Dangerous object recovery processing device, equipment and method

Abstract

The invention relates to a hazardous substance recovery processing device, equipment and method, and belongs to the technical field of vacuum system product recovery processing, the hazardous substance recovery processing device is used for being connected with a target cavity so as to receive and process hazardous substances flowing after being heated in the target cavity, and the device comprises a recovery processing cavity, the recovery processing cavity is provided with a sealable cavity, the recovery processing cavity comprises a condensing device, at least one first interface and at least one second interface, and the at least one first interface is used for being communicated with a vacuum pump in a first time period to vacuumize the sealable cavity; and communicating a target cavity in a second time period to receive the dangerous object discharged by the target cavity, the first time period is different from the second time period; and the at least one second interface is used for introducing a treatment agent, introducing the treatment agent for treating the hazardous substances and discharging the treated treatment agent. According to the dangerous object recycling treatment device, the safety maintenance treatment problem of process dangerous products is solved, the risk that safety accidents are likely to happen is effectively reduced, and the equipment process safety is optimized.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum system product recovery and treatment, and in particular to a hazardous material recovery and treatment device, equipment and method. Background Art

[0002] Vacuum systems have been widely used in various industries, especially in the field of molecular beam epitaxy (MBE). In MBE systems, materials are synthesized by evaporating solid sources under ultra-high vacuum and directly depositing them onto a substrate.

[0003] During the growth of epitaxial wafers, harmful, flammable and dangerous substances such as phosphorus, selenium and sulfur will accumulate in the ultra-high vacuum molecular beam epitaxy chamber. In particular, white phosphorus products will accumulate a large amount of white phosphorus in the ultra-high vacuum molecular beam epitaxy chamber during the growth of indium phosphide epitaxial wafers. Due to its loose texture and extremely low ignition point, it is very difficult to maintain the MBE chamber after the growth of phosphide, and safety accidents frequently occur when the molecular beam epitaxy equipment is opened; the smoke generated by the combustion of phosphorus materials also causes physiological toxicity to the users and maintenance personnel of the on-site MBE. Summary of the invention

[0004] The hazardous material recovery and treatment device, equipment and method provided in the embodiments of the present application solve the problem of safe maintenance and treatment of process hazardous products, effectively reduce the risk of safety accidents, and optimize the equipment process safety.

[0005] In a first aspect, a hazardous material recovery and processing device is provided, which is used to connect to a target cavity to receive and process the hazardous material flowing after being heated in the target cavity, wherein the device comprises a recovery and processing cavity, the recovery and processing cavity has a sealable chamber, the recovery and processing cavity comprises a condensation device, at least one first interface and at least one second interface, wherein:

[0006] The at least one first interface is used to connect to a vacuum pump to evacuate the sealable chamber during a first period; and to connect to a target cavity during a second period to receive dangerous objects discharged from the target cavity; the first period is different from the second period;

[0007] The at least one second interface is used for introducing a treatment agent, for introducing the treatment agent for treating the hazardous substance, and for discharging the treatment agent after the treatment.

[0008] In some embodiments, each of the first interfaces is provided with a first isolation control valve; the first isolation control valve is used to connect or disconnect the connection between the first interface and the target chamber, or to connect or disconnect the connection between the first interface and the vacuum pump; and / or each of the second interfaces is provided with a second isolation control valve, and the second isolation control valve is used to connect or disconnect the channel of the second interface into the processing agent.

[0009] In some embodiments, the first interface is used to connect to the target cavity and the vacuum pump respectively at different time periods; or, there are multiple first interfaces, wherein at least one of the multiple first interfaces is connected to the target cavity, and at least one of the multiple first interfaces is connected to the vacuum pump.

[0010] In some embodiments, the condensing device is a cold screen device, a cooling pipe is provided in the cold screen device, a coolant inlet of the cooling pipe extends from one end of the cold screen of the cold screen device, and a coolant outlet extends from the other end of the cold screen.

[0011] In some embodiments, the cooling pipes are evenly laid inside the cold shield and are arranged close to the outer wall of the cold shield.

[0012] In some embodiments, the cooling pipes are arranged in a Z-shape or S-shape.

[0013] In some embodiments, the outer wall of the cold shield device has an uneven surface.

[0014] In some embodiments, there are multiple first interfaces, each of which corresponds to and is connected to multiple target cavities, and the dangerous objects in each of the target cavities are the same or different; and / or

[0015] There are multiple second interfaces, and the processing agents introduced into each second interface are the same or different.

[0016] In some embodiments, a vacuum gauge is further provided on the recycling processing chamber for real-time monitoring of the vacuum degree in the recycling processing chamber.

[0017] In some embodiments, the condensing device, the first isolation control valve, the second isolation control valve and the vacuum gauge of the recovery processing chamber are all connected to a controller.

[0018] In a second aspect, a vacuum processing device is provided, comprising the hazardous material recovery and processing device according to any of the above embodiments and the target cavity.

[0019] In some embodiments, a heating device is provided in the target cavity, and the heating device is a baking device that surrounds and covers the outer wall of the target cavity, and is used to achieve heating and vaporization of the dangerous substances in the target cavity.

[0020] In some embodiments, the hazardous substances in the target cavity include phosphorus products, selenium products, or sulfur products.

[0021] In some embodiments, the heating device of the target cavity is also connected to the controller.

[0022] In a third aspect, a method for recovering and treating hazardous materials is provided, the method comprising:

[0023] During the first period, the recycling processing chamber is connected to a vacuum pump through at least a first interface to evacuate the recycling processing chamber;

[0024] During the second period, the target cavity is connected via the at least first interface to receive the dangerous substances discharged from the target cavity;

[0025] After being condensed by the condensation device of the recycling and processing chamber, a treatment agent is introduced through the second interface of the recycling and processing chamber to achieve treatment of the dangerous substances;

[0026] Wherein, the recycling processing chamber has a sealable chamber.

[0027] In some embodiments, each of the first interfaces is provided with a first isolation control valve; the first isolation control valve is used to connect or disconnect the first interface with the target cavity, or to connect or disconnect the first interface with the vacuum pump; and / or

[0028] Each of the second interfaces is provided with a second isolation control valve, and the second isolation control valve is used to connect or shut off the channel through which the second interface enters the treatment agent.

[0029] In some embodiments, the vacuum gauge is used to monitor the vacuum degree in the recycling processing chamber in real time and feeds back to the controller, and the controller controls the recycling processing chamber to meet the vacuum degree requirement.

