Three-dimensional rotating tool suitable for surface deposition process

Abstract

The invention relates to the technical field of surface coating deposition equipment, in particular to a three-dimensional rotating tool suitable for a surface deposition process, which comprises a reversing frame and a satellite turntable, the reversing frame is rotatably mounted on deposition equipment, a reversing frame rotation driving device is arranged on the deposition equipment, and the satellite turntable is mounted on the reversing frame through a hanging rod. Products to be deposited are installed on the satellite rotating discs, the multiple layers of satellite rotating discs are fixed to the hanging rods, the hanging rods are rotatably installed on the reversing frame, the reversing frame is provided with a hanging rod rotating transmission device, and the hanging rod rotating transmission device transmits the rotating motion of the reversing frame to the hanging rods so that the hanging rods can rotate on the reversing frame. According to the three-dimensional rotating tool for the surface deposition process, the problem of film layer uniformity existing when a traditional film coating jig is used for coping with a three-dimensional structure product is solved, and the production efficiency, adaptability and stability are improved.

Description

Technical Field

[0001] The invention relates to the technical field of surface coating deposition equipment, and in particular to a three-dimensional rotating tool suitable for a surface deposition process. Background Art

[0002] In the current surface deposition process, especially for precision parts in IC and 3C equipment, the requirements for surface quality and physical and chemical properties are increasing. These requirements are often achieved through surface coating technology, in which the thickness and uniformity of the film layer are key indicators, and often need to reach nanometer or micron level accuracy. However, traditional coating jigs are difficult to ensure high-precision uniformity of the film layer when dealing with three-dimensional structure products, which has become an important factor restricting product quality and production efficiency.

[0003] Specifically, most traditional coating jigs use simple rotation or translation movements, which are difficult to adapt to the complex morphology of the surface of three-dimensional structural products. This limitation leads to the fact that some areas on the surface of the product may not be fully coated during the coating process, or the coating thickness is uneven, thus affecting the overall performance and service life of the product.

[0004] Therefore, the industry urgently needs a three-dimensional rotating tooling that can be suitable for surface deposition processes to solve the problem of film uniformity that exists in traditional coating fixtures when dealing with three-dimensional structure products. Summary of the invention

[0005] In order to solve the above problems, the present invention provides a three-dimensional rotating tool suitable for surface deposition process. The three-dimensional rotating tool suitable for surface deposition process solves the problem of film uniformity existing in traditional coating jigs when dealing with three-dimensional structure products, thereby improving production efficiency, adaptability and stability.

[0006] The technical solution of the present invention is as follows: A three-dimensional rotating tool suitable for a surface deposition process comprises a rotating frame and a satellite turntable, wherein the rotating frame is rotatably mounted on a deposition device, a rotating frame rotating driving device is arranged on the deposition device, the satellite turntable is mounted on the rotating frame through a hanging rod, a product to be deposited is mounted on the satellite turntable, a plurality of layers of satellite turntables are fixed on the hanging rod, a plurality of hanging rods are rotatably mounted on the rotating frame, a hanging rod rotating transmission device is arranged on the rotating frame, and the hanging rod rotating transmission device transmits the rotating motion of the rotating frame to the hanging rod so that the hanging rod rotates on the rotating frame.

[0007] The slewing frame is composed of a main gear turntable, a support rod and a wheel disc. The support rod connects the main gear turntable at the bottom and the wheel disc at the top into one.

[0008] The rotary frame rotation driving device comprises a power device and a transmission gear. The power device is fixed on the deposition equipment. The transmission gear is fixedly installed on the output shaft of the power device. The transmission gear is meshed with the main gear turntable.

[0009] A spur gear is arranged between the transmission gear and the main gear rotating disc.

[0010] The hanging rod rotation transmission device includes an auxiliary gear plate, a driven self-rotating gear and a self-rotating connecting base. The auxiliary gear plate is fixedly installed on the deposition equipment, the rotating frame is installed on the auxiliary gear plate, a main gear plate bearing is installed between the auxiliary gear plate and the main gear rotating plate of the rotating frame, a driven self-rotating gear meshing with the auxiliary gear plate is installed on the main gear rotating plate, the driven self-rotating gear is installed on the main gear rotating plate through the self-rotating connecting base, the self-rotating connecting base is rotatably installed on the main gear rotating plate, the driven self-rotating gear is fixedly connected to the self-rotating connecting base, and the two ends of the hanging rod are detachably installed on the self-rotating connecting base and the wheel disc respectively.

