Micro-fluidic chip

Abstract

The embodiment of the invention discloses a micro-fluidic chip. The micro-fluidic chip comprises a first cover plate, a substrate, a piezoelectric chip and a second cover plate, the substrate is arranged between the first cover plate and the second cover plate; a reagent inlet and a reagent storage cavity are formed in the first cover plate; a reagent entering the piezoelectric chip through the reagent inlet is stored in the reagent storage cavity; a groove is formed in the substrate; the piezoelectric chip is arranged in the groove; the piezoelectric chip comprises a piezoelectric unit; after the piezoelectric chip is connected with an external power supply, the reagent in the reagent storage cavity is sprayed in a liquid drop form by taking the deformation of the piezoelectric unit as power. According to the technical scheme provided by the embodiment of the invention, the piezoelectric chip is used as a liquid drop generation device, packaging is carried out around the piezoelectric chip to form the liquid drop generation micro-fluidic chip, the reagent is added into the reagent inlet, the reagent is stored in the reagent storage cavity after passing through the piezoelectric chip, and the reagent in the reagent storage cavity is jetted in a liquid drop form after the piezoelectric chip is electrified, so that the liquid drop generation micro-fluidic chip is formed. The formed micro-fluidic chip is higher in integration level, and a plurality of liquid drops can be formed at the same time.

Description

Technical Field

[0001] The present invention relates to the field of microfluidic technology, and in particular to a microfluidic chip. Background Art

[0002] Polymerase Chain Reaction (PCR) is a molecular biology technique used to amplify specific deoxyribonucleic acid (DNA) fragments. Digital Polymerase Chain Reaction (DPCR) is an absolute quantification technique for nucleic acid molecules. DPCR divides a sample into tens of thousands of droplets, each of which may contain one or more target DNA molecules, or no target DNA molecules. These droplets are then amplified by PCR, and the absolute quantification of the target DNA is finally achieved by counting the number of droplets containing the target DNA molecules.

[0003] In the prior art, methods for forming DPCR droplets include a pinch-off method, a capillary chip segmentation method, a polydimethylsiloxane (PDMS) chip segmentation method, or a vibrating droplet method. Figure 1 Schematic diagram of the structure of droplet formation by pinch-off method in the related art. Figure 1 As shown, the reaction system is divided into tiny droplets by the microchannel structure and external driving force. Figure 2 FIG. 1 is a schematic diagram of the structure of droplets formed by the capillary chip segmentation method in the related art. Figure 2 As shown, the characteristics of the capillary are mainly used to achieve liquid segmentation to form droplets. Figure 3 Schematic diagram of the structure of droplets formed by the polydimethylsiloxane chip segmentation method in the related art. Figure 3 As shown, it includes a top glass 100 , a guide channel 200 , a chamber array 300 and a bottom glass 400 . Figure 4 FIG. 1 is a schematic diagram of the formation of droplets by the vibration droplet method in the related art. Figure 4 As shown in FIG, the vibration droplet method mainly breaks the tension balance on the liquid surface through the mechanical energy generated by vibration, so that the liquid is transformed from a continuous phase to discrete droplets.

[0004] However, the pinch-off method, PDMS chip segmentation method and vibration droplet method all require large compressed air or mechanical moving devices. The liquid utilization rate of the capillary chip segmentation method is low, and only a small amount of reagent can form droplets. The pinch-off method and vibration droplet method can only form one droplet after another, and the efficiency of droplet formation is low. Moreover, the pinch-off method, capillary chip segmentation method, PDMS chip segmentation method and vibration droplet method are all based on the capillary phenomenon to passively form droplets, and can only form droplets larger than 500 picoliters. Summary of the invention

[0005] The present invention provides a microfluidic chip, which is manufactured based on the piezoelectric principle and uses active thrust to form droplets, thereby eliminating the need for large compressed air or mechanical moving devices, improving integration, and being able to form multiple droplets simultaneously.

[0006] According to one aspect of the present invention, a microfluidic chip is provided, the microfluidic chip comprising: a first cover plate, a substrate, a piezoelectric chip and a second cover plate; the substrate is arranged between the first cover plate and the second cover plate; a reagent inlet and a reagent storage cavity are arranged on the first cover plate; the reagent storage cavity is used to store the reagent entering the piezoelectric chip through the reagent inlet;

[0007] A groove is provided on the substrate; the piezoelectric chip is placed in the groove;

[0008] The piezoelectric chip includes a piezoelectric unit; the piezoelectric chip is used to eject the reagent in the reagent storage chamber in the form of droplets by using the deformation of the piezoelectric unit as power after being connected to an external power source.