[0030] In some embodiments, the hazardous material recovery and treatment method comprises:

[0031] Based on a first operation instruction issued by the controller, the first isolation control valve switches the first interface to connect to the vacuum pump to perform a vacuum operation on the recovery processing chamber;

[0032] Based on the second operation instruction issued by the controller, the first isolation control valve switches the first interface to connect to the target cavity, thereby completing the introduction of the dangerous object;

[0033] Based on the third operation instruction issued by the controller, the condensation device performs condensation processing to collect the dangerous objects;

[0034] Based on the fourth operation instruction issued by the controller, the second isolation control valve controls the second interface to allow a treatment agent to pass through to treat the collected hazardous substances.

[0035] In a fourth aspect, a method for recovering and treating hazardous materials is provided, the method comprising:

[0036] The dangerous substance is heated and vaporized by using a heating device in the target cavity, and the recycling cavity is connected to a vacuum pump through at least a first interface to evacuate the recycling cavity during a first period of time, so that the recycling cavity and the interconnected cavity of the target cavity are kept in a vacuum state;

[0037] Then, in a second period of time, the target cavity is connected through the at least first interface to receive the dangerous substances discharged from the target cavity;

[0038] After being condensed by the condensation device in the recovery processing chamber, the hazardous substances are collected on the condensation device;

[0039] Then, a treatment agent is introduced through the second interface of the recovery and treatment chamber to achieve the treatment of the dangerous substances.

[0040] In some embodiments, the hazardous material recovery and treatment method comprises:

[0041] Based on the fifth operation instruction issued by the controller, the heating device in the target cavity is controlled to heat and vaporize the dangerous substance, and based on the first operation instruction issued by the controller, the first isolation control valve switches the first interface to connect to the vacuum pump to perform a vacuum operation on the recovery and processing cavity;

[0042] Based on the second operation instruction issued by the controller, the first isolation control valve switches the first interface to connect to the target cavity, thereby completing the introduction of the dangerous object;

[0043] Based on the third operation instruction issued by the controller, the condensation device performs condensation processing to collect the dangerous objects;

[0044] Based on the fourth operation instruction issued by the controller, the second isolation control valve controls the second interface to allow a treatment agent to pass through to treat the collected hazardous substances.

[0045] In some embodiments, when the hazardous substance is a phosphorus product, the hazardous substance recovery and treatment method includes:

[0046] The target cavity is heated to 100° C.-200° C., and a refrigerant is introduced into the condensing device of the recovery and processing cavity at the same time, until the gas pressure in the recovery and processing cavity is no more than 5E-7 Torr, and the adsorption of the phosphorus product by the condensing device is completed;

[0047] Then, the second isolation control valve is used to control the second interface to allow nitrogen to enter until the recovery and processing chamber reaches 1 standard atmospheric pressure, and then the second interface is controlled to switch to injecting water until the recovery and processing chamber is filled.

[0048] In some embodiments, when the hazardous substance is a phosphorus product, the hazardous substance recovery and treatment method includes:

[0049] The target cavity is heated to 150° C.-190° C., and a refrigerant is introduced into the condensing device of the recovery and processing cavity at the same time, until the gas pressure in the recovery and processing cavity is no more than 5E-7 Torr, and the adsorption of the phosphorus product by the condensing device is completed;

[0050] Then, the second isolation control valve is used to control the second interface to introduce hot nitrogen until the recovery processing chamber reaches 1.1 standard atmospheric pressures, thereby achieving heating and purging of the phosphorus product, and the second interface is controlled to switch to a water pipeline.

[0051] In some embodiments, when the hazardous substance is a selenium product, the hazardous substance recovery and treatment method includes:

[0052] The target cavity is heated to 120° C.-180° C., and a refrigerant is introduced into the condensing device of the recycling and processing cavity at the same time, until the air pressure in the recycling and processing cavity is no more than 5E-7 Torr, and the condensing device completes the adsorption of the selenium product;

[0053] The second isolation control valve is then used to control the second interface to allow nitrogen to enter until the recovery processing chamber reaches 1 standard atmospheric pressure, and then the second interface is controlled to switch to injecting ethanol solution until the recovery processing chamber is filled.

[0054] In some embodiments, when the hazardous substance is a sulfur product, the hazardous substance recovery and treatment method includes:

[0055] The target cavity is heated to 100° C.-160° C., and a refrigerant is introduced into the condensing device of the recycling and processing cavity at the same time, until the air pressure value in the recycling and processing cavity is no more than 5E-7 Torr, and the condensing device completes the adsorption of the selenium product;

[0056] The second isolation control valve is then used to control the second interface to allow nitrogen to enter until the recovery and processing chamber reaches 1 standard atmospheric pressure, and then the second interface is controlled to switch to injecting carbon disulfide liquid until the recovery and processing chamber is filled.

[0057] At least one hazardous material recovery and treatment solution provided in the embodiments of the present application achieves the following beneficial effects:

[0058] By setting the first interface of the recovery processing chamber to connect the vacuum pump and the target chamber with dangerous substances, the entry of dangerous substances into the target chamber can be connected in a closed vacuum environment, and through the control setting of the second interface of its condensation device and the second isolation control valve, after condensation and collection, the risk reduction treatment can be achieved through the processing process control, and the settings of the first isolation control valve and the second isolation control valve located at the chamber interface can be flexibly switched and changed according to the needs of different dangerous substance treatments, that is, the risk reduction treatment of process dangerous products can be achieved, thereby well solving the safety threats such as spontaneous combustion, explosion or air pollution, and also optimizing the safety performance of process equipment and equipment maintenance performance, thereby achieving the safe treatment effect of dangerous products and realizing equipment process optimization under the premise of saving operating costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0059] Figure 1 It is a schematic diagram of the structure of a hazardous material recovery and treatment device provided in some embodiments of the present application;

[0060] Figure 2 It is a schematic diagram of the partial structural decomposition of a hazardous material recovery and treatment device provided in some embodiments of the present application;

[0061] Figure 3 It is a schematic diagram of the structure of a cold shield device provided in some embodiments of the application;

[0062] Figure 4 is a schematic diagram of the structure of a vacuum gauge provided in some embodiments of the application;

[0063] Figure 5 is a schematic diagram of the structure of a vacuum processing device provided in some embodiments of the present application;

[0064] Figure 6 It is a schematic diagram of a hazardous material recovery and treatment method provided in some embodiments of the present application;

[0065] Figure 7 It is a schematic diagram of the process flow of the hazardous material recovery and treatment method provided by other embodiments of the present application;

[0066] Figure 8 is a schematic flow chart of a hazardous material recovery and treatment method provided by some other embodiments of the present application;

[0067] Fig. 9 It is a schematic flow chart of a hazardous material recovery and treatment method provided in some further embodiments of the present application.

