Vacuum baking equipment, operation method and glass substrate

Abstract

The invention relates to the technical field of display panel production, and discloses vacuum baking equipment, an operation method and a glass substrate, the vacuum baking equipment comprises a baking oven, a pressure adjusting device, a heating plate and a substrate supporting assembly, a cavity is formed in the baking oven, and a material conveying hole for communicating the cavity with the outside is formed in the baking oven; a drying oven door is further arranged on the drying oven and used for sealing the material conveying hole; the pressure adjusting device is used for adjusting the pressure of the cavity; the heating plate is used for heating the substrate; the substrate supporting assembly is used for supporting a substrate. By constructing the vacuum baking environment and the non-fixed substrate supporting assembly capable of being adjusted according to requirements, efficient heating and waste gas recovery of the substrate are achieved, substrate friction caused by high-temperature deformation in the heating process is avoided, and therefore the machining efficiency and the yield are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of display panel production, and in particular to vacuum baking equipment and an operating method, and a glass substrate. Background Art

[0002] In the manufacturing process of display panels, it is necessary to bake the glass substrate at a high temperature in a specific production step to dry the ink solvent on its surface. In the prior art, the equipment designed for baking such ink solvent glass substrates includes a heating plate, a clamping device and a transfer device. The clamping device is arranged above the heating plate to fix the substrate above the heating plate. The heating plate is designed with multiple staggered air holes and multiple supporting holes. The air blowing holes are used to blow air to the substrate to form air flotation, and the substrate is supported by air flotation. The transfer device of this prior art supports the substrate through the supporting holes on the heating plate, and then clamps and moves the two sides of the glass substrate.

[0003] In the prior art, in the process of treating such a surface with ink, since a normal pressure air flotation carrying method is used for the glass substrate, the glass substrate is continuously impacted by airflow during the heating process, and its heat is taken away by the airflow; on the other hand, the ink solvent on the surface of the glass substrate will emit toxic gas during the baking process, and the air flotation baking will make it impossible to collect the toxic gas, resulting in environmental pollution.

[0004] In the prior art, the technical solution of using a non-air-floating support substrate has a support structure that can scratch the substrate during the heating and baking process of the substrate and also produce powder, which seriously affects product quality.

[0005] Therefore, in view of the many urgent problems to be solved in the baking process during the display panel manufacturing process, it is urgent to provide a targeted baking equipment. Summary of the invention

[0006] The present invention aims to solve at least one of the technical problems existing in the background technology.

[0007] In one aspect, the present invention provides a vacuum baking device for heating a substrate, the vacuum baking device comprising: An oven, a pressure regulating device, a heating plate and a substrate support assembly; a cavity is provided in the oven, and a feeding hole is provided on the oven to connect the cavity with the outside; an oven door is also provided on the oven, and the oven door is used to seal the feeding hole; the pressure regulating device is used to adjust the pressure of the cavity to a negative pressure so that the gas is transported to the exhaust gas treatment device; the heating plate is located in the cavity, the heating plate is located below the substrate, and the heating plate is used to heat the substrate; A lifting platform is provided in the cavity, a heating plate support is provided on the lifting platform, and the heating plate and the heating plate support are connected to each other; The substrate support assembly is used to support the substrate, and the substrate support assembly includes a gravity-guided hammer, a support shaft, and a lifting step; The gravity-guided hammer is placed on the inner bottom surface of the cavity, the support shaft is arranged at the top of the gravity-guided hammer, and the top of the support shaft is provided with a lifting step, which can contact the base plate; A lifting mechanism matched with the lifting step is arranged on the top of the heating plate, and the lifting mechanism can make the substrate supporting assembly separate from the cavity surface.

[0008] As some sub-solutions of the above technical solution, the vacuum baking equipment includes a material picking and placing robot, which can transfer the substrate through the material feeding hole and can place and detach the substrate from the substrate support assembly.

[0009] As some sub-solutions of the above technical solution, the lifting platform includes a lifting part and a fixed part, the fixed part is fixed on the oven, and the fixed part supports the lifting part, and the lifting part drives the heating plate to move in a direction close to or away from the substrate.

