High-precision pressure sensing element and pressure sensing system

Abstract

The invention relates to the technical field of sensors, and discloses a high-precision pressure sensing element and a pressure sensing system.The high-precision pressure sensing element comprises a substrate, and a groove is formed in the bottom of an inner cavity of the substrate; the pressure film is mounted at the top of the substrate and is sealed at the opening of the groove; a pressure sensitive beam is installed at the top of the substrate, a piezoresistor is installed in an inner cavity of the pressure sensitive beam, the pressure sensitive beam and the substrate are fixedly connected through an anchoring ring, and the pressure sensitive beam and the pressure film are fixedly connected through an anchor point; the pressure sensing system is based on the high-precision pressure sensing element in the claim and comprises a workbench, and the top of the workbench is provided with a lifting mechanism, a moving mechanism and a display mechanism. Accurate movement and positioning of the sensing element in the vertical direction and the transverse direction are achieved, pressure effects of different heights and angles can be simulated, and the requirement for multi-dimensional detection is met.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and in particular to a high-precision pressure sensing element and a pressure sensing system. Background Art

[0002] At present, pressure sensors mostly use the piezoresistive principle for pressure detection, using the change in resistivity of the piezoresistive material after a force is applied to it for pressure detection. In addition to using the piezoresistive principle for pressure detection, a few manufacturers use capacitive detection, but all of them use a single capacitor detection method: a sealed vacuum cavity is formed by a pressure-sensitive film and a substrate. When the external air pressure changes, the pressure-sensitive film above the vacuum cavity will bend, causing the capacitance formed by the pressure-sensitive film and the substrate to change. The external pressure can be obtained by detecting the capacitance change.

[0003] After searching, the Chinese patent number CN204881934U discloses a pressure sensing element, including a first capacitor and a second capacitor arranged in parallel on a substrate; the first capacitor includes a first pressure-sensitive membrane located at the top and a first fixed electrode plate located at the bottom, and the first fixed electrode plate is provided with a first through hole; the second capacitor includes a second pressure-sensitive membrane located at the bottom and a second fixed electrode plate located at the top, and the second fixed electrode plate is provided with a second through hole; the substrate is provided with a first groove and a second groove, the first groove is connected with the first capacitor gap through the first through hole and forms a first sealed cavity, and the second pressure-sensitive membrane seals the second groove to form a second sealed cavity; the first capacitor and the second capacitor together constitute a differential capacitor. The pressure sensing element of this utility model is based on differential capacitance for detection, is insensitive to external common-mode interference signals, and can achieve high-precision and high-stability output.

[0004] After searching, the Chinese patent number CN204758194U discloses a MEMS pressure sensing element, including: a substrate with a groove; a pressure-sensitive membrane arranged above the substrate, the pressure-sensitive membrane seals the opening of the groove to form a sealed cavity; a pressure-sensitive beam suspended in the sealed cavity and parallel to the pressure-sensitive membrane, on which a piezoresistor is arranged; the center of the pressure-sensitive beam is fixedly connected to the center of the pressure-sensitive membrane, and the periphery is fixedly connected to the bottom wall of the substrate groove. In the MEMS pressure sensing element of this utility model, when pressure acts on the pressure-sensitive membrane, the pressure-sensitive membrane drives the pressure-sensitive beam to move, causing the pressure-sensitive beam to bend, and then causing the resistance value of the piezoresistor on the pressure-sensitive beam to change, thus completing the pressure-sensitive function and shielding the electromagnetic interference of the outside world to the electrical part of the pressure sensing element.

