Vacuum tray overturning manipulator and control method thereof

Abstract

The invention discloses a vacuum tray overturning manipulator and a control method thereof.The manipulator comprises a fixed flange plate, a transmission device, a driving device and a tray claw assembly, the transmission device is arranged between the driving device and the tray claw assembly, and the driving device transmits power to the tray claw assembly through the transmission device; the tray claw assembly is driven to stretch out, draw back, rotate and turn over; the vacuum tray overturning mechanical arm is connected with the vacuum cavity in a sealed mode through a fixing flange plate, the driving device is installed outside the vacuum cavity through the fixing flange plate, the transmission device and the tray claw assembly are both located in the vacuum cavity, the driving device and the transmission device are sealed through a corrugated pipe, and driving power is transmitted through the magnetic coupling device. The manipulator has the characteristics of compact structure, simplicity in operation, stability in transmission and the like, and overcomes the defects of single direction and form, small movement range for driving a sample, incapability of realizing overturning and inclination of the sample support in vacuum and the like when the sample support runs in the conventional manipulator.

Description

Technical Field

[0001] The invention relates to the technical field of vacuum chamber handover, and in particular to a vacuum tray flipping robot and a control method thereof. Background Art

[0002] When conducting scientific research and industrial production in a vacuum environment, it is necessary to use a mechanical mechanism to transfer objects in the vacuum chamber without destroying the vacuum degree in the vacuum chamber, and sometimes it is necessary to flip the tray. In the prior art, there is no robot that can simultaneously rotate, extend and flip in an ultra-high vacuum environment.

[0003] A manipulator is a complex system with high precision, multiple inputs and multiple outputs and strong coupling. Due to its unique operational flexibility, it has been widely used in industrial assembly, safety and explosion-proof and other fields. Since the manipulator is a complex system, there are uncertainties such as parameter perturbation, external interference and unmodeled dynamics. Since lubricating materials such as lubricating oil and grease cannot be used in an ultra-high vacuum environment, the long-term movement of the gear and rack structure will cause metal powder to rub out, which has a very adverse effect on the ultra-high vacuum environment. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a vacuum tray flipping manipulator and a control method thereof with compact structure, simple operation and stable transmission, in view of the disadvantages of the sample tray in the manipulator in the prior art that the direction and form of the sample tray are single when running, the movement range of the sample is small, and the sample tray cannot be flipped and tilted in a vacuum.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0006] A vacuum pallet flipping robot comprises: a fixed flange, a transmission device, a drive device and a pallet claw assembly, wherein a transmission device is provided between the drive device and the pallet claw assembly, and a driving force device transmits power to the pallet claw assembly through the transmission device to drive the pallet claw assembly to extend, rotate and flip; the vacuum pallet flipping robot is sealed with a vacuum cavity through a fixed flange, and the drive device is installed outside the vacuum cavity through the fixed flange, the transmission device and the pallet claw assembly are both located in the vacuum cavity, the drive device and the transmission device are sealed by a bellows, and the driving power is transmitted through a magnetic coupling device.

[0007] As a further improvement of the present invention, the driving device includes a telescopic driving component, a rotating driving component and a flipping driving component; the transmission device includes a rolling wheel component, a mobile frame, a slide rail component, a steel belt transmission component and a spring transmission component; multiple groups of rolling wheel components are mounted on both sides of the mobile frame, the slide rail component is connected to the rolling wheel component through the steel belt transmission component, the tray claw component is connected to the slide rail component and is located on the inner side of the mobile frame, the rolling wheel component is connected to the telescopic driving component through the spring transmission component, under the drive of the telescopic driving component, the spring transmission component extends or contracts, and drives the rolling wheel component to translate along both sides of the mobile frame to achieve the extension or contraction of the steel belt transmission component, and then the extension or retraction of the tray claw component; the mobile frame is connected to the rotating driving component, under the drive of the rotating driving component, the mobile frame drives the spring transmission component, the rolling wheel component, the slide rail component, the tray claw component and the steel belt transmission component to rotate in the circumferential direction; the tray claw component is connected to the flipping driving component, under the drive of the flipping driving component, the tray claw component flips 360° to take and place samples.

[0008] As a further improvement of the present invention, the spring transmission assembly includes a spring, a fixed seat, a steel belt seat, a mounting plate, a guide rod and a driving steel belt, the fixed seat is connected and fixed to the movable frame, the mounting plate is connected and fixed to the rolling wheel assembly, one end of the guide rod is connected to the fixed seat, the other end of the guide rod passes through the mounting plate and extends to the outside of the rolling wheel assembly, the spring is sleeved on the outside of the guide rod, and one end of the spring is connected to the fixed seat, and the other end of the spring is connected to the mounting plate; the steel belt seat is connected to the telescopic driving assembly, one end of the driving steel belt is rotatably wrapped around the steel belt seat, and the other end of the driving steel belt is connected to the end of the rolling wheel assembly.

