Integrated multi-axial-force torque sensor

Abstract

The invention provides an integrated multi-axial force torque sensor, and relates to the technical field of force torque sensors. The device comprises a fixed box, an elastic assembly, a movable cover, a metal plate and a measuring assembly, wherein the elastic assembly is arranged in the fixed box and is connected with the inner wall of the fixed box; the movable cover is arranged at the box opening of the fixed box and is connected with the elastic component; the metal plate is arranged between the elastic assembly and the inner bottom wall of the fixed box and is connected with the elastic assembly; the measuring assembly is arranged between the metal plate and the inner bottom wall of the fixing box and can detect displacement or rotation of the metal plate. The invention has the advantages of low production cost and simple production process.

Description

Technical Field

[0001] The present application relates to the technical field of force torque sensors, and in particular to an integrated multi-axis force torque sensor. Background Art

[0002] Multi-axis force torque sensor is a sensor that can convert mechanical stress in multiple directions into electrical signals and is widely used in the fields of robots and drones.

[0003] Existing multi-axis force and torque sensors generally include a fixed box, an elastomer, a movable cover and multiple strain gauges. The elastomer is suspended inside the fixed box, and the body of the elastomer is connected to the inside of the fixed box through multiple elastic beams. The movable cover is connected to the elastomer and suspended on the box opening of the fixed box. Multiple strain gauges are dispersedly pasted on each elastic beam, so that when the multi-axis force and torque sensor is used, the mechanical stress exerted on the movable cover will be transmitted to the elastomer and cause some elastic beams around the elastomer to undergo stretching, compression or bending deformation, and the strain gauges attached to these elastic beams will also deform and change their own resistance values, thereby enabling the multi-axis force and torque sensor to measure the mechanical stress exerted on the movable cover.

[0004] However, in order to ensure that the strain gauge can correctly identify the deformation on each elastic beam, multiple strain gauges need to be attached to each elastic beam, which makes the production cost of the multi-axis force torque sensor high and the production process very complicated.

[0005] In view of this, it is necessary to provide an integrated multi-axis force torque sensor. Summary of the invention

[0006] In order to solve the problem that the existing multi-axis force and torque sensors need to attach many strain gauges during production, which results in high production costs and complex production processes, the present application provides an integrated multi-axis force and torque sensor.

[0007] The integrated multi-axis force torque sensor provided in the present application adopts the following technical solution: comprising a fixed box, an elastic component, a movable cover, a metal plate and a measuring component, wherein the elastic component is arranged inside the fixed box and connected to the inner wall of the fixed box; The movable cover is arranged at the box opening of the fixed box and connected to the elastic component; The metal plate is disposed between the elastic component and the inner bottom wall of the fixing box and is connected to the elastic component; The measuring assembly is arranged between the metal plate and the inner bottom wall of the fixing box and can detect the displacement or rotation of the metal plate.

[0008] By adopting the above technical solution, when the movable cover is subjected to mechanical stress, this part of the mechanical stress will be transmitted to the elastic component, and the elastic component will deform when subjected to the mechanical stress and cause the metal plate connected to the elastic component to move or rotate, so that the mechanical stress borne by the movable cover can be converted into movement or rotation of the metal plate. At this time, the measuring component can detect the displacement or rotation of the metal plate, and calculate the size and direction of the mechanical stress according to the detection results, so that the integrated multi-axis force and torque sensor does not need to be attached with many strain gauges during production, thereby making the production cost of the integrated multi-axis force and torque sensor lower and the production process simpler.

[0009] Specifically, the elastic component includes a gasket, a frame, an inner movable block and a plurality of elastic members, the gasket is abutted between the measuring component and the frame, the inner movable block is arranged in the frame, and the plurality of elastic members are arranged at intervals around the inner movable block, one end of each elastic member is connected to the inner movable block, and the other end of each elastic member is connected to the frame, a plug-in through hole is provided on the inner movable block, a plug-in block is provided on the movable cover, and a mounting hole leading to the measuring component is provided on the gasket, the plug-in block can be inserted into the plug-in through hole and abut against the inner wall of the plug-in through hole, and one end of the plug-in block passes through the plug-in through hole to be connected to the metal plate and allows the metal plate to be suspended in the mounting hole.

