Silicon material ingot casting boiler cooling device and method

Abstract

The present invention discloses a silicon material ingot casting boiler cooling device and method thereof, and the present invention relates to the silicon material ingot casting boiler cooling technology field. The silicon material ingot casting boiler cooling device comprises an upper furnace body and a lower furnace body, wherein cavities are respectively opened in the upper furnace body and the lower furnace body, and a middle gradually descending cooling mechanism, a bottom gradually descending cooling mechanism and a top gradually descending cooling mechanism are coordinated and synchronously operated through a docking and connecting mechanism so as to perform integrated step-by-step cooling of the boiler as a whole. The present invention realizes integrated cooling of the boiler through the cooperation of the top, middle and bottom gradually descending cooling mechanisms, and synchronizes the cooling of the upper, middle and lower regions, avoids the local temperature unevenness caused by a single direction, ensures the overall effective cooling, and then stabilizes the cooling process through the step-by-step cooling during the cooling process, avoids the cooling instability caused by too fast or too slow flow rate, ensures the cooling speed matches the change of the silicon material crystal structure, reduces cracks and deformation, and ensures the quality of the ingot casting.

Description

Technical Field

[0001] The invention relates to the technical field of silicon material ingot casting boiler cooling, in particular to a silicon material ingot casting boiler cooling device and method thereof. Background Art

[0002] Silicon ingot casting technology is one of the important steps in the photovoltaic industry for producing solar panels. It mainly melts high-purity polycrystalline silicon raw materials, cools and solidifies them into large silicon ingots under specific conditions, and then cuts the silicon ingots into thin silicon wafers for manufacturing solar cells. The silicon ingot casting furnace is a key equipment for producing solar-grade polycrystalline silicon ingots, which allows high-purity silicon materials to melt and recrystallize into the required shape and size under a controlled environment. Cooling the silicon ingot casting furnace is a crucial link in the casting process. The appropriate cooling rate helps to reduce the thermal stress inside the silicon ingot and prevent cracking or deformation caused by rapid temperature changes. It also helps to refine the grains and improve the microstructural uniformity of the silicon ingots. The fine grains can enhance the mechanical strength and electrical properties of the silicon wafers.

[0003] The cooling of silicon ingot furnace is generally carried out in four directions, namely, crucible wall, furnace shell, furnace top and furnace bottom. Since the furnace body is large and the temperature during casting is around 1000 degrees Celsius, the heat resistance quality requirements for parts are extremely high. Therefore, except for the crucible wall which is cooled by air inside, the furnace shell, furnace top and furnace bottom are generally cooled externally. In the cooling process of traditional polysilicon ingot boilers, the cooling system often cools from a single direction (such as the bottom or side), which may lead to uneven temperature gradients. Some areas of the boiler cannot be effectively cooled, affecting the overall cooling effect of the boiler.

[0004] And generally the cooling speed is adjusted by controlling the flow rate of the cooling fluid in the pipeline. A single cooling path will limit the cooling speed when the flow rate is slow, and effective cooling cannot be achieved. A fast flow rate will cause a sudden drop in the temperature in the furnace. During the cooling process, as the temperature of the silicon material gradually decreases, the crystal structure of silicon will gradually change from liquid to solid crystal. If the temperature drops too quickly, the cooling rates of the outer and inner layers will be inconsistent, and the crystal structure will be unevenly formed in different areas. Cracks or deformations will occur inside the silicon material, thereby affecting the quality of the silicon material, and causing defects in the crystal structure inside the ingot. Summary of the invention

[0005] The present invention provides a silicon material ingot casting boiler cooling device and method thereof, which solve the technical problems that in the cooling process of the traditional polysilicon ingot casting boiler, cooling is often performed from a single direction, which easily leads to uneven temperature gradient, and some areas of the boiler cannot be effectively cooled, affecting the overall cooling effect. In addition, the traditional cooling method relies on adjusting the flow rate of the cooling fluid to control the cooling speed. Too slow a flow rate will limit the cooling effect, while too fast a flow rate will cause the silicon material to cool down too quickly, resulting in inconsistent cooling speeds of the outer and inner layers, and uneven formation of the crystal structure of the silicon in different areas, which in turn causes cracks or deformation, affecting the quality of the crystal structure inside the ingot.

