Mixed pressure fluid control valve device and fluid valve seat module

Abstract

The invention discloses a mixed pressure fluid control valve device and a fluid valve seat module. The mixed pressure fluid control valve device comprises a fluid valve seat module, a plurality of first control valve modules and a plurality of second control valve modules. The fluid valve seat module is provided with a plurality of transmission channels, a plurality of transmission hole sets and a plurality of gas isolation elements, each transmission hole set comprises a plurality of connecting holes, the connecting holes are communicated with the transmission channels, and each gas isolation element is detachably arranged between every two adjacent transmission hole sets. The plurality of first control valve modules and the plurality of second control valve modules are connected to the fluid valve seat module. Therefore, according to the mixed pressure fluid control valve device and the fluid valve seat module, the reaction time between the electromagnetic valve assemblies can be shortened.

Description

[0001] (This application claims the filing date of July 11, 2023, application number 112125772, and the priority of the patent application in Taiwan) Technical Field

[0002] The invention relates to a control valve device and a valve seat module, and in particular to a mixed-pressure fluid control valve device and a fluid valve seat module. Background Art

[0003] In traditional solenoid valve equipment, the solenoid valve group is connected in series, which requires more space for configuration and has the shortest pipe length (about 7 cm). Therefore, its gas response time (such as positive pressure to negative pressure, or negative pressure to positive pressure) is limited to 40 milliseconds (ms). Therefore, if it is applied to the specification requirements of high-speed models, it will be limited.

[0004] Therefore, how to overcome the above-mentioned defects through improvement of structural design has become one of the important issues to be solved in the technical field. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a mixed-pressure fluid control valve device and a fluid valve seat module in view of the deficiencies in the prior art.

[0006] In order to solve the above technical problems, one of the technical solutions adopted by the present invention is to provide a mixed pressure fluid control valve device, including a fluid valve seat module, a plurality of first control valve modules and a plurality of second control valve modules. The fluid valve seat module has a first transmission channel, a second transmission channel, a third transmission channel, a plurality of fourth transmission channels, a plurality of transmission hole groups and a plurality of gas isolation elements, each transmission hole group includes a first connection hole, a second connection hole, a third connection hole, a fourth connection hole and a fifth connection hole, each first connection hole is connected to the first transmission channel, each second connection hole, each fourth connection hole is connected to the second transmission channel, each third connection hole is connected to the third transmission channel, each fifth connection hole is connected to one of the fourth transmission channels, and a plurality of gas isolation elements are arranged in the second transmission channel, and each gas isolation element is detachably arranged between every two adjacent transmission hole groups. A plurality of first control valve modules are connected to the fluid valve seat module, and each first control valve module is connected to the first connection hole, the second connection hole and the third connection hole of one of the transmission hole groups. A plurality of second control valve modules are connected to the fluid valve seat module, and each second control valve module is connected to the fourth connection hole and the fifth connection hole of one of the transmission hole groups.

[0007] In one feasible or preferred embodiment, the third transmission channel is connected to the first external gas supply end, and each fourth transmission channel is connected to the second external gas supply end; wherein the first external gas supply end is a positive pressure gas supply end, and the second external gas supply end is a negative pressure gas supply end.

[0008] In one feasible or preferred embodiment, when the first control valve module corresponding to at least one transmission hole group is in an operating state and the corresponding second control valve module is in a stopped state, the fluid valve seat module is in a positive pressure state.

[0009] In one feasible or preferred embodiment, when the second control valve module corresponding to at least one transmission hole group is in an operating state, the fluid valve seat module is in a negative pressure state.

[0010] In one feasible or preferred embodiment, the plurality of first control valve modules and the plurality of second control valve modules are three-port two-position solenoid valve components.

[0011] In order to solve the above-mentioned technical problems, another technical solution adopted by the present invention is to provide a fluid valve seat module, having a first transmission channel, a second transmission channel, a third transmission channel, multiple fourth transmission channels, multiple transmission hole groups and multiple gas isolation elements, each transmission hole group includes a first connecting hole, a second connecting hole, a third connecting hole, a fourth connecting hole and a fifth connecting hole, each first connecting hole is communicated with the first transmission channel, each second connecting hole, each fourth connecting hole is communicated with the second transmission channel, each third connecting hole is communicated with the third transmission channel, and each fifth connecting hole is communicated with one of the fourth transmission channels, and multiple gas isolation elements are arranged in the second transmission channel, and each gas isolation element is detachably arranged between each two adjacent transmission hole groups.