[0068] Description of Reference Numerals

[0069] 1-recovery processing chamber, 2-target chamber, 21-heating device, 11-first interface, 12-first isolation control valve, 13-second interface, 14-second isolation control valve, 15-condensing device, 16-cooling pipeline, 16a-coolant inlet, 16b-coolant outlet, 17-cold shield, 18-vacuum gauge, 18a-flange sealing part, 18b-support part, 18c-detection part. DETAILED DESCRIPTION

[0070] In order to make the technical solutions and beneficial effects of the present invention more clearly understandable, the following is a detailed description by listing specific embodiments. The drawings are not necessarily drawn to scale, and local features may be enlarged or reduced to more clearly show the details of the local features; unless otherwise defined, the technical and scientific terms used herein have the same meanings as those in the technical field to which this application belongs.

[0071] In the description of the present invention, the directions or positional relationships indicated by terms such as “upper”, “lower”, “left”, “right”, “top”, “bottom”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of simplified description of the present invention. They do not indicate that the devices or elements referred to must have a specific direction, be constructed and operate in a specific direction, and they should not be understood as limitations on the present invention.

[0072] In the present invention, the terms "first" and "second" are only used for the purpose of clear description and cannot be understood as the relative importance of the indicated features or the number of the indicated technical features. Therefore, the features defined as "first" and "second" can explicitly include at least one of the features. In the description of the present invention, "multiple" means at least two, such as two, three, etc.; "several" means at least one, such as one, two, three, etc., unless otherwise clearly and specifically defined. In addition, the numbering of the method operation steps "S11", "S12", etc. is for convenience of representation, and does not mean that the order of executing the steps is unique. Without departing from the inventive concept of the present application, as long as the functions or technical effects stated can be achieved, a variety of changes and selections can be made according to the specific circumstances.

[0073] In the present invention, unless otherwise clearly defined, the terms "install", "connect", "connect", "fix", "set", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0074] In the present invention, unless otherwise clearly defined, a first feature being “on”, “above”, “above”, “below”, “below”, “below” or “below” a second feature may mean that the first feature is in direct contact with the second feature, or the first feature and the second feature are in indirect contact with each other through an intermediate medium. Moreover, a first feature being “on”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than the horizontal height of the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than the horizontal height of the second feature.

[0075] Based on the various safety hazards described in the background technology, the inventor of this application has found through in-depth research that there is a method in the industry to collect white phosphorus products by cold screen adsorption and then recycle them into a specific cavity. However, this method only realizes the collection and transfer of dangerous products. When a certain amount of products accumulate, the cavity still needs to be opened. At this time, there are still safety hazards such as flammability, explosion, and air pollution. In other words, the above safety hazards have not been solved, but only temporary recovery and problem transfer have been achieved. After further thinking and exploration, the inventor found that the reason why these products are prone to safety problems is that when they exist in solid or gaseous form, they are very likely to spontaneously combust, explode or pollute the air. Looking at the current technical ideas of cold screen adsorption recovery and the limitations of existing equipment in the vacuum system, this problem is common. The inventor further pondered: Can this recovery method be changed through equipment improvement? In addition to adsorption recovery, try to combine the cavity device improvement to achieve further solution treatment process to completely reduce the insecurity of dangerous products.

[0076] Specifically, the embodiment of the present application designs a recycling and processing scheme that can both recycle and collect and reduce the risk of treatment, maintains a closed vacuum environment between the target cavity and the recycling and processing cavity, first heats and vaporizes the accumulated dangerous substances in the target cavity through a heating device, and then collects and recovers them through a condensing device in the recycling and processing cavity, and then introduces a corresponding treatment agent through the control of an isolation control valve, thereby achieving risk reduction treatment of process dangerous products, thereby being able to well solve safety threats such as spontaneous combustion, explosion or air pollution, and also optimize the safety performance of process equipment and equipment maintenance performance, especially vacuum system equipment with vacuum or ultra-high vacuum requirements, such as molecular beam epitaxy systems, and the present hazardous substance recycling and processing solution is generally applicable to the recycling and processing of various industrial hazardous products, and the device and treatment method also have the advantages of simple structural design, easy implementation, and low cost. For example, in the case where the existing vacuum system has a process reaction chamber and a cold shield collection chamber, it is only necessary to set the cavity interface, isolation control valve, vacuum gauge position and required pipelines, that is, the scheme can be improved, thereby achieving both the safe treatment effect of dangerous products and the equipment process optimization under the premise of saving operating costs.

[0077] The following is a detailed description of the hazardous material recovery and processing device, equipment and method provided in the embodiments of the present application in conjunction with specific embodiments.

[0078] like Figure 1 and Figure 2 As shown, the hazardous material recovery and processing device provided in the embodiment of the present application is used to connect with the target cavity 2 to receive and process the hazardous materials that flow in the target cavity 2 after heating. Specifically, the hazardous material recovery and processing device includes a recovery and processing chamber 1, and the recovery and processing chamber 1 has a sealable chamber so that a closed vacuum environment can be formed. A condensing device 15, a first interface 11 and a second interface 13 are provided in the recovery and processing chamber 1, and the number of the first interface 11 and the second interface 13 is at least one. Among them, at least one first interface 11 is used to connect to a vacuum pump (not shown in the figure) in a first time period to evacuate the sealable chamber; and to connect to the target cavity in a second time period to receive the hazardous materials discharged from the target cavity 2, and here the first time period and the second time period are process times at different time nodes, respectively. At least one second interface 13 is used to pass a treatment agent, which is used to introduce a treatment agent for treating hazardous materials, and discharge the treatment agent that has been treated.

[0079] In some embodiments, the first interface 11 is used to connect to the target chamber 2 and the vacuum pump respectively at different time periods. This convenient interface switching method can more easily meet the needs of various processing scenarios; or, there are multiple first interfaces 11, wherein at least one of the multiple first interfaces 11 is connected to the target chamber 2, and at least one of the multiple first interfaces 11 is connected to the vacuum pump, and the respective docking methods have the advantage of being conducive to separate control.

[0080] The hazardous material recovery and treatment device provided in the embodiment of the present application includes a recovery and treatment chamber 1, a first interface 11 is provided on the recovery and treatment chamber 1, and a first isolation control valve 12 is provided on the first interface 11. The first isolation control valve 12 is used to connect or disconnect the connection between the first interface and the target chamber 2, or to connect or disconnect the connection between the first interface 11 and the vacuum pump. In some embodiments, the target chamber 2 or the vacuum pump (not shown in the drawings) can be switched to the recovery and treatment chamber 1 respectively through the first isolation control valve 12. In some embodiments, in addition to realizing the switching function, the first isolation control valve 12 can also adjust the flow rate and / or air pressure. In some embodiments, multiple first interfaces 11 can be provided, each first interface 11 is connected to one or more target chambers 2 respectively, or each first interface 11 is connected to one or more vacuum pumps respectively. This setting method can realize the same recovery and treatment chamber 1 to conveniently and efficiently handle hazardous materials from different target chambers 2. In some embodiments, when there are multiple target chambers 2, the hazardous materials in each target chamber 2 can be the same or different, so as to meet various requirements on the category and magnitude of hazardous materials.

