Exhaust and inflation table and use system

Abstract

The invention relates to the technical field of industrial automation, and discloses an exhaust and inflation table and a use system, and the exhaust and inflation table comprises a vacuum module which realizes and maintains a high vacuum environment in equipment; the gas management module is responsible for accurately controlling inlet and outlet of gas and is provided with a safety valve and an exhaust port; the control system hardware module comprises a touch screen HM I, a control panel and a control cabinet, forms an equipment operation and management center and has multiple safety protection mechanisms; the pipeline module is composed of a stainless steel pipeline and a quick connector, and the purity and the sealing performance of gas are kept in the conveying process. Through an integrated automatic control system, preset operations such as exhausting, inflating and cleaning can be executed, an operator only needs to set parameters and start equipment, an efficient vacuum system and a quick-response gas management system enable the equipment to quickly reach the set vacuum degree and gas pressure, the overall throughput of production can be greatly improved, and the production efficiency is improved. Therefore, the effect of improving the production efficiency can be achieved.

Description

Technical Field

[0001] The invention relates to the technical field of industrial automation, and in particular to an exhaust and inflation platform and a use system thereof. Background Art

[0002] In many high-tech manufacturing fields, such as the production of semiconductors, optical devices, laser devices and precision electronic components, process operations usually need to be carried out in a highly controlled vacuum environment to ensure product quality and stability. The vacuum environment can effectively prevent impurities or water vapor in the air from contaminating the product, while ensuring the purity of the gas and ensuring the precise implementation of the process.

[0003] Traditional exhaust and inflation systems are usually separate devices, which require multiple manual adjustments and switches, which can easily lead to complex, time-consuming and inefficient operations. In addition, the existing system has limitations in the control accuracy of vacuum degree and gas flow, and cannot meet the strict requirements of modern high-precision manufacturing processes for environmental conditions. Summary of the invention

[0004] In view of the shortcomings of the prior art, the present invention provides an exhaust and inflation table and a use system, which solves the problem that traditional exhaust and inflation systems are usually separate devices, and the operation requires multiple manual adjustments and switches, which easily leads to complex operation, long time and low efficiency.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: an exhaust and inflation platform, comprising:

[0006] Vacuum module: The vacuum module is the core part of the exhaust and inflation table. Through the coordinated work of the high vacuum pump and the foreline pump, the high vacuum environment inside the equipment is achieved and maintained. The module is equipped with a vacuum gauge and a condenser.

[0007] Gas management module: The gas management module is responsible for accurately controlling the inlet and outlet of gas. Through the flow controller and pressure sensor, the gas flow and pressure are always kept within the set range. The module supports the simultaneous supply of multiple gases and is equipped with a safety valve and exhaust port.

[0008] Control hardware module: The control system hardware module includes a touch screen HMI, a control panel and a control cabinet, which constitute the operation and management center of the equipment. The operator sets parameters and monitors the equipment status through the HMI interface. The system automatically manages the vacuum and gas processes and has multiple safety protection mechanisms.

[0009] Pipeline module: The pipeline module consists of stainless steel pipes and quick connectors to keep the gas pure and sealed during transmission.

[0010] Preferably, the vacuum module comprises:

[0011] High vacuum pump: equipped with oil diffusion pump or molecular pump, vacuum degree reaches 10 -6 More than 1000m2 and equipped with circulating water or air cooling system for heat dissipation;

[0012] Foreline pump: A mechanical pump or dry pump is used as a foreline pump, which is responsible for initially reducing the pressure in the system. The foreline pump starts before the high vacuum pump and connects to the high vacuum pump when the set low pressure is reached.

[0013] Vacuum valve: Use electric vacuum valve, which is remotely operated through the control system to automatically control the opening and closing of the vacuum process and is linked with the system program;

[0014] Condenser: Condenses water vapor, oil gas and other volatiles in the system to prevent them from re-evaporating at low temperatures. It is made of stainless steel or copper and is equipped with a drain port.

[0015] Vacuum Gauges: Equipped with various types of vacuum gauges, including thermocouple vacuum gauges, Pirani vacuum gauges and ion gauges, the vacuum degree is displayed in real time via a touch screen or stand-alone display.

[0016] Preferably, the gas management module comprises:

[0017] Gas supply interface: equipped with multiple gas input interfaces, supporting the simultaneous supply of multiple process gases, including nitrogen, argon, oxygen, and helium, using high-purity stainless steel or copper interfaces and equipped with standardized connectors;

[0018] Flow controller: The control accuracy is ±1%, and it supports the adjustment range from small flow to large flow. It has a built-in temperature sensor and compensation algorithm, and can calibrate the flow controller after changing the gas type or flow fluctuations occur;

[0019] Pressure sensor: Use capacitive or piezoresistive pressure sensor, the sensor data is linked with the control system to record the pressure changes in real time;

[0020] Exhaust port and venting system: The exhaust port is equipped with a filter and a silencer, and the venting system is equipped with a safety valve to prevent automatic pressure relief when the system pressure is too high.