[0012] In one feasible or preferred embodiment, the third transmission channel is connected to the first external gas supply end, and each fourth transmission channel is connected to the second external gas supply end; wherein the first external gas supply end is a positive pressure gas supply end, and the second external gas supply end is a negative pressure gas supply end.

[0013] In one feasible or preferred embodiment, the first connecting hole, the second connecting hole and the third connecting hole of each transmission hole group are configured to be connected to the first external control valve component, and the fourth connecting hole and the fifth connecting hole of each transmission hole group are configured to be connected to the second external control valve component.

[0014] In one feasible or preferred embodiment, when the first external control valve component corresponding to at least one transmission hole group is in an operating state and the corresponding second external control valve component is in a stopped state, the fluid valve seat module is in a positive pressure state.

[0015] In one feasible or preferred embodiment, when the second external control valve member corresponding to at least one transmission hole group is in an operating state, the fluid valve seat module is in a negative pressure state.

[0016] One of the beneficial effects of the present invention is that the mixed-pressure fluid control valve device provided by the present invention can shorten the reaction time between solenoid valve components and improve the reaction speed between solenoid valve components through the technical solutions of "the fluid valve seat module has a first transmission channel, a second transmission channel, a third transmission channel, multiple fourth transmission channels, multiple transmission hole groups and multiple gas isolation elements, each transmission hole group includes a first connecting hole, a second connecting hole, a third connecting hole, a fourth connecting hole and a fifth connecting hole, each first connecting hole is communicated with the first transmission channel, each second connecting hole, each fourth connecting hole is communicated with the second transmission channel, each third connecting hole is communicated with the third transmission channel, and each fifth connecting hole is communicated with one of the fourth transmission channels, and multiple gas isolation elements are arranged in the second transmission channel, and each gas isolation element is detachably arranged between every two adjacent transmission hole groups", "multiple first control valve modules are connected to the fluid valve seat module, each first control valve module is connected to the first connecting hole, the second connecting hole and the third connecting hole of one of the transmission hole groups", and "multiple second control valve modules are connected to the fluid valve seat module, each second control valve module is connected to the fourth connecting hole and the fifth connecting hole of one of the transmission hole groups".

[0017] Another beneficial effect of the present invention is that the fluid valve seat module provided by the present invention can shorten the reaction time between solenoid valve components and improve the reaction speed between solenoid valve components through the technical scheme of "having a first transmission channel, a second transmission channel, a third transmission channel, multiple fourth transmission channels, multiple transmission hole groups and multiple gas isolation elements, each transmission hole group includes a first connecting hole, a second connecting hole, a third connecting hole, a fourth connecting hole and a fifth connecting hole, each first connecting hole is communicated with the first transmission channel, each second connecting hole, each fourth connecting hole is communicated with the second transmission channel, each third connecting hole is communicated with the third transmission channel, each fifth connecting hole is communicated with one of the fourth transmission channels, multiple gas isolation elements are arranged in the second transmission channel, and each gas isolation element is detachably arranged between each two adjacent transmission hole groups".

[0018] To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings provided are only for reference and description and are not intended to limit the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a three-dimensional schematic diagram from one viewing angle of a mixed-pressure fluid control valve device according to an embodiment of the present invention.

[0020] Figure 2 It is a three-dimensional schematic diagram of the mixed-pressure fluid control valve device of an embodiment of the present invention from another perspective.

[0021] Figure 3 It is a partially exploded schematic diagram of a mixed-pressure fluid control valve device from one perspective according to an embodiment of the present invention.

[0022] Figure 4 It is a partially exploded schematic diagram of the mixed-pressure fluid control valve device according to another perspective of an embodiment of the present invention.

[0023] Figure 5 It is a partial cross-sectional schematic diagram from one perspective of a fluid valve seat module of a mixed-pressure fluid control valve device according to an embodiment of the present invention.

