Coating system

Abstract

The invention relates to a film coating system which comprises a vacuum chamber and a rotating tool arranged in the vacuum chamber, and the rotating tool comprises a rotary part, a first driving module, a second driving module and a plurality of film coating rotary tables which are rotatably installed; the film coating rotary tables are rotatably connected to the rotary support respectively, are matched with the rotary components respectively and are in transmission connection with the rotary components; the rotary bracket is rotatably connected to the rack; the first driving module is in transmission connection with the rotating bracket and is used for driving each coating turntable to synchronously revolve around the rotating center of the rotating component and synchronously driving each coating turntable to rotate; the second driving module is in transmission connection with the rotary component and is used for driving the coating rotary tables to rotate; the coating system not only has a better sealing effect, but also has multiple working modes, can realize autorotation of the coating turntable at a specific position, remarkably improves the coating efficiency of elements, not only can realize batch coating, but also can realize coating of different coating layers for different coating elements.

Description

[0001] The present invention is "The application date is May 20, 2022; the application number is 2022105569827; the name of the invention is "A coating system" Divisional application. Technical Field

[0002] The invention relates to the technical field of film coating, and in particular to a film coating system. Background Art

[0003] Magnetron sputtering is a widely used physical vapor deposition coating technology. Compared with the commonly used thermal evaporation coating, the coating rate of magnetron sputtering is stable, and the thickness of the film that can be coated in a single time is greater than that of thermal evaporation coating; compared with the ion beam sputtering coating technology, the structure of the magnetron sputtering cathode is relatively simple and the maintenance cost is low, so the coating cost is lower than that of the ion beam sputtering coating technology. Due to the technical characteristics of magnetron sputtering, it is widely used in the preparation of various metal films, semiconductor films, dielectric films, magnetron films, optical films, superconducting films, sensor films and various functional films with special needs.

[0004] The magnetron sputtering coating method can be used to coat the surface of a spherical component (or workpiece). In order to obtain high uniformity of film thickness on the surface of a spherical component, a rotating fixture is usually required to obtain a centrally symmetrical film thickness distribution, which makes the rotating fixture widely used in coating equipment (or coating system, coating machine). At present, two rotation methods can realize the rotation of spherical samples and complete magnetron sputtering coating. In the first sample rotation method, the spherical component is located in the magnetron sputtering coating area and rotates at high speed around its symmetry center. When this rotation method is used to coat the surface of a spherical sample, only one spherical sample can be plated at a time; in the second rotation method, the spherical component is installed on a planetary rotating fixture, and the component not only rotates at high speed around the symmetry center, but also revolves around a center. This method can be used to coat multiple samples, and the maximum number of coatings is consistent with the number of planetary rotations. However, in this coating process, since the coated lenses will revolve around the rotating wheel under the drive of the rotating tooling, and there is usually a large gap between two adjacent coated lenses, many target materials will be sputtered into the gap, causing material pollution and waste, low material utilization rate and high cost. At the same time, it takes more time to coat a film of the same thickness, which greatly reduces the coating efficiency. In addition, multiple coated lenses can be installed on the existing planetary rotating tooling at the same time. During the coating process, only one target material can be used in conjunction with the rotating tooling for coating, and the remaining target materials cannot be coated. As a result, during the rotation of the rotating tooling, all coated lenses installed on the rotating tooling can only be coated with the same film, and different films cannot be coated for different coated lenses at the same time, resulting in the problem of low coating efficiency in the existing coating equipment. Summary of the invention

[0005] The first aspect of the present invention aims to solve the problems of low material utilization, high cost and low coating efficiency in the existing magnetron sputtering coating system during the coating process on the surface of spherical elements, and provides a coating system that can significantly improve material utilization and coating efficiency. It can not only perform batch coating, but also coat different films for different coated lenses, and can effectively improve the sealing effect of the vacuum chamber.

[0006] A coating system comprises a vacuum chamber and a rotating tooling arranged in the vacuum chamber, wherein the rotating tooling comprises a frame, a rotating bracket, a rotating component rotatably mounted on the frame, a first driving module, a second driving module, a rotatably mounted inner shaft, a rotatably mounted outer shaft, and a plurality of coating turntables for supporting jigs and / or components, wherein each of the coating turntables is rotatably connected to the rotating bracket and distributed along the circumferential direction of the rotation center of the rotating component, each of the coating turntables is respectively adapted to the rotating component and is respectively connected to the rotating component in a transmission manner; the rotating bracket is rotatably connected to the frame, and the rotation center of the rotating bracket coincides with the rotation center of the rotating component; the first driving module is connected to the rotating bracket in a transmission manner, and is used to drive each of the coating turntables to synchronously revolve around the rotation center of the rotating component, and synchronously drive each of the coating turntables to rotate; the second driving module is connected to the rotating component in a transmission manner, and is used to drive each of the coating turntables to rotate;

[0007] The outer shaft is configured with a center hole passing through both ends, the outer shaft is sleeved on the outer side of the inner shaft through the center hole, and the rotation center of the inner shaft coincides with the rotation center of the outer shaft; the rotating bracket is connected to the inner shaft, and the inner shaft is connected to the first driving module by transmission, the rotating component is connected to the outer shaft, and the outer shaft is connected to the second driving module by transmission; or, the rotating bracket is connected to the outer shaft, and the outer shaft is connected to the first driving module by transmission, the rotating component is connected to the inner shaft, and the inner shaft is connected to the second driving module by transmission;

[0008] The first drive module includes a first transmission mechanism and a first motor, the first motor is transmission-connected to the first transmission mechanism, and the first transmission mechanism is transmission-connected to the inner shaft or the outer shaft; the second drive module includes a second transmission mechanism and a second motor, the second motor is transmission-connected to the second transmission mechanism, and the second transmission mechanism is transmission-connected to the outer shaft or the inner shaft;

[0009] The first driving module further includes a first magnetic fluid sealing structure, the vacuum chamber is configured with a first installation channel, the first installation channel is connected to the interior of the vacuum chamber, the first magnetic fluid sealing structure is fixed to the vacuum chamber and closes the first installation channel; one end of the first magnetic fluid sealing structure extends out of the vacuum chamber and is transmission-connected to the first motor; the other end extends into the vacuum chamber and is transmission-connected to the first transmission mechanism;