[0021] Preferably, the control hardware module includes:

[0022] Control panel: Contains start, stop, emergency stop, manual operation buttons, as well as indicator lights and alarm devices. The emergency stop button has high priority control authority. When pressed, it immediately interrupts all operations. The indicator light and buzzer combined alarm can provide multiple feedbacks when the system is abnormal, prompting the operator to deal with it in time;

[0023] Touch screen HMI: Provides real-time display of vacuum degree, gas flow, and pressure parameters, supports multiple display modes, including numerical values, curves, and alarm records. The touch screen can be directly used to set operating parameters, start and stop equipment, switch operating modes, and supports multi-language operation interface;

[0024] Control cabinet: It contains PLC, relays, contactors, circuit breakers, switching power supplies, and manages the electrical control of the equipment. The control cabinet is designed to comply with electromagnetic compatibility standards and is equipped with cooling fans or air conditioners.

[0025] Preferably, the pipeline module comprises:

[0026] Stainless steel pipeline: Made of 316L stainless steel, with polished inner and outer walls;

[0027] Quick connector: Standardized quick connector with fluororubber or PTFE seals.

[0028] Preferably, a control system for an exhaust and inflation table comprises: an operating system unit, a control algorithm unit, a data management unit, and a diagnosis and maintenance unit;

[0029] The operating system unit includes an embedded operating system and a human-machine interface software;

[0030] The control algorithm unit includes PID control, alarm and protection mechanism, and automation program;

[0031] The data management unit includes data recording and storage, remote monitoring and operation, and data export;

[0032] The diagnosis and maintenance unit includes self-diagnosis function and remote diagnosis.

[0033] Preferably, the embedded operating system includes:

[0034] System platform: The embedded operating system used by the device is based on a real-time operating system, including VxWorks, QNX, or Linux real-time kernel versions;

[0035] Multitasking: Supports multitasking operation and can manage multiple modules of vacuum system, gas management system and human-machine interface at the same time;

[0036] System update: support online update or update system firmware through USB interface;

[0037] The human-machine interface software includes:

[0038] Interface design: Based on a graphical user interface, it provides intuitive operation procedures and real-time data feedback, allowing operators to easily set parameters, start equipment and monitor operating status;

[0039] Language support: HMI software provides a multi-language interface to meet the needs of global users and supports fast language switching;

[0040] Customization function: Operators can customize the interface layout and parameter display content according to actual process requirements;

[0041] Security mechanism: HMI software has built-in multi-level user authority management to prevent unauthorized personnel from modifying key parameters.

[0042] Preferably, the PID control includes:

[0043] Control accuracy: PID algorithm is used to control vacuum degree, gas flow and pressure;

[0044] Dynamic response: PID controllers can adjust control outputs based on real-time feedback and quickly restore stability when system load changes;

[0045] Adjustment parameters: adjust the proportional, integral and differential coefficients of the PID controller according to process requirements to optimize the control effect;

[0046] The alarm and protection mechanism includes:

[0047] Abnormality detection: The software monitors the operating status and various parameters of the equipment in real time. When abnormalities are detected, including overpressure, underpressure, insufficient vacuum, and gas leakage, the alarm mechanism is automatically triggered;

[0048] Automatic protection: When a serious abnormality is detected, including system pressure exceeding the limit or vacuum loss, the software will automatically perform protection operations and stop the operation of related equipment;

[0049] Alarm log: All alarm events will be recorded in the log. The operator can check the historical alarm log at any time and perform troubleshooting and maintenance based on the log.

[0050] The automated procedures include:

[0051] Operation process: The software supports the preset and editing of multiple automated operation processes, including automatic exhaust, automatic inflation, and automatic cleaning. The operator can select and start the preset program through the touch screen;

[0052] Process parameters: Each automated program can preset detailed process parameters, including vacuum degree, inflation flow, pressure setting and time control;

[0053] Process optimization: Automated programs can be optimized and adjusted based on historical data and actual operating conditions to reduce unnecessary operating steps.

[0054] Preferably, the data recording and storage includes:

[0055] Record content: The system automatically records all key parameters, including real-time data of vacuum degree, gas flow, pressure, temperature, as well as operator operation records and alarm events;

[0056] Storage capacity: built-in solid-state drive or industrial-grade SD card, and supports data backup;

[0057] Data retrieval: Operators can easily retrieve historical data through the HMI interface and filter data by time, parameter type or operator;

[0058] The remote monitoring and operation includes:

[0059] Network interface: The system is equipped with Ethernet or wireless network interface to support remote monitoring and operation, and can access the device status on a remote computer, tablet or mobile phone through a local area network or the Internet;

[0060] Real-time monitoring: The remote monitoring function allows users to view equipment operating parameters and alarm status in real time, and can remotely adjust parameters or start / stop equipment operations;

[0061] Security: Remote access uses encrypted communication and authentication mechanisms;

[0062] The data export includes:

[0063] Export format: supports multiple data export formats, including CSV, Excel, and PDF;

[0064] Export method: Data can be exported to a USB flash drive via a USB interface, or sent directly to a designated mailbox or cloud storage platform via the network;

[0065] Automatic backup: The system supports automatic data backup function, which can automatically back up data to local storage or remote server according to the set period.

[0066] Preferably, the self-diagnosis function includes:

[0067] Diagnostic scope: The system can monitor the working status of key components such as vacuum pumps, flow controllers, pressure sensors, and electrical components in real time, and determine whether they are within the normal range;

[0068] Fault warning: When the system detects that a component is working abnormally or is about to fail, it will issue a warning in advance to prompt the operator to perform inspection and maintenance;

[0069] Diagnostic report: The self-diagnosis results can generate a detailed report, which includes the fault type, possible causes, and recommended maintenance measures.