[0009] As a further improvement of the present invention, the slide rail assembly includes a connecting rod and a pushing rod, the connecting rod is connected and fixed to the rolling wheel assembly, the pushing rod is slidably nested inside the connecting rod, and the pushing rod is connected and fixed to the pallet claw assembly, one end of the steel belt transmission assembly is connected and fixed to the pushing rod, and the other end of the steel belt transmission assembly is connected and fixed to the rolling wheel assembly; when the rolling wheel assembly moves along the moving frame, the steel belt transmission assembly extends or contracts, thereby realizing that the pushing rod drives the pallet claw assembly to extend or retract.

[0010] As a further improvement of the present invention, the rolling wheel assembly includes a support frame, which spans the movable frame and is perpendicular to the extension and retraction direction of the pallet claw assembly; the steel belt transmission assembly includes a transmission steel belt, a roller and a connecting seat, the connecting seat is connected to the push rod, one end of the transmission steel belt is connected to the connecting seat, and the other end of the transmission steel belt is connected to the support frame; the roller is arranged on the rolling wheel assembly, and the transmission steel belt is wound around the outside of the roller to realize the folding of the transmission steel belt between the support frame and the connecting seat.

[0011] As a further improvement of the present invention, the pallet claw assembly includes: a pallet, a rotating shaft, a deep groove ball bearing, a magnet assembly and a mounting seat, the two ends of the rotating shaft are respectively connected to the push rod through the mounting seat, and a deep groove ball bearing is provided between the rotating shaft and the mounting seat, one end of the rotating shaft is provided with a pallet, the magnet assembly is nested and fixed on the outside of the rotating shaft, the magnet assembly is magnetically coupled to the flip drive assembly, and under the drive of the flip drive assembly, the magnet assembly drives the rotating shaft to rotate to realize a 360° flip of the pallet.

[0012] As a further improvement of the present invention, the fixed flange includes a first fixed flange and a second fixed flange, and the telescopic drive assembly includes a first magnetic coupling rotating assembly, a second servo motor and a first gear shaft, the output end of the second servo motor is connected to the first magnetic coupling rotating assembly, one end of the first gear shaft is connected to the first magnetic coupling rotating assembly, and the other end of the first gear shaft is connected to the steel belt seat; the rotation drive assembly includes a second magnetic coupling rotating assembly, a first servo motor and a second gear shaft, the output end of the first servo motor is connected to the second magnetic coupling rotating assembly, one end of the second gear shaft is connected to the second magnetic coupling rotating assembly, and the other end of the second gear shaft is connected to the movable frame; the first The gear shaft is nested inside the second gear shaft, the support sleeve is nested outside the second gear shaft, the bellows is nested outside the support sleeve, the support sleeve is fixed to the first fixed flange through a self-aligning ball bearing, and a connecting rod is provided between the bellows and the first fixed flange; the flip drive assembly includes a magnetic shaft assembly, a bevel gear pair, a third magnetic coupling rotating assembly and a third servo motor, the third magnetic coupling rotating assembly and the third servo motor are arranged on the second fixed flange, one end of the third magnetic coupling rotating assembly is connected to the output end of the third servo motor, the other end of the third magnetic coupling rotating assembly is connected to the magnetic shaft assembly through a bevel gear pair, and the magnetic shaft assembly is magnetically coupled to the magnet assembly.

[0013] As a further improvement of the present invention, a rolling bearing assembly is provided inside the rolling wheel assembly, and the rolling bearing assembly is rollingly connected to the upper and lower sides of the moving frame to achieve reciprocating movement of the rolling wheel assembly along the moving frame.

[0014] As a further improvement of the present invention, a limit block is provided on the side of the rolling wheel assembly, and the limit block is in contact with the left and right sides of the mobile frame; mechanical limit devices are provided at both ends of the mobile frame to limit the extreme position of the rolling wheel assembly moving on the mobile frame.

[0015] As a general technical concept, the present invention also provides a control method applicable to the above-mentioned vacuum tray flipping robot, including the rotation control of the robot, the telescopic control of the tray and the flipping control of the tray, wherein:

[0016] The rotation control of the manipulator is as follows: the first servo motor, the second servo motor and the third servo motor rotate simultaneously; the forward speed of the first servo motor is X rpm; the reverse speed of the second servo motor is Y=aX rpm, where a is the transmission ratio of the second servo motor to the first servo motor; the forward speed of the third servo motor is Z=bX rpm, where b is the transmission ratio of the third servo motor to the first servo motor; the three servo motors move simultaneously, the manipulator rotates as a whole, and the rotation direction is the same as the rotation direction of the first servo motor;

[0017] The extension and retraction of the pallet is controlled as follows: the first servo motor and the third servo motor are stationary, the second servo motor is reversed, the driving steel belt is contracted, the pallet moves forward, and the spring is compressed; the second servo motor is forward, the spring is extended, the wound driving steel belt is straightened, and the pallet claw assembly retracts to the initial position;

[0018] The flipping control of the tray is as follows: first extend the tray to the target position, stop the first and second servo motors, and rotate the third servo motor. The tray flips at an angle V=cR, where c is the transmission gear ratio of the third servo motor and R is the rotation angle of the third servo motor.