[0010] The second driving module also includes a second magnetic fluid sealing structure, the vacuum chamber is constructed with a second installation channel, the second installation channel is connected to the interior of the vacuum chamber, the second magnetic fluid sealing structure is fixed to the vacuum chamber and closes the second installation channel; one end of the second magnetic fluid sealing structure extends outside the vacuum chamber and is connected to the second motor; the other end extends into the vacuum chamber and is connected to the second transmission mechanism. In the coating system, a coating turntable is provided to solve the problem of supporting the jig and / or components during the coating process. By constructing multiple coating turntables, the coating system can coat multiple components at the same time, which is beneficial to improving efficiency. Each coating turntable is installed on a rotating bracket, which is rotatably connected to the frame, and the first driving module is connected to the rotating bracket in a transmission manner. During the coating process, the first driving module can drive the rotating bracket to rotate to achieve the purpose of driving each coating turntable to synchronously revolve and rotate around the rotation center of the rotating component, so that the components on each coating turntable are cyclically rotated to a position suitable for the sputtering cathode, so that the coating system can not only coat the components on multiple coating turntables at the same time, which is beneficial to improving efficiency and realizing batch coating, but also is beneficial to improving the uniformity of coating. By cooperating with the inner shaft and the outer shaft, it is only necessary to make the rotation center of the inner shaft coincide with the rotation center of the outer shaft to ensure that the rotation center of the rotating bracket coincides with the rotation center of the rotating component, thereby solving the problem that the rotation center of the rotating bracket coincides with the rotation center of the rotating component. The problem is not only easy to achieve, but also conducive to simplifying the structure, making the structure more compact and easy to assemble; by configuring the first magnetic fluid sealing structure and the second magnetic fluid sealing structure, the use of this sealing structure is not only convenient for transmission and precise control, but also can achieve better sealing effect, and is more conducive to maintaining the vacuum degree of the vacuum chamber; by setting a rotating component and rotatably installing the rotating component, each coating turntable is distributed along the circumferential direction of the rotation center of the rotating component, and at the same time, each coating turntable is respectively connected to the rotating component by transmission, and the second driving module is connected to the rotating component by transmission, so that during the coating process, the second driving module can drive the rotating component to rotate to drive each coating turntable to rotate, thereby driving the jig and / or components on each coating turntable to rotate at high speed. Through the cooperation of the first driving module and the second driving module, two working modes can be realized, wherein the first working mode: during the coating process, only the first driving module is started, so that each coating turntable can be in the state of revolution and rotation at the same time, and multiple components can be coated at the same time;The second working mode: during the coating process, the coating turntable can be rotated to a position suitable for the sputtering cathode by the first driving module, and then the first driving module is turned off and the second driving module is started, so that the coating turntable can rotate at a high speed at the predetermined position and cooperate with the sputtering cathode for coating. With such a working mode, not only can the components on each coating turntable be coated continuously, but also the coating efficiency of the components can be significantly improved. Moreover, the position of the coating turntable is adapted to the sputtering cathode, and the sputtered target material can directly act on the components on the coating turntable to avoid falling into the gap between the coating turntables, thereby effectively avoiding material contamination and waste, and significantly improving the utilization rate of the materials. In addition, since each coating turntable is separately matched with the sputtering cathode, in the same coating process, the coating system can coat different film layers for each component on each coating turntable, which can significantly improve the coating efficiency of differential coating, thereby effectively solving the problems existing in the prior art. ;

[0011] Preferably, the first magnetic fluid sealing structure includes a magnetic fluid seal and a magnetic fluid flange, the magnetic fluid flange is connected to the vacuum chamber through a fastener and closes the first installation channel, and a sealing component is provided between the magnetic fluid flange and the side wall of the vacuum chamber; the magnetic fluid seal is rotatably connected to the magnetic fluid flange, and a sealing component is provided between the magnetic fluid seal and the magnetic fluid flange; one end of the magnetic fluid seal extends into the vacuum chamber through the magnetic fluid flange and is transmission-connected to the first transmission mechanism, the other end of the magnetic fluid seal is located outside the vacuum chamber, the first motor is fixed to the vacuum chamber, and the output shaft of the first motor is transmission-connected to the magnetic fluid seal. It is convenient for transmission and can achieve a better sealing effect, which is conducive to maintaining the vacuum degree of the vacuum chamber.

[0012] Preferably, the first transmission mechanism comprises a driving gear and a driven gear, the driving gear is connected to the upper end of the magnetic fluid seal through a tightening sleeve, and the driving gear is connected to the frame or the vacuum chamber through a bearing.

[0013] Preferably, the second magnetic fluid sealing structure includes a magnetic fluid seal and a magnetic fluid flange, the magnetic fluid flange is connected to the vacuum chamber through a fastener and closes the second installation channel, and a sealing component is provided between the magnetic fluid flange and the side wall of the vacuum chamber; the magnetic fluid seal is rotatably connected to the magnetic fluid flange, and a sealing component is provided between the magnetic fluid seal and the magnetic fluid flange; one end of the magnetic fluid seal extends into the vacuum chamber through the magnetic fluid flange and is transmission-connected to the second transmission mechanism, the other end of the magnetic fluid seal is located outside the vacuum chamber, the second motor is fixed to the vacuum chamber, and the output shaft of the second motor is transmission-connected to the magnetic fluid seal. It is convenient for transmission and can achieve a better sealing effect, which is conducive to maintaining the vacuum degree of the vacuum chamber.

[0014] Preferably, the second transmission mechanism comprises a driving gear and a driven gear, the driving gear is connected to the upper end of the magnetic fluid seal through a tightening sleeve, and the driving gear is connected to the frame or the vacuum chamber through a bearing.

[0015] Preferably, the sealing component is a sealing ring, so as to achieve a better sealing effect.

[0016] The second aspect of the present invention is to solve the problem that each coating turntable can be connected to the rotating component in a transmission manner. Furthermore, the rotating component and the coating turntable are respectively configured with a plurality of mutually adapted teeth, and each coating turntable is respectively configured to transmit to the rotating component through the meshing of teeth. That is, in this solution, by configuring a plurality of teeth on the rotating component, configuring a plurality of adapted teeth on each coating turntable, and arranging each coating turntable in the circumferential direction of the rotation center of the rotating component, the coating turntable and the rotating component can form a rotation transmission mechanism through the meshing of teeth, so that the rotation of the rotating component can be used to drive each coating turntable to revolve synchronously.

[0017] Preferably, the rotating component is an internal gear or an external gear, and the coating turntable is constructed with an external gear adapted to the rotating component.

[0018] To achieve rotatable installation, preferably, the inner shaft is connected to the outer shaft via a bearing group, and the outer shaft is connected to the frame via a bearing group, and the bearing group includes at least two bearings.

[0019] The third aspect of the present invention is to solve the problem of installation and positioning of bearings. Furthermore, the inner shaft is a stepped shaft, the center hole of the outer shaft is configured to fit the stepped hole of the inner shaft, and the inner shaft is connected to the stepped hole of the outer shaft through a bearing assembly. By configuring the inner shaft as a stepped shaft and configuring the center hole as a stepped hole, it is convenient to use the steps at the steps to realize the installation and positioning of the bearing, thereby facilitating the installation of the inner shaft on the outer shaft using the bearing assembly.

