Heavy metal vertical rotating target material hot inlaying binding method

Abstract

The invention discloses a hot inlaying binding method for a heavy metal vertical rotating target material, relates to the field of sputter coating, and aims to solve the problem of off-target or solder overflow during solder binding. The scheme comprises the following steps: S1, carrying out sand blasting on a back pipe: carrying out sand blasting on the outer diameter of the back pipe; s2, back tube electric arc is conducted, specifically, electric arc NiAl wires with the purity larger than or equal to 2N5 and the diameter of 1.6-2 mm are selected, the ratio of NiAl is 95 + / -1: 5 + / -1 wt%, the current is 80-120 A, and the voltage is 30-80 V; s3, target tube sandblasting: sandblasting the inner diameter of the target tube; an electric arc ZnSn wire with the purity larger than or equal to 3 N and the diameter ranging from 1.6 mm to 2 mm is selected, the ZnSn ratio is 90 + / -1: 10 + / -1 wt%, the current ranges from 60 A to 100 A, and the voltage ranges from 20 V to 40 V; s5, heating the target tube; and S6, hot inlaying of the back tube of the target tube: the back tube is moved into the target tube to be matched with the relative position of the target tube, and then the back tube is moved into a cooling water tank to be cooled and attached. According to the hot inlaying binding method for the heavy metal vertical rotating target material, the heavy metal vertical rotating target material can bear a target tube with large weight and does not fall off in the coating process.

Description

Technical Field

[0001] The invention relates to the field of sputtering coating, and more particularly to a method for hot-fitting and binding a heavy-duty metal vertical rotating target. Background Art

[0002] Conventional vertical metal targets are bound by In and In alloy solders. In and In alloy solders need to be melted at high temperature during the binding process and the target and back tube need to be assembled during the high temperature process. Conventional use of In and In alloy solders requires a large amount of usage, high cost and complex process. In and In alloy solders bind targets to heat during the sputtering process, causing In and In alloy solders to soften and be unable to withstand the weight of the heavy target itself, resulting in target derailment or solder overflow and damage to the sputtering chamber.

[0003] Therefore, it is necessary to provide a new binding method to solve the above problems. Summary of the invention

[0004] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a method for hot-fitting and binding of heavy-duty metal vertical rotating targets, in which a layer of NiAl wire is arced on the surface of the back tube to increase its surface roughness and enhance its bonding strength, and a layer of ZnSn wire is arced on the surface of the target tube. Because of its high melting point, it can withstand a temperature greater than that of In and In alloy solder, and has high bonding strength, so that the target tube with a large weight can be supported without falling off during the coating process.

[0005] The above technical objectives of the present invention are achieved through the following technical solutions: A method for hot-fitting and binding a heavy-duty metal vertical rotating target, comprising the following steps:

[0006] S1. Back tube sandblasting: Use sandblasting tape to fix the corresponding positions of the two ends of the back tube for sandblasting protection, and sandblast the outer diameter of the back tube;

[0007] S2, back tube arc: select arc NiAl wire with purity ≥2N5 and diameter 1.6-2mm, NiAl ratio 95±1:5±1wt%, current 80-120A, voltage 30-80V for arcing;

[0008] S3, target tube sandblasting: the inner and outer diameters of the target tube are machined to the corresponding size, and the inner diameter of the target tube is sandblasted;

[0009] S4, target tube arc: select arc ZnSn wire with purity ≥3N and diameter 1.6-2mm, ZnSn ratio 90±1:10±1wt%, current 60-100A, voltage 20-40V for arc;

[0010] S5. Target tube heating: heating temperature is 200-300℃;

[0011] S6. Hot fitting of target tube and back tube: Move the back tube into the corresponding position in the target tube to make it completely match the relative position of the target tube, and then move it into the cooling water tank for cooling and fitting.