[0010] By adopting the above technical solution, when the movable cover is subjected to mechanical stress, it will move together with the inner moving block and the metal plate through the plug-in block, and cause the elastic parts around the moving block to deform; and the elastic parts around the inner moving block will return to their original state after the mechanical stress on the movable cover disappears, and cause the movable cover, the inner moving block and the metal plate to return to their original positions together.

[0011] Further, the measuring assembly includes a measuring unit and a communication unit, the measuring unit includes a coil and an inductance measuring device, the coil is arranged below the metal plate, and the inductance measuring device can detect the inductance of the coil; The communication unit is electrically connected to the inductance measurement module and can transmit the measured inductance value to a host computer.

[0012] By adopting the above technical solution, when the metal plate moves, the normal and tangential distances between the metal plate and the coil will change, and then the inductance of the coil will also change. The inductance measuring device can detect the inductance of the coil and send the detection result to the host computer through the communication unit, so that the host computer can obtain the information of mechanical stress through the change of inductance value.

[0013] Furthermore, the communication unit includes a circuit board and a transmission line, the circuit board is arranged between the gasket and the inner bottom wall of the fixed box, the coil and the inductance measuring device are both arranged on the circuit board, one end of the transmission line is connected to the circuit board, and the other end of the transmission line passes through a through hole opened on the box wall of the fixed box and extends out of the fixed box, and can be electrically connected to the host computer.

[0014] By adopting the above technical solution, the circuit board can be used to install the coil and the inductance measuring device, and the detection result of the inductance measuring device can be transmitted to the host computer through the transmission line.

[0015] Furthermore, it also includes a calibration component, which includes a horizontal calibration unit and a moving unit. The horizontal calibration unit can apply a standard force in the horizontal direction to the inner moving block. The moving unit is transmission-connected to the horizontal calibration unit and can drive the horizontal calibration unit to rotate around the central axis of the inner moving block to change the direction of the standard force applied by the horizontal calibration unit.

[0016] By adopting the above technical solution, the horizontal calibration unit can apply a standard force along the horizontal direction to the inner moving block, and the moving unit can drive the horizontal calibration unit to rotate around the central axis of the inner moving block, so that the horizontal calibration unit can apply a standard force to the inner moving block in different horizontal directions, thereby allowing the user to calibrate the integrated multi-axis force and torque sensor in the horizontal direction.

[0017] Further, the moving unit includes a sun gear, a planetary gear and a rotating device, the sun gear is arranged in the mounting hole and is located between the metal plate and the measuring assembly, the rotating shaft of the sun gear coincides with the central axis of the inner moving block, an internal gear is arranged on the inner wall of the mounting hole, the planetary gear is arranged between the internal gear and the sun gear and meshes with the internal gear and the sun gear at the same time, and the rotating device is drivingly connected to the sun gear and can drive the sun gear to rotate; The horizontal calibration unit includes a horizontal magnetic part and a horizontal terminal, and the horizontal magnetic part and the horizontal terminal are both arranged on the side of the planetary wheel facing the inner moving block. At least two horizontal electromagnets are arranged on the inner moving block, and each of the horizontal electromagnets is arranged at intervals around the central axis of the inner moving block, and each of the horizontal electromagnets is located in the same horizontal plane as the horizontal magnetic part. When the planetary wheel drives the horizontal magnetic part to move to a position close to any of the horizontal electromagnets, the horizontal electromagnet can be electrically connected to the horizontal terminal and be subjected to a standard force from the horizontal magnetic part.

[0018] By adopting the above technical solution, the rotating device can drive the sun wheel to rotate, so that the sun wheel can drive the planetary wheel to perform a planetary motion around the central axis of the inner moving block while revolving and rotating. When the planetary wheel drives the horizontal magnetic part thereon to move to a position close to any horizontal electromagnet at the bottom of the inner moving block, the horizontal electromagnet will be electrically connected to the horizontal terminal on the planetary wheel and generate a magnetic field that is the same or opposite to the magnetic pole of the horizontal magnetic part. Since each horizontal electromagnet is in the same horizontal plane as the horizontal magnetic part, the inner moving block will be subjected to a standard force in the horizontal direction.

[0019] Furthermore, the calibration assembly also includes a vertical calibration unit, which can apply a standard force along the vertical direction to the inner moving block.

