Quartz furnace tube sealing performance detection device

Abstract

The invention relates to a quartz furnace tube leakproofness detection device applied to the field of leakproofness detection, in use, a to-be-detected furnace tube is fixed at the top ends of two supporting frames, then an outer cover moves towards the furnace tube until the side surface of a blocking plate is attached to the open end of the furnace tube, and a heater is started to heat air in the furnace tube; after heating is completed, the heater is turned off, the heat dissipation fan is started to cool the furnace tube, the air in the furnace tube shrinks at the moment, the interior of the furnace tube is in a negative pressure state, reading of the pressure gauge is observed after standing is conducted for ten minutes, and if the reading changes, the furnace tube is turned off. According to the arrangement, the heater is used for replacing a traditional vacuum pump, so that the interior of the quartz furnace tube is in a negative pressure state, the sealing state of the quartz furnace tube is detected, and the equipment cost and the maintenance cost are greatly reduced.

Description

Technical Field

[0001] The invention relates to a quartz furnace tube sealing detection device, in particular to a quartz furnace tube sealing detection device applied in the sealing detection field. Background Art

[0002] The application publication number is CN213274731U, which is a device for detecting the sealing of a quartz tube. During the detection, the air inside the quartz tube is extracted by a vacuum machine to make the inside of the quartz tube a negative pressure state, and then the adsorption of the sealing gasket at the opening of the vacuum tube is observed to judge the sealing state of the quartz tube; the application publication number is CN210981691U, which is a sealing detection device suitable for semiconductor quartz tubes. The air inside the quartz tube is also extracted by a vacuum machine to detect the sealing effect of the quartz tube.

[0003] It can be seen that the current sealing detection device is too dependent on the vacuum machine, but the manufacturing cost of the vacuum machine is relatively high, and core components such as the vacuum pump need to be replaced and repaired regularly, and the energy consumption is high, so further improvement is needed. Summary of the invention

[0004] In order to solve the above problems, the present invention provides a quartz furnace tube sealing detection device, comprising a furnace tube and an airtight detection device, the airtight detection device comprising a base, the top of the base is fixedly connected to two symmetrically arranged support frames, the furnace tube is installed between the tops of the two support frames, one end of the base is slidably connected to a movable frame, the top of the movable frame is fixedly connected to an outer cover, one end of the outer cover is penetrated and fixedly connected to an air leakage pipe, one end of the air leakage pipe is fixedly connected to a one-way air valve, the other end of the air leakage pipe is fixedly connected to a blocking plate, the side wall of the blocking plate is fixedly connected to a sealing ring, a ventilation pipe is fixedly connected between the outer cover and the blocking plate, the other end of the ventilation pipe is fixedly connected to a pressure gauge, a connecting frame is fixedly connected between the two support frames, and the top of the connecting frame is fixedly connected to a heater and a heat dissipation fan;

[0005] The method of using the airtight detection equipment includes the following steps:

[0006] S1. Fix the furnace tube to be tested on the top of two support frames, and then move the outer cover toward the furnace tube until the side of the blocking plate is in contact with the open end of the furnace tube;

[0007] S2, start the heater to heat the air inside the furnace tube, at which time the air inside the furnace tube expands due to the heat, and the expanded air is discharged to the outside through the vent pipe and the one-way air valve;

[0008] S3, after heating is completed, the heater is turned off, and the cooling fan is started to cool the furnace tube. At this time, the air inside the furnace tube contracts, making the inside of the furnace tube a negative pressure state;

[0009] S4. After standing for ten minutes, observe the reading of the pressure gauge. If the reading changes, it means that the air tightness is unqualified. If the reading does not change, it means that the air tightness is good.

[0010] As a further improvement of the present application, a pipe sleeve is fixedly connected to one end of the outer cover, a long air bag is fixedly connected to the inner wall of the pipe sleeve, the pipe sleeve is made of heat-insulating material, and a hot-pressed tube is fixedly connected to the inner wall of one side of the outer cover; when it is necessary to increase the sealing detection load at the open end of the furnace tube, the hot-pressed tube is started to heat the air inside the outer cover. At this time, the inside of the outer cover is in a high-pressure state, which increases the pressure difference between the inside and outside of the furnace tube, and can further increase the sealing detection range of the furnace tube.

[0011] As a further improvement of the present application, an inflation module is fixedly connected to the side wall of the movable frame, and an air pipe is fixedly connected between one end of the inflation module and the long air bag; the inflation module can inflate the interior of the long air bag through the air pipe, so that the tube sleeve can better fit the outside of the furnace pipe when the long air bag contracts, and the sealing effect between the furnace pipe and the tube sleeve can be increased when the long air bag is inflated.

