Vacuum fluorination device

Abstract

The invention relates to the field of vacuum fluorination, in particular to a vacuum fluorination device which comprises a vacuum box, an air inlet and an air outlet are formed in the vacuum box, an air inlet pipe is installed at the air inlet, extends into the vacuum box and is used for introducing fluorine into the vacuum box, and an air outlet mechanism is installed at the end, located in the vacuum box, of the air inlet pipe. The gas outlet mechanism comprises a conveying assembly and a uniform distribution assembly, the conveying assembly is used for conveying fluorine gas, the uniform distribution assembly is installed on the vacuum box, and the uniform distribution assembly is used for guiding the fluorine gas blown out of the conveying assembly and enabling the fluorine gas to be uniformly distributed in the vacuum box. And the effect of improving the fluorine gas distribution uniformity can be achieved.

Description

Technical Field

[0001] The present application relates to the field of vacuum fluorination, and in particular to a vacuum fluorination device. Background Art

[0002] When the vacuum fluorination furnace is working, the furnace chamber must be filled with highly harmful fluorine gas. Therefore, the vacuum degree of the furnace body is required to be very high and the gas cannot leak.

[0003] In the prior art, fluorine gas to increase fluidity is usually placed in the furnace of a vacuum fluorination furnace, and the fluorine gas reacts with the parts placed in the fluorination furnace. In order to make the fluorine gas react fully with the parts, it is necessary to improve the uniformity of the distribution of the fluorine gas so that the fluorine gas can be evenly distributed in the furnace.

[0004] At present, the existing method is to set a guide plate at the air inlet of the furnace body so that the fluorine gas passing through the guide plate can flow smoothly to the reaction area in the furnace body. However, this method of guiding the fluorine gas through the guide plate easily causes the fluorine gas to be concentrated in a certain area, thereby causing the fluorine gas to be unevenly distributed in the furnace body. Summary of the invention

[0005] In order to improve the uniformity of fluorine gas distribution in a furnace body, the present application provides a vacuum fluorination device.

[0006] The present application provides a vacuum fluorination device, which adopts the following technical solution: A vacuum fluorination device comprises a vacuum box, wherein the vacuum box is provided with an air inlet and an air outlet, an air inlet pipe is installed at the air inlet, and the air inlet pipe extends into the vacuum box, the air inlet pipe is used to introduce fluorine gas into the vacuum box, and an air outlet mechanism is installed at one end of the air inlet pipe located in the vacuum box, the air outlet mechanism comprises a conveying component and a uniform distribution component, the conveying component is used to convey fluorine gas, the uniform distribution component is installed on the vacuum box, and the uniform distribution component is used to guide the fluorine gas blown out of the conveying component and make the fluorine gas evenly distributed in the vacuum box.

[0007] By adopting the above technical solution, the fluorine gas is transported to the vacuum box through the air inlet pipe by the conveying component, and then the fluorine gas transported to the vacuum box is evenly blown into the vacuum box by the uniform distribution component, so that the fluorine gas can be evenly distributed in the vacuum box, thereby facilitating improving the uniformity of the distribution of the fluorine gas in the vacuum box.

[0008] In a specific possible implementation scheme, a connecting mechanism is installed at one end of the air intake pipe located in the vacuum box, and the connecting mechanism is used to connect the air intake pipe to the conveying assembly. The connecting mechanism includes a sleeve and a locking assembly. One end of the sleeve is sleeved on the end of the air intake pipe, and the other end extends into the vacuum box, and the other end of the sleeve is used to connect to the conveying assembly. The locking assembly is installed on the sleeve, and the locking assembly is used to lock the conveying assembly on the sleeve.

[0009] By adopting the above technical solution, the sleeve on the air intake pipe is connected to the conveying assembly, and the conveying assembly is locked on the sleeve by the locking assembly, thereby achieving a detachable connection between the air intake pipe and the conveying assembly, thereby facilitating the inspection and maintenance of the conveying assembly.