[0070] The present invention provides an exhaust and inflation platform and a use system thereof, which has the following beneficial effects:

[0071] 1. The exhaust and inflation table of the present invention can perform preset exhaust, inflation, cleaning and other operations through an integrated automatic control system. The operator only needs to set parameters and start the equipment, reducing the need for manual intervention. This not only saves labor costs, but also reduces the risk of human operating errors. The efficient vacuum system and the fast-response gas management system enable the equipment to quickly reach the set vacuum degree and gas pressure, greatly shortening the time of each process cycle, which can significantly improve the overall production throughput, thereby achieving the effect of improving production efficiency.

[0072] 2. The exhaust and inflation table of the present invention is equipped with a high-precision vacuum and gas flow control device, which can ensure that the key parameters (such as vacuum, pressure, gas purity, etc.) in the production process are always within the set range. This precise control can minimize process fluctuations and ensure the consistency of product quality.

[0073] 3. The present invention uses high-efficiency filtration and precision sealing design to effectively prevent external impurities from entering the vacuum system or gas pipeline, reducing surface or internal contamination of the product. At the same time, a stable vacuum environment helps prevent process defects such as bubbles and impurities, especially in the manufacture of semiconductors and optical devices, and improves the yield rate of products.

[0074] 4. The equipment of the present invention has a built-in comprehensive safety monitoring system, including vacuum abnormality, excessive gas pressure, gas leakage detection, etc. When the system detects an abnormal situation, it can immediately trigger an alarm, automatically shut down related equipment or shut down, thereby preventing accidents. The control system is equipped with an emergency stop button and an automatic shutdown program, which can respond quickly in an emergency to ensure the safety of equipment and operators. The system is equipped with a safety valve and a pressure relief device. When the internal pressure exceeds the set safety value, it automatically releases pressure to prevent equipment damage or explosions and other serious accidents, ensuring the safety of the operating environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0075] Figure 1 A three-dimensional diagram of an exhaust and inflation platform of the present invention;

[0076] Figure 2 It is a schematic diagram of the control system architecture of an exhaust and inflation platform of the present invention;

[0077] Figure 3 It is a schematic diagram of the operating system unit architecture of the present invention;

[0078] Figure 4 It is a schematic diagram of the control algorithm unit architecture of the present invention;

[0079] Figure 5 It is a schematic diagram of the data management unit architecture of the present invention;

[0080] Figure 6 It is a schematic diagram of the diagnosis and maintenance unit architecture of the present invention.

[0081] Among them, 1. Vacuum module; 2. Gas management module; 3. Control hardware module; 4. Pipeline module. DETAILED DESCRIPTION

[0082] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0083] Please see attached Figure 1 - Attachment Figure 6 The embodiment of the present invention provides an exhaust and inflation platform, comprising:

[0084] Vacuum module 1: The vacuum module is the core part of the exhaust and inflation table. Through the coordinated work of the high vacuum pump and the front pump, it can achieve and maintain a high vacuum environment inside the equipment. The system is equipped with various types of vacuum gauges and condensers to accurately measure and control the vacuum degree, while ensuring that there are no impurities or water vapor residues in the system;

[0085] Gas management module 2: The gas management module is responsible for accurately controlling the inlet and outlet of gas, and ensures that the gas flow and pressure are always kept within the set range through high-precision flow controllers and pressure sensors. The system supports the simultaneous supply of multiple gases and is equipped with safety valves and exhaust ports to ensure the safety of operation and gas purity;

[0086] Control hardware module 3: The control system hardware module includes a touch screen HMI, a control panel and a control cabinet, which constitute the operation and management center of the equipment. The operator sets parameters and monitors the equipment status through the HMI interface. The system automatically manages the vacuum and gas processes to ensure the efficient execution of various operations and has multiple safety protection mechanisms;

[0087] Pipeline module 4: The pipeline module is composed of high-quality stainless steel pipelines and quick connectors to ensure the purity and tightness of the gas during transmission. The system is reasonably designed to support frequent pipeline replacement and maintenance, adapt to different process requirements, and prevent leakage or contamination.

[0088] The vacuum module 1 comprises:

[0089] Type: According to the application requirements, oil diffusion pump or molecular pump is configured. Oil diffusion pump is suitable for extracting larger gas volume, while molecular pump is suitable for occasions requiring ultra-high vacuum.

[0090] Vacuum degree: up to 10-6 Torr or more, depending on pump type and size.

[0091] Pump oil system: For oil diffusion pumps, replace the pump oil regularly to ensure its effective operation. The selection and replacement cycle of the pump oil should be determined according to the specific process requirements.

[0092] Cooling system: Equipped with circulating water or air cooling system to dissipate heat and prevent the pump from overheating and causing performance degradation.

[0093] Backing pump

[0094] Type: Mechanical pump (rotary vane pump) or dry pump as the backing pump, responsible for the initial reduction of pressure in the system, so that the high vacuum pump can work efficiently.

[0095] Start-up process: The foreline pump starts before the high vacuum pump, and the high vacuum pump is connected when the set low pressure condition is reached.