[0020] In order to solve the problem of installation and positioning of the bearing, further, the outer shaft is constructed as a stepped shaft, the frame is constructed with a stepped hole adapted to the outer shaft, and the outer shaft is connected to the stepped hole of the frame through a bearing group, so that the steps at the step can be used to realize the installation and positioning of the bearing, thereby facilitating the installation of the outer shaft on the frame using the bearing group.

[0021] To solve the problem of stably supporting the inner shaft and the outer shaft, the bearing group further includes at least one thrust bearing. The thrust bearing is used to bear axial forces, such as the gravity of the inner shaft and the gravity of the outer shaft, so that the thrust bearing can be used to more stably support the inner shaft and the outer shaft.

[0022] Preferably, the frame includes a support tube and a flange connected to the support tube, and the flange is configured with a plurality of mounting holes to facilitate the installation and fixation of the rotating tooling in the coating system.

[0023] The fourth aspect of the present invention aims to solve the problem of reduced gear meshing accuracy and reduced gear service life caused by the coating process during sputtering coating. Further, the rotating bracket includes a horizontally arranged rotating turntable, which is connected to the inner shaft or the outer shaft and is located above or below the rotating component;

[0024] The coating turntable is also configured with a mounting portion for setting a jig and / or component, and each coating turntable is rotatably mounted on the rotating turntable, and the mounting portion configured on the coating turntable and the teeth configured on the coating turntable are respectively located on different sides of the rotating turntable. That is, when the coating turntable is mounted on the rotating turntable, the teeth configured on the coating turntable are located below the rotating turntable, and the mounting portion configured on the coating turntable is located above the rotating turntable, or, the teeth configured on the coating turntable are located above the rotating turntable, and the mounting portion configured on the coating turntable is located below the rotating turntable, and the sputtering cathode is installed at the position of the adapter mounting portion and is located on the upper side or the lower side of the rotating turntable, so that during the coating process, the rotating turntable can play a role in isolating and protecting the gears, so that the target material is not easily sputtered onto the teeth on the other side of the rotating turntable, which can effectively avoid the problem of reduced gear meshing accuracy caused by the coating process, which is conducive to extending the service life of the gears.

[0025] In order to solve the problem of rotatable installation of the coating turntable, preferably, the coating turntable is connected to the rotating turntable via bearings, so as to realize the separation of motion by using bearings.

[0026] Preferably, the rotating turntable is constructed with a plurality of assembly holes, bearing seats are respectively arranged in the assembly holes, and each coating turntable is connected to the bearing seats via a bearing.

[0027] Preferably, the mounting portion is a constraining hole constructed on the coating turntable to facilitate the installation of the fixture.

[0028] Preferably, the coating turntable and the teeth are an integrated structure.

[0029] In order to solve the problem of coating, a sputtering cathode is further included, which is arranged in the vacuum chamber and located at a position adapted to the coating turntable, and the effective coating area of ​​the sputtering cathode covers a part of the revolution track of the coating turntable, so as to cooperate with the coating turntable, thereby facilitating coating.

[0030] To solve the problem of precise control, further, a controller is included, and the controller is electrically connected to the first driving module and the second driving module respectively, so that the first driving module and the second driving module can be precisely controlled by the controller.

[0031] Compared with the prior art, the coating system provided by the present invention is not only compact in structure and reasonably designed, but also has better sealing effect and multiple working modes, and can realize the self-rotation of the coating turntable at a specific position, thereby significantly improving the material utilization rate and the coating efficiency of the components. It can not only realize batch coating, but also realize the coating of different film layers for different coating components. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0033] Figure 1 This is one of the schematic diagrams of the three-dimensional structure of a rotating tool in a coating system provided in Example 1 of the present invention.

[0034] Figure 2 The second schematic diagram of the three-dimensional structure of a rotating tool in a coating system provided in Example 1 of the present invention.

[0035] Figure 3 for Figure 1 main view.

[0036] Figure 4 A schematic structural diagram of a rotating component in a coating system provided in Example 1 of the present invention.

[0037] Figure 5 A schematic structural diagram of a rotating bracket in a coating system provided in Example 1 of the present invention.

[0038] Figure 6 for Figure 3 A partial cross-sectional view of .

[0039] Figure 7 A partial cross-sectional view of a coating turntable in a coating system provided in Example 1 of the present invention.

[0040] Figure 8 This is one of the three-dimensional structural schematic diagrams of a coating system provided in Example 2 of the present invention.

[0041] Fig. 9 This is a second schematic diagram of the three-dimensional structure of a coating system provided in Example 2 of the present invention.

[0042] Fig.10 for Fig. 9 A partial cross-sectional view of .

[0043] Markings in the figure: frame 100, support cylinder 101, stepped hole 102, flange 103, mounting hole 104; rotating component 200, tooth 201, outer shaft 202, center hole 203, second motor 204, driving gear 206, driven gear 207; rotating bracket 300, rotating turntable 301, assembly hole 302, inner shaft 303, first motor 304; coating turntable 400, constraint hole 401, nut 402, thrust washer 40 3; bearing 500, thrust roller bearing 501, rolling bearing 502, bearing seat 503; sputtering cathode 600; fixture 701, element 702; vacuum chamber 800, first installation channel 801, second installation channel 802; first magnetic fluid sealing structure 901, second magnetic fluid sealing structure 902, magnetic fluid seal 903, magnetic fluid flange 904, expansion sleeve 905, sealing component 906, coupling 907, connecting frame 908. DETAILED DESCRIPTION

[0044] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0045] Example 1

[0046] In the present embodiment, a coating system is provided, including a vacuum chamber 800, a sputtering cathode 600, a sputtering power supply connected to the sputtering cathode 600, a vacuum pump connected to the vacuum chamber 800, and a rotating tooling, etc., wherein, in the present embodiment, the vacuum chamber 800 is mainly used to form a vacuum environment required for vacuum coating, and the vacuum pump can be connected to the vacuum chamber 800 through a pipeline so as to adjust and maintain the vacuum degree in the vacuum chamber 800.

[0047] In this embodiment, the rotating tooling includes a frame, a rotating component 200 rotatably mounted on the frame, a first driving module, a second driving module, and a plurality of coating turntables 400 for supporting a jig 701 and / or a component 702 (i.e., a component 702 to be coated), wherein the frame 100 can be fixedly mounted on a vacuum chamber 800, such as Figure 8 and Fig. 9 As shown, it mainly plays the role of bearing and supporting.