[0010] As some sub-solutions of the above technical solution, the lifting mechanism is provided with a first countersunk hole, and the first countersunk hole is used to accommodate the lifting step.

[0011] As some sub-solutions of the above technical solution, the vacuum baking equipment also includes a guide sleeve, which is fixed on the heating plate.

[0012] As some sub-solutions of the above technical solution, the vacuum baking equipment also includes multiple first limiting members, all of which are arranged on the surface of the heating plate facing the substrate; a limiting space is enclosed by all the first limiting members, and the limiting space is used to limit the substrate.

[0013] As some sub-schemes of the above technical scheme, the guide sleeve is provided with a guide shaft hole, the bottom diameter of the first countersunk hole is larger than the diameter of the guide shaft hole, and a first through hole with the same diameter as the guide shaft hole is provided. The first through hole is used for the support shaft to pass through and to limit the passage of the lifting step.

[0014] As some sub-solutions of the above technical solution, the total height of the substrate support assembly is greater than the distance from the substrate to the bottom of the oven when the lifting platform is at the lowest point; The total height of the substrate support assembly is less than the distance from the substrate to the bottom of the oven when the lifting platform is at the highest point.

[0015] On the one hand, the present invention also provides an operation method based on the above device, and the specific operation method comprises the following steps: The lifting platform drives the heating plate to descend through the heating plate support. The vacuum baking equipment includes a material taking and unloading robot. The material taking and unloading robot delivers the substrate into the oven and places it on the substrate support assembly. The material taking and unloading robot moves out of the oven, and the oven door is closed to make the oven sealed. The lifting platform drives the heating plate to rise through the heating plate support, the substrate support assembly is separated from the contact with the oven, the substrate is in contact with the heating plate, and the oven is decompressed and emptied to the set pressure through the pressure regulating device in a sealed state; The lifting platform drives the heating plate to descend through the heating plate support, the substrate is separated from the surface of the heating plate, the distance between the substrate and the heating plate is adjusted, the substrate is heated, and baking is performed; After baking is completed, the oven releases pressure, the lifting platform drives the heating plate down through the heating plate support, and the substrate support assembly supports the substrate to separate from the heating plate; The oven door opens and the loading and unloading robot takes away the substrate.

[0016] On the other hand, the present application also provides a glass substrate made by the above device or the above method.

[0017] The vacuum baking equipment provided by the present invention has the following beneficial effects: The substrate support assembly of the present invention is movable relative to the vacuum chamber and the heating plate, and is not fixed. It can change with the position of the support hole. When the heating plate rises or falls, the support shaft will not generate friction with the support hole to generate dust. Therefore, when the substrate is baked at high temperature, no debris will be generated due to the friction of the device to pollute the environment and products. The heating rate in the vacuum environment provided by the present invention is very fast, which can improve work efficiency. In addition, when heating in a vacuum environment, the heat loss of the heating plate is very small, and the temperature uniformity of the heating plate is better. At the same time, the toxic and harmful gases generated in the heating process can be transported to the gas processing device through the pressure regulating device to avoid affecting the surrounding equipment environment and personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which: Figure 1 It is a schematic diagram of the side cross-sectional structure of the vacuum baking equipment of the embodiment; Figure 2 This is a schematic diagram of the bottom structure of a heating plate of a vacuum baking device in an embodiment; Figure 3 This is a schematic diagram of the top surface structure of a heating plate of a vacuum baking equipment in an embodiment; Figure 4 This is a schematic diagram of the side cross-sectional structure of a heating plate of a vacuum baking equipment in an embodiment; Figure 5 This is a schematic diagram of the structure of a substrate support assembly of a vacuum baking equipment according to an embodiment; Figure 6 This is a schematic cross-sectional view of the structure of the non-contact state of the substrate and the heating plate in the vacuum baking equipment of the embodiment; Figure 7This is a schematic cross-sectional view of the structure in which the substrate and the heating surface are in contact with each other in the vacuum baking equipment of the embodiment; Figure 8 This is the operation flow chart of the vacuum baking equipment.