[0012] The present invention is further configured as follows: in step S1, the material used for sandblasting is steel sand, the mesh number of the steel sand is 20-50 meshes, the sandblasting distance is 100-150cm, the sandblasting pressure is 5-10kgf, and the surface roughness after sandblasting is Ra3-6um.

[0013] The present invention is further configured as follows: in step S1, the back tube is made of stainless steel or Ti tube.

[0014] The present invention is further configured as follows: in step S2, during arcing, the arc gun is 80-100 mm away, the gun moves horizontally, the moving speed is 2-6 mm / s, the rotation speed of the back tube is 30-40 Hz, the surface roughness of the back tube after arcing is Ra10-15 um, and the arc layer thickness is 0.5-1 mm.

[0015] The present invention is further configured as follows: in step S3, the material used for sandblasting is silicon carbide or white corundum, the mesh size is 16-24 meshes, the sandblasting distance is 5-10 cm, the sandblasting pressure is 6-8 kgf, and the surface roughness after sandblasting is Ra5-8 um.

[0016] The present invention is further configured as follows: in step S3, the target tube is made of Nb, Mo, or NiCr.

[0017] The present invention is further configured as follows: in step S4, the arc gun is 80-100mm away from the arc, the gun moves horizontally, the moving speed is 2-6mm / s, the rotation speed of the back tube is 10-20HZ, the surface roughness of the back tube after the arc is Ra6-8um, and the arc layer thickness is 0.2-0.5mm.

[0018] The present invention is further configured as follows: in step S5, the design size of the target tube at room temperature before heating is less than the design size of 0.1-0.2 mm on one side, and the design size after expansion after heating is greater than the design size of 0.1-0.2 mm on one side.

[0019] The present invention is further configured as follows: in step S6, the cooling water temperature is 15-25° C., and the water tank capacity is 30-50 times the volume of the target tube. Due to the effect of thermal expansion and contraction, the size of the target tube is completely fitted with the back tube after being assembled with the back tube in a hot state under the rapid cooling of the cooling water.

[0020] In summary, the present invention has the following beneficial effects: the present invention uses a layer of NiAl wire to arc on the surface of the back tube to increase its surface roughness and enhance its bonding strength, and a layer of ZnSn wire is arced on the surface of the target tube. Because of its high melting point, it can withstand a temperature greater than that of In and In alloy solder, and has high bonding strength, so that it can withstand a target tube with a large weight without falling off during the coating process; in addition, the thermal expansion and contraction of the metal is used to make the size of the metal tightly fitted, which can avoid the disadvantages of the conventional binding method, and achieve the advantages of high binding rate, high bonding strength, reusable back tube, no need for binding solder, and low cost. DETAILED DESCRIPTION

[0021] The present invention is described in detail below in conjunction with embodiments.

[0022] The present invention provides a method for hot-fitting and binding a heavy-duty metal vertical rotating target, comprising the following steps:

[0023] S1. Back tube sandblasting: Use sandblasting tape to fix the corresponding positions of the two ports of the back tube for sandblasting protection, and sandblast the outer diameter of the back tube. The sand material used is steel sand, the sand mesh number is 20-50 mesh, the sandblasting distance is 100-150cm, the sandblasting pressure is 5-10kgf, and the surface roughness after sandblasting is Ra3-6um. The back tube material is stainless steel or Ti tube;

[0024] S2, back tube arc: select arc NiAl wire with purity ≥2N5 and diameter of 1.6-2mm, NiAl ratio of 95±1:5±1wt%, current 80-120A, voltage 30-80V, arc gun distance 80-100mm, gun movement mode is horizontal movement, movement speed is 2-6mm / s, back tube rotation speed is 30-40HZ, back tube surface roughness after arc is Ra10-15um, arc layer thickness is 0.5-1mm, NiAl wire is lower in price, higher in melting point, better in thermal conductivity, and can withstand higher temperature during coating process compared with conventional In and In alloy brazing solder;