[0048] The coating turntable 400 is mainly used to support and constrain the fixture 701 and / or the component 702, such as Figure 1 and Figure 7 As shown, each coating turntable 400 is rotatably connected to the rotating bracket 300 and is distributed along the circumferential direction of the rotation center of the rotating component 200, and each coating turntable 400 is respectively adapted to the rotating component 200 and is respectively connected to the rotating component 200 in transmission, so that the relative rotation of the rotating component 200 and the rotating bracket 300 can drive the coating turntable 400 to rotate; in this embodiment, by constructing a plurality of coating turntables 400, the coating system can coat a plurality of components 702 at the same time, which is beneficial to improving efficiency.

[0049] During implementation, the rotating bracket 300 can be rotatably connected to the frame 100, and the rotation center of the rotating bracket 300 coincides with the rotation center of the rotating component 200 to achieve concentric rotation; as an example, the rotating bracket 300 can be connected to the frame 100 via a bearing.

[0050] In this embodiment, the first driving module is connected to the rotating bracket 300 by transmission. Figure 3 and Figure 6 As shown, during the coating process, the first driving module can drive each coating turntable 400 to revolve synchronously around the rotation center of the rotating component 200, and synchronously drive each coating turntable 400 to rotate. That is, when the first driving module drives the rotating bracket 300 to rotate, it can not only drive each coating turntable 400 to revolve, but also drive each coating turntable 400 to rotate, so as to cyclically rotate the components 702 on each coating turntable 400 to a position suitable for the sputtering cathode 600, so that the coating system can not only coat the components 702 on multiple coating turntables 400 at the same time, which is conducive to improving efficiency and realizing batch coating, but also helps to improve the uniformity of coating, thereby improving the coating quality.

[0051] In this embodiment, the second driving module is connected to the rotating component 200 by transmission. Figure 3 and Figure 6 As shown, during the coating process, the second driving module can drive each coating turntable 400 to rotate. That is, during the coating process, the second driving module can drive the rotating component 200 to rotate to drive each coating turntable 400 to rotate, thereby driving the jig 701 and / or component 702 on each coating turntable 400 to rotate at high speed.

[0052] In this embodiment, after the frame 100 is fixedly installed in the vacuum chamber 800, at least the rotating bracket 300 and the coating turntable 400 need to be located in the vacuum chamber 800 so as to perform coating in a vacuum environment.

[0053] In the present embodiment, the sputtering cathode is arranged in the vacuum chamber and is located at a position adapted to the coating turntable 400, so that the effective coating area of ​​the sputtering cathode can cover a part of the coating turntable revolution track, that is, at least cover a part of the motion track of the coating turntable 400 revolution, so as to correspond to the coating turntable 400 and cooperate with the coating turntable for coating. In implementation, the number of sputtering cathodes 600 can be determined according to actual conditions, and each sputtering cathode 600 can be respectively arranged at different positions in the vacuum chamber, and different targets can be arranged at each sputtering cathode 600, or the same target can be arranged, and each sputtering cathode 600 can work individually or simultaneously, so as to coat different workpieces at the same time. In addition, in the present embodiment, the sputtering power supply is electrically connected to the sputtering cathode 600, and is mainly used to supply power to the sputtering cathode 600.

[0054] When the coating system is working, at least two main working modes can be realized through the cooperation of the first driving module and the second driving module. Among them, the first working mode: during the coating process, only the first driving module can be started, so that each coating turntable 400 can be in the state of revolution and rotation at the same time, so that the components 702 on each coating turntable 400 can be coated at the same time, thereby significantly improving the coating efficiency.

[0055] The second working mode: During the coating process, a coating turntable 400 can be rotated to a position suitable for the sputtering cathode 600 (or a predetermined position) through the first driving module, and then the first driving module is turned off and the second driving module is started, so that the coating turntable 400 can rotate at a high speed at the predetermined position and cooperate with the sputtering cathode 600 at this position to perform efficient coating. By adopting such a working mode, not only can the components 702 on each coating turntable 400 be coated continuously, which is beneficial to improving efficiency, but also the position of the coating turntable 400 is adapted to the sputtering cathode 600, and the sputtered target material can directly act on the component 702 on the coating turntable 400 to avoid falling into the gap between the coating turntables 400, thereby effectively avoiding material contamination and waste, and significantly improving material utilization; in addition, since each coating turntable 400 can be separately matched with the sputtering cathode 600, the coating system can achieve different film layers for different coating components in the same coating process, which can significantly improve the coating efficiency of differential coating.

[0056] In order to make the coating turntable 400 drive connected with the rotating component 200, there are many implementations. For example, the coating turntable 400 and the rotating component 200 can be connected by a synchronous belt drive so as to rotate synchronously. For another example, the coating turntable 400 and the rotating component 200 can be connected by a chain drive so as to rotate synchronously. In a more preferred implementation, the rotating component 200 and the coating turntable 400 are respectively configured with a plurality of mutually adapted teeth 201, such as Figure 2-Figure 6 As shown, each coating turntable 400 can be driven with the rotating part 200 by meshing with teeth 201 and teeth 201, so as to form a planetary rotating structure. In implementation, the teeth 201 can be straight teeth or helical teeth. That is, in this solution, by constructing a plurality of teeth 201 on the rotating part 200, a plurality of matching teeth 201 are constructed on each coating turntable 400, and each coating turntable 400 is arranged in the circumferential direction of the rotation center of the rotating part 200, the coating turntable 400 and the rotating part 200 can form a gear meshing transmission through the meshing of teeth 201 and teeth 201, so that the rotation of the rotating part 200 can be used to drive each coating turntable 400 to rotate synchronously.

[0057] During implementation, the teeth 201 should form a circle along the circumferential direction of the rotating component 200 and the coating turntable 400, respectively. Figure 2-Figure 6 As shown, the rotating component 200 and the coating turntable 400 can rotate at any angle. To simplify the structure, the rotating component 200 can use an internal gear or an external gear, and the internal gear or the external gear can be installed on the frame 100 through a bearing, and the coating turntable 400 is configured with an external gear adapted to the rotating component 200; for example, in this embodiment, the rotating component 200 uses an external gear and can mesh with the coating turntable 400, and the external gear provided on the coating turntable 400 can be installed on the coating turntable 400, or can be integrally formed with the coating turntable 400, as shown in FIG. Figure 2 and Figure 3 As shown, the teeth 201 can be directly constructed on the coating turntable 400 and form a circle. In this embodiment, the second drive module has multiple embodiments. For example, the second drive module can include a gear adapted to the external gear and meshed with the rotating component 200 to drive the rotating component 200 to rotate; for another example, the second drive module can include a first pulley and a transmission belt, the upper end or lower end of the rotating component 200 is configured with a second pulley adapted to the first pulley, and the transmission belt is tensioned on the first pulley and the second pulley, so as to drive the entire rotating component 200 to rotate through the transmission belt; for another example, the second drive module can include a first sprocket and a chain, the upper end or lower end of the rotating component 200 is configured with a second sprocket adapted to the first sprocket, and the chain is tensioned between the first sprocket and the second sprocket, so as to drive the entire rotating component 200 to rotate through the chain.