[0019] In the attached figure: 10- oven; 11- oven door; 12- material loading and unloading robot; 20-substrate support assembly; 21-lifting platform; 22-heating plate support; 23-heating plate; 24-substrate; 25-guide sleeve; 201- gravity-guided hammer; 202- support shaft clamping member; 203- support shaft; 204- lifting step; 230 - bottom surface of the heating plate; 231 - top surface of the heating plate; 232 - first stopper; 233 - first countersunk hole; 251 - guide shaft; 252 - guide shaft hole. DETAILED DESCRIPTION

[0020] Embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0021] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0022] In the description of the present invention, the meaning of "several" is an indefinite quantity, the meaning of "multiple" is more than two, "greater than", "less than", "exceed", etc. are understood as not including the number itself, and "above", "below", "within", etc. are understood as including the number itself. If there is a description of the first and the second, it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features. The "and / or" that appears in the full text represents three parallel solutions. For example, A and / or B represents the solution satisfied by A, the solution satisfied by B, or the solution satisfied by both A and B.

[0023] In the description of the present invention, if there is a short sentence containing multiple parallel features, the attributive defines the closest feature, for example: B, C, and E connected to D are arranged on A, which means that B is arranged on A and E is connected to D, and does not constitute a limitation on C; but attributives that indicate the relationship between features, such as "interval arrangement" or "circular arrangement", do not belong to this category. If the word "all" is preceded by an attributive, it means that all features in the short sentence are limited, such as B, C, and D are all arranged on A, which means that B, C, and D are all arranged on A. For a sentence with an omitted subject, the omitted subject is the subject of the previous sentence, that is, B is arranged on A, including C, which means that B is arranged on A and A includes C.

[0024] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0025] Combine the following Figures 1 to 8 Embodiments of the present invention are described.

[0026] This embodiment involves an oven 10, a pressure regulating device, a heating plate 23 and a substrate support assembly 20. A cavity is provided in the oven 10, and a feeding hole connecting the cavity with the outside is provided on the oven 10; an oven door 11 is also provided on the oven 10, and the oven door 11 is used to seal the feeding hole; the pressure regulating device is used to regulate the pressure of the cavity; the heating plate 23 is located in the cavity, and the heating plate 23 is located under the substrate 24, and the heating plate 23 is used to heat the substrate 24; the substrate support assembly 20 is used to support the substrate 24.

[0027] The vacuum baking equipment in this embodiment includes: In one aspect, the present invention provides a vacuum baking device for heating a substrate 24, the vacuum baking device comprising: The oven 10, the pressure regulating device, the heating plate 23 and the substrate support assembly 20; the oven 10 is provided with a cavity, and the oven 10 is provided with a feeding hole connecting the cavity with the outside; the oven 10 is also provided with an oven door 11, and the oven door 11 is used to seal the feeding hole; the pressure regulating device is used to adjust the pressure of the cavity to a negative pressure so that the gas is transported to the exhaust gas treatment device; the heating plate 23 is located in the cavity, the heating plate 23 is located below the substrate 24, and the heating plate 23 is used to heat the substrate 24; A lifting platform 21 is provided in the cavity, a heating plate support 22 is provided on the lifting platform, and a heating plate 23 is connected to the heating plate support 22; The substrate support assembly 20 is used to support the substrate 24, and the substrate support assembly 20 includes a gravity guide hammer 201, a support shaft 203, and a lifting step 204; The gravity-guided hammer 201 is placed on the inner bottom surface of the cavity, the support shaft 203 is arranged at the top of the gravity-guided hammer 201, and a lifting step 204 is arranged at the top of the support shaft 203, and the lifting step 204 can contact the substrate 24; A lifting mechanism matched with the lifting step 204 is disposed on the top of the heating plate 23 , and the lifting mechanism can separate the substrate supporting assembly 20 from the cavity surface.