[0024] Figure 6 It is a partial cross-sectional schematic diagram of one position of the fluid valve seat module of the mixed-pressure fluid control valve device according to an embodiment of the present invention from another perspective.

[0025] Figure 7 It is a partial cross-sectional schematic diagram of another position of the fluid valve seat module of the mixed-pressure fluid control valve device according to an embodiment of the present invention from another viewing angle.

[0026] Reference numerals:

[0027] Z: mixed-pressure fluid control valve device; 1: fluid valve seat module; 11: first transmission channel; 12: second transmission channel; 13: third transmission channel; 14: fourth transmission channel; 15: transmission hole group; 151: first connecting hole; 152: second connecting hole; 153: third connecting hole; 154: fourth connecting hole; 155: fifth connecting hole; 16: gas isolation element; 17: mounting hole; 18: anti-leakage part; 2: first control valve module; 3: second control valve module; 30: external connection hole; Gs1: first external air supply end; Gs2: second external air supply end; h: predetermined distance. DETAILED DESCRIPTION

[0028] The following is an explanation of the implementation methods of the "mixed-pressure fluid control valve device and fluid valve seat module" disclosed in the present invention through specific embodiments. Those skilled in the art can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted in actual size. It is stated in advance. The following embodiments will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention.

[0029] It should be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are mainly used to distinguish one element from another element. In addition, the term "or" used herein may include any one or more combinations of the associated listed items depending on the actual situation.

[0030] Example

[0031] See also Figures 1 to 7 , are respectively a stereoscopic schematic diagram of a mixed-pressure fluid control valve device in one perspective, a stereoscopic schematic diagram in another perspective, a partially exploded schematic diagram in one perspective, a partially exploded schematic diagram in another perspective, a partial cross-sectional schematic diagram of a fluid valve seat module in one perspective, a first partial cross-sectional schematic diagram of a fluid valve seat module in another perspective, a partial cross-sectional schematic diagram of a position in another perspective of the fluid valve seat module, and a partial cross-sectional schematic diagram of another position in another perspective of the fluid valve seat module. As shown in the above figures, an embodiment of the present invention provides a mixed-pressure fluid control valve device Z, including a fluid valve seat module 1, a plurality of first control valve modules 2, and a plurality of second control valve modules 3.

[0032] Cooperate Figures 1 to 7As shown, the fluid valve seat module 1 of the present invention may have a first transmission channel 11, a second transmission channel 12, a third transmission channel 13, a plurality of fourth transmission channels 14, a plurality of transmission hole groups 15 and a plurality of gas isolation elements 16. Each transmission hole group 15 may include a first connection hole 151, a second connection hole 152, a third connection hole 153, a fourth connection hole 154 and a fifth connection hole 155. Each first connection hole 151 is in communication with the first transmission channel 11, each second connection hole 152, each fourth connection hole 154 is in communication with the second transmission channel 12, each third connection hole 153 is in communication with the third transmission channel 13, and each fifth connection hole 155 is in communication with one of the fourth transmission channels 14. A plurality of gas isolation elements 16 may be arranged in the second transmission channel 12, and each gas isolation element 16 may be detachably arranged between each two adjacent transmission hole groups 15.

[0033] For example, the fluid valve seat module 1 can be a long hollow valve seat structure. The first transmission channel 11, the second transmission channel 12 and the third transmission channel 13 can be parallel to each other and not communicated; however, in other embodiments, the first transmission channel 11, the second transmission channel 12 and the third transmission channel 13 can also be non-parallel to each other, or only two of them are parallel to each other. The first transmission channel 11, the second transmission channel 12 and the third transmission channel 13 can be arranged in the fluid valve seat module 1 at equal intervals or unequal intervals. And a plurality of fourth transmission channels 14 can be arranged in the fluid valve seat module 1 at equal intervals or unequal intervals, and a plurality of fourth transmission channels 14 are arranged on a bottom surface of the fluid valve seat module 1. Each fourth transmission channel 14 is non-parallel to and non-communicated with the first transmission channel 11, the second transmission channel 12 and the third transmission channel 13. In addition, one end of the third transmission channel 13 can be connected to the first external gas supply end Gs1; wherein the first external gas supply end Gs1 can be a positive pressure gas supply end. One end of each fourth transmission channel 14 may be connected to the same or different second external gas supply end Gs2; wherein the second external gas supply end Gs2 may be a negative pressure gas supply end.