[0096] Maintenance: The pump oil needs to be checked and replaced regularly, and the pump filter needs to be cleaned to prevent impurities from entering the pump body;

[0097] Vacuum valve

[0098] Manual vacuum valve: used to manually control the opening and closing of the vacuum pipeline, usually used during system maintenance or debugging.

[0099] Electric vacuum valve: can be remotely operated through the control system, used to automatically control the opening and closing of the vacuum process, and can be linked with the system program.

[0100] Quick response: The electric valve has a quick response capability and can quickly adjust the opening to maintain the stability of the vacuum environment when the system pressure changes.

[0101] Condenser

[0102] Function: To condense water vapor, oil gas and other volatiles in the system to prevent them from re-evaporating at low temperatures and affecting the vacuum environment.

[0103] Material: Made of stainless steel or copper, with good thermal conductivity and corrosion resistance.

[0104] Drainage design: Equipped with a drain port to regularly discharge condensate to prevent it from accumulating in the pipe.

[0105] Vacuum gauge

[0106] Type: Equipped with various types of vacuum gauges, including thermocouple vacuum gauges, Pirani vacuum gauges and ion gauges, etc., for measuring different pressure ranges.

[0107] Calibration: The vacuum gauge should be calibrated regularly to ensure the accuracy of the readings. The calibration cycle is determined according to the process requirements and the frequency of equipment use.

[0108] Display interface: Real-time display of vacuum level via touch screen or independent display, allowing operators to monitor system status.

[0109] Gas management module 2 includes:

[0110] Gas supply interface

[0111] Quantity and type: Equipped with multiple gas input interfaces to support the simultaneous supply of multiple process gases. Commonly used gases include nitrogen, argon, oxygen, helium, etc.

[0112] Interface material: high-purity stainless steel or copper interface to prevent gas contamination and oxidation.

[0113] Connection method: Equipped with standardized connectors, supports quick connection and replacement, suitable for applications with frequent changes in process gas;

[0114] Mass Flow Controller (MFC)

[0115] Accuracy: High-precision mass flow controller with control accuracy up to ±1% ensures precise regulation of gas flow.

[0116] Control range: Supports the adjustment range from small flow to large flow to adapt to different process requirements.

[0117] Temperature compensation: Built-in temperature sensor and compensation algorithm ensure flow control accuracy under different ambient temperatures.

[0118] Calibration: Flow controllers should be calibrated regularly, especially after changing gas types or when flow fluctuations occur.

[0119] Pressure Sensors

[0120] Type: High-precision capacitive or piezoresistive pressure sensor is used to detect the gas pressure in the system in real time.

[0121] Accuracy and Response Speed: The pressure sensor has high resolution and fast response capability, ensuring real-time feedback of pressure changes during rapid inflation or deflation.

[0122] Data recording: Sensor data is linked with the control system to record pressure changes in real time for later analysis and tracing.

[0123] Exhaust and venting system

[0124] Design: The exhaust port is equipped with a high-efficiency filter and a silencer to ensure that the exhausted gas is free of impurities and reduce noise.

[0125] Safety valve: The venting system is equipped with a safety valve to prevent automatic pressure relief when the system pressure is too high, protecting the safety of equipment and operators.

[0126] Venting pipeline: Made of corrosion-resistant materials, the pipeline layout is reasonable to avoid secondary contamination of gas during the venting process.

[0127] 3. Control system hardware

[0128] The control hardware module 3 includes:

[0129] control Panel

[0130] Layout: Contains start, stop, emergency stop, manual operation buttons, as well as indicator lights and alarm devices, allowing operators to quickly understand the equipment status.

[0131] Emergency stop: The emergency stop button has high priority control authority. Once pressed, it will immediately interrupt all operations to protect the safety of equipment and personnel.

[0132] Alarm device: The indicator light and buzzer combined alarm can provide multiple feedbacks when the system is abnormal, prompting the operator to deal with it in time;

[0133] Touch screen HMI

[0134] Display function: Provide real-time display of vacuum degree, gas flow, pressure and other parameters, and support multiple display modes (numerical values, curves, alarm records, etc.).

[0135] Control functions: The touch screen can be used directly to set operating parameters, start and stop the equipment, and switch operating modes (manual / automatic).

[0136] Language support: Supports multi-language operation interface to adapt to operators with different language backgrounds and improve operational convenience.

[0137] Graphical interface: Intuitive graphical display makes complex operations simple and provides a user-friendly operating experience.

[0138] Control cabinet

[0139] Composition: It contains PLC (Programmable Logic Controller), relays, contactors, circuit breakers, switching power supplies and other control components to uniformly manage the electrical control of the equipment.

[0140] Electromagnetic interference protection: The control cabinet is designed to comply with electromagnetic compatibility (EMC) standards to ensure that the internal control circuit is not affected by external interference.

[0141] Ventilation and heat dissipation: The control cabinet is equipped with a cooling fan or air conditioner to ensure that the internal components work at a stable temperature and prevent failures caused by overheating.

[0142] The pipeline module 4 includes:

[0143] Stainless steel pipes

[0144] Material: Made of 316L stainless steel, it has high strength, corrosion resistance and high temperature resistance, and is suitable for various harsh process environments.

[0145] Surface treatment: The inner and outer walls are polished to reduce the adsorption of particles and impurities during gas transmission and ensure gas purity.