[0058] In order to make the rotation center of the rotating bracket 300 coincide with the rotation center of the rotating component 200, in a preferred embodiment, the rotating fixture further includes an inner shaft 303 rotatably mounted and an outer shaft 202 rotatably mounted on the frame 100, such as Figure 1-Figure 6 As shown, the outer shaft 202 is constructed with a center hole 203 passing through both ends, so that the outer shaft 202 is sleeved on the outside of the inner shaft 303 through the center hole 203, and the rotation center of the inner shaft 303 coincides with the rotation center of the outer shaft 202; accordingly, as an example, the rotating bracket 300 can be connected to the inner shaft 303, and the inner shaft 303 is transmission-connected to the first driving module. At this time, the rotating component 200 is connected to the outer shaft 202, and the outer shaft 202 is transmission-connected to the second driving module, as shown in FIG. Figure 2 and Figure 3 As shown, at this time, the rotating component 200 is located below the rotating bracket 300, and the inner shaft 303 and the outer shaft 202 can rotate relatively without affecting each other.

[0059] As another example, the rotating bracket 300 can be connected to the outer shaft 202, and the outer shaft 202 is connected to the first drive module. At this time, the rotating component 200 is connected to the inner shaft 303, and the inner shaft 303 is connected to the second drive module. At this time, the rotating component 200 is located above the rotating bracket 300, and the inner shaft 303 and the outer shaft 202 can rotate relative to each other without affecting each other; specifically, in this embodiment, by constructing the inner shaft 303 and the outer shaft 202, it is only necessary to make the rotation center of the inner shaft 303 coincide with the rotation center of the outer shaft 202 to ensure that the rotation center of the rotating bracket 300 coincides with the rotation center of the rotating component 200. This is not only easy to implement, but also helps to simplify the structure, making the structure more compact and easy to assemble.

[0060] In order to reduce weight during implementation, the inner shaft 303 may be a hollow structure, such as Figure 5 and Figure 6 As shown, the inner shaft 303 may be a cylindrical structure.

[0061] More preferably, to achieve rotatable installation, the inner shaft 303 may be connected to the outer shaft 202 and / or the frame 100 via a bearing assembly, such as Figure 6 As shown, the bearing group includes at least one bearing; to facilitate the installation and positioning of the bearings between the inner shaft 303 and the outer shaft 202, in a further solution, the inner shaft 303 can be a stepped shaft, such as Figure 6 As shown, accordingly, the center hole 203 can be configured to fit the stepped hole 102 of the stepped shaft, as shown in FIG. Figure 6 As shown, the inner shaft 303 can be connected to the stepped hole 102 through a bearing assembly, and the steps at the step can be used to achieve the installation and positioning of the bearing, such as Figure 6 As shown, it is convenient to use the bearing group to install the inner shaft 303 on the outer shaft 202; and in order to stably support the inner shaft 303, in a more optimized solution, the bearing group includes at least one thrust bearing, so that the thrust bearing can bear the axial force, such as the gravity of the inner shaft 303, so that the thrust bearing can be used to more stably support the inner shaft 303; as an example, the bearing group between the inner shaft 303 and the outer shaft 202 includes a thrust roller bearing 501 and a rolling bearing 502, as shown in FIG. Figure 6 As shown, the thrust roller bearing 501 and the rolling bearing 502 are respectively installed at the steps, which is beneficial to the axial load bearing and the inner shaft 303 to maintain a stable vertical state.

[0062] Similarly, the outer shaft 202 can also be connected to the frame 100 through a bearing set, and the bearing set includes at least one bearing, such as Figure 6 To facilitate the installation and positioning of the bearing between the outer shaft 202 and the frame 100, in a further embodiment, the outer shaft 202 may be constructed as a stepped shaft, such as Figure 6 As shown, accordingly, the frame 100 is configured with a stepped hole 102 adapted to the stepped shaft, as shown in FIG. Figure 6 As shown, the outer shaft 202 can be connected to the stepped hole 102 through a bearing group, so that the step at the step can be used to install and position the bearing, thereby facilitating the use of the bearing group to install the outer shaft 202 on the frame 100. Similarly, in order to stably support the outer shaft 202, in a more optimized solution, the bearing group includes at least one thrust bearing, so that the thrust bearing can bear axial forces, such as the gravity of the inner shaft 303 and the outer shaft 202, so that the thrust bearing can be used to more stably play the role of support and motion separation; as an example, the bearing group between the outer shaft 202 and the frame 100 includes a thrust roller bearing 501 and a rolling bearing 502, such as Figure 6 As shown, the thrust roller bearing 501 and the rolling bearing 502 are respectively installed at the steps, which is beneficial to the axial load bearing and the inner shaft 303 and the outer shaft 202 to maintain a stable vertical state.

[0063] The frame 100 has various embodiments. Preferably, the frame 100 includes a support tube 101 and a flange 103 connected to the support tube 101. Figure 1-Figure 3 As shown, the flange 103 is configured with a plurality of mounting holes 104 so as to realize the detachable installation and fixation of the rotating fixture by means of fasteners such as bolt pairs.

[0064] In the present embodiment, the first driving module includes a first transmission mechanism and a first motor 304. The first motor 304 is transmission-connected to the first transmission mechanism, and the first transmission mechanism is transmission-connected to the inner shaft 303 or the outer shaft 202, so as to drive the rotating bracket 300 to rotate through the inner shaft 303 or the outer shaft 202. The first motor 304 can preferably adopt a stepper motor or a servo motor. The first transmission mechanism has multiple implementation modes. Preferably, the first transmission mechanism can adopt a combination of one or more of a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism or a worm gear transmission mechanism. Gear transmission mechanisms, belt transmission mechanisms, chain transmission mechanisms and worm gear transmission mechanisms are all commonly used transmission mechanisms with low cost, simple principle, easy assembly, and very convenient for later disassembly and maintenance. For example, in the present embodiment, the first transmission mechanism adopts a gear transmission mechanism, such as Figure 1-Figure 3 As shown, the gear transmission mechanism includes a transmission shaft, a driving gear 206 arranged on the transmission shaft, and a driven gear 207 arranged on the inner shaft 303. The output shaft of the first motor 304 is connected to the transmission shaft, and the driving gear 206 is meshed with the driven gear 207. Therefore, the first motor 304 can be used to drive the inner shaft 303 to rotate, thereby achieving the purpose of driving the rotating bracket 300 to rotate.

