Sampling inspection device for chip manufacturing

Abstract

The invention relates to a sampling inspection device used in chip manufacturing, the sampling inspection device comprises a shell assembly and cleaning assemblies, a power assembly is installed on the upper portion of the interior of the shell assembly, the lower end of the power assembly is connected with a clamping assembly, the cleaning assemblies are located on the left side and the right side of the clamping assembly, and the clamping assembly comprises a ventilation pipe, a turbine and a suction cup clamp. A turbine is installed in the ventilation pipe, a suction cup clamp is installed at the lower end of the ventilation pipe, the cleaning assembly comprises a supporting frame, a cleaning brush, first transmission wheels, a belt and a second transmission wheel, the cleaning brush is installed in the supporting frame, and the first transmission wheels are connected to the front side and the rear side of the supporting frame; the equipment has the beneficial effects that the equipment is provided with an air supply structure, the chip is prevented from being damaged by clamping, the equipment can clean the surface of the chip, meanwhile, the chip can be positioned, the equipment can keep away from light, the detection effect of the equipment is prevented from being influenced by illumination, and meanwhile, the equipment is also provided with a sealing structure, so that light leakage at the joint is avoided.

Description

Technical Field

[0001] The invention relates to the technical field of chip processing, and in particular to a sampling device used in chip manufacturing. Background Art

[0002] During the chip manufacturing process, a sampling device is needed to perform visual inspection on the processed chips. The chips are inspected through an optical microscope to determine whether the chips are intact. Through optical microscope inspection, problems in the chip manufacturing process, such as defects, non-uniformity or damage, can be discovered in time, so that appropriate measures can be taken to repair or improve them to improve the quality and performance of the chips.

[0003] Most of the existing sampling inspection devices use suction cup clamps for direct clamping, and then place the chip in the inspection area for inspection. However, if the chip moves during the transmission process, the clamping structure of the device will not be able to clamp the chip well. Even if it is clamped, it is easy to cause the chip to be placed in the wrong position, affecting the inspection effect of the equipment.

[0004] Therefore, it is necessary to design a sampling inspection device for chip manufacturing to address the above problems. Summary of the invention

[0005] The purpose of the present invention is to provide a sampling inspection device for chip manufacturing to solve the problems raised in the above background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solution: a sampling inspection device for chip manufacturing, comprising a shell component (1) and a cleaning component, wherein a power component is installed on the upper part of the shell component, and the lower end of the power component is connected to a clamping component, the cleaning component is located on the left and right sides of the clamping component, and the clamping component comprises a vent pipe, a turbine and a suction cup clamp, the vent pipe is installed with a turbine, and the lower end of the vent pipe is installed with a suction cup clamp, the cleaning component comprises a support frame, a cleaning brush, a first transmission wheel, a belt and a second transmission wheel, and the cleaning brush is installed inside the support frame, the front and rear sides of the support frame are connected to the first transmission wheel, and a belt is arranged outside the first transmission wheel, and the side of the belt away from the first transmission wheel is connected to the second transmission wheel.

[0007] Furthermore, an air supply assembly is installed in the middle of both sides of the clamping assembly, a box assembly is installed on the right side inside the outer shell assembly, and an automatic closing assembly is arranged inside the box assembly, a chip body is installed in the middle of the automatic closing assembly, and sealing assemblies are connected to the upper ends of both sides of the automatic closing assembly, locking assemblies are arranged below the front and rear ends of the sealing assembly, and the sealing assembly is connected to a valve body assembly at the lower middle end.

[0008] Furthermore, the housing assembly includes a shell, a fan, an air duct and a belt conveyor, and the fan is installed on one side of the shell, the air outlet of the fan is connected to the air duct, and the belt conveyor is installed on the left side of the interior of the shell.

[0009] Furthermore, the power assembly includes an electric slide rail and a multi-section hydraulic cylinder, and the multi-section hydraulic cylinder is installed at the lower end of the electric slide rail.

[0010] Furthermore, the air supply assembly includes an air supply pipe and rolling steel balls, and rolling steel balls are installed on both sides of the upper end of the air supply pipe.