[0020] By adopting the above technical solution, the vertical calibration unit can apply a standard force in the vertical direction to the inner moving block, so that the user can calibrate the integrated multi-axis force and torque sensor in the vertical direction.

[0021] Furthermore, the vertical calibration unit includes a vertical magnetic part and a vertical terminal, and the vertical magnetic part and the vertical terminal are both arranged on the side of the planetary wheel facing the inner moving block. The inner moving block is provided with a vertical electromagnet. When the planetary wheel drives the vertical magnetic part to move to directly below the vertical electromagnet, the vertical electromagnet can be electrically connected to the vertical terminal and be subjected to a standard force from the vertical magnetic part.

[0022] By adopting the above technical solution, when the planetary gear drives the vertical magnetic part to move to directly below the vertical electromagnet, the vertical electromagnet will be electrically connected to the vertical terminal and generate a magnetic field that is the same or opposite to the magnetic pole of the vertical magnetic part. Since the vertical electromagnet is located directly above the vertical magnetic part, the inner moving block will be subjected to a standard force in the vertical direction.

[0023] Furthermore, it also includes a dust-proof pad, which is arranged on the box opening of the fixed box, and the movable cover can abut against the dust-proof pad.

[0024] By adopting the above technical solution, the dust-proof pad can block the gap between the box opening of the fixed box and the movable cover, so that external dust is not easy to enter the interior of the fixed box through the gap.

[0025] Furthermore, a fixing screw hole is provided on the box opening of the fixing box, a connecting hole is provided on the dust-proof pad, and the dust-proof pad can be connected to the fixing box by passing a bolt through the connecting hole and being screwed to the fixing screw hole; The movable cover is provided with a clearance hole matched with the bolt on the dust isolation pad, and the diameter of the screw head of the bolt is smaller than the hole diameter of the clearance hole.

[0026] By adopting the above technical solution, the dust-proof pad can be fixed on the box opening of the fixed box via bolts; the aperture of the clearance hole is set larger than the diameter of the bolt head so that the movable cover will not collide with the bolt when moving.

[0027] In summary, the present application includes at least one of the following beneficial technical effects: 1. It includes a fixed box, an elastic component, a movable cover, a metal plate and a measuring component. The elastic component is arranged inside the fixed box and connected to the inner wall of the fixed box; the movable cover is arranged at the box mouth of the fixed box and connected to the elastic component; the metal plate is arranged between the elastic component and the inner bottom wall of the fixed box and connected to the elastic component; the measuring component is arranged between the metal plate and the inner bottom wall of the fixed box and can detect the displacement or rotation of the metal plate. When the movable cover is subjected to mechanical stress, this part of the mechanical stress will be transmitted to the elastic component, and the elastic component will deform when subjected to the mechanical stress and cause the metal plate connected to the elastic component to move or rotate, so that the mechanical stress borne by the movable cover can be converted into the movement or rotation of the metal plate. At this time, the measuring component can detect the displacement or rotation of the metal plate, and calculate the size and direction of the mechanical stress according to the detection result, so that the integrated multi-axis force torque sensor does not need to be attached with many strain gauges during production, thereby making the production cost of the integrated multi-axis force torque sensor low and the production process simpler; 2. It also includes a calibration component, which includes a horizontal calibration unit, a moving unit and a vertical calibration unit. The horizontal calibration unit can apply a standard force along the horizontal direction to the inner moving block. The moving unit is transmission-connected to the horizontal calibration unit and can drive the horizontal calibration unit to rotate around the central axis of the inner moving block to change the direction of the standard force applied by the horizontal calibration unit, so that the horizontal calibration unit can apply a standard force to the inner moving block in different horizontal directions, thereby allowing the user to calibrate the integrated multi-axis force and torque sensor in the horizontal direction; the vertical calibration unit can apply a standard force along the vertical direction to the inner moving block, so that the user can calibrate the integrated multi-axis force and torque sensor in the vertical direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a stereogram of the integrated multi-axis force torque sensor of the present application; Figure 2 is a top view of the integrated multi-axis force and torque sensor of the present application; Figure 3 is along Figure 2 A schematic cross-sectional view taken along the AA direction; Figure 4 is along Figure 2 A schematic cross-sectional view taken along the BB direction; Figure 5 yes Figure 3 A schematic enlarged view of region C in the middle, showing the outer electric ring and the inner electric disk; Figure 6 is along Figure 3 Schematic cross-sectional view taken along the DD direction.

