force generated between all parallel metal plates in the horizontal direction and the inspection mass controls the inspection mass in a balanced position.

[0077] The reference model module calculates an estimated value of the charge of the test mass according to an ideal charge and discharge model of the test mass. The charge measurement module calculates the charge of the test mass by controlling the torque according to a sinusoidal demodulation algorithm.

[0078] The adaptive control module then subtracts the estimated value of the charge from the charge of the test mass to obtain a charge error value; then, based on the charge error value, the feedforward gain coefficient and feedback gain coefficient required for charge control are calculated, and based on the on-track charge and discharge model, the charge and discharge rate required to control the charge to zero is calculated.

[0079] Finally, the charge actuator drives the ultraviolet light irradiation module to emit ultraviolet light to irradiate the inspection mass or the parallel metal plates on one side in the vertical direction according to the charge and discharge rate, and applies bias voltages of the same magnitude and opposite direction to the parallel metal plates on both sides in the vertical direction, respectively, to control the charge of the inspection mass to 0.

[0080] like Figure 2 and Figure 3 As shown, the charge of the test mass is obtained by controlling the torque calculation according to the sinusoidal demodulation algorithm, which specifically includes the following sub-steps:

[0081] (a.1) According to the multiplication of the control torque and the sine wave signal, the first multiplied signal is obtained .

[0082] The control torque is ,in, It represents the magnitude of the control torque to which the test mass is subjected, is the angular frequency, is the frequency applied to the excitation voltage.

[0083] The first multiplied signal for ,in, is the noise term, is the amplitude of the sine wave signal, is the phase of the sine wave signal.

[0084] (a.2) The signal after the first multiplication Input into the low-pass filter to filter out the high-frequency signal and obtain the first filtered signal ; The first filtered signal for .

[0085] (a.3) Change the phase of the sine wave signal by 90° and multiply it by the control torque to obtain the second multiplied signal ; The second multiplied signal for .

[0086] (a.4) The second multiplied signal Input into the low-pass filter to filter out the high-frequency signal and obtain the second filtered signal ; The second filtered signal for .

[0087] (a.5) The first filtered signal and the second filtered signal Substitute the charge calculation formula of the test mass into the charge calculation formula of the test mass and calculate the charge of the test mass .

[0088] The test mass charge calculation formula is: ,in, It is the capacitance between the horizontal parallel metal plates and the test mass when the test mass is in the equilibrium position; is the distance between the center of the first parallel metal plate and the center of the third parallel metal plate; is the distance between the first parallel metal plate and the test mass when the test mass is in the equilibrium position; is the amplitude of the excitation voltage.

[0089] The ideal charge and discharge model is: ,in, Attenuation coefficient of charge and discharge rate to test quality; is the estimated value of the charge of the test mass under ideal conditions; is the derivative of the charge estimate; To input reference instructions, for The input coefficient of .

[0090] The on-track charging and discharging model is: ,in, To verify the attenuation coefficient of the actual charging rate of mass in space; The charge to test the mass; To test the derivative of mass charge; It indicates the charge and discharge rate calculated by the feedforward gain coefficient and the feedback gain coefficient when the ultraviolet light is irradiated to inspect the quality; Represents the UV light charge and discharge rate attenuation coefficient of the actual model.

[0091] The charge and discharge rate for ,in, is the feedback gain coefficient, is the feedforward gain coefficient.

[0092] The feedback gain coefficient for ,in, is the first adaptive rate, , Indicates the charge error value.

[0093] The feedforward gain coefficient for ,in, is the second adaptive rate, .

[0094] Example 3: Figure 4 As shown, the present invention provides an adaptive test mass charge control device, which includes a mechanical structure, a displacement sensor, a motion control module, a charge measurement module, a reference model module, an adaptive control module, an electrostatic actuator and a charge actuator.

[0095] A schematic diagram of the mechanical structure of an adaptive test mass charge control device is shown in Figure 5 As shown, the mechanical structure includes parallel metal plates and an ultraviolet light irradiation module. In this embodiment, the number of the parallel metal plates is 6, including 4 parallel metal plates in the horizontal direction and 2 parallel metal plates in the vertical direction.