[0025] S3, target tube sandblasting: the inner and outer diameters of the target tube are machined to the corresponding size, and the inner diameter of the target tube is sandblasted. The sand material used is silicon carbide or white corundum, the sand mesh number is 16-24 mesh, the sandblasting distance is 5-10cm, the sandblasting pressure is 6-8kgf, and the surface roughness after sandblasting is Ra5-8um. The target tube material is Nb, Mo, NiCr, etc.;

[0026] S4, target tube arc: select arc ZnSn wire with purity ≥3N and diameter of 1.6-2mm, ZnSn ratio of 90±1:10±1wt%, current 60-100A, voltage 20-40V, arc gun distance 80-100mm, gun movement mode is horizontal movement, movement speed is 2-6mm / s, back tube rotation speed is 10-20HZ, back tube surface roughness after arc is Ra6-8um, arc layer thickness is 0.2-0.5mm, ZnSn wire is lower in price, higher in melting point, better in thermal conductivity, and can withstand higher temperature during coating process compared with conventional In and In alloy brazing solder;

[0027] S5. Target tube heating: according to the thermal expansion coefficient of the target tube, the heating temperature is 200-300°C, the design size of the target tube at room temperature is < the design size 0.1-0.2mm on one side, and the design size after heating and expansion is > the design size 0.1-0.2mm on one side (calculated according to the design size inner diameter of the conventional target tube 133);

[0028] S6. Hot fitting of target tube and back tube: Move the back tube into the corresponding position in the target tube to make it completely match the relative position of the target tube, and then move it into the cooling water tank. The cooling water temperature is 15-25℃, and the water tank capacity is 30-50 times the volume of the target tube. Due to the effect of thermal expansion and contraction, the size of the target tube is completely fitted with the back tube after being assembled in a hot state under the rapid cooling of the cooling water.

[0029] The following is an explanation using specific implementation cases and comparative examples:

[0030] Embodiment 1:

[0031] S1. Back tube sandblasting: Use sandblasting tape to fix the corresponding positions of the two ports of the back tube for sandblasting protection, and sandblast the outer diameter of the back tube. The sand material used is steel sand, the sand mesh number is 20 mesh, the sandblasting distance is 100cm, the sandblasting pressure is 10kgf, and the surface roughness after sandblasting is Ra3um. The back tube material is stainless steel.

[0032] S2. Back tube arc: select arc NiAl wire with purity 2N5 and diameter of 1.6mm, NiAl ratio of 94:6wt%, current 80A, voltage 30V, arc gun distance 80mm, gun movement mode is horizontal movement, movement speed is 2mm / s, back tube rotation speed is 30HZ, back tube surface roughness after arcing is Ra10um, arc layer thickness is 0.5mm.

[0033] S3. Target tube sandblasting: The inner and outer diameters of the target tube are machined to the corresponding sizes, and the inner diameter of the target tube is sandblasted. The sand material used is silicon carbide, the sand mesh number is 24 mesh, the sandblasting distance is 5 cm, the sandblasting pressure is 6 kgf, and the surface roughness after sandblasting is Ra8um. The target tube material is Mo.

[0034] S4, target tube arc: select arc ZnSn wire with purity 3N and diameter 1.6mm, ZnSn ratio is 89:11wt%, current 60A, voltage 20V, arc gun distance 80mm, gun movement mode is horizontal movement, movement speed is 2mm / s, back tube rotation speed is 10HZ, back tube surface roughness after arcing is Ra6um, arc layer thickness is 0.2mm.

[0035] S5. Target tube heating: According to the thermal expansion coefficient of the target tube, the heating temperature is 200°C, and the design size of the target tube at room temperature is < the design size on one side by 0.1-0.2mm, so that the design size after heating and expansion is > the design size on one side by 0.1-0.2mm (calculated according to the design size inner diameter of the conventional target tube 133).