[0081] The target cavity 2 is a cavity containing hazardous substances. In some embodiments, the hazardous substances include phosphorus products, selenium products, sulfur products, or any other possible process products. For example, the target cavity 2 may be an ultra-high vacuum molecular beam epitaxial cavity used in the indium phosphide series epitaxial wafer growth process. During the process production process, a large amount of white phosphorus products will accumulate in the target cavity 2.

[0082] In addition, a second isolation control valve 14 is provided on the second interface 13 of the recovery and processing chamber 1, and the second isolation control valve 14 is used to connect or shut off the passage of the second interface 13 into the treatment agent. In some embodiments, the second isolation control valve 14 can control the switching of different treatment agents, or control the flow rate and / or air pressure of the treatment agent to meet the treatment process requirements of different scenarios. In some embodiments, according to different treatment process requirements, the treatment agent can be a gaseous treatment agent such as nitrogen, or a liquid treatment agent such as water, liquid nitrogen, ethanol solution, and carbon disulfide liquid. In some embodiments, the second interface 13 can be switched to connect different access pipes (not shown in the drawings) through the control of the second isolation control valve 14. For example, gaseous treatment agents such as nitrogen can be introduced through gas pipes, and liquid treatment agents such as water can be injected through liquid pipes to ensure the efficient circulation of treatment agents in different forms, and to meet the treatment process requirements.

[0083] In addition, the recycling and processing chamber 1 is also provided with a condensing device 15. When the dangerous substances in the target chamber 2 are vaporized and enter the recycling and processing chamber 1, the dangerous substances can be solidified in the recycling and processing chamber 1 through cooling by the condensing device 15, and then the corresponding treatment agent (nitrogen, water or ethanol, etc.) is introduced through the second interface 13 under the control of the second isolation control valve 14 to dissolve or heat and purge the dangerous substances. After the dangerous substances are dissolved, there is no problem of being flammable and explosive when encountering air or polluting the air. The gaseous dangerous substances after heating and purging can be switched through the second isolation control valve 14 and introduced into an external liquid pipeline (not shown in the attached drawings), which can also solve the technical problem of dangerous products being flammable and explosive when encountering air or polluting the air. It should be noted that the first isolation control valve 12 and the second isolation control valve 14 both have the function of isolating the vacuum from the atmosphere.

[0084] In some embodiments, the condensing device 15 may be a cold shield device. Figure 1 and Figure 3 , a cooling pipe 16 is provided in the cold shield device, and a coolant inlet 16a of the cooling pipe 16 extends from one end of the cold shield of the cold shield device, and a coolant outlet 16b extends from the other end of the cold shield. In some preferred embodiments, the cooling pipe 16 is evenly laid inside the cold shield 17 and is arranged close to the outer wall of the cold shield 17, so that the cooling effect is more uniform and effective. In some preferred embodiments, the cooling pipe 16 is arranged in a Z-shaped or S-shaped direction. This pipe arrangement can further optimize and enhance the cooling effect. In some preferred embodiments, the outer wall of the cold shield device (i.e., the outer wall of the cold shield 17) has an uneven surface, which can be a wavy surface, an accordion surface, etc., to increase the surface area of ​​condensation adsorption and greatly improve the adsorption efficiency of dangerous substances.

[0085] In some embodiments, in combination Figure 1 , Figure 2 and Figure 4, a vacuum gauge 18 is also provided on the recycling and processing chamber 1, which is used to monitor the vacuum degree in the recycling and processing chamber 1 in real time to meet the process requirements for hazardous materials processing. In some preferred embodiments, the vacuum gauge 18 is set from the top of the recycling and processing chamber 1 to its top. Compared with the bottom setting of the previous equipment, it avoids the risk of being easily damaged during operation. In some preferred embodiments, the vacuum gauge 18 consists of a flange sealing part 18a, a supporting part 18b and a detecting part 18c. The flange sealing part 18a is the vacuum outer part, which is located outside the recycling and processing chamber 1 and is sealed and connected by a flange structure. The supporting part 18b and the detecting part 18c are the vacuum inner parts. The supporting part 18b may include auxiliary accessories such as brackets, extension rods, cables, etc. The detecting part 18c is a vacuum detection component, which may use a detection sensor, etc., which can detect the vacuum degree at the current position and make a signal feedback to the controller. In some preferred embodiments, the heating device 21 of the target cavity 2, the condensing device 15 of the recovery and processing cavity 1, the first isolation control valve 12, the second isolation control valve 14 and the vacuum gauge 18 are all connected to a controller (not shown in the drawings). In this way, through the overall control of the controller, effective feedback interaction and efficient control of the heating process, cooling process, and treatment agent flow, air pressure, and vacuum degree monitoring data can be achieved in various hazardous material recovery and processing scenarios, thereby greatly improving the recovery and processing efficiency of the equipment.

[0086] In addition, some embodiments of the present application further provide a vacuum processing device, which includes a target cavity 2 in addition to the hazardous material recovery and processing device described in any of the above embodiments. The target cavity 2 is a cavity with hazardous materials. In some embodiments, the hazardous materials include phosphorus products, selenium products, sulfur products or any other possible process products. For example, the target cavity 2 can be an ultra-high vacuum molecular beam epitaxy cavity used in the indium phosphide series epitaxial wafer growth process. A large amount of white phosphorus products will accumulate in the target cavity 2 during the process production process. A heating device 21 is also provided on the target cavity 2, which is used to bake and heat the target cavity 2 so that the hazardous materials in the target cavity 2 are vaporized. In some embodiments, the heating device 21 is a baking device that is surrounded and covered on the outer wall of the target cavity 2, which is used to heat and vaporize the hazardous materials in the target cavity 2. In some preferred embodiments, in order to uniformly heat the entire target cavity 2 and each area of ​​the cavity, the heating device 21 can use a baking coat that is covered as a whole. After power is turned on, the baking coat that is covered will bake and heat the target cavity 2 and has a heat preservation function. In addition, the target chamber 2 has a sealable chamber, that is, a sealed environment is satisfied when the process requires it, such as when the vacuum is evacuated by a vacuum pump, the interconnected chambers of the recycling chamber 1 and the target chamber 2 are kept in a vacuum state as a whole. In some preferred embodiments, the target chamber 2 is an MBE growth chamber, or any other possible vacuum processing process system chamber, which is not particularly limited in the embodiments of the present application.