[0009] Optionally, a droplet collecting cavity is provided on the first cover plate; the droplet collecting cavity is in contact with one side of the piezoelectric chip;

[0010] The droplet collecting chamber is used to receive the droplets ejected by the piezoelectric chip.

[0011] Optionally, the piezoelectric chip further comprises a piezoelectric chip spray hole; the piezoelectric chip spray hole is arranged on a side of the piezoelectric chip in contact with the droplet collection chamber;

[0012] Along the first direction, the piezoelectric chip nozzles are arranged in an array;

[0013] Along the second direction, the piezoelectric chip spray holes are relatively arranged at two ends of a side where the piezoelectric chip contacts the droplet collecting chamber; wherein the first direction is perpendicular to the second direction.

[0014] Optionally, the piezoelectric unit includes a plurality of piezoelectric vibration cavities; the piezoelectric vibration cavities are located on a side of the piezoelectric chip away from the first cover plate;

[0015] The piezoelectric vibration cavity is used to generate vibration after the piezoelectric chip is energized and deformed, so as to drive the flow of reagents.

[0016] Optionally, the number of the piezoelectric vibration cavities is consistent with the number of the piezoelectric chip nozzles.

[0017] Optionally, the microfluidic chip further includes: a plurality of connection pads; the connection pads are arranged on a side of the piezoelectric vibration cavity close to the second cover plate.

[0018] Optionally, a first row of wire grooves and a second row of wire grooves are further provided on the substrate;

[0019] Along the first direction, the widths of the first row of wire grooves and the second row of wire grooves are both the same as the width of the groove;

[0020] Along the second direction, the first row of wire grooves and the second row of wire grooves are arranged at two ends of the groove, and the lengths of the first row of wire grooves and the second row of wire grooves are the same and both are greater than the length of the groove.

[0021] Optionally, the microfluidic chip further includes: a first wiring arrangement and a second wiring arrangement; the first wiring arrangement extends from the first wiring arrangement groove to a side of the second cover plate away from the substrate; the second wiring arrangement extends from the second wiring arrangement groove to a side of the second cover plate away from the substrate;

[0022] One end of the first and second cables located on a side of the second cover plate away from the substrate is connected to the controller; the other ends of the first and second cables are connected to the connection pads.

[0023] Optionally, the microfluidic chip further includes: a first cable receiving unit and a second cable receiving unit; the first cable receiving unit extends from the first cable groove to a side of the second cover plate away from the substrate; the second cable receiving unit extends from the second cable groove to a side of the second cover plate away from the substrate;

[0024] The first cable receiving unit is used to carry the first cable; the second cable receiving unit is used to carry the second cable.

[0025] Optionally, the first cable receiving unit and the second cable receiving unit are both U-shaped.

[0026] The technical solution of the embodiment of the present invention uses a piezoelectric chip as a droplet generating device, and a microfluidic chip for droplet generation is formed by packaging around the piezoelectric chip. The reagent is added to the reagent inlet, and is stored in the reagent storage cavity after passing through the piezoelectric chip. After the piezoelectric chip is energized, the piezoelectric material in the piezoelectric chip will deform, thereby generating vibrations, pushing the reagent in contact with the piezoelectric chip, causing the reagent to generate a pressure wave, and under the action of the pressure wave, the reagent in the reagent storage cavity is ejected in the form of droplets. The microfluidic chip formed by the technical solution of the embodiment of the present invention uses active thrust to form droplets, which can save large compressed air or mechanical moving devices, has a higher degree of integration, and improves the efficiency of droplet formation, and can form multiple droplets at the same time.