[0029] Figure numerals: 1. fixed box; 2. elastic component; 21. gasket; 211. inner gear; 212. outer electric ring; 22. frame; 23. inner moving block; 231. horizontal electromagnet; 232. vertical electromagnet; 24. elastic member; 3. movable cover; 31. plug-in block; 32. clearance hole; 4. metal plate; 5. measuring component; 51. measuring unit; 511. coil; 52. communication unit; 521. circuit board; 522. transmission line; 6. calibration component; 61. horizontal calibration unit; 611. horizontal magnetic member; 612. horizontal terminal; 62. moving unit; 621. sun gear; 6211. inner electric disk; 622. planetary gear; 623. rotating device; 63. vertical calibration unit; 631. vertical magnetic member; 632. vertical terminal; 7. dustproof pad. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1 -Attached Figure 6 Description of this application: See also Figure 1 and Figure 2 The integrated multi-axis force torque sensor includes: a fixed box 1, a measuring component 5, an elastic component 2, a movable cover 3, a metal plate 4 and a calibration component 6. The measuring component 5 includes a communication unit 52 and a measuring unit 51. The communication unit 52 includes a circuit board 521 and a transmission line 522. The circuit board 521 is arranged in the fixed box 1 and abuts against the bottom wall of the fixed box 1. One end of the transmission line 522 is connected to the circuit board 521, and the other end of the transmission line 522 passes through a through hole opened on the wall of the fixed box 1 and extends out of the fixed box 1, and is arranged on a plug (not shown in the figure) for electrical connection with a host computer.

[0031] See also Figure 3 and Figure 6 The measuring unit 51 includes four coils 511 and an inductance measuring device (not shown in the figure). The four coils 511 are arranged in an array on a circuit board 521. The inductance measuring device is electrically connected to the four coils 511. The inductance measuring device can be a preamplifier in the eddy current displacement sensor. The preamplifier can detect the change in the inductance value of the coil 511 array, so that the inductance measuring device can form an eddy current displacement sensor with the four coils 511.

[0032] See also Figure 3 and Figure 4The elastic component 2 includes a gasket 21, a frame 22, an inner moving block 23 and six elastic members 24. The gasket 21 is annular. The annular gasket 21 is arranged between the circuit board 521 and the frame 22. The inner ring of the annular gasket 21 becomes a mounting hole. Four screw holes are opened on the inner bottom wall of the fixed box 1 at equal intervals around its own central axis. Four through holes corresponding to these screw holes are arranged on the frame 22, the gasket 21 and the circuit board 521. Bolts can pass through the through holes on the frame 22, the gasket 21 and the circuit board 521 in sequence and be screwed to the screw holes, so that the frame 22, the gasket 21 and the circuit board 521 can be fixed on the inner bottom wall of the fixed box 1; the inner moving block 23 is arranged in the frame 22, and the six elastic members 24 are arranged at equal intervals around the inner moving block 23. One end of each elastic member 24 is connected to the inner moving block 2 3, the other end of each elastic member 24 is connected to the frame 22, the elastic member 24 can be made of metal, when the inner moving block 23 is displaced or rotated in the x-axis, y-axis or z-axis direction, these elastic members 24 will be deformed and return the inner moving block 23 to its original position when the mechanical stress driving the inner moving block 23 to move disappears; a plug-in through hole is provided in the middle of the inner moving block 23, the cross section of the plug-in through hole is square, a plug-in block 31 adapted to the plug-in through hole is provided on the bottom surface of the movable cover 3, the body of the plug-in block 31 is inserted into the plug-in through hole and abuts against the inner wall of the plug-in through hole, the bottom end of the plug-in block 31 passes through the plug-in through hole to be connected to the metal plate 4 so that the metal plate 4 is suspended in the inner ring of the annular gasket 21, the metal plate 4 can be made of aluminum and adhered to the plug-in block 31 by glue.