[0065] Similarly, the second drive module includes a second transmission mechanism and a second motor 204, the second motor 204 is transmission-connected to the second transmission mechanism, and the second transmission mechanism is transmission-connected to the outer shaft 202 or the inner shaft 303, so as to drive the rotating component 200 to rotate through the outer shaft 202 or the inner shaft 303. It can be understood that when the first drive mechanism is transmission-connected to the inner shaft 303, the second drive mechanism is transmission-connected to the outer shaft 202; when the first drive mechanism is transmission-connected to the outer shaft 202, the second drive mechanism is transmission-connected to the inner shaft 303.

[0066] Similarly, the second motor 204 may preferably be a stepper motor or a servo motor, and the second transmission mechanism may be a combination of one or more of a gear transmission mechanism, a belt transmission mechanism, a chain transmission mechanism, or a worm gear transmission mechanism. For example, in this embodiment, the second transmission mechanism is a gear transmission mechanism, such as Figure 1-Figure 3 As shown, the gear transmission mechanism includes a transmission shaft, a driving gear 206 arranged on the transmission shaft, and a driven gear 207 arranged on the inner shaft 303. The output shaft of the second motor 204 is connected to the transmission shaft, and the driving gear 206 is meshed with the driven gear 207. Therefore, the second motor 204 can be used to drive the outer shaft 202 to rotate, thereby achieving the purpose of driving the rotating component 200 to rotate.

[0067] In order to solve the problem of reduced gear meshing accuracy and reduced gear service life caused by the coating process during sputtering coating, in a further solution, the rotating bracket 300 includes a horizontally arranged rotating turntable 301, such as Figure 1-Figure 6 As shown, the rotating turntable 301 may preferably adopt a plate-shaped structure, and the rotating turntable 301 may be connected to the inner shaft 303 and located above the rotating component 200, as shown in FIG. Figure 1-Figure 3 As shown, the rotating turntable 301 can also be connected to the outer shaft 202 and located below the rotating component 200.

[0068] In this embodiment, the coating turntable 400 is also configured with a mounting portion for arranging a jig 701 and / or a component 702, so that the jig 701 and / or the component 702 to be coated can be constrained by the mounting portion; each coating turntable 400 is rotatably mounted on the rotating turntable 301, and the mounting portion configured on the coating turntable 400 and the teeth configured on the coating turntable 400 are respectively located on different sides of the rotating turntable 301, such as Figure 1-Figure 3 ,and Figure 6 As shown, that is, when the coating turntable 400 is installed on the rotating turntable 301, the teeth of the coating turntable 400 are located below the rotating turntable 301, and the mounting portion of the coating turntable 400 is located above the rotating turntable 301, or, when the teeth of the coating turntable 400 are located above the rotating turntable 301, the mounting portion of the coating turntable 400 is located below the rotating turntable 301, and the sputtering cathode 600 is usually installed at the position of the adapter mounting portion and is located on the upper side or the lower side of the rotating turntable 301, so that during the coating process, the rotating turntable 301 can play a role in isolating and protecting the gears, so that the target material is not easily sputtered onto the teeth on the other side of the rotating turntable 301, which can effectively avoid the problem of reduced gear meshing accuracy caused by the coating process, and is more conducive to extending the service life of the gears.

[0069] In implementation, the coating turntable 400 can be connected to the rotating turntable 301 through bearings, so that the coating turntable 400 can rotate more smoothly; and in order to facilitate the installation of the bearings, the rotating turntable 301 is constructed with a plurality of assembly holes 302, such as Figure 5 and Figure 7 As shown, each transfer hole can be evenly distributed along the circumferential direction of the rotation center of the rotating turntable 301, and a bearing seat 503 is respectively arranged in the assembly hole 302. Each coating turntable 400 can be connected to the bearing seat 503 through a bearing, and can be locked by a nut 402 and a thrust washer 403. Figure 5 and Figure 7 shown.

[0070] The structure of the coating turntable 400 can be determined according to actual needs. For example, Figure 5-Figure 7As shown, in this embodiment, the coating turntable 400 adopts a rotating body structure, and the mounting portion can be a restraining hole 401 constructed at the upper end or the lower end of the coating turntable 400, such as Figure 5-Figure 7 As shown, in order to use the constraint hole 401 to install the fixture 701 or the component 702, during implementation, the constraint hole 401 can pass through the upper and lower ends of the coating turntable 400, or it can not pass through the coating turntable 400, and only form a groove on the coating turntable 400; Of course, there are other implementations of the mounting portion, for example, the mounting portion can also be a snap-on structure, a locking mechanism, an external thread, an internal thread, etc. constructed on the coating turntable 400, which only needs to be able to constrain or fix the fixture 701 and / or the workpiece 702. The teeth on the coating turntable 400 can be an integrated structure with the coating turntable 400, such as Figure 2 , Figure 3 and Figure 7 shown.

[0071] In order to facilitate sealing and maintain the vacuum degree of the vacuum chamber, in a more perfect solution, the first motor 304 and the second motor 204 in the rotating tool can be arranged outside the vacuum chamber 800, such as Figure 8 and Fig. 9 As shown, other components in the rotating tooling can be arranged in the vacuum chamber 800, for example, Figure 8 and Fig. 9 As shown, the bottom of the vacuum chamber 800 is configured with an installation channel, the first motor 304 and the second motor 204 can be installed outside the vacuum chamber 800 respectively, and the transmission shaft can extend into the vacuum chamber 800 through the installation channel, and a flange and a sealing structure are provided at the installation channel to close the installation channel. The flange can preferably adopt a magnetic fluid flange 904 to achieve a better vacuum sealing effect, and the sealing structure includes but is not limited to a sealing ring, a sealing gasket, a dynamic sealing structure, etc., which will not be described one by one here.

[0072] In a more complete solution, the coating system also includes a controller, which can be electrically connected to the sputtering power supply to control the start / shutdown of the sputtering power supply to achieve the purpose of controlling whether to supply power to the sputtering cathode 600; at the same time, the controller can also be electrically connected to the vacuum pump to achieve the purpose of controlling the vacuum degree of the vacuum chamber 800 by controlling the vacuum pump; in addition, the controller is also electrically connected to the first drive module and the second drive module respectively (for example, the controller can be electrically connected to the first motor 304 and the second motor 204 respectively), which is used to control the rotation speed of the rotating bracket 300 and the rotating part 200 respectively, so that the coating system can operate accurately under the control of the controller: for example, in the first working mode: the second drive module can be turned off and the first drive module can be started by the controller, and the first drive module can be used to drive the rotating bracket 300 to rotate relative to the rotating part 200, so that the coating turntable 400 can rotate at high speed while revolving around the rotation center of the rotating part 200, so as to cooperate with the sputtering cathode 600 for coating. This working mode can perform batch coating, thereby significantly improving the coating efficiency.