[0096] The four parallel metal plates in the horizontal direction are respectively the first parallel metal plates , the second parallel metal plate , the third parallel metal plate and the fourth parallel metal plate ; The first parallel metal plates and the third parallel metal plates are located on one side of the horizontal direction of the inspection mass, and the second parallel metal plates and the fourth parallel metal plates are located on the other side of the horizontal direction of the inspection mass; the first parallel metal plates are directly opposite and parallel to the second parallel metal plates; the third parallel metal plates are directly opposite and parallel to the fourth parallel metal plates.

[0097] The two vertical parallel metal plates are respectively the fifth parallel metal plates and the sixth parallel metal plate ; The fifth parallel metal plate is located on one side of the vertical direction of the inspection mass, and the sixth parallel metal plate is located on the other side of the vertical direction of the inspection mass; the fifth parallel metal plate is directly parallel to the sixth parallel metal plate.

[0098] The first parallel metal plate in the mechanical structure , the second parallel metal plate , the third parallel metal plate and the fourth parallel metal plate Output , , and They are connected to displacement sensors respectively.

[0099] The ultraviolet light irradiation module includes a first ultraviolet irradiation submodule UV light A and a second ultraviolet irradiation submodule UV light B. The charge actuator is connected to the first ultraviolet irradiation submodule UV light A and the second ultraviolet irradiation submodule UV light B, and is used to drive the first ultraviolet irradiation submodule UV light A to emit ultraviolet light to irradiate the surface of the inspection mass opposite to the parallel metal plates on one side in the vertical direction, so that the surface of the inspection mass excites photoelectrons, and the charge of the inspection mass increases; or is used to drive the second ultraviolet irradiation submodule UV light B to emit ultraviolet light to irradiate the surface of the parallel metal plates on one side in the vertical direction opposite to the inspection mass, so that the surface of the parallel metal plates excites photoelectrons, and the charge of the inspection mass decreases, thereby controlling the charge of the inspection mass.

[0100] The output of the displacement sensor is connected to the motion control module; the output end of the motion control module is respectively connected to the charge measurement module and the electrostatic actuator; the output end of the electrostatic actuator is connected to the parallel metal plates in the horizontal direction; the output end of the charge measurement module is connected to the adaptive control module; the output end of the reference model module is connected to the adaptive control module; the output end of the adaptive control module is connected to the charge actuator.

[0101] The electrostatic actuator comprises a first actuator, a second actuator, a third actuator and a fourth actuator. The input ends of the first actuator, the second actuator, the third actuator and the fourth actuator are respectively connected to the motion control module, and the output ends are respectively connected to the mechanical structure.

[0102] The working principle of an adaptive test mass charge control device provided by the present invention is as follows:

[0103] Apply an excitation voltage to the parallel metal plates in the horizontal direction to make the test mass rotate; measure the displacement of the test mass relative to the parallel metal plates in the horizontal direction through the displacement sensor, and convert the displacement into a voltage signal ; The motion control module calculates the control torque required to control the test mass in the equilibrium position based on the voltage signal and feedback voltage; the feedback voltage is ,in, , , and Respectively represent the feedback voltages on the first parallel metal plate, the second parallel metal plate, the third parallel metal plate and the fourth parallel metal plate; then the electrostatic actuator applies the feedback voltage to all parallel metal plates in the horizontal direction to control the test mass at the equilibrium position; the reference model module calculates the estimated value of the charge of the test mass according to the ideal charge and discharge model of the test mass ; The charge measurement module calculates the test mass charge by controlling the torque according to the sinusoidal demodulation algorithm ; The adaptive control module calculates the estimated value of the charge and the charge of the test mass Do the difference and get the charge error value , and then according to the charge error value , calculate the feedforward gain coefficient and feedback gain coefficient required for charge control, and based on the charge on-track charging and discharging model, calculate the charge and discharge rate required to control the charge to zero ; Charge actuator according to the charge and discharge rate The first ultraviolet irradiation submodule is driven to emit ultraviolet light to the surface of the inspection mass opposite to the parallel metal plate on one side in the vertical direction, or the second ultraviolet irradiation submodule is driven to emit ultraviolet light to the surface of the parallel metal plate on the side in the vertical direction opposite to the inspection mass, and bias voltages of the same magnitude and opposite direction are applied to the and It is applied to the parallel metal plates on both sides in the vertical direction to control the charge of the test mass to 0.