[0146] Pipe diameter and wall thickness: Select the appropriate pipe diameter and wall thickness according to the gas type and flow requirements to ensure that no excessive pressure drop occurs when transmitting large gas flows.

[0147] Quick Connectors

[0148] Type: It adopts standardized quick-release connector, which is easy to operate and supports frequent pipe connection and disassembly.

[0149] Seals: Equipped with fluororubber (FKM) or polytetrafluoroethylene (PTFE) seals, which have excellent chemical resistance and high temperature resistance, ensuring long-term use without leakage.

[0150] Maintenance: Check seals and joints regularly for wear and replace if necessary to prevent the risk of leakage due to aging.

[0151] A control system for an exhaust and inflation table, comprising: an operating system unit, a control algorithm unit, a data management unit, and a diagnosis and maintenance unit;

[0152] The operating system unit includes embedded operating system and human-machine interface software;

[0153] The control algorithm unit includes PID control, alarm and protection mechanism, and automation program;

[0154] The data management unit includes data recording and storage, remote monitoring and operation, and data export;

[0155] The diagnosis and maintenance unit includes self-diagnosis function and remote diagnosis.

[0156] Embedded operating systems include:

[0157] System platform: The embedded operating system used by the device is usually based on a real-time operating system (RTOS), such as VxWorks, QNX, or Linux real-time kernel version, to ensure high reliability and real-time responsiveness.

[0158] Multi-tasking: Supports multi-tasking operation and can manage multiple modules such as vacuum system, gas management system and human-machine interface (HMI) at the same time to ensure stable operation of the equipment under complex process conditions.

[0159] System update: Support online update or update system firmware through USB interface to ensure continuous improvement of system security and functions;

[0160] Human-machine interface software includes:

[0161] Interface design: Based on a graphical user interface (GUI), it provides intuitive operation procedures and real-time data feedback, allowing operators to easily set parameters, start equipment and monitor operating status.

[0162] Language support: HMI software provides multi-language interface (such as Chinese, English, Japanese, etc.) to meet the needs of global users and supports fast language switching.

[0163] Customization function: Operators can customize the interface layout and parameter display content according to actual process requirements to optimize the operating experience.

[0164] Security mechanism: The HMI software has built-in multi-level user authority management to prevent unauthorized personnel from modifying key parameters and ensure safe operation of the equipment.

[0165] PID Control

[0166] Control accuracy: PID (proportional-integral-differential) algorithm is used to control vacuum, gas flow and pressure, with high-precision adjustment function to ensure that various parameters in the process remain within the set range.

[0167] Dynamic response: PID controllers are able to adjust control outputs based on real-time feedback, quickly restoring stability when system loads change.

[0168] Adjustment parameters: The proportional, integral and differential coefficients of the PID controller can be adjusted according to process requirements to optimize the control effect and reduce overshoot and response time.

[0169] Alarm and protection mechanism

[0170] Abnormality detection: The software monitors the operating status and various parameters of the equipment in real time. When an abnormality is detected (such as overpressure, underpressure, insufficient vacuum, gas leakage, etc.), the alarm mechanism is automatically triggered.

[0171] Automatic protection: When a serious abnormality is detected (such as system pressure exceeding the limit or vacuum loss), the software will automatically perform protection operations and stop the operation of related equipment to avoid damage.

[0172] Alarm log: All alarm events will be recorded in the log. The operator can view the historical alarm log at any time and perform troubleshooting and maintenance based on the log.

[0173] Automated procedures include:

[0174] Operation process: The software supports the preset and editing of multiple automated operation processes, including automatic exhaust, automatic inflation, automatic cleaning, etc. The operator can select and start the preset program through the touch screen.

[0175] Process parameters: Each automated program can preset detailed process parameters, including vacuum degree, inflation flow, pressure setting and time control, etc., to ensure the stability and repeatability of each operation.

[0176] Process optimization: Automated programs can be optimized and adjusted based on historical data and actual operating conditions, reducing unnecessary operating steps and improving production efficiency.

[0177] Data recording and storage include:

[0178] Record content: The system automatically records real-time data of all key parameters (such as vacuum degree, gas flow, pressure, temperature, etc.), as well as operator operation records and alarm events.

[0179] Storage capacity: Built-in large-capacity storage (such as solid-state hard disk or industrial-grade SD card) can store long-term operating data and support data backup.

[0180] Data Retrieval: Operators can easily retrieve historical data through the HMI interface and filter data by time, parameter type or operator.

[0181] Remote monitoring and operation include:

[0182] Network interface: The system is equipped with Ethernet or wireless network interface to support remote monitoring and operation. Users can access the device status on a remote computer, tablet or mobile phone via LAN or the Internet.

[0183] Real-time monitoring: The remote monitoring function allows users to view equipment operating parameters and alarm status in real time, and can remotely adjust parameters or start / stop equipment operations.

[0184] Security: Remote access uses encrypted communication and authentication mechanisms to ensure the security of data transmission and user access rights.

[0185] Data export includes:

[0186] Export format: Supports multiple data export formats, such as CSV, Excel, PDF, etc., to facilitate users to perform data analysis and report generation.

[0187] Export method: Data can be exported to a USB flash drive via the USB interface, or sent directly to a designated mailbox or cloud storage platform via the network. Batch export operations are supported.