[0073] In the second working mode: the controller can first start the first drive module, so as to use the first drive module to rotate the required coating turntable 400 from the initial position to the target position adapted to the sputtering cathode 600, and then the controller can turn off the first drive module and start the second drive module, so as to use the second drive module to drive the coating turntable 400 to rotate at high speed at the target position, so as to cooperate with the sputtering cathode 600 at this position for separate coating. This working mode can effectively avoid the contamination and waste of the target material, and can also simultaneously coat different films at different positions, which can significantly improve the utilization rate of materials and the coating efficiency.

[0074] During implementation, the controller may preferably be a PC, PLC, single-chip microcomputer, embedded chip, etc.

[0075] In a more complete solution, the vacuum chamber is also configured with a sputtering gas inlet, etc., which will not be explained one by one here.

[0076] Example 2

[0077] In order to better achieve the sealing effect of the vacuum chamber and maintain the vacuum degree of the vacuum chamber, the main difference between this embodiment 2 and the above-mentioned embodiment 1 is that, in the coating system provided in this embodiment, the first driving module also includes a first magnetic fluid sealing structure 901, and the vacuum chamber 800 is constructed with a first installation channel 801, and the first installation channel 801 is connected to the interior of the vacuum chamber 800. The first magnetic fluid sealing structure 901 is fixed to the vacuum chamber 800 and closes the first installation channel 801, so that the first magnetic fluid sealing structure 901 can be used to seal the vacuum chamber 800, and one end of the first magnetic fluid sealing structure 901 extends to the outside of the vacuum chamber 800 and is connected to the first motor; the other end extends into the vacuum chamber 800 and is connected to the first transmission mechanism, which is convenient for transmission and can achieve better sealing effect, which is beneficial to maintaining the vacuum degree of the vacuum chamber.

[0078] As an example, Figure 1 , Figure 2 and 10 As shown, the first magnetic fluid sealing structure 901 includes a magnetic fluid sealing member 903 and a magnetic fluid flange 904, wherein the magnetic fluid flange 904 can be connected to the vacuum chamber 800 by fasteners such as bolts, and close the first installation channel 801, and a sealing member 906 such as a sealing ring is provided between the magnetic fluid flange 904 and the side wall of the vacuum chamber 800 for sealing. The magnetic fluid sealing member 903 is rotatably connected to the magnetic fluid flange 904, and a sealing member 906 such as a sealing ring is provided between the magnetic fluid sealing member 903 and the magnetic fluid flange 904 to achieve a better sealing effect. One end (e.g., the upper end) of the magnetic fluid seal 903 extends into the vacuum chamber 800 via the magnetic fluid flange 904 and is in transmission connection with the first transmission mechanism. For example, the first transmission mechanism includes a driving gear 206 and a driven gear 207. The driving gear 206 is connected to the upper end of the magnetic fluid seal 903 through a tightening sleeve 905, and the driving gear 206 can be connected to the frame 100, the vacuum chamber 800 or the bearing seat through a bearing (the bearing seat can be fixed to the frame 100, the vacuum chamber 800 or the magnetic fluid flange 904, such as Fig.10 As shown in FIG. 8 , the rotation of the magnetic fluid seal 903 can drive the driving gear 206 to rotate. The other end (eg, the lower end) of the magnetic fluid seal 903 is located outside the vacuum chamber 800. Figure 1 , Figure 2 and 10 As shown, the first motor 304 is fixed to the vacuum chamber 800, for example, Fig.10 As shown, the first motor 304 can be fixed to the magnetic fluid flange 904 through the connecting frame 908, and the output shaft of the first motor 304 is drivingly connected to the magnetic fluid seal 903, for example, as Fig.10As shown, the output shaft of the first motor 304 can be connected to the lower end of the magnetic fluid seal 903 through a coupling 907, so that the magnetic fluid seal 903 can be driven to rotate by the first motor 304.

[0079] Similarly, the second driving module further includes a second magnetic fluid sealing structure 902, such as Figure 1 , Figure 2 and 10 As shown, the vacuum chamber 800 is constructed with a second installation channel 802, and the second installation channel 802 is connected to the interior of the vacuum chamber 800. The second magnetic fluid sealing structure 902 is fixed to the vacuum chamber 800 and closes the second installation channel 802, so that the second magnetic fluid sealing structure 902 can be used to seal the vacuum chamber 800, and one end of the second magnetic fluid sealing structure 902 extends outside the vacuum chamber 800 and is connected to the second motor; the other end extends into the vacuum chamber 800 and is connected to the second transmission mechanism, which is convenient for transmission and can achieve a better sealing effect, which is beneficial to maintaining the vacuum degree of the vacuum chamber. As an example, Fig.10 As shown, the second magnetic fluid sealing structure 902 includes a magnetic fluid seal 903 and a magnetic fluid flange 904, wherein the magnetic fluid flange 904 can be connected to the vacuum chamber 800 by fasteners such as bolts, and close the second installation channel 802, and a sealing component 906 such as a sealing ring is provided between the magnetic fluid flange 904 and the side wall of the vacuum chamber 800 for sealing. The magnetic fluid seal 903 is rotatably connected to the magnetic fluid flange 904, and a sealing component 906 such as a sealing ring is provided between the magnetic fluid seal 903 and the magnetic fluid flange 904 to achieve a better sealing effect. One end (e.g., the upper end) of the magnetic fluid seal 903 extends into the vacuum chamber 800 via the magnetic fluid flange 904 and is in transmission connection with the second transmission mechanism. For example, the second transmission mechanism includes a driving gear 206 and a driven gear 207. The driving gear 206 is connected to the upper end of the magnetic fluid seal 903 through a tightening sleeve 905. The driving gear 206 can be connected to the frame 100, the vacuum chamber 800 or the bearing seat through a bearing (the bearing seat can be fixed to the frame 100, the vacuum chamber 800 or the magnetic fluid flange 904, such as Fig.10 As shown in FIG. 8 , the rotation of the magnetic fluid seal 903 can drive the driving gear 206 to rotate. The other end (eg, the lower end) of the magnetic fluid seal 903 is located outside the vacuum chamber 800. Fig.10 As shown, the second motor is fixed to the vacuum chamber 800, for example, Fig.10 As shown, the second motor can be fixed to the magnetic fluid flange 904 through the connecting frame 908, and the output shaft of the second motor is drivingly connected to the magnetic fluid seal 903, for example, Fig.10As shown, the output shaft of the second motor can be connected to the lower end of the magnetic fluid seal 903 through a coupling 907, so that the magnetic fluid seal 903 can be driven to rotate by the second motor.