[0028] The pressure regulating device provided in this embodiment is a complete set of devices including an exhaust device and a gas delivery pipeline. In this embodiment, the exhaust device used is a mechanical vacuum pump. The air intake pipeline of the mechanical vacuum pump is connected to the cavity of the oven 10, and the exhaust pipeline is connected to the exhaust gas treatment device. The whole set of pressure regulating devices can extract the gas in the cavity of the oven 10 through the mechanical vacuum pump, so that the cavity is in a negative pressure state during the processing. In some specific implementation situations, the cavity can be made into a closed cavity by closing the oven door 11, so that the pressure regulating device can exhaust the cavity into a vacuum state, so that the vacuum baking equipment provided by the present invention can heat the substrate in a vacuum state; at the same time, the toxic and harmful gases generated during the heating process can also be transported to the exhaust gas treatment device through the mechanical vacuum pump and the gas delivery pipeline of the pressure regulating device, so as to avoid polluting the environment or causing harm to personnel.

[0029] In this embodiment, the substrate support assembly 20 includes a gravity-guided hammer 201, and the top of the gravity-guided hammer 201 is connected to the support shaft 203 through the support shaft clamp 202, so that the length of the support shaft 203 clamped by the support shaft clamp 202 can be adjusted, thereby ensuring that the support heights of each substrate support assembly 20 are the same during maintenance, and the gravity-guided hammer 201 of different sizes can be replaced at any time according to the required working conditions, and the support shaft 203 of different lengths can also be replaced according to the thickness of different substrates. A lifting step 204 is provided on the top of the support shaft 203, and the lifting step 204 can be a part of the support shaft 203 protruding outward, or it can be an independent part tightly connected to the support shaft 203 by threaded connection, bolt connection, pin connection, welding connection, etc.

[0030] In this embodiment, a plurality of heating plate supports 22 are provided on the lifting platform 21, and the heating plates 23 and the heating plate supports 22 are connected to each other by bolts. The lifting platform 21 can support the heating plates 23 through the heating plate supports 22 and can also carry the heating plates 23 for movement; in some other specific implementation cases, the heating plates 23 and the heating plate supports 22 can also be connected by any one or more of a variety of connection methods including but not limited to key connection, welding, screw connection and pin connection.

[0031] In this embodiment, the lifting platform 21 includes a lifting part (not shown) and a fixed part (not shown). The fixed part is fixed on the oven 10 (not shown), and the fixed part supports the lifting part. The lifting part drives the heating plate 23 to move in a direction close to or away from the substrate 24.

[0032] The lifting part of the lifting platform 21 is the part that can be lifted and moved. The electric lifting structure in the lifting part is connected to the fixed part, so that the lifting part of the lifting platform 21 drives the heating plate to move up and down in the cavity through the heating plate support 22.

[0033] In this embodiment, the vacuum baking equipment includes a pick-up and place-down robot 12 , which can transfer the substrate 24 through the feed hole and can place the substrate 24 on and off the substrate support assembly 20 .

[0034] In this embodiment, the lifting mechanism is provided with a first countersunk hole 233 , and the first countersunk hole 233 is used to accommodate the lifting step 204 .

[0035] Specifically, the first countersunk hole 233 can accommodate the lifting step 204. When accommodating the lifting step 204, the position of the uppermost edge of the lifting step 204 is not higher than the uppermost edge of the lifting step 204. When the lifting platform 21 drives the heating plate 23 upward to a certain height, the lifting step 204 is accommodated in the first countersunk hole 233, so that the substrate 24 can contact with the heating plate 23, so that the heating plate 23 can perform contact heating on the substrate 24.

[0036] In this embodiment, the vacuum baking device further includes a guide sleeve 25 , and the guide sleeve 25 is fixed on the heating plate 23 .