[0006] The present invention provides a silicon ingot casting boiler cooling device, comprising an upper furnace body and a lower furnace body, wherein the upper furnace body and the lower furnace body are respectively provided with cavities, the cavity located on the upper furnace body divides the upper furnace body into two inner and outer rings, the cavity of the upper furnace body is provided with a middle gradually descending cooling mechanism for gradually cooling the middle part of the boiler so that the temperature of the middle part of the boiler decreases in a gradient, the upper part of the middle cooling mechanism is provided with a top gradually descending cooling mechanism for gradually cooling the upper part of the boiler, and the cavity located on the lower furnace body is provided with a cooling mechanism for gradually increasing the cooling force on the bottom of the boiler so that the temperature of the bottom of the boiler decreases in a gradient The bottom gradually descending cooling mechanism, the middle gradually descending cooling mechanism includes two upper tubes symmetrically fixedly connected to the hollow cavity in the upper furnace body in front and back, and the bottom gradually descending cooling mechanism includes two lower tubes symmetrically fixedly connected to the cavity in the lower furnace body in front and back, and a docking and connecting mechanism for connecting the middle gradually descending cooling mechanism and the bottom gradually descending cooling mechanism is commonly provided between the upper tubes and the lower tubes. Through the docking and connecting mechanism, the middle gradually descending cooling mechanism, the bottom gradually descending cooling mechanism and the top gradually descending cooling mechanism cooperate with each other and operate synchronously so as to perform integrated step-by-step cooling of the boiler as a whole.

[0007] In a possible implementation, the middle gradually descending cooling mechanism also includes an electric sliding frame, and the outsides of the two upper tubes are equidistantly slidably connected with a plurality of electric sliding frames, and the right part of the electric sliding frame is fixedly connected with two rectangular tube heads arranged with staggered horizontal heights, and the rectangular tube heads on the same electric sliding frame are commonly connected with a spiral ring tube slidably arranged on the inner ring part of the upper furnace body, and the two upper tubes are fixedly connected with guide rails on the back sides of each other, and a guide assembly is commonly arranged between the rectangular tube heads and the guide rails, and a No. 1 valve component is arranged on the rectangular tube head, and a raised strip for cooperating with the No. 1 valve component is fixedly connected to the lower part of the side of the guide rail away from the upper tube, and a plurality of connecting holes are equidistantly opened on the raised strip, the guide rail and the upper tube, and a vertical rod is commonly fixedly connected in the middle between the upper and lower groove walls of the connecting hole, and a No. 2 valve component is arranged in each connecting hole, and the guide assembly is used to cooperate with the No. 2 valve component to trigger it to open so as to facilitate its cooperation with the No. 1 valve component.

[0008] In one possible implementation, the No. 1 valve component includes a tube that passes through and is connected to the wall plate on one side of the rectangular tube head close to the upper tube, a strip plate fixedly connected to the inner cavity of the tube, a push rod that passes through and is slidably connected to the strip plate for cooperating with the raised strip, and a piston fixedly connected to the end of the push rod, the piston is in conflict with the inner cavity wall of the tube, and a push spring is fixedly connected between the push rod and the strip plate.

[0009] In a possible implementation, it is characterized in that: the guide assembly includes two longitudinal plates symmetrically fixedly connected to the rectangular tube head on one side close to the upper tube and guide grooves opened on the left and right sides of the guide rail, and the longitudinal plate is fixedly connected to the side close to the guide rail with a guide bar slidably connected to the guide groove.

[0010] In a possible implementation, the No. 2 valve component includes two through grooves that are symmetrically opened on the raised strip and connected to the connecting hole. Trapezoidal slides for cooperating with the longitudinal plate are slidably connected to the two through grooves. Valve plates are fixedly connected to opposite sides of the two trapezoidal slides. The two valve plates are staggered and have connecting grooves opened on them. A limiting spring is fixedly connected between the valve plate and the relative trapezoidal slides.

[0011] In a possible implementation, the docking connection mechanism includes a connecting seat that is connected to the upper ends of the two lower tubes, the connecting seat is symmetrically provided with insertion holes, a conical ring is fixedly connected to the insertion holes, the lower end of the upper tube is connected to a plug, and the lower end of the plug is fixedly connected to a sealing ring.

[0012] In a possible implementation, the bottom gradual cooling mechanism also includes a plurality of petal-shaped cooling tubes fixedly connected in sequence from the outside to the inside in the cavity of the lower furnace body, and both ends of each petal-shaped cooling tube are respectively connected to the two lower tubes through a flexible pipe section, and a control component is installed in the cavity below for sequentially controlling the petal-shaped cooling tubes to pass cooling water.

[0013] In a possible implementation, the control assembly includes a bidirectional electric telescopic column fixedly connected to the cavity in the lower furnace body through a fixed column, and the front and rear ends of the bidirectional electric telescopic column are respectively fixedly connected with a C-shaped pipe clamp slidably mounted outside the flexible pipe section.

[0014] In a possible implementation, the top gradually descending cooling mechanism includes two arc tubes corresponding to the upper tube and connected to the right part of the upper tube, the concave surfaces of the two arc tubes are opposite, the arc tubes are in an inclined state with a side closer to the upper tube being higher and a side farther from the upper tube being lower, and a number of transverse tubes are equidistantly connected between the two arc tubes.

[0015] In addition, the present invention also provides a silicon material ingot casting boiler cooling method, which is completed by using a silicon material ingot casting boiler cooling device, and includes the following steps: S1: before melting the silicon material, first place the crucible in the lower furnace body, then cover the upper furnace body on the lower furnace body to connect and seal the two, while the upper furnace body and the lower furnace body are connected, the bottom gradually descending cooling mechanism and the middle gradually descending cooling mechanism are connected by driving the docking connection mechanism, and then the silicon material is heated to melt.