[0005] The above-mentioned pressure sensing element generally forms a change in the resistance value of the varistor through the change in pressure, thereby completing the pressure sensitive function. However, in actual use, the pressure sensing element needs to be installed in a specific position to work, and different positions will also affect the use of the pressure sensing element. Therefore, before installing the pressure sensing element, it is necessary to perform necessary inspections on the pressure sensing element to meet the needs of use in different positions. The existing devices lack the process and structure for detecting the pressure sensing element. Based on this, the present invention designs a high-precision pressure sensing element and a pressure sensing system to solve the above problems. Summary of the invention

[0006] The purpose of the present invention is to provide a high-precision pressure sensing element and a pressure sensing system, which solves the problem of lack of pressure sensing element detection in the background technology.

[0007] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0008] A high-precision pressure sensing element, comprising:

[0009] A base, wherein a groove is formed at the bottom of the inner cavity of the base;

[0010] a pressure membrane mounted on top of the substrate and sealed at the opening of the groove;

[0011] A pressure-sensitive beam is installed on the top of the substrate, a piezoresistor is installed in the inner cavity of the pressure-sensitive beam, the pressure-sensitive beam is fixedly connected to the substrate via an anchoring ring, the pressure-sensitive beam is fixedly connected to the pressure membrane via an anchor point, and the anchoring ring and the anchor point are both distributed in multiple groups of matrix arrays;

[0012] A first electrode and a second electrode, wherein the first electrode and the second electrode are both located between the substrate and the pressure membrane and are located in the same layer;

[0013] A cross reinforcement member installed at the bottom of the substrate and used to enhance the mechanical stability of the pressure membrane and reduce nonlinear errors;

[0014] A rim structure installed at the bottom edge of the pressure membrane for supporting and reinforcing the pressure membrane and further reducing pressure nonlinearity;

[0015] A connecting circuit is connected to the first electrode and the second electrode and is used to detect a current change therebetween caused by the pressure membrane being compressed.

[0016] Preferably, an elastic supporting layer is provided at the bottom of the inner cavity of the groove and is used to provide restoring force under pressure.

[0017] Preferably, the varistor is a high-precision semiconductor varistor and the change in resistance is highly linearly related to the pressure applied; the pressure-sensitive beam is made of a lightweight and high-strength silicon-based material and is a plate-type structure that optimizes stress concentration.

[0018] Preferably, the anchoring ring and the anchoring point are both made by precision machining technology to ensure a firm connection between the substrate, the pressure sensitive beam and the pressure membrane.

[0019] By using high-precision semiconductor varistors as core sensing elements, the change in their resistance is highly linearly related to the pressure applied, significantly improving the precision and accuracy of pressure measurement; the pressure-sensitive beam is made of lightweight and high-strength silicon-based material and is designed as a plate structure that optimizes stress concentration, further enhancing the sensitivity and accuracy of pressure transmission; the introduction of cross reinforcements and edge structures effectively enhances the mechanical stability of the substrate and pressure membrane, preventing structural damage caused by excessive pressure, while reducing nonlinear errors and ensuring long-term stability and reliability.

[0020] Preferably, a pressure sensing system, based on a high-precision pressure sensing element described in the claim, comprises a workbench, a lifting mechanism, a moving mechanism and a display mechanism are installed on the top of the workbench, the lifting mechanism is installed on the top of the workbench and is used for vertical detection of the pressure sensing element, the moving mechanism is installed on one side of the lifting mechanism and is used for lateral detection of the pressure sensing element, and the display mechanism is installed on one side of the moving mechanism and is used for displaying pressure sensing data.

[0021] Preferably, the lifting mechanism comprises a base installed on the back of the workbench, a hydraulic telescopic rod is installed on the top of the base, a protective frame is installed on the top of the hydraulic telescopic rod, and an adjustment component is also installed on the top of the protective frame.

[0022] Preferably, the adjustment assembly includes an electric push rod installed in the inner cavity of the protective frame, a lifting seat is installed on the top of the electric push rod output rod, a lifting rod is installed on the front of the lifting seat, a first detection seat is installed on the front of the lifting rod, and the high-precision pressure sensor element is installed in the inner cavity of the first detection seat.