[0104] Embodiment 4: Corresponding to Embodiment 2 of the aforementioned adaptive test mass charge control method, the present invention further provides an embodiment of an adaptive test mass charge control device.

[0105] See also Figure 6 An adaptive test quality charge control device provided by an embodiment of the present invention includes one or more processors for implementing an adaptive test quality charge control method in the above embodiment.

[0106] An embodiment of an adaptive inspection quality charge control device of the present invention can be applied to any device with data processing capability, and the device with data processing capability can be a device or apparatus such as a computer. The device embodiment can be implemented by software, or by hardware or a combination of software and hardware. Taking software implementation as an example, as a device in a logical sense, the processor of any device with data processing capability reads the corresponding computer program instructions in the non-volatile memory into the memory and runs them. From the hardware level, if Figure 6 As shown, it is a hardware structure diagram of any device with data processing capability where an adaptive test quality charge control device of the present invention is located, except Figure 6 In addition to the processor, memory, network interface, and non-volatile memory shown, any device with data processing capabilities in which the apparatus in the embodiments is located may also include other hardware, generally based on the actual functions of the device with data processing capabilities, which will not be described in detail.

[0107] The implementation process of the functions and effects of each unit in the above-mentioned device is specifically described in the implementation process of the corresponding steps in the above-mentioned method, and will not be repeated here.

[0108] For the device embodiment, since it basically corresponds to the method embodiment, the relevant parts can refer to the partial description of the method embodiment. The device embodiment described above is only schematic, wherein the units described as separate components may or may not be physically separated, and the components displayed as units may or may not be physical units, that is, they may be located in one place, or they may be distributed on multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the scheme of the present invention. Ordinary technicians in this field can understand and implement it without paying creative work.

[0109] An embodiment of the present invention also provides a computer-readable storage medium, on which a program is stored. When the program is executed by a processor, an adaptive inspection quality charge control method in the above embodiment is implemented. The computer-readable storage medium can be an internal storage unit of any device with data processing capability described in any of the above embodiments, such as a hard disk or a memory. The computer-readable storage medium can also be an external storage device of any device with data processing capability, such as a plug-in hard disk, a smart memory card (Smart Media Card, SMC), an SD card, a flash card (Flash Card), etc. equipped on the device. Further, the computer-readable storage medium can also include both an internal storage unit and an external storage device of any device with data processing capability. The computer-readable storage medium is used to store the computer program and other programs and data required by any device with data processing capability, and can also be used to temporarily store data that has been output or is to be output.