[0011] A lining plate is arranged on the rotary frame to prevent the rotary drive device of the rotary frame and the hanging rod rotation transmission device from over-plating and the workpiece from falling off.

[0012] The satellite turntable includes a satellite turntable main gear, a satellite turntable driven wheel, a product carrier and a satellite turntable base. The satellite turntable base is fixedly connected to the hanging rod. The satellite turntable main gear is fixedly connected to the satellite turntable base. A plurality of satellite turntable driven wheels meshing with the satellite turntable main gear are rotatably mounted on the satellite turntable base. A product carrier is arranged on the satellite turntable driven wheel, and the product is mounted on the product carrier.

[0013] The satellite turntable driven wheel is installed on the satellite turntable base through the satellite turntable driven bearing.

[0014] The satellite turntable also includes a satellite turntable shielding cover, which is fixedly connected to the hanging rod and arranged above the product carrier.

[0015] The beneficial effects of the present invention are: 1. The present invention discloses a three-dimensional rotating tool suitable for surface deposition process, which realizes high-precision uniform coating: traditional coating jigs often use simple rotation or translation motion, which is difficult to adapt to the complex morphology of the surface of three-dimensional structure products, resulting in poor coating uniformity; while the three-dimensional rotating tool realizes all-round and multi-angle coating of the product surface through the rotation motion of the rotating frame and the rotation motion of the hanging rod, as well as the further rotation of the satellite turntable, thereby effectively improving the uniformity of the coating and meeting the requirements of nanometer or micron level precision.

[0016] 2. The present invention discloses a three-dimensional rotating tool suitable for a surface deposition process, which improves production efficiency: since the tool can process multiple products at the same time and each product can be evenly coated, the production efficiency can be significantly improved; in addition, the design of the tool is also convenient for quick replacement and adjustment, further shortening the production cycle.

[0017] 3. The present invention discloses a three-dimensional rotary tool suitable for surface deposition process, which has strong adaptability: the structural design of the tool is flexible and can be adjusted according to the shape and size of different products. By changing the number and layout of satellite turntables and the design of product carriers, it can meet the coating requirements of various three-dimensional structure products.

[0018] 4. The present invention discloses a three-dimensional rotating tool suitable for surface deposition process, which can prevent overflow plating and workpiece falling: the lining plate arranged on the rotating frame can effectively prevent the coating material from splashing onto the rotating drive device of the rotating frame and the hanging rod rotating transmission device during rotation, causing overflow plating problems; at the same time, the structural design of the tool also ensures the stability of the product during the coating process and prevents the risk of workpiece falling. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] By reading the detailed description of the preferred embodiment below, the scheme and advantages of the present application will become clear to those skilled in the art. The accompanying drawings are only for the purpose of illustrating the preferred embodiment and are not to be considered as limiting the present invention.

[0020] In the attached picture: Figure 1 It is a schematic diagram of a three-dimensional exploded structure of a three-dimensional rotary tooling suitable for a surface deposition process according to an embodiment of the present invention; Figure 2 This is a schematic diagram of a product loading process of a three-dimensional rotary tooling suitable for a surface deposition process according to an embodiment of the present invention; Figure 3 It is a schematic diagram of the three-dimensional structure of a three-dimensional rotary tooling suitable for a surface deposition process after product loading according to an embodiment of the present invention; Figure 4 It is a partially enlarged three-dimensional structural schematic diagram of a satellite turntable after product loading of a three-dimensional rotary tooling suitable for a surface deposition process according to an embodiment of the present invention; The components represented by the reference numerals in the figure are: The present invention includes: 1. a power device, 2. a transmission gear, 3. a guide gear, 4. a main gear turntable, 5. an auxiliary gear plate, 6. a main gear plate bearing, 7. a driven self-rotating gear, 8. a self-rotating connecting base, 9. a lining plate, 10. a support rod, 11. a wheel plate, 12. a hanging rod, 13. a satellite turntable, 14. a satellite turntable main gear, 15. a satellite turntable driven wheel, 16. a satellite turntable driven bearing, 17. a product carrier, 18. a satellite turntable shielding cover, 19. a satellite turntable base, and 20. a product. DETAILED DESCRIPTION Example

[0021] like Figures 1 to 4 As shown, the three-dimensional rotating tooling suitable for surface deposition process includes a rotating frame and one or more satellite turntables 13.