[0019] Compared with the prior art, the advantages of the present invention are:

[0020] 1. The vacuum tray flipping manipulator and control method thereof of the present invention comprises a transmission device, a driving device and a tray claw assembly forming the main structure of the manipulator, and a fixed flange plate realizing a sealed connection between the manipulator and the vacuum chamber. The transmission device and the tray claw assembly are arranged in the vacuum chamber, and the driving device is arranged outside the vacuum chamber. The driving device is used to drive the tray claw assembly to freely extend and retract, rotate 360 ​​degrees and flip up and down in the vacuum chamber, thereby well meeting the sample transfer requirements of a multi-chamber complex high vacuum system.

[0021] 2. The vacuum tray flipping manipulator and control method of the present invention adopts a driving form in which a servo motor drives a magnetic coupling device to rotate, adopts a steel belt plus spring form to perform linear motion, and adopts a magnetic coupling form to connect parallel axes to realize the flipping of the tray. There is no friction and no impact on the ultra-high vacuum environment. It can be used in a vacuum degree of 5×10 - 9 It operates under the conditions of Pa and has a wide range of applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure principle of the vacuum tray turning robot in a specific embodiment of the present invention;

[0023] Figure 2It is a schematic diagram of the cross-sectional structure principle of the vacuum tray turning robot in a specific embodiment of the present invention;

[0024] Figure 3 It is a schematic diagram of the structural principle of a pallet claw assembly in a specific embodiment of the present invention;

[0025] Figure 4 It is a schematic diagram of the structural principle of a mechanical limit block in a specific embodiment of the present invention;

[0026] Figure 5 It is a schematic diagram of the installation structure principle of the rolling bearing assembly in a specific embodiment of the present invention;

[0027] Figure 6 It is a schematic diagram of the structural principle of the cooperation between the magnetic shaft assembly and the first arc-shaped magnet assembly in a specific embodiment of the present invention;

[0028] Figure 7 It is a schematic diagram of the structural principle of the vacuum tray turning robot in a specific embodiment of the present invention after removing the turning drive assembly and the slide rail assembly;

[0029] Figure 8 It is a schematic diagram of the structural principle of the vacuum tray turning robot in a specific embodiment of the present invention after removing the turning drive component;

[0030] Fig. 9 It is a schematic diagram of the structural principle of the connection between the steel belt and the mounting plate in a specific embodiment of the present invention;

[0031] Fig.10 It is a schematic diagram of the layout of the vacuum tray flipping robot in the transfer chamber in a specific embodiment of the present invention;

[0032] Fig.11 It is a schematic diagram of the layout of the position sensor in a specific embodiment of the present invention;

[0033] Legend: 1. First fixed flange; 101. Second fixed flange; 2. Roller assembly; 21. First gear shaft; 22. Second gear shaft; 24. Support sleeve; 25. Self-aligning ball bearing; 26. Connecting rod; 27. Fixed plate; 28. Support frame; 3. Moving frame; 4. Slide rail assembly; 5. Spring; 51. Fixed seat; 52. Steel belt seat; 53. Mounting plate; 54. Guide rod; 55. Drive steel belt; 6. First magnetic coupling rotating assembly; 7. Second magnetic coupling rotating assembly; 71. Third magnetic coupling rotating assembly; 8. Tray claw assembly; 81. Tray; 82. Rotating shaft; 83 , deep groove ball bearing; 84, magnet assembly; 85, mounting seat; 9, steel belt transmission assembly; 91, transmission steel belt; 92, roller; 93, connecting seat; 10, bellows; 11, first servo motor; 12, second servo motor; 121, third servo motor; 13, rolling bearing assembly; 14, mechanical limit device; 141, limit block; 15, connecting rod; 16, push rod; 33, magnetic shaft assembly; 34, bevel gear pair; 35, induction baffle; 351, first position sensor; 352, second position sensor; 353, third position sensor; 354, fourth position sensor. DETAILED DESCRIPTION

[0034] The present invention is further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0035] In the description of the present invention, it should be understood that the terms "side", "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0036] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0037] Example

[0038] like Figures 1 to 11As shown, the vacuum tray flipping robot of the present invention comprises: a fixed flange, a transmission device, a driving device and a pallet claw assembly 8. The pallet claw assembly 8 carries the sample and transports the sample to the target cavity position. A transmission device is provided between the driving device and the pallet claw assembly 8, and the driving force device transmits power to the pallet claw assembly 8 through the transmission device to drive the pallet claw assembly 8 to extend, rotate and flip. The vacuum tray flipping robot is sealed with the vacuum cavity through the fixed flange, and the driving device is installed outside the vacuum cavity through the fixed flange. The transmission device and the pallet claw assembly 8 are both located in the vacuum cavity. The driving device and the transmission device are sealed by a bellows 10, and the driving power is transmitted through a magnetic coupling device.