[0110] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An adaptive test mass charge control device, characterized in that The device includes parallel metal plates, an ultraviolet light irradiation module, a displacement sensor, a motion control module, a charge measurement module, a reference model module, an adaptive control module, an electrostatic actuator and a charge actuator; The parallel metal plates are placed in the horizontal and vertical directions of the inspection mass, parallel to the surface of the inspection mass, all parallel metal plates are parallel to the inspection mass and are at equal distances, the number of parallel metal plates placed on both sides of the inspection mass in the horizontal direction is the same, and the number of parallel metal plates placed on both sides of the inspection mass in the vertical direction is the same; The output end of the parallel metal plates in the horizontal direction is connected to a displacement sensor; the output end of the displacement sensor is connected to a motion control module; the output end of the motion control module is respectively connected to a charge measurement module and an electrostatic actuator; the output end of the electrostatic actuator is connected to the parallel metal plates in the horizontal direction; the output end of the charge measurement module is connected to an adaptive control module; The output end of the reference model module is connected to the adaptive control module; the output end of the adaptive control module is connected to the charge actuator; The charge actuator is connected to the ultraviolet light irradiation module; The parallel metal plates in the horizontal direction are used to receive an excitation voltage to cause the inspection mass to rotate, and the excitation voltages applied to the adjacent parallel metal plates on the same side are equal in magnitude and opposite in direction; The vertically parallel metal plates are used to apply a bias voltage; The ultraviolet irradiation module includes a first ultraviolet irradiation submodule and a second ultraviolet irradiation submodule; The displacement sensor is used to measure the displacement of the inspection mass relative to the parallel metal plate in the horizontal direction, and convert the displacement into a voltage signal and transmit it to the motion control module; The motion control module is used to receive the voltage signal and calculate the control torque and feedback voltage required to control the inspection mass at the equilibrium position; The electrostatic actuator applies the calculated feedback voltage to all parallel metal plates in the horizontal direction; The reference model module calculates an estimated value of the charge of the test mass according to an ideal charge and discharge model of the test mass and inputs the estimated value into the adaptive control module; The charge measurement module receives the control torque, calculates the charge of the test mass through the control torque according to the sinusoidal demodulation algorithm, and inputs the charge to the adaptive control module; The adaptive control module subtracts the estimated value of the received charge from the charge of the inspection mass to obtain a charge error value; Then, according to the charge error value, a feedforward gain coefficient and a feedback gain coefficient required for charge control are calculated, and based on the charge on-track charging and discharging model, a charge and discharge rate required to control the charge to zero is calculated; The charge actuator receives the charge and discharge rate, drives the first ultraviolet irradiation submodule to emit ultraviolet light to the surface of the inspection mass opposite to the parallel metal plates on one side of the vertical direction, or drives the second ultraviolet irradiation submodule to emit ultraviolet light to the surface of the parallel metal plates on the one side of the vertical direction opposite to the inspection mass, and applies bias voltages of the same magnitude and opposite direction to the parallel metal plates on both sides of the vertical direction, respectively, to control the charge of the inspection mass to 0.

2. An adaptive test mass charge control device according to claim 1, characterized in that: The central wavelengths of the ultraviolet rays emitted by the first ultraviolet irradiation submodule and the second ultraviolet irradiation submodule are both 250 nm.

3. An adaptive test mass charge control device according to claim 1, characterized in that: The number of the parallel metal plates is 6, including 4 parallel metal plates in the horizontal direction and 2 parallel metal plates in the vertical direction; The four parallel metal plates in the horizontal direction are respectively a first parallel metal plate, a second parallel metal plate, a third parallel metal plate and a fourth parallel metal plate; the first parallel metal plate and the third parallel metal plate are located on one side of the horizontal direction of the inspection mass, and the second parallel metal plate and the fourth parallel metal plate are located on the other side of the horizontal direction of the inspection mass; the first parallel metal plate is directly parallel to the second parallel metal plate; the third parallel metal plate is directly parallel to the fourth parallel metal plate; The two vertical parallel metal plates are respectively the fifth parallel metal plate and the sixth parallel metal plate; the fifth parallel metal plate is located on one side of the vertical direction of the inspection mass, and the sixth parallel metal plate is located on the other side of the vertical direction of the inspection mass; the fifth parallel metal plate is directly parallel to the sixth parallel metal plate.