[0010] In a specific feasible implementation scheme, the locking assembly includes a locking ring, a locking spring and a locking plate, the locking plate is installed on the sleeve, and the locking plate is provided with at least two pieces, and at least two of the locking plates are equidistantly distributed on the sleeve, a locking block is installed on the locking plate, the locking block extends in a direction away from the sleeve, the locking spring is in a circular ring shape, and the locking plate is connected to the locking spring, the locking ring is slidably installed on the sleeve along the axial direction of the sleeve, and the locking ring is located on the inner side of the locking plate, a top block is installed on the outer side wall of the locking ring, and the top block is used to abut against the side wall of the locking plate close to the sleeve, a positioning plate is installed on the conveying assembly, the positioning plate is used to abut against the lower end of the locking ring, a positioning ring is provided on the peripheral side wall of the positioning plate, the upper end of the positioning ring is used to clamp with the locking block, and a reset piece is also installed on the sleeve, and the reset piece is connected to the locking ring.

[0011] By adopting the above technical solution, when the sleeve is connected to the conveying assembly, the positioning plate on the conveying assembly contacts the locking ring, so that the locking ring drives the top block to move and contact the side wall of the locking plate, thereby causing the locking plate to deform, so that the locking block on the locking plate is engaged with the positioning ring on the positioning plate, thereby locking the sleeve and the conveying assembly, thereby facilitating maintaining the stability of the connection between the air intake pipe and the conveying assembly.

[0012] In a specific possible implementation scheme, the reset member includes a reset spring, which is mounted on a sleeve on the sleeve, and one end of the reset spring is connected to the sleeve, and the other end is connected to the locking ring.

[0013] By adopting the above technical solution, when the positioning plate contacts the lower end of the locking ring, the locking ring moves upward and compresses the reset spring, so that when the locking relationship between the sleeve and the conveying assembly is released, the locking ring can be reset under the action of the reset spring, thereby facilitating the reset of the locking plate.

[0014] In a specific possible implementation manner, the positioning ring is detachably connected to the positioning plate via bolts.

[0015] By adopting the above technical solution, the positioning ring is separated from the positioning plate, thereby facilitating the separation of the sleeve from the conveying assembly. After the sleeve is separated from the conveying assembly, the positioning ring is separated from the locking plate, thereby realizing the disassembly of the conveying assembly.

[0016] In a specific possible implementation scheme, the delivery assembly includes a delivery main pipe and a dispersion pipe, a connecting pipe for connecting to a connecting mechanism is installed on the side wall of the delivery main pipe, the connecting pipe is used to connect the air inlet pipe with the delivery main pipe, a delivery hole is opened on the side wall of the delivery main pipe away from the connecting pipe, the dispersion pipe is installed on the side wall of the delivery main pipe, and a dispersion hole for fluorine gas to pass through is opened on the side wall of the dispersion pipe.

[0017] By adopting the above technical solution, the fluorine gas is transported from the air inlet pipe to the connecting pipe, so that the fluorine gas enters the main transport pipe from the connecting pipe, then enters the dispersion pipe from the main transport pipe, and enters the vacuum box through the transport hole and the dispersion hole, thereby facilitating the transportation of fluorine gas.

[0018] In a specific possible implementation scheme, the uniform distribution component includes uniform distribution blades, a uniform distribution rod and a power piece. The uniform distribution rod is installed in the vacuum box in the vertical direction, and one end of the uniform distribution rod extends upward, and the other end passes downward through the conveying assembly. The power piece is installed at the upper end of the vacuum box, and the power piece is connected to the upper end of the uniform distribution rod. The uniform distribution blades are provided with a plurality of pieces, and one end of the plurality of uniform distribution blades is installed at the lower end of the uniform distribution rod along the circumferential direction of the uniform distribution rod, and the other end of each of the uniform distribution blades extends in the direction away from the uniform distribution rod.