[0011] Furthermore, the box assembly includes a light shielding box, a fill light and a detection camera, and the fill light is installed on the five inner walls of the light shielding box, and the detection camera is installed on the left and right inner walls of the light shielding box.

[0012] Furthermore, the automatic closing component includes a first spring, a detection platform, a connecting rod and a connecting block, and the upper end of the first spring is connected to the detection platform, the upper end of the detection platform is connected to the connecting rod, and the upper end of the connecting rod is connected to the connecting block.

[0013] Furthermore, the sealing assembly includes a cover door and a sealing air cushion, and the outer side of the cover door is inlaid with a sealing air cushion.

[0014] Furthermore, the locking assembly includes a locking head and a permanent magnet, and the permanent magnet is arranged on a side of the locking head close to the box assembly.

[0015] Furthermore, the valve body assembly includes a valve frame, a second spring, a moving block and a valve core block, and a second spring is arranged inside the valve frame, a moving block is arranged on the side of the second spring close to the axis of the valve frame, and a valve core block is arranged on the side of the moving block away from the second spring.

[0016] Compared with the prior art, the beneficial effects of the present invention are: the device has an air replenishing structure to avoid damage to the chip by clamping, the device can clean the surface of the chip and also position the chip, the device can avoid light to avoid light affecting the detection effect of the device, and also has a sealing structure to avoid light leakage at the connection.

[0017] 1. The present invention uses a fan to evacuate air, so that the suction cup clamp has a certain suction force to clamp the chip body. During the clamping process, air can be supplied to the inside of the ventilation pipe through the air supply pipe to replenish air, thereby preventing the suction cup clamp from continuously generating a large suction force and causing damage to the chip body.

[0018] 2. When the present invention is clamping, air is sucked inside the vent pipe to generate air flow, thereby driving the turbine to rotate, and the turbine drives the cleaning brush to rotate through the belt, so that the cleaning brush can clean the surface of the chip body.

[0019] 3. During the cleaning process of the chip body surface by the cleaning brush of the present invention, since the air flow received by the turbine is upward, the two turbines rotate inward, thereby causing the cleaning brush to rotate inward as well, so that the cleaning brush can move the chip body toward the bottom of the suction cup clamp. Since the two turbines are affected by the same wind force, the forces received by the turbines are consistent, thereby making the rotational force of the cleaning brush consistent. Therefore, when the cleaning brush moves the chip body, the two sections of the chip body are subjected to consistent forces and cannot move after the center positioning is completed, thereby achieving the center positioning of the chip body.

[0020] 4. When placing the chip body, the present invention presses the detection platform downward, so that the detection platform drives the cover door to close through the connecting rod, so that the cover door and the light shielding box are combined to form a sealed environment to prevent external light sources from entering and affecting the visual detection effect of the equipment.

[0021] 5. In the present invention, after the chip body is placed, the ventilation pipe will rise to a certain height, and the air supply pipe will dock with the valve frame, thereby pushing open the movable block that forms an elastic structure between the second spring and the valve frame, so that the valve core block opens, and the air supply pipe blows air to the inside of the valve frame, so that the sealing air cushion outside the cover door expands, so that the sealing air cushion can seal the edge of the cover door, increase the sealing between the cover door and the light shielding box, better increase the light shielding effect, and facilitate the operation of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a front view structural schematic diagram of a sampling inspection device used in chip manufacturing according to the present invention;

[0023] Figure 2 This is a schematic cross-sectional structure diagram of a clamping assembly of a sampling inspection device used in chip manufacturing according to the present invention;

[0024] Figure 3 It is a schematic diagram of the enlarged structure of a cleaning component of a sampling inspection device used in chip manufacturing according to the present invention;

[0025] Figure 4 This is a schematic cross-sectional structure diagram of a box assembly of a sampling inspection device used in chip manufacturing according to the present invention;

[0026] Figure 5 This is an enlarged structural schematic diagram of a sealing component of a sampling inspection device used in chip manufacturing according to the present invention;

[0027] Figure 6 This is a schematic diagram of the three-dimensional structure of a sealing component of a sampling inspection device used in chip manufacturing according to the present invention;

[0028] Figure 7 The present invention is a schematic diagram of the cross-sectional structure of a valve body assembly of a sampling inspection device used in chip manufacturing.