[0033] See also Figure 1 and Figure 5 A circle of bosses is provided on the body of the plug-in block 31 at one end close to the movable cover 3, and the bosses can abut against the inner movable block 23 and form a circle of gap between the bottom of the movable cover 3 and the box opening of the fixed box 1. The setting of the gap allows the movable cover 3 to move back and forth in the z-axis direction with the inner movable block 23 and the metal plate 4, and can also limit the maximum distance that the inner movable block 23 moves in the direction close to the bottom of the fixed box 1, that is, when the movable cover 3 abuts against the box opening of the fixed box 1, it cannot continue to move in the direction close to the bottom of the fixed box 1 with the inner movable block 23, thereby achieving overload protection of the elastic body around the inner movable block 23 in the z-axis direction.

[0034] Through the above arrangement, when the movable cover 3 is subjected to mechanical stress, this part of the mechanical stress will be transmitted to the inner movable block 23 and the metal plate 4, and the elastic member 24 around the inner movable block 23 will be deformed when subjected to the mechanical stress and cause the metal plate 4 to move or rotate, so as to be able to convert the mechanical stress borne by the movable cover 3 into the movement or rotation of the metal plate 4. At this time, the inductance measuring device and the coil 511 array can cooperate and detect the displacement or rotation of the metal plate 4, so that the host computer can calculate the size and direction of the mechanical stress according to the detection results, so that the integrated multi-axis force and torque sensor does not need to be attached with many strain gauges during production, thereby making the production cost of the integrated multi-axis force and torque sensor lower and the production process simpler.

[0035] Specifically, a dust-proof pad 7 can be provided at the box opening of the fixed box 1. The dust-proof pad 7 can be made of soft materials such as rubber. On the one hand, it can block a portion of the gap between the bottom of the movable cover 3 and the box opening of the fixed box 1, so that external dust is not easy to enter the interior of the fixed box 1 through the gap; on the other hand, the dust-proof pad 7 can be deformed when the movable cover 3 moves toward the box bottom of the fixed box 1, and will not restrict the movement of the movable cover 3 toward the box bottom of the fixed box 1; the box opening of the fixed box 1 is provided with fixing screw holes at equal intervals around its own central axis, and four connecting holes are provided on the dust-proof pad 7, so that the dust-proof pad 7 can be connected to the fixed box 1 by bolts passing through the connecting holes and the fixing screw holes; four clearance holes 32 are also provided on the movable cover 3 to match the bolts on the dust-proof pad 7, and the aperture of each clearance hole 32 is larger than the diameter of the screw head of the bolt on the dust-proof pad 7, so that the movable cover 3 will not collide with these bolts when moving.

[0036] See also Figure 4 and Figure 6 The calibration component 6 includes a moving unit 62, a horizontal calibration unit 61 and a vertical calibration unit 63. The moving unit 62 includes a sun gear 621, a pair of planetary gears 622 and a rotating device 623. The sun gear 621 is arranged in the inner ring of the annular gasket 21 and is located between the metal plate 4 and the measuring component 5. The rotating shaft of the sun gear 621 coincides with the central axis of the inner moving block 23. An internal gear 211 is provided on the inner ring wall of the annular gasket 21. Two planetary gears 622 are relatively arranged with the sun gear 621 as the center. Each planetary gear 622 is meshed with the internal gear 211 and the sun gear 621 at the same time. The rotating device 623 is a rotating motor, which is arranged on the circuit board 521. The driving shaft of the rotating motor is transmission-connected to the sun gear 621 and can drive the sun gear 621 to rotate.

[0037] See also Figure 4 and Figure 6The diameter of the planetary gear 622 is set to be one quarter of the inner ring diameter of the annular gasket 21. The horizontal calibration unit 61 includes a horizontal magnetic piece 611 and a horizontal terminal 612. The horizontal magnetic piece 611 and the horizontal terminal 612 are both arranged on a side of a planetary gear 622 facing the inner moving block 23. A convex ring is also arranged on the wheel surface of the planetary gear 622. The gear surface of the planetary gear 622 is located below the convex ring. A conductive groove is opened on the convex ring along the circumferential direction. An outer electric ring 212 is also arranged on the inner ring wall of the annular gasket 21. The top of the sun gear 621 An inner electric disk 6211 is provided, and the outer electric ring 212 and the inner electric disk 6211 are both inserted into the conductive groove and abut against the inner wall of the conductive groove; in actual use, the outer electric ring 212 can be connected to the positive pole of the power supply and the inner electric disk 6211 can be connected to the negative pole of the power supply, or the outer electric ring 212 can be connected to the negative pole of the power supply and the inner electric disk 6211 can be connected to the positive pole of the power supply, so that the electrical equipment on the planetary gear 622 can be powered by the outer electric ring 212 and the inner electric disk 6211, and the planetary gear 622 can be restricted from slipping between the sun gear 621 and the inner gear 211.