[0019] By adopting the above technical solution, the power member drives the distribution rod to rotate, so that the distribution rod drives the distribution blade to rotate, thereby stirring the fluorine gas in the vacuum box through the distribution blade, thereby facilitating improving the uniformity of the fluorine gas in the vacuum box.

[0020] In a specific possible implementation scheme, the power component includes a drive motor and a magnetic coupling, the drive motor is installed on the top wall of the vacuum box, the magnetic coupling is installed on the output end of the drive motor, and the magnetic coupling is also connected to the upper end of the uniform distribution rod.

[0021] By adopting the above technical solution, the driving motor drives the uniform distribution rod to rotate through the magnetic coupling, thereby driving the uniform distribution blades to rotate, thereby facilitating the stirring of the fluorine gas in the vacuum box.

[0022] In a specific possible implementation manner, the uniform distribution component further comprises a dispersion plate, which is installed in the vacuum box below the uniform distribution blades, and has a plurality of through holes for the fluorine gas to pass through.

[0023] By adopting the above technical solution, by setting a dispersion plate in the vacuum box, the stirred fluorine gas can enter the lower space of the vacuum box from the through holes of the dispersion plate, thereby facilitating the further uniform distribution of the fluorine gas in the vacuum box, thereby facilitating the fluorination work.

[0024] In summary, the present application includes at least one of the following beneficial effects: 1. The present application provides a gas outlet mechanism to facilitate the delivery of fluorine gas in the vacuum box through the gas outlet mechanism and to evenly disperse the fluorine gas in the reaction area, thereby facilitating the improvement of the uniformity of the distribution of fluorine gas in the vacuum box.

[0025] 2. The present application provides a connecting mechanism to facilitate the detachable connection of the conveying assembly to the air intake pipe through the connecting mechanism, thereby facilitating regular maintenance of the conveying assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a schematic structural diagram of the vacuum fluorination device of the present application.

[0027] Figure 2 It is a schematic diagram of the air outlet mechanism in the embodiment of the present application.

[0028] Figure 3 It is a bottom view of the conveying assembly in the embodiment of the present application.

[0029] Figure 4 It is an exploded view of the connection mechanism in the embodiment of the present application.

[0030] Figure 5 It is a schematic diagram of the installation of the connecting mechanism in the embodiment of the present application.

[0031] Description of reference numerals: 1. Vacuum box; 11. Air inlet pipe; 12. Air outlet pipe; 2. Air outlet mechanism; 21. Conveying assembly; 211. Conveying main pipe; 2111. Conveying hole; 212. Dispersion pipe; 2121. Dispersion hole; 213. Connecting pipe; 214. Positioning plate; 215. Positioning ring; 22. Uniform distribution assembly; 221. Uniform distribution blades; 222. Uniform distribution rod; 223. Driving motor; 224. Magnetic coupling; 225. Dispersion plate; 2251. Through hole; 3. Connecting mechanism; 31. Sleeve; 311. Mounting ring; 32. Locking assembly; 321. Locking ring; 322. Locking spring; 323. Locking plate; 324. Locking block; 325. Top block; 326. Reset spring. DETAILED DESCRIPTION

[0032] The present application is further described in detail below in conjunction with the accompanying drawings.

[0033] The present application discloses a vacuum fluorination device, referring to Figure 1 and Figure 2 , comprising a vacuum box 1, an air inlet is provided at the upper end of the vacuum box 1, an air outlet is provided at the lower end of the vacuum box 1, an air inlet pipe 11 is fixedly installed at the air inlet of the vacuum box 1, and the air inlet pipe 11 is used to be connected to an external gas source and used to transport fluorine gas into the vacuum box 1. One end of the air inlet pipe 11 extends into the vacuum box 1, and an air outlet mechanism 2 is detachably installed on one end of the air inlet pipe 11 located in the vacuum box 1 through a connecting mechanism 3, and the air outlet mechanism 2 is used to evenly distribute the fluorine gas transported into the vacuum box 1 in the vacuum box 1.

