Polishing solution circulating device for double-sided rapid polishing machine tool

Abstract

A polishing solution circulating device for a double-sided rapid polishing machine tool comprises a cabinet body, a circulating water tank, a precision filter and a PLC (programmable logic controller) are arranged in the cabinet body, the circulating water tank is provided with a water inlet and a water outlet which are connected with a water inlet pipeline and a water outlet main pipe, and the water outlet main pipe is divided into two paths, the polishing solution is filtered by the precision filter and then conveyed to a polishing area; a polishing solution collecting groove is formed in the periphery of a lower polishing disc of the double-face rapid polishing machine tool, a recovery cleaning plate for cleaning polishing powder deposited in the polishing solution collecting groove is arranged on the outer side of the lower polishing disc, and a collecting opening is formed in the bottom of the polishing solution collecting groove. The collecting opening is connected with the circulating water tank through a backflow pipeline, and a constant-temperature controller for cooling the circulating water tank is further arranged in the cabinet body. The device has the characteristics of reasonable and compact structure, high automation degree, high precision, stable operation and the like, and can be applied to cyclic utilization of the polishing solution.

Description

Technical Field

[0001] The invention relates to the technical field of double-sided rapid polishing of optical elements, and in particular to a polishing liquid circulation device for a double-sided rapid polishing machine tool. Background Art

[0002] Double-sided rapid polishing is a processing method that simultaneously polishes the upper and lower surfaces of optical components based on the surface accuracy copying mechanism combined with the principle of chemical mechanical polishing. It can quickly remove surface scratches and defects left over from grinding, improve surface roughness, and meet the entry accuracy requirements of subsequent fine polishing. It has the characteristics of high polishing efficiency and high precision, and has broad application prospects in the processing of planar optical components.

[0003] In the double-sided rapid polishing process, it is necessary to continuously spray the polishing area with polishing liquid containing polishing powder to maintain the stability of material removal and reduce the polishing temperature. Since polishing powder is expensive, in order to reduce the processing cost of double-sided rapid polishing, the polishing liquid supply device is often designed in a circulating form to achieve the purpose of recycling the polishing liquid. However, the current polishing circulation device has the defects of insufficient polishing powder recovery, scattered layout, complex installation, low degree of automation, and poor continuous operation stability, which affects the accuracy of double-sided rapid polishing and the consistency of material removal.

[0004] Therefore, it is necessary to design a new polishing liquid circulation device for double-sided rapid polishing machine tools to solve the problem of polishing liquid supply and recovery in double-sided rapid polishing and meet the requirements of high polishing precision and continuous and stable operation. Summary of the invention

[0005] The technical problem to be solved by the present invention is to provide a polishing liquid circulation device for a double-sided rapid polishing machine tool with a reasonable and compact structure and convenient operation in view of the above-mentioned technical status quo, which has the characteristics of high degree of automation, high precision and stable operation.

[0006] The technical solution adopted by the present invention to solve the above-mentioned technical problems is: a polishing liquid circulation device for a double-sided rapid polishing machine tool, characterized in that: it includes a cabinet, a circulating water tank for containing polishing liquid, a precision filter and a PLC controller are arranged in the cabinet, the circulating water tank is provided with a water inlet and a water outlet, which are connected with a water inlet pipeline and a water outlet main pipe, and the water outlet main pipe is divided into two routes: the first route is connected with the precision filter through a water outlet main valve, and the polishing liquid is filtered by the precision filter and then transported to the polishing area; the second route is connected with the reflux port at the bottom of the circulating water tank through a reflux valve, a polishing liquid collecting tank is arranged around the lower polishing disk of the double-sided rapid polishing machine tool, a recovery cleaning plate for cleaning the polishing powder deposited in the polishing liquid collecting tank is arranged on the outer side of the lower polishing disk, a collecting port is arranged at the bottom of the polishing liquid collecting tank, and the collecting port is connected with the circulating water tank through a reflux pipeline, and a constant temperature controller for cooling the circulating water tank is also arranged in the cabinet.