[0036] S6. Hot fitting of target tube and back tube: Move the back tube into the corresponding position in the target tube to make it completely match the relative position of the target tube, and then move it into the cooling water tank. The cooling water temperature is 15℃ and the water tank capacity is 30 times the volume of the target tube. Due to the effect of thermal expansion and contraction, the size of the target tube is completely fitted with the back tube after being assembled with it in a hot state under the rapid cooling of the cooling water.

[0037] Embodiment 2:

[0038] S1. Back tube sandblasting: Use sandblasting tape to fix the corresponding positions of the two ports of the back tube for sandblasting protection, and sandblast the outer diameter of the back tube. The sand material used is steel sand, the sand mesh number is 35 mesh, the sandblasting distance is 150cm, the sandblasting pressure is 5kgf, and the surface roughness after sandblasting is Ra4um. The back tube material is stainless steel.

[0039] S2. Back tube arc: select arc NiAl wire with purity 3N and diameter 1.8mm, NiAl ratio is 95:5wt%, current is 100A, voltage is 60V, arc gun distance is 90mm, gun moves horizontally, moving speed is 4mm / s, back tube rotation speed is 35HZ, back tube surface roughness after arcing is Ra12um, arc layer thickness is 0.8mm.

[0040] S3. Target tube sandblasting: The inner and outer diameters of the target tube are machined to the corresponding sizes, and the inner diameter of the target tube is sandblasted. The sand material used is silicon carbide, the sand mesh number is 24 mesh, the sandblasting distance is 10 cm, the sandblasting pressure is 8 kgf, and the surface roughness after sandblasting is Ra7um. The target tube material is NiCr.

[0041] S4, target tube arc: select arc ZnSn wire with purity 3N and diameter 1.8mm, ZnSn ratio is 90:10wt%, current is 80A, voltage is 30V, arc gun distance is 90mm, the gun moves horizontally, the moving speed is 4mm / s, the rotation speed of the back tube is 15HZ, the surface roughness of the back tube after arcing is Ra8um, and the arc layer thickness is 0.5mm.

[0042] S5. Target tube heating: According to the thermal expansion coefficient of the target tube, the heating temperature is 250°C, and the design size of the target tube at room temperature is < the design size on one side by 0.1-0.2mm, so that the design size after heating and expansion is > the design size on one side by 0.1-0.2mm (calculated according to the design size inner diameter of the conventional target tube 133).

[0043] S6. Hot fitting of target tube and back tube: Move the back tube into the corresponding position in the target tube to make it completely match the relative position of the target tube, and then move it into the cooling water tank. The cooling water temperature is 25℃ and the water tank capacity is 50 times the volume of the target tube. Due to the effect of thermal expansion and contraction, the size of the target tube is completely fitted with the back tube after being assembled in a hot state under the rapid cooling of the cooling water.

[0044] Embodiment 3:

[0045] S1. Back tube sandblasting: Use sandblasting tape to fix the corresponding positions of the two ends of the back tube for sandblasting protection, and sandblast the outer diameter of the back tube. The sand material used is steel sand, the sand mesh number is 50 mesh, the sandblasting distance is 130cm, the sandblasting pressure is 8kgf, and the surface roughness after sandblasting is Ra6um. The back tube material is Ti tube.

[0046] S2. Back tube arc: select arc NiAl wire with purity 2N5 and diameter of 2mm, NiAl ratio of 96:4wt%, current 120A, voltage 80V, arc gun distance 100mm, gun movement mode is horizontal movement, movement speed is 6mm / s, back tube rotation speed is 40HZ, back tube surface roughness after arcing is Ra15um, arc layer thickness is 1mm.

[0047] S3. Target tube sandblasting: The inner and outer diameters of the target tube are machined to the corresponding sizes, and the inner diameter of the target tube is sandblasted. The sand material used is white corundum, the sand mesh number is 16 mesh, the sandblasting distance is 8 cm, the sandblasting pressure is 7 kgf, and the surface roughness after sandblasting is Ra6um. The target tube material is Nb.