[0012] As a further improvement of the present application, a temperature differential igniter is fixedly connected between the blocking plate and the outer cover, and the temperature differential igniter includes an igniter and a temperature differential tube. One end of the temperature differential tube is fixedly and slidably connected to a telescopic rod, and the inner wall of the temperature differential tube is sealingly and slidably connected to a piston, one end of the piston is fixedly connected to one end of the telescopic rod, and the bottom end of the temperature differential tube is fixedly connected to a temperature transfer plate.

[0013] As another improvement of the present application, a trigger head is fixedly connected to one end of the igniter, and a flame spray head is fixedly connected to the other end of the igniter.

[0014] As another improvement supplement to the present application, one end of the telescopic rod is rotatably connected to a knob, one end of the knob is fixedly connected to a support rod, one end of the support rod is rotatably connected to a one-way pressure rod, a torsion spring is fixedly connected between the support rod and the one-way pressure rod, and one end of the knob is fixedly connected to a limiting rod; through the above arrangement, the sealing detection range can be further improved.

[0015] To summarize, when in use, the furnace tube to be tested is fixed on the top of the two support frames, and then the outer cover is moved toward the direction of the furnace tube until the side of the blocking plate is in contact with the open end of the furnace tube, and the heater is started to heat the air inside the furnace tube. At this time, the air inside the furnace tube expands due to the heat, and the expanded air is discharged outward through the vent pipe and the one-way air valve. After heating, the heater is turned off, and the heat dissipation fan is started to cool the furnace tube. At this time, the air inside the furnace tube contracts, so that the inside of the furnace tube is in a negative pressure state. After standing for ten minutes, observe the reading of the pressure gauge. If the reading changes, it means that the airtightness is unqualified. If the reading does not change, it means that the airtightness is good. The above setting uses a heater method instead of a traditional vacuum pump to make the inside of the quartz furnace tube in a negative pressure state to detect the sealing state of the quartz furnace tube, which greatly reduces equipment costs and maintenance costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a three-dimensional structural diagram of the outer cover in the first embodiment of the present application;

[0017] Figure 2 This is a three-dimensional structural diagram of the furnace pipe in the first embodiment of the present application;

[0018] Figure 3 It is a three-dimensional cross-sectional view of the connection between the outer cover and the furnace tube in the first and second embodiments of the present application;

[0019] Figure 4 It is a three-dimensional cross-sectional view of the furnace tube in the first and second embodiments of the present application;

[0020] Figure 5 This is a three-dimensional cross-sectional view of the temperature difference tube in the second embodiment of the present application;

[0021] Figure 6 This is a three-dimensional structural diagram of the knob in the second embodiment of the present application;

[0022] Figure 7 This is a state diagram of the telescopic rod moving to the left in the second embodiment of the present application.

[0023] Description of the numbers in the figure:

[0024] 1. Furnace pipe; 2. Base; 3. Support frame; 301. Connecting frame; 4. Movable frame; 5. Outer cover; 501. Pipe sleeve; 6. Vent pipe; 7. Blocking plate; 701. Sealing ring; 8. One-way air valve; 9. Ventilation pipe; 901. Pressure gauge; 10. Heater; 11. Inflatable module; 12. Long air bag; 13. Air pipe; 14. Hot pressing pipe; 15. Ignitor; 16. Trigger head; 17. Flame head; 18. Temperature difference tube; 19. Temperature transfer plate; 20. Piston; 21. Telescopic rod; 2101. Knob; 2102. Limit rod; 22. Support rod; 23. One-way pressure rod; 24. Cooling fan. DETAILED DESCRIPTION

[0025] Two implementation modes of the present application are described in detail below with reference to the accompanying drawings.

[0026] The first implementation method:

[0027] Figure 1-4 A quartz furnace tube sealing detection device is shown, comprising a furnace tube 1 and an airtight detection device, the airtight detection device comprising a base 2, the top of the base 2 is fixedly connected to two symmetrically arranged support frames 3, the furnace tube 1 is installed between the tops of the two support frames 3, one end of the base 2 is slidably connected to a movable frame 4, the top of the movable frame 4 is fixedly connected to an outer cover 5, one end of the outer cover 5 is penetrated and fixedly connected to an air release pipe 6, one end of the air release pipe 6 is fixedly connected to a one-way air valve 8, the other end of the air release pipe 6 is fixedly connected to a blocking plate 7, the side wall of the blocking plate 7 is fixedly connected to a sealing ring 701, a ventilation pipe 9 is fixedly connected between the outer cover 5 and the blocking plate 7, the other end of the ventilation pipe 9 is fixedly connected to a pressure gauge 901, a connecting frame 301 is fixedly connected between the two support frames 3, and the top of the connecting frame 301 is fixedly connected to a heater 10 and a heat dissipation fan 24;