[0188] Automatic backup: The system supports automatic data backup function, which can automatically back up data to local storage or remote server according to the set period to prevent data loss.

[0189] Self-diagnostic features include:

[0190] Diagnostic scope: The system can monitor the working status of key components such as vacuum pumps, flow controllers, pressure sensors, electrical components, etc. in real time, and determine whether they are within the normal range.

[0191] Fault warning: When the system detects that a component is working abnormally or is about to fail, it will issue a warning in advance to prompt the operator to conduct inspection and maintenance to prevent the fault from escalating.

[0192] Diagnostic report: The self-diagnosis results will generate a detailed report, which includes the fault type, possible causes, recommended maintenance measures, etc., to help technicians quickly locate the problem.

[0193] Remote Diagnosis

[0194] Online support: Through remote connection, equipment suppliers or technical support teams can perform online diagnosis and troubleshooting without on-site visits, shortening troubleshooting time.

[0195] Remote upgrade: The system supports remote software upgrade function. When the supplier releases a new version of software or patch, the user can complete the upgrade through remote connection to improve system performance and security.

[0196] Log analysis: During remote diagnosis, you can download the device operation log for detailed analysis to identify potential problems and make improvement suggestions.

[0197] How to use

[0198] 1. Startup Preparation

[0199] Equipment inspection

[0200] Pipeline connections: Check all vacuum and gas line connection points to ensure that all joints are tight and seals are not damaged or aged. Pay special attention to newly installed or maintained pipelines.

[0201] Power supply check: Confirm that the power supply connection of the equipment is stable, the power cord is not damaged, and the voltage meets the equipment requirements. Check whether the circuit breaker and fuse in the control cabinet are normal.

[0202] Environmental check: Make sure the environment where the device is located is dry, dust-free, and of moderate temperature. Avoid high humidity or low temperature that may affect the performance of the device. Check whether there is enough heat dissipation space around the device.

[0203] System Initialization

[0204] Start the power supply: Turn on the main power switch of the control cabinet, and the device enters the standby state. Check whether the HMI screen starts normally and whether the display interface is loaded successfully.

[0205] System self-check: After the equipment is started, it automatically performs a system self-check procedure, including preliminary checks of the vacuum system, gas management system, electrical system, etc. Confirm that there are no abnormal alarms during the self-check process.

[0206] Parameter setting: Set the operating parameters on the HMI interface, including target vacuum degree, inflation flow, inflation pressure, and operating time, etc. Parameter setting should be carried out according to process requirements.

[0207] 2. Exhaust operation

[0208] Select exhaust mode

[0209] Manual mode: Select the manual exhaust mode on the HMI, and the operator can manually control the start and stop of the vacuum pump, the opening and closing of the vacuum valve, and monitor the changes in vacuum degree in real time.

[0210] Automatic mode: Select the automatic exhaust mode, the system automatically performs the exhaust operation according to the preset program. The operator only needs to set the target vacuum degree and exhaust time, and the system will automatically adjust the vacuum pump and valve.

[0211] Start the vacuum pump

[0212] Start the foreline pump: In manual or automatic mode, first start the foreline pump to gradually reduce the pressure in the system. After the foreline pump is started, observe the changes in vacuum degree.

[0213] High vacuum pump start: When the system pressure reaches the ultimate vacuum of the foreline pump, the system will automatically start the high vacuum pump to further reduce the pressure to reach the set vacuum degree.

[0214] Vacuum monitoring

[0215] Real-time monitoring: Monitor the vacuum degree in the system through HMI or independent vacuum gauge to ensure that the vacuum degree is stable at the preset value during the exhaust process. If the vacuum degree is found to be not up to standard, check for leaks or abnormal operation of the pump.

[0216] Vacuum stability: After reaching the target vacuum, the system will enter a stable holding state. At this time, the vacuum pump keeps working to maintain the vacuum, and the vacuum valve automatically adjusts the opening according to the needs.

[0217] Exhaust end

[0218] Turn off the vacuum pump: When the exhaust operation is completed, the system will automatically or according to the operator's instructions to turn off the vacuum pump. If operating in manual mode, you need to turn off the high vacuum pump first, and then turn off the foreline pump.

[0219] Close the vacuum valve: Make sure all vacuum valves are closed to prevent the vacuum level in the system from decreasing or outside air from entering.

[0220] Data recording: After the exhaust operation is completed, the system will automatically save the data of this operation, including vacuum degree change curve, time record, equipment status, etc., for subsequent analysis.

[0221] 3. Inflation operation

[0222] Switch to inflation mode

[0223] Manual mode: Select the manual inflation mode on the HMI, the operator can manually control the opening and closing of the gas flow controller and the inflation valve, and monitor the pressure and flow during the inflation process in real time.

[0224] Automatic mode: Select the automatic inflation mode, the system automatically performs the inflation operation according to the preset program. The operator only needs to set the target pressure, flow rate and inflation time, and the system will automatically adjust the controller and valve.

[0225] Start the inflation process

[0226] Turn on the gas flow controller: The system will turn on the gas flow controller according to the set flow rate and start to fill the system with gas. The operator can monitor the gas flow and pressure in real time.

[0227] Open the inflation valve: The system automatically or the operator manually opens the inflation valve, and gas begins to enter the equipment, gradually increasing the system pressure to the preset value.