[0048] S4, target tube arc: select arc ZnSn wire with purity 3N and diameter 2mm, ZnSn ratio is 91:9wt%, current 100A, voltage 40V, arc gun distance 100mm, gun movement mode is horizontal movement, movement speed is 6mm / s, back tube rotation speed is 20HZ, back tube surface roughness after arcing is Ra7um, arc layer thickness is 0.35mm.

[0049] S5. Target tube heating: According to the thermal expansion coefficient of the target tube, the heating temperature is 300°C, and the design size of the target tube at room temperature is < the design size on one side by 0.1-0.2mm, so that the design size after heating and expansion is > the design size on one side by 0.1-0.2mm (calculated according to the design size inner diameter of the conventional target tube 133).

[0050] S6. Hot fitting of target tube and back tube: Move the back tube into the corresponding position in the target tube to make it completely match the relative position of the target tube, and then move it into the cooling water tank. The cooling water temperature is 20℃ and the water tank capacity is 40 times the volume of the target tube. Due to the effect of thermal expansion and contraction, the size of the target tube is completely fitted with the back tube after being assembled in a hot state under the rapid cooling of the cooling water.

[0051] Comparative Example 1

[0052] S1. Sandblasting: Clean the inner wall of the target tube, cover both ends of the back tube with sandblasting tape for sandblasting protection, and sandblast the outer diameter of the back tube. The sand material used is white corundum sand, and the model of white corundum sand can be selected as 36#. The manual sandblasting distance is 25cm and the sandblasting pressure is 6kgf.

[0053] S2. Target tube heating: Use an external heating system to heat the target tube at a temperature of 230°C. The heating time is 1.5 hours before metallization.

[0054] S3. Back tube heating: Use the internal heating system to heat the back tube at a temperature of 200°C for 1 hour before metallization.

[0055] S4. Binding: Insert the Mo target tube into the back tube, put a 0.6mm thick gap sheet between every two sections of the target tube, and then insert the entire target tube into the back tube in turn.

[0056] S5. Injection: The amount of indium injected is 2.5 kg / m3, and the heating time after indium injection is 0.5 h.

[0057] S6. Cooling: Turn off the heating equipment, and let the target cool down slowly and naturally to room temperature.

[0058] S7, polishing and grinding: remove the heating device and the fixing device, remove the gap sheets between the target tubes, clean the residual solder in the gap, and polish and grind the surface with 400-mesh sandpaper to obtain the bound Mo target tube.

[0059] Comparative Example 2

[0060] S1. Sandblasting: Clean the inner wall of the target tube, cover both ends of the back tube with sandblasting tape for sandblasting protection, and sandblast the outer diameter of the back tube. The sand material used is white corundum sand, and the model of white corundum sand can be selected as 16#. The manual sandblasting distance is 20cm and the sandblasting pressure is 9kgf.

[0061] S2. Target tube heating: Use an external heating system to heat the target tube at a temperature of 230°C. The heating time is 1.5 hours before metallization.

[0062] S3. Back tube heating: Use the internal heating system to heat the back tube at a temperature of 200°C for 1 hour before metallization.

[0063] S4. Binding: Insert the Mo target tube into the back tube, put a 0.6mm thick gap sheet between every two sections of the target tube, and then insert the entire target tube into the back tube in turn.

[0064] S5. Injection: The amount of InSn injected is 2.8 kg / m, and the ratio of InSn alloy is 90 / 10 wt%.

[0065] S6. Cooling: Turn off the heating equipment, and let the target cool down slowly and naturally to room temperature.

[0066] S7, polishing and grinding: remove the heating device and the fixing device, remove the gap sheets between the target tubes, clean the residual solder in the gap, and polish and grind the surface with 400-mesh sandpaper to obtain the bound Mo target tube.