[0016] S2: When the silicon material in the crucible is melted and enters the crystal growth stage, the external cooling fluid is first introduced into the bottom gradually descending cooling mechanism, and then the cooling fluid flows into the middle gradually descending cooling mechanism through the docking connecting mechanism, and finally flows into the top gradually descending cooling mechanism.

[0017] S3: The temperature of the boiler is gradually reduced in stages through the cooperation of the bottom gradually descending cooling mechanism, the middle gradually descending cooling mechanism and the top gradually descending cooling mechanism.

[0018] S4: Finally, after cooling is complete, the ingot is inspected to ensure a uniform crystal structure.

[0019] It can be seen from the above technical scheme that the present invention has the following advantages: In the present invention, the top gradually descending cooling mechanism, the middle gradually descending cooling mechanism and the bottom gradually descending cooling mechanism are interconnected and coordinated to realize integrated cooling of the boiler, and the upper, middle and lower areas of the boiler can be cooled synchronously, avoiding local temperature unevenness caused by cooling in a single direction, and ensuring that the boiler as a whole can be effectively cooled.

[0020] In the present invention, the number of spiral ring tubes into which the coolant is passed is intermittently and gradually increased, the spacing between adjacent spiral ring tubes is gradually shortened, and the coolant is then gradually passed into the petal-shaped cooling tubes arranged from the outside to the inside, so as to achieve step-by-step cooling of the boiler, so that the cooling process is more stable, and the cooling effect will not be unstable due to too fast or too slow flow rate, thereby ensuring that the cooling speed matches the change in the crystal structure of the silicon material, the temperature of the silicon material is gradually reduced during the cooling process, and the cooling speeds of the outer layer and the inner layer tend to be consistent, thereby avoiding uneven crystal structure caused by too fast cooling, reducing the risk of cracks and deformation, and ensuring the quality of the ingot. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0022] Figure 1 This is a schematic structural diagram of the silicon material ingot casting boiler cooling device provided by the present invention.

[0023] Figure 2 This is a schematic diagram of the specific connection and installation structure of the present invention and the crucible.

[0024] Figure 3 This is a schematic diagram of the connection structure of the top gradually descending cooling mechanism, the middle gradually descending cooling mechanism and the bottom gradually descending cooling mechanism provided by the present invention.

[0025] Figure 4 This is a schematic diagram of the bottom gradual cooling mechanism structure provided by the present invention.

[0026] Figure 5 This is a schematic cross-sectional structure diagram of the docking connection mechanism provided by the present invention.

[0027] Figure 6 This is a partial structural schematic diagram of the middle gradually descending cooling mechanism provided by the present invention.

[0028] Figure 7 The present invention provides Figure 6 Schematic diagram of the enlarged structure of part A in FIG.

[0029] Figure 8 This is a cross-sectional schematic diagram of the No. 2 valve component installation structure provided by the present invention.

[0030] Fig. 9 This is a schematic diagram of the connection structure between the rectangular tube head and the spiral ring tube provided by the present invention.

[0031] Fig.10 The present invention provides Fig. 9 Schematic diagram of the enlarged structure of part B.

[0032] Fig.11 This is a schematic diagram of the cross-sectional installation structure of valve component No. 1 provided by the present invention.

[0033] The above drawings include the following reference numerals: 1. upper furnace body; 2. lower furnace body; 3. cavity; 4. middle descending cooling mechanism; 41. upper tube; 42. electric slide frame; 43. rectangular tube head; 44. spiral ring tube; 45. guide rail; 46. guide assembly; 461. longitudinal plate; 462. guide groove; 463. guide strip; 47. valve member No. 1; 471. tube; 472. strip plate; 473. push rod; 474. piston; 48. valve member No. 2; 481. through groove; 482. trapezoidal slide; 483. valve plate; 484. connecting groove ; 485, limit spring; 49, raised strip; 410, connecting hole; 5, top descending cooling mechanism; 51, arc tube; 52, horizontal tube; 6, bottom descending cooling mechanism; 61, lower tube; 62, petal-shaped cooling tube; 63, flexible pipe section; 64, control assembly; 641, two-way electric telescopic column; 642, C-shaped pipe clamp; 7, docking connecting mechanism; 71, connecting seat; 72, socket; 73, conical ring; 74, plug; 75, sealing ring; a, protective gas inlet; b, exhaust port; c, sensor mounting hole; d, electrode mounting hole. DETAILED DESCRIPTION

