Run-out measuring device for grinding end face of retaining ring and using method

Abstract

The invention belongs to the technical field of retaining ring detection, and particularly relates to a retaining ring grinding end face run-out measuring device and a using method, the retaining ring grinding end face run-out measuring device comprises a clamp, a sensor is clamped on the clamp, the clamp can adjust the height and the horizontal position of the sensor, and the sensor is made to make contact with a retaining ring grinding end face placed above a circular truncated cone to achieve run-out measurement of the retaining ring grinding end face. The clamp comprises a polish rod fixing seat, a polish rod, a lifting mechanism, an upper fixing plate and a connecting plate, the polish rod penetrates through one end of the connecting plate to be fixed on the polish rod fixing seat, the other end of the connecting plate is fixed on a machine tool component, the lifting mechanism is arranged on the polish rod, and the upper fixing plate capable of adjusting the horizontal position is arranged at the rod end of the lifting mechanism. The end of the upper fixing plate is connected with a sensor. According to the invention, rapid and accurate measurement of the grinding end face runout of the retaining ring is realized, so that the processing quality and the production efficiency of the retaining ring in a CMP (Chemical Mechanical Polishing) process are improved, the polishing uniformity of the surface of a wafer is ensured, and the ever-increasing requirement of the semiconductor manufacturing field on high-precision processing is met.

Description

Technical Field

[0001] The invention belongs to the technical field of retaining ring detection, and in particular relates to a retaining ring grinding end face runout measuring device and a use method thereof. Background Art

[0002] Chemical-Mechanical Polishing (CMP) is a key technology for flattening the wafer surface in the integrated circuit manufacturing process. With the increasing complexity of semiconductor manufacturing processes, CMP is becoming more and more widely used. As one of the main consumables of the CMP process, the retaining ring has been widely used in the CMP process. The retaining ring is mainly used to fix the wafer during the CMP polishing process, flattening the polishing pad at the edge and the polishing pad below the wafer to the same height, effectively solving the "over-grinding" problem.

[0003] Due to the importance of retaining rings in the CMP process, their manufacturing accuracy directly affects the effect of the CMP process and the quality of the wafer. The end face runout accuracy of the retaining ring is one of the important indicators of its processing quality. Currently, the commonly used detection methods include manual detection, automated detection, and three-coordinate measurement equipment, but there are still problems such as large errors, cumbersome processes, low efficiency, and easy errors. Therefore, the development of an efficient and stable retaining ring grinding end face runout measurement device is of great significance to ensure the processing quality of the retaining ring and improve the efficiency and quality of the CMP process. Summary of the invention

[0004] The purpose of the present invention is to solve the problems of low efficiency, large human error, high cost and insufficient precision in the existing retaining ring end face runout detection method, and to provide a retaining ring grinding end face runout measurement device and use method to achieve fast and accurate measurement of the retaining ring grinding end face runout, thereby improving the processing quality and production efficiency of the retaining ring in the CMP process, reducing production costs, and ensuring the uniformity of wafer surface polishing to meet the growing demand for high-precision processing in the semiconductor manufacturing field.

[0005] A device for measuring the runout of a grinding end face of a retaining ring comprises a fixture on which a sensor is clamped. The fixture can adjust the height and horizontal position of the sensor so that the sensor contacts the grinding end face of the retaining ring placed above a truncated table to achieve runout measurement thereof.

[0006] The fixture includes a polished rod fixing seat, a polished rod, a lifting mechanism, and an upper fixing plate. One end of the polished rod passes through a connecting plate and is fixed on the polished rod fixing seat. The other end of the connecting plate is fixed on a machine tool component. The polished rod is provided with a lifting mechanism. The rod end of the lifting mechanism is provided with an upper fixing plate capable of adjusting the horizontal position. The end of the upper fixing plate is connected to a sensor.

[0007] A knob I is provided on the rear side of the lifting mechanism to roughly adjust the height of the lifting mechanism on the polished rod; knobs II are provided on both ends of the lifting mechanism to accurately adjust the height of the lifting mechanism on the polished rod so that the sensor is consistent with the grinding end face of the retaining ring.

[0008] An adjustment hole is provided at the rod end of the lifting mechanism, and the upper fixing plate moves in the adjustment hole to adjust the horizontal position of the sensor, and the bottom of the upper fixing plate is fixed with bolts.

[0009] A U-shaped groove is provided at the end of the upper fixing plate. The sensor moves in the U-shaped groove and is fixed by upper and lower bolts. The sensor is used to measure the runout of different positions of the grinding end surface of the retaining ring.