[0034] Reference Figure 2 and Figure 3 The air outlet mechanism 2 includes a conveying component 21 and a uniform distribution component 22. The conveying component 21 includes a conveying main pipe 211 and a dispersion pipe 212. A connecting pipe 213 is fixedly installed on the side wall of the conveying main pipe 211 in the vertical direction. The connecting pipe 213 is used to connect with the connecting mechanism 3 installed on the intake pipe 11, and the connecting pipe 213 connects the conveying main pipe 211 with the intake pipe 11. There are a plurality of dispersion pipes 212, and one end of the plurality of dispersion pipes 212 is installed on the side wall of the conveying main pipe 211. The plurality of dispersion pipes 212 are distributed on the side wall of the conveying main pipe 211 along the axis of the conveying main pipe 211, and each dispersion pipe 212 is connected with the conveying main pipe 211. A conveying hole 2111 is opened on the side wall of one side of the conveying main pipe 211 in the vertical direction. The conveying hole 2111 passes downward through the side wall of the conveying main pipe 211, and a plurality of dispersion holes 2121 are opened on the side wall of each dispersion pipe 212.

[0035] Reference Figure 2 The uniform distribution component 22 includes a uniform distribution blade 221, a uniform distribution rod 222 and a power part. The uniform distribution rod 222 is installed in the vacuum box 1 along the vertical direction, and the upper end of the uniform distribution rod 222 extends out of the vacuum box 1 and is rotatably connected to the top wall of the vacuum box 1. The lower end of the uniform distribution rod 222 passes downward through the conveying component 21. The uniform distribution blade 221 is provided with a plurality of blades, and one end of the uniform distribution blade 221 is fixedly connected to the side wall of the lower end of the uniform distribution rod 222, and the other end of the uniform distribution blade 221 extends in a direction away from the uniform distribution rod 222, and a plurality of uniform distribution blades 221 are arranged along the circumferential direction of the uniform distribution rod 222, and the uniform distribution blade 221 is located below the conveying component 21. The power part includes a drive motor 223 and a magnetic coupling 224. The drive motor 223 is fixedly mounted on the top wall of the vacuum box 1, and the output shaft of the drive motor 223 extends downward. One end of the magnetic coupling 224 is connected to the output shaft of the drive motor 223, and the other end of the magnetic coupling 224 is coaxially connected to the upper end of the uniform distribution rod 222.

[0036] Reference Figure 2 The uniform distribution component 22 also includes a dispersion plate 225, which is fixedly installed in the vacuum box 1, and the dispersion plate 225 is located below the uniform distribution blade 221, and a plurality of through holes 2251 are opened on the dispersion plate 225, and the plurality of through holes 2251 are used for the fluorine gas to pass through.

[0037] Reference Figure 2 and Figure 3 , the fluorine gas is transported to the connecting pipe 213 through the air inlet pipe 11, so that the fluorine gas enters the conveying main pipe 211 from the connecting pipe 213, and the fluorine gas enters the vacuum box 1 from the conveying hole 2111 on the conveying main pipe 211, and the fluorine gas transported to the conveying main pipe 211 also enters the dispersion pipe 212, and enters the vacuum box 1 from the dispersion hole 2121 on the dispersion pipe 212. Then, the driving motor 223 is operated, so that the driving motor 223 drives the uniform distribution rod 222 to rotate through the magnetic coupling 224, so that the uniform distribution rod 222 drives the uniform distribution blade 221 to rotate, so that the fluorine gas located above the uniform distribution blade 221 is discharged to the dispersion plate 225 below the uniform distribution blade 221, and the fluorine gas enters the space below the dispersion plate 225 from the plurality of through holes 2251 on the dispersion plate 225, so as to facilitate the fluorine gas to participate in the reaction.