[0007] As an improvement, the circulating water tank is made of stainless steel, and the bottom of the circulating water tank is designed to be a conical structure. An agitator, a liquid level gauge, a supply pump and a cooling pipe are installed on the circulating water tank. An inlet electric valve is installed on the water inlet pipe of the circulating water tank. The supply pump adopts an immersed multi-stage stainless steel pump. The supply pump is arranged at the upper end of the circulating water tank and connected to the water outlet main pipe.

[0008] Furthermore, the cooling pipe is made of a copper pipe, and is arranged in a spiral form on the inner wall of the circulating water tank. The water inlet of the cooling pipe is connected to a constant temperature controller.

[0009] Furthermore, the precision filters are two connected in parallel, one for use and one for backup, a pressure gauge is provided on the precision filter, a precision filter water inlet valve and a precision filter water outlet valve are respectively installed at the inlet and outlet of the precision filter, and a precision filter bag with a filtration accuracy better than 1μm is provided inside the precision filter.

[0010] Furthermore, the outlet pipeline of the precision filter is divided into multiple routes according to the number of polishing stations, each of which is equipped with a polishing liquid outlet valve, a proportional control valve and a flow meter. The PLC controller automatically adjusts the opening of the proportional control valve according to the set flow rate and the measurement value of the flow meter.

[0011] Furthermore, the polishing liquid collecting tank is an annular groove made of stainless steel, and the bottom of the polishing liquid collecting tank has a slope that facilitates the polishing liquid to gather at the collecting port, the slope is not less than 4 degrees, and the collecting port is set at the lowest position of the slope.

[0012] Furthermore, the recovery cleaning plate is vertically arranged in the polishing liquid collecting tank, and one side of the recovery cleaning plate is fixed to the side of the lower polishing disc and rotates with the lower polishing disc.

[0013] Finally, the cabinet is made of galvanized sheet metal, the bottom plate of the cabinet adopts a frame structure, the circulating water tank, the constant temperature controller and the precision filter are respectively arranged on the bottom plate, and the PLC controller is installed on the front plate of the cabinet.

[0014] Compared with the prior art, the advantages of the present invention are:

[0015] 1. Adopt integrated polishing liquid cabinet structure with reasonable layout and compact structure;

[0016] 2. The polishing liquid in the circulating water tank is temperature-controlled by a thermostatic controller, and impurities in the polishing liquid are removed by a precision filter. Multiple polishing pipelines can be set according to the polishing station, and each polishing pipeline has a constant flow control function to ensure the stability of double-sided rapid polishing material removal;

[0017] 3. The polishing area is equipped with a sloped polishing liquid collection tank and a recovery cleaning plate to efficiently collect polishing powder;

[0018] The invention has the characteristics of reasonable and compact structure, high degree of automation, high precision, stable operation, etc., and can effectively improve the recovery rate of polishing powder and can be applied to the recycling of polishing liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the implementation of the present invention. DETAILED DESCRIPTION

[0020] The present invention is further described in detail below with reference to the accompanying drawings.

[0021] like Figure 1 As shown, a polishing liquid circulation device for a double-sided rapid polishing machine tool comprises a cabinet 1, in which a circulating water tank 2 for containing polishing liquid, a precision filter 6 and a PLC controller 7 are arranged, the circulating water tank 2 is provided with a water inlet and a water outlet, which are connected with a water inlet pipeline and a water outlet main pipe, and the water outlet main pipe is divided into two routes: the first route is connected with the precision filter 6 through a water outlet main valve 12, and the polishing liquid is filtered by the precision filter 6 and then transported to the polishing area A; the second route is connected with the reflux port at the bottom of the circulating water tank 2 through a reflux valve 11, a polishing liquid collecting tank 17 is arranged around the lower polishing disc 16 of the double-sided rapid polishing machine tool, a recovery cleaning plate 18 for cleaning the polishing powder deposited in the polishing liquid collecting tank 17 is arranged on the outer side of the lower polishing disc 16, a collecting port is arranged at the bottom of the polishing liquid collecting tank 16, and the collecting port is connected with the circulating water tank 2 through a reflux pipeline, and a constant temperature controller 8 for cooling the circulating water tank 2 is also arranged in the cabinet 1.