[0023] Preferably, the moving mechanism includes a servo motor and a connecting seat installed on the top of the workbench, a one-way screw is installed between the servo motor and the connecting seat, the output shaft of the servo motor and the one-way screw are fixedly connected by a coupling, the outer ring of the one-way screw is threadedly connected to a moving plate, and the top and one side of the moving plate are provided with installation grooves.

[0024] Preferably, the moving mechanism also includes a fixed seat installed on one side of the servo motor, a second detection seat is installed on the front of the fixed seat, the high-precision pressure sensor element is installed in the inner cavity of the second detection seat, a track is installed on the top of the workbench, and a slider is installed on the bottom of the moving plate, and the slider can slide in the inner cavity of the track.

[0025] The lifting and moving mechanisms are equipped, and through precision driving elements such as hydraulic telescopic rods, electric push rods, and servo motors, the sensor elements can be precisely moved and positioned in the vertical and horizontal directions. They can simulate pressure at different heights and angles, meeting the needs of multi-dimensional detection. This design enables the sensor elements to flexibly adapt to various installation positions, ensuring accurate measurement data in different environments.

[0026] Preferably, the display mechanism comprises a support frame installed on one side of the top of the workbench, a display screen is installed on the top of the support frame, and the display screen is electrically connected to the high-precision pressure sensor element.

[0027] The display mechanism displays the measurement data of the sensor element in real time through the display screen, intuitively converting the pressure change into the resistance value change or other forms of data display, thus improving the readability of the data and the efficiency of experimental analysis.

[0028] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0029] 1. The present invention is equipped with a lifting mechanism and a moving mechanism, which realizes the precise vertical and horizontal movement and positioning of the sensor element through precision driving elements such as hydraulic telescopic rods, electric push rods, and servo motors, and can simulate the pressure effects at different heights and angles, meeting the needs of multi-dimensional detection; this design enables the sensor element to flexibly adapt to various installation positions, ensuring that accurate measurement data can be obtained in different environments.

[0030] 2. In the present invention, the display mechanism displays the measurement data of the sensor element in real time through the display screen, and intuitively converts the pressure change into the resistance value change or other forms of data display, thereby improving the readability of the data and the efficiency of the experimental analysis; the design of the electrical connection makes the data transmission fast and accurate, providing an important reference for scientific researchers or operators, and simplifying the experimental operation and data recording process.

[0031] 3. The present invention adopts high-precision semiconductor varistor as the core sensing element, and the change of its resistance is highly linearly related to the pressure, which significantly improves the precision and accuracy of pressure measurement; the pressure sensitive beam is made of lightweight and high-strength silicon-based material and is designed as a plate structure that optimizes stress concentration, further enhancing the sensitivity and accuracy of pressure transmission; the introduction of cross reinforcements and edge structures effectively enhances the mechanical stability of the substrate and the pressure membrane, prevents structural damage caused by excessive pressure, and reduces nonlinear errors, ensuring stability and reliability for long-term use. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a structural schematic diagram of the pressure sensing system of the present invention;

[0033] Figure 2 is a schematic diagram of the internal structure of the pressure sensing element of the present invention;

[0034] Figure 3 For the present invention Figure 2 The enlarged structural diagram at A in the middle;

[0035] Figure 4 is a schematic diagram of the three-dimensional structure of the pressure sensing element of the present invention;

[0036] Figure 5 is a side view of the pressure sensing system of the present invention;

[0037] Figure 6 For the present invention Figure 5 The enlarged structural diagram at B in the middle;

[0038] Figure 7 For the present invention Figure 5 The enlarged structural diagram at C in the middle;

[0039] Figure 8 It is a structural schematic diagram of the display mechanism of the present invention.