[0034] And, cooperate Figure 3 , Figures 5 to 7As shown, the first connection hole 151, the second connection hole 152, the third connection hole 153, the fourth connection hole 154 and the fifth connection hole 155 are arranged on one side of the fluid valve seat module 1. The first connection hole 151, the second connection hole 152, the third connection hole 153 and the fourth connection hole 154 of each transmission hole group 15 can be parallel to each other and not communicated; however, in other embodiments, the first connection hole 151, the second connection hole 152, the third connection hole 153 and the fourth connection hole 154 can also be non-parallel to each other, or only at least two of them are parallel to each other. The fifth connection hole 155 is non-parallel to and does not communicate with the first connection hole 151, the second connection hole 152, the third connection hole 153 and the fourth connection hole 154. In addition, the third connection hole 153 of each transmission hole group 15 is communicated with each other through the third transmission channel 13. Furthermore, a predetermined distance h may be provided between the centers of the second connection hole 152 and the fourth connection hole 154 of each transmission hole group 15 . The predetermined distance h may be between 1 cm and 1.5 cm, and preferably may be 1 cm.

[0035] The gas isolation element 16 may be a blind bolt or other types of embolic plugs. The fluid valve seat module 1 may also have a plurality of mounting holes 17 that penetrate the body, and the plurality of mounting holes 17 are disposed on the other side of the fluid valve seat module 1; therefore, the user may set the gas isolation element 16 in the fluid valve seat module 1 through the mounting holes 17 and block part of the second transmission channel 12. In addition, the fluid valve seat module 1 may also have a plurality of leak-proof parts 18, and the leak-proof parts 18 may be blind bolts or other types of embolic plugs. The plurality of leak-proof parts 18 may be detachably disposed at one end of the first transmission channel 11, the other end of the second transmission channel 12, and the other end of the third transmission channel 13.

[0036] Next, cooperate Figures 1 to 7 As shown, a plurality of first control valve modules 2 can be connected to the fluid valve seat module 1, and each first control valve module 2 is connected to the first connection hole 151, the second connection hole 152, and the third connection hole 153 of one of the transmission hole groups 15. For example, the first control valve module 2 can be a three-port two-position solenoid valve. A plurality of first control valve modules 2 can be arranged at intervals on one side of the fluid valve seat module 1.

[0037] Next, cooperate Figures 1 to 7 As shown, a plurality of second control valve modules 3 can be connected to the fluid valve seat module 1, and each second control valve module 3 is connected to the fourth connection hole 154 and the fifth connection hole 155 of one of the transmission hole groups 15. For example, the second control valve module 3 can be a three-port two-position solenoid valve. A plurality of second control valve modules 3 can be arranged at intervals on one side of the fluid valve seat module 1, and each second control valve module 3 corresponds to one of the first control valve modules 2 and is located on one side of the corresponding first control valve module 2.

[0038] Therefore, when the first control valve module 2 corresponding to at least one transmission hole group 15 is in an operating state and the corresponding second control valve module 3 is in a stopped state, the fluid valve seat module 1 is in a positive pressure state. When the second control valve module 3 corresponding to at least one transmission hole group 15 is in an operating state, the fluid valve seat module 1 is in a negative pressure state.