[0228] Pressure and flow monitoring

[0229] Real-time monitoring: Monitor the pressure changes in the system through HMI or independent pressure gauge to ensure that the pressure and flow are stable within the preset range during the inflation process. If abnormal pressure or flow is found, stop the operation immediately and check the cause.

[0230] Safety protection: During the inflation process, the system will continuously monitor the gas pressure. If it exceeds the safety setting value, the safety valve will be automatically triggered to prevent equipment damage or safety accidents.

[0231] Inflation completed

[0232] Close the inflation valve: When the system pressure reaches the preset value or the inflation time ends, the system will automatically close the inflation valve and stop the inflation operation.

[0233] Turn off the gas flow controller: Make sure the gas flow controller is turned off, stop the flow of gas, and save the data record during the operation.

[0234] Safety check: After inflation, the operator needs to conduct a safety check to confirm that the pressure in the system is stable and there is no leakage or abnormality.

[0235] 4. Operation completed

[0236] Close all valves

[0237] Manual closing: The operator should manually close all vacuum valves and gas valves to ensure that the system is airtight and there is no gas or vacuum leakage.

[0238] Automatic closing: In automatic mode, the system will close all relevant valves in sequence according to the program and prompt the operator to confirm the end of the operation.

[0239] Stop control system

[0240] Stop operation: Select the stop operation through the HMI interface, and the system will automatically execute the end program and shut down all running devices and functional modules.

[0241] Power-off operation: After confirming that all operations are completed, turn off the power switch of the control cabinet to cut off the power supply to the equipment. Ensure that the equipment is in a safe state.

[0242] Equipment cleaning and maintenance

[0243] External cleaning: Use appropriate cleaning tools and materials to clean the outside of the device to ensure that no dust or contaminants adhere to the surface of the device.

[0244] Internal inspection: During scheduled maintenance or after a long period of equipment downtime, the operator needs to check the condition of the components inside the equipment and clean or replace them if necessary.

[0245] Maintenance records: The equipment status, cleaning and maintenance after each operation will be recorded to facilitate subsequent equipment management and maintenance arrangements.

[0246] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An exhaust and inflation platform, characterized in that: include: Vacuum module (1): The vacuum module is the core part of the exhaust and inflation table. Through the coordinated work of the high vacuum pump and the foreline pump, the high vacuum environment inside the equipment is achieved and maintained. The module is equipped with a vacuum gauge and a condenser. Gas management module (2): The gas management module is responsible for accurately controlling the inflow and outflow of gases. Through the flow controller and pressure sensor, the gas flow and pressure are always kept within the set range. The module supports the simultaneous supply of multiple gases and is equipped with a safety valve and exhaust port. Control hardware module (3): The control system hardware module includes a touch screen HMI, a control panel and a control cabinet, which constitute the operation and management center of the equipment. The operator sets parameters and monitors the equipment status through the HMI interface. The system automatically manages the vacuum and gas processes and has multiple safety protection mechanisms. Pipeline module (4): The pipeline module is composed of stainless steel pipes and quick connectors to ensure the purity and sealing of the gas during transmission.

2. An exhaust and inflation platform according to claim 1, characterized in that: The vacuum module (1) comprises: High vacuum pump: equipped with oil diffusion pump or molecular pump, vacuum degree reaches 10 -6 Above the support, and equipped with circulating water or air cooling system for heat dissipation; Foreline pump: A mechanical pump or dry pump is used as a foreline pump, which is responsible for initially reducing the pressure in the system. The foreline pump starts before the high vacuum pump and connects to the high vacuum pump when the set low pressure is reached. Vacuum valve: Use electric vacuum valve, which is remotely operated through the control system to automatically control the opening and closing of the vacuum process and is linked with the system program; Condenser: Condenses water vapor, oil gas and other volatiles in the system to prevent them from re-evaporating at low temperatures. It is made of stainless steel or copper and is equipped with a drain port. Vacuum Gauges: Equipped with various types of vacuum gauges, including thermocouple vacuum gauges, Pirani vacuum gauges and ion gauges, the vacuum degree is displayed in real time via a touch screen or stand-alone display.

3. The exhaust and inflation platform according to claim 1, characterized in that: The gas management module (2) comprises: Gas supply interface: equipped with multiple gas input interfaces, supporting the simultaneous supply of multiple process gases, including nitrogen, argon, oxygen, and helium, using high-purity stainless steel or copper interfaces and equipped with standardized connectors; Flow controller: The control accuracy is ±1%, and it supports the adjustment range from small flow to large flow. It has a built-in temperature sensor and compensation algorithm, and can calibrate the flow controller after changing the gas type or flow fluctuations occur; Pressure sensor: Use capacitive or piezoresistive pressure sensor, the sensor data is linked with the control system to record the pressure changes in real time; Exhaust port and venting system: The exhaust port is equipped with a filter and a silencer, and the venting system is equipped with a safety valve to prevent automatic pressure relief when the system pressure is too high.