[0029] In the figure: 1. Shell assembly; 101. Shell; 102. Fan; 103. Air duct; 104. Belt conveyor; 2. Power assembly; 201. Electric slide rail; 202. Multi-section hydraulic cylinder; 3. Clamping assembly; 301. Ventilation pipe; 302. Turbine; 303. Suction cup fixture; 4. Cleaning assembly; 401. Support frame; 402. Cleaning brush; 403. First transmission wheel; 404. Belt; 405. Second transmission wheel; 5. Air supply assembly; 501. Air supply pipe; 502. Rolling steel ball; 6. Box assembly; 601. Light shielding box; 602. Fill light; 603. Detection camera; 7. Automatic closing assembly; 701. First spring; 702. Detection table; 703. Connecting rod; 704. Connecting block; 8. Chip body; 9. Sealing assembly; 901. Cover door; 902. Sealing air cushion; 10. Locking assembly; 1001. Locking head; 1002. Permanent magnet; 11. Valve body assembly; 1101. Valve frame; 1102. Second spring; 1103. Moving block; 1104. Valve core block. DETAILED DESCRIPTION

[0030] like Figure 1 , Figure 2 and Figure 3 As shown, the present invention provides a technical solution: a sampling inspection device for chip manufacturing, comprising a shell component 1 and a cleaning component 4, wherein a power component 2 is installed on the upper part of the shell component 1, and a clamping component 3 is connected to the lower end of the power component 2, the cleaning component 4 is located on the left and right sides of the clamping component 3, and the clamping component 3 comprises a vent 301, a turbine 302 and a suction cup fixture 303, the vent 301 is installed with a turbine 302, and the lower end of the vent 301 is installed with a suction cup fixture 303, the cleaning component 4 comprises a support frame 401, a cleaning brush 402, a first transmission wheel 403, a belt 404 and a second transmission wheel 405, and a cleaning brush 402 is installed inside the support frame 401, the first transmission wheel 403 is connected to the front and rear sides of the support frame 401, and a belt 404 is arranged outside the first transmission wheel 403, and the side of the belt 404 away from the first transmission wheel 403 is connected to the second transmission wheel 405;

[0031] The specific operation is as follows: the fan 102 is used to evacuate air, so that the suction cup fixture 303 has a certain suction force to clamp the chip body 8. During the clamping process, the air supply pipe 501 can supply air to the inside of the ventilation pipe 301 to replenish air, thereby preventing the suction cup fixture 303 from continuously generating a large suction force and causing damage to the chip body 8;

[0032] During the clamping operation, air is sucked inside the vent pipe 301 to generate air flow, thereby driving the turbine 302 to rotate, and the turbine 302 drives the cleaning brush 402 to rotate through the belt 404, so that the cleaning brush 402 can clean the surface of the chip body 8;

[0033] During the process of cleaning the surface of the chip body 8 by the cleaning brush 402, since the air flow received by the turbine 302 is upward, the two turbines 302 rotate inward, thereby causing the cleaning brush 402 to rotate inward as well, so that the cleaning brush 402 can move the chip body 8 toward the bottom of the suction cup clamp 303. Since the two turbines 302 are affected by the same wind force, the force applied to the turbines 302 is the same, thereby making the rotational force of the cleaning brush 402 consistent. Therefore, when the cleaning brush 402 moves the chip body 8, the two sections of the chip body 8 will be subjected to the same force after the center positioning is completed and cannot move, thereby achieving the center positioning of the chip body 8.

[0034] like Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, an air supply assembly 5 is installed in the middle of both sides of the clamping assembly 3, a box assembly 6 is installed on the right side inside the outer shell assembly 1, and an automatic closing assembly 7 is arranged inside the box assembly 6, a chip body 8 is installed in the middle of the automatic closing assembly 7, and sealing assemblies 9 are connected to the upper ends of both sides of the automatic closing assembly 7, locking assemblies 10 are arranged below the front and rear ends of the sealing assembly 9, and the sealing assembly 9 is connected to a valve body assembly 11 at the lower middle end.