[0038] See also Figure 4 and Figure 6 , four horizontal electromagnets 231 are provided on the inner moving block 23, and the four horizontal electromagnets 231 are arranged at equal intervals around the central axis of the inner moving block 23, wherein the line connecting two horizontal electromagnets 231 is arranged along the x-axis direction, and the line connecting two horizontal electromagnets 231 is arranged along the y-axis direction; the horizontal magnetic member 611 can be an electromagnet, and the magnetic area of ​​each horizontal electromagnet 231 is located in the same horizontal plane as the magnetic area of ​​the horizontal magnetic member 611; since the diameter of the planetary gear 622 is set to be one quarter of the inner ring diameter of the annular gasket 21, when the planetary gear 622 rotates around the sun gear 621 for one circle, the magnetic area of ​​the horizontal magnetic member 611 will be sequentially moved from the magnetic area of ​​each horizontal electromagnet 231 to the magnetic area of ​​each horizontal electromagnet 231. passing in front of it; when the planetary gear 622 drives the horizontal magnetic piece 611 to move to a position close to any horizontal electromagnet 231, the positive terminal and the negative terminal of the horizontal electromagnet 231 can abut against the horizontal terminal 612 on the planetary gear 622, so that the horizontal electromagnet 231 generates a magnetic field that is the same as or opposite to the magnetic pole of the horizontal magnetic piece 611. Since each horizontal electromagnet 231 is in the same horizontal plane as the horizontal magnetic piece 611, the inner moving block 23 will be subjected to a standard force from the x-axis direction or the y-axis. The size of the standard force can be specifically determined by setting the distance and magnetic size between the magnetic area of ​​the horizontal electromagnet 231 and the magnetic area of ​​the horizontal magnetic piece 611.

[0039] See also Figure 4 and Figure 6The vertical calibration unit 63 includes two vertical magnetic parts 631 and two vertical terminals 632. Each planetary gear 622 is provided with a vertical magnetic part 631 and a vertical terminal 632 on one side facing the inner moving block 23. Each vertical magnetic part 631 is arranged at the center of the planetary gear 622. The vertical terminal 632 is an annular structure. The annular vertical terminal 632 is arranged around the vertical magnetic part 631, and the annular vertical terminal 632 is divided into two halves by an insulating material, one half is connected to the positive pole of the power supply, and the other half is connected to the negative pole of the power supply.

[0040] See also Figure 4 and Figure 6 , four vertical electromagnets 232 are provided on the inner moving block 23, and the four vertical electromagnets 232 are also arranged at equal intervals around the central axis of the inner moving block 23, and each vertical electromagnet 232 is located between the two horizontal electromagnets 231, and the vertical electromagnet 232 includes a columnar positive terminal and a negative terminal, and the positive terminal and the negative terminal are relatively arranged on both sides of the magnetic area of ​​the vertical electromagnet 232, and the positive terminal and the negative terminal of the two adjacent vertical electromagnets 232 are arranged oppositely; the vertical magnetic member 631 can be an electromagnet, and when the planetary gear 622 drives the two vertical magnetic members 631 to move to the bottom of a pair of vertical electromagnets 232, the positive terminal and the negative terminal of the pair of vertical electromagnets 232 will respectively contact with the ring The two halves of the shaped vertical terminal 632 are abutted so that the two vertical electromagnets 232 generate a magnetic field that is the same as or opposite to the magnetic pole of the vertical magnetic piece 631, so that the inner moving block 23 will be subjected to a standard force in the z-axis direction; when the planetary gear 622 drives the two vertical magnetic pieces 631 to move to the bottom of another pair of vertical electromagnets 232, since the positive and negative terminals of this pair of vertical electromagnets 232 are arranged opposite to those of the previous pair of vertical electromagnets 232, the direction of the standard force in the z-axis direction received by the inner moving block 23 is also opposite, that is, one pair of vertical electromagnets 232 moves the inner moving block 23 upward, and the other pair of vertical electromagnets 232 moves the inner moving block 23 downward.