[0027] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0029] Figure 1 It is a schematic diagram of the structure of forming droplets by pinch-off method in the related art;

[0030] Figure 2 It is a schematic diagram of the structure of forming droplets by the capillary chip segmentation method in the related art;

[0031] Figure 3 It is a schematic diagram of the structure of droplets formed by the polydimethylsiloxane chip segmentation method in the related art;

[0032] Figure 4 It is a schematic diagram of forming droplets by a vibration droplet method in the related art;

[0033] Figure 5 is a schematic diagram of the disassembled structure of a microfluidic chip provided according to an embodiment of the present invention;

[0034] Figure 6 is a schematic diagram of the front structure of a microfluidic chip provided according to an embodiment of the present invention;

[0035] Figure 7 is a structural schematic diagram of a first cover plate of a microfluidic chip provided according to an embodiment of the present invention;

[0036] Figure 8 is a schematic diagram of the front structure of a piezoelectric chip in a microfluidic chip provided according to an embodiment of the present invention;

[0037] Fig. 9 is a schematic diagram of the back structure of a piezoelectric chip in a microfluidic chip provided according to an embodiment of the present invention;

[0038] Fig.10 is a schematic diagram of the front structure of a substrate of a microfluidic chip provided according to an embodiment of the present invention;

[0039] Fig.11 is a schematic diagram of the back structure of a substrate of a microfluidic chip provided according to an embodiment of the present invention;

[0040] Fig.12 It is a schematic diagram of the back structure of a microfluidic chip provided according to an embodiment of the present invention. DETAILED DESCRIPTION

[0041] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0042] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0043] Figure 5 It is a schematic diagram of the disassembled structure of a microfluidic chip provided according to an embodiment of the present invention. Figure 6 is a schematic diagram of the front structure of a microfluidic chip provided according to an embodiment of the present invention. Figure 5 and Figure 6 The microfluidic chip includes: a first cover plate 10, a substrate 20, a piezoelectric chip 30 and a second cover plate 40; the substrate 20 is arranged between the first cover plate 10 and the second cover plate 40; the first cover plate 10 is provided with a reagent inlet 101 and a reagent storage cavity 102; the reagent storage cavity 102 is used to store the reagent entering the piezoelectric chip 30 through the reagent inlet 101; the substrate 20 is provided with a groove 201; the piezoelectric chip 30 is placed in the groove 201; the piezoelectric chip 30 includes a piezoelectric unit; the piezoelectric chip 30 is used to spray the reagent in the reagent storage cavity 102 in the form of droplets after connecting to an external power supply, using the deformation of the piezoelectric unit as power.

[0044] In an embodiment of the present invention, the first cover plate 10 can be used as an upper cover plate of the substrate 20 for encapsulating the substrate 20. The second cover plate 40 carries the first cover plate 10, the substrate 20 and the piezoelectric chip 30, and is used to provide mechanical support for the first cover plate 10, the substrate 20 and the piezoelectric chip 30 to maintain the stability of the microfluidic chip. The substrate 20 is located between the first cover plate 10 and the second cover plate 40. The reagent can be a DPCR reagent. The first cover plate 10 is provided with a reagent inlet 101 and a reagent storage cavity 102. The reagent inlet 101 is the starting point of the channel for the reagent to enter the inside of the piezoelectric chip 30. The reagent storage cavity 102 can play a role in temporarily storing the reagent, and provides a transit space for the further processing and operation of the subsequent reagent in the piezoelectric chip 30. The groove 201 provided on the substrate 20 provides a position for the piezoelectric chip 30 to be placed, so that the piezoelectric chip 30 can be mounted on the substrate 20 in a suitable manner, thereby ensuring the stability of the overall structure of the piezoelectric chip 30 and the reasonable connection between the various components.

[0045] In the technical solution of the embodiment of the present invention, the piezoelectric chip 30 is connected to the reagent inlet 101 and the reagent storage chamber 102, and the piezoelectric chip 30 includes a piezoelectric unit, which can be made of a piezoelectric material. For example, a piezoelectric crystal or a piezoelectric ceramic can be used to make the piezoelectric unit. When the piezoelectric material is polarized in an electric field, the displacement of the charge center causes the material to deform. When an electrical signal of a specific frequency and intensity is applied to the piezoelectric chip 30, the piezoelectric material in the piezoelectric chip 30 is deformed, and then vibration is generated, thereby pushing the reagent in contact with the piezoelectric chip 30, causing the reagent to generate a pressure wave. Under the action of the pressure wave, the reagent in the reagent storage chamber 102 is squeezed out, forming droplets and ejected from the nozzle or outlet of the piezoelectric chip 30, thereby achieving precise control and on-demand distribution of the reagent.