[0022] The slewing frame is the main structure of the whole tooling, which is rotatably mounted on the deposition equipment. In order to realize the rotation of the slewing frame, a slewing frame rotation drive device is provided on the deposition equipment. The drive device is composed of a power device 1, a transmission gear 2 and an optional guide gear 3. The power device 1 can be selected as a motor, which is fixed on the deposition equipment, and the transmission gear 2 is fixedly mounted on its output shaft. The transmission gear 2 is engaged with the main gear turntable 4 of the slewing frame, thereby driving the slewing frame to rotate. In order to enhance the stability and accuracy of the transmission, a guide gear 3 can be provided between the transmission gear 2 and the main gear turntable 4.

[0023] The slewing frame is composed of a main gear turntable 4, a support rod 10 and a wheel disc 11. The support rod 10 firmly connects the main gear turntable 4 at the bottom and the wheel disc 11 at the top into one, forming a stable and reliable structure.

[0024] On the rotating frame, a plurality of satellite turntables 13 are installed by hanging rods 12. The number and layout of hanging rods 12 can be adjusted according to actual needs. In order to realize the rotation of hanging rods 12 on the rotating frame, a set of hanging rod rotation transmission device is also set on the rotating frame.

[0025] The hanging rod rotation transmission device is composed of an auxiliary gear plate 5, a driven self-rotating gear 7, a self-rotating connection base 8 and a main gear plate bearing 6. The auxiliary gear plate 5 is fixedly mounted on the deposition device, and the rotating frame is mounted on the auxiliary gear plate 5. The main gear plate bearing 6 is installed between the auxiliary gear plate 5 and the main gear turntable 4 of the rotating frame to ensure that the main gear turntable 4 can rotate smoothly. On the main gear turntable 4, a driven self-rotating gear 7 meshing with the auxiliary gear plate 5 is installed. The driven self-rotating gear 7 is installed on the main gear turntable 4 through the self-rotating connection base 8, and the self-rotating connection base 8 is rotatably mounted on the main gear turntable 4, thereby allowing the driven self-rotating gear 7 to rotate relative to the main gear turntable 4. The two ends of the hanging rod 12 are detachably mounted on the self-rotating connection base 8 and the wheel disc 11, respectively, so as to realize the self-rotation of the hanging rod 12 on the rotating frame.

[0026] In order to prevent the rotating drive device of the rotating frame and the rotating transmission device of the hanging rod from over-plating and the workpiece from falling off during the coating process, a lining plate 9 is also provided on the rotating frame. The lining plate 9 can effectively prevent the coating material from sputtering to the non-coating area, and at the same time provide additional support and protection to ensure the stability and safety of the workpiece.

[0027] Each satellite turntable 13 includes a satellite turntable main gear 14, a satellite turntable driven wheel 15, a product carrier 17 and a satellite turntable base 19. The satellite turntable base 19 is fixedly connected to the hanging rod 12, and the satellite turntable main gear 14 is fixedly connected to the satellite turntable base 19. On the satellite turntable base 19, a plurality of satellite turntable driven wheels 15 meshing with the satellite turntable main gear 14 are rotatably mounted through satellite turntable driven bearings 16. On each satellite turntable driven wheel 15, a product carrier 17 is provided for mounting the product 20 to be deposited.

[0028] In addition, in order to further improve the stability and safety of the coating process, the satellite turntable 13 also includes a satellite turntable shielding cover 18. The satellite turntable shielding cover 18 is fixedly connected to the hanging rod 12 and is arranged above the product carrier 17 to prevent the coating material from splashing to the non-coating area and provide additional protection.