[0038] Reference Figure 4 and Figure 5 The connection mechanism 3 includes a sleeve 31 and a locking assembly 32. One end of the sleeve 31 is sleeved on one end of the intake pipe 11 located in the vacuum box 1. The other end of the sleeve 31 extends along the axis of the intake pipe 11 to the end of the intake pipe 11, and the sleeve 31 is fixedly connected to the intake pipe 11. The cross section of the sleeve 31 is T-shaped, and the sleeve 31 is used for plugging the connecting pipe 213. The locking assembly 32 includes a locking ring 321, a locking spring 322 and a locking plate 323. The locking plates 323 are provided with a plurality of pieces, and the locking plates 323 are in an arc shape, and the plurality of locking plates 323 are arranged equidistantly along the circumferential direction of the sleeve 31. One end of the locking plate 323 is fixedly mounted on the bottom wall of the horizontal section of the upper end of the sleeve 31, and the other end of the locking plate 323 extends downward. There is a gap between the locking plate 323 and the outer wall of the sleeve 31, and a locking block 324 is fixedly mounted on the outer wall of the lower end of the locking plate 323. The locking spring 322 is in a circular ring shape and is sleeved on the outer wall of the sleeve 31 . The locking spring 322 passes through the side walls of a plurality of locking plates 323 in sequence.

[0039] Reference Figure 4 and Figure 5The cam 321 is provided with a protruding portion 324 which is provided on the top of the locking plate 323 and the locking plate 324 is provided with a protruding portion 324 which is provided on the top of the locking plate 323. A reset member is also installed on the sleeve 31, and the reset member includes a reset spring 326, one end of the reset spring 326 is fixedly connected to the bottom wall of the horizontal section at the upper end of the sleeve 31, and the other end of the reset spring 326 is fixedly connected to the top wall at the upper end of the locking ring 321.

[0040] Reference Figure 4 and Figure 5 A positioning plate 214 is fixedly installed on one end of the connecting pipe 213 close to the sleeve 31, and a positioning ring 215 is fixedly installed on the peripheral side wall of the positioning plate 214 by bolts (not shown in the figure). The cross-section of the positioning ring 215 is L-shaped, and a gap is left between the horizontal section of the positioning ring 215 with the L-shaped cross-section and the positioning plate 214, and the horizontal section of the positioning ring 215 extends toward the direction of the connecting pipe 213, and the horizontal section of the positioning ring 215 is used to engage with the locking block 324. In the initial state, the diameter of the circle where the end of the locking block 324 is located is smaller than the diameter of the circle where the horizontal section of the positioning ring 215 close to the end of the connecting pipe 213 is located.

[0041] Reference Figure 4 and Figure 5When the delivery assembly 21 needs to be installed on the intake pipe 11, the sleeve 31 is first installed on the intake pipe 11, and then the connecting pipe 213 is inserted into the sleeve 31, and the positioning ring 215 on the positioning plate 214 on the connecting pipe 213 is sleeved on the sleeve 31, and the top wall of the positioning plate 214 is used to abut the lower end of the locking ring 321, and the locking ring 321 is pushed in the direction of the return spring 326, so that the locking ring 321 compresses the return spring 326, and the top block 325 on the locking ring 321 gradually approaches the locking plate 323. When the connection between the mounting plate 311 and the connecting pipe 213 is completed, the horizontal section of the positioning ring 215 on the positioning plate 214 passes over the locking block 324 on the locking plate 323, and the top block 325 on the locking ring 321 contacts the side wall of the locking plate 323, thereby pushing the locking plate 323 away from the mounting ring 311, causing the locking plate 323 to produce elastic deformation, and causing a plurality of locking plates 323 to open the locking springs 322, and the locking block 324 on the locking plate 323 is engaged with the positioning ring 215 on the positioning plate 214, thereby positioning the connecting pipe 213 on the sleeve 31.