[0039] In this embodiment, the main structure of the manipulator is composed of a transmission device, a driving device and a pallet claw assembly. The sealed connection between the manipulator and the vacuum chamber is achieved by a fixed flange. The transmission device and the pallet claw assembly are arranged in the vacuum chamber, and the driving device is arranged outside the vacuum chamber. The driving device is used to drive the pallet claw assembly to freely extend and retract, rotate 360° and flip up and down in the vacuum chamber, which well meets the sample transfer requirements of a multi-chamber complex high vacuum system.

[0040] like Figure 1 and Figure 2 As shown, the driving device includes a telescopic driving assembly, a rotating driving assembly and a flipping driving assembly; the transmission device includes a rolling wheel assembly 2, a mobile frame 3, a slide rail assembly 4, a steel belt transmission assembly 9 and a spring transmission assembly. The mobile frame 3 is composed of four square tubes to form a rectangular frame. Two groups of rolling wheel assemblies 2 are respectively mounted on both sides of the mobile frame 3. The slide rail assembly 4 is connected to the rolling wheel assembly 2 through the steel belt transmission assembly 9. The pallet claw assembly 8 is connected to the slide rail assembly 4 and is located inside the mobile frame 3. The rolling wheel assembly 2 is connected to the telescopic driving assembly through the spring transmission assembly. Under the drive of the telescopic driving assembly, the spring transmission assembly extends or contracts, and drives the rolling wheel assembly 2 to translate along the two sides of the mobile frame 3, so as to achieve the extension or contraction of the steel belt transmission assembly 9, and then the extension or retraction of the pallet claw assembly 8. The mobile frame 3 is connected to the rotating driving assembly. Under the drive of the rotating driving assembly, the mobile frame 3 drives the spring transmission assembly, the rolling wheel assembly 2, the slide rail assembly 4, the pallet claw assembly 8 and the steel belt transmission assembly 9 to rotate along the circumferential direction. The tray claw assembly 8 is connected to the flip driving assembly. Driven by the flip driving assembly, the tray claw assembly 8 performs a 360° flip to take and place samples.

[0041] like Figure 5 As shown, two rows of opposite rolling bearing assemblies 13 are provided inside the rolling wheel assembly 2 , and the two rows of rolling bearing assemblies 13 are rollingly connected to the upper and lower sides of the moving frame 3 respectively, so as to realize the reciprocating movement of the rolling wheel assembly 2 along the long side of the moving frame 3 .

[0042] like Figure 4 As shown, a limit block 141 is provided on the side of the rolling wheel assembly 2, and the limit block 141 is in contact with the left and right sides of the mobile frame 3 to limit the left and right deviation of the rolling wheel assembly 2 during movement, thereby ensuring that the rolling wheel assembly 2 maintains a straight line movement along the mobile frame 3. Mechanical limit devices 14 are provided at both the front and rear ends of the mobile frame 3 to limit the extreme position of the rolling wheel assembly 2 on the mobile frame 3.

[0043] like Figure 7 and Fig. 9 As shown, the spring transmission assembly includes a spring 5, a fixed seat 51, a steel belt seat 52, a mounting plate 53, a guide rod 54 and a driving steel belt 55. The fixed seat 51 is connected and fixed to the mobile frame 3, the mounting plate 53 is connected and fixed to the rolling wheel assembly 2, one end of the guide rod 54 is connected to the fixed seat 51, the other end of the guide rod 54 penetrates the mounting plate 53 and extends to the outside of the rolling wheel assembly 2, the spring 5 is sleeved on the outside of the guide rod 54, and one end of the spring 5 is connected to the fixed seat 51, and the other end of the spring 5 is connected to the mounting plate 53. The steel belt seat 52 is connected to the telescopic driving assembly, one end of the driving steel belt 55 is rotated and wound on the steel belt seat 52, and the other end of the driving steel belt 55 is connected to the end of the rolling wheel assembly 2. When the telescopic driving assembly drives the steel belt seat 52 to rotate, the driving steel belt 55 extends or contracts around the steel belt seat 52, so as to drive the spring 5 to extend or contract, drive the roller assembly 2 to move along the mobile frame 3, and finally realize the extension or retraction of the tray claw assembly 8. The steel belt drive does not produce friction, has precise control and no risk of contamination, and improves the cleanliness of the vacuum chamber.