[0046] In an embodiment of the present invention, the microfluidic chip further includes a first liquid inlet 501, a second liquid inlet 502, a first liquid outlet 503, and a second liquid outlet 504. The first liquid inlet 501 is disposed on the substrate 20 and is connected to the reagent inlet 101. The second liquid inlet 502 is the inlet for the reagent to enter the piezoelectric chip 30. The first liquid outlet 503 is the outlet for the reagent after passing through the piezoelectric chip 30. The second liquid outlet 504 is connected to the reagent storage chamber 102. After the reagent passes through the reagent inlet 101, it enters the second liquid inlet 502 from the first liquid inlet 501, flows through the inside of the piezoelectric chip 30, and then flows from the first liquid outlet 503 to the second liquid outlet 504, and is then stored in the reagent storage chamber 102. When the piezoelectric chip 30 is energized, the reagent stored in the reagent storage chamber 102 is squeezed out by the piezoelectric effect to form droplets and ejected from the nozzle or outlet of the piezoelectric chip 30.

[0047] The technical solution of the embodiment of the present invention uses a piezoelectric chip as a droplet generating device, and a microfluidic chip for droplet generation is formed by packaging around the piezoelectric chip. The reagent is added to the reagent inlet, and is stored in the reagent storage cavity after passing through the piezoelectric chip. After the piezoelectric chip is energized, the piezoelectric material in the piezoelectric chip will deform, thereby generating vibrations, pushing the reagent in contact with the piezoelectric chip, causing the reagent to generate a pressure wave, and under the action of the pressure wave, the reagent in the reagent storage cavity is ejected in the form of droplets. The microfluidic chip formed by the technical solution of the embodiment of the present invention uses active thrust to form droplets, which can save large compressed air or mechanical moving devices, has a higher degree of integration, and improves the efficiency of droplet formation, and can form multiple droplets at the same time.

[0048] Based on the technical solution of the above invention embodiment, optionally, Figure 7 Schematic diagram of the structure of a first cover plate of a microfluidic chip provided according to an embodiment of the present invention. Figure 5 , Figure 6 and Figure 7 A droplet collecting chamber 103 is provided on the first cover plate 10 ; the droplet collecting chamber 103 contacts one side of the piezoelectric chip 30 ; the droplet collecting chamber 103 is used to receive droplets ejected by the piezoelectric chip 30 .

[0049] In the embodiment of the present invention, illustratively, the DPCR reagent is added to the reagent inlet 101, and the DPCR reagent passes through the inside of the piezoelectric chip 30 and is stored in the reagent storage chamber 102. The DPCR oil is added to the droplet collection chamber 103. After the piezoelectric chip 30 is powered on, the piezoelectric chip 30 sprays the DPCR reagent in the reagent storage chamber 102 into the droplet collection chamber 103 in the form of droplets, so that the DPCR reagent and the DPCR oil contact and cooperate with each other, and play a role together in the digital polymerase chain reaction.

[0050] Based on the technical solution of the above invention embodiment, optionally, Figure 8 Schematic diagram of the front structure of a piezoelectric chip in a microfluidic chip provided according to an embodiment of the present invention. Figure 5 , Figure 6 and Figure 8 The piezoelectric chip 30 also includes a piezoelectric chip nozzle 301; the piezoelectric chip nozzle 301 is arranged on the side of the piezoelectric chip 30 that contacts the droplet collecting chamber 103; along the first direction X, the piezoelectric chip nozzles 301 are arranged in an array; along the second direction Y, the piezoelectric chip nozzles 301 are relatively arranged at both ends of the side of the piezoelectric chip 30 that contacts the droplet collecting chamber 103; wherein the first direction X is perpendicular to the second direction Y.

[0051] In an embodiment of the present invention, illustratively, a DPCR reagent is added to the reagent inlet 101, and the DPCR reagent passes through the inside of the piezoelectric chip 30 and is stored in the reagent storage chamber 102. DPCR oil is added to the droplet collection chamber 103. After the piezoelectric chip 30 is energized, the DPCR reagent in the reagent storage chamber 102 is sprayed into the droplet collection chamber 103 in the form of droplets through the piezoelectric chip nozzle 301. The piezoelectric chip nozzles 301 are arranged in an array, and the number of the piezoelectric chip nozzles 301 can be set according to the demand for forming droplets. The technical solution of the embodiment of the present invention can form multiple droplets at the same time, the maximum speed can reach 20,000 per second, and the volume of the droplets formed can reach less than 10 picoliters. Through the technical solution of the embodiment of the present invention, multiple and small droplets can be formed at the same time.