[0040] Wherein: 2. lifting mechanism; 3. moving mechanism; 4. display mechanism; 5. adjustment component; 101. base; 102. groove; 103. pressure membrane; 104. pressure sensitive beam; 105. anchor ring; 106. anchor point; 107. first electrode; 108. second electrode; 109. cross reinforcement; 110. edge structure; 111. varistor; 201. workbench; 202. base; 203. hydraulic telescopic rod; 204. protection frame; 301. servo motor; 302. connecting seat; 303. one-way screw rod; 304. moving plate; 305. mounting groove; 306. fixed seat; 307. second detection seat; 308. track; 309. slider; 401. support frame; 402. display screen; 501. electric push rod; 502. lifting seat; 503. lifting rod; 504. first detection seat. DETAILED DESCRIPTION

[0041] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0042] Embodiment 1;

[0043] See also Figure 1-Figure 8 In an embodiment of the present invention, a high-precision pressure sensing element includes:

[0044] A base 101, wherein a groove 102 is formed at the bottom of the inner cavity of the base 101;

[0045] A pressure membrane 103 , the pressure membrane 103 is mounted on the top of the substrate 101 and the pressure membrane 103 is sealed at the opening of the groove 102 ;

[0046] A pressure-sensitive beam 104 is installed on the top of the substrate 101, and a piezoresistor 111 is installed in the inner cavity of the pressure-sensitive beam 104. The pressure-sensitive beam 104 is fixedly connected to the substrate 101 through an anchor ring 105, and the pressure-sensitive beam 104 is fixedly connected to the pressure membrane 103 through an anchor point 106. The anchor ring 105 and the anchor point 106 are both distributed in multiple groups of matrix arrays.

[0047] A first electrode 107 and a second electrode 108 , wherein the first electrode 107 and the second electrode 108 are both located between the substrate 101 and the pressure membrane 103 and are located in the same layer;

[0048] A cross reinforcement 109 , which is installed at the bottom of the base 101 and is used to enhance the mechanical stability of the pressure membrane 103 and reduce nonlinear errors;

[0049] A rim structure 110, which is installed at the bottom edge of the pressure membrane 103, and is used to support and reinforce the pressure membrane 103 and further reduce pressure nonlinearity;

[0050] A connecting circuit is connected to the first electrode 107 and the second electrode 108 and is used to detect a current change therebetween caused by the pressure membrane 103 being compressed.

[0051] An elastic support layer is disposed at the bottom of the inner cavity of the groove 102 and is used to provide a restoring force under pressure.

[0052] The varistor 111 is a high-precision semiconductor varistor and the change in resistance is highly linearly related to the pressure applied; the pressure sensitive beam 104 is made of a light and high-strength silicon-based material and is a plate-type structure that optimizes stress concentration.

[0053] The anchor ring 105 and the anchor point 106 are both made by precision machining technology to ensure a firm connection between the substrate 101 , the pressure sensitive beam 104 and the pressure membrane 103 .

[0054] The working principle of the embodiment of the present invention is: when external pressure acts on the pressure membrane 103, the membrane is deformed, and then the deformation is transmitted to the pressure sensitive beam 104 through the anchor point 106. The pressure sensitive beam 104 is a key conversion component, and the piezoresistor 111 installed inside it can sensitively capture the deformation caused by pressure and convert it into a change in resistance value. The piezoresistor 111 is made of high-precision semiconductor materials, and its resistance change is highly linearly related to the pressure. When the pressure sensitive beam 104 bends due to the deformation of the pressure membrane 103, the resistance of the piezoresistor 111 changes accordingly. This resistance change is detected by a circuit connected between the first electrode 107 and the second electrode 108, and converted into a measurable electrical signal.

[0055] In order to improve the stability of the sensor element and reduce nonlinear errors, the present invention introduces cross reinforcements 109 and edge structures 110. The cross reinforcements 109 enhance the mechanical strength of the substrate 101 and the pressure membrane 103 to prevent structural damage caused by excessive pressure. The edge structure 110 supports and reinforces the edge of the pressure membrane 103, further ensuring the uniformity and accuracy of pressure transmission. The elastic support layer at the bottom of the inner cavity of the groove 102 provides the necessary restoring force for the pressure membrane 103, ensuring that it can quickly return to its original state after the pressure is released, thereby ensuring the long-term stability and reliability of the sensor element.