[0044] like Figure 3 As shown, the slide rail assembly 4 includes a connecting rod 15 and a pushing rod 16, and the connecting rod 15 and the pushing rod 16 are symmetrically arranged in pairs. The connecting rod 15 is connected and fixed to the rolling wheel assembly 2, and the pushing rod 16 is slidably nested inside the connecting rod 15, and the pushing rod 16 is connected and fixed to the pallet claw assembly 8. The steel belt transmission assembly 9 corresponds to the pushing rod 16, and a total of two groups are set, which act when the rolling wheel assembly 2 moves forward and backward. One end of the steel belt transmission assembly 9 is connected and fixed to the pushing rod 16, and the other end of the steel belt transmission assembly 9 is connected and fixed to the rolling wheel assembly 2. When the rolling wheel assembly 2 moves along the moving frame 3, the steel belt transmission assembly 9 extends or contracts, thereby realizing that the pushing rod 16 drives the pallet claw assembly 8 to extend or retract. The steel belt transmission assembly 9 assists the movement of the pushing rod 16, which improves the accuracy of the movement of the pushing rod 16, and also improves the accuracy of the movement of the pallet claw assembly 8. In this embodiment, the extension distance of the pushing rod 16 is equal to twice the movement distance of the rolling wheel assembly 2, so the manipulator of this embodiment can be used for long-distance pallet transmission.

[0045] like Figure 7 and Figure 8As shown, the rolling wheel assembly 2 includes a support frame 28, which spans the moving frame 3 and is perpendicular to the extension direction of the pallet claw assembly 8. The steel belt transmission assembly 9 includes a transmission steel belt 91, a roller 92 and a connecting seat 93, the connecting seat 93 is connected to the push rod 16, one end of the transmission steel belt 91 is connected to the connecting seat 93, and the other end of the transmission steel belt 91 is connected to the support frame 28. The roller 92 is arranged on the rolling wheel assembly 2, and the transmission steel belt 91 is wound around the outside of the roller 92 to realize the transmission steel belt 91 to be folded back between the support frame 28 and the connecting seat 93.

[0046] like Figure 3 As shown, the tray claw assembly 8 includes: a tray 81, a rotating shaft 82, a deep groove ball bearing 83, a magnet assembly 84 and a mounting seat 85. Both ends of the rotating shaft 82 are connected to the push rod 16 through the mounting seat 85, and a deep groove ball bearing 83 is provided between the rotating shaft 82 and the mounting seat 85. A tray 81 is provided at one end of the rotating shaft 82, and the magnet assembly 84 is nested and fixed on the outside of the rotating shaft 82. The magnet assembly 84 is magnetically coupled with the flip driving assembly. Under the drive of the flip driving assembly, the magnet assembly 84 drives the rotating shaft 82 to rotate, so as to realize the 360° flipping of the tray 81.

[0047] like Figure 1 and Figure 2 As shown, the fixed flange includes a first fixed flange 1 and a second fixed flange 101. The telescopic drive assembly includes a first magnetic coupling rotating assembly 6, a second servo motor 12 and a first gear shaft 21. The output end of the second servo motor 12 is rotatably connected to the first magnetic coupling rotating assembly 6 through a gear pair assembly, one end of the first gear shaft 21 is connected to the first magnetic coupling rotating assembly 6, and the other end of the first gear shaft 21 is connected to the steel belt seat 52. When the second servo motor 12 rotates forward, the first magnetic coupling rotating assembly 6 drives the first gear shaft 21 to rotate forward, and the steel belt seat 52 also rotates forward to recover the driving steel belt 55. As the length of the driving steel belt 55 is shortened, the rolling wheel assembly 2 moves forward along the moving frame 3, the spring 5 is compressed along the guide rod 54, and the tray 81 extends. When the second servo motor 12 rotates in the opposite direction, the first magnetic coupling rotating assembly 6 drives the first gear shaft 21 to rotate in the opposite direction, and the steel belt seat 52 also rotates in the opposite direction to release the driving steel belt 55. As the length of the driving steel belt 55 increases, the rolling wheel assembly 2 moves in the opposite direction along the moving frame 3, the spring 5 gradually resets, and the tray 81 retracts.

[0048] like Figure 1 and Figure 2As shown, the rotary drive assembly includes a second magnetic coupling rotary assembly 7, a first servo motor 11 and a second gear shaft 22. The output end of the first servo motor 11 is connected to the second magnetic coupling rotary assembly 7 through a gear pair assembly, one end of the second gear shaft 22 is connected to the second magnetic coupling rotary assembly 7, and the other end of the second gear shaft 22 is connected to the bottom of the mobile frame 3. Driven by the first servo motor 11, the second magnetic coupling rotary assembly 7 drives the second gear shaft 22 to rotate, thereby driving the mobile frame 3 and the components such as the rolling wheel assembly 2, the slide rail assembly 4, the tray claw assembly 8 and the steel belt transmission assembly 9 arranged on the mobile frame 3 to rotate 360° as a whole.