[0042] The working principle of the embodiment of the present application is as follows: by installing the sleeve 31 on the air intake pipe 11, and then plugging the connecting pipe 213 into the sleeve 31, the positioning plate 214 is sleeved on the sleeve 31, and the positioning plate 214 pushes the locking ring 321 to move, so that the locking ring 321 compresses the return spring 326, so that the top block 325 on the locking ring 321 gradually approaches the locking plate 323. When the air intake pipe 11 and the connecting pipe 213 are connected, the positioning ring 211 on the positioning plate 214 is The locking block 324 on the locking plate 323 is passed, and the top block 325 on the locking ring 321 contacts the side wall of the locking plate 323, thereby pushing the locking block 324 on the locking plate 323 away from the locking ring 321, so that the locking plates 323 open the locking springs 322, and the locking block 324 is engaged with the positioning ring 215 on the positioning plate 214, so that the connecting pipe 213 is positioned on the sleeve 31, so that the connecting pipe 213 is positioned and connected to the intake pipe 11.

[0043] Then, the fluorine gas is passed from the air inlet pipe 11 into the connecting pipe 213, and then transported from the connecting pipe 213 to the transport main pipe 211, so that the fluorine gas enters the vacuum box 1 from the transport hole 2111 on the transport main pipe 211, and the fluorine gas in the transport main pipe 211 also enters the dispersion pipe 212, and enters the vacuum box 1 through the dispersion hole 2121 on the dispersion pipe 212. Then, the magnetic coupling 224 is driven by the driving motor 223 to operate, so that the magnetic coupling 224 drives the uniform distribution rod 222 to rotate, so that the uniform distribution rod 222 drives the uniform distribution blade 221 to rotate, so that the fluorine gas located above the uniform distribution blade 221 is sucked into the bottom of the uniform distribution blade 221, and the fluorine gas passes through the through hole 2251 on the dispersion plate 225 and enters the reaction area below the dispersion plate 225, so that the fluorine gas participates in the reaction and can be evenly distributed in the vacuum box 1.

[0044] When it is necessary to inspect and repair the conveying assembly 21, the bolts are removed to separate the positioning ring 215 from the positioning plate 214, and then the connecting tube 213 is pulled out from the sleeve 31, so that the connecting tube 213 can be separated from the sleeve 31, thereby realizing the disassembly and inspection of the conveying assembly 21, and the positioning plate 214 is separated from the lower end of the locking ring 321, so that the locking ring 321 moves downward and resets under the action of the locking spring 322, so that the top block 325 on the locking ring 321 is separated from the locking plate 323, so that the locking plate 323 recovers its deformation, so that the locking block 324 on the locking plate 323 is separated from the horizontal section of the positioning ring 215, so that the positioning ring 215 can be removed from the locking plate 323 for reinstallation on the positioning plate 214.

[0045] The above are preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A vacuum fluorination device, comprising a vacuum box (1), wherein the vacuum box (1) is provided with an air inlet and an air outlet, characterized in that: An air inlet pipe (11) is installed at the air inlet, and the air inlet pipe (11) extends into the vacuum box (1). The air inlet pipe (11) is used to introduce fluorine gas into the vacuum box (1), and an air outlet mechanism (2) is installed at one end of the air inlet pipe (11) located in the vacuum box (1). The air outlet mechanism (2) includes a conveying component (21) and a uniform distribution component (22). The conveying component (21) is used to convey fluorine gas, and the uniform distribution component (22) is installed on the vacuum box (1). The uniform distribution component (22) is used to guide the fluorine gas blown out of the conveying component (21) and to evenly distribute the fluorine gas in the vacuum box (1).

2. A vacuum fluorination device according to claim 1, characterized in that: A connecting mechanism (3) is installed at one end of the air intake pipe (11) located in the vacuum box (1), and the connecting mechanism (3) is used to connect the air intake pipe (11) with the conveying assembly (21). The connecting mechanism (3) comprises a sleeve (31) and a locking assembly (32). One end of the sleeve (31) is sleeved on the end of the air intake pipe (11), and the other end extends into the vacuum box (1). The other end of the sleeve (31) is used to connect with the conveying assembly (21). The locking assembly (32) is installed on the sleeve (31), and the locking assembly (32) is used to lock the conveying assembly (21) on the sleeve (31).