[0035] like Figure 1 As shown, the housing assembly 1 includes a housing 101, a fan 102, an air duct 103 and a belt conveyor 104, and the fan 102 is installed on one side of the housing 101, the air outlet of the fan 102 is connected to the air duct 103, and the belt conveyor 104 is installed on the left side of the interior of the housing 101;

[0036] The air duct 103 adopts a retractable structure, such as a corrugated tube, etc., and an external pipe winding device can also be provided to wind up the air duct 103, thereby preventing the air duct 103 from spreading out and affecting the operation of the equipment.

[0037] like Figure 1 As shown, the power assembly 2 includes an electric slide rail 201 and a multi-section hydraulic cylinder 202, and the multi-section hydraulic cylinder 202 is installed at the lower end of the electric slide rail 201;

[0038] The electric slide rail 201 and the multi-section hydraulic cylinder 202 can realize the cross movement of the equipment on the material, so that the equipment is convenient for clamping and placing the material.

[0039] like Figure 7As shown, the air supply assembly 5 includes an air supply pipe 501 and rolling steel balls 502, and rolling steel balls 502 are installed on both sides of the upper end of the air supply pipe 501;

[0040] The rolling steel ball 502 will assist the insertion of the air supply pipe 501. The rolling steel ball 502 can reduce the friction force of the insertion of the air supply pipe 501 and reduce the insertion force.

[0041] like Figure 4 As shown, the box assembly 6 includes a light shielding box 601, a fill light 602 and a detection camera 603, and the fill light 602 is installed on the five inner walls of the light shielding box 601, and the detection camera 603 is installed on the left and right inner walls of the light shielding box 601;

[0042] Filling lights 602 are installed on the five internal surfaces of the light shielding box 601, so that the chip can be filled with light at all angles, the generation of shadows can be reduced, the chip can be tested more easily, and the accuracy of equipment testing can be increased.

[0043] like Figure 4 As shown, the automatic closing assembly 7 includes a first spring 701, a detection platform 702, a connecting rod 703 and a connecting block 704, and the upper end of the first spring 701 is connected to the detection platform 702, the upper end of the detection platform 702 is connected to the connecting rod 703, and the upper end of the connecting rod 703 is connected to the connecting block 704;

[0044] The elastic structure of the first spring 701 pushes the detection platform 702 upward, causing the connecting rod 703 to push the cover door 901 upward, so that the cover door 901 is opened.

[0045] like Figure 5 and Figure 6 As shown, the sealing assembly 9 includes a cover door 901 and a sealing air cushion 902, and the outer side of the cover door 901 is inlaid with a sealing air cushion 902;

[0046] When the chip body 8 is placed, the test platform 702 is pressed downward, so that the test platform 702 drives the cover door 901 to close through the connecting rod 703, so that the cover door 901 and the light shielding box 601 are combined to form a sealed environment to prevent external light sources from entering and affecting the visual inspection effect of the equipment.

[0047] like Figure 6 As shown, the locking assembly 10 includes a locking head 1001 and a permanent magnet 1002, and the permanent magnet 1002 is disposed on one side of the locking head 1001 close to the box assembly 6;

[0048] The combination of the locking head 1001 and the permanent magnet 1002 can prevent the cover door 901 from opening during the detection process, thereby affecting the detection of the device.

[0049] like Figure 7As shown, the valve body assembly 11 includes a valve frame 1101, a second spring 1102, a moving block 1103 and a valve core block 1104, and the second spring 1102 is arranged inside the valve frame 1101, the moving block 1103 is arranged on the side of the second spring 1102 close to the central axis of the valve frame 1101, and the valve core block 1104 is arranged on the side of the moving block 1103 away from the second spring 1102;

[0050] After the chip body 8 is placed, the ventilation pipe 301 will rise to a certain height, and the air supply pipe 501 will then dock with the valve frame 1101, thereby pushing open the movable block 1103 which forms an elastic structure between the second spring 1102 and the valve frame 1101, and opening the valve core block 1104, so that the air supply pipe 501 blows air into the valve frame 1101, thereby expanding the sealing air cushion 902 outside the cover door 901, allowing the sealing air cushion 902 to seal the edge of the cover door 901, thereby increasing the sealing between the cover door 901 and the light shielding box 601, and better increasing the light shielding effect, which facilitates the operation of the equipment.