[0010] The sensor is a high-precision eddy current displacement sensor, and its static measurement resolution is less than 0.1um.

[0011] The bare rod fixing seat, the bare rod, the upper fixing plate and the connecting plate are all made of Saigang material.

[0012] A method for using a retaining ring grinding end face runout measuring device comprises the following steps:

[0013] Step 1: First, place the installed fixture on one side of the round table and fix it on the machine tool component, and place a retaining ring on the round table;

[0014] Step 2: Adjust knob Ⅰ to make the height of the sensor close to the grinding end surface of the retaining ring. Adjust the position of the upper fixing plate in the adjustment hole to make the sensor above the grinding end surface of the retaining ring. Then adjust knob Ⅱ to make the sensor contact the grinding end surface of the retaining ring. Start the frustum and start measuring. Adjust the position of the sensor on the U-shaped groove to realize the runout measurement of different positions of the grinding end surface of the retaining ring.

[0015] The beneficial effects of the present invention are as follows:

[0016] The present invention achieves the runout measurement of the grinding end face of the retaining ring by clamping the sensor with a fixture. The fixture of the present application achieves precise positioning of the sensor height through two-stage adjustment of the lifting mechanism. The plane position of the sensor is adjusted once by adjusting the upper fixed plate on the lifting mechanism. At the same time, the runout measurement of the grinding end face at different positions is achieved by moving the sensor in the U-shaped groove. The measuring device of the present application is simple and efficient, has low operating difficulty and low production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A schematic structural diagram of a device for measuring the runout of a grinding end face of a retaining ring according to the present invention;

[0018] Figure 2 A schematic diagram of a fixture structure of a device for measuring the runout of a grinding end face of a retaining ring according to the present invention;

[0019] In the attached figure: 1. machine tool component; 2. polished rod fixing seat; 3. polished rod; 4. lifting mechanism; 5. upper fixing plate; 6. sensor; 7. round table; 8. retaining ring; 9. knob I; 10. knob II; 11. adjustment hole; 12. U-shaped groove; 13. connecting plate. DETAILED DESCRIPTION

[0020] The present invention is described in detail below with reference to the accompanying drawings.

[0021] like Figures 1-2 As shown, a device for measuring the runout of a grinding end face of a retaining ring comprises a fixture, a sensor 6 is clamped on the fixture, the fixture has high positioning accuracy, and the fixture can adjust the height and horizontal position of the high sensor 6 so that the sensor 6 contacts the grinding end face of a retaining ring 8 placed on a truncated table 7 to achieve runout measurement; in this embodiment, the retaining ring 8 is made of 316 stainless steel;

[0022] The sensor 6 is a high-precision eddy current displacement sensor, which can be used for underwater measurement and can withstand dust, moisture, oil and pressure measurement environments; the static measurement resolution of the eddy current displacement sensor is less than 0.1um during measurement. This ensures the accuracy, repeatability and long-term stability of the sensor in practical applications; the model of sensor 6 in this embodiment is ES-S2, with a working range (distance from the workpiece) of 0.2-2.2mm and a measuring range of 2mm. The resolution is 0.04um;

[0023] Due to the requirements of high stability and high positioning accuracy when the eddy current displacement sensor is used on site, the following fixture is used.

[0024] The fixture comprises a polished rod fixing seat 2, a polished rod 3, a lifting mechanism 4, and an upper fixing plate 5. One end of the polished rod 3 passes through a connecting plate 13 and is fixed on the polished rod fixing seat 2. The other end of the connecting plate 13 is fixed on the machine tool component 1. The polished rod 3 is provided with a lifting mechanism 4. The rear side of the lifting mechanism 4 is provided with a knob Ⅰ9 for roughly adjusting the height of the lifting mechanism 4 on the polished rod 3. Knobs Ⅱ 10 are provided on both ends of the lifting mechanism 4 to accurately adjust the height of the lifting mechanism 4 on the polished rod 3 so that the height of the grinding end surface of the sensor 6 and the retaining ring 8 are consistent.

[0025] An upper fixing plate 5 capable of position adjustment is provided at the rod end of the lifting mechanism 4. An adjustment hole 11 is provided at the rod end of the lifting mechanism 4. The upper fixing plate 5 moves in the adjustment hole 11 to adjust the horizontal position of the sensor 6. The sensor 6 is moved above the retaining ring 8 and the bottom of the upper fixing plate 5 is fixed with bolts. A U-shaped groove 12 is provided at the end of the upper fixing plate 5. The sensor 6 moves in the U-shaped groove 12 and is fixed by upper and lower bolts to measure the runout of the grinding end surface of the retaining ring 8 at different positions by the sensor 6.