[0037] Specifically, the guide sleeve 25 is fixed to the bottom surface of the heating plate 23 in a downward direction, that is, the guide sleeve 25 is fixed to the bottom surface 230 of the heating plate, and a through hole for the guide sleeve 25 to pass through is provided at the corresponding position of the lifting platform 21 and the guide sleeve 25. In detail, in this embodiment, the guide sleeve 25 can be regarded as including a guide shaft 251 and a guide shaft hole 252, wherein the top of the guide shaft 251 is provided with a thread, which can be assembled with the threaded hole provided on the bottom surface 230 of the heating plate, so that the guide sleeve 25 can be fixed on the heating plate 23.

[0038] On the one hand, the guide sleeve 25 allows the support shaft 203 of the substrate support assembly 20 to pass smoothly through the guide shaft hole 252 set inside it, thereby supporting the substrate 24; on the other hand, the guide shaft hole 252 included in the guide sleeve 25 plays a guiding role, so that the support shaft 203 always remains in the working position, thereby avoiding position deviation of the substrate support assembly 20 in a non-fixed state.

[0039] In this embodiment, the guide sleeve 25 is provided with a guide shaft hole 252, the bottom diameter of the first countersunk hole 233 is larger than the diameter of the guide shaft hole 252, and a first through hole with the same diameter as the guide shaft hole 252 is provided. The first through hole is used for the support shaft 203 to pass through and to limit the passage of the lifting step 204.

[0040] This is because the processing of the substrate 24 requires high-temperature baking. When the temperature of the heating plate 23 rises, it will expand and the distance between the support holes on the heating plate will change. The substrate support assembly 20 provided by the present invention is in a non-fixed state. The position of the substrate support assembly 20 will adapt to the changes in the relative positions between each other caused by temperature changes. If the substrate support assembly 20 is fixed, the support shaft will rub against the support hole when the heating plate rises or falls, generating dust and contaminating the product. Even when the deformation is too large, the lifting part of the lifting platform 21 may be locked, making the lifting platform 21 unable to move. At the same time, the first through hole also needs to prevent the lifting step 204 from sliding out of the first countersunk hole 233. Therefore, the diameter of the guide shaft hole 252 and the first through hole should be smaller than the diameter of the lifting step 204.

[0041] In this embodiment, the vacuum baking equipment also includes multiple first limiting members 232, all of which are arranged on the surface of the heating plate facing the substrate 24, which is the top surface 231 of the heating plate; a limiting space is enclosed between all the first limiting members 232, and the limiting space is used to limit the substrate.

[0042] In this embodiment, the top of the first stopper 232 is an inwardly inclined inclined surface. The first stopper 232 encloses a processing range suitable for the current substrate 24 on the top surface 231 of the heating plate. This space is the limiting space, which enables the substrate 24 to enter the limiting state under the action of the first stopper 232, stably contact the heating plate 23, avoid relative displacement of the substrate 24 and the heating plate 23 during contact heating, avoid scratching the substrate, and ensure product quality; due to the position error that may occur during the feeding process of the material taking and placing robot 12, or vibrations that occur during other processing, there may be a slight error between the substrate 24 and the pre-enclosed processing range suitable for the current substrate 24. At this time, the inwardly inclined inclined surface set on the top of the first stopper 232 can make the substrate 24 slide into the processing range when gradually approaching the heating plate 23, and enter the limiting state.

[0043] A first countersunk hole 233 is provided on the top surface 231 of the heating plate at a position corresponding to the guide sleeve 25 provided on the bottom surface 230 of the heating plate. A through-hole structure connected to the guide shaft hole 252 exists at the bottom of the first countersunk hole 233, so that the support shaft 203 of the substrate support assembly 20 can support the substrate 24 above the heating plate through the through-hole structure. At this time, the size of the first countersunk hole 233 can fully accommodate the lifting step 204 at the top of the substrate support assembly 20, so that the substrate 24 can be in full contact with the heating plate 23 under certain working conditions.

[0044] The total height of the substrate support assembly 20 is greater than the distance from the substrate 24 to the bottom of the oven 10 when the lifting platform 21 is at the lowest point; the total height of the substrate support assembly 20 is less than the distance from the substrate 24 to the bottom of the oven 10 when the lifting platform 21 is at the highest point.