[0022] The specific structure is as follows: the cabinet 1 is made of galvanized sheet metal, the bottom plate of the cabinet 1 adopts a frame structure, the circulating water tank 2, the thermostat 8 and the precision filter 6 are respectively arranged on the bottom plate, and the PLC controller 7 is installed on the front plate of the cabinet 1. The circulating water tank 2 is made of stainless steel, and the bottom of the circulating water tank 2 is designed as a conical structure. The circulating water tank 2 is equipped with an agitator 3, a liquid level meter 9, a supply pump 5 and a cooling pipe 4. The water inlet electric valve 10 is installed on the water inlet pipeline of the circulating water tank 2. The supply pump 5 adopts an immersed multi-stage stainless steel pump. The supply pump 5 is arranged at the upper end of the circulating water tank 1 and connected to the water outlet main pipe. The liquid level meter 9 is used to measure the liquid level of the circulating water tank 2. When the liquid level of the circulating water tank 2 is lower than the design value, the PLC controller 7 controls the water inlet electric valve 10 to be in an open state to replenish water to the circulating water tank 2 until the liquid level meets the design requirements.

[0023] The cooling pipe 4 is made of a copper pipe and is arranged in a spiral form on the inner wall of the circulating water tank. The water inlet of the cooling pipe 4 is connected to the thermostat 8, so that the temperature of the polishing liquid in the circulating water tank 2 can be kept constant. There are two precision filters 6 connected in parallel, one for use and one for backup. A pressure gauge 13 is provided on the precision filter 6. A precision filter water inlet valve 14 and a precision filter water outlet valve 15 are installed at the inlet and outlet of the precision filter 6 respectively. A precision filter bag with a filtration accuracy better than 1μm is provided inside the precision filter 6 to remove impurities in the polishing liquid.

[0024] The outlet pipeline of the precision filter 6 is divided into multiple routes according to the number of polishing stations. In this embodiment, there are three routes. Each route is equipped with a polishing liquid outlet valve 19, a proportional control valve 20 and a flow meter 21. The PLC controller 7 automatically adjusts the opening of the proportional control valve 20 according to the set flow rate and the measured value of the flow meter, thereby achieving the purpose of constant flow control, ensuring that the polishing liquid flow in each polishing area is constant, and realizing stable removal of materials in the polishing area.

[0025] The polishing liquid collecting tank 17 is a circular groove made of stainless steel. The bottom of the polishing liquid collecting tank 17 is sloped so that the polishing liquid can be collected at the collecting port. The slope is not less than 4 degrees. The collecting port is set at the lowest position of the slope. The recovery cleaning plate 17 is vertically set in the polishing liquid collecting tank 17. One side of the recovery cleaning plate 17 is fixed to the side of the lower polishing disc 16 and rotates with the lower polishing disc 16. The recovery cleaning plate 17 is used to clean the polishing powder deposited at the bottom of the polishing liquid collecting tank 17 to improve the efficiency of polishing powder collection. The polishing liquid flows into the circulating water tank 2 by itself to ensure the concentration of the polishing liquid in the circulating water tank 2.

[0026] When the polishing liquid circulation device is working, the program is automatically run through the control in the PLC controller 7. Specifically: first detect the liquid level height of the liquid level gauge 9 in the circulating water tank 2. When the liquid level height is lower than the designed water level, automatically open the water inlet electric valve 10 to replenish the polishing liquid. Then turn on the agitator 3 to stir the polishing liquid in the circulating water tank 2, and then turn on the thermostat 8 to cool the circulating water tank 2. Then turn on the supply pump 5, and adjust the opening of the reflux valve 11 and the main water outlet valve 12 to make the total output flow of the polishing liquid reach the designed value. After the polishing liquid is filtered by the precision filter 6, it passes through the proportional control valve 20 and the flow meter 21 to reach the polishing area. The PLC controller 7 automatically adjusts the opening of the proportional control valve 20 according to the flow detected by the flow meter 21 to achieve constant control of the flow. The control methods of the other two routes are similar. After the polishing liquid is sprayed to the polishing area A, it flows to the polishing liquid collecting tank 17. The polishing liquid flows to the collecting port through the slope at the bottom of the polishing liquid collecting tank 17. The polishing powder deposited at the bottom of the polishing liquid collecting tank 17 is also collected to the collecting port through the cleaning of the recovery cleaning plate 18. The polishing liquid flows back to the circulating water tank 2. When the pressure value of the pressure gauge 13 on the precision filter 6 exceeds the design value, the PLC controller 7 issues an alarm to prompt the operator to replace the precision filter bag. The operator opens the precision filter inlet valve 14 and the precision filter outlet valve 15 of the other precision filter 6, closes the precision filter inlet valve 14 and the precision filter outlet valve 15 of the precision filter 6 to be replaced, and replaces the clogged precision filter bag without affecting the continuous operation of the polishing liquid circulation device.