[0056] The anchor ring 105 and the anchor point 106 are made by precision machining technology, which ensures that the connection between the substrate 101, the pressure sensitive beam 104 and the pressure membrane 103 is firm and reliable, and reduces the measurement error caused by loose connection.

[0057] Embodiment 2;

[0058] See also Figure 1-Figure 8 In an embodiment of the present invention, a pressure sensing system, based on a high-precision pressure sensing element of claim 1, comprises a workbench 201, a lifting mechanism 2, a moving mechanism 3 and a display mechanism 4 are installed on the top of the workbench 201, the lifting mechanism 2 is installed on the top of the workbench 201 and is used for vertical detection of the pressure sensing element, the moving mechanism 3 is installed on one side of the lifting mechanism 2 and is used for lateral detection of the pressure sensing element, and the display mechanism 4 is installed on one side of the moving mechanism 3 and is used for displaying pressure sensing data.

[0059] The lifting mechanism 2 includes a base 202 installed on the back of the workbench 201 , a hydraulic telescopic rod 203 is installed on the top of the base 202 , a protective frame 204 is installed on the top of the hydraulic telescopic rod 203 , and an adjustment component 5 is also installed on the top of the protective frame 204 .

[0060] The adjustment component 5 includes an electric push rod 501 installed in the inner cavity of the protective frame 204, a lifting seat 502 is installed on the top of the output rod of the electric push rod 501, a lifting rod 503 is installed on the front of the lifting seat 502, a first detection seat 504 is installed on the front of the lifting rod 503, and a high-precision pressure sensor element is installed in the inner cavity of the first detection seat 504.

[0061] The working principle of the embodiment of the present invention is: the lifting mechanism 2 drives the protection frame 204 and the high-precision pressure sensing element inside to move up and down through the hydraulic telescopic rod 203 to simulate the pressure effect at different heights. The electric push rod 501 and the lifting rod 503 further provide a fine-tuning function to ensure that the sensing element can be accurately aligned with the point to be tested. Under the fixation of the first detection seat 504, the sensing element stably performs pressure measurement.

[0062] Embodiment 3;

[0063] See also Figure 1-Figure 8 In the embodiment of the present invention, the moving mechanism 3 includes a servo motor 301 and a connecting seat 302 installed on the top of the workbench 201, a one-way screw 303 is installed between the servo motor 301 and the connecting seat 302, the output shaft of the servo motor 301 and the one-way screw 303 are fixedly connected by a coupling, the outer ring of the one-way screw 303 is threadedly connected to a moving plate 304, and the top and one side of the moving plate 304 are provided with mounting grooves 305.

[0064] The moving mechanism 3 also includes a fixed seat 306 installed on one side of the servo motor 301, a second detection seat 307 is installed on the front of the fixed seat 306, a high-precision pressure sensor element is installed in the inner cavity of the second detection seat 307, a track 308 is installed on the top of the workbench 201, and a slider 309 is installed on the bottom of the moving plate 304, and the slider 309 can slide in the inner cavity of the track 308.

[0065] The display mechanism 4 includes a support frame 401 installed on one side of the top of the workbench 201. A display screen 402 is installed on the top of the support frame 401. The display screen 402 is electrically connected to the high-precision pressure sensor element.

[0066] The working principle of the embodiment of the present invention is: the moving mechanism 3 uses the servo motor 301 to drive the one-way screw 303 to rotate, thereby driving the moving plate 304 to slide along the track 308. This process realizes the movement of the sensor element in the horizontal direction, and cooperates with the lifting mechanism 2 to realize all-round detection of pressure at different positions. The second detection seat 307 ensures the stability and accuracy of the sensor element during the movement process.