[0028] The method of using the airtight detection equipment includes the following steps:

[0029] S1, fix the furnace tube 1 to be tested on the top of the two support frames 3, and then move the outer cover 5 towards the furnace tube 1 until the side of the blocking plate 7 is in contact with the open end of the furnace tube 1;

[0030] S2, start the heater 10 to heat the air inside the furnace tube 1, at this time the air inside the furnace tube 1 is heated and expanded, and the expanded air is discharged to the outside through the vent pipe 6 and the one-way air valve 8;

[0031] S3, after heating is completed, the heater 10 is turned off, and the cooling fan 24 is started to cool the furnace tube 1. At this time, the air inside the furnace tube 1 contracts, so that the inside of the furnace tube 1 is in a negative pressure state;

[0032] S4. After standing for ten minutes, observe the reading of the pressure gauge 901. If the reading changes, it means that the air tightness is unqualified. If the reading does not change, it means that the air tightness is good.

[0033] The second implementation method:

[0034] Figure 3-7A quartz furnace tube sealing detection device is shown. Different from the first embodiment, a sleeve 501 is fixedly connected to one end of the outer cover 5, and a long air bag 12 is fixedly connected to the inner wall of the sleeve 501. The sleeve 501 is made of heat-insulating material, and a hot-pressed tube 14 is fixedly connected to the inner wall of one side of the outer cover 5; when it is necessary to increase the sealing detection load of the open end of the furnace tube 1, the hot-pressed tube 14 is started to heat the air inside the outer cover 5. At this time, the inside of the outer cover 5 is in a high-pressure state, which increases the pressure difference between the inside and outside of the furnace tube 1, and can further increase the sealing detection range of the furnace tube 1. An inflation module 11 is fixedly connected to the side wall of the movable frame 4, and an air pipe 13 is fixedly connected between one end of the inflation module 11 and the long air bag 12; the inflation module 11 can inflate the inside of the long air bag 12 through the air pipe 13, and when the long air bag 12 contracts, the sleeve 501 can be better sheathed on the outside of the furnace tube 1, and when the long air bag 12 is inflated, the sealing effect between the furnace tube 1 and the sleeve 501 can be increased.

[0035] A temperature difference igniter is fixedly connected between the blocking plate 7 and the outer cover 5, and the temperature difference igniter includes an igniter 15 and a temperature difference tube 18, one end of the temperature difference tube 18 is fixedly and slidably connected with a telescopic rod 21, the inner wall of the temperature difference tube 18 is sealed and slidably connected with a piston 20, one end of the piston 20 is fixedly connected to one end of the telescopic rod 21, and the bottom end of the temperature difference tube 18 is fixedly connected with a temperature transfer plate 19, one end of the igniter 15 is fixedly connected with a trigger head 16, and the other end of the igniter 15 is fixedly connected with a flame head 17, one end of the telescopic rod 21 is rotatably connected with a knob 2101, one end of the knob 2101 is fixedly connected with a support rod 22, one end of the support rod 22 is rotatably connected with a one-way pressure rod 23, a torsion spring is fixedly connected between the support rod 22 and the one-way pressure rod 23, and one end of the knob 2101 is fixedly connected with a limit rod 2102; when the torsion spring is working When the one-way pressure rod 23 is used, it can rotate counterclockwise, and under the action of the limit rod 2102, the one-way pressure rod 23 can rotate counterclockwise to a vertical state. When the temperature inside the furnace tube 1 increases, the gas inside the temperature difference tube 18 expands, driving the telescopic rod 21 to move to the left. When the temperature inside the furnace tube 1 decreases, the gas inside the temperature difference tube 18 contracts to move the telescopic rod 21 to the right. At this time, the one-way pressure rod 23 presses the trigger head 16 to ignite the flame head 17. At this time, the flame head 17 burns and consumes the oxygen inside the furnace tube 1, further reducing the pressure inside the furnace tube 1, increasing the pressure difference between the inside and outside of the furnace tube 1, and can further increase the sealing detection range. When the oxygen inside the furnace tube 1 is consumed, rotating the knob 2101 so that the one-way pressure rod 23 no longer presses the trigger head 16, can prevent the gas inside the igniter 15 from spraying into the inside of the furnace tube 1.