[0049] Furthermore, the first gear shaft 21 is nested inside the second gear shaft 22, the support sleeve 24 is nested outside the second gear shaft 22, the second gear shaft 22 and the support sleeve 24 are positioned by bearings, the bellows 10 is nested outside the support sleeve 24, and the support sleeve 24 is fixed on the first fixed flange 1 through a self-aligning ball bearing 25, and the inner and outer rings of the self-aligning ball bearing 25 can be adjusted eccentrically. Three connecting rods 26 are evenly distributed between the bellows 10 and the first fixed flange 1. When the manipulator needs to be tilted due to gravity or other factors, the tilt angle of the manipulator can be adjusted by adjusting the length of the assembly position of the three connecting rods 26 to make it in a horizontal position.

[0050] like Figure 1 , Figure 2 and Figure 6 As shown, the flip drive assembly includes a magnetic shaft assembly 33, a bevel gear pair 34, a third magnetic coupling rotating assembly 71 and a third servo motor 121. The third magnetic coupling rotating assembly 71 and the third servo motor 121 are arranged on the second fixed flange 101, one end of the third magnetic coupling rotating assembly 71 is connected to the output end of the third servo motor 121, and the other end of the third magnetic coupling rotating assembly 71 is connected to the magnetic shaft assembly 33 through the bevel gear pair 34, and the magnetic shaft assembly 33 is magnetically coupled to the magnet assembly 84. The third servo motor 121 drives the third magnetic coupling rotating assembly 71 to drive the bevel gear pair 34 in the vacuum chamber, and the bevel gear pair 34 is connected to the magnetic shaft assembly 33, thereby driving the tray 81 to flip 360° in the vacuum chamber.

[0051] In this embodiment, the axial length of the magnet assembly 84 is equal to the compression length of the spring 5. When the robot arm is extended, the magnet assembly 84 and the magnetic shaft assembly 33 will not be demagnetized, and the magnetic force is used to ensure that the flipping angle of the tray 81 is accurate.

[0052] In this embodiment, the rail assembly 4 and the rotating shaft 82 together form the arm of the manipulator. The telescopic length of the arm can be designed according to the actual connection distance between the cavities. The travel distance of the tray 81 is long, and the tray 81 can be turned over at any angle of 0° to 360° in the vacuum chamber, which can realize the handover, transfer and flipping of samples in various systems. Through the coordinated connection of the steel belt and the spring, the manipulator can accurately control the telescopic movement of the tray along the handover direction.

[0053] In this embodiment, the entire manipulator can rotate centrally and can rotate 360° under the drive of the magnetic coupling rotating assembly. Under the control of the servo motor, the target cavity transfer tray can be accurately found. At the same time, a high-precision position sensor is installed in the direction of the target position. The sensor receives the signal and feeds back to the servo motor, which can accurately control the position reached by the manipulator. In this embodiment, all servo motors are outside the vacuum, and the servo motors transmit power to the inside of the vacuum cavity through the magnetic shaft device. The inside and outside of the vacuum cavity are sealed with metal, so the inside of the vacuum cavity can reach an ultra-high vacuum state.

[0054] This embodiment also provides a control method applicable to the above-mentioned vacuum tray flipping robot, including rotation control of the robot, extension control of the tray 81 and flipping control of the tray 81.

[0055] The rotation control of the manipulator is as follows: the first servo motor 11, the second servo motor 12 and the third servo motor 121 rotate simultaneously; the forward speed of the first servo motor 11 is X rpm; the reverse speed of the second servo motor 12 is Y=aXrpm, where a is the transmission ratio of the second servo motor 12 to the first servo motor 11; the forward speed of the third servo motor 121 is Z=bX rpm, where b is the transmission ratio of the third servo motor 121 to the first servo motor 11; the three servo motors move simultaneously, the manipulator rotates as a whole, and the rotation direction is the same as the rotation direction of the first servo motor 11.

[0056] The extension and retraction of the tray 81 is controlled as follows: the first servo motor 11 and the third servo motor 121 are stationary, the second servo motor 12 reverses, the driving steel belt 55 contracts, the tray 81 moves forward, and the spring 5 is compressed; the second servo motor 12 rotates forward, the spring 5 extends, the wound driving steel belt 55 is straightened, and the tray claw assembly 8 retracts to the initial position.

[0057] The flipping control of the tray 81 is as follows: first extend the tray 81 to the target position, stop the first servo motor 11 and the second servo motor 12, and rotate the third servo motor 121. The flipping angle of the tray 81 is V=cR, where c is the transmission gear ratio of the third servo motor 121, and R is the rotation angle of the third servo motor 121.

[0058] like Figure 1 , Fig.10 and Fig.11 As shown, in order to ensure that the robot rotates and the tray 81 can reach the accurate position, a high-precision first position sensor 351, a second position sensor 352, a third position sensor 353 and a fourth position sensor 354 are assembled in the target cavity, and a sensing baffle 35 is provided on the rotating shaft 82 inside the robot. When the sensing baffle 35 reaches the sensor position, the sensor signal is triggered and fed back to the PLC, and the PLC sends a command to the servo motor to stop / rotate.