4. The exhaust and inflation platform according to claim 1, characterized in that: The control hardware module (3) comprises: Control panel: Contains start, stop, emergency stop, manual operation buttons, as well as indicator lights and alarm devices. The emergency stop button has high priority control authority. When pressed, it immediately interrupts all operations. The indicator light and buzzer combined alarm can provide multiple feedbacks when the system is abnormal, prompting the operator to deal with it in time; Touch screen HMI: Provides real-time display of vacuum degree, gas flow, and pressure parameters, supports multiple display modes, including numerical values, curves, and alarm records. The touch screen can be directly used to set operating parameters, start and stop equipment, switch operating modes, and supports multi-language operation interface; Control cabinet: It contains PLC, relays, contactors, circuit breakers, switching power supplies, and manages the electrical control of the equipment. The control cabinet is designed to comply with electromagnetic compatibility standards and is equipped with cooling fans or air conditioners.

5. The exhaust and inflation platform according to claim 1, characterized in that: The pipeline module (4) comprises: Stainless steel pipeline: Made of 316L stainless steel, with polished inner and outer walls; Quick connector: Standardized quick connector with fluororubber or PTFE seals.

6. A control system for an exhaust and inflation platform, according to any one of claims 1 to 5, characterized in that: include: Operating system unit, control algorithm unit, data management unit, diagnosis and maintenance unit; The operating system unit includes an embedded operating system and a human-machine interface software; The control algorithm unit includes PID control, alarm and protection mechanism, and automation program; The data management unit includes data recording and storage, remote monitoring and operation, and data export; The diagnosis and maintenance unit includes a self-diagnosis function.

7. A control system for an exhaust and inflation platform according to claim 6, characterized in that: The embedded operating system comprises: System platform: The embedded operating system used by the device is based on a real-time operating system, including VxWorks, QNX, or Linux real-time kernel versions; Multitasking: Supports multitasking operation and can manage multiple modules of vacuum system, gas management system and human-machine interface at the same time; System update: support online update or update system firmware through USB interface; The human-machine interface software includes: Interface design: Based on a graphical user interface, it provides intuitive operation procedures and real-time data feedback, allowing operators to easily set parameters, start equipment and monitor operating status; Language support: HMI software provides a multi-language interface to meet the needs of global users and supports fast language switching; Customization function: Operators can customize the interface layout and parameter display content according to actual process requirements; Security mechanism: HMI software has built-in multi-level user authority management to prevent unauthorized personnel from modifying key parameters.

8. The control system of the exhaust and inflation platform according to claim 6, characterized in that: The PID control includes: Control accuracy: PID algorithm is used to control vacuum degree, gas flow and pressure; Dynamic response: PID controllers can adjust control outputs based on real-time feedback and quickly restore stability when system load changes; Adjustment parameters: adjust the proportional, integral and differential coefficients of the PID controller according to process requirements to optimize the control effect; The alarm and protection mechanism includes: Abnormality detection: The software monitors the operating status and various parameters of the equipment in real time. When abnormalities are detected, including overpressure, underpressure, insufficient vacuum, and gas leakage, the alarm mechanism is automatically triggered; Automatic protection: When a serious abnormality is detected, including system pressure exceeding the limit or vacuum loss, the software will automatically perform protection operations and stop the operation of related equipment; Alarm log: All alarm events will be recorded in the log. The operator can check the historical alarm log at any time and perform troubleshooting and maintenance based on the log. The automated procedures include: Operation process: The software supports the preset and editing of multiple automated operation processes, including automatic exhaust, automatic inflation, and automatic cleaning. The operator can select and start the preset program through the touch screen; Process parameters: Each automated program can preset detailed process parameters, including vacuum degree, inflation flow, pressure setting and time control; Process optimization: Automated programs can be optimized and adjusted based on historical data and actual operating conditions to reduce unnecessary operating steps.

9. The control system of the exhaust and inflation platform according to claim 6, characterized in that: The data recording and storage includes: Record content: The system automatically records all key parameters, including real-time data of vacuum degree, gas flow, pressure, temperature, as well as operator operation records and alarm events; Storage capacity: built-in solid-state drive or industrial-grade SD card, and supports data backup; Data retrieval: Operators can easily retrieve historical data through the HMI interface and filter data by time, parameter type or operator; The remote monitoring and operation includes: Network interface: The system is equipped with Ethernet or wireless network interface to support remote monitoring and operation, and can access the device status on a remote computer, tablet or mobile phone through a local area network or the Internet; Real-time monitoring: The remote monitoring function allows users to view equipment operating parameters and alarm status in real time, and can remotely adjust parameters or start / stop equipment operations; Security: Remote access uses encrypted communication and authentication mechanisms; The data export includes: Export format: supports multiple data export formats, including CSV, Excel, and PDF; Export method: Data can be exported to a USB flash drive via a USB interface, or sent directly to a designated mailbox or cloud storage platform via the network; Automatic backup: The system supports automatic data backup function, which can automatically back up data to local storage or remote server according to the set period.

10. The control system of an exhaust and inflation platform according to claim 6, characterized in that: The self-diagnosis function includes: Diagnostic scope: The system can monitor the working status of key components such as vacuum pumps, flow controllers, pressure sensors, and electrical components in real time, and determine whether they are within the normal range; Fault warning: When the system detects that a component is working abnormally or is about to fail, it will issue a warning in advance to prompt the operator to perform inspection and maintenance; Diagnostic report: The self-diagnosis results can generate a detailed report, which includes the fault type, possible causes, and recommended maintenance measures.

Images