[0041] It should be noted that when the vertical electromagnet 232 generates a magnetic field with the same or opposite pole to that of the vertical magnetic part 631, the resultant torque of the force acting on the inner moving block 23 is zero, so that the inner moving block 23 will only move in the z-axis direction without deflection, thereby facilitating the calibration of the integrated multi-axis force and torque sensor in the z-axis direction.

[0042] The calibration process of the integrated multi-axis force torque sensor provided in this application is as follows: The user can start the rotating device 623 to drive the sun gear 621 to rotate, so that the sun gear 621 drives the planetary gear 622 to rotate around the center of the sun gear 621. During the rotation, the inner moving block 23 will be subjected to standard pulling and thrust forces along the x-axis, y-axis and z-axis directions and drive the metal plate 4 to move accordingly, thereby enabling the inductance measuring device and the coil 511 array to cooperate in detecting the displacement of the metal plate 4, so that the host computer can calibrate the integrated multi-axis force torque sensor with reference to the displacement of the metal plate 4, the size of the standard force and the direction of the standard force.

[0043] The implementation principle of the integrated multi-axis force torque sensor described in this application is: When the movable cover 3 is subjected to mechanical stress, this part of the mechanical stress will be transmitted to the inner movable block 23 and the metal plate 4, and the elastic member 24 around the inner movable block 23 will be deformed when subjected to the mechanical stress and cause the metal plate 4 to move or rotate, so as to be able to convert the mechanical stress borne by the movable cover 3 into the movement or rotation of the metal plate 4. At this time, the inductance measuring device and the coil 511 array can cooperate and detect the displacement or rotation of the metal plate 4, so that the host computer can calculate the size and direction of the mechanical stress according to the detection results, so that the integrated multi-axis force and torque sensor does not need to be attached with many strain gauges during production, thereby making the production cost of the integrated multi-axis force and torque sensor lower and the production process simpler.

[0044] The embodiments of this specific implementation are all preferred embodiments of the present application, and are not intended to limit the protection scope of the present application. The same components are represented by the same figure marks. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. Integrated multi-axis force torque sensor, characterized by: It comprises a fixed box (1), an elastic component (2), a movable cover (3), a metal plate (4) and a measuring component (5), wherein the elastic component (2) is arranged inside the fixed box (1) and connected to the inner wall of the fixed box (1); The movable cover (3) is arranged at the box opening of the fixed box (1) and is connected to the elastic component (2); The metal plate (4) is arranged between the elastic component (2) and the inner bottom wall of the fixing box (1) and is connected to the elastic component (2); The measuring component (5) is arranged between the metal plate (4) and the inner bottom wall of the fixing box (1) and is capable of detecting the displacement or rotation of the metal plate (4).

2. The integrated multi-axis force torque sensor according to claim 1, characterized in that: The elastic component (2) comprises a gasket (21), a frame (22), an inner moving block (23) and a plurality of elastic members (24); the gasket (21) is abutted between the measuring component (5) and the frame (22); the inner moving block (23) is arranged in the frame (22); a plurality of elastic members (24) are arranged at intervals around the inner moving block (23); one end of each elastic member (24) is connected to the inner moving block (23); the other end of each elastic member (24) is connected to the inner moving block (23); One end is connected to the frame (22); a plug-in through hole is provided on the inner movable block (23); a plug-in block (31) is provided on the movable cover (3); a mounting hole leading to the measuring component (5) is provided on the gasket (21); the plug-in block (31) can be inserted into the plug-in through hole and abut against the inner wall of the plug-in through hole; one end of the plug-in block (31) passes through the plug-in through hole to be connected to the metal plate (4) so ​​that the metal plate (4) is suspended in the mounting hole.

3. The integrated multi-axis force torque sensor according to claim 2, characterized in that: The measuring component (5) comprises a measuring unit (51) and a communication unit (52); the measuring unit (51) comprises a coil (511) and an inductance measuring device; the coil (511) is arranged below the metal plate (4); and the inductance measuring device is capable of detecting the inductance of the coil (511); The communication unit (52) is electrically connected to the inductance measurement module and is capable of transmitting the measured inductance value to a host computer.