[0052] Based on the technical solution of the above invention embodiment, optionally, Fig. 9 FIG. 1 is a schematic diagram of the back structure of a piezoelectric chip in a microfluidic chip according to an embodiment of the present invention. Figure 5 and Fig. 9 As shown, the piezoelectric unit includes a plurality of piezoelectric vibration cavities 302 ; the piezoelectric vibration cavities 302 are located on a side of the piezoelectric chip 30 away from the first cover plate 10 ; the piezoelectric vibration cavities 302 are used to generate vibrations after the piezoelectric chip 30 is energized and deformed, so as to drive the reagent to flow.

[0053] In an embodiment of the present invention, the piezoelectric vibration cavity 302 can be a cavity made of silicon or glass, providing a confined space for the reagent. The piezoelectric vibration cavity 302 is in contact with the piezoelectric element. When a voltage is applied across the piezoelectric element, the piezoelectric element undergoes mechanical deformation and generates vibrations. The vibrations can be transmitted to the piezoelectric vibration cavity 302 by coupling. The piezoelectric vibration cavity 302 can drive the reagent to flow by the pressure waves generated, and then spray it in the form of droplets through the piezoelectric chip nozzle 301, thereby achieving precise control of the reagent. In an optional embodiment of the present invention, the microfluidic chip also includes a piezoelectric chip liquid inlet 505 and a piezoelectric chip liquid outlet 506. The piezoelectric chip liquid inlet 505 is connected to the second liquid inlet 502, and the piezoelectric chip liquid outlet 506 is connected to the first liquid outlet 503.

[0054] Based on the technical solution of the above invention embodiment, optionally, refer to Figure 8 and Fig. 9 The number of the piezoelectric vibration cavities 302 is consistent with the number of the piezoelectric chip nozzles 301.

[0055] In the embodiment of the present invention, the piezoelectric vibration cavity 302 and the piezoelectric chip nozzle hole 301 are arranged correspondingly and have the same number, so that a precise number of droplets can be formed, thereby improving the efficiency of droplet generation.

[0056] Based on the technical solution of the above invention embodiment, optionally, Fig.10 It is a schematic diagram of the front structure of a substrate of a microfluidic chip provided according to an embodiment of the present invention. Fig.11 Schematic diagram of the back structure of a substrate of a microfluidic chip provided according to an embodiment of the present invention. Figure 5 , Fig.10 and Fig.11 , a first wire groove 202 and a second wire groove 203 are also provided on the substrate 20; along the first direction X, the widths of the first wire groove 202 and the second wire groove 203 are the same as the width of the groove 201; along the second direction Y, the first wire groove 202 and the second wire groove 203 are arranged at both ends of the groove 201, and the lengths of the first wire groove 202 and the second wire groove 203 are the same and are both greater than the length of the groove 201.

[0057] In the embodiment of the present invention, the substrate 20 is provided with a first wiring groove 202 and a second wiring groove 203, which are convenient for setting the connection line and providing electrical connection for the piezoelectric chip 30. The first wiring groove 202 and the second wiring groove 203 provide physical constraints and protection for the connection line, ensure the regularity and stability of the internal structure of the microfluidic chip, and make the connection line neat, orderly, safe and reliable. The size of the groove 201 is slightly larger than the size of the piezoelectric chip 30, which is convenient for placing the piezoelectric chip 30 in the groove 201. The back of the substrate 20 is in contact with the second cover plate 40.