[0045] By selecting a support shaft 203 of appropriate length, the substrate support assembly 20 can be completely accommodated in the first countersunk hole 233 through the action of the guide sleeve 25 when the lifting platform 21 rises to the point where the substrate 24 is in full contact with the heating plate 23 for contact baking during the process of the lifting platform 21 driving the heating plate 23 to move. Moreover, as the lifting platform 21 further rises, the fully accommodated lifting step 204 can make the gravity guide hammer 201 at the bottom of the entire substrate support assembly 20 completely separate from the bottom of the cavity of the oven 10. At this time, the gravity of the gravity guide hammer 201 is used to ensure that the substrate support assembly 20 does not swing. When the lifting platform 21 descends, the substrate support assembly 20 can support the substrate 24 to separate the substrate 24 from the heating plate 23, so that the material handling robot 12 can transfer the substrate 24.

[0046] In this embodiment, the number and position of the substrate support assemblies 20 can be pre-adjusted according to the shape and size of the substrate 24 to be processed. Similarly, since the substrate support assembly 20 needs to pass through the lifting platform 21 and the heating plate 23 to support the substrate 24, when adjusting the substrate support assembly 20, it is necessary to simultaneously adjust the matching heating plate 23 and the lifting platform 21 used, so that the substrate support assembly 20 can pass through the heating plate 23 and the lifting platform 21 to support the substrate 24. At this time, the heating plate 23 moves together with the lifting platform 21 through the heating plate support 22, so as to realize the lifting or lowering of the heating plate 23 by controlling the lifting platform 21, and then the heating distance of the substrate 24 placed directly above the heating plate 23 is controlled.

[0047] The vacuum baking equipment provided in this application comprises the following steps: The lifting platform 21 drives the heating plate 23 to descend through the heating plate support 22. The vacuum baking equipment includes a material taking and unloading robot 12. The material taking and unloading robot 12 delivers the substrate 24 into the oven 10 and places it on the substrate support assembly 20. The material taking and unloading robot 12 moves out of the oven 10, and the oven door 11 is closed, so that the oven 10 is in a sealed state. The lifting platform 21 drives the heating plate 23 to rise through the heating plate support 22, the substrate support assembly 20 is separated from the contact with the oven 10, the substrate 24 is in contact with the heating plate 23, and the oven 10 is decompressed and emptied to the set pressure in a sealed state; The lifting platform 21 drives the heating plate 23 to descend through the heating plate support 22, the substrate 24 is separated from the surface of the heating plate 23, the distance between the substrate 24 and the heating plate 23 is adjusted, and the substrate 24 is heated to bake; After baking is completed, the oven 10 releases the pressure, the lifting platform 21 drives the heating plate 23 to descend through the heating plate support 22, and the substrate support assembly 20 supports the substrate 24 to separate from the heating plate 23; The oven door 11 is opened, and the material taking and placing robot 12 takes away the substrate 24 to complete one glass substrate baking.

[0048] The preferred embodiments of the present invention are described in detail above, but the present invention is not limited to the embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of the present invention.

Claims

1. A vacuum baking device, characterized in that: The vacuum baking equipment is used to heat the substrate (24), and the vacuum baking equipment comprises: An oven (10), a pressure regulating device, a heating plate (23) and a substrate support assembly (20); a cavity is provided in the oven (10), and a material feeding hole is provided on the oven (10) for connecting the cavity with the outside; an oven door (11) is also provided on the oven (10), and the oven door (11) is used to seal the material feeding hole; the pressure regulating device is used to regulate the pressure of the cavity to a negative pressure so that the gas is transported to the exhaust gas treatment device; the heating plate (23) is located in the cavity, the heating plate (23) is located below the substrate (24), and the heating plate (23) is used to heat the substrate (24); A lifting platform (21) is provided in the cavity, a heating plate support (22) is provided on the lifting platform, and the heating plate (23) is connected to the heating plate support (22); The substrate support assembly (20) is used to support the substrate (24), and the substrate support assembly (20) comprises a gravity-guided hammer (201), a support shaft (203), and a lifting step (204); The gravity-guided hammer (201) is placed on the inner bottom surface of the cavity, the support shaft (203) is arranged at the top end of the gravity-guided hammer (201), and the top end of the support shaft (203) is provided with the lifting step (204), and the lifting step (204) can contact the base plate (24); A lifting mechanism matched with the lifting step (204) is provided on the top of the heating plate (23), and the lifting mechanism can enable the substrate supporting assembly (20) to be separated from the cavity surface.