[0087] In addition, if Figure 5 As shown, some embodiments of the present application also provide a method for recovering and processing hazardous materials, which can preferably be performed by the hazardous material recovery and processing device described in any of the above embodiments, and the following steps are performed:

[0088] S11, first, in a first period of time, the recycling processing chamber 1 is connected to a vacuum pump through at least the first interface 11 to evacuate the recycling processing chamber 1;

[0089] S12, thereafter, in a second period of time, the target cavity 2 is connected via at least the first interface 11 to receive the dangerous substances discharged from the target cavity 2;

[0090] S13, after condensation treatment by the condensation device 15 of the recovery and processing chamber 1, a treatment agent is introduced through the second interface 13 of the recovery and processing chamber 1 to achieve treatment of the hazardous substances.

[0091] The recycling processing chamber 1 has a sealable chamber.

[0092] In some embodiments, each first interface 11 is provided with a first isolation control valve 12; the first isolation control valve 12 is used to connect or disconnect the connection between the first interface 11 and the target chamber 2, or to connect or disconnect the connection between the first interface 11 and the vacuum pump. In some embodiments, each second interface 13 is provided with a second isolation control valve 14, and the second isolation control valve 14 is used to connect or disconnect the passage of the second interface 13 into the treatment agent. In some embodiments, a vacuum gauge 18 is used to monitor the vacuum degree in the recovery and treatment chamber 1 in real time, and feedback is given to the controller. The controller controls the recovery and treatment chamber 1 to meet the vacuum degree requirements, which can accurately ensure that the collection and treatment process of hazardous substances is carried out under the expected vacuum conditions, thereby ensuring that the hazardous substances are treated more fully and efficiently.

[0093] In addition, if Figure 6 As shown, in some preferred embodiments, when the controller participates in the overall control, the overall efficiency of the recycling process can be further improved. The specific operation steps are as follows:

[0094] S21, based on the first operation instruction issued by the controller, the first isolation control valve 12 switches the first interface 11 to connect to the vacuum pump to perform a vacuum operation on the recovery processing chamber 1;

[0095] S22, based on the second operation instruction issued by the controller, the first isolation control valve 12 switches the first interface 11 to connect to the target cavity 2, thereby completing the introduction of the dangerous object;

[0096] S23, then, based on the third operation instruction issued by the controller, the condensation device 15 performs condensation processing to collect the dangerous substances;

[0097] S24. Finally, based on the fourth operation instruction issued by the controller, the second isolation control valve 14 controls the second interface 13 to allow the treatment agent to pass through to treat the collected hazardous substances.

[0098] In addition, if Figure 7 As shown, some embodiments of the present application also provide a method for recovering and processing hazardous materials, which can preferably be performed by the vacuum processing equipment described in any of the above embodiments, and the operation steps are as follows:

[0099] S31, first, the dangerous substance is heated and vaporized by using the heating device 21 in the target cavity 2, and the recycling and processing cavity 1 is connected to the vacuum pump through at least the first interface 11 to evacuate the recycling and processing cavity 1 during the first period, so that the recycling and processing cavity 1 and the interconnected cavity of the target cavity 2 are kept in a vacuum state;

[0100] S32, then in the second period of time, the target cavity 1 is connected through at least the first interface 11 to receive the dangerous substances discharged from the target cavity 1;

[0101] S33, after condensation treatment by the condensation device 15 in the recovery processing chamber 1, the dangerous substances are collected on the condensation device 15;

[0102] S34, introducing a treatment agent through the second interface 13 of the recovery and treatment chamber 1 to achieve treatment of the hazardous substances.

[0103] In addition, if Figure 8 As shown, in some preferred embodiments, when the controller participates in the overall control, the overall efficiency of the recycling process can be further improved. The specific operation steps are as follows:

[0104] S41, based on the fifth operation instruction issued by the controller, controlling the heating device 21 in the target cavity 2 to heat and vaporize the dangerous substance, and based on the first operation instruction issued by the controller, the first isolation control valve 12 switches the first interface 11 to connect to the vacuum pump to perform a vacuum operation on the recovery and processing cavity 1;

[0105] S42, based on the second operation instruction issued by the controller, the first isolation control valve 12 switches the first interface 11 to connect to the target cavity 2, thereby completing the introduction of the dangerous object;

[0106] S43, based on the third operation instruction issued by the controller, the condensation device 15 performs condensation processing to collect dangerous substances;

[0107] S44. Based on the fourth operation instruction issued by the controller, the second isolation control valve 14 controls the second interface 13 to allow the treatment agent to pass through to treat the collected hazardous substances.

[0108] In some preferred embodiments, the hazardous material recovery and treatment method described in any of the above embodiments can use the vacuum gauge 18 to monitor the vacuum degree in the recovery and treatment chamber 1 in real time, and feed back to the controller, so that the recovery and treatment chamber 1 meets the vacuum degree requirement through the control of the controller.

[0109] The following will be further explained in conjunction with specific application examples implemented for different hazardous product recovery and treatment processes. It should be noted that before the recovery and treatment is carried out, a first interface 11 of the recovery and treatment chamber 1 can be connected to the target chamber 2, and a vacuum pump can be connected through another first interface 11 to perform a vacuum operation, and the vacuum gauge 18 is combined to monitor the vacuum value in real time, and the controller is used to control the vacuum operation process, so that the entire chamber enters a vacuum state, and then the first isolation control valve 12 is opened, and the recovery and treatment chamber 1 and the target chamber 2 are in a vacuum interconnected state.

[0110] Application Example 1

[0111] For dangerous substances such as phosphorus products (such as white phosphorus), the specific recovery and treatment process is as follows:

[0112] First, in addition to the first isolation control valve 12 (exemplarily, as shown in FIG. 1 ) on the first interface 11 connected to the target cavity 2 Figure 1 The first isolation control valve 12 of the other first interfaces 11 (exemplarily, as shown in the upper right position) is in an open state. Figure 1 The lower left position shown in FIG. 1 ), the second isolation control valve 14 of the second interface 13 (exemplarily, as shown in FIG. 1 ). Figure 1 The target cavity 2 is heated to 100°C-200°C, and the dangerous phosphorus in the target cavity 2 is heated and vaporized and gradually enters the recovery and processing cavity 1. At the same time, the coolant outlet 16b is closed, and the coolant inlet 16a is opened. A refrigerant (for example, liquid nitrogen) is introduced into the condensing device 15 of the recovery and processing cavity 1. The air pressure value of the recovery and processing cavity 1 will be very poor at the beginning (for example, 1E-3Torr). This process can last for several days (for example, 1-3 days) until the air pressure value in the recovery and processing cavity 1 reaches 5E-7Torr or lower, indicating that the phosphorus in the recovery and processing cavity 1 has been completely adsorbed and recovered, and the adsorption of phosphorus by the condensing device 15 is completed;