[0058] Based on the technical solution of the above invention embodiment, optionally, Fig.12 is a schematic diagram of the back structure of a microfluidic chip provided according to an embodiment of the present invention, with reference to Figure 5 , Figure 6 , Fig. 9 and Fig.12 The microfluidic chip further includes: a plurality of connection pads 303; the connection pads 303 are arranged on the side of the piezoelectric vibration cavity 302 close to the second cover plate 40. The first row of wires 204 and the second row of wires 205; the first row of wires 204 extend from the first row of wire grooves 202 to the side of the second cover plate 40 away from the substrate 20; the second row of wires 205 extend from the second row of wire grooves 203 to the side of the second cover plate 40 away from the substrate 20; one end of the first row of wires 204 and the second row of wires 205 located on the side of the second cover plate 40 away from the substrate 20 is connected to the controller; the other ends of the first row of wires 204 and the second row of wires 205 are connected to the connection pads 303.

[0059] In the embodiment of the present invention, the first wiring 204 extends from the first wiring groove 202 to the side of the second cover plate 40 away from the substrate 20; the second wiring 205 extends from the second wiring groove 203 to the side of the second cover plate 40 away from the substrate 20, so that the first wiring 204 and the second wiring 205 can be orderly distributed inside the microfluidic chip, avoiding confusion, entanglement or unnecessary contact and interference with other components during the operation of the microfluidic chip. The connecting pad 303 is a specific metal area on the piezoelectric chip 30 for electrical connection. Through reliable connection methods such as welding, the first wiring 204 and the second wiring 205 can stably transmit electrical signals to the piezoelectric chip 30. Exemplarily, when the controller sends a specific electrical pulse signal, the signal can accurately reach the connecting pad 303 of the piezoelectric chip 30 through the first wiring 204 and the second wiring 205, thereby driving the piezoelectric chip 30 to work in a predetermined manner, such as generating vibrations of precise frequency and intensity to achieve the injection of reagents.

[0060] The controller is used to generate an electrical signal and transmit it to the piezoelectric chip 30 through the first row of cables 204 and the second row of cables 205. The controller can be an integrated circuit board or a microprocessor. The controller can generate a control signal according to a preset program and algorithm and transmit it to the piezoelectric chip 30 through the first row of cables 204 and the second row of cables 205. Exemplarily, the controller can accurately adjust the working parameters of the piezoelectric chip 30 according to the requirements of the detection process, such as controlling the vibration frequency, amplitude, and power-on time of the piezoelectric chip 30, so as to accurately control the injection amount and injection speed of the reagent.

[0061] Based on the technical solution of the above invention embodiment, optionally, refer to Figure 5 and Fig.12 The microfluidic chip further includes: a first cable receiving unit 206 and a second cable receiving unit 207; the first cable receiving unit 206 extends from the first cable groove 202 to a side of the second cover plate 40 away from the substrate 20; the second cable receiving unit 207 extends from the second cable groove 203 to a side of the second cover plate 40 away from the substrate 20; the first cable receiving unit 206 is used to carry the first cable 204; the second cable receiving unit 207 is used to carry the second cable 205.

[0062] In the embodiment of the present invention, the first row of wires 206 and the second row of wires 207 can be a raised platform or a bracket structure, which provides a stable placement basis for the first row of wires 204 and the second row of wires 205, ensures that the direction of the first row of wires 204 and the second row of wires 205 inside the microfluidic chip meets the requirements of signal transmission, and avoids the first row of wires 204 and the second row of wires 205 from shaking randomly and affecting the reliability of circuit connection.

[0063] Based on the technical solution of the above invention embodiment, optionally, refer to Figure 5 The shapes of the first cable receiving unit 206 and the second cable receiving unit 207 are both U-shaped.

[0064] In the embodiment of the present invention, the first wiring receiving unit 206 and the second wiring receiving unit 207 are configured to be U-shaped, which can improve the integration of the microfluidic chip, reduce the volume of the microfluidic chip, and achieve better line connection.

[0065] The technical solution of the embodiment of the present invention is to provide a first cover plate, a substrate and a second cover plate, and set the substrate between the first cover plate and the second cover plate. The reagent inlet, the reagent storage cavity and the droplet collection cavity can be set on the first substrate through an etching process, and a groove and a wiring groove are set on the substrate. The piezoelectric chip is placed in the groove, and the piezoelectric chip is used as a droplet generating device. The reagent is added to the reagent inlet and stored in the reagent storage cavity after passing through the piezoelectric chip. The wiring connects the piezoelectric chip and the controller. The controller transmits control signals to the piezoelectric chip through the wiring, such as controlling the vibration frequency, amplitude and power-on time of the piezoelectric chip. The piezoelectric material in the piezoelectric chip will undergo mechanical deformation, thereby generating vibration. The vibration can be transmitted to the piezoelectric vibration cavity through coupling, so as to push the reagent in contact with the piezoelectric chip to be sprayed in the form of droplets through the nozzle of the piezoelectric chip. Compared with the prior art that requires large compressed air or mechanical moving devices to form droplets, the microfluidic chip formed by the technical solution of the embodiment of the present invention uses a piezoelectric chip to deform and vibrate when energized, and then uses active thrust to form droplets. This can eliminate the need for large compressed air or mechanical moving devices, has a higher degree of integration, and improves the efficiency of droplet formation, and can form multiple small droplets at the same time.