4. The integrated multi-axis force torque sensor according to claim 3, characterized in that: The communication unit (52) comprises a circuit board (521) and a transmission line (522); the circuit board (521) is arranged between the gasket (21) and the inner bottom wall of the fixed box (1); the coil (511) and the inductance measuring device are both arranged on the circuit board (521); one end of the transmission line (522) is connected to the circuit board (521); the other end of the transmission line (522) passes through a through hole provided on the box wall of the fixed box (1) and extends out of the fixed box (1), and can be electrically connected to the host computer.

5. The integrated multi-axis force torque sensor according to claim 2, characterized in that: The invention also comprises a calibration component (6), wherein the calibration component (6) comprises a horizontal calibration unit (61) and a moving unit (62), wherein the horizontal calibration unit (61) is capable of applying a standard force along the horizontal direction to the inner moving block (23), and the moving unit (62) is transmission-connected to the horizontal calibration unit (61) and is capable of driving the horizontal calibration unit (61) to rotate around the central axis of the inner moving block (23) so as to change the direction of the standard force applied by the horizontal calibration unit (61).

6. The integrated multi-axis force torque sensor according to claim 5, characterized in that: The moving unit (62) comprises a sun gear (621), a planetary gear (622) and a rotating device (623); the sun gear (621) is arranged in the mounting hole and between the metal plate (4) and the measuring assembly (5); the rotating shaft of the sun gear (621) coincides with the central axis of the inner moving block (23); an internal gear (211) is arranged on the inner wall of the mounting hole; the planetary gear (622) is arranged between the internal gear (211) and the sun gear (621) and meshes with the internal gear (211) and the sun gear (621) at the same time; the rotating device (623) is transmission-connected to the sun gear (621) and can drive the sun gear (621) to rotate; The horizontal calibration unit (61) comprises a horizontal magnetic part (611) and a horizontal terminal (612). The horizontal magnetic part (611) and the horizontal terminal (612) are both arranged on the side of the planetary gear (622) facing the inner moving block (23). At least two horizontal electromagnets (231) are arranged on the inner moving block (23). Each of the horizontal electromagnets (231) is arranged at intervals around the central axis of the inner moving block (23). Each of the horizontal electromagnets (231) is located in the same horizontal plane as the horizontal magnetic part (611). When the planetary gear (622) drives the horizontal magnetic part (611) to move to a position close to any of the horizontal electromagnets (231), the horizontal electromagnet (231) can be electrically connected to the horizontal terminal (612) and receive a standard force from the horizontal magnetic part (611).

7. The integrated multi-axis force torque sensor according to claim 6, characterized in that: The calibration component (6) further comprises a vertical calibration unit (63), wherein the vertical calibration unit (63) is capable of applying a standard force in a vertical direction to the inner moving block (23).

8. The integrated multi-axis force torque sensor according to claim 7, characterized in that: The vertical calibration unit (63) comprises a vertical magnetic part (631) and a vertical terminal (632). The vertical magnetic part (631) and the vertical terminal (632) are both arranged on the side of the planetary gear (622) facing the inner moving block (23). A vertical electromagnet (232) is arranged on the inner moving block (23). When the planetary gear (622) drives the vertical magnetic part (631) to move to the position directly below the vertical electromagnet (232), the vertical electromagnet (232) can be electrically connected to the vertical terminal (632) and receive a standard force from the vertical magnetic part (631).

9. The integrated multi-axis force torque sensor according to claim 2, characterized in that: It also comprises a dust-proof pad (7), wherein the dust-proof pad (7) is arranged on the box opening of the fixed box (1), and the movable cover (3) can abut against the dust-proof pad (7).

10. The integrated multi-axis force torque sensor according to claim 9, characterized in that: The box opening of the fixing box (1) is provided with a fixing screw hole, the dust-isolating pad (7) is provided with a connecting hole, and the dust-isolating pad (7) can be connected to the fixing box (1) by passing a bolt through the connecting hole and being screwed to the fixing screw hole; The movable cover (3) is provided with a clearance hole (32) adapted to the bolt on the dust isolation pad (7), and the diameter of the screw head of the bolt is smaller than the hole diameter of the clearance hole (32).

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