[0029] During operation, the power device 1 drives the transmission gear 2 to rotate, thereby driving the main gear turntable 4 of the turntable to rotate. Through the action of the hanging rod rotating the transmission device, the hanging rod 12 rotates on the turntable. At the same time, the satellite turntable driven wheel 15 on the satellite turntable 13 also rotates under the drive of the satellite turntable main gear 14, thereby realizing three-dimensional rotary coating of the product 20. This structure and working principle enable the three-dimensional rotary tooling to achieve high-precision and uniform coating of three-dimensional structure products, thereby improving the coating quality and production efficiency. Example

[0030] like Figures 1 to 4As shown, a three-dimensional rotating tooling suitable for surface deposition process for obtaining precision coating or high uniformity coating type workpiece by physical or chemical vapor deposition method and spraying process method includes a power device 1, a transmission gear 2, a guide gear 3, a main gear turntable 4, a main gear disk bearing 6, an auxiliary gear disk 5, a driven self-rotating gear 7, a self-rotating connecting base 8, a lining plate 9, a support rod 10, a rotating frame 11, a spindle hanging rod 12 (with scale), a satellite turntable 13, a satellite turntable main gear 14, a satellite turntable driven wheel 15, a satellite turntable driven bearing 16, a product carrier 17, a satellite turntable shielding cover 18, and a satellite turntable base 19.

[0031] The power device 1 (motor) at the bottom of the system provides a power source for the entire rotating system by meshing with the transmission gear 2 and the main gear turntable 4, and can realize the clockwise or counterclockwise revolution of the system with the main gear turntable 4 as the axis, and the auxiliary gear plate 5 fixed to the main body of the equipment meshes with the 28 groups of driven self-rotating gears 7 groups on the rotating main gear turntable 4 to realize the revolution of the main turntable and the rotation of the spindle hanging rod 12 at the same time; at the same time, with the rotation of the spindle, the multi-layer satellite turntable fixed from top to bottom by the spindle hanging rod 12 will be driven to rotate at the same frequency, and the internal structure of the shielding cover of the satellite turntable is divided into a central main gear plate and a circle of meshing sub-gear plates. During the rotation of the tooling system, a circle of sub-gear plates on the satellite turntable will generate a self-rotating motion around the flying disc. The three-dimensional rotating model system is realized in which the Spindle rod 12 revolves around the center of the main turntable, the Spindle rod 12 rotates at the same frequency as the satellite turntable, and the micro-gear turntable on the satellite turntable rotates with the longitudinal center axis of the Spindle rod 12 as the center. The micro-gear turntables around each satellite turntable can be combined with a variety of fixtures to meet the clamping needs of various parts. In addition, the three-dimensional tooling structure is exquisitely and reasonably designed. No matter whether the ion source or the sputtering source is in the inner or outer ring of the tooling, it can realize 360° facing the sputtering direction without dead angles of the product on the conventional revolution + rotation two-dimensional rotating structure, complete the film deposition more evenly, achieve a more ideal film uniform distribution effect, and reduce the product spacing to effectively increase the overall loading quantity.

[0032] The three-dimensional rotating tooling suitable for surface deposition process is a 360° multi-axis orbital and self-rotation rotating structure, which realizes three-axis simultaneous rotation in the tooling system. The tooling operation process can be compared to a model of a star-planet-satellite revolving and self-installing. Relative to the cathode target material or deposition material providing source, the main turntable provides rotation relative to the coating material source to meet the requirement that all products in all directions of the circumference can pass through the target source, and a circle of flywheel turntables carried by the main turntable rotates simultaneously with the rotation (similar to the planets revolving around the stars and rotating at the same time), and the rotating longitudinal hanging rod provided by the flywheel turntable carries a satellite turntable that rotates at the same frequency as the flywheel turntable, and the satellite turntable carries a circle of fixed product carriers 17, which rotate relative to the center of the satellite turntable (similar to the satellite revolving around the planet and rotating at the same time), thereby driving the products on the carrier to achieve deposition without dead angles relative to the target source, ensuring that a more uniform deposition film thickness can be obtained.