[0059] The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments. All technical solutions under the concept of the present invention belong to the protection scope of the present invention. It should be pointed out that for ordinary technicians in this technical field, some improvements and modifications without departing from the principle of the present invention should also be regarded as the protection scope of the present invention.

Claims

1. A vacuum tray turning robot, characterized in that: include: A fixed flange, a transmission device, a drive device and a pallet claw assembly (8), wherein a transmission device is provided between the drive device and the pallet claw assembly (8), and a driving force device transmits power to the pallet claw assembly (8) through the transmission device to drive the pallet claw assembly (8) to extend, rotate and flip; the vacuum pallet flipping robot is sealed with the vacuum cavity through the fixed flange, and the drive device is installed outside the vacuum cavity through the fixed flange, the transmission device and the pallet claw assembly (8) are both located in the vacuum cavity, the drive device and the transmission device are sealed by a bellows (10), and the driving power is transmitted through a magnetic coupling device.

2. The vacuum tray turning robot according to claim 1, characterized in that: The driving device comprises a telescopic driving assembly, a rotating driving assembly and a flipping driving assembly; the transmission device comprises a rolling wheel assembly (2), a mobile frame (3), a slide rail assembly (4), a steel belt transmission assembly (9) and a spring transmission assembly; a plurality of rolling wheel assemblies (2) are mounted on both sides of the mobile frame (3); the slide rail assembly (4) is connected to the rolling wheel assembly (2) via the steel belt transmission assembly (9); the tray claw assembly (8) is connected to the slide rail assembly (4) and is located on the inner side of the mobile frame (3); the rolling wheel assembly (2) is connected to the telescopic driving assembly via the spring transmission assembly; under the drive of the telescopic driving assembly, the spring transmission assembly The movable assembly extends or contracts, and drives the rolling wheel assembly (2) to translate along both sides of the movable frame (3), so as to achieve the extension or contraction of the steel belt transmission assembly (9), and further achieve the extension or retraction of the pallet claw assembly (8); the movable frame (3) is connected to the rotation drive assembly, and under the drive of the rotation drive assembly, the movable frame (3) drives the spring transmission assembly, the rolling wheel assembly (2), the slide rail assembly (4), the pallet claw assembly (8) and the steel belt transmission assembly (9) to rotate in the circumferential direction; the pallet claw assembly (8) is connected to the flip drive assembly, and under the drive of the flip drive assembly, the pallet claw assembly (8) is flipped 360 degrees to take and place samples.

3. The vacuum tray turning robot according to claim 2, characterized in that: The spring transmission assembly comprises a spring (5), a fixed seat (51), a steel belt seat (52), a mounting plate (53), a guide rod (54) and a driving steel belt (55); the fixed seat (51) is connected and fixed to the movable frame (3); the mounting plate (53) is connected and fixed to the rolling wheel assembly (2); one end of the guide rod (54) is connected to the fixed seat (51); the other end of the guide rod (54) passes through the mounting plate (53) and extends to the outside of the rolling wheel assembly (2); the spring (5) is sleeved on the outside of the guide rod (54); one end of the spring (5) is connected to the fixed seat (51); the other end of the spring (5) is connected to the mounting plate (53); the steel belt seat (52) is connected to the telescopic driving assembly; one end of the driving steel belt (55) is rotatably wound around the steel belt seat (52); the other end of the driving steel belt (55) is connected to the end of the rolling wheel assembly (2).

4. The vacuum tray turning robot according to claim 3, characterized in that: The slide rail assembly (4) comprises a connecting rod (15) and a pushing rod (16), wherein the connecting rod (15) is connected and fixed to the rolling wheel assembly (2), the pushing rod (16) is slidably nested inside the connecting rod (15), and the pushing rod (16) is connected and fixed to the pallet claw assembly (8), one end of the steel belt transmission assembly (9) is connected and fixed to the pushing rod (16), and the other end of the steel belt transmission assembly (9) is connected and fixed to the rolling wheel assembly (2); when the rolling wheel assembly (2) moves along the moving frame (3), the steel belt transmission assembly (9) extends or contracts, thereby realizing that the pushing rod (16) drives the pallet claw assembly (8) to extend or retract.

5. The vacuum tray turning robot according to claim 4, characterized in that: The rolling wheel assembly (2) comprises a support frame (28), the support frame (28) being spanned on the moving frame (3) and being perpendicular to the extension and retraction direction of the tray claw assembly (8); the steel belt transmission assembly (9) comprises a transmission steel belt (91), a roller (92) and a connecting seat (93), the connecting seat (93) being connected to the pushing rod (16), one end of the transmission steel belt (91) being connected to the connecting seat (93), and the other end of the transmission steel belt (91) being connected to the support frame (28); the roller (92) being arranged on the rolling wheel assembly (2), the transmission steel belt (91) being wound around the outer side of the roller (92) so as to realize the transmission steel belt (91) being folded back between the support frame (28) and the connecting seat (93).