[0051] Working principle: first, the chip body 8 is transported by the belt conveyor 104, and then the electric slide rail 201 and the multi-section hydraulic cylinder 202 are turned on to drive the clamping assembly 3 to move to the top of the chip body 8, and then the suction cup clamp 303 is controlled to descend by the multi-section hydraulic cylinder 202, and at the same time, the fan 102 is turned on to make the air duct 103 to exhaust the air inside the ventilation pipe 301. While exhausting, the air flow inside the ventilation pipe 301 will drive the turbine 302 to rotate, so that the turbine 302 drives the first transmission wheel 403 to rotate, and then the second transmission wheel 405 is driven to rotate by the belt 404, so that the second transmission wheel 405 drives the cleaning brush 402 that forms a rotating structure with the support frame 401 to rotate, so that the cleaning brush 402 is used to grasp the chip to be grasped. The surface of the chip body 8 is cleaned, and at the same time, the air flow received by the turbine 302 is upward. The two turbines 302 are rotating inward, so that the cleaning brush 402 is also rotating inward, so that the cleaning brush 402 can push the chip body 8 to the bottom of the suction cup clamp 303, thereby realizing the positioning of the chip body 8. At the same time, the suction cup clamp 303 continues to move down until it contacts the chip body 8. At this time, the suction cup clamp 303 will form an adsorption effect to realize the support of the chip body 8. At this time, the suction cup clamp 303 can no longer take in air, so the turbine 302 will no longer rotate, and the cleaning brush 402 will not rotate either, avoiding interference during the clamping process. At this time, the air supply pipe 501 will supply air to the ventilation pipe 301, thereby ensuring that the fan 102 can It continues to work, and then the chip body 8 is moved to the light shielding box 601 through the electric slide rail 201 and the multi-section hydraulic cylinder 202. During the placement of the chip body 8, the detection table 702 will be pressed downward by the multi-section hydraulic cylinder 202, so that the connecting rod 703 will pull the cover door 901 to close the cover door 901. At this time, the permanent magnet 1002 will attract and fix the locking head 1001, thereby locking the cover door 901. At this time, the fan 102 uses a blowing structure to separate the chip body 8 from the suction cup clamp 303. At the same time, the ventilation pipe 301 will stretch upward, so that the air supply pipe 501 is inserted into the valve frame 1101. During the insertion of the air supply pipe 501, the rolling steel ball 502 will assist the insertion of the air supply pipe 501. The rolling steel ball 502 can The friction of the air supply pipe 501 during insertion is reduced, and the insertion force is reduced. When the air supply pipe 501 is inserted into the valve frame 1101, the cover door 901 will be inflated, so that the sealing air cushion 902 will expand and the periphery of the cover door 901 will be sealed. At this time, the fill light 602 and the detection camera 603 will be turned on to detect the detection work. When the detection is completed, the fan 102 will continue to change to suction. At this time, the air supply pipe 501 will extract the gas in the sealing air cushion 902 to make the sealing air cushion 902 deflate, and then the suction cup clamp 303 will clamp and take away the chip body 8 after the detection. When the ventilation pipe 301 moves upward, the cover door 901 will be pushed upward, so that the equipment can take out the material. At the same time, the elastic structure of the first spring 701 will push the detection table 702 upward.The connecting rod 703 pushes the cover door 901 upward, so that the cover door 901 will not close if it is not affected by external force after it is opened.