[0033] The three-dimensional rotary tooling suitable for surface deposition process is driven by the equipment motor, with a set of fixed gear discs and a set of driven gear discs at the bottom. The driven gear disc is arranged and fixed with 28 sets of driven self-rotating wheel discs in one circle of rotation. The driven gear disc is driven by the motor and the transmission gear 2, and can realize color-adjustable clockwise or counterclockwise rotation. During the rotation of the main gear disc, the 28 sets of self-rotating wheel discs are meshed with the fixed fixed gear disc to produce reverse rotation. The main gear cooperates with four support rods 10 with an interval of 90 degrees and the wheel disc on the upper part of the chamber to form the entire rotating frame 11. Between the rotating frames 11, 28 sets of spindle hanging rods 12 can be vertically installed on the card slots of the self-rotating wheel discs, and rotate with the self-rotating turntable. The satellite flying discs are locked and fixed on the spindle hanging rods 12 at intervals. The inside of the satellite flying disc includes a small main gear in the center and a circle of meshed driven gears and bearings. Each spindle hanging rod 12 stacks the satellite flying discs from top to bottom, and produces another dimension of reverse rotation around the spindle axis with the revolution of the main gear and the rotation of the driven gear wheel disc.

[0034] The product carrier 17 is installed on the driven gear disc on the satellite turntable. The product carrier 17 is arranged in a circle of the satellite turntable according to the driven gear. The carrier spacing and the satellite flying disc master-slave gear ratio are designed according to product specifications. Each satellite turntable and product carrier 17 can be disassembled and replaced at will.

[0035] The 28 sets of Spindle hanging rods 12 carrying product carriers 17 can be freely installed or removed from the rotating tooling system and placed on the equipped tooling rack to facilitate offline product hanging and unhanging operations. When the Chamber door is opened, the completed workpiece together with the Spindle hanging rods 12 can be quickly taken out and loaded with the Spindle hanging rods 12 that have clamped the workpiece to be processed, thereby improving production efficiency and shortening connection time.

[0036] The rotary tooling system provides a more three-dimensional deposition method for the product, so that each side of each product can achieve 360° rotation without dead angle relative to the target source direction, and can rotate clockwise or counterclockwise at the same time, so as to achieve indiscriminate deposition of film materials and make the film thickness uniform in each position of the chamber and in each area of ​​a single product.

[0037] The tooling system basically adopts the matching mode of bearing and gear, and has a simple and reliable structure, and is easy to disassemble and assemble. In addition, all transmission mechanisms are covered with lining plates 9 to protect against parts or foreign objects falling in or coating overflow.

[0038] The three-dimensional rotary tooling suitable for surface deposition process is basically a tooling system using bearings and gears, which is simple and reliable in structure and easy to disassemble and assemble. In addition, all transmission mechanisms are covered with lining plates 9 to protect against parts or foreign objects falling in or coating overflow.

[0039] This three-dimensional rotary tooling suitable for surface deposition process has obvious advantages in tooling capacity, because the three-dimensional revolution and rotation system does not need a larger product clamping interval to ensure the uniformity of the film layer compared to the ordinary two-dimensional rotation system. With such a smaller product placement interval and increased satellite turntable circumference, the product placement volume in one dimension can be loaded with 12*10*28=3360 products at a time (12 pieces / satellite turntable*10 layers / Spindle*28 Spindle hanging rods 12=3360 pieces), which greatly increases the product loading capacity per chamber.

[0040] The three-dimensional rotating tooling is adapted for surface deposition process. The rotating system can carry a variety of product carriers 17, and the upper and lower spacing of the satellite turntable where the carrier is located is adjustable. The product has strong versatility and can meet the needs of workpieces whose width dimensions do not exceed the radius of the satellite turntable.