[0027] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A polishing liquid circulation device for a double-sided rapid polishing machine tool, characterized in that: The utility model comprises a cabinet, in which a circulating water tank for containing polishing liquid, a precision filter and a PLC controller are arranged. The circulating water tank is provided with a water inlet and a water outlet, which are connected with a water inlet pipeline and a water outlet main pipe. The water outlet main pipe is divided into two routes: the first route is connected with the precision filter through a water outlet main valve, and the polishing liquid is transported to the polishing area after being filtered by the precision filter; the second route is connected with the reflux port at the bottom of the circulating water tank through a reflux valve, a polishing liquid collecting tank is arranged around the lower polishing disc of the double-sided rapid polishing machine, a recovery cleaning plate for cleaning the polishing powder deposited in the polishing liquid collecting tank is arranged on the outer side of the lower polishing disc, a collecting port is arranged at the bottom of the polishing liquid collecting tank, and the collecting port is connected with the circulating water tank through a reflux pipeline, and a constant temperature controller for cooling the circulating water tank is also arranged in the cabinet.

2. The polishing liquid circulation device according to claim 1, characterized in that: The circulating water tank is made of stainless steel, and the bottom of the circulating water tank is designed as a conical structure. An agitator, a liquid level meter, a supply pump and a cooling pipe are installed on the circulating water tank. An inlet electric valve is installed on the water inlet pipe of the circulating water tank. The supply pump adopts an immersed multi-stage stainless steel pump. The supply pump is arranged at the upper end of the circulating water tank and connected to the water outlet main pipe.

3. The polishing liquid circulation device according to claim 2, characterized in that: The cooling pipe is made of a copper pipe, and is arranged in a spiral form on the inner wall of the circulating water tank. The water inlet of the cooling pipe is connected to a constant temperature controller.

4. The polishing liquid circulation device according to claim 1, characterized in that: The precision filters are two connected in parallel, one for use and one for backup. A pressure gauge is provided on the precision filter. A precision filter water inlet valve and a precision filter water outlet valve are respectively installed at the inlet and outlet of the precision filter. A precision filter bag with a filtration accuracy better than 1 μm is provided inside the precision filter.

5. The polishing liquid circulation device according to claim 4, characterized in that: The outlet pipeline of the precision filter is divided into multiple routes according to the number of polishing stations, each of which is equipped with a polishing liquid outlet valve, a proportional control valve and a flow meter. The PLC controller automatically adjusts the opening of the proportional control valve according to the set flow rate and the measurement value of the flow meter.

6. The polishing liquid circulation device according to claim 1, characterized in that: The polishing liquid collecting groove is an annular groove made of stainless steel. The bottom of the polishing liquid collecting groove has a slope that is convenient for the polishing liquid to be collected at the collecting port. The slope is not less than 4 degrees, and the collecting port is set at the lowest position of the slope.

7. The polishing liquid circulation device according to claim 6, characterized in that: The recovery cleaning plate is vertically arranged in the polishing liquid collecting tank, one side of the recovery cleaning plate is fixed to the side of the lower polishing plate, and rotates with the lower polishing plate.

8. The polishing liquid circulation device according to any one of claims 1 to 7, characterized in that: The cabinet body is made of galvanized sheet metal, the bottom plate of the cabinet body adopts a frame structure, the circulating water tank, the constant temperature controller and the precision filter are respectively arranged on the bottom plate, and the PLC controller is installed on the front plate of the cabinet body.

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