6. The vacuum tray turning robot according to claim 5, characterized in that: The tray claw assembly (8) comprises: a tray (81), a rotating shaft (82), a deep groove ball bearing (83), a magnet assembly (84) and a mounting seat (85); both ends of the rotating shaft (82) are respectively connected to the push rod (16) through the mounting seat (85), and a deep groove ball bearing (83) is provided between the rotating shaft (82) and the mounting seat (85); one end of the rotating shaft (82) is provided with a tray (81); the magnet assembly (84) is nested and fixed on the outside of the rotating shaft (82); the magnet assembly (84) is magnetically coupled with the flip driving assembly; under the drive of the flip driving assembly, the magnet assembly (84) drives the rotating shaft (82) to rotate, so as to realize 360° flipping of the tray (81).

7. The vacuum tray turning robot according to claim 6, characterized in that: The fixed flange comprises a first fixed flange (1) and a second fixed flange (101); the telescopic drive assembly comprises a first magnetic coupling rotating assembly (6), a second servo motor (12) and a first gear shaft (21); the output end of the second servo motor (12) is connected to the first magnetic coupling rotating assembly (6), one end of the first gear shaft (21) is connected to the first magnetic coupling rotating assembly (6), and the other end of the first gear shaft (21) is connected to the steel belt seat (52); the rotating drive assembly comprises a second magnetic coupling rotating assembly (7), a first servo motor (11) and a second gear shaft (22); the output end of the first servo motor (11) is connected to the second magnetic coupling rotating assembly (7), one end of the second gear shaft (22) is connected to the second magnetic coupling rotating assembly (7), and the other end of the second gear shaft (22) is connected to the moving frame (3); the first gear shaft (21) is nested inside the second gear shaft (22), A support sleeve (24) is embedded on the outer side of the second gear shaft (22), a bellows (10) is embedded on the outer side of the support sleeve (24), the support sleeve (24) is fixed on the first fixed flange (1) through a self-aligning ball bearing (25), and a connecting rod (26) is provided between the bellows (10) and the first fixed flange (1); the flip drive assembly comprises a magnetic shaft assembly (33), a bevel gear pair (34), a third magnetic coupling rotating assembly (71) and a third servo motor (121), the third magnetic coupling rotating assembly (71) and the third servo motor (121) are arranged on the second fixed flange (101), one end of the third magnetic coupling rotating assembly (71) is connected to the output end of the third servo motor (121), the other end of the third magnetic coupling rotating assembly (71) is connected to the magnetic shaft assembly (33) through the bevel gear pair (34), and the magnetic shaft assembly (33) is magnetically coupled to the magnet assembly (84).

8. The vacuum tray turning robot according to any one of claims 2 to 7, characterized in that: A rolling bearing assembly (13) is provided inside the rolling wheel assembly (2), and the rolling bearing assembly (13) is rollingly connected to the upper and lower sides of the moving frame (3) to enable the rolling wheel assembly (2) to reciprocate along the moving frame (3).

9. The vacuum tray turning robot according to claim 8, characterized in that: The side of the rolling wheel assembly (2) is provided with a limit block (141), and the limit block (141) is in contact with the left and right side surfaces of the moving frame (3); both ends of the moving frame (3) are provided with mechanical limit devices (14) to limit the extreme position of the rolling wheel assembly (2) on the moving frame (3).

10. A control method for the vacuum tray turning robot according to any one of claims 1 to 9, characterized in that: It includes the rotation control of the manipulator, the telescopic control of the tray (81) and the flipping control of the tray (81), wherein: The rotation control of the manipulator is as follows: the first servo motor (11), the second servo motor (12) and the third servo motor (121) rotate simultaneously; the forward rotation speed of the first servo motor (11) is X rpm; the reverse rotation speed of the second servo motor (12) is Y=aX rpm, wherein a is the transmission ratio of the second servo motor (12) to the first servo motor (11); the forward rotation speed of the third servo motor (121) is Z=bX rpm, wherein b is the transmission ratio of the third servo motor (121) to the first servo motor (11); the three servo motors move simultaneously, the manipulator rotates as a whole, and the rotation direction is the same as the rotation direction of the first servo motor (11); The extension and retraction of the tray (81) is controlled as follows: the first servo motor (11) and the third servo motor (121) are stationary, the second servo motor (12) rotates in the reverse direction, the driving steel belt (55) contracts, the tray (81) moves forward, and the spring (5) is compressed; the second servo motor (12) rotates forward, the spring (5) extends, the wound driving steel belt (55) is straightened, and the tray claw assembly (8) retracts to the initial position; The turning control of the tray (81) is as follows: firstly, the tray (81) is extended to a target position, the first servo motor (11) and the second servo motor (12) stop rotating, the third servo motor (121) rotates, and the tray (81) turns over at an angle V=cR, wherein c is the transmission gear ratio of the third servo motor (121), and R is the rotation angle of the third servo motor (121).

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