[0041] The three-dimensional rotating tooling suitable for surface deposition process is made of 304 stainless steel for the main gear turntable, satellite turntable, functional gear turntable and rotating frame 11; the parts exposed in the cavity such as support rod 10, lining plate 9, spindle hanging rod, satellite turntable shielding cover 18, product carrier 17 are made of 304 stainless steel and the surface is sandblasted to facilitate film adhesion and extend the service life, while facilitating regular sandblasting maintenance. Example

[0042] like Figures 1 to 4As shown, the three-dimensional rotary tooling system is first driven by the motor of the equipment power device 1, and drives the main gear turntable 4 to rotate clockwise or counterclockwise through the transmission gear 2 and the guide gear 3 (to make the rotation direction of the turntable consistent with that of the motor), and the wheel 11 is fixed to the main gear turntable 4 through four support rods 10 to form a whole. With the rotation of the wheel 11, the 28 driven self-rotating gears 7 fixed on the main gear turntable 4 produce reverse rotation motion under the action of meshing with the auxiliary gear plate 5, and at the same time drive the 28 spindle hanging rods 12 installed on the limit groove of the self-rotating connecting base 8 to rotate, and the satellite turntable 13 fixed on the spindle hanging rod 12 rotates at the same frequency and in the same direction as the driven self-rotating gear 7. Finally, 8 lining plates 9 will be covered on the main gear turntable 4 to prevent the gear mechanism from overflowing and the workpiece from falling off.

[0043] The satellite turntable main gear 14 is installed at the center of the satellite turntable base 19. Twelve three-part assemblies consisting of a satellite turntable driven wheel 15, a satellite turntable driven bearing 16 and a product carrier 17 are meshed around the satellite turntable main gear 14. In order to prevent internal overflow plating, a satellite turntable shielding cover 18 is covered on the top. The interface of the product carrier 17 is exposed outside the shielding cover to facilitate the installation of the product 20. Each Spindle hanging rod 12 is equipped with 10 groups of satellite turntables above and below, and the spacing and quantity can be adjusted according to different products. When the satellite turntable 13 rotates with the Spindle hanging rod 12, the satellite turntable driven gear 15 drives the carrier and the product to produce reverse rotation in the third dimension around the axis of the Spindle hanging rod 12.

[0044] The loading and unloading operation process of this tooling system is as follows: first load the product 20 into the product carrier 17 offline, repeat this action until the satellite turntable 13 is full of products, complete the product installation of the entire Spindle hanging rod 12 from top to bottom, then lift the entire Spindle hanging rod 12 full of products and hang it on the turntable and insert the bottom structure of the Spindle hanging rod 12 into the slot of the driven self-rotating gear 7, and finally hang 28 Spindle hanging rods 12 full of products on the turntable system in turn, and then start the subsequent coating deposition process, so that the 280 satellite turntables on the 28 Spindle hanging rods 12 and the total assembly of 3360 products can achieve 360° three-dimensional rotation; after the process is completed, the unloading process can be carried out according to the reverse operation of hanging the Spindle hanging rod 12 from the turntable system and disassembling the product.

[0045] The Spindle fixture and carrier can generally be used in multiple sets relative to the gear rotating frame, which can realize offline clamping of products and quick hanging up and down, greatly improving the recycling of fixtures and saving the waiting time for equipment loading.

[0046] The three-dimensional rotating tooling design suitable for surface deposition process has a reasonable structure. The three-dimensional rotatable structure increases the product loading capacity of the satellite turntable. At the same time, the product's adjustable speed and 360-degree self-rotation in both positive and negative directions ensures the uniformity of the film layer at each position on the outer surface of the product. The three-dimensional rotary tooling suitable for surface deposition process has replaceable product carriers and adjustable upper and lower spacing of the carriers, which greatly meets the versatility of parts in the size range of the processed products; This three-dimensional rotary tooling suitable for surface deposition process is equipped with a quickly detachable spindle hanging rod to meet the offline part clamping and disassembly. Compared with directly fixing the workpiece on the rotating frame, which takes up equipment time, this tooling can be loaded and unloaded offline without taking up the machine cycle time. The tooling installation is more convenient, which greatly improves efficiency. The three-dimensional rotary tooling system suitable for surface deposition process mostly adopts bearing and gear matching structure, which has high reliability and durability. It is equipped with a detachable anti-coating guard plate to achieve full coverage of all transmission mechanisms to protect against overflow plating while preventing parts or foreign objects from falling into the gaps.