[0039] For example, with Figures 1 to 7 As shown, when the user operates the mixed-pressure fluid control valve device Z of the present invention, a negative pressure gas can be provided to at least one fourth transmission channel 14 of the fluid valve seat module 1 through at least one second external gas supply end Gs2, and the second control valve module 3 can be driven to operate (the corresponding first control valve module 2 is in a stopped state at this time). Then, the fourth transmission channel 14 that receives the negative pressure gas will transmit the negative pressure gas to the corresponding fifth connection hole 155; at this time, the fifth connection hole 155 will provide the negative pressure gas to the corresponding second control valve module 3, and the fluid valve seat module 1 is in a negative pressure state. Next, the second control valve module 3 can provide the negative pressure gas to the picking device (such as a suction head assembly, but not limited to this), so that the picking device can pick up objects (such as wafers, but not limited to this). Among them, each second control valve module 3 can have an external connection hole 30 on the side facing away from the fluid valve seat module 1, and each external connection hole 30 can be used to connect with the picking device. It is worth noting that in the above operation process, if the corresponding first control valve module 2 operates at the same time, or the first external gas supply end Gs1 also provides positive pressure gas to the first transmission channel 11, the fluid valve seat module 1 is also in a negative pressure state.

[0040] When the user provides positive pressure gas to the first transmission channel 11 of the fluid valve seat module 1 through the first external gas supply port Gs1, and drives the first control valve module 2 (which corresponds to the above-mentioned second control valve module 3) to operate (the second control valve module 3 is in a stopped state at this time), the first transmission channel 11 will provide the positive pressure gas to the above-mentioned operating first control valve module 2 through the third connection hole 153. Then, the first control valve module 2 can transmit the positive pressure gas to the second connection hole 152, so that the positive pressure gas can be transmitted to the second control valve module 3 through the second transmission channel 12 and the fourth connection hole 154 in sequence; at this time, the fluid valve seat module 1 is in a positive pressure state. Next, the second control valve module 3 can provide the positive pressure gas to the picking device, so that the picking device can release the sucked object (i.e., perform a placement action).

[0041] It is worth mentioning that when the first control valve module 2 and the second control valve module 3 are both in a stopped state, exhaust can be performed through the first connecting hole 151 and the first transmission channel 11 to discharge the gas inside the fluid valve seat module 1 to the outside.

[0042] Thus, the mixed-pressure fluid control valve device Z of the present invention adopts the above-mentioned technical scheme and utilizes the structural design of the fluid valve seat module 1, that is, the predetermined distance h between the second connecting hole 152 and the fourth connecting hole 154 of each transmission hole group 15 is between 1 cm and 1.5 cm, so that the connecting channel between the relative first control valve module 2 and the second control valve module 3 is only about 1 cm to 1.5 cm, and the response time of each group of solenoid valve components of the present invention (that is, each first control valve module 2 and the corresponding second control valve module 3) can be shortened by more than 50% compared with the solenoid valve components of traditional solenoid valve equipment, thereby improving the response speed.

[0043] In addition, according to the above content, the present invention further proposes a fluid valve seat module 1. Figures 1 to 7 As shown, the fluid valve seat module 1 may have a first transmission channel 11, a second transmission channel 12, a third transmission channel 13, a plurality of fourth transmission channels 14, a plurality of transmission hole groups 15 and a plurality of gas isolation elements 16, each transmission hole group 15 includes a first connecting hole 151, a second connecting hole 152, a third connecting hole 153, a fourth connecting hole 154 and a fifth connecting hole 155, each first connecting hole 151 is communicated with the first transmission channel 11, each second connecting hole 152, each fourth connecting hole 154 is communicated with the second transmission channel 12, each third connecting hole 153 is communicated with the third transmission channel 13, each fifth connecting hole 155 is communicated with one of the fourth transmission channels 14, and a plurality of gas isolation elements 16 are arranged in the second transmission channel 12, and each gas isolation element 16 is detachably arranged between each two adjacent transmission hole groups 15.

[0044] In one feasible or preferred embodiment, the third transmission channel 13 is connected to the first external gas supply terminal Gs1, and each fourth transmission channel 14 is connected to the second external gas supply terminal Gs2; wherein the first external gas supply terminal Gs1 is a positive pressure gas supply terminal, and the second external gas supply terminal Gs2 is a negative pressure gas supply terminal. The specific implementation has been mentioned above, so it will not be repeated here.

[0045] In one feasible or preferred embodiment, the first connection hole 151, the second connection hole 152 and the third connection hole 153 of each transmission hole group 15 are configured to be connected to the first external control valve member (such as the first control valve module 2 mentioned above), and the fourth connection hole 154 and the fifth connection hole 155 of each transmission hole group 15 are configured to be connected to the second external control valve member (such as the second control valve module 3 mentioned above). The specific implementation has been mentioned above, so it will not be repeated here.