[0066] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the present invention can be executed in parallel, sequentially or in different orders, as long as the desired results of the technical solution of the present invention can be achieved, and this document does not limit this.

[0067] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A microfluidic chip, characterized in that: include: a first cover plate, a substrate, a piezoelectric chip, and a second cover plate; The substrate is arranged between the first cover plate and the second cover plate; The first cover plate is provided with a reagent inlet and a reagent storage cavity; The reagent storage chamber is used to store the reagent that enters the piezoelectric chip through the reagent inlet; The substrate is provided with a groove; the piezoelectric chip is placed in the groove; The piezoelectric chip includes a piezoelectric unit; the piezoelectric chip is used to eject the reagent in the reagent storage chamber in the form of droplets by using the deformation of the piezoelectric unit as power after being connected to an external power source.

2. The microfluidic chip according to claim 1, characterized in that: The first cover plate is provided with a droplet collecting cavity; the droplet collecting cavity is in contact with one side of the piezoelectric chip; The droplet collecting chamber is used to receive the droplets ejected by the piezoelectric chip.

3. The microfluidic chip according to claim 2, characterized in that: The piezoelectric chip further comprises a piezoelectric chip spray hole; the piezoelectric chip spray hole is arranged on a side of the piezoelectric chip in contact with the droplet collecting chamber; Along the first direction, the piezoelectric chip nozzles are arranged in an array; Along the second direction, the piezoelectric chip spray holes are relatively arranged at two ends of a side where the piezoelectric chip contacts the liquid droplet collecting chamber; wherein the first direction is perpendicular to the second direction.

4. The microfluidic chip according to claim 3, characterized in that: The piezoelectric unit includes a plurality of piezoelectric vibration cavities; the piezoelectric vibration cavities are located on a side of the piezoelectric chip away from the first cover plate; The piezoelectric vibration cavity is used to generate vibration after the piezoelectric chip is energized and deformed, so as to drive the reagent to flow.

5. The microfluidic chip according to claim 4, characterized in that: The number of the piezoelectric vibration cavities is consistent with the number of the piezoelectric chip nozzles.

6. The microfluidic chip according to claim 4, characterized in that: Also includes: A plurality of connecting pads; the connecting pads are arranged on a side of the piezoelectric vibration cavity close to the second cover plate.

7. The microfluidic chip according to claim 6, characterized in that: The substrate is also provided with a first row of wire grooves and a second row of wire grooves; Along the first direction, the widths of the first cable groove and the second cable groove are both the same as the width of the groove; Along the second direction, the first wire groove and the second wire groove are arranged at two ends of the groove, and the first wire groove and the second wire groove have the same length and are both greater than the length of the groove.

8. The microfluidic chip according to claim 7, characterized in that: Also includes: A first cable and a second cable; the first cable extends from the first cable groove to a side of the second cover plate away from the substrate; the second cable extends from the second cable groove to a side of the second cover plate away from the substrate; One end of the first and second cables located on a side of the second cover plate away from the substrate is connected to the controller; the other ends of the first and second cables are connected to the connection pads.

9. The microfluidic chip according to claim 8, characterized in that: Also includes: A first cable receiving unit and a second cable receiving unit; the first cable receiving unit extends from the first cable slot to a side of the second cover plate away from the substrate; The second cable receiving unit extends from the second cable groove to a side of the second cover plate away from the substrate; The first cable receiving unit is used to carry the first cable; the second cable receiving unit is used to carry the second cable.

10. The microfluidic chip according to claim 9, characterized in that: The first cable receiving unit and the second cable receiving unit both have a U-shape.

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