[0067] The display mechanism 4 displays the measurement data of the high-precision pressure sensor element in real time through the display screen 402. The display screen 402 is electrically connected to the sensor element, and can intuitively reflect the pressure change and the corresponding resistance value change, providing an important reference for researchers or operators. The pressure sensing system of the present invention realizes high-precision, multi-dimensional measurement and data display of pressure through the organic combination of high-precision pressure sensor elements and intelligent detection mechanisms, providing strong support for research and application in related fields.

[0068] Working principle: The high-precision pressure sensing system proposed in the present invention realizes high-precision, multi-dimensional measurement and real-time data display of pressure by integrating precisely designed pressure sensing elements and intelligent detection and display mechanisms 4. The core of the system lies in the high-precision pressure sensing elements, which work together through precision processing and ingenious design to accurately capture pressure changes and convert them into measurable electrical signals. Specifically, when external pressure acts on the pressure membrane 103, the diaphragm deforms and transmits the deformation to the pressure-sensitive beam 104 through the anchor point 106. The high-precision semiconductor varistor 111 built into the pressure-sensitive beam 104 changes its resistance accordingly, and this change is detected by a circuit connected between the first electrode 107 and the second electrode 108, and converted into an electrical signal output.

[0069] In order to enhance the stability of the system and reduce nonlinear errors, cross reinforcements 109 and edge structures 110 are introduced into the design. The cross reinforcements 109 reinforce the mechanical structure of the base 101 and the pressure membrane 103 to prevent damage caused by excessive pressure; the edge structure 110 supports and reinforces the edge of the pressure membrane 103 to ensure the uniformity and accuracy of pressure transmission. In addition, the elastic support layer at the bottom of the groove 102 provides restoring force for the pressure membrane 103, ensuring the long-term stability and reliability of the sensor element.

[0070] The system is also equipped with an intelligent detection and display mechanism 4, including a lifting mechanism 2, a moving mechanism 3 and a display mechanism 4. The lifting mechanism 2 realizes precise vertical positioning and fine-tuning of the sensor element through the linkage between the hydraulic telescopic rod 203 and the electric push rod 501, simulating the pressure effect at different heights. The moving mechanism 3 uses a servo motor 301 to drive the one-way screw 303 to rotate, driving the moving plate 304 to slide along the track 308, and realizing flexible movement of the sensor element in the horizontal direction. Combined with the lifting mechanism 2, this design allows all-round detection of pressure at multiple positions and angles.

[0071] Finally, the display unit 4 displays the measurement data of the sensor element in real time through the display screen 402, and intuitively converts the pressure change into a resistance value change or other forms of data display, providing an important reference for researchers or operators. This link not only improves the readability of the data, but also greatly facilitates experimental analysis and result recording. The system can not only achieve high-precision measurement of pressure, but also has the ability of multi-dimensional detection and real-time data display, providing strong technical support for research and application in related fields.

[0072] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations may be made to the embodiments without departing from the principles and spirit thereof, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A high-precision pressure sensing element, characterized in that: include: A base (101), wherein a groove (102) is formed at the bottom of an inner cavity of the base (101); A pressure membrane (103), the pressure membrane (103) is mounted on the top of the substrate (101) and the pressure membrane (103) is sealed at the opening of the groove (102); A pressure-sensitive beam (104) is installed on the top of the substrate (101), a piezoresistor (111) is installed in the inner cavity of the pressure-sensitive beam (104), the pressure-sensitive beam (104) and the substrate (101) are fixedly connected via an anchor ring (105), the pressure-sensitive beam (104) and the pressure membrane (103) are fixedly connected via an anchor point (106), and the anchor ring (105) and the anchor point (106) are both distributed in a plurality of matrix arrays; A first electrode (107) and a second electrode (108), wherein the first electrode (107) and the second electrode (108) are both located between the substrate (101) and the pressure membrane (103), and are located in the same layer; A cross reinforcement (109) installed at the bottom of the base (101) and used to enhance the mechanical stability of the pressure membrane (103) and reduce nonlinear errors; A rim structure (110), the rim structure (110) being installed at the bottom edge of the pressure membrane (103) for supporting and reinforcing the pressure membrane (103) and further reducing pressure nonlinearity; A connecting circuit is connected to the first electrode (107) and the second electrode (108) and is used to detect a change in current therebetween caused by the pressure membrane (103) being compressed.