2. A vacuum baking device according to claim 1, characterized in that: The vacuum baking equipment comprises a material taking and placing robot (12), wherein the material taking and placing robot (12) is capable of transferring the substrate (24) through the material feeding hole; the material taking and placing robot (12) is capable of placing the substrate (24) on and detaching it from the substrate support assembly (20).

3. A vacuum baking device according to claim 1, characterized in that: The lifting platform (21) comprises a lifting part and a fixing part, wherein the fixing part is fixed on the oven (10) and supports the lifting part, and the lifting part drives the heating plate (23) to move in a direction approaching or moving away from the substrate (24).

4. The vacuum baking equipment according to claim 1, characterized in that: The lifting mechanism is provided with a first countersunk hole (233), and the first countersunk hole (233) is used to accommodate the lifting step (204).

5. The vacuum baking equipment according to claim 4, characterized in that: The vacuum baking equipment further comprises a guide sleeve (25), wherein the guide sleeve (25) is fixed on the heating plate (23).

6. The vacuum baking equipment according to claim 3, characterized in that: The vacuum baking equipment further comprises a plurality of first limiting members (232), all of which are arranged on the surface of the heating plate facing the substrate (24); a limiting space is enclosed between all of the first limiting members (232), and the limiting space is used to limit the substrate (24).

7. The vacuum baking equipment according to claim 5, characterized in that: The guide sleeve (25) is provided with a guide shaft hole (252), the bottom diameter of the first countersunk hole (233) is larger than the diameter of the guide shaft hole (252), and a first through hole with the same diameter as the guide shaft hole (252) is provided, the first through hole being used for allowing the support shaft (203) to pass through and limiting the passage of the lifting step (204).

8. The vacuum baking equipment according to claim 2, characterized in that: The total height of the substrate support assembly (20) is greater than the distance from the substrate (24) to the bottom of the oven (10) when the lifting platform (21) is at the lowest point; The total height of the substrate support assembly (20) is less than the distance from the substrate (24) to the bottom of the oven (10) when the lifting platform (21) is at the highest point.

9. A method for operating a vacuum baking device, characterized in that: Using the vacuum baking equipment according to any one of claims 1 to 8, the specific operation method comprises the following steps: The lifting platform (21) drives the heating plate (23) to descend via the heating plate support (22); the vacuum baking equipment comprises a material taking and placing robot (12); the material taking and placing robot (12) delivers the substrate (24) into the oven (10) and places it on the substrate support assembly (20); the material taking and placing robot (12) moves out of the oven (10), and the oven door (11) is closed, so that the oven (10) is in a sealed state; The lifting platform (21) drives the heating plate (23) to rise via the heating plate support (22), the substrate support assembly (20) is separated from the contact with the oven (10), the substrate (24) is in contact with the heating plate (23), and the oven (10) is decompressed and emptied to a set pressure via the pressure regulating device in a sealed state; The lifting platform (21) drives the heating plate (23) to descend via the heating plate support (22), the substrate (24) is separated from the surface of the heating plate (23), the distance between the substrate (24) and the heating plate (23) is adjusted, and the substrate (24) is heated to perform baking; After baking is completed, the oven (10) releases pressure, the lifting platform (21) drives the heating plate (23) to descend via the heating plate support (22), and the substrate support assembly (20) supports the substrate (24) to separate from the heating plate (23); The oven door (11) is opened, and the material taking and placing robot (12) takes away the substrate (24).

10. A glass substrate for a display device, characterized in that: The production process uses the vacuum baking equipment described in any one of claims 1 to 8 and / or the operating method described in claim 9.

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