Claims

1. A sampling device for chip manufacturing, characterized in that: The invention comprises a housing component (1) and a cleaning component (4), wherein a power component (2) is installed on the upper part of the housing component (1), and a clamping component (3) is connected to the lower end of the power component (2), and the cleaning component (4) is located on the left and right sides of the clamping component (3), and the clamping component (3) comprises a vent pipe (301), a turbine (302) and a suction cup clamp (303), wherein the vent pipe (301) is installed with a turbine (302), and the lower end of the vent pipe (301) is installed with a suction cup clamp (303), wherein ... cleaning component (4) is located on the left and right sides of the clamping component (3), and the cleaning component (4) is located on the left and right sides of the clamping component (3), and the cleaning component (4) is located on the left and right sides of the clamping component (3), and the cleaning component (4) is located on the left and right sides of the clamping component (3), and the cleaning component (4) is located on the left and right sides of the clamping component (3), and the cleaning component (4) is located on the left and right sides of the clamping component (3), and the cleaning component (4) is located on the left and right sides of the clamping component (3), and the cleaning component (4) is located on the left and right sides of the clamping component (3), and the cleaning component The cleaning component (4) comprises a support frame (401), a cleaning brush (402), a first transmission wheel (403), a belt (404) and a second transmission wheel (405), wherein the cleaning brush (402) is installed inside the support frame (401), the first transmission wheel (403) is connected to the front and rear sides of the support frame (401), and the belt (404) is arranged outside the first transmission wheel (403), and the second transmission wheel (405) is connected to the side of the belt (404) away from the first transmission wheel (403).

2. A sampling inspection device for chip manufacturing according to claim 1, characterized in that: An air supply assembly (5) is installed in the middle of both sides of the clamping assembly (3), a box assembly (6) is installed on the right side of the interior of the shell assembly (1), and an automatic closing assembly (7) is arranged inside the box assembly (6), a chip body (8) is installed in the middle of the automatic closing assembly (7), and sealing assemblies (9) are connected to the upper ends of both sides of the automatic closing assembly (7), locking assemblies (10) are arranged below the front and rear ends of the sealing assembly (9), and the sealing assembly (9) is connected to a valve body assembly (11) at the lower end of the middle.

3. The sampling inspection device for chip manufacturing according to claim 1, characterized in that: The housing assembly (1) comprises a housing (101), a fan (102), an air duct (103) and a belt conveyor (104), wherein the fan (102) is installed on one side of the housing (101), the air outlet of the fan (102) is connected to the air duct (103), and the belt conveyor (104) is installed on the left side inside the housing (101).

4. The sampling inspection device for chip manufacturing according to claim 1, characterized in that: The power assembly (2) comprises an electric slide rail (201) and a multi-section hydraulic cylinder (202), and the multi-section hydraulic cylinder (202) is installed at the lower end of the electric slide rail (201).

5. The sampling inspection device for chip manufacturing according to claim 2, characterized in that: The air supply assembly (5) comprises an air supply pipe (501) and rolling steel balls (502), and rolling steel balls (502) are installed on both sides of the upper end of the air supply pipe (501).

6. The sampling inspection device for chip manufacturing according to claim 2, characterized in that: The box assembly (6) comprises a light shielding box (601), a fill light (602) and a detection camera (603), and the fill light (602) is installed on the five inner walls of the light shielding box (601), and the detection camera (603) is installed on the left and right inner walls of the light shielding box (601).

7. The sampling inspection device for chip manufacturing according to claim 2, characterized in that: The automatic closing component (7) comprises a first spring (701), a detection platform (702), a connecting rod (703) and a connecting block (704), wherein the upper end of the first spring (701) is connected to the detection platform (702), the upper end of the detection platform (702) is connected to the connecting rod (703), and the upper end of the connecting rod (703) is connected to the connecting block (704).

8. The sampling inspection device for chip manufacturing according to claim 2, characterized in that: The sealing assembly (9) comprises a cover door (901) and a sealing air cushion (902), and the outer side of the cover door (901) is inlaid with the sealing air cushion (902).

9. The sampling inspection device for chip manufacturing according to claim 2, characterized in that: The locking assembly (10) comprises a locking head (1001) and a permanent magnet (1002), and the permanent magnet (1002) is arranged on a side of the locking head (1001) close to the box assembly (6).

10. The sampling inspection device for chip manufacturing according to claim 2, characterized in that: The valve body assembly (11) comprises a valve frame (1101), a second spring (1102), a moving block (1103) and a valve core block (1104), and the second spring (1102) is arranged inside the valve frame (1101), the moving block (1103) is arranged on the side of the second spring (1102) close to the central axis of the valve frame (1101), and the valve core block (1104) is arranged on the side of the moving block (1103) away from the second spring (1102).

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