[0046] In one feasible or preferred embodiment, when the first external control valve member corresponding to at least one transmission hole group 15 is in an operating state and the corresponding second external control valve member is in a stopped state, the fluid valve seat module 1 is in a positive pressure state. The specific implementation has been mentioned above, so it will not be repeated here.

[0047] In one feasible or preferred embodiment, when the second external control valve member corresponding to at least one transmission hole group 15 is in operation, the fluid valve seat module 1 is in a negative pressure state. The specific implementation has been mentioned above, so it will not be repeated here.

[0048] However, the above example is only one feasible implementation example and is not intended to limit the present invention.

[0049] Advantageous Effects of Embodiments

[0050] One of the beneficial effects of the present invention is that the mixed-pressure fluid control valve device Z provided by the present invention can be realized through "the fluid valve seat module 1 has a first transmission channel 11, a second transmission channel 12, a third transmission channel 13, a plurality of fourth transmission channels 14, a plurality of transmission hole groups 15 and a plurality of gas isolation elements 16, each transmission hole group 15 includes a first connection hole 151, a second connection hole 152, a third connection hole 153, a fourth connection hole 154 and a fifth connection hole 155, each first connection hole 151 is communicated with the first transmission channel 11, each second connection hole 152, each fourth connection hole 154 is communicated with the second transmission channel 12, each third connection hole 153 is communicated with the third transmission channel 13, and each fifth connection hole 155 is communicated with the third transmission channel 13. 55 is communicated with one of the fourth transmission channels 14, a plurality of gas isolation elements 16 are arranged in the second transmission channel 12, and each gas isolation element 16 is detachably arranged between every two adjacent transmission hole groups 15", "a plurality of first control valve modules 2 are connected to the fluid valve seat module 1, and each first control valve module 2 is connected to the first connecting hole 151, the second connecting hole 152 and the third connecting hole 153 of one of the transmission hole groups 15" and "a plurality of second control valve modules 3 are connected to the fluid valve seat module 1, and each second control valve module 3 is connected to the fourth connecting hole 154 and the fifth connecting hole 155 of one of the transmission hole groups 15" technical solutions are used to shorten the reaction time between the solenoid valve components and improve the reaction speed between the solenoid valve components.

[0051] Another beneficial effect of the present invention is that the fluid valve seat module 1 provided by the present invention can shorten the reaction time between the solenoid valve components and improve the reaction speed between the solenoid valve components through the technical scheme of "having a first transmission channel 11, a second transmission channel 12, a third transmission channel 13, multiple fourth transmission channels 14, multiple transmission hole groups 15 and multiple gas isolation elements 16, each transmission hole group 15 includes a first connection hole 151, a second connection hole 152, a third connection hole 153, a fourth connection hole 154 and a fifth connection hole 155, each first connection hole 151 is communicated with the first transmission channel 11, each second connection hole 152, each fourth connection hole 154 is communicated with the second transmission channel 12, each third connection hole 153 is communicated with the third transmission channel 13, each fifth connection hole 155 is communicated with one of the fourth transmission channels 14, multiple gas isolation elements 16 are arranged in the second transmission channel 12, and each gas isolation element 16 is detachably arranged between each two adjacent transmission hole groups 15".

[0052] Furthermore, the mixed-pressure fluid control valve device Z of the present invention adopts the above-mentioned technical scheme and utilizes the structural design of the fluid valve seat module 1, that is, the predetermined distance h between the second connecting hole 152 and the fourth connecting hole 154 of each transmission hole group 15 is between 1 cm and 1.5 cm, so that the connecting channel between the relative first control valve module 2 and the second control valve module 3 is only about 1 cm to 1.5 cm, and the response time of each group of solenoid valve components of the present invention (that is, each first control valve module 2 and the corresponding second control valve module 3) can be shortened by more than 50% compared with the solenoid valve components of traditional solenoid valve equipment, thereby improving the response speed.