[0067] At the same time, the following data are obtained by comparing the embodiment and the comparative example:

[0068]

[0069] Compared with the prior art, the present invention provides a heavy-duty metal vertical rotating target material hot-fitting and binding method with a high binding rate, which can withstand a heavy target tube without falling off during the coating process; in addition, the thermal expansion and contraction of the metal is utilized to make the size of the target tightly fitted.

[0070] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A method for hot-fitting and binding heavy metal vertical rotating targets, characterized in that: The following steps are involved: S1. Back tube sandblasting: Use sandblasting tape to fix the corresponding positions of the two ends of the back tube for sandblasting protection, and sandblast the outer diameter of the back tube; S2, back tube arc: select arc NiAl wire with purity ≥2N5 and diameter 1.6-2mm, NiAl ratio 95±1:5±1wt%, current 80-120A, voltage 30-80V for arcing; S3, target tube sandblasting: the inner and outer diameters of the target tube are machined to the corresponding size, and the inner diameter of the target tube is sandblasted; S4, target tube arc: select arc ZnSn wire with purity ≥3N and diameter 1.6-2mm, ZnSn ratio 90±1:10±1wt%, current 60-100A, voltage 20-40V for arc; S5. Target tube heating: heating temperature is 200-300℃; S6. Hot fitting of target tube and back tube: Move the back tube into the corresponding position in the target tube to make it completely match the relative position of the target tube, and then move it into the cooling water tank for cooling and fitting.

2. A heavy metal vertical rotary target hot-fitting and binding method according to claim 1, characterized in that: In step S1, the material used for sandblasting is steel sand, the mesh number of the steel sand is 20-50 mesh, the sandblasting distance is 100-150cm, the sandblasting pressure is 5-10kgf, and the surface roughness after sandblasting is Ra3-6um.

3. A method for hot-fitting and binding heavy metal vertical rotary targets according to claim 1 or 2, characterized in that: In step S1, the back tube is made of stainless steel or Ti tube.

4. A heavy metal vertical rotary target hot-fitting and binding method according to claim 1, characterized in that: In step S2, when the arc is generated, the arc gun is 80-100mm away, the gun moves horizontally, the moving speed is 2-6mm / s, the rotation speed of the back tube is 30-40HZ, the surface roughness of the back tube after the arc is Ra10-15um, and the arc layer thickness is 0.5-1mm.

5. A heavy metal vertical rotary target hot-fitting and binding method according to claim 1, characterized in that: In step S3, the material used for sandblasting is silicon carbide or white corundum, the mesh size is 16-24 mesh, the sandblasting distance is 5-10 cm, the sandblasting pressure is 6-8 kgf, and the surface roughness after sandblasting is Ra5-8 um.

6. A method for hot-fitting and binding heavy metal vertical rotary targets according to claim 1 or 5, characterized in that: In step S3, the target tube is made of Nb, Mo, or NiCr.

7. A heavy metal vertical rotary target hot-fitting and binding method according to claim 1, characterized in that: In step S4, the arc gun is 80-100mm away from the arc, the gun moves horizontally, the moving speed is 2-6mm / s, the rotation speed of the back tube is 10-20HZ, the surface roughness of the back tube after the arc is Ra6-8um, and the arc layer thickness is 0.2-0.5mm.

8. A method for hot-fitting and binding heavy metal vertical rotary targets according to claim 7, characterized in that: In step S5, the design size of the target tube at room temperature before heating is less than the design size on one side by 0.1-0.2 mm, and the design size after expansion after heating is greater than the design size on one side by 0.1-0.2 mm.

9. A heavy metal vertical rotary target hot-fitting and binding method according to claim 1, characterized in that: In step S6, the cooling water temperature is 15-25°C, and the water tank capacity is 30-50 times the volume of the target tube. Due to the effect of thermal expansion and contraction, the target tube size is completely fitted with the back tube after being assembled with the back tube in a hot state under the rapid cooling of the cooling water.

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