[0113] Then, the first isolation control valve 12 on the first upper right interface 11 connected to the target chamber 2 is closed, and the refrigerant is emptied. The coolant inlet 16a and the coolant outlet 16b are closed, and the second isolation control valve 14 on the second upper left interface 13 connected to nitrogen is opened to introduce nitrogen until the recovery chamber 1 reaches 1.01325×10 51 standard atmosphere of Pascal (Pa), exemplarily this process can last for 25min-35min, then control the second isolation control valve 14 of the second upper left interface 13 to switch to a channel for injecting water (such as pure water), or directly open the water channel through the second isolation control valve 14 of the second lower right interface 13, exemplarily this process can last for 25min-35min, until the recovery processing chamber 1 is filled, close the second isolation control valve 14 of the second upper left interface 13, the second isolation control valve 14 of the second upper left interface 13 or the second isolation control valve 14 of the second lower right interface 13, during which nitrogen is discharged, and phosphorus in the cavity is dissolved in water or deposited in water in solid form, thereby avoiding safety accidents such as spontaneous combustion of phosphorus or explosion when it comes into contact with air when the cavity is opened, thereby optimizing the performance of process equipment and the safety of process operation.

[0114] Application Example 2

[0115] Another implementation method can be used to recover the dangerous substances in phosphorus products. The specific operation process is as follows:

[0116] First, in addition to the first isolation control valve 12 (exemplarily, as shown in FIG. 1 ) on the first interface 11 connected to the target cavity 2 Figure 1 The first isolation control valve 12 of the other first interfaces 11 (exemplarily, as shown in the upper right position) is in an open state. Figure 1 The lower left position shown in FIG. 1 ), the second isolation control valve 14 of the second interface 13 (exemplarily, as shown in FIG. 1 ). Figure 1 The target cavity 2 is heated to 150°C-190°C, and the dangerous phosphorus in the target cavity 2 is heated and vaporized and gradually enters the recovery and processing cavity 1. At the same time, the coolant outlet 16b is closed, and the coolant inlet 16a is opened. A refrigerant (for example, liquid nitrogen) is introduced into the condensing device 15 of the recovery and processing cavity 1. The air pressure value of the recovery and processing cavity 1 will be very poor at the beginning (for example, 1E-3Torr). This process can last for several days (for example, 1-3 days) until the air pressure value in the recovery and processing cavity 1 reaches 5E-7Torr or lower, indicating that the phosphorus in the recovery and processing cavity 1 has been completely adsorbed and recovered, and the adsorption of phosphorus by the condensing device 15 is completed;

[0117] Then, the first isolation control valve 12 on the first upper right interface 11 connected to the target cavity 2 is closed, and the refrigerant is emptied, the coolant inlet 16a and the coolant outlet 16b are closed, and the second isolation control valve 14 on the second upper left interface 13 connected to the nitrogen is opened to introduce hot nitrogen (for example, nitrogen heated to 90°C) until the recovery and processing cavity 1 reaches 1 to 1.1 standard atmospheric pressures. Exemplarily, this process can last for 25 minutes to 35 minutes to achieve heating and purging of the phosphorus product. In this process, the phosphorus will be heated again and become gaseous and blown away by the nitrogen, which can be blown to the water channel controlled by the second isolation control valve 14 on the second upper left interface 13, or the water channel controlled by the second isolation control valve 14 on the second lower right interface 13, so that the phosphorus in the cavity is dissolved in the water or deposited in the water in solid form.

[0118] Application Example 3

[0119] For dangerous selenium products, the specific recovery and treatment process is as follows:

[0120] First, in addition to the first isolation control valve 12 (exemplarily, as shown in FIG. 1 ) on the first interface 11 connected to the target cavity 2 Figure 1 The first isolation control valve 12 of the other first interfaces 11 (exemplarily, as shown in the upper right position) is in an open state. Figure 1 The lower left position shown in FIG. 1 ), the second isolation control valve 14 of the second interface 13 (exemplarily, as shown in FIG. 1 ). Figure 1 The upper left and lower right positions shown in the figure are both in a closed state, the target cavity 2 is heated to 120°C-180°C, and the dangerous selenium in the target cavity 2 is heated and vaporized and gradually enters the recovery and processing cavity 1. At the same time, the coolant outlet 16b is closed, and the coolant inlet 16a is opened. A refrigerant (for example, liquid nitrogen) is introduced into the condensing device 15 of the recovery and processing cavity 1. The air pressure value of the recovery and processing cavity 1 will be very poor at the beginning (for example, 1E-3Torr). This process can last for several days (for example, 1-3 days) until the air pressure value in the recovery and processing cavity 1 reaches 5E-7Torr or lower, indicating that the selenium in the recovery and processing cavity 1 has been completely adsorbed and recovered, and the adsorption of selenium by the condensing device 15 is completed;

[0121] Then, the first isolation control valve 12 on the first upper right interface 11 connected to the target cavity 2 is closed, and the refrigerant is emptied, the coolant inlet 16a and the coolant outlet 16b are closed, and the second isolation control valve 14 of the second upper left interface 13 connected to nitrogen is opened to introduce nitrogen until the recovery and processing cavity 1 reaches 1 standard atmospheric pressure. This process can be sustained for 25 minutes to 35 minutes. Subsequently, the second isolation control valve 14 of the second upper left interface 13 is controlled to switch to the channel for injecting ethanol solution, or the ethanol solution channel is opened directly through the second isolation control valve 14 of the second lower right interface 13. This process can be sustained for 25 minutes to 35 minutes. Continue for 25min-35min until the recovery processing chamber 1 is full, close the second isolation control valve 14 of the upper left second interface 13, the second isolation control valve 14 of the upper left second interface 13 or the second isolation control valve 14 of the lower right second interface 13, during which the nitrogen is discharged and the selenium in the chamber is dissolved in the ethanol solution. Since the vapor pressure of selenium itself is very large, after selenium is used as material growth in the chamber during the process, the entire chamber will be heavily evaporated by selenium. Therefore, collecting and processing selenium products in this way can eliminate the pollution from selenium and restore the ability of the chamber to grow other compounds, thereby optimizing the performance of process equipment and operating efficiency.