[0080] The use of this sealing structure not only facilitates transmission and precise control, but also achieves a better sealing effect and is more conducive to maintaining the vacuum degree of the vacuum chamber.

[0081] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A coating system, comprising a vacuum chamber and a rotating tooling arranged in the vacuum chamber, characterized in that: The rotating tooling comprises a frame, a rotating bracket, a rotating component rotatably mounted on the frame, a first driving module, a second driving module, a rotatably mounted inner shaft, a rotatably mounted outer shaft, and a plurality of coating turntables for supporting jigs and / or components, wherein each of the coating turntables is rotatably connected to the rotating bracket and distributed along the circumferential direction of the rotation center of the rotating component, and each of the coating turntables is respectively adapted to the rotating component and is respectively connected to the rotating component in a transmission manner; the rotating bracket is rotatably connected to the frame, and the rotation center of the rotating bracket coincides with the rotation center of the rotating component; the first driving module is connected to the rotating bracket in a transmission manner, and is used to drive each of the coating turntables to synchronously revolve around the rotation center of the rotating component, and synchronously drive each of the coating turntables to rotate; the second driving module is connected to the rotating component in a transmission manner, and is used to drive each of the coating turntables to rotate; The outer shaft is configured with a center hole passing through both ends, the outer shaft is sleeved on the outer side of the inner shaft through the center hole, and the rotation center of the inner shaft coincides with the rotation center of the outer shaft; the rotating bracket is connected to the inner shaft, and the inner shaft is connected to the first driving module by transmission, the rotating component is connected to the outer shaft, and the outer shaft is connected to the second driving module by transmission; or, the rotating bracket is connected to the outer shaft, and the outer shaft is connected to the first driving module by transmission, the rotating component is connected to the inner shaft, and the inner shaft is connected to the second driving module by transmission; The first drive module includes a first transmission mechanism and a first motor, the first motor is transmission-connected to the first transmission mechanism, and the first transmission mechanism is transmission-connected to the inner shaft or the outer shaft; the second drive module includes a second transmission mechanism and a second motor, the second motor is transmission-connected to the second transmission mechanism, and the second transmission mechanism is transmission-connected to the outer shaft or the inner shaft; The first driving module also includes a first magnetic fluid sealing structure, the vacuum chamber is constructed with a first installation channel, the first installation channel is connected to the interior of the vacuum chamber, the first magnetic fluid sealing structure is fixed to the vacuum chamber, and closes the first installation channel; one end of the first magnetic fluid sealing structure extends outside the vacuum chamber and is connected to the first motor; the other end extends into the vacuum chamber and is connected to the first transmission mechanism; the second driving module also includes a second magnetic fluid sealing structure, the vacuum chamber is constructed with a second installation channel, the second installation channel is connected to the interior of the vacuum chamber, the second magnetic fluid sealing structure is fixed to the vacuum chamber and closes the second installation channel; one end of the second magnetic fluid sealing structure extends outside the vacuum chamber and is connected to the second motor; the other end extends into the vacuum chamber and is connected to the second transmission mechanism.

2. The coating system according to claim 1, characterized in that: The first magnetic fluid sealing structure includes a magnetic fluid seal and a magnetic fluid flange. The magnetic fluid flange is connected to the vacuum chamber through a fastener and closes the first installation channel, and a sealing component is arranged between the magnetic fluid flange and the side wall of the vacuum chamber; the magnetic fluid seal is rotatably connected to the magnetic fluid flange, and a sealing component is arranged between the magnetic fluid seal and the magnetic fluid flange; one end of the magnetic fluid seal extends into the vacuum chamber through the magnetic fluid flange and is transmission-connected to the first transmission mechanism, and the other end of the magnetic fluid seal is located outside the vacuum chamber, the first motor is fixed to the vacuum chamber, and the output shaft of the first motor is transmission-connected to the magnetic fluid seal.

3. The coating system according to claim 2, characterized in that: The first transmission mechanism comprises a driving gear and a driven gear, wherein the driving gear is connected to the upper end of the magnetic fluid seal through a tightening sleeve, and the driving gear is connected to the frame or the vacuum chamber through a bearing.

4. The coating system according to claim 1, characterized in that: The second magnetic fluid sealing structure includes a magnetic fluid seal and a magnetic fluid flange. The magnetic fluid flange is connected to the vacuum chamber through a fastener and closes the second installation channel, and a sealing component is arranged between the magnetic fluid flange and the side wall of the vacuum chamber; the magnetic fluid seal is rotatably connected to the magnetic fluid flange, and a sealing component is arranged between the magnetic fluid seal and the magnetic fluid flange; one end of the magnetic fluid seal extends into the vacuum chamber through the magnetic fluid flange and is transmission-connected to the second transmission mechanism, and the other end of the magnetic fluid seal is located outside the vacuum chamber, the second motor is fixed to the vacuum chamber, and the output shaft of the second motor is transmission-connected to the magnetic fluid seal.

5. The coating system according to claim 4, characterized in that: The second transmission mechanism comprises a driving gear and a driven gear, wherein the driving gear is connected to the upper end of the magnetic fluid seal through a tightening sleeve, and the driving gear is connected to the frame or the vacuum chamber through a bearing.

6. The coating system according to claim 1, characterized in that: The rotating component and the coating turntable are respectively constructed with a plurality of teeth adapted to each other, and each coating turntable is respectively driven by the rotating component through the meshing of teeth.

7. The coating system according to claim 1, characterized in that: The inner shaft is a stepped shaft, the center hole of the outer shaft is configured to fit the stepped hole of the inner shaft, and the inner shaft is connected to the stepped hole of the outer shaft via a bearing assembly; The outer shaft is configured as a stepped shaft, the frame is configured with a stepped hole adapted to the outer shaft, and the outer shaft is connected to the stepped hole of the frame via a bearing assembly.

8. The coating system according to claim 1, characterized in that: The rotating bracket includes a horizontally arranged rotating turntable, which is connected to the inner shaft or the outer shaft and is located above or below the rotating component; The coating turntable is also configured with a mounting portion for arranging jigs and / or components. Each coating turntable is rotatably mounted on a rotating turntable, and the mounting portion configured on the coating turntable and the teeth configured on the coating turntable are respectively located on different sides of the rotating turntable.

9. The coating system according to claim 8, characterized in that: The mounting portion is a restraining hole constructed on the coating turntable.

10. The coating system according to any one of claims 1 to 9, characterized in that: It also includes a sputtering cathode, which is arranged in the vacuum chamber and located at a position adapted to the coating turntable, and the effective coating area of ​​the sputtering cathode covers a part of the revolution track of the coating turntable; The device also includes a controller which is electrically connected to the first driving module and the second driving module respectively.

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