3. A vacuum fluorination device according to claim 2, characterized in that: The locking assembly (32) comprises a locking ring (321), a locking spring (322) and a locking plate (323); the locking plate (323) is mounted on the sleeve (31); and at least two locking plates (323) are provided, and at least two locking plates (323) are equidistantly distributed on the sleeve (31); a locking block (324) is mounted on the locking plate (323); the locking block (324) extends in a direction away from the sleeve (31); the locking spring (322) is in a circular shape, and the locking plate (323) is connected to the locking spring (322); the locking ring (321) is slidably mounted on the sleeve (31) along the axial direction of the sleeve (31) 1), and the locking ring (321) is located on the inner side of the locking plate (323), a top block (325) is installed on the outer side wall of the locking ring (321), and the top block (325) is used to abut against the side wall of the locking plate (323) close to the sleeve (31), a positioning plate (214) is installed on the conveying component (21), and the positioning plate (214) is used to abut against the lower end of the locking ring (321), a positioning ring (215) is provided on the peripheral side wall of the positioning plate (214), and the upper end of the positioning ring (215) is used to be clamped with the locking block (324), and a reset piece is also installed on the sleeve (31), and the reset piece is connected to the locking ring (321).

4. A vacuum fluorination device according to claim 3, characterized in that: The reset member comprises a reset spring (326), which is installed on the sleeve (31), and one end of the reset spring (326) is connected to the sleeve (31), and the other end of the reset spring (326) is connected to the locking ring (321).

5. A vacuum fluorination device according to claim 3, characterized in that: The positioning ring (215) is detachably connected to the positioning plate (214) via bolts.

6. A vacuum fluorination device according to claim 1, characterized in that: The delivery assembly (21) comprises a delivery main pipe (211) and a dispersion pipe (212); a connecting pipe (213) for connecting to a connecting mechanism (3) is installed on the side wall of the delivery main pipe (211); the connecting pipe (213) is used to connect the air inlet pipe (11) with the delivery main pipe (211); a delivery hole (2111) is provided on the side wall of the delivery main pipe (211) away from the connecting pipe (213); the dispersion pipe (212) is installed on the side wall of the delivery main pipe (211); and a dispersion hole (2121) for fluorine gas to pass through is provided on the side wall of the dispersion pipe (212).

7. A vacuum fluorination device according to claim 6, characterized in that: The uniform distribution component (22) comprises a uniform distribution blade (221), a uniform distribution rod (222) and a power piece. The uniform distribution rod (222) is installed in the vacuum box (1) along the vertical direction, and one end of the uniform distribution rod (222) extends upward, and the other end passes through the conveying component (21) downward. The power piece is installed at the upper end of the vacuum box (1), and the power piece is connected to the upper end of the uniform distribution rod (222). The uniform distribution blade (221) is provided with a plurality of pieces, and one end of the plurality of uniform distribution blades (221) is installed at the lower end of the uniform distribution rod (222) along the circumferential direction of the uniform distribution rod (222), and the other end of each of the uniform distribution blades (221) extends in a direction away from the uniform distribution rod (222).

8. A vacuum fluorination device according to claim 7, characterized in that: The power component comprises a driving motor (223) and a magnetic coupling (224); the driving motor (223) is mounted on the top wall of the vacuum box (1); the magnetic coupling (224) is mounted on the output end of the driving motor (223); and the magnetic coupling (224) is also connected to the upper end of the uniform distribution rod (222).

9. A vacuum fluorination device according to claim 7, characterized in that: The uniform distribution component (22) further comprises a dispersion plate (225), wherein the dispersion plate (225) is installed in the vacuum box (1) below the uniform distribution blade (221), and the dispersion plate (225) is provided with a plurality of through holes (2251) for the fluorine gas to pass through.

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