[0122] Application Example 4

[0123] For the dangerous substances of sulfur products, the specific recovery and treatment process is as follows:

[0124] First, in addition to the first isolation control valve 12 (exemplarily, as shown in FIG. 1 ) on the first interface 11 connected to the target cavity 2 Figure 1 The first isolation control valve 12 of the other first interfaces 11 (exemplarily, as shown in the upper right position) is in an open state. Figure 1 The lower left position shown in FIG. 1 ), the second isolation control valve 14 of the second interface 13 (exemplarily, as shown in FIG. 1 ). Figure 1 The upper left and lower right positions shown in the figure are both in a closed state, the target cavity 2 is heated to 100°C-160°C, and the dangerous sulfur in the target cavity 2 is heated and vaporized and gradually enters the recovery and processing cavity 1. At the same time, the coolant outlet 16b is closed, and the coolant inlet 16a is opened. A refrigerant (for example, liquid nitrogen) is introduced into the condensing device 15 of the recovery and processing cavity 1. The gas pressure value of the recovery and processing cavity 1 will be very poor at the beginning (for example, 1E-3Torr). This process can last for several days (for example, 1-3 days) until the gas pressure value in the recovery and processing cavity 1 reaches 5E-7Torr or lower, indicating that the sulfur in the recovery and processing cavity 1 has been completely adsorbed and recovered, and the adsorption of sulfur by the condensing device 15 is completed;

[0125] Then, the first isolation control valve 12 on the first upper right interface 11 connected to the target chamber 2 is closed, and the refrigerant is emptied, the coolant inlet 16a and the coolant outlet 16b are closed, and the second isolation control valve 14 on the second upper left interface 13 connected to nitrogen is opened to introduce nitrogen until the recovery and processing chamber 1 reaches 1 standard atmospheric pressure. For example, this process can last for 25 minutes to 35 minutes, and then the second isolation control valve 14 on the second upper left interface 13 is controlled to switch to the channel for injecting carbon disulfide liquid, or directly open the second isolation control valve 14 on the second lower right interface 13. The carbon disulfide liquid channel is opened. Exemplarily, this process can last for 25 minutes to 35 minutes until the recovery processing chamber 1 is filled. The second isolation control valve 14 of the upper left second interface 13, the second isolation control valve 14 of the upper left second interface 13 or the second isolation control valve 14 of the lower right second interface 13 are closed. During this period, the nitrogen is discharged and the sulfur in the chamber is dissolved in the carbon disulfide liquid. Such treatment can also avoid the pollution of sulfur directly spreading into the air, and at the same time, it can also eliminate the pollution of sulfur to the chamber equipment and restore the ability of the chamber to grow other compounds, thereby optimizing the performance of the process equipment and the operating efficiency.

[0126] The hazardous material recovery and treatment scheme described in the embodiment of the present application provides a recovery and treatment scheme that can both recover and collect and reduce the risk of treatment, maintains a closed vacuum environment connecting the target cavity of hazardous materials and the recovery and treatment cavity, firstly heats and vaporizes the accumulated hazardous materials in the target cavity through a heating device, and then collects and recovers them through a condensing device in the recovery and treatment cavity, and then introduces a corresponding treatment agent through the control of an isolation control valve, thereby achieving risk reduction treatment of process hazardous products, thereby effectively solving safety threats such as spontaneous combustion, explosion or air pollution, and also optimizing the safety performance of process equipment and equipment maintenance performance, especially vacuum system equipment with vacuum or ultra-high vacuum requirements, such as molecular beam epitaxy systems, and the present hazardous material recovery and treatment solution is generally applicable to the recovery and treatment of various industrial hazardous products, and the device and treatment method also have the advantages of simple structural design, easy implementation, and low cost. For example, in the case where the existing vacuum system has a process reaction cavity and a cold shield collection cavity, it is only necessary to set the cavity interface, isolation control valve, vacuum gauge position and required pipelines, that is, the scheme can be improved, thereby achieving both the safe treatment effect of hazardous products and the equipment process optimization under the premise of saving operating costs.

[0127] It should be understood that the above embodiments are exemplary and are not intended to include all possible implementations included in the claims. Various modifications and changes may be made on the basis of the above embodiments without departing from the scope of the present disclosure. Similarly, the various technical features of the above embodiments may be arbitrarily combined to form other embodiments of the present invention that may not be explicitly described. Therefore, the above embodiments only express several implementations of the present invention and do not limit the scope of protection of the patent of the present invention.

Claims

1. A hazardous material recovery and treatment device, characterized in that: The device is used to connect with the target cavity to receive and process the dangerous substances flowing after being heated in the target cavity. The device includes a recovery and processing cavity, the recovery and processing cavity has a sealable chamber, and the recovery and processing cavity includes a condensation device, at least one first interface and at least one second interface, wherein: The at least one first interface is used to connect to a vacuum pump to evacuate the sealable chamber during a first period; and to connect to a target cavity during a second period to receive dangerous objects discharged from the target cavity; the first period is different from the second period; The at least one second interface is used for introducing a treatment agent, for introducing the treatment agent for treating the hazardous substance, and for discharging the treatment agent after the treatment.

2. The hazardous material recovery and treatment device according to claim 1, characterized in that: A first isolation control valve is provided on each of the first interfaces; the first isolation control valve is used to connect or disconnect the first interface with the target cavity, or to connect or disconnect the first interface with the vacuum pump; and / or Each of the second interfaces is provided with a second isolation control valve, and the second isolation control valve is used to connect or shut off the channel through which the second interface enters the treatment agent.

3. The hazardous material recovery and treatment device according to claim 1, characterized in that: The first interface is used to connect to the target cavity and the vacuum pump respectively at different time periods; or, there are multiple first interfaces, wherein at least one of the multiple first interfaces is connected to the target cavity, and at least one of the multiple first interfaces is connected to the vacuum pump.

4. The hazardous material recovery and treatment device according to claim 1, characterized in that: The condensing device is a cold screen device, in which a cooling pipe is arranged. The coolant inlet of the cooling pipe extends into one end of the cold screen of the cold screen device, and the coolant outlet extends out from the other end of the cold screen.

5. The hazardous material recovery and treatment device according to claim 4, characterized in that: The cooling pipes are evenly laid inside the cold shield and are arranged close to the outer wall of the cold shield.

6. The hazardous material recovery and treatment device according to claim 4, characterized in that: The cooling pipeline is arranged in a Z-shape or an S-shape.

7. The hazardous material recovery and treatment device according to claim 4, characterized in that: The outer wall of the cold shield device has an uneven surface.

8. The hazardous material recovery and treatment device according to claim 1, characterized in that: There are multiple first interfaces, each of which corresponds to and is connected to multiple target cavities, and the dangerous objects in each of the target cavities are the same or different; and / or There are multiple second interfaces, and the processing agents introduced into each second interface are the same or different.

9. The hazardous material recovery and treatment device according to claim 1, characterized in that: The recycling processing chamber is also provided with a vacuum gauge for real-time monitoring of the vacuum degree in the recycling processing chamber.