[0036] The principle of the flame head 17 igniting after the trigger head 16 is pressed is the same as that of the existing push-type lighter. The interior of the igniter 15 is filled with combustible gas. When the trigger head 16 is pressed down, the flame head 17 releases gas and the trigger head 16 releases high voltage electricity to ignite the gas.

[0037] In view of current practical needs, the above-mentioned implementation mode adopted in this application is not limited to the scope of protection. Various changes made within the knowledge scope of technical personnel in this field without departing from the concept of this application still fall within the scope of protection of the present invention.

Claims

1. A quartz furnace tube sealing detection device, comprising a furnace tube (1) and an airtightness detection device, characterized in that: The airtightness detection device comprises a base (2), the top of the base (2) is fixedly connected to two symmetrically arranged support frames (3), the furnace tube (1) is installed between the tops of the two support frames (3), one end of the base (2) is slidably connected to a movable frame (4), the top of the movable frame (4) is fixedly connected to an outer cover (5), one end of the outer cover (5) is penetrated and fixedly connected to an air release pipe (6), one end of the air release pipe (6) is fixedly connected to a one-way air valve (8), the other end of the air release pipe (6) is fixedly connected to a blocking plate (7), the side wall of the blocking plate (7) is fixedly connected to a sealing ring (701), a ventilation pipe (9) is fixedly connected between the outer cover (5) and the blocking plate (7), the other end of the ventilation pipe (9) is fixedly connected to a pressure gauge (901), a connecting frame (301) is fixedly connected between the two support frames (3), and the top of the connecting frame (301) is fixedly connected to a heater (10) and a heat dissipation fan (24); The method for using the airtight detection device comprises the following steps: S1. Fix the furnace tube (1) to be tested on the top of two support frames (3), and then move the outer cover (5) toward the furnace tube (1) until the side of the blocking plate (7) is in contact with the open end of the furnace tube (1); S2, starting the heater (10) to heat the air inside the furnace tube (1), whereby the air inside the furnace tube (1) expands due to the heat, and the expanded air is discharged to the outside through the vent pipe (6) and the one-way air valve (8); S3, after heating is completed, the heater (10) is turned off, and the heat dissipation fan (24) is started to cool the furnace tube (1), at which time the air inside the furnace tube (1) contracts, so that the inside of the furnace tube (1) is in a negative pressure state; S4. After standing for ten minutes, observe the reading of the pressure gauge (901). If the reading changes, it means that the air tightness is unqualified. If the reading does not change, it means that the air tightness is good.

2. A quartz furnace tube sealing detection device according to claim 1, characterized in that: One end of the outer cover (5) is fixedly connected to a pipe sleeve (501), the inner wall of the pipe sleeve (501) is fixedly connected to a long air bag (12), the pipe sleeve (501) is made of a heat-insulating material, and the inner wall of one side of the outer cover (5) is fixedly connected to a hot-pressed tube (14).

3. A quartz furnace tube sealing detection device according to claim 2, characterized in that: An inflation module (11) is fixedly connected to the side wall of the movable frame (4), and an air pipe (13) is fixedly connected between one end of the inflation module (11) and the long air bag (12).

4. A quartz furnace tube sealing detection device according to claim 1, characterized in that: A temperature difference igniter is fixedly connected between the blocking plate (7) and the outer cover (5), and the temperature difference igniter comprises an igniter (15) and a temperature difference tube (18), one end of the temperature difference tube (18) is fixedly slidably connected to a telescopic rod (21), the inner wall of the temperature difference tube (18) is sealingly slidably connected to a piston (20), one end of the piston (20) is fixedly connected to one end of the telescopic rod (21), and the bottom end of the temperature difference tube (18) is fixedly connected to a temperature transfer plate (19).

5. A quartz furnace tube sealing detection device according to claim 4, characterized in that: One end of the igniter (15) is fixedly connected to a trigger head (16), and the other end of the igniter (15) is fixedly connected to a flame spray head (17).

6. A quartz furnace tube sealing detection device according to claim 5, characterized in that: One end of the telescopic rod (21) is rotatably connected to a knob (2101), one end of the knob (2101) is fixedly connected to a support rod (22), one end of the support rod (22) is rotatably connected to a one-way pressure rod (23), a torsion spring is fixedly connected between the support rod (22) and the one-way pressure rod (23), and one end of the knob (2101) is fixedly connected to a limit rod (2102).

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