[0026] The polished rod fixing seat 2, the polished rod 3, the upper fixing plate 5 and the connecting plate 13 are all made of Si steel material, which prevents the fixture from bumping and damaging the expensive parts inside the machine tool.

[0027] A method for using a retaining ring grinding end face runout measuring device comprises the following steps:

[0028] Step 1: First, place the installed fixture on one side of the truncated table 7 and fix it on the machine tool component 1, and place the retaining ring 8 on the truncated table 7;

[0029] Step 2: Adjust knob I9 to make the height of sensor 6 close to the grinding end surface of retaining ring 8, adjust the position of upper fixing plate 5 in adjusting hole 11 to make sensor 6 above the grinding end surface of retaining ring 8, then adjust knob II10 to make sensor 6 contact the grinding end surface of retaining ring 8, start the frustum 7 and start measuring, adjust the position of sensor 6 on U-shaped groove 12 to realize the runout measurement of different positions of the grinding end surface of retaining ring.

[0030] The present invention can realize high-precision online monitoring of the grinding end face runout of the retaining ring. The sensor 6 can be fixed at any position in the U-shaped groove 12 to achieve distance adjustment to meet the detection needs of different positions. The clamp of the present application realizes precise positioning of the sensor 6 in height through the two-stage adjustment of the lifting mechanism 4, and realizes the measurement of the grinding end face runout of the retaining ring. It has a simple and efficient structure, low operation difficulty, and low production cost.

Claims

1. A device for measuring the runout of a retaining ring grinding end face, characterized in that: The utility model comprises a fixture, on which a sensor is clamped, and the fixture can adjust the height and horizontal position of the sensor so that the sensor contacts the grinding end face of a retaining ring placed above the round table to realize the runout measurement thereof.

2. A retaining ring grinding end face runout measuring device according to claim 1, characterized in that: The fixture includes a polished rod fixing seat, a polished rod, a lifting mechanism, an upper fixing plate, and a connecting plate. One end of the polished rod passes through the connecting plate and is fixed on the polished rod fixing seat, and the other end of the connecting plate is fixed on the machine tool component. The polished rod is provided with a lifting mechanism, and the rod end of the lifting mechanism is provided with an upper fixing plate capable of adjusting the horizontal position, and the end of the upper fixing plate is connected to a sensor.

3. A retaining ring grinding end face runout measuring device according to claim 2, characterized in that: A knob I is provided on the rear side of the lifting mechanism to roughly adjust the height of the lifting mechanism on the polished rod; knobs II are provided on both ends of the lifting mechanism to accurately adjust the height of the lifting mechanism on the polished rod so that the sensor is consistent with the grinding end face of the retaining ring.

4. A retaining ring grinding end face runout measuring device according to claim 3, characterized in that: An adjustment hole is provided at the rod end of the lifting mechanism, and the upper fixing plate moves in the adjustment hole to adjust the horizontal position of the sensor, and the bottom of the upper fixing plate is fixed with bolts.

5. A retaining ring grinding end face runout measuring device according to claim 4, characterized in that: A U-shaped groove is provided at the end of the upper fixing plate. The sensor moves in the U-shaped groove and is fixed by upper and lower bolts. The sensor is used to measure the runout of different positions of the grinding end surface of the retaining ring.

6. The device for measuring the grinding end face runout of a retaining ring according to claim 1, characterized in that: The sensor is a high-precision eddy current displacement sensor, and its static measurement resolution is less than 0.1um.

7. The device for measuring the grinding end face runout of a retaining ring according to claim 2, characterized in that: The bare rod fixing seat, the bare rod, the upper fixing plate and the connecting plate are all made of Saigang material.

8. A method for using a retaining ring grinding end face runout measuring device, based on the device of claim 5, characterized in that: The following steps are involved: Step 1: First, place the installed fixture on one side of the round table and fix it on the machine tool component, and place a retaining ring on the round table; Step 2: Adjust knob Ⅰ to make the height of the sensor close to the grinding end surface of the retaining ring. Adjust the position of the upper fixing plate in the adjustment hole to make the sensor above the grinding end surface of the retaining ring. Then adjust knob Ⅱ to make the sensor contact the grinding end surface of the retaining ring. Start the frustum and start measuring. Adjust the position of the sensor on the U-shaped groove to realize the runout measurement of different positions of the grinding end surface of the retaining ring.

Images