Claims

1. A three-dimensional rotary tool suitable for surface deposition process, characterized in that: The invention comprises a rotating frame and a satellite turntable (13), wherein the rotating frame is rotatably mounted on a deposition device, a rotating frame rotation driving device is arranged on the deposition device, the satellite turntable (13) is mounted on the rotating frame via a hanging rod (12), a product (20) to be deposited is mounted on the satellite turntable (13), a plurality of layers of satellite turntables (13) are fixed on the hanging rod (12), a plurality of hanging rods (12) are rotatably mounted on the rotating frame, a hanging rod rotation transmission device is arranged on the rotating frame, and the hanging rod rotation transmission device transmits the rotational motion of the rotating frame to the hanging rods so that the hanging rods (12) rotate on the rotating frame.

2. A three-dimensional rotary tool suitable for surface deposition process according to claim 1, characterized in that: The rotating frame is composed of a main gear rotating disk (4), a support rod (10) and a wheel disk (11), wherein the support rod (10) connects the main gear rotating disk (4) at the bottom and the wheel disk (11) at the top into one body.

3. A three-dimensional rotary tool suitable for surface deposition process according to claim 2, characterized in that: The rotary frame rotary drive device comprises a power device (1) and a transmission gear (2); the power device (1) is fixed on the deposition equipment; the transmission gear (2) is fixedly mounted on the output shaft of the power device (1); the transmission gear (2) is meshed with the main gear turntable (4).

4. A three-dimensional rotary tool suitable for surface deposition process according to claim 3, characterized in that: A spur gear (3) is arranged between the transmission gear (2) and the main gear rotating disk (4).

5. The three-dimensional rotating tooling suitable for surface deposition process according to claim 2, characterized in that: The hanging rod rotation transmission device comprises an auxiliary gear plate (5), a driven self-rotating gear (7) and a self-rotating connection base (8); the auxiliary gear plate (5) is fixedly mounted on the deposition device; the rotating frame is mounted on the auxiliary gear plate (5); a main gear plate bearing (6) is mounted between the auxiliary gear plate (5) and the main gear rotating plate (4) of the rotating frame; a driven self-rotating gear (7) meshing with the auxiliary gear plate (5) is mounted on the main gear rotating plate (4); the driven self-rotating gear (7) is mounted on the main gear rotating plate (4) via the self-rotating connection base (8); the self-rotating connection base (8) is rotatably mounted on the main gear rotating plate (4); the driven self-rotating gear (7) is fixedly connected to the self-rotating connection base (8); and the two ends of the hanging rod (12) are detachably mounted on the self-rotating connection base (8) and the wheel plate (11), respectively.

6. The three-dimensional rotating tooling suitable for surface deposition process according to claim 2, characterized in that: A lining plate (9) is provided on the rotary frame for preventing the rotary frame rotary drive device and the hanging rod rotation transmission device from over-plating and workpieces from falling off.

7. The three-dimensional rotating tooling suitable for surface deposition process according to claim 1, characterized in that: The satellite turntable (13) comprises a satellite turntable main gear (14), a satellite turntable driven wheel (15), a product carrier (17) and a satellite turntable base (19); the satellite turntable base (19) is fixedly connected to the hanging rod (12); the satellite turntable main gear (14) is fixedly connected to the satellite turntable base (19); a plurality of satellite turntable driven wheels (15) meshing with the satellite turntable main gear (14) are rotatably mounted on the satellite turntable base (19); a product carrier (17) is arranged on the satellite turntable driven wheel (15); and a product (20) is mounted on the product carrier (17).

8. The three-dimensional rotating tooling suitable for surface deposition process according to claim 7, characterized in that: The satellite turntable driven wheel (15) is mounted on the satellite turntable base (19) via a satellite turntable driven bearing (16).

9. The three-dimensional rotating tooling suitable for surface deposition process according to claim 7, characterized in that: The satellite turntable (13) further comprises a satellite turntable shielding cover (18), wherein the satellite turntable shielding cover (18) is fixedly connected to the hanging rod (12) and is arranged above the product carrier (17).

Images