10. The hazardous material recovery and treatment device according to any one of claims 1 to 9, characterized in that: The condensing device of the recovery processing chamber, the first isolation control valve, the second isolation control valve and the vacuum gauge are all connected to a controller.

11. A vacuum processing device, characterized in that: It comprises the hazardous material recovery and processing device according to any one of claims 1 to 10 and the target cavity.

12. The vacuum processing equipment according to claim 11, characterized in that: A heating device is provided in the target cavity, and the heating device is a baking device that surrounds and covers the outer wall of the target cavity, and is used to heat and vaporize the dangerous objects in the target cavity.

13. The vacuum processing equipment according to claim 11, characterized in that The hazardous substances in the target cavity include phosphorus products, selenium products or sulfur products.

14. The vacuum processing equipment according to any one of claims 11 to 13, characterized in that: The heating device of the target cavity is also connected to the controller.

15. A method for recovering and treating hazardous materials, characterized in that: The method comprises: During the first period, the recycling processing chamber is connected to a vacuum pump through at least a first interface to evacuate the recycling processing chamber; During the second period, the target cavity is connected via the at least first interface to receive the dangerous substances discharged from the target cavity; After being condensed by the condensation device of the recycling and processing chamber, a treatment agent is introduced through the second interface of the recycling and processing chamber to achieve treatment of the dangerous substances; Wherein, the recycling processing chamber has a sealable chamber.

16. The hazardous material recovery and treatment device according to claim 15, characterized in that: A first isolation control valve is provided on each of the first interfaces; the first isolation control valve is used to connect or disconnect the first interface with the target cavity, or to connect or disconnect the first interface with the vacuum pump; and / or Each of the second interfaces is provided with a second isolation control valve, and the second isolation control valve is used to connect or shut off the channel through which the second interface enters the treatment agent.

17. The method for recovering and treating hazardous materials according to claim 15, characterized in that: The vacuum gauge is used to monitor the vacuum degree in the recycling processing chamber in real time and feeds back to the controller, and the controller controls the recycling processing chamber to meet the vacuum degree requirement.

18. The method for recovering and treating hazardous materials according to any one of claims 16 or 17, characterized in that: include: Based on a first operation instruction issued by the controller, the first isolation control valve switches the first interface to connect to the vacuum pump to perform a vacuum operation on the recovery processing chamber; Based on the second operation instruction issued by the controller, the first isolation control valve switches the first interface to connect to the target cavity, thereby completing the introduction of the dangerous object; Based on the third operation instruction issued by the controller, the condensation device performs condensation processing to collect the dangerous objects; Based on the fourth operation instruction issued by the controller, the second isolation control valve controls the second interface to allow a treatment agent to pass through to treat the collected hazardous substances.

19. A method for recovering and treating hazardous materials, characterized in that: The method comprises: The dangerous substance is heated and vaporized by using a heating device in the target cavity, and the recycling cavity is connected to a vacuum pump through at least a first interface to evacuate the recycling cavity during a first period of time, so that the recycling cavity and the interconnected cavity of the target cavity are kept in a vacuum state; Then, in a second period of time, the target cavity is connected through the at least first interface to receive the dangerous substances discharged from the target cavity; After being condensed by the condensation device in the recovery processing chamber, the hazardous substances are collected on the condensation device; Then, a treatment agent is introduced through the second interface of the recovery and treatment chamber to achieve the treatment of the dangerous substances.

20. The method for recovering and treating hazardous materials according to claim 19, characterized in that: The method comprises: Based on the fifth operation instruction issued by the controller, the heating device in the target cavity is controlled to heat and vaporize the dangerous substance, and based on the first operation instruction issued by the controller, the first isolation control valve switches the first interface to connect to the vacuum pump to perform a vacuum operation on the recovery and processing cavity; Based on the second operation instruction issued by the controller, the first isolation control valve switches the first interface to connect to the target cavity, thereby completing the introduction of the dangerous object; Based on the third operation instruction issued by the controller, the condensation device performs condensation processing to collect the dangerous objects; Based on the fourth operation instruction issued by the controller, the second isolation control valve controls the second interface to allow a treatment agent to pass through to treat the collected hazardous substances.

21. The method for recovering and treating hazardous materials according to claim 19 or 20, characterized in that: When the hazardous substance is a phosphorus product, the method comprises: The target cavity is heated to 100° C.-200° C., and a refrigerant is introduced into the condensing device of the recovery and processing cavity at the same time, until the gas pressure in the recovery and processing cavity is no more than 5E-7 Torr, and the adsorption of the phosphorus product by the condensing device is completed; Then, the second isolation control valve is used to control the second interface to allow nitrogen to enter until the recovery and processing chamber reaches 1 standard atmospheric pressure, and then the second interface is controlled to switch to injecting water until the recovery and processing chamber is filled.

22. The method for recovering and treating hazardous materials according to claim 19 or 20, characterized in that: When the hazardous substance is a phosphorus product, the method comprises: The target cavity is heated to 150° C.-190° C., and a refrigerant is introduced into the condensing device of the recovery and processing cavity at the same time, until the gas pressure in the recovery and processing cavity is no more than 5E-7 Torr, and the adsorption of the phosphorus product by the condensing device is completed; Then, the second isolation control valve is used to control the second interface to introduce hot nitrogen until the recovery processing chamber reaches 1.1 standard atmospheric pressures, thereby achieving heating and purging of the phosphorus product, and the second interface is controlled to switch to a water pipeline.

23. The method for recovering and treating hazardous materials according to claim 19 or 20, characterized in that: When the hazardous substance is a selenium product, the method comprises: The target cavity is heated to 120° C.-180° C., and a refrigerant is introduced into the condensing device of the recycling and processing cavity at the same time, until the air pressure in the recycling and processing cavity is no more than 5E-7 Torr, and the condensing device completes the adsorption of the selenium product; The second isolation control valve is then used to control the second interface to allow nitrogen to enter until the recovery processing chamber reaches 1 standard atmospheric pressure, and then the second interface is controlled to switch to injecting ethanol solution until the recovery processing chamber is filled.

24. The method for recovering and treating hazardous materials according to claim 19 or 20, characterized in that: When the hazardous substance is a sulfur product, the method comprises: The target cavity is heated to 100° C.-160° C., and a refrigerant is introduced into the condensing device of the recycling and processing cavity at the same time, until the air pressure value in the recycling and processing cavity is no more than 5E-7 Torr, and the condensing device completes the adsorption of the selenium product; The second isolation control valve is then used to control the second interface to allow nitrogen to enter until the recovery and processing chamber reaches 1 standard atmospheric pressure, and then the second interface is controlled to switch to injecting carbon disulfide liquid until the recovery and processing chamber is filled.

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