4. An adaptive test quality charge control method, characterized in that: The method uses the device according to any one of claims 1 to 3, and comprises the following steps: Parallel metal plates are placed in the horizontal direction and the vertical direction of the inspection mass, respectively, wherein all the parallel metal plates are parallel to the inspection mass and are at equal distances, the number of parallel metal plates placed on both sides of the horizontal direction of the inspection mass is the same, and the number of parallel metal plates placed on both sides of the vertical direction of the inspection mass is the same; Applying excitation voltages of the same magnitude to all parallel metal plates in the horizontal direction of the test mass respectively, so that the test mass rotates, measuring the displacement signal generated by the deviation of the test mass from the equilibrium position by the displacement sensor, and converting the displacement signal into a voltage signal; The motion control module calculates the control torque and the corresponding feedback voltage required to control the inspection mass at the equilibrium position according to the voltage signal; Then, the electrostatic actuator applies the feedback voltage to all parallel metal plates in the horizontal direction respectively, so that the electrostatic force generated between all parallel metal plates in the horizontal direction and the inspection mass controls the inspection mass in a balanced position; The reference model module calculates an estimated value of the charge of the test mass according to an ideal charge and discharge model of the test mass; the charge measurement module calculates the charge of the test mass by controlling the torque according to a sinusoidal demodulation algorithm; Then, the adaptive control module subtracts the estimated value of the charge from the charge of the inspection mass to obtain a charge error value; then, based on the charge error value, the feedforward gain coefficient and the feedback gain coefficient required for charge control are calculated, and based on the on-track charge and discharge model, the charge and discharge rate required to control the charge to zero is calculated; Finally, the charge actuator drives the ultraviolet light irradiation module to emit ultraviolet light to irradiate the inspection mass or the parallel metal plates on one side in the vertical direction according to the charge and discharge rate, and applies bias voltages of the same magnitude and opposite direction to the parallel metal plates on both sides in the vertical direction, respectively, to control the charge of the inspection mass to 0.

5. The adaptive test mass charge control method according to claim 4, characterized in that: The method of obtaining the charge of the test mass by controlling the torque calculation according to the sinusoidal demodulation algorithm specifically includes the following sub-steps: (a.1) According to the multiplication of the control torque and the sine wave signal, the first multiplied signal is obtained ; The control torque is ,in, It represents the magnitude of the control torque to which the test mass is subjected, is the angular frequency, is the frequency applied to the excitation voltage; The first multiplied signal for ,in, is the noise term, is the amplitude of the sine wave signal, is the phase of the sine wave signal; (a.2) The signal after the first multiplication Input into the low-pass filter to filter out the high-frequency signal and obtain the first filtered signal ; The first filtered signal for ; (a.3) Change the phase of the sine wave signal by 90° and multiply it by the control torque to obtain the second multiplied signal ; The second multiplied signal for ; (a.4) The second multiplied signal Input into the low-pass filter to filter out the high-frequency signal and obtain the second filtered signal ; The second filtered signal for ; (a.5) The first filtered signal and the second filtered signal Substitute the charge calculation formula of the test mass into the charge calculation formula of the test mass and calculate the charge of the test mass ; The test mass charge calculation formula is: ,in, It is the capacitance between the horizontal parallel metal plates and the test mass when the test mass is in the equilibrium position; is the distance between the center of the first parallel metal plate and the center of the third parallel metal plate; is the distance between the first parallel metal plate and the test mass when the test mass is in the equilibrium position; is the amplitude of the excitation voltage.

6. An adaptive test mass charge control method according to claim 5, characterized in that: The ideal charge and discharge model is: ,in, Attenuation coefficient of charge and discharge rate to test quality; is the estimated value of the charge of the test mass under ideal conditions; is the derivative of the charge estimate; To input reference instructions, for The input coefficient of .

7. An adaptive test mass charge control method according to claim 6, characterized in that: The on-track charging and discharging model is: ,in, To verify the attenuation coefficient of the actual charging rate of mass in space; The charge to test the mass; To test the derivative of mass charge; It indicates the charge and discharge rate calculated by the feedforward gain coefficient and the feedback gain coefficient when the ultraviolet light is irradiated to inspect the quality; Indicates the UV charge and discharge rate attenuation coefficient of the actual model; The charge and discharge rate for ,in, is the feedback gain coefficient, is the feedforward gain coefficient; The feedback gain coefficient for ,in, is the first adaptive rate, , Indicates the charge error value; The feedforward gain coefficient for ,in, is the second adaptive rate, .

8. An adaptive test mass charge control device, characterized in that It comprises one or more processors for implementing the adaptive proof-quality charge control method according to any one of claims 4-7.

9. A computer-readable storage medium having a program stored thereon, characterized in that: When the program is executed by a processor, it is used to implement the adaptive test quality charge control method described in any one of claims 4-7.

Images