[0034] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0035] See also Figure 1 and Figure 3The present invention provides a technical solution: a silicon ingot casting boiler cooling device, comprising an upper furnace body 1 and a lower furnace body 2, wherein the upper furnace body 1 and the lower furnace body 2 are respectively provided with cavities 3, the cavity 3 located on the upper furnace body 1 divides the upper furnace body 1 into two inner and outer rings, a middle gradually descending cooling mechanism 4 for gradually cooling the middle part of the boiler so that the temperature of the middle part of the boiler decreases in a gradient is installed in the cavity 3 located on the upper furnace body 1, a top gradually descending cooling mechanism 5 for gradually cooling the upper part of the boiler is installed on the upper part of the middle gradually descending cooling mechanism 4, a cooling mechanism for gradually increasing the cooling force on the bottom of the boiler so that the temperature of the bottom of the boiler decreases in a gradient is installed in the cavity 3 of the lower furnace body 2 The bottom gradually descending cooling mechanism 6 is low, and the middle gradually descending cooling mechanism 4 includes two upper tubes 41 which are symmetrically fixedly connected to the hollow cavity 3 of the upper furnace body 1 in the front and back directions. The bottom gradually descending cooling mechanism 6 includes two lower tubes 61 which are symmetrically fixedly connected to the upper cavity 3 of the lower furnace body 2 in the front and back directions. A docking connection mechanism 7 for connecting the middle gradually descending cooling mechanism 4 and the bottom gradually descending cooling mechanism 6 is provided between the upper tubes 41 and the lower tubes 61. Through the docking connection mechanism 7, the middle gradually descending cooling mechanism 4, the bottom gradually descending cooling mechanism 6 and the top gradually descending cooling mechanism 5 cooperate with each other and operate synchronously so as to perform integrated step-by-step cooling of the boiler as a whole.

[0036] It should be noted that a protective gas inlet a is provided at the center of the top of the upper furnace body 1 for introducing argon gas, an exhaust port b, a sensor mounting hole c and an electrode mounting hole d are also provided at the top of the upper furnace body 1, a vacuum exhaust hole is provided on the side wall of the upper furnace body 1, and a sensor mounting hole c and an electrode mounting hole d are also provided at the bottom of the lower furnace body 2; the electrode installed in the electrode mounting hole d is electrically connected to the heating structure inside the silicon material ingot casting boiler, argon gas enters the interior of the upper furnace body 1 through the protective gas inlet a, and the exhaust port b is used to discharge the gas generated during the heating process to maintain the pressure inside the furnace. The force is stable, the sensor mounting hole c includes a mounting hole for a temperature sensor and a mounting hole for a pressure sensor, which is specifically used to install a temperature sensor to measure the temperature in the furnace, and is also used to install a pressure sensor to measure the pressure in the furnace. The vacuum hole is used to extract the air in the furnace. The electrical connection circuit, protective gas circuit, and instrument installation position and connection relationship of the silicon material ingot casting boiler in this embodiment are all prior art and will not be repeated here. Of course, the specific number, distribution method, and position of the exhaust port b, the sensor mounting hole c, and the electrode mounting hole d can be increased or decreased according to actual needs. The specification is attached. Figure 1 and attached Figure 2 The number of openings shown is for illustration only.

[0037] See also Figure 3 , Figure 4 and Figure 5In this embodiment, the docking connection mechanism 7 includes a connecting seat 71 that is connected to the upper ends of the two lower tubes 61. The connecting seat 71 is symmetrically provided with insertion holes 72. A conical ring 73 is fixedly connected to the insertion hole 72. The lower end of the upper tube 41 is connected to a plug 74. The lower end of the plug 74 is fixedly connected to a sealing ring 75. The sealing ring 75 is made of high temperature resistant material, preferably fluororubber, silicone rubber, etc., to ensure normal sealing under high temperature.

[0038] See also Figure 3 and Figure 4 The bottom gradually descending cooling mechanism 6 also includes a plurality of petal-shaped cooling tubes 62 fixedly connected in sequence from the outside to the inside in the cavity 3 of the lower furnace body 2. Both ends of each petal-shaped cooling tube 62 are respectively connected to the two lower tubes 61 through a flexible pipe section 63. A control component 64 for sequentially controlling the petal-shaped cooling tubes 62 to pass cooling water is installed in the cavity 3 below. The control component 64 includes a bidirectional electric telescopic column 641 fixedly connected in the cavity 3 on the lower furnace body 2 through a fixed column. The front and rear ends of the bidirectional electric telescopic column 641 are respectively fixedly connected with a C-shaped pipe clamp 642 slidably mounted on the outside of the flexible pipe section 63.

[0039] Before heating and melting the silicon material, the upper furnace body 1 and the lower furnace body 2 are controlled to dock with each other by using the lifting equipment outside the boiler. During the docking process of the upper furnace body 1 and the lower furnace body 2, the upper tube 41 is driven to move toward the connecting seat 71 until the upper tube 41 drives the insert tube 74 to be inserted into the insertion hole 72. When the insert tube 74 is inserted into the insertion hole 72, the sealing ring 75 is squeezed by the conical ring 73 and continuously shrinks, and then fills the conical ring 73. Finally, the insert tube 74 and the insertion hole 72 are connected together; then the cooling fluid is pumped in from the lower end of one of the lower tubes 61, and the cooling fluid is pumped in. The cooling fluid rises along the pumped lower tube 61, and then flows into the corresponding upper tube 41 through the socket 72, the conical ring 73 and the insert 74 in the connecting seat 71. The cooling fluid entering the lower tube 61 then flows into the petal-shaped cooling tube 62 on the outermost side. The cooling fluid flowing into the petal-shaped cooling tube 62 enters the other lower tube 61 after flowing through the petal-shaped cooling tube 62 for a circle, and flows out from the other lower tube 61. The cooling fluid can cool the lower part of the lower furnace body 2 during the flow in the petal-shaped cooling tube 62.

[0040] When the temperature of the lower furnace body 2 is cooled down to the next temperature gradient value, the two-way electric telescopic column 641 is controlled to contract to drive the two C-shaped pipe clamps 642 to move closer to each other for a distance, so that the C-shaped pipe clamp 642 is moved away from the outside of the flexible pipe section 63 on the second petal-shaped cooling pipe 62 from the outside to the inside, thereby making the second petal-shaped cooling pipe 62 from the outside to the inside connected to the lower pipe 61, and the lower pipe 61 then inputs the pumped cooling fluid into the second petal-shaped cooling pipe 62 from the outside to the inside, so that The lower furnace body 2 is cooled down by the next gradient. After the lower furnace body 2 is cooled down again by the gradient, the steps of moving the two C-shaped tube clamps 642 closer to each other are repeated again to control the third petal-shaped cooling tube 62 from the outside to the inside to be connected with the lower tube 61 for the next level of cooling. The two C-shaped tube clamps 642 are intermittently controlled to move closer to each other to intermittently loosen the flexible tube sections 63 one by one, so that the petal-shaped cooling tubes 62 from the outside to the inside are pumped with cooling fluid in turn, thereby gradually cooling the lower furnace body 2.

[0041] See also Figure 3 , Figure 6 , Figure 7 and Fig. 9 In this embodiment, the middle gradually descending cooling mechanism 4 also includes an electric sliding frame 42, and the two upper tubes 41 are equidistantly slidably connected to a plurality of electric sliding frames 42 outside, and the right part of the electric sliding frame 42 is fixedly connected to two rectangular tube heads 43 arranged with staggered horizontal heights, and the two rectangular tube heads 43 on the same electric sliding frame 42 are commonly connected to a spiral ring tube 44 slidably arranged on the inner ring part of the upper furnace body 1, and the two upper tubes 41 are fixedly connected to the opposite sides with guide rails 45, and a guide assembly 46 is commonly arranged between the rectangular tube head 43 and the guide rail 45, and a No. 1 valve member 47 is arranged on the rectangular tube head 43, and the guide rail 45 is far away A raised strip 49 for cooperating with the No. 1 valve component 47 is fixedly connected to the lower part of one side away from the upper tube 41. A plurality of connecting holes 410 are equidistantly provided on the raised strip 49, the guide rail 45 and the upper tube 41. The number of the connecting holes 410 is greater than the number of the spiral ring tube 44. A vertical rod is fixedly connected to the middle part between the upper and lower groove walls of the connecting holes 410. A No. 2 valve component 48 is arranged in each connecting hole 410. The guide assembly 46 is used to cooperate with the No. 2 valve component 48 to trigger the No. 2 valve component 48 to open so as to facilitate the cooperation between the No. 2 valve component 48 and the No. 1 valve component 47. The heights of the No. 2 valve components 48 on the front and rear upper tubes 41 are different.

[0042] See also Fig.10 and Fig.11The valve component 47 No. 1 includes a tube 471 that passes through and is connected to the wall panel on one side of the rectangular tube head 43 close to the upper tube 41, a strip plate 472 fixedly connected to the inner cavity of the tube 471, a push rod 473 that passes through and is slidably connected to the strip plate 472 for cooperating with the raised strip 49, and a piston 474 fixedly connected to the end of the push rod 473. The piston 474 is in conflict with the inner cavity wall of the tube 471. A push spring is fixedly connected between the push rod 473 and the strip plate 472. The push rod 473 will conflict with the vertical rod in the connecting hole 410 during the downward movement.

[0043] See also Figure 6 , Figure 7 , Figure 8 , Fig.10 and Fig.11 The guide assembly 46 includes two longitudinal plates 461 symmetrically fixedly connected to the rectangular tube head 43 on one side close to the upper tube 41 and guide grooves 462 opened on the left and right sides of the guide rail 45. The longitudinal plate 461 is fixedly connected to one side close to the guide rail 45 with a guide bar 463 slidably connected to the guide groove 462.

[0044] See also Figure 7 and Figure 8 The second valve member 48 includes two through grooves 481 which are symmetrically opened on the raised strip 49 and connected to the connecting hole 410. Trapezoidal slide plates 482 for cooperating with the longitudinal plate 461 are slidably connected in the two through grooves 481. The two inclined surfaces on the trapezoidal slide plates 482 are arranged up and down. Valve plates 483 are fixedly connected on the opposite sides of the two trapezoidal slide plates 482. The two valve plates 483 are staggered. A connecting groove 484 is opened on the valve plate 483. A limiting spring 485 is fixedly connected between the valve plate 483 and the relative trapezoidal slide plate 482. An elastic rubber layer pad is fixedly connected to the outer wall of the trapezoidal slide plate 482 for sealing the through groove 481.

[0045] When the crucible is placed in the lower furnace body 2, its highest point is located at the lower half height position of the upper furnace body 1 (the specific installation position of the crucible is as follows Figure 2 As shown in the figure, the spiral ring tubes 44 located in the lower half of the upper furnace body 1 have a larger distance between two adjacent ones in the initial position, and the corresponding valve component No. 1 47 and valve component No. 2 48 in the lower position are connected to each other, so that the cooling fluid entering the upper tube 41 then flows into the spiral ring tube 44, and the cooling fluid flows through the spiral ring tube 44 for a circle and then flows out into another upper tube 41. In the process of flowing in the spiral ring tube 44, the cooling fluid can cool the lower and middle parts of the upper furnace body 1.

[0046] When the upper furnace body 1 is cooled to the next temperature gradient interval, the electric slide frame 42 at the top is controlled to move downward in sequence. The upper electric slide frame 42 then drives the rectangular tube head 43 and the spiral ring tube 44 to move downward. The electric slide frame 42 drives the rectangular tube head 43 to move downward until it touches the raised strip 49. The inclined surface of the upper part of the raised strip 49 will touch the push rod 473 and push the push rod 473 to move away from the upper tube 41. The push rod 473 then pushes the piston 474 to move until the piston 474 is pushed out of the tube 471, so that the tube 471 is connected to the outside. During this process, the No. 1 valve member 47 is always in a connected state. During the downward movement of the rectangular tube head 43, the longitudinal plate 461 in the guide assembly 46 is driven to move downward synchronously. The longitudinal plate 461 then drives the guide bar 463 to move downward in the guide groove 462 until the rectangular tube head 43 moves down to a position flush with the connecting hole 410 and stops moving.

[0047] The longitudinal plate 461 will touch the inclined surface of the trapezoidal slide plate 482 during the downward movement, thereby pushing the trapezoidal slide plate 482 to retract into the through groove 481, and the trapezoidal slide plate 482 will then push the valve plate 483 to move, so that the two corresponding valve plates 483 move offset from each other until the connecting grooves 484 on the two valve plates 483 are aligned with each other. At this time, the tube 471 is connected with the connecting hole 410, and the cooling fluid in the upper tube 41 then flows into the tube 471 through the connecting hole 410 and the connecting groove 484, and then flows into the spiral ring tube 44 through the rectangular tube head 43. The number of spiral ring tubes 44 arranged on the outside of the lower half of the inner ring part of the upper furnace body 1 is increased by controlling the spiral ring tubes 44 located at the upper part to move downward continuously in sequence, so as to continuously increase the cooling force on the upper furnace body 1, so that the upper furnace body 1 is gradually cooled in a gradient.

[0048] After all the upper spiral ring tubes 44 move down to the outside of the lower half of the inner ring portion of the upper furnace body 1, since there is an empty connecting hole 410 between the two adjacent spiral ring tubes 44 that have moved to the lower half of the inner ring of the upper furnace body 1, the electric slide frame 42 can be controlled to move down again. The electric slide frame 42 drives the spiral ring tubes 44 to move down, so that after the spiral ring tube 44 located at the lower part moves down, the distance between the two adjacent spiral ring tubes 44 becomes smaller, thereby increasing the cooling force on the upper furnace body 1 again, and performing step-by-step cooling on the upper furnace body 1 by intermittently shrinking the distance between the two adjacent spiral ring tubes 44 from bottom to top.

[0049] See also Figure 1 , Figure 2 and Figure 3In this embodiment, the top gradually descending cooling mechanism 5 includes two arc tubes 51 corresponding to the upper tube 41 and connected to the right part of the upper tube 41. The concave surfaces of the two arc tubes 51 are opposite to each other. The arc tubes 51 are in an inclined state with a side close to the upper tube 41 being higher and a side away from the upper tube 41 being lower. A plurality of transverse tubes 52 are equidistantly connected between the two arc tubes 51. The cooling fluid pumped into the upper tube 41 flows from bottom to top. The cooling fluid enters the arc tube 51. The oblique direction of the arc tube 51 is used to make the cooling fluid flowing into it initially flow to the right and enter the transverse tube 52 located at the rightmost part. Then, as the cooling fluid is continuously injected, the cooling fluid flows from right to left. It flows into each transverse tube 52 in sequence. In the process of the cooling fluid flowing into the transverse tube 52 in sequence, the top of the upper furnace body 1 can be cooled. Then it flows from the transverse tube 52 into another arc tube 51, and then the cooling fluid enters another upper tube 41. Through the cooperation and joint operation of multiple petal-shaped cooling tubes 62, spiral ring tubes 44 and transverse tubes 52 and the gradual increase in number in sequence, the upper furnace body 1 and the lower furnace body 2 are cooled in an overall step-by-step manner. After the cooling of the upper furnace body 1 and the lower furnace body 2 is completed, the air is pumped into the bottom gradually descending cooling mechanism 6, the middle gradually descending cooling mechanism 4 and the top gradually descending cooling mechanism 5 through the pump body to completely discharge the cooling fluid inside the three.

[0050] In addition, the present invention also provides a silicon ingot boiler cooling method, comprising the following steps: S1: before melting the silicon material, first place the crucible in the lower furnace body 2, then cover the upper furnace body 1 on the lower furnace body 2 to connect and seal the two, while the upper furnace body 1 and the lower furnace body 2 are connected, drive the docking connection mechanism 7 to connect the bottom gradual cooling mechanism 6 and the middle gradual cooling mechanism 4, and then heat to melt the silicon material.

[0051] S2: When the silicon material in the crucible is melted and enters the crystal growth stage, the external cooling fluid is first pumped into the bottom gradually descending cooling mechanism 6, and the cooling fluid then flows into the middle gradually descending cooling mechanism 4 through the docking connecting mechanism 7, and finally flows into the top gradually descending cooling mechanism 5.

[0052] S3: The temperature of the boiler is gradually reduced in stages through the cooperation of the bottom gradually descending cooling mechanism 6, the middle gradually descending cooling mechanism 4 and the top gradually descending cooling mechanism 5.

[0053] S4: Finally, after cooling is completed, external air is pumped into the bottom descending cooling mechanism 6, and the air is then pushed into the middle descending cooling mechanism 4 and the top descending cooling mechanism 5 to exhaust the cooling fluid, and the upper furnace body 1 is driven upward and opened by an external lifting device to inspect the ingot to ensure a uniform crystal structure.

[0054] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0055] In addition, the terms "first", "second", "number one", "number two" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second", "number one", "number two" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0056] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0057] The embodiments of this specific implementation method are all preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention. Therefore, all equivalent changes made based on the structure, shape, and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A silicon ingot casting boiler cooling device, comprising an upper furnace body (1) and a lower furnace body (2), characterized in that: The upper furnace body (1) and the lower furnace body (2) are respectively provided with cavities, the cavity on the upper furnace body (1) dividing the upper furnace body (1) into two inner and outer rings, the cavity of the upper furnace body (1) is provided with a middle gradually descending cooling mechanism (4) for gradually cooling the middle part of the boiler so that the temperature of the middle part of the boiler decreases in a gradient manner, the upper part of the middle cooling mechanism is provided with a top gradually descending cooling mechanism (5) for gradually cooling the upper part of the boiler, and the cavity of the lower furnace body (2) is provided with a bottom gradually descending cooling mechanism (6) for gradually increasing the cooling force on the bottom of the boiler so that the temperature of the bottom of the boiler decreases in a gradient manner; The middle gradually descending cooling mechanism (4) comprises two upper tubes (41) symmetrically fixedly connected to the hollow cavity of the upper furnace body (1); The bottom gradually descending cooling mechanism (6) comprises two lower pipes (61) which are symmetrically fixedly connected to the cavity in the lower furnace body (2); A docking connection mechanism (7) for connecting the middle gradually descending cooling mechanism (4) and the bottom gradually descending cooling mechanism (6) is provided between the upper tube (41) and the lower tube (61); the middle gradually descending cooling mechanism (4), the bottom gradually descending cooling mechanism (6) and the top gradually descending cooling mechanism (5) are coordinated and operated synchronously through the docking connection mechanism (7) so as to perform integrated step-by-step cooling of the boiler as a whole; The middle gradually descending cooling mechanism (4) also includes an electric sliding frame (42), and the two upper tubes (41) are equidistantly slidably connected to a plurality of electric sliding frames (42) on the outside, and the right part of the electric sliding frame (42) is fixedly connected to two rectangular tube heads (43) arranged with staggered horizontal heights, and the rectangular tube heads (43) on the same electric sliding frame (42) are commonly connected to a spiral ring tube (44) slidably arranged on the inner ring part of the upper furnace body (1), and the two upper tubes (41) are fixedly connected to guide rails (45) on the opposite sides, and a guide assembly (46) is commonly arranged between the rectangular tube heads (43) and the guide rails (45). The rectangular tube head (43) is provided with a No. 1 valve component (47), and a raised strip (49) for cooperating with the No. 1 valve component (47) is fixedly connected to the lower part of the side of the guide rail (45) away from the upper tube (41), and a plurality of communication holes (410) are equidistantly provided on the raised strip (49), the guide rail (45) and the upper tube (41), and a vertical rod is fixedly connected to the middle part between the upper and lower groove walls of the communication hole (410), and a No. 2 valve component (48) is provided in each communication hole (410), and the guide assembly (46) is used to cooperate with the No. 2 valve component (48) to trigger it to open so as to facilitate its cooperation with the No. 1 valve component (47); The bottom gradually descending cooling mechanism (6) further comprises a plurality of petal-shaped cooling tubes (62) which are fixedly connected in sequence from the outside to the inside in the cavity of the lower furnace body (2), each of the two ends of the petal-shaped cooling tube (62) being respectively connected to the two lower tubes (61) via a flexible tube section (63), and a control assembly (64) for sequentially controlling the petal-shaped cooling tubes (62) to pass cooling water is installed in the cavity below; The top gradually descending cooling mechanism (5) comprises two arc-shaped tubes (51) corresponding to the upper tube (41) and connected to the right part of the upper tube (41); the concave surfaces of the two arc-shaped tubes (51) are opposite to each other; the arc-shaped tubes (51) are in an inclined state with a side close to the upper tube (41) being higher and a side away from the upper tube (41) being lower; and a plurality of transverse tubes (52) are equidistantly connected between the two arc-shaped tubes (51).

2. The silicon ingot casting boiler cooling device according to claim 1, characterized in that: The valve member No. 1 (47) includes a tube (471) penetrating and connected to a wall plate on one side of the rectangular tube head (43) close to the upper tube (41), a strip plate (472) fixedly connected to the inner cavity of the tube (471), a push rod (473) slidingly connected to the strip plate (472) for cooperating with the raised strip (49), and a piston (474) fixedly connected to the end of the push rod (473), wherein the piston (474) is in contact with the inner cavity wall of the tube (471), and a push spring is fixedly connected between the push rod (473) and the strip plate (472).

3. The silicon ingot casting boiler cooling device according to claim 1, characterized in that: The guide assembly (46) comprises two longitudinal plates (461) symmetrically fixedly connected to the rectangular tube head (43) on one side close to the upper tube (41) and guide grooves (462) provided on the left and right sides of the guide rail (45); a guide bar (463) slidably connected to the guide groove (462) is fixedly connected to one side of the longitudinal plate (461) close to the guide rail (45).

4. A silicon ingot casting boiler cooling device according to claim 3, characterized in that: The second valve component (48) includes two through grooves (481) which are symmetrically opened on the raised strip (49) and connected to the connecting hole (410). The two through grooves (481) are slidably connected with a trapezoidal slide (482) for cooperating with the longitudinal plate (461). The two trapezoidal slides (482) are fixedly connected with valve plates (483) on opposite sides. The two valve plates (483) are staggered and have connecting grooves (484) opened thereon. A limit spring (485) is fixedly connected between the valve plate (483) and the relative trapezoidal slide (482).

5. The silicon ingot casting boiler cooling device according to claim 1, characterized in that: The docking connection mechanism (7) comprises a connection seat (71) which is connected to the upper ends of the two lower tubes (61); the connection seat (71) is symmetrically provided with insertion holes (72); a conical ring (73) is fixedly connected in the insertion hole (72); the lower end of the upper tube (41) is connected to an insertion tube (74); the lower end of the insertion tube (74) is fixedly connected to a sealing ring (75).

6. The silicon ingot casting boiler cooling device according to claim 1, characterized in that: The control assembly (64) comprises a bidirectional electric telescopic column (641) fixedly connected to the hollow cavity of the lower furnace body (2) via a fixing column, and the front and rear ends of the bidirectional electric telescopic column (641) are respectively fixedly connected to C-shaped pipe clamps (642) slidably sleeved on the outside of the flexible pipe section (63).

7. A silicon ingot casting boiler cooling method, characterized in that: The silicon ingot casting boiler cooling device according to claim 1 is used to complete the process, comprising the following steps: S1: Before melting the silicon material, the crucible is first placed in the lower furnace body (2), and then the upper furnace body (1) is covered on the lower furnace body (2) to connect and seal the two. While the upper furnace body (1) and the lower furnace body (2) are connected, the bottom gradually descending cooling mechanism (6) and the middle gradually descending cooling mechanism (4) are connected by driving the docking connection mechanism (7), and then the silicon material is heated to melt. S2: When the silicon material in the crucible is melted and enters the crystal growth stage, the external cooling fluid is first introduced into the bottom gradually descending cooling mechanism (6), and then the cooling fluid flows into the middle gradually descending cooling mechanism (4) through the docking connection mechanism (7), and finally flows into the top gradually descending cooling mechanism (5); S3: The temperature of the boiler is gradually reduced in stages by the cooperation of the bottom gradually descending cooling mechanism (6), the middle gradually descending cooling mechanism (4) and the top gradually descending cooling mechanism (5); S4: Finally, after cooling is complete, the ingot is inspected to ensure a uniform crystal structure.

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