[0053] The contents disclosed above are only preferred feasible embodiments of the present invention, and are not intended to limit the protection scope of the claims of the present invention. Therefore, all equivalent technical changes made using the contents of the present invention description and drawings are included in the protection scope of the claims of the present invention.

Claims

1. A mixed pressure fluid control valve device, characterized in that: include: A fluid valve seat module, the fluid valve seat module having a first transmission channel, a second transmission channel, a third transmission channel, a plurality of fourth transmission channels, a plurality of transmission hole groups and a plurality of stop elements, each of the transmission hole groups comprising a first connecting hole, a second connecting hole, a third connecting hole, a fourth connecting hole and a fifth connecting hole, each of the first connecting holes being in communication with the first transmission channel, each of the second connecting holes, each of the fourth connecting holes being in communication with the second transmission channel, each of the third connecting holes being in communication with the third transmission channel, each of the fifth connecting holes being in communication with one of the fourth transmission channels, the plurality of stop elements being arranged in the second transmission channel, and each of the stop elements being detachably arranged between every two adjacent transmission hole groups; a plurality of first control valve modules, wherein the plurality of first control valve modules are connected to the fluid valve seat module, and each of the first control valve modules is connected to the first connecting hole, the second connecting hole, and the third connecting hole of one of the transmission hole groups; and A plurality of second control valve modules are connected to the fluid valve seat module, and each of the second control valve modules is connected to the fourth connecting hole and the fifth connecting hole of one of the transmission hole groups.

2. The mixed pressure fluid control valve device according to claim 1, characterized in that: The third transmission channel is connected to the first external gas supply end, and each of the fourth transmission channels is connected to a second external gas supply end; wherein the first external gas supply end is a positive pressure gas supply end, and the second external gas supply end is a negative pressure gas supply end.

3. The mixed pressure fluid control valve device according to claim 2, characterized in that: When the first control valve module corresponding to at least one of the transmission hole groups is in an operating state and the corresponding second control valve module is in a stopped state, the fluid valve seat module is in a positive pressure state.

4. The mixed pressure fluid control valve device according to claim 2, characterized in that: When the second control valve module corresponding to at least one of the transmission hole groups is in an operating state, the fluid valve seat module is in a negative pressure state.

5. The mixed-pressure fluid control valve device according to claim 1, characterized in that: The plurality of first control valve modules and the plurality of second control valve modules are three-port two-position solenoid valve components.

6. A fluid valve seat module, characterized in that: It has a first transmission channel, a second transmission channel, a third transmission channel, multiple fourth transmission channels, multiple transmission hole groups and multiple stop elements, each of the transmission hole groups includes a first connecting hole, a second connecting hole, a third connecting hole, a fourth connecting hole and a fifth connecting hole, each of the first connecting holes is communicated with the first transmission channel, each of the second connecting holes, each of the fourth connecting holes is communicated with the second transmission channel, each of the third connecting holes is communicated with the third transmission channel, and each of the fifth connecting holes is communicated with one of the fourth transmission channels, and the multiple stop elements are arranged in the second transmission channel, and each of the stop elements is detachably arranged between every two adjacent transmission hole groups.

7. The fluid valve seat module according to claim 6, characterized in that: The third transmission channel is connected to the first external gas supply terminal, and each of the fourth transmission channels is connected to the second external gas supply terminal; wherein the first external gas supply terminal is a positive pressure gas supply terminal, and the second external gas supply terminal is a negative pressure gas supply terminal.

8. The fluid valve seat module according to claim 6, characterized in that: The first connection hole, the second connection hole and the third connection hole of each transmission hole group are configured to be connected to a first external control valve component, and the fourth connection hole and the fifth connection hole of each transmission hole group are configured to be connected to a second external control valve component.

9. The fluid valve seat module according to claim 8, characterized in that: When the first external control valve component corresponding to at least one of the transmission hole groups is in an operating state and the corresponding second external control valve component is in a stopped state, the fluid valve seat module is in a positive pressure state.

10. The fluid valve seat module according to claim 8, characterized in that: When the second external control valve component corresponding to at least one of the transmission hole groups is in an operating state, the fluid valve seat module is in a negative pressure state.

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