2. A high-precision pressure sensing element according to claim 1, characterized in that: An elastic support layer is provided at the bottom of the inner cavity of the groove (102) and is used to provide a restoring force under pressure.

3. A high-precision pressure sensing element according to claim 1, characterized in that: The varistor (111) is a high-precision semiconductor varistor and the change in resistance is highly linearly related to the pressure applied; the pressure-sensitive beam (104) is made of a light-weight and high-strength silicon-based material and is a plate-type structure that optimizes stress concentration.

4. The high-precision pressure sensing element according to claim 1, characterized in that: The anchor ring (105) and the anchor point (106) are both made by precision machining technology to ensure a firm connection between the substrate (101), the pressure sensitive beam (104) and the pressure membrane (103).

5. A pressure sensing system, characterized in that: A high-precision pressure sensing element according to claim 1 comprises a workbench (201), the top of which is equipped with a lifting mechanism (2), a moving mechanism (3) and a display mechanism (4), wherein the lifting mechanism (2) is installed on the top of the workbench (201) and is used for vertical detection of the pressure sensing element, the moving mechanism (3) is installed on one side of the lifting mechanism (2) and is used for lateral detection of the pressure sensing element, and the display mechanism (4) is installed on one side of the moving mechanism (3) and is used for displaying pressure sensing data.

6. A pressure sensing system according to claim 5, characterized in that: The lifting mechanism (2) comprises a base (202) mounted on the back of a workbench (201); a hydraulic telescopic rod (203) is mounted on the top of the base (202); a protective frame (204) is mounted on the top of the hydraulic telescopic rod (203); and an adjustment component (5) is also mounted on the top of the protective frame (204).

7. A pressure sensing system according to claim 6, characterized in that: The adjustment component (5) comprises an electric push rod (501) installed in the inner cavity of the protection frame (204), a lifting seat (502) is installed on the top of the output rod of the electric push rod (501), a lifting rod (503) is installed on the front of the lifting seat (502), a first detection seat (504) is installed on the front of the lifting rod (503), and the high-precision pressure sensor element is installed in the inner cavity of the first detection seat (504).

8. A pressure sensing system according to claim 5, characterized in that: The moving mechanism (3) comprises a servo motor (301) and a connecting seat (302) installed on the top of the workbench (201); a one-way screw (303) is installed between the servo motor (301) and the connecting seat (302); the output shaft of the servo motor (301) and the one-way screw (303) are fixedly connected via a coupling; the outer ring of the one-way screw (303) is threadedly connected to a moving plate (304); and the top and one side of the moving plate (304) are both provided with mounting grooves (305).

9. A pressure sensing system according to claim 8, characterized in that: The moving mechanism (3) further comprises a fixed seat (306) mounted on one side of the servo motor (301); a second detection seat (307) is mounted on the front of the fixed seat (306); the high-precision pressure sensing element is mounted in the inner cavity of the second detection seat (307); a track (308) is mounted on the top of the workbench (201); a slider (309) is mounted on the bottom of the moving plate (304); and the slider (309) can slide in the inner cavity of the track (308).

10. A pressure sensing system according to claim 5, characterized in that: The display mechanism (4) comprises a support frame (401) installed on one side of the top of the workbench (201), a display screen (402) is installed on the top of the support frame (401), and the display screen (402) is electrically connected to a high-precision pressure sensor element.

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