Test seat

Abstract

The invention discloses a test seat, which comprises a base with a plurality of through holes, a plurality of elastic metal pieces arranged in the plurality of through holes, and a first conductive elastic sheet and a second conductive elastic sheet which are respectively positioned on a first surface and a second surface of the base, the elastic metal pieces are limited in the through holes through the first conductive elastic piece and the second conductive elastic piece, so that the base does not need to pre-press the elastic metal pieces, and the problem of warping of the base is avoided.

Description

Technical Field

[0001] The present invention relates to semiconductor testing technology, and in particular to a test socket. Background Art

[0002] Semiconductor packaging testing usually uses a test socket with multiple probes to carry a DUT such as a semiconductor package or chip. After each probe contacts a connection pad or solder ball of the DUT, a test signal can be transmitted to the DUT through each probe for testing.

[0003] As the package design size of the object to be tested gradually increases, the size of the test seat must also increase accordingly. However, the existing test seat usually sets multiple probes in a base with multiple through holes. Specifically, the probe includes a top plunger, a barrel, a bottom plunger, and a spring located in the barrel, wherein the through hole of the base is composed of apertures of different sizes and defines a shoulder, and the top plunger of the probe has a flange. Therefore, when the probe is set in the corresponding through hole and the base is set on a test substrate, the flange of the probe will press against the shoulder of the base for limiting, and pre-load the probe in the direction of the test substrate. At this time, the probe will give a force to the shoulder due to the elastic force, so the base of the test seat will bear the rebound force of multiple probes.

[0004] However, the test socket will be designed with a large package size because the mechanical strength of the base is insufficient and there is no force to suppress the elastic force of the probe, which will cause the center of the base to be stretched and deformed by the elastic force of the probe. Therefore, under the interaction between the material and structure of the base itself and the probe, the test socket will be severely warped, resulting in poor contact between the probe and the object under test during test applications. In addition, the object under test also has a warping problem due to the large-size packaging process. Therefore, the warping problem between the test socket and the object under test will seriously affect the contact effect between the object under test and the probe, resulting in problems such as reduced test efficiency and yield.

[0005] In view of the above problems, how to provide a test socket, especially one that can provide good contact between the object to be tested and the probe without pre-stressing the probe, and can also avoid warping of the test socket, has become a goal that people in this technical field are eager to pursue. Summary of the invention

[0006] In order to solve the problems of the above-mentioned prior art, the present invention discloses a test seat, comprising: a base, having a first surface and a second surface opposite to each other and a plurality of through holes connecting the first surface and the second surface; a plurality of elastic metal parts, respectively arranged in the corresponding through holes; a first conductive elastic sheet, located on the first surface; and a second conductive elastic sheet, located on the second surface, the first conductive elastic sheet and the second conductive elastic sheet limit each of the elastic metal parts in each of the through holes.

[0007] In one embodiment, each of the elastic metal pieces is not locked by the base, so that each of the elastic metal pieces does not generate pre-load.

[0008] In a specific embodiment, the through hole is a straight through hole.

[0009] In another embodiment, the elastic metal member is a power probe or a ground probe, and the power probe or the ground probe has a flange.

[0010] In another embodiment, the elastic metal piece is a straight probe and a signal probe.

[0011] In another embodiment, the elastic metal member has a top end and a bottom end opposite to each other, and the top end or the bottom end contacts the first conductive elastic sheet and is suitable for being immersed in the first conductive elastic sheet.

[0012] In another embodiment, the top end and the bottom end of the elastic metal member have convex structures.

[0013] In another embodiment, some of the plurality of elastic metal pieces are grounding probes, and the first conductive elastic sheet or the second conductive elastic sheet has a protrusion corresponding to the grounding probe, through which the grounding probe is deflected toward the hole wall of the through hole and contacts the hole wall.

[0014] In another embodiment, the first conductive elastic sheet and the second conductive elastic sheet respectively include a plurality of conductive elastic regions corresponding to the elastic metal members and a plurality of conductive particles distributed in the conductive elastic regions.

[0015] In another embodiment, the multiple elastic metal parts include at least one first elastic metal part and at least one second elastic metal part, and each of the first elastic metal parts and each of the second elastic metal parts have different needle lengths, and the first conductive elastic sheet and the second conductive elastic sheet contact each of the first elastic metal parts and each of the second elastic metal parts.

[0016] In another embodiment, the thickness of the first conductive elastic sheet is greater than that of the second conductive elastic sheet, and the top end of the elastic metal piece has a convex structure and contacts the first conductive elastic sheet, or the bottom end has a convex structure and contacts the first conductive elastic sheet.

[0017] The present invention also discloses a test seat, comprising: a base having a first surface and a second surface opposite to each other and a plurality of through holes connecting the first surface and the second surface; a first conductive elastic sheet located on the first surface; a second conductive elastic sheet fixed on the second surface of the base to define a receiving space with each of the through holes; and a plurality of elastic metal parts respectively located in the corresponding receiving spaces.

[0018] In one embodiment, each of the through holes is a straight through hole.

[0019] In another embodiment, a terminal end of each of the elastic metal members does not extend beyond the second surface.

[0020] In another embodiment, the elastic metal member has a top end and a bottom end opposite to each other, and the top end or the bottom end contacts the first conductive elastic sheet and is suitable for being immersed in the first conductive elastic sheet.

[0021] In another embodiment, the top end and the bottom end of the elastic metal member have convex structures.

[0022] In another embodiment, some of the plurality of elastic metal pieces are grounding probes, and the first conductive elastic sheet or the second conductive elastic sheet has a protrusion corresponding to the grounding probe, through which the grounding probe is deflected toward the hole wall of the through hole and contacts the hole wall.

[0023] In another embodiment, each of the elastic metal pieces is not clamped by the base, so that each of the elastic metal pieces does not generate pre-pressure.

[0024] In another embodiment, the first conductive elastic sheet is disposed on a frame of the base so as to have a spacing distance from the top end of each of the elastic metal members.

[0025] As can be seen from the above, the test socket of the present invention limits each elastic metal piece in each through hole through the first conductive elastic sheet and the second conductive elastic sheet. Therefore, the base does not need to pre-press each elastic metal piece, thereby achieving the purpose of avoiding base warping. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a three-dimensional structural exploded view of the test socket of the present invention.

[0027] Figure 2 for Figure 1 Section view along section line AA after the structures are combined.

[0028] Figure 3 It is a comparison diagram of reflection loss of the test socket of the present invention compared with other test sockets with only a single conductive elastic sheet.

[0029] Figure 4It is a partial schematic diagram of the test socket of the present invention.

[0030] Figure 5 It is a schematic structural diagram of another embodiment of the test socket of the present invention.

[0031] Figure 6 It is a structural schematic diagram of another embodiment of the test socket of the present invention.

[0032] Figure 7 It is a structural schematic diagram of the flexible substrate of the test socket of the present invention.

[0033] Figure 8 Used for the test socket of the present invention Figure 7 Schematic diagram of the structure of a flexible substrate.

[0034] Main component symbols

[0035] 1 Test socket

[0036] 11. Base

[0037] 111 First Surface

[0038] 112 Second Surface

[0039] 113 Through Hole

[0040] 114 Insulation layer

[0041] 115 Storage Space

[0042] 116 frame

[0043] 12 Elastic metal parts

[0044] 121 Flange

[0045] 122 Top

[0046] 123 bottom

[0047] 13. First conductive elastic sheet

[0048] 131,142 Conductive elastic region

[0049] 132,143 Conductive particles

[0050] 14. Second conductive elastic sheet

[0051] 141 Bump

[0052] 15 Flexible substrate

[0053] 151 Ground electrical contact pad

[0054] 152 Line Department

[0055] 153,154 Conductive adhesive layer

[0056] 16 Test Circuit Board

[0057] 31 Dashed line reflection loss curve

[0058] 32 Solid line reflection loss curve

[0059] AA Hatch

[0060] D1 First thickness

[0061] D2 Second thickness. DETAILED DESCRIPTION

[0062] The technical content of the present invention is described below through specific embodiments, and those skilled in the art can easily understand the advantages and effects of the present invention from the contents disclosed in this specification. However, the present invention can also be implemented or applied through other different specific embodiments.

[0063] Figure 1 This is a three-dimensional structural exploded view of the test socket of the present invention. Figure 2 for Figure 1 As shown in the figure, the test seat 1 of the present invention comprises a base 11, a plurality of elastic metal parts 12, a first conductive elastic sheet 13 and a second conductive elastic sheet 14. The detailed description of the test seat 1 of the present invention is as follows.

[0064] The base 11 is used for placing an object under test such as a semiconductor package, and has a first surface 111 and a second surface 112 opposite to each other and a plurality of through holes 113 connecting the first surface 111 and the second surface 112 , that is, the object under test is located on the first surface 111 .

[0065] Each of the elastic metal pieces 12 is disposed in each of the corresponding through holes 113. In one embodiment, the diameter of each of the elastic metal pieces 12 is smaller than the diameter of the upper or lower port of the corresponding through hole 113, so that each of the elastic metal pieces 12 can freely enter or move out of the upper or lower port of the through hole 113.

[0066] The first conductive elastic sheet 13 and the second conductive elastic sheet 14 are respectively located on the first surface 111 and the second surface 112 of the base 11 and contact each of the elastic metal parts 12 , wherein the first conductive elastic sheet 13 and the second conductive elastic sheet 14 limit each of the elastic metal parts 12 in each of the through holes 113 .

[0067] Accordingly, when the test seat 1 of the present invention enables each elastic metal piece 12 to be located in the corresponding through hole 113, the first conductive elastic sheet 13 and the second conductive elastic sheet 14 are respectively arranged on the first surface 111 and the second surface 112 of the base 11 to limit each elastic metal piece 12, thereby achieving the purpose of preventing the elastic metal piece 12 from moving out of the through hole 113.

[0068] like Figure 2 As shown, in this embodiment, each through hole 113 can be a straight through hole, for example, each through hole 113 is not provided with a shoulder (Shoulder) for pressing against each elastic metal piece 12 at its upper end or lower end, that is, the through hole 113 is not designed with different apertures, but is formed by a through hole that passes through the base 11 in a straight line. In other words, the through hole 113 has a single aperture. In another embodiment, the base 11 is made of a metal material, and an insulating layer 114 can be formed on the inner side wall of the through hole 113 to form a coaxial test seat with the elastic metal piece 12, wherein the insulating layer is also in the shape of a straight through hole.

[0069] In addition, each of the elastic metal parts 12 is not clamped by the base 11, so that each of the elastic metal parts 12 is not pre-loaded. Specifically, as mentioned above, each of the through holes 113 of the base 11 is a straight through hole or has a port aperture larger than the tube diameter length of each of the elastic metal parts 12, so that when the base 11 is fixed on a circuit board (Load Bard), there is no pre-load by pressing each of the through holes 113 against each of the elastic metal parts 12, that is, there is no pre-load force between each of the elastic metal parts 12 and the base 11 to press against each other, so the purpose of preventing the test seat 1 from warping can be achieved; in addition, due to the design of the straight through hole, it is not only easy to manufacture, but also can reduce the processing cost. In addition, since there is no need for pre-load, the stroke of the elastic metal part 12 of the present invention can be shortened when necessary, and the needle length can also be reduced, which is helpful to improve the high-frequency performance.

[0070] In one embodiment, part of the elastic metal member 12 may be a signal probe, and the signal probe is a straight probe without a flange (eg Figure 2 The elastic metal piece on the right side), accordingly, the through hole 113 through the base 11 is a straight through hole, and the elastic metal piece 12 is a straight probe that matches the straight through hole. Since the distance between the periphery of the elastic metal piece 12 and the straight through hole of the metal base 11 is maintained at a certain distance, the test seat 1 of the present invention can be suitable for application in a high-frequency test environment, and can also maintain the stability of the high-frequency impedance.

[0071] like Figure 3 , which is a comparison diagram of the reflection loss of the test socket of the present invention compared with other test sockets having only a single conductive elastic sheet. Figure 3In the figure, the dotted reflection loss curve 31 is the reflection curve of the test socket with only a single conductive elastic sheet, and the solid reflection loss curve 32 is the reflection curve of the test socket of the present invention with double conductive elastic sheets. As shown in the figure, the solid reflection loss curve 32 of the present invention is obviously better than the dotted reflection loss curve 31 in the high-frequency part (especially the frequency above 30 GHz), which proves that the test socket of the present invention is quite suitable for high-frequency testing under the structure of using straight through holes and straight probes and using two conductive elastic sheets to limit the probes.

[0072] In one embodiment, the arrangement of each elastic metal member 12 of the present invention can be upright (eg Figure 2 The elastic metal piece in the middle) or inverted (such as Figure 2 The elastic metal piece on the left side), wherein the elastic metal piece 12 can be, for example, a single-action needle, wherein, Figure 2 As shown in the middle elastic metal member 12, its top end has a convex structure, which is immersed in the first conductive elastic sheet 13 through the convex structure, thereby increasing the conductive contact area; in another embodiment, as shown in FIG. Figure 2 As shown in the elastic metal piece 12 on the left, by inverting the elastic metal piece 12, the larger top of the structure is located at the bottom, so that it is placed in a top-light and foot-heavy manner, and is immersed in the second conductive elastic sheet 14 with a convex structure. Accordingly, while increasing the conductive contact area, the purpose of avoiding the elastic metal piece 12 from wearing against the hole wall of the base 11 during testing can be achieved.

[0073] In another embodiment, part of the elastic metal member 12 may be a power probe or a ground probe, and the power probe (eg Figure 2 The spring metal piece on the left) or the ground probe (such as Figure 2 The elastic metal member in the middle may have a flange 121. Figure 4 As shown, it is a partial schematic diagram of the test socket of the present invention. When the elastic metal member 12 is a grounding probe, the first conductive elastic sheet 13 or the second conductive elastic sheet 14 can be made to have a protrusion 141 corresponding to the grounding probe (the second conductive elastic sheet 14 is taken as an example in the figure). Through the protrusion 141, the grounding probe is deflected toward the hole wall of the through hole 113 and contacts the hole wall to electrically connect to provide a good grounding effect.

[0074] Another example Figure 4 As shown, the elastic metal member 12 has a top end 122 and a bottom end 123 relative to each other, and the end of the top end 122 or the bottom end 123 contacts the first conductive elastic sheet 13 and is suitable for being immersed in the first conductive elastic sheet 13, thereby increasing the contact area between each elastic metal member 12 and the first conductive elastic sheet 13 to reduce the contact resistance, so that each elastic metal member 12 and the first conductive elastic sheet 13 have a low contact resistance.

[0075] Figure 5 FIG. 1 is a schematic diagram of the structure of another embodiment of the test socket of the present invention. In this embodiment, the top end 122 and the bottom end 123 of the elastic metal member 12 both have convex structures, so that the elastic metal member 12 is facilitated to be immersed in the first conductive elastic sheet 13 and the second conductive elastic sheet 14 respectively through the convex structures of the top end 122 and the bottom end 123, so as to shorten the electrical transmission path and reduce the resistance value. Therefore, compared with the elastic metal member 12 having only a convex structure at one end (e.g. Figure 2 For the elastic metal piece shown in the figure, the elastic metal piece with a convex structure at only one end requires a larger pressure measurement force to reach the preset resistance value, whereas the elastic metal piece 12 of the present embodiment does not require a larger pressure measurement force. In addition, since the through hole of the test socket of the present invention is a straight through hole design, the bottom end 123 of the elastic metal piece 12 does not need to be designed with a corresponding shrinkage as required by the existing probe, that is, the diameter of the bottom end 123 of the elastic metal piece 12 of the present embodiment can be enlarged, thereby increasing the contact area and reducing the signal loss.

[0076] For example Figure 4 As shown, the first conductive elastic sheet 13 and the second conductive elastic sheet 14 of the present invention respectively include a plurality of conductive elastic regions 131, 142 corresponding to each elastic metal member 12 and a plurality of conductive particles 132, 143 distributed in each of the conductive elastic regions 131, 142, so that when the top end 122 or the bottom end 123 of each elastic metal member 12 is immersed in each of the conductive elastic regions 131, 142, it contacts with each of the conductive particles 132, 143 and rubs against each other, so as to achieve the purpose of cleaning the top end 122 or the bottom end 123 of each elastic metal member 12 and maintaining a low contact resistance.

[0077] In another embodiment, the first thickness D1 of the first conductive elastic sheet 13 of the present invention is greater than the second thickness D2 of the second conductive elastic sheet 14, and the top end 122 of the elastic metal member 12 has a convex structure and contacts the first conductive elastic sheet 13, or the bottom end 123 has a convex structure and contacts the first conductive elastic sheet 13 (i.e. when placed upside down). Specifically, the first conductive elastic sheet 13 is designed to have a thickness of 0.2 mm, and the second conductive elastic sheet 14 has a thickness of 0.1 mm, so as to maintain the contact life of the conductive elastic sheet and reduce electrical loss, and even more, the convex structure of the elastic metal member 12 can be immersed in the first conductive elastic sheet 13 to a greater extent, so as to increase the contact area and reduce the contact resistance.

[0078] In addition, the multiple elastic metal parts of the present invention may include at least one first elastic metal part and at least one second elastic metal part, and each of the first elastic metal parts and each of the second elastic metal parts have different needle lengths. The first conductive elastic sheet and the second conductive elastic sheet contact each of the first elastic metal parts and each of the second elastic metal parts. That is, when the object to be tested is warped, the elastic metal parts 12 with different needle lengths are used to compensate for the problem that the object to be tested and the conductive elastic sheet and the elastic metal parts cannot effectively make electrical contact due to the warping, so as to improve their contact.

[0079] Figure 6 The structure diagram of another embodiment of the test seat of the present invention is shown in the figure. As shown in the figure, the structure of this embodiment is substantially the same as that of the previous embodiment, and the difference is that the second conductive elastic sheet 14 is fixed on the second surface 112 of the base 11 to define a receiving space 115 with the through hole 113, wherein the second conductive elastic sheet 14 can be bonded to the second surface 112 of the base 11 by means of adhesion or locking, and the first conductive elastic sheet 13 is arranged on the first surface 111 of the base 11 in a manner that is easy to disassemble. Therefore, when loading and unloading each of the elastic metal parts 12, only the first conductive elastic sheet 13 needs to be removed, and each of the elastic metal parts 12 can be removed from or placed in the corresponding through hole (i.e., the receiving space 115) from the first surface 111 of the base 11. Therefore, it is not necessary to remove the entire base before removing or placing the elastic metal parts from each through hole, as in the conventional base with through holes and shoulders, thereby improving the convenience of use. Furthermore, the elastic metal member 12 of the present invention can be replaced from the top (ie, the first surface 111 of the base 11 ), which can facilitate maintenance and simplify assembly.

[0080] Furthermore, the end (i.e., the top or bottom) of each elastic metal member 12 is prevented from protruding beyond the second surface 112. For example, when the top is placed upward, the bottom is prevented from protruding beyond the second surface 112 of the base 11. Therefore, when the test seat is locked on the test circuit board (Load Board) 16, the problem of the end of the elastic metal member 12 protruding beyond the second surface 112 and hitting the test circuit board 16 and being bent can be avoided, and the contact effect between the elastic metal member 12 and the conductive elastic sheet can be improved.

[0081] In addition, the base 11 may also have a frame seat 116, so that the first conductive elastic sheet 13 can be arranged on the base 11 using the frame seat 116, so that there is a spacing distance between the first conductive elastic sheet 13 and the top end (or convex structure) of each elastic metal piece 12, so that after the test of the object to be tested is completed and removed, the convex structure of the elastic metal piece 12 immersed in the first conductive elastic sheet 13 can be completely removed from the first conductive elastic sheet 13, thereby achieving the purpose of protecting the conductive elastic sheet and extending its service life.

[0082] Figure 7 is a schematic structural diagram of a flexible substrate of a test socket of the present invention, Figure 8 Used for the test socket of the present invention Figure 7 As shown in the figure, unlike the previous embodiment, the second conductive elastic sheet 14 is replaced by a flexible substrate 15 in this embodiment. The flexible substrate 15 includes a plurality of grounding electrical contact pads 151 and a plurality of circuit portions 152. The plurality of grounding electrical contact pads 151 and the plurality of circuit portions 152 can be formed by etching a copper foil substrate of a patterned flexible circuit board, for example, and the plurality of grounding electrical contact pads 151 can be selectively electrically connected to achieve a common ground effect as required. In addition, as Figure 8 As shown, conductive adhesive layers 153 and 154 may be formed on the upper and lower sides of the plurality of grounding electrical contact pads 151 , that is, one end of the elastic metal piece contacts the first conductive elastic sheet 13 and the other end contacts the conductive adhesive layer 153 .

[0083] The above embodiments are only illustrative and are not intended to limit the present invention. Those skilled in the art may modify and change the above embodiments without violating the spirit and scope of the present invention. Therefore, the scope of protection of the present invention is defined by the claims attached to the present invention, and as long as it does not affect the effect and implementation purpose of the present invention, it should be included in this disclosed technical content.

Claims

1. A test socket, comprising: A base having a first surface and a second surface opposite to each other and a plurality of through holes connecting the first surface and the second surface; A plurality of elastic metal parts are respectively disposed in the corresponding through holes; A first conductive elastic sheet is located on the first surface; as well as The second conductive elastic sheet is located on the second surface. The first conductive elastic sheet and the second conductive elastic sheet restrict each of the elastic metal pieces to be located in each of the through holes.

2. The test socket according to claim 1, wherein: Each of the elastic metal pieces is not clamped by the base, so that each of the elastic metal pieces does not generate pre-pressure.

3. The test socket according to claim 1, wherein: The through hole is a straight through hole.

4. The test socket according to claim 1, wherein: The elastic metal piece is a power probe or a ground probe, and the power probe or the ground probe has a flange.

5. The test socket according to claim 1, wherein: The elastic metal piece is a straight probe and a signal probe.

6. The test socket according to claim 1, wherein: The elastic metal piece has a top end and a bottom end opposite to each other, and the top end or the bottom end contacts the first conductive elastic sheet and is suitable for being immersed in the first conductive elastic sheet.

7. The test socket according to claim 6, wherein: The top end and the bottom end of the elastic metal piece have convex structures.

8. The test socket according to claim 1, wherein: Some of the multiple elastic metal pieces are grounding probes, and the first conductive elastic sheet or the second conductive elastic sheet has a convex point corresponding to the grounding probe, and the grounding probe is deflected toward the hole wall of the through hole and contacts the hole wall through the convex point.

9. The test socket according to claim 1, wherein: The first conductive elastic sheet and the second conductive elastic sheet respectively include a plurality of conductive elastic regions corresponding to the elastic metal pieces and a plurality of conductive particles distributed in the conductive elastic regions.

10. The test socket according to claim 1, wherein: The plurality of elastic metal pieces include at least one first elastic metal piece and at least one second elastic metal piece, and each of the first elastic metal piece and each of the second elastic metal piece has a different needle length, and the first conductive elastic sheet and the second conductive elastic sheet contact each of the first elastic metal piece and each of the second elastic metal piece.

11. The test socket according to claim 6, wherein: The thickness of the first conductive elastic sheet is greater than that of the second conductive elastic sheet, and the top end of the elastic metal piece has a convex structure and contacts the first conductive elastic sheet, or the bottom end has a convex structure and contacts the first conductive elastic sheet.

12. A test socket, comprising: A base having a first surface and a second surface opposite to each other and a plurality of through holes connecting the first surface and the second surface; A first conductive elastic sheet is located on the first surface; A second conductive elastic sheet is fixed on the second surface of the base to define a receiving space with each through hole; as well as A plurality of elastic metal pieces are respectively located in the corresponding accommodating spaces.

13. The test socket according to claim 12, wherein: Each of the through holes is a straight through hole.

14. The test socket according to claim 12, wherein: The end of each elastic metal piece does not exceed the second surface.

15. The test socket according to claim 12, wherein: The elastic metal piece has a top end and a bottom end opposite to each other, and the top end or the bottom end contacts the first conductive elastic sheet and is suitable for being immersed in the first conductive elastic sheet.

16. The test socket according to claim 15, wherein: The top end and the bottom end of the elastic metal piece have convex structures.

17. The test socket according to claim 12, wherein: Some of the multiple elastic metal pieces are grounding probes, and the first conductive elastic sheet or the second conductive elastic sheet has a convex point corresponding to the grounding probe, and the grounding probe is deflected toward the hole wall of the through hole and contacts the hole wall through the convex point.

18. The test socket according to claim 12, wherein: Each of the elastic metal pieces is not clamped by the base, so that each of the elastic metal pieces does not generate pre-pressure. 19 . The test socket as claimed in claim 12 , wherein the first conductive elastic sheet is disposed on a frame of the base so as to have a spacing